CN105699709A - Testing and aging fixture for single-chip laser diode - Google Patents

Testing and aging fixture for single-chip laser diode Download PDF

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Publication number
CN105699709A
CN105699709A CN201610149379.1A CN201610149379A CN105699709A CN 105699709 A CN105699709 A CN 105699709A CN 201610149379 A CN201610149379 A CN 201610149379A CN 105699709 A CN105699709 A CN 105699709A
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CN
China
Prior art keywords
positioning
laser diode
base
single
panel
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CN201610149379.1A
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Chinese (zh)
Inventor
孔金霞
祁琼
朱凌妮
刘素平
马骁宇
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中国科学院半导体研究所
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Priority to CN201610149379.1A priority Critical patent/CN105699709A/en
Publication of CN105699709A publication Critical patent/CN105699709A/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0207Details of measuring devices
    • G01M11/0214Details of devices holding the object to be tested
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0425Test clips, e.g. for IC's

Abstract

The invention discloses a testing and aging fixture for a single-chip laser diode, which comprises a base, a control board, two supporting blocks, and a fixing pressing block, wherein the upper surface of the base is provided with a positioning groove and two positioning columns, and the base is also provided with two positioning blocks and a fastening screw hole; the control board is likely door-shaped, one upper side is symmetrically provided with two positioning holes, the two positioning holes are matched with the two positioning columns on the base, the other end of the control board is a wiring column, the lower surface of the control board is provided with two convex cuboid pressing blocks, the lower surface of the control board is also provided with two grooves, and the pressing blocks and the wiring column are connected; the two supporting blocks are fixed at one side of a positioning block on the base; and the fixing pressing block is Z-shaped, an upper arm and a lower arm are provided with fastening screw holes respectively, the fastening screw hole in the lower arm is used for fixing the fixing pressing block in the fastening screw hole in the base via a screw, the fastening screw hole in the upper arm is used for pressing the control board via a screw, and thus, a role of fixing the single-chip laser diode is played.

Description

单管芯激光二极管测试老化夹具 Single die laser diode aging test fixture

技术领域 FIELD

[0001]本发明涉及半导体激光二极管技术领域,特别是指一种单管芯激光二极管测试老化的夹具。 [0001] The present invention relates to a technical field of semiconductor laser diodes, particularly to a single die of the laser diode aging test fixture.

背景技术 Background technique

[0002]光电性能测试及寿命考核是研制半导体激光二极管过程中非常关键的一步,也是检验工艺过程是否合格的手段。 [0002] Optical performance test and life assessment is to develop semiconductor laser diode during a very critical step is the process of eligibility means test. 大功率单管芯激光二极管应用非常广泛,比如用作栗浦源、材料加工、医疗设备、红外照明等。 High-power laser diode single die wide range of applications, such as Li Pu source, material processing, medical devices, infrared lighting. 单管芯激光二极管体积小,尤其是烧结在陶瓷过渡热沉上的单管芯激光二极管体积更小,不方便固定,必须将其固定在经过特殊设计的夹具上方可进行性能测试和寿命考核。 Single die small volume of the laser diode, in particular a sintered single die on a ceramic volume of the laser diode submount is less convenient fixed, it must be secured to the specially designed fixture before the life and performance evaluation tests.

发明内容 SUMMARY

[0003]本发明的目的在于,提供一种单管芯激光二极管的测试老化夹具,该夹具机动灵活,可以固定在测试设备上进行性能测试,测试完毕,可以直接将其固定在老化台上进行老化,减少了装卸器件的工作量,尤其对于不能进行实时监测的老化设备,大大提高老化考核的工作效率,同时,该夹具对器件的定位准确,固定牢靠,器件底部与夹具贴合紧密,可以提高长期老化的安全性和可靠性。 [0003] The object of the present invention is to provide a single die of the laser diode aging test fixture which flexible, performance may be fixed on a test device, the test is completed, which can be fixed directly on the aging stage aging, reduce the workload of handling the device, especially for aging equipment can not be monitored in real time, greatly improve the efficiency of aging assessment, at the same time, the jig positioning device accurate, stable fixation, the bottom of the device with clamps fit tightly, you can improve the safety and reliability of long-term aging.

