CN105671551A - Diamond composite coating, gradient ultrafine hard alloy tool with composite coating and manufacturing method of tool - Google Patents
Diamond composite coating, gradient ultrafine hard alloy tool with composite coating and manufacturing method of tool Download PDFInfo
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- CN105671551A CN105671551A CN201610083495.8A CN201610083495A CN105671551A CN 105671551 A CN105671551 A CN 105671551A CN 201610083495 A CN201610083495 A CN 201610083495A CN 105671551 A CN105671551 A CN 105671551A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2222/00—Materials of tools or workpieces composed of metals, alloys or metal matrices
- B23B2222/28—Details of hard metal, i.e. cemented carbide
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/04—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner applied by chemical vapour deposition [CVD]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/08—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner applied by physical vapour deposition [PVD]
Abstract
The invention discloses a diamond composite coating, a gradient ultrafine hard alloy tool with the composite coating and a manufacturing method of the tool. The alloy tool is composed of a tool base body and the diamond composite coating; the tool base body is provided with a normal tissue layer, a cobalt-rich transition layer and a cobalt-poor rich cubic phase layer; the diamond composite coating comprises a Ti-Al-Si-Cr alloy layer serving as the transition layer and a diamond layer serving as a function layer; and according to the gradient ultrafine hard alloy tool with the diamond composite coating, the tool base body and the diamond composite coating of the tool are good in bonding performance, and the whole tool has the good wear-resisting temperature-resisting performance and is high in strength and impact-resisting performance; and the diamond composite coating and the tool base body are good in bonding performance, adhesive force between coating bodies of the composite coating is good, and high-temperature resistance, corrosion resistance and wear resistance of the composite coating are good.
Description
Technical field
The gradient ultra-fine cemented carbide cutter that the present invention relates to inserted tool technical field, particularly relate to a kind of diamond composite coating, there is this compound coating and its preparation method.
Background technology
Inserted tool bears great mechanical load and thermal load in the course of processing, very easily produces abrasion, thus affects its work-ing life, therefore, cutter material being carried out surface modification, it is to increase its surface property, the work-ing life improving cutter material is had important meaning by this.
TiN, TiN, TiCN or Al of thin layer is coated at carbide surface2O3Deng high hardness wear-resisting material, the toughness that the wear resistance of cutter keeps matrix good simultaneously can be improved, can significantly improve serviceability and the work-ing life of cutter material. But coating substantially hard and fragile material, and different with carbide matrix material thermal expansivity, there is stress concentration phenomenon in the interface between coating and matrix, and usual crackle easily produces and the material failure that causes to alloy internal divergence at coatingsurface.
Although diamond has the features such as high rigidity, high thermal conductivity, low-friction coefficient, chemical stability be good, but cannot effectively solve due to the bonding force between diamond coatings and Wimet, limit the application of diamond coatings in inserted tool.
Therefore, not enough for prior art, it is provided that a kind of diamond composite coating, the gradient ultra-fine cemented carbide cutter with this compound coating and its preparation method being applicable to carbide tool surface performance enhancement is very necessary to overcome prior art deficiency.
Summary of the invention
An object of the present invention be to provide a kind of there is diamond composite coating gradient ultra-fine cemented carbide cutter and its preparation method, diamond composite coating and tool matrix associativity well, cutter abrasion-proof and temperature-resistant is good, and intensity height, shock resistance is excellent.
Another object of the present invention is to avoid the deficiencies in the prior art part and a kind of diamond composite coating and its preparation method are provided, diamond composite coating and tool matrix associativity are good, the cutter abrasion-proof and temperature-resistant with this coating is good, and intensity height, shock resistance is excellent.
The above-mentioned purpose of the present invention is realized by following technique means.
A kind of gradient ultra-fine cemented carbide cutter with diamond composite coating is provided, is made up of tool matrix and the diamond composite coating being arranged on tool matrix;
Described tool matrix comprises the rich cube phase layer of normal group tissue layer, rich cobalt transition layer and poor cobalt, and the rich cube phase layer of described normal group tissue layer, rich cobalt transition layer and poor cobalt is arranged in order according to order from inside to outside;
Described diamond composite coating comprises for being deposited on the poor cobalt surperficial Ti-Al-Si-Cr alloy layer as transition layer of rich cube phase layer and be deposited on transition layer the diamond layer as functional layer.
In upper described tool matrix, the content of cobalt is 5-15wt.%;
Described normal group tissue layer is ultra-fine cemented carbide, and WC grain is of a size of 1-10000nm;
The thickness of described normal group tissue layer is greater than 2mm, and the thickness of described rich cobalt transition layer is 20-100 micron; The thickness of the rich cube phase layer of described poor cobalt is 20-50 micron;
The thickness of described Ti-Al-Si-Cr alloy layer is 2-3 micron, and the thickness of described diamond layer is 15-20 micron.
In above-mentioned tool matrix, the content of cobalt is 8-12wt.%; The WC grain of described normal group tissue layer is of a size of 1nm-400nm; Described Ti-Al-Si-Cr alloy layer is prepared by physical vaporous deposition, and described diamond layer is prepared by chemical Vapor deposition process.
The concrete preparation method of above-mentioned Ti-Al-Si-Cr alloy layer is as follows,
(1.1) Ti-Al-Si-Cr alloy target material is prepared
(1.2) physical gas-phase deposite method plated film
Inserted tool matrix through ultrasonic cleaning is put into the vacuum chamber of PVD equipment, vacuumize and reach 0.5 × 1O-1-1.5×1O-1During Pa, open arc source, carry out ion bombardment, clean inserted tool matrix surface 2-5 minute;
Then when bombarding bias voltage 200-300V, arc power 50-90A, plated film 20-60 minute;
Then close arc power, make vacuum chamber Slow cooling, after 1-2 hour, take out sample; Now, the cobalt that inserted tool matrix is poor rich cube of phase layer surface has been coated with the Ti-Al-Si-Cr alloy layer that a layer thickness is 2-3 micron;
The inserted tool matrix of surface deposition Ti-Al-Si-Cr alloy layer after the third intoxicated cleaning-drying, is put into chemical vapour deposition gold equipment and is prepared hard rock generating layer, and the concrete grammar preparing diamond layer is as follows,
(2.1) the inserted tool matrix being coated with Ti-Al-Si-Cr alloy layer is put into the vacuum chamber of chemical vapor depsotition equipment, make tool matrix distance resistance wire 2mm-6mm;
(2.2) opening cooling water system, be first evacuated down to 8-15 holder, then open heated filament power supply, slowly add electric current, when electric current reaches 500-650A, open hydrogen quality under meter, flow is 900-1000SDDM;
Opening methane mass flowmeter after (2.3) 3 minutes, flow is reduce electric current after 100-300SDDM, 1.5-3 hour, closes methane stream gauge, and after 15-30 minute, electric current is zero, now closes hydrogen stream gauge, keeps cooling system to run well;
(2.4) closing cooling system after 1-1.5 hour, open door for vacuum chamber, take out overall cutter, now, Ti-Al-Si-Cr alloy layer surface is coated with the diamond layer that a layer thickness is 15-20 micron.
