CN105666528B - Dust free room circulation filter, dust free room and glove box - Google Patents
Dust free room circulation filter, dust free room and glove box Download PDFInfo
- Publication number
- CN105666528B CN105666528B CN201610186870.1A CN201610186870A CN105666528B CN 105666528 B CN105666528 B CN 105666528B CN 201610186870 A CN201610186870 A CN 201610186870A CN 105666528 B CN105666528 B CN 105666528B
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- CN
- China
- Prior art keywords
- dust free
- chamber
- free room
- filter element
- filter
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J21/00—Chambers provided with manipulation devices
- B25J21/02—Glove-boxes, i.e. chambers in which manipulations are performed by the human hands in gloves built into the chamber walls; Gloves therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/56—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition
- B01D46/62—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition connected in series
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2273/00—Operation of filters specially adapted for separating dispersed particles from gases or vapours
- B01D2273/30—Means for generating a circulation of a fluid in a filtration system, e.g. using a pump or a fan
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2279/00—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses
- B01D2279/50—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning
- B01D2279/51—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning in clean rooms, e.g. production facilities for electronic devices, laboratories
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Ventilation (AREA)
Abstract
The invention discloses a kind of dust free room circulation filters comprising: filter element is set in dust free room, forms first chamber between the filter element and the top of dust free room；Plate body offers multiple through-holes thereon, which is set to the lower section in dust free room and being located at filter element, forms second chamber between the plate body and filter element, and third chamber is formed between the plate body and the bottom of dust free room；Return air channel, both ends are respectively communicated with first chamber and third chamber.The present invention also discloses a kind of dust free room and glove boxes.Compared with prior art, the present invention the dustfree environment of high-cleanness, high has been similarly formed, so that cleanliness equally can achieve ISO1 grades under the premise of simplifying structure and reducing cost.
Description
Technical field
The present invention relates to a kind of filter devices, and in particular to a kind of dust free room circulation filter, dust free room and glove box.
Background technique
In the scientific research and production process of electronics industry, display industry and medical industries, in order to improve product
Can, it usually requires that related science experiment is fabricated or carried out in dust free room or dustless equipment.The quality of dustless equipment is straight
The quality for being related to product is connect, this has become influence and restricts the bottleneck of China's electronics industry, display industry, can reach
ISO1 grades of high-cleanness dust free room be even more almost without.
Some filter plants used at present, although can satisfy the filtering requirement of some dust free rooms, for one
A little small-sized equipment, such as glove box etc., inner space is smaller, traditional filter plant in volume with it there are contradiction,
And traditional filter plant common configuration is all complex, and glove box etc. can not be also adapted in use cost and maintenance cost
Requirement.
Summary of the invention
It is simple, at low cost and be adapted to glove box that in order to solve the above-mentioned technical problems, the present invention provides a kind of structures
Etc. equipment requirement dust free room circulation filter, dust free room and glove box.
In order to achieve the above object, technical scheme is as follows:
Dust free room circulation filter comprising:
Filter element is set in dust free room, forms first chamber between the filter element and the top of dust free room；
Plate body offers multiple through-holes thereon, which is set to the lower section in dust free room and being located at filter element, the plate
Second chamber is formed between body and filter element, and third chamber is formed between the plate body and the bottom of dust free room；
Return air channel, both ends are respectively communicated with first chamber and third chamber.
It is logical that dust free room circulation filter of the invention is mainly provided with filter element, plate body and return air in dust free room
Road has respectively been divided into dust free room first chamber, second chamber and third chamber, and the operating that filter element passes through driving unit will
Gas by its filter after blow out vertically downward, take away the particulate matter in equipment, gas again successively by the second cavity, plate body,
The first cavity is come back to after third cavity and return air channel and is sucked by filter element, and such circulating filtration forms high-cleanness
Dustfree environment.
Therefore, compared with prior art, the present invention being similarly formed noble and unsullied under the premise of simplifying structure and reducing cost
The dustfree environment of cleanliness, so that cleanliness equally can achieve ISO1 grades.
Based on the above technical solution, the present invention can also improve as follows:
As a preferred option, above-mentioned first chamber and third chamber are also respectively connected with purification unit.
Using the above preferred scheme, after purification unit can remove water deoxygenation with extraction section gas, it is single to come back to filtering
The top of member becomes the atmosphere of anhydrous and oxygen-free, to further improve the cleaning of dust free room after filter element filters
Degree.
As a preferred option, filter is provided on the pipeline connected between above-mentioned first chamber and purification unit.
Using the above preferred scheme, the gas for coming back to filter element can be filtered, thus further
Improve the cleanliness of dust free room.
As a preferred option, above-mentioned filter element is FFU filter.
Using the above preferred scheme, preferable filter effect may be implemented.
As a preferred option, above-mentioned filter element is installed in dust free room by bracket, filter element and bracket it
Between be provided with sealing ring.
Using the above preferred scheme, it is ensured that the stability and leakproofness of filter element installation.
As a preferred option, be equipped with a circumferential at least chamber in above-mentioned sealing ring, chamber into outlet cell,
An at least detection unit is provided on into outlet cell, detection unit is electrically connected processor, for detecting into outlet cell
Gas pressure value and/or gas concentration value, are then sent to processor for gas pressure value and/or gas concentration value.
Using the above preferred scheme, filter element and branch can be being prevented in equipment running process between two sealing rings
Side leakage phenomenon occurs between frame, i.e., being detected between filter element and bracket in production process or in use process has side leakage free, prevents
Only there is gas not pass through filter element and run from side.