[0004]为了实现上述目的,本发明提供一种用于单管芯激光二极管的测试老化夹具,包括: [0004] To achieve the above object, the present invention provides a single die aging test fixture for a laser diode, comprising:

[0005] —底座,其上表面有一定位槽和两个定位柱,该定位槽用于对单管芯激光二极管进行定位,该底座上同时具有两个定位块和一紧固螺钉孔; [0005] - a base, which has an upper surface and two positioning grooves positioning post, a slot for the positioning of a single laser diode die positioning, while having two positioning blocks and a fastening screw hole on the base;

[0006] 一控制板,所述控制板概似一门形,该控制板上面的一侧对称开有两个定位孔,该两个定位孔与所述底座上的两个定位柱相匹配,所述控制板的另一端为接线柱,用于给单管芯激光二极管供电,所述控制板的下表面有两个凸起的长方体压块,用于固定所述单管芯激光二极管,所述控制板的下表面还开有两个凹槽,用于放置导线,将所述压块与所述接线柱相连; [0006] a control board, the control board Likelihood a shaped, one side of the upper panel opening has two symmetrically positioned holes, and the two positioning holes of the two positioning posts on the base match the other end of the terminal board is used to supply a single laser diode dies, the lower surface of the panel projections of two rectangular parallelepiped compact, single die for fixing the laser diode, the the lower surface of said control panel also has two recesses opened for placing a wire, the terminal connected to the compact;

[0007]两个支撑块,固定在所述底座上的定位块的一侧,用于支撑控制板; [0007] The two support blocks, one side of the positioning block fixed on the base, for supporting a control panel;

[0008] —固定压块,所述固定压块为Z形,上下两臂上各开有紧固螺钉孔,下臂的紧固螺钉孔用于将所述固定压块通过螺钉固定在底座上的紧固螺钉孔上,上臂的紧固螺钉孔通过螺钉压紧控制板,以起到固定单管芯激光二极管的作用。 [0008] - fixing screws on the clamps, fixed to the Z-shaped compact, the opening and fastening the upper and lower arms screw hole, a fastening screw hole for the lower arm through the base fixing compact fastening the screw hole, a fastening screw hole of the upper arm by a screw compression panel, to act as a single fixed laser diode die.

[0009]本发明的有益效果是,该夹具机动灵活,可以固定在测试设备上进行性能测试,测试完毕,可以直接将其固定在老化台上进行老化,减少了装卸器件的工作量,尤其对于不能进行实时监测的老化设备,大大提高老化考核的工作效率,同时,该夹具对器件的定位准确,固定牢靠,器件底部与夹具贴合紧密,可以提高长期老化的安全性和可靠性。 [0009] Advantageous effects of the present invention is that the flexible clamp can be fixed performance on a test device, the test is completed, which can be fixed directly subjected to aging in the aging stage, reducing the workload of the handling device, particularly for aging equipment can not be monitored in real time, greatly improve the efficiency of aging assessment, at the same time, the jig positioning device accurate, stable fixation, the bottom of the device with clamps fit closely to improve the security and reliability of long-term aging.

附图说明 BRIEF DESCRIPTION

[0010]为使本发明的目的、技术方案和优点更加清楚明白,以下结合具体实施例,并参照附图,对本发明作进一步的详细说明,其中: [0010] The object of the present invention, the technical solution and merits thereof more apparent hereinafter in conjunction with specific embodiments, and with reference to the accompanying drawings, the present invention will be described in further detail, in which:

[0011 ]图1是采用过渡热沉或热沉封装的单管芯激光二极管结构示意图; [0011] Figure 1 is a schematic view of a core structure of a single laser diode submount tube package or heat sink;

[0012]图2是本发明中底板的结构示意图; [0012] FIG. 2 is a schematic view of the base plate of the present invention;

[0013]图3是本发明中控制板的结构示意图; [0013] FIG. 3 is a schematic view of the control panel of the present invention;

[0014]图4是本发明中固定压块的结构示意图; [0014] FIG. 4 is a structural diagram of the present invention is compact fixed;

[0015]图5是本发明用于单管芯激光二极管测试老化夹具组装后的结构示意图的主视图。 [0015] FIG. 5 is a schematic diagram of the structure of the present invention is a front view of a single die after the laser diode aging test fixture assembly.

[0016]图6是本发明用于单管芯激光二极管测试老化夹具组装后的结构示意图的左视图。 [0016] FIG. 6 is a schematic diagram of the structure of the present invention, after a single laser diode dies aging test fixture assembly left side view.