Further, the concrete preparation method of above-mentioned Ti-Al-Si-Cr alloy layer is as follows,
(1.1) preparation of Ti-Al-Si-Cr alloy target material
The HIGH-PURITY SILICON of high-purity titanium sponge of employing purity 99.99%, the rafifinal of purity 99.99%, purity 99.99%, high-purity chromium of 99.99% are as raw material, by weight percentage: Ti accounts for 70-80%, Al and accounts for 5-10%, Si and account for the ratio that 5-10%, Cr account for 10-20% and carry out vacuum metling and obtain alloy pig, then alloy pig is processed into diameter 120mm, long 200mm cylindricality target material as Ti-Al-Si-Cr alloy target material;
(1.2) physical gas-phase deposite method plated film
Inserted tool matrix through ultrasonic cleaning is put into the vacuum chamber of PVD equipment, vacuumize and reach 1 × 1O-1During Pa, open arc source, carry out ion bombardment, clean inserted tool matrix surface 3 minutes;
Then when bombarding bias voltage 250V, arc power 60A, plated film 30-40 minute;
Then close arc power, make vacuum chamber Slow cooling, after 1.5 hours, take out sample; Now, the poor cobalt of tool matrix rich cube of phase layer surface has been coated with the Ti-Al-Si-Cr alloy layer that a layer thickness is 2-3 micron;
The inserted tool matrix of surface deposition Ti-Al-Si-Cr alloy layer after the third intoxicated cleaning-drying, is put into chemical vapour deposition gold equipment and is prepared hard rock generating layer, and the concrete grammar preparing diamond layer is as follows,
(2.1) the inserted tool matrix being coated with Ti-Al-Si-Cr alloy layer is put into the vacuum chamber of chemical vapor depsotition equipment, make tool matrix distance resistance wire 3mm-4mm;
(2.2) opening cooling water system, be first evacuated down to 10 holders, then open heated filament power supply, slowly add electric current, when electric current reaches 600A, open hydrogen quality under meter, flow is 900-1000SDDM;
Opening methane mass flowmeter after (2.3) 3 minutes, flow is 150-200SDDM, reduces electric current after 2 hours, closes methane stream gauge, and after 20 minutes, electric current is zero, now closes hydrogen stream gauge, keeps cooling system to run well;
(2.4) closing cooling system after 1-1.5 hour, open door for vacuum chamber, take out overall cutter, now, Ti-Al-Si-Cr alloy layer surface is coated with the diamond layer that a layer thickness is 15-20 micron.
The preparation method of a kind of gradient ultra-fine cemented carbide cutter with diamond composite coating is provided, comprises the preparation of tool matrix and prepare diamond composite coating on tool matrix surface; The preparation of diamond composite coating is first coated with Ti-Al-Si-Cr alloy layer by physical vaporous deposition on the rich cube phase layer surface of poor cobalt of tool matrix, the inserted tool matrix of surface deposition Ti-Al-Si-Cr alloy layer, after the third intoxicated cleaning-drying, puts into chemical vapour deposition gold equipment with chemical Vapor deposition process hard rock generating layer.
The concrete preparation method of above-mentioned Ti-Al-Si-Cr alloy layer is as follows,
(1.1) Ti-Al-Si-Cr alloy target material is prepared
(1.2) physical gas-phase deposite method plated film
Inserted tool matrix through ultrasonic cleaning is put into the vacuum chamber of PVD equipment, vacuumize and reach 0.5 × 1O-1-1.5×1O-1During Pa, open arc source, carry out ion bombardment, clean inserted tool matrix surface 2-5 minute;
Then when bombarding bias voltage 200-300V, arc power 50-90A, plated film 20-60 minute;
Then close arc power, make vacuum chamber Slow cooling, after 1-2 hour, take out sample; Now, the cobalt that inserted tool matrix is poor rich cube of phase layer surface has been coated with the Ti-Al-Si-Cr alloy layer that a layer thickness is 2-3 micron;
The inserted tool matrix of surface deposition Ti-Al-Si-Cr alloy layer after the third intoxicated cleaning-drying, is put into chemical vapour deposition gold equipment and is prepared hard rock generating layer, and the concrete grammar preparing diamond layer is as follows,
(2.1) the inserted tool matrix being coated with Ti-Al-Si-Cr alloy layer is put into the vacuum chamber of chemical vapor depsotition equipment, make tool matrix distance resistance wire 2mm-6mm;
(2.2) opening cooling water system, be first evacuated down to 8-15 holder, then open heated filament power supply, slowly add electric current, when electric current reaches 500-650A, open hydrogen quality under meter, flow is 900-1000SDDM;
Opening methane mass flowmeter after (2.3) 3 minutes, flow is reduce electric current after 100-300SDDM, 1.5-3 hour, closes methane stream gauge, and after 15-30 minute, electric current is zero, now closes hydrogen stream gauge, keeps cooling system to run well;
(2.4) closing cooling system after 1-1.5 hour, open door for vacuum chamber, take out overall cutter, now, Ti-Al-Si-Cr alloy layer surface is coated with the diamond layer that a layer thickness is 15-20 micron.
