CN105698706A - 自动检测晶片基底二维形貌的装置 - Google Patents
自动检测晶片基底二维形貌的装置 Download PDFInfo
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- CN105698706A CN105698706A CN201410693636.9A CN201410693636A CN105698706A CN 105698706 A CN105698706 A CN 105698706A CN 201410693636 A CN201410693636 A CN 201410693636A CN 105698706 A CN105698706 A CN 105698706A
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CN105698706A true CN105698706A (zh) | 2016-06-22 |
CN105698706B CN105698706B (zh) | 2018-03-30 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109916338A (zh) * | 2019-02-28 | 2019-06-21 | 同济大学 | 晶片表面倾角变化精密测量系统 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5879104A (ja) * | 1981-11-06 | 1983-05-12 | Hitachi Ltd | パタ−ン比較検査装置 |
JPH06347230A (ja) * | 1993-06-14 | 1994-12-20 | Hitachi Ltd | 形状測定方法および装置 |
CN101029849A (zh) * | 2007-04-03 | 2007-09-05 | 中国科学院上海光学精密机械研究所 | 薄膜应力测量装置及其测量方法 |
CN102023068A (zh) * | 2010-10-10 | 2011-04-20 | 徐建康 | 薄膜应力测量设备及其测量方法 |
CN103985652A (zh) * | 2013-02-07 | 2014-08-13 | 北京智朗芯光科技有限公司 | 一种晶片应力测量装置及测量方法 |
CN103985653A (zh) * | 2013-02-07 | 2014-08-13 | 北京智朗芯光科技有限公司 | 一种晶片应力测量方法 |
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- 2014-11-26 CN CN201410693636.9A patent/CN105698706B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5879104A (ja) * | 1981-11-06 | 1983-05-12 | Hitachi Ltd | パタ−ン比較検査装置 |
JPH06347230A (ja) * | 1993-06-14 | 1994-12-20 | Hitachi Ltd | 形状測定方法および装置 |
CN101029849A (zh) * | 2007-04-03 | 2007-09-05 | 中国科学院上海光学精密机械研究所 | 薄膜应力测量装置及其测量方法 |
CN102023068A (zh) * | 2010-10-10 | 2011-04-20 | 徐建康 | 薄膜应力测量设备及其测量方法 |
CN103985652A (zh) * | 2013-02-07 | 2014-08-13 | 北京智朗芯光科技有限公司 | 一种晶片应力测量装置及测量方法 |
CN103985653A (zh) * | 2013-02-07 | 2014-08-13 | 北京智朗芯光科技有限公司 | 一种晶片应力测量方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109916338A (zh) * | 2019-02-28 | 2019-06-21 | 同济大学 | 晶片表面倾角变化精密测量系统 |
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Effective date of registration: 20230629 Address after: B701, Building 8, No. 97, Changping Road, Shahe Town, Changping District, Beijing 102200 (Changping Demonstration Park) Patentee after: Beijing Airui Haotai Information Technology Co.,Ltd. Address before: 330096 1st floor, No.8 workshop, Zhongxing Science Park, no.688 aixihu North Road, Nanchang hi tech Industrial Development Zone, Nanchang City, Jiangxi Province Patentee before: Nanchang angkun Semiconductor Equipment Co.,Ltd. |