具体实施方式 Detailed ways

[0017]请参阅图1至图6所示,本发明提供一种用于单管芯激光二极管的测试老化夹具,所述单管芯激光二极管I包括(参见图1): 一过渡热沉或热沉11,一单管芯激光二极管芯片12, [0017] Please refer to FIG 1 to FIG. 6, the present invention provides a single die aging test fixture for a laser diode, a single die comprising a laser diode I (see Figure 1): a submount or the heat sink 11, a single laser diode chip 12 die,

[0018]所述测试老化夹具包括: [0018] The aging test fixture comprising:

[0019] —底座2,为金属材质,要求底座2的下表面尽量光滑平整,以便使用时与测试台或老化台紧密接触,达到良好散热的目的,所述底座2的上表面的一端有一个定位槽21和两个定位柱22,定位槽21用于对单管芯激光二极管I进行定位,所述底座2的另一端有两个定位块24,该两定位块24对两支撑块5进行定位,所述底座2上定位块24所在的一端同时开有一紧固螺钉孔23,所述紧固螺钉孔23用于通过螺钉对固定压块4进行固定; [0019] - a base 2, made of metal, the lower surface of the base 2 of the required smooth as possible, so that when used in close contact with the test bench or table aging, good heat dissipation to achieve the purpose, one end surface of the base 2 is provided with a positioning grooves 21 and two positioning posts 22, the positioning groove 21 for a single die of the laser diode I positioned, the other end of the base 2 is provided with two positioning blocks 24, two positioning blocks 24 of the two support blocks 5 positioned on the base end 2 while positioning block 24 where the opening 23 has a fastening screw hole, the fastening screw holes 23 for fixing screws 4 fixed compact;

[0020]控制板3,所述控制板3概似一门形,该控制板3上面的一侧对称开有两个定位孔33,该两个定位孔33与所述底座2上的两个定位柱22相匹配,将底座2上的两个定位柱22插入所述控制板3上的两个定位孔33,即可起到对控制板3进行定位的作用,所述控制板3的另一端为两个接线柱34,用于给激光二极管I供电,所述控制板3的下表面有两个凸起的长方体压块31,用于固定所述单管芯激光二极管I,所述控制板3的下表面还开有两个凹槽32,用于放置导线,所述导线将所述压块31与所述接线柱34相连;控制板3主体部分为绝缘材料,接线柱34和长方体压块31为金属材料。 [0020] The control board 3, the control board 3 Likelihood a shape, two positioning holes 33 of the upper side of the panel 3 open symmetrically, two on two of the two positioning holes 33 and the base positioning post 22 matches, 22 inserted into the two positioning posts on the base 2 of the two positioning holes 333 on the control board, the control board 3 can play a role of positioning the other board 3 one end of the two terminals 34 for power supply to the laser diode I, the lower surface 3 of the board has two projections 31 of a rectangular parallelepiped compact, single die for fixing the laser diode I, the control the lower surface of the plate 3 two grooves 32 are also opened for placing the wires that the compact 31 is connected to the terminal 34; panel body portion 3 an insulating material, terminals 34, and a rectangular parallelepiped 31 is a compact metal material.

[0021]两个支撑块5,材料为塑料或橡胶,采用塑料或橡胶材料的主要目的是利用材料的弹性,达到方便取放和紧固控制板3的作用,所述两支撑块5固定在所述底座2上的两个定位块24的一侧,用于支撑控制板3,两个支撑块5用胶固定在底座2上定位块24的一侧; [0021] The two support blocks 5, a plastic material or rubber, plastic or rubber material is the main purpose of using an elastic material, to facilitate the action to take place and the fastening of the control board 3, a support block 5 is fixed in two two side positioning block 24 on the base 2, for supporting the control board 3, two support block 5 is fixed with glue on the base 2 is positioned at the side of block 24;

[0022]固定压块4,所述固定压块为Z形,上下两臂上各开有紧固螺钉孔41、42,下臂的紧固螺钉孔42用于将所述固定压块4通过螺钉固定在底座2上的紧固螺钉孔23上,上臂的紧固螺钉孔41通过螺钉压紧控制板3,以起到固定单管芯激光二极管I的作用。 [0022] compact fixed 4, the Z-shaped fixing clamps, each clamp screw hole 41 opened on the upper and lower arms, the lower arm of the clamp screw hole 42 for fixing the pressing block 4 by fastening screws to the screw holes 23 of the base 2, the clamp screw hole 41 of the upper arm by a screw pressing panel 3, to act as a single fixed die I of the laser diode.

[0023]请再参阅图1至图6所示,本发明单管芯激光二极管测试老化夹具的使用方法如下: [0023] Please refer to FIG. 1 to FIG. 6, a method using a single laser diode dies aging test jig of the present invention are as follows:

[0024]首先,将待测试老化的单管芯激光二极管I放入底座2上的定位槽21内,所述单管芯激光二极管I的背光一侧和右侧面紧贴定位槽21的侧壁,轻轻压下控制板3使其下表面凸起的长方体压块31,与单管芯激光二极管I的过渡热沉或热沉11轻轻接触。 Single die laser diode [0024] First, the aging to be tested into the positioning groove I 2 on the base 21, the back side of a single die and the right side surface of the laser diode I positioned against the side 21 of the groove wall, slightly depressing the convex surface of the lower panel 3 so that a rectangular parallelepiped compact 31, a single die with transient thermal sink I or the laser diode 11 lightly contact the heat sink.