Further, the concrete preparation method of above-mentioned Ti-Al-Si-Cr alloy layer is as follows,
(1.1) preparation of Ti-Al-Si-Cr alloy target material
The HIGH-PURITY SILICON of high-purity titanium sponge of employing purity 99.99%, the rafifinal of purity 99.99%, purity 99.99%, high-purity chromium of 99.99% are as raw material, by weight percentage: Ti accounts for 70-80%, Al and accounts for 5-10%, Si and account for the ratio that 5-10%, Cr account for 10-20% and carry out vacuum metling and obtain alloy pig, then alloy pig is processed into diameter 120mm, long 200mm cylindricality target material as Ti-Al-Si-Cr alloy target material;
(1.2) physical gas-phase deposite method plated film
Inserted tool matrix through ultrasonic cleaning is put into the vacuum chamber of PVD equipment, vacuumize and reach 1 × 1O-1During Pa, open arc source, carry out ion bombardment, clean inserted tool matrix surface 3 minutes;
Then when bombarding bias voltage 250V, arc power 60A, plated film 30-40 minute;
Then close arc power, make vacuum chamber Slow cooling, after 1.5 hours, take out sample; Now, the poor cobalt of tool matrix rich cube of phase layer surface has been coated with the Ti-Al-Si-Cr alloy layer that a layer thickness is 2-3 micron;
The inserted tool matrix of surface deposition Ti-Al-Si-Cr alloy layer after the third intoxicated cleaning-drying, is put into chemical vapour deposition gold equipment and is prepared hard rock generating layer, and the concrete grammar preparing diamond layer is as follows,
(2.1) the inserted tool matrix being coated with Ti-Al-Si-Cr alloy layer is put into the vacuum chamber of chemical vapor depsotition equipment, make tool matrix distance resistance wire 3mm-4mm;
(2.2) opening cooling water system, be first evacuated down to 10 holders, then open heated filament power supply, slowly add electric current, when electric current reaches 600A, open hydrogen quality under meter, flow is 900-1000SDDM;
Opening methane mass flowmeter after (2.3) 3 minutes, flow is 150-200SDDM, reduces electric current after 2 hours, closes methane stream gauge, and after 20 minutes, electric current is zero, now closes hydrogen stream gauge, keeps cooling system to run well;
(2.4) closing cooling system after 1-1.5 hour, open door for vacuum chamber, take out overall cutter, now, Ti-Al-Si-Cr alloy layer surface is coated with the diamond layer that a layer thickness is 15-20 micron.
A kind of diamond composite coating for gradient ultra-fine cemented carbide cutter is provided, comprises the surperficial Ti-Al-Si-Cr alloy layer as transition layer of rich cube phase layer of the poor cobalt for being deposited on tool matrix and be deposited on transition layer the diamond layer as functional layer.
Thering is provided the preparation method of a kind of diamond composite coating, concrete preparation method is as follows,
(1.1) preparation of Ti-Al-Si-Cr alloy target material
The HIGH-PURITY SILICON of high-purity titanium sponge of employing purity 99.99%, the rafifinal of purity 99.99%, purity 99.99%, high-purity chromium of 99.99% are as raw material, by weight percentage: Ti accounts for 70-80%, Al and accounts for 5-10%, Si and account for the ratio that 5-10%, Cr account for 10-20% and carry out vacuum metling and obtain alloy pig, then alloy pig is processed into diameter 120mm, long 200mm cylindricality target material as Ti-Al-Si-Cr alloy target material;
(1.2) physical gas-phase deposite method plated film
Inserted tool matrix through ultrasonic cleaning is put into the vacuum chamber of PVD equipment, vacuumize and reach 1 × 1O-1During Pa, open arc source, carry out ion bombardment, clean inserted tool matrix surface 3 minutes;
Then when bombarding bias voltage 250V, arc power 60A, plated film 30-40 minute;
Then close arc power, make vacuum chamber Slow cooling, after 1.5 hours, take out sample; Now, the poor cobalt of tool matrix rich cube of phase layer surface has been coated with the Ti-Al-Si-Cr alloy layer that a layer thickness is 2-3 micron;
The inserted tool matrix of surface deposition Ti-Al-Si-Cr alloy layer after the third intoxicated cleaning-drying, is put into chemical vapour deposition gold equipment and is prepared hard rock generating layer, and the concrete grammar preparing diamond layer is as follows,
(2.1) the inserted tool matrix being coated with Ti-Al-Si-Cr alloy layer is put into the vacuum chamber of chemical vapor depsotition equipment, make tool matrix distance resistance wire 3mm-4mm;
(2.2) opening cooling water system, be first evacuated down to 10 holders, then open heated filament power supply, slowly add electric current, when electric current reaches 600A, open hydrogen quality under meter, flow is 900-1000SDDM;
Opening methane mass flowmeter after (2.3) 3 minutes, flow is 150-200SDDM, reduces electric current after 2 hours, closes methane stream gauge, and after 20 minutes, electric current is zero, now closes hydrogen stream gauge, keeps cooling system to run well;
(2.4) closing cooling system after 1-1.5 hour, open door for vacuum chamber, take out overall cutter, now, Ti-Al-Si-Cr alloy layer surface is coated with the diamond layer that a layer thickness is 15-20 micron.
The present invention has the gradient ultra-fine cemented carbide cutter of this diamond composite coating, and its tool matrix and diamond composite coating associativity are good, and overall cutter has good abrasion-proof and temperature-resistant performance, and intensity height, shock resistance are excellent. Diamond composite coating, itself and tool matrix associativity are good, and between the coating of compound coating, sticking power is good, and its high thermal resistance, erosion resistance, wear resistance are good.
Accompanying drawing explanation
The present invention is further illustrated to utilize accompanying drawing, but the content in accompanying drawing does not form any limitation of the invention.
Fig. 1 is the schematic diagram of a kind of gradient ultra-fine cemented carbide cutter with diamond composite coating of the present invention.
Fig. 2 is the interlayer structure schematic diagram of a kind of gradient ultra-fine cemented carbide cutter with diamond composite coating of the present invention.
Embodiment
The invention will be further described with the following Examples.
Embodiment 1.
A gradient ultra-fine cemented carbide cutter with diamond composite coating, as shown in Figure 1 and Figure 2, is made up of tool matrix and the diamond composite coating being arranged on tool matrix.
Tool matrix comprises the rich cube phase layer of normal group tissue layer, rich cobalt transition layer and poor cobalt, and the rich cube phase layer of normal group tissue layer, rich cobalt transition layer and poor cobalt is arranged in order according to order from inside to outside. In tool matrix, the content of cobalt is 5-15wt.%, it is preferable that the content of cobalt is 8-12wt.%. Normal group tissue layer is ultra-fine cemented carbide, and WC grain is of a size of 1-10000nm, it is preferable that WC grain is of a size of 1-500nm.
Being rich in cube phase nitride or a carbonitride in the rich cube phase layer of poor cobalt, cube phase nitride and carbonitride in Wimet have the hardness higher than the WC of solid matter six side's phase. and therefore, the top layer of the rich cube phase of poor cobalt has higher hardness. Rich cobalt transition layer is rich in bonding phase, when the crackle formed in coating is diffused into this region, due to the toughness that it is good, energy when crackle spreads can be absorbed, accordingly, it may be possible to effectively stop crackle to alloy internal divergence, and impact energy when can absorb Tool in Cutting preferably, thus there is high toughness characteristic, and then be conducive to improving the work-ing life of cutter material.Core portion is rigidity tissue regions and normal group tissue layer, and WC grain is evenly distributed and tiny, and average WC grain sizes is less than or equal to 500nm, has the mechanical property of ultra-fine cemented carbide excellence.
The thickness of normal group tissue layer is greater than 2mm, and the thickness of rich cobalt transition layer is 20-100 micron, and the thickness of the rich cube phase layer of poor cobalt is 20-50 micron.
The thickness of diamond composite coating entirety is 1-25 micron, it is preferable to 2-10 micron. When coat-thickness is lower than 1 micron, its wear resistance is poor, cutting process is worn very soon, the effect effectively improving Tool in Cutting performance and life-span can not be played, and when coat-thickness is more than 25 microns, the bonding force of coating and matrix is poor, and too high stress causes coating cracking and peels off, and shortens cutter life. By regulating, depositing time controls the thickness of coating.
The thickness of Ti-Al-Si-Cr alloy layer is 2-3 micron, and the thickness of diamond layer is 15-20 micron.
The present invention arranges one layer of Ti-Al-Si-Cr alloy layer as transition layer between tool matrix and diamond, titanium, chromium strong carbide is utilized to form the characteristic of material, good wetting property and bonding force is all had with matrix Wimet and diamond, in order to eliminate Film laminated coating and tool matrix because of lattice mismatch, thermal expansion coefficient difference and the internal stress that causes, both it had been possible to prevent carbon and had excessively infiltrated tool matrix, and be possible to prevent again cobalt and diffuse to the surface from matrix depths. Transition layer promotes the bonding force between its with the rich cube phase layer of poor cobalt, reduces internal stress. By transition layer, depositing diamond layer on transition layer, can ensure the original intensity of inserted tool and sharpness, can pass through again diamond coatings, increase substantially the wear resistance of cutter, working (machining) efficiency and work-ing life.
The present invention has the gradient ultra-fine cemented carbide cutter of this diamond composite coating, and its tool matrix and diamond composite coating associativity are good, and overall cutter has good abrasion-proof and temperature-resistant performance, and intensity height, shock resistance are excellent.
Embodiment 2.
The preparation method of a kind of gradient ultra-fine cemented carbide cutter with diamond composite coating is provided, comprises the preparation of tool matrix and prepare diamond composite coating on tool matrix surface.
The concrete preparation process of tool matrix is as follows:
(1) with refractory carbide, matrix metal and TiCN and other powder such as TiC, TaC, or the carbide of other strong nitride formation element, carbonitride are raw material, prepare hard alloy substrate presoma by ball milling mixing, drying and screening, compression moulding and sintering four steps.
(2) hard alloy substrate presoma is carried out ground finish process.
(3) the hard alloy substrate presoma after being processed by ground finish carries out gradient sintering, prepares the poor cobalt in top layer and rich cube phase gradient structure inserted tool matrix.
(4) after tool matrix being carried out matting, then at its surface deposition diamond composite coating.
In diamond composite coating, Ti-Al-Si-Cr alloy layer is prepared by physical vaporous deposition, and described diamond layer is prepared by chemical Vapor deposition process.
The preparation of diamond composite coating is first coated with Ti-Al-Si-Cr alloy layer by physical vaporous deposition on the rich cube phase layer surface of poor cobalt of tool matrix, the inserted tool matrix of surface deposition Ti-Al-Si-Cr alloy layer, after the third intoxicated cleaning-drying, puts into chemical vapour deposition gold equipment with chemical Vapor deposition process hard rock generating layer.
The concrete preparation method of Ti-Al-Si-Cr alloy layer is as follows:
(1.1) Ti-Al-Si-Cr alloy target material is prepared
(1.2) physical gas-phase deposite method plated film
Inserted tool matrix through ultrasonic cleaning is put into the vacuum chamber of PVD equipment, vacuumize and reach 0.5 × 1O-1-1.5×1O-1During Pa, open arc source, carry out ion bombardment, clean inserted tool matrix surface 2-5 minute;
Then when bombarding bias voltage 200-300V, arc power 50-90A, plated film 20-60 minute;
Then close arc power, make vacuum chamber Slow cooling, after 1-2 hour, take out sample; Now, the cobalt that inserted tool matrix is poor rich cube of phase layer surface has been coated with the Ti-Al-Si-Cr alloy layer that a layer thickness is 2-3 micron.
The inserted tool matrix of surface deposition Ti-Al-Si-Cr alloy layer after the third intoxicated cleaning-drying, is put into chemical vapour deposition gold equipment and is prepared hard rock generating layer, and the concrete grammar preparing diamond layer is as follows:
(2.1) the inserted tool matrix being coated with Ti-Al-Si-Cr alloy layer is put into the vacuum chamber of chemical vapor depsotition equipment, make tool matrix distance resistance wire 2mm-6mm;
(2.2) opening cooling water system, be first evacuated down to 8-15 holder, then open heated filament power supply, slowly add electric current, when electric current reaches 500-650A, open hydrogen quality under meter, flow is 900-1000SDDM;
Opening methane mass flowmeter after (2.3) 3 minutes, flow is reduce electric current after 100-300SDDM, 1.5-3 hour, closes methane stream gauge, and after 15-30 minute, electric current is zero, now closes hydrogen stream gauge, keeps cooling system to run well;
(2.4) closing cooling system after 1-1.5 hour, open door for vacuum chamber, take out overall cutter, now, Ti-Al-Si-Cr alloy layer surface is coated with the diamond layer that a layer thickness is 15-20 micron.