[0025]其次,通过螺钉压紧控制板3,以起到固定单管芯激光二极管I的作用,然后将该夹具放在测试或老化台上即可对单管芯激光二极管I进行测试或老化。 [0025] Next, the pressing panel 3 by means of screws, to act as a single fixed die I of the laser diode, and then placed in the fixture test stand to aging or to a single die or a laser diode aging test I .

[0026]所述的单管芯激光二极管测试老化夹具具有结构简单、加工容易、取放方便、安全可靠等特点,可以有效保证单管芯激光二极管测试和老化的可靠性。 [0026] The single die laser diode aging test fixture has a simple structure, easy processing, pick and place convenient, safe and reliable, can effectively guarantee the reliability of a single die and laser diode aging test.

[0027]以上所述的具体实施例,对本发明的目的、技术方案和有益效果进行了进一步的详细说明,应理解的是,以上所述仅为本发明具体实施例,并不限于本发明,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均包含在本发明的保护范围之内。 [0027] The foregoing specific embodiments of the object, technical solutions, and advantages of the invention will be further described in detail, it should be understood that the above are only particular embodiments of the present invention, the present invention is not limited to, within the spirit and principle of the present invention, any modifications, equivalent replacements, improvements, etc., are included within the scope of the present invention.

Claims (2)

1.一种用于单管芯激光二极管的测试老化夹具,包括: 一底座,其上表面有一定位槽和两个定位柱,该定位槽用于对单管芯激光二极管进行定位,该底座上同时具有两个定位块和一紧固螺钉孔; 一控制板,所述控制板概似一门形,该控制板上面的一侧对称开有两个定位孔,该两个定位孔与所述底座上的两个定位柱相匹配,所述控制板的另一端为接线柱,用于给单管芯激光二极管供电,所述控制板的下表面有两个凸起的长方体压块,用于固定所述单管芯激光二极管,所述控制板的下表面还开有两个凹槽,用于放置导线,将所述压块与所述接线柱相连; 两个支撑块,固定在所述底座上的定位块的一侧,用于支撑控制板; 一固定压块,所述固定压块为Z形,上下两臂上各开有紧固螺钉孔,下臂的紧固螺钉孔用于将所述固定压块通过螺钉固定在底座上的紧 A single die aging test fixture for a laser diode, comprising: a base having a surface on which the two positioning slots and positioning post, a slot for the positioning of a single laser diode die is positioned on the base also has two positioning blocks and a fastening screw hole; a panel, the panel Likelihood a shaped, one side of the upper panel opening has two symmetrically positioning holes, the positioning holes and the two two positioning posts on the base to match the other end of the terminal is a control panel for a single die laser diode power supply, the control panel lower surface of a rectangular parallelepiped compact two projections, for the lower surface of the fixed die of the single laser diode, the control panel also has two recesses opened for placing a wire, the terminal connected to the compact; two support blocks, secured in the positioning block on one side of the base, for supporting a control panel; fixing a compact, the compact is fixed Z-shaped, the opening and fastening the upper and lower arms screw hole, a fastening screw hole for the lower arm the compact fixing screws fixed to the base by tightening 螺钉孔上,上臂的紧固螺钉孔通过螺钉压紧控制板,以起到固定单管芯激光二极管的作用。 The screw holes, screw fastening hole of the upper arm by a screw compression panel, to act as a single fixed laser diode die.
2.如权利要求1所述的用于单管芯激光二极管的测试老化夹具,其中所述支撑块的材料为塑料或橡胶,用于支撑紧固控制板。 2. The fixture of claim aging test for a single die of the laser diode 1, wherein the support material is a plastic or a rubber block for supporting the fastening panel.
CN201610149379.1A 2016-03-16 2016-03-16 Testing and aging fixture for single-chip laser diode CN105699709A (en)

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荣宝辉 等: "大功率半导体激光器加速寿命测试方法", 《封装、测试与设备》 *

Cited By (2)

* Cited by examiner, † Cited by third party
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WO2018059965A1 (en) * 2016-09-30 2018-04-05 Forschungsverbund Berlin E.V. Optical pulse generator and method for operating an optical pulse generator
CN107643165A (en) * 2017-11-06 2018-01-30 吉林省长光瑞思激光技术有限公司 Linear array laser aging detection device

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