Preparation method's employing PVD method of the present invention is first coated with one layer of Ti-Al-Si-Cr layer as transition layer on inserted tool matrix, and then with CVD method depositing diamond layer on transition layer. Composition and the preparation method of target material is determined by concrete technique, by the selection of concrete PVD parameter and control, avoid rete and explosion or obscission occur because the too fast internal stress caused that heats up is excessive, make that there is between rete and tool matrix good sticking power. The present invention's being coated with by transition layer, then prepare diamond layer, the final gradient ultra-fine cemented carbide cutter obtaining excellent property.
The gradient ultra-fine cemented carbide cutter with this diamond composite coating prepared by the present invention, its tool matrix and diamond composite coating associativity are good, and overall cutter has good abrasion-proof and temperature-resistant performance, and intensity height, shock resistance are excellent.
Embodiment 3.
The preparation method of a kind of gradient ultra-fine cemented carbide cutter with diamond composite coating is provided, comprises the preparation of tool matrix and prepare diamond composite coating on tool matrix surface.
Tool matrix is sintered by each component of following mass percent: the TaC of the TiC of 5-15%, 2-5%, 10-15% alloy bonding phase, and surplus is WC. Alloy bonding is made up of the powder body of following mass percent: the Cr of 0.5-5.5%, the Mo of 0.5-5.5%, the B of 0.5-5.5%, the Al of 0.5-5.5%, the Si of the Y of the V of 0.5-5.5%, 0.5-5.5%, 0.5-5.5%, surplus is Co, and alloy bonding mutually in the quality sum of Cr, Mo, B, Al, V, Y and Si be the 7-20% of alloy bonding phase quality.
The preparation method of tool matrix, comprises the following steps:
S1, prepare alloy bonding phase: take Cr, Mo, B, Al, V, Y, Si, Co eight kinds of powder bodies by mass percentage respectively, mixed by eight kinds of powder bodies, obtain alloy bonding phase. Preferably eight kinds of powder bodies are placed in ball mill, grind ball ball milling 72 hours with Wimet, and every ball milling 1h just suspends ball milling 10min, obtains alloy bonding phase.
S2, prepare blank: take alloy bonding phase, TiC, TaC, WC tetra-kinds of components by mass percentage respectively, four kinds of component constitutive material powder bodies; Take paraffin by the 1.5-2.5% of material powder total mass, and paraffin is mixed with material powder, obtain blank.
S3, pressing blank: by blank compression moulding, obtain base substrate.
Can first with press molding machine by blank compression moulding, obtain just base substrate; Suppress just base substrate further with cold isostatic press again, obtain base substrate.
S4, sintering: base substrate is placed in sintering oven, be warming up to 1200-1250 DEG C with the speed of 5-8 DEG C/min, insulation 18-22min, and keeps 10-3The vacuum tightness of below Pa; Then in sintering oven, it is filled with nitrogen and it is warming up to 1420-1450 DEG C with the speed of 1-3 DEG C/min, the pressure of insulation 55-65min and maintenance more than 0.2MPa; Then it is cooled to 1000-1200 DEG C with the speed of 2-6 DEG C/min again, insulation 110-130min, and keeps the pressure of more than 0.2MPa; Then base substrate furnace cooling again, and keep the pressure of more than 0.2MPa, the gradient hard alloy of obtained surface hardening.
Before step S4, can carrying out pre-sintering step, described pre-sintering step is that base substrate is placed in sintering oven, under inert gas atmosphere, sinters 10min with 1400 DEG C; Refine base substrate profile after base substrate furnace cooling.
In the tool matrix of the Wimet prepared by the method, the content of cobalt is 5-15wt.%.%. Normal group tissue layer is ultra-fine cemented carbide, and WC grain is of a size of 1-10000nm. Tool matrix has excellent mechanical property, improves the red hardness of Wimet. Crystal grain in hard alloy substrate is tiny, is normal group tissue layer; The rich cube phase in the top layer of Wimet and the poor bonding i.e. rich cube phase of poor cobalt mutually, and under top layer, also have the transition layer i.e. rich cobalt transition layer of a rich alloyization bonding phase, thus make Wimet have excellent hardness, wear resistance and toughness.
After prepared by alloy substrate, it is carried out matting, then at its surface deposition diamond composite coating.
The preparation of diamond composite coating is first coated with Ti-Al-Si-Cr alloy layer by physical vaporous deposition on the rich cube phase layer surface of poor cobalt of tool matrix, the inserted tool matrix of surface deposition Ti-Al-Si-Cr alloy layer, after the third intoxicated cleaning-drying, puts into chemical vapour deposition gold equipment with chemical Vapor deposition process hard rock generating layer.
The concrete preparation method of Ti-Al-Si-Cr alloy layer is as follows,
(1.1) preparation of Ti-Al-Si-Cr alloy target material
The HIGH-PURITY SILICON of high-purity titanium sponge of employing purity 99.99%, the rafifinal of purity 99.99%, purity 99.99%, high-purity chromium of 99.99% are as raw material, by weight percentage: Ti accounts for 70-80%, Al and accounts for 5-10%, Si and account for the ratio that 5-10%, Cr account for 10-20% and carry out vacuum metling and obtain alloy pig, then alloy pig is processed into diameter 120mm, long 200mm cylindricality target material as Ti-Al-Si-Cr alloy target material;
(1.2) physical gas-phase deposite method plated film
Inserted tool matrix through ultrasonic cleaning is put into the vacuum chamber of PVD equipment, vacuumize and reach 1 × 1O-1During Pa, open arc source, carry out ion bombardment, clean inserted tool matrix surface 3 minutes;
Then when bombarding bias voltage 250V, arc power 60A, plated film 30-40 minute;
Then close arc power, make vacuum chamber Slow cooling, after 1.5 hours, take out sample; Now, the poor cobalt of tool matrix rich cube of phase layer surface has been coated with the Ti-Al-Si-Cr alloy layer that a layer thickness is 2-3 micron;
The inserted tool matrix of surface deposition Ti-Al-Si-Cr alloy layer after the third intoxicated cleaning-drying, is put into chemical vapour deposition gold equipment and is prepared hard rock generating layer, and the concrete grammar preparing diamond layer is as follows,
(2.1) the inserted tool matrix being coated with Ti-Al-Si-Cr alloy layer is put into the vacuum chamber of chemical vapor depsotition equipment, make tool matrix distance resistance wire 3mm-4mm;
(2.2) opening cooling water system, be first evacuated down to 10 holders, then open heated filament power supply, slowly add electric current, when electric current reaches 600A, open hydrogen quality under meter, flow is 900-1000SDDM;
Opening methane mass flowmeter after (2.3) 3 minutes, flow is 150-200SDDM, reduces electric current after 2 hours, closes methane stream gauge, and after 20 minutes, electric current is zero, now closes hydrogen stream gauge, keeps cooling system to run well;
(2.4) closing cooling system after 1-1.5 hour, open door for vacuum chamber, take out overall cutter, now, Ti-Al-Si-Cr alloy layer surface is coated with the diamond layer that a layer thickness is 15-20 micron.
Preparation method's employing PVD method of the present invention is first coated with one layer of Ti-Al-Si-Cr layer as transition layer on inserted tool matrix, and then with CVD method depositing diamond layer on transition layer. Composition and the preparation method of target material is determined by concrete technique, by the selection of concrete PVD parameter and control, avoid rete and explosion or obscission occur because the too fast internal stress caused that heats up is excessive, make that there is between rete and tool matrix good sticking power. The present invention's being coated with by transition layer, then prepare diamond layer, the final gradient ultra-fine cemented carbide cutter obtaining excellent property.
The gradient ultra-fine cemented carbide cutter with this diamond composite coating prepared by the present invention, its tool matrix and diamond composite coating associativity are good, and overall cutter has good abrasion-proof and temperature-resistant performance, and intensity height, shock resistance are excellent.
Embodiment 4.
A kind of diamond composite coating for gradient ultra-fine cemented carbide cutter, its structure is identical with the diamond composite coating in any one in embodiment 1-3, comprises the surperficial Ti-Al-Si-Cr alloy layer as transition layer of rich cube phase layer of the poor cobalt for being deposited on tool matrix and be deposited on transition layer the diamond layer as functional layer.
Diamond composite coating prepared by the present invention, itself and tool matrix associativity are good, and between the coating of compound coating, sticking power is good, and its high thermal resistance, erosion resistance, wear resistance are good, and intensity height, shock resistance are excellent.
Finally should be noted that; above embodiment is only in order to illustrate the technical scheme of the present invention but not limiting the scope of the invention; although the present invention being explained in detail with reference to better embodiment; it will be understood by those within the art that; the technical scheme of the present invention can be modified or equivalent replacement, and not depart from essence and the scope of technical solution of the present invention.
Claims (10)
1. one kind has the gradient ultra-fine cemented carbide cutter of diamond composite coating, it is characterised in that: it is made up of tool matrix and the diamond composite coating being arranged on tool matrix; Described tool matrix comprises the rich cube phase layer of normal group tissue layer, rich cobalt transition layer and poor cobalt, and the rich cube phase layer of described normal group tissue layer, rich cobalt transition layer and poor cobalt is arranged in order according to order from inside to outside;
Described diamond composite coating comprises for being deposited on the poor cobalt surperficial Ti-Al-Si-Cr alloy layer as transition layer of rich cube phase layer and be deposited on transition layer the diamond layer as functional layer.
2. the gradient ultra-fine cemented carbide cutter with diamond composite coating according to claim 1, it is characterised in that: in described tool matrix, the content of cobalt is 5-15wt.%; Described normal group tissue layer is ultra-fine cemented carbide, and WC grain is of a size of 1-10000nm; The thickness of described normal group tissue layer is greater than 2mm, and the thickness of described rich cobalt transition layer is 20-100 micron; The thickness of the rich cube phase layer of described poor cobalt is 20-50 micron; The thickness of described Ti-Al-Si-Cr alloy layer is 2-3 micron, and the thickness of described diamond layer is 15-20 micron.
3. the gradient ultra-fine cemented carbide cutter with diamond composite coating according to claim 2, it is characterised in that: in described tool matrix, the content of cobalt is 8-12wt.%; The WC grain of described normal group tissue layer is of a size of 1nm-400nm; Described Ti-Al-Si-Cr alloy layer is prepared by physical vaporous deposition, and described diamond layer is prepared by chemical Vapor deposition process.
4. the gradient ultra-fine cemented carbide cutter with diamond composite coating according to claim 3, it is characterized in that: the concrete preparation method of described Ti-Al-Si-Cr alloy layer is as follows, (1.1) prepare the vacuum chamber that Ti-Al-Si-Cr alloy target material (1.2) physical gas-phase deposite method plated film puts into the inserted tool matrix through ultrasonic cleaning PVD equipment, vacuumize and reach 0.5 × 1O-1-1.5×1O-1During Pa, open arc source, carry out ion bombardment, clean inserted tool matrix surface 2-5 minute; Then when bombarding bias voltage 200-300V, arc power 50-90A, plated film 20-60 minute; Then close arc power, make vacuum chamber Slow cooling, after 1-2 hour, take out sample; Now, the cobalt that inserted tool matrix is poor rich cube of phase layer surface has been coated with the Ti-Al-Si-Cr alloy layer that a layer thickness is 2-3 micron; The inserted tool matrix of surface deposition Ti-Al-Si-Cr alloy layer is after the third intoxicated cleaning-drying, put into chemical vapour deposition gold equipment and prepare hard rock generating layer, the concrete grammar preparing diamond layer is as follows, (2.1) the inserted tool matrix being coated with Ti-Al-Si-Cr alloy layer is put into the vacuum chamber of chemical vapor depsotition equipment, make tool matrix distance resistance wire 2mm-6mm; (2.2) opening cooling water system, be first evacuated down to 8-15 holder, then open heated filament power supply, slowly add electric current, when electric current reaches 500-650A, open hydrogen quality under meter, flow is 900-1000SDDM; Opening methane mass flowmeter after (2.3) 3 minutes, flow is reduce electric current after 100-300SDDM, 1.5-3 hour, closes methane stream gauge, and after 15-30 minute, electric current is zero, now closes hydrogen stream gauge, keeps cooling system to run well; (2.4) closing cooling system after 1-1.5 hour, open door for vacuum chamber, take out overall cutter, now, Ti-Al-Si-Cr alloy layer surface is coated with the diamond layer that a layer thickness is 15-20 micron.
5. the gradient ultra-fine cemented carbide cutter with diamond composite coating according to claim 4, it is characterized in that: the concrete preparation method of described Ti-Al-Si-Cr alloy layer is as follows, (1.1) preparation of Ti-Al-Si-Cr alloy target material adopts high-purity titanium sponge of purity 99.99%, the rafifinal of purity 99.99%, the HIGH-PURITY SILICON of purity 99.99%, high-purity chromium of 99.99% is as raw material, by weight percentage: Ti accounts for 70-80%, Al accounts for 5-10%, Si accounts for 5-10%, the ratio that Cr accounts for 10-20% carries out vacuum metling and obtains alloy pig, then alloy pig is processed into diameter 120mm, the cylindricality target material of long 200mm is as Ti-Al-Si-Cr alloy target material,(1.2) physical gas-phase deposite method plated film puts into the inserted tool matrix through ultrasonic cleaning the vacuum chamber of PVD equipment, vacuumizes and reaches 1 × 1O-1During Pa, open arc source, carry out ion bombardment, clean inserted tool matrix surface 3 minutes; Then when bombarding bias voltage 250V, arc power 60A, plated film 30-40 minute;
Then close arc power, make vacuum chamber Slow cooling, after 1.5 hours, take out sample; Now, the poor cobalt of tool matrix rich cube of phase layer surface has been coated with the Ti-Al-Si-Cr alloy layer that a layer thickness is 2-3 micron; The inserted tool matrix of surface deposition Ti-Al-Si-Cr alloy layer is after the third intoxicated cleaning-drying, put into chemical vapour deposition gold equipment and prepare hard rock generating layer, the concrete grammar preparing diamond layer is as follows, (2.1) the inserted tool matrix being coated with Ti-Al-Si-Cr alloy layer is put into the vacuum chamber of chemical vapor depsotition equipment, make tool matrix distance resistance wire 3mm-4mm; (2.2) opening cooling water system, be first evacuated down to 10 holders, then open heated filament power supply, slowly add electric current, when electric current reaches 600A, open hydrogen quality under meter, flow is 900-1000SDDM; Opening methane mass flowmeter after (2.3) 3 minutes, flow is 150-200SDDM, reduces electric current after 2 hours, closes methane stream gauge, and after 20 minutes, electric current is zero, now closes hydrogen stream gauge, keeps cooling system to run well; (2.4) closing cooling system after 1-1.5 hour, open door for vacuum chamber, take out overall cutter, now, Ti-Al-Si-Cr alloy layer surface is coated with the diamond layer that a layer thickness is 15-20 micron.
6. the preparation method of the gradient ultra-fine cemented carbide cutter with diamond composite coating as described in claim 1 to 5 any one, it is characterised in that: comprise the preparation of tool matrix and prepare diamond composite coating on tool matrix surface; The preparation of diamond composite coating is first coated with Ti-Al-Si-Cr alloy layer by physical vaporous deposition on the rich cube phase layer surface of poor cobalt of tool matrix, the inserted tool matrix of surface deposition Ti-Al-Si-Cr alloy layer, after the third intoxicated cleaning-drying, puts into chemical vapour deposition gold equipment with chemical Vapor deposition process hard rock generating layer.
7. there is the preparation method of the gradient ultra-fine cemented carbide cutter of diamond composite coating as claimed in claim 6, it is characterized in that: the concrete preparation method of described Ti-Al-Si-Cr alloy layer is as follows, (1.1) prepare the vacuum chamber that Ti-Al-Si-Cr alloy target material (1.2) physical gas-phase deposite method plated film puts into the inserted tool matrix through ultrasonic cleaning PVD equipment, vacuumize and reach 0.5 × 1O-1-1.5×1O-1During Pa, open arc source, carry out ion bombardment, clean inserted tool matrix surface 2-5 minute; Then when bombarding bias voltage 200-300V, arc power 50-90A, plated film 20-60 minute; Then close arc power, make vacuum chamber Slow cooling, after 1-2 hour, take out sample; Now, the cobalt that inserted tool matrix is poor rich cube of phase layer surface has been coated with the Ti-Al-Si-Cr alloy layer that a layer thickness is 2-3 micron; The inserted tool matrix of surface deposition Ti-Al-Si-Cr alloy layer is after the third intoxicated cleaning-drying, put into chemical vapour deposition gold equipment and prepare hard rock generating layer, the concrete grammar preparing diamond layer is as follows, (2.1) the inserted tool matrix being coated with Ti-Al-Si-Cr alloy layer is put into the vacuum chamber of chemical vapor depsotition equipment, make tool matrix distance resistance wire 2mm-6mm;(2.2) opening cooling water system, be first evacuated down to 8-15 holder, then open heated filament power supply, slowly add electric current, when electric current reaches 500-650A, open hydrogen quality under meter, flow is 900-1000SDDM; Opening methane mass flowmeter after (2.3) 3 minutes, flow is reduce electric current after 100-300SDDM, 1.5-3 hour, closes methane stream gauge, and after 15-30 minute, electric current is zero, now closes hydrogen stream gauge, keeps cooling system to run well; (2.4) closing cooling system after 1-1.5 hour, open door for vacuum chamber, take out overall cutter, now, Ti-Al-Si-Cr alloy layer surface is coated with the diamond layer that a layer thickness is 15-20 micron.
8. there is the preparation method of the gradient ultra-fine cemented carbide cutter of diamond composite coating as claimed in claim 7, it is characterized in that: the concrete preparation method of described Ti-Al-Si-Cr alloy layer is as follows, (1.1) preparation of Ti-Al-Si-Cr alloy target material adopts high-purity titanium sponge of purity 99.99%, the rafifinal of purity 99.99%, the HIGH-PURITY SILICON of purity 99.99%, high-purity chromium of 99.99% is as raw material, by weight percentage: Ti accounts for 70-80%, Al accounts for 5-10%, Si accounts for 5-10%, the ratio that Cr accounts for 10-20% carries out vacuum metling and obtains alloy pig, then alloy pig is processed into diameter 120mm, the cylindricality target material of long 200mm is as Ti-Al-Si-Cr alloy target material, (1.2) physical gas-phase deposite method plated film puts into the inserted tool matrix through ultrasonic cleaning the vacuum chamber of PVD equipment, vacuumizes and reaches 1 × 1O-1During Pa, open arc source, carry out ion bombardment, clean inserted tool matrix surface 3 minutes; Then when bombarding bias voltage 250V, arc power 60A, plated film 30-40 minute; Then close arc power, make vacuum chamber Slow cooling, after 1.5 hours, take out sample; Now, the poor cobalt of tool matrix rich cube of phase layer surface has been coated with the Ti-Al-Si-Cr alloy layer that a layer thickness is 2-3 micron; The inserted tool matrix of surface deposition Ti-Al-Si-Cr alloy layer is after the third intoxicated cleaning-drying, put into chemical vapour deposition gold equipment and prepare hard rock generating layer, the concrete grammar preparing diamond layer is as follows, (2.1) the inserted tool matrix being coated with Ti-Al-Si-Cr alloy layer is put into the vacuum chamber of chemical vapor depsotition equipment, make tool matrix distance resistance wire 3mm-4mm; (2.2) opening cooling water system, be first evacuated down to 10 holders, then open heated filament power supply, slowly add electric current, when electric current reaches 600A, open hydrogen quality under meter, flow is 900-1000SDDM; Opening methane mass flowmeter after (2.3) 3 minutes, flow is 150-200SDDM, reduces electric current after 2 hours, closes methane stream gauge, and after 20 minutes, electric current is zero, now closes hydrogen stream gauge, keeps cooling system to run well; (2.4) closing cooling system after 1-1.5 hour, open door for vacuum chamber, take out overall cutter, now, Ti-Al-Si-Cr alloy layer surface is coated with the diamond layer that a layer thickness is 15-20 micron.
9. the diamond composite coating for gradient ultra-fine cemented carbide cutter, it is characterised in that: comprise the surperficial Ti-Al-Si-Cr alloy layer as transition layer of rich cube phase layer of the poor cobalt for being deposited on tool matrix and be deposited on transition layer the diamond layer as functional layer.
10. the preparation method of diamond composite coating as claimed in claim 9, it is characterized in that: concrete preparation method is as follows, (1.1) preparation of Ti-Al-Si-Cr alloy target material adopts high-purity titanium sponge of purity 99.99%, the rafifinal of purity 99.99%, the HIGH-PURITY SILICON of purity 99.99%, high-purity chromium of 99.99% is as raw material, by weight percentage: Ti accounts for 70-80%, Al accounts for 5-10%, Si accounts for 5-10%, the ratio that Cr accounts for 10-20% carries out vacuum metling and obtains alloy pig, then alloy pig is processed into diameter 120mm, the cylindricality target material of long 200mm is as Ti-Al-Si-Cr alloy target material,(1.2) physical gas-phase deposite method plated film puts into the inserted tool matrix through ultrasonic cleaning the vacuum chamber of PVD equipment, vacuumizes and reaches 1 × 1O-1During Pa, open arc source, carry out ion bombardment, clean inserted tool matrix surface 3 minutes; Then when bombarding bias voltage 250V, arc power 60A, plated film 30-40 minute; Then close arc power, make vacuum chamber Slow cooling, after 1.5 hours, take out sample; Now, the poor cobalt of tool matrix rich cube of phase layer surface has been coated with the Ti-Al-Si-Cr alloy layer that a layer thickness is 2-3 micron; The inserted tool matrix of surface deposition Ti-Al-Si-Cr alloy layer is after the third intoxicated cleaning-drying, put into chemical vapour deposition gold equipment and prepare hard rock generating layer, the concrete grammar preparing diamond layer is as follows, (2.1) the inserted tool matrix being coated with Ti-Al-Si-Cr alloy layer is put into the vacuum chamber of chemical vapor depsotition equipment, make tool matrix distance resistance wire 3mm-4mm; (2.2) opening cooling water system, be first evacuated down to 10 holders, then open heated filament power supply, slowly add electric current, when electric current reaches 600A, open hydrogen quality under meter, flow is 900-1000SDDM; Opening methane mass flowmeter after (2.3) 3 minutes, flow is 150-200SDDM, reduces electric current after 2 hours, closes methane stream gauge, and after 20 minutes, electric current is zero, now closes hydrogen stream gauge, keeps cooling system to run well; (2.4) closing cooling system after 1-1.5 hour, open door for vacuum chamber, take out overall cutter, now, Ti-Al-Si-Cr alloy layer surface is coated with the diamond layer that a layer thickness is 15-20 micron.
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| PCT/CN2016/075362 WO2017136972A1 (en) | 2016-02-11 | 2016-03-02 | Diamond composite coating, graded structure ultrafine hard alloy cutting tool with the composite coating, and method for manufacturing same |
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| CN109385600A (en) * | 2017-08-02 | 2019-02-26 | 深圳先进技术研究院 | Titanium-aluminium alloy part with compisite seeping layer and preparation method thereof, titanium-aluminium alloy part with diamond coatings and preparation method thereof |
| CN110265093A (en) * | 2019-06-20 | 2019-09-20 | 蓬莱市超硬复合材料有限公司 | High-strength and high ductility ultra-fine cemented carbide material system institutional framework orients regulation method |
| CN110461511A (en) * | 2017-03-22 | 2019-11-15 | 三菱综合材料株式会社 | Diamond-coated carbide alloy cutting tool |
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| CN109385600A (en) * | 2017-08-02 | 2019-02-26 | 深圳先进技术研究院 | Titanium-aluminium alloy part with compisite seeping layer and preparation method thereof, titanium-aluminium alloy part with diamond coatings and preparation method thereof |
| CN109385600B (en) * | 2017-08-02 | 2023-11-03 | 深圳先进技术研究院 | Titanium-aluminum alloy piece with composite infiltration layer and preparation method thereof, and titanium-aluminum alloy piece with diamond coating and preparation method thereof |
| CN110265093A (en) * | 2019-06-20 | 2019-09-20 | 蓬莱市超硬复合材料有限公司 | High-strength and high ductility ultra-fine cemented carbide material system institutional framework orients regulation method |
| CN116926542A (en) * | 2023-07-12 | 2023-10-24 | 北方工业大学 | Copper-nickel-diamond composite material with low friction coefficient and preparation method thereof |
| CN116926542B (en) * | 2023-07-12 | 2024-03-19 | 北方工业大学 | Copper-nickel-diamond composite material with low friction coefficient and preparation method thereof |
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| WO2017136972A1 (en) | 2017-08-17 |
| CN105671551B (en) | 2018-01-19 |
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