As a preferred option, above-mentioned into setting air inlet control unit and/or outlet control unit on outlet cell, difference
It is electrically connected processor, processor carries out pair after receiving gas pressure value and/or gas concentration value with value preset in processor
Than then processor controls air inlet control unit and outlet control unit by adding into outlet cell to chamber according to comparing result
Gas and/or subtract gas.
Using the above preferred scheme, subnormal ambient can kept between two sealing rings in equipment running process.
As a preferred option, it is above-mentioned into outlet cell be pipeline.
It using the above preferred scheme, can passing through in order to gas.
Dust free room, including shell are provided with above-mentioned dust free room circulation filter in the shell.
Dust free room of the invention uses above-mentioned dust free room circulation filter, therefore imitates with same technology
Fruit.
Glove box, including shell have the cavity as dust free room in the shell, are provided with above-mentioned dust free room in the cavity
Circulation filter.
Glove box of the invention uses above-mentioned dust free room circulation filter, therefore imitates with same technology
Fruit.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of dust free room circulation filter of the invention and dust free room (glove box).
Fig. 2 is the structural schematic diagram of the sealing detection part in dust free room circulation filter of the invention.
Fig. 3 is the system architecture diagram of the sealing detection part in dust free room circulation filter of the invention.
Wherein, 1. dust free room, 11. shell, 12. cavity, 2. filter element, 21. first chamber, 22. bracket, 23. sealing ring, 24. chamber
Room 25. is into 27. processor of outlet cell 251. air inlet control unit, 252. outlet control unit, 26. detection unit, 28. alarm unit 3.
51. pipeline of plate body 31. through-hole, 32. second chamber, 33. third chamber, 4. return air channel, 5. purification unit, 52. filter.
Specific embodiment
The preferred embodiment that the invention will now be described in detail with reference to the accompanying drawings.
In order to reach the purpose of the present invention, as shown in Figure 1, in some of them of dust free room circulation filter of the invention
In embodiment comprising: filter element 2 is set in dust free room 1, that is, in shell 11, the filter element 2 and nothing
First chamber 21 is formed between the top of dirt room 1；Plate body 3 offers multiple through-holes 31 thereon, which is set to dust free room 1
Lower section that is interior and being located at filter element 2, forms second chamber 32, the plate body 3 and dust free room 1 between the plate body 3 and filter element 2
Bottom between formed third chamber 33；Return air channel 4, both ends are respectively communicated with first chamber 21 and third chamber 33.Wherein,
Filter element 2 is specifically as follows FFU filter, carries the blower as driving unit, preferable filter effect may be implemented.
It is logical that the dust free room circulation filter of the present embodiment is mainly provided with filter element, plate body and return air in dust free room
Road has respectively been divided into dust free room first chamber, second chamber and third chamber, and the operating that filter element passes through driving unit will
Gas by its filter after blow out vertically downward, take away the particulate matter in equipment, gas again successively by the second cavity, plate body,
The first cavity is come back to after third cavity and return air channel and is sucked by filter element, and such circulating filtration forms high-cleanness
Dustfree environment.Therefore, the present embodiment compared with prior art, under the premise of simplifying structure and reducing cost, is similarly formed
The dustfree environment of high-cleanness, high, so that cleanliness equally can achieve ISO1 grades.
In order to further optimize implementation result of the invention, as shown in Figure 1, being filled in dust free room circulating filtration of the invention
In other embodiments set, on the basis of the above, above-mentioned first chamber 21 and third chamber 33 also connect respectively
Purification unit 5 is connect, which specifically can be used common purification devices for removing water deoxygenation, in addition to this, can also be with
Using other known gas cleaning plant.Using the scheme of the embodiment, purification unit can be removed water with extraction section gas
After deoxygenation, the top of filter element is come back to, becomes the atmosphere of anhydrous and oxygen-free after filter element filters, thus into one
Improve the cleanliness of dust free room in step ground.
In order to further optimize implementation result of the invention, as shown in Figure 1, being filled in dust free room circulating filtration of the invention
In other embodiments set, on the basis of the above, connected between above-mentioned first chamber 21 and purification unit 5
Filter 52 is provided on pipeline 51.Using the scheme of the embodiment, the gas for coming back to filter element can be carried out
Filtering, to further improve the cleanliness of dust free room.
In order to further optimize implementation result of the invention, as shown in Figure 1, being filled in dust free room circulating filtration of the invention
In other embodiments set, on the basis of the above, above-mentioned filter element 2 is installed on dust free room by bracket 22
In 1, sealing ring 23 is provided between filter element 2 and bracket 22.Using the scheme of the embodiment, it is ensured that filter element
The stability and leakproofness of installation.
In order to further optimize implementation result of the invention, as shown in Figure 1-3, in dust free room circulating filtration of the invention
In other embodiments of device, on the basis of the above, a circumferential chamber 24 is equipped in above-mentioned sealing ring 23,
It may be set to be multiple, chamber 24 is connected into outlet cell 25, and pipeline should be specifically as follows into outlet cell 25, passes in and out gas list
Member 25 on be provided with a detection unit 26, may be set to be it is multiple, detection unit 26 be electrically connected processor 27, for detect into
Gas pressure value or gas concentration value in outlet cell 25, are then sent to processor for gas pressure value or gas concentration value
27.In other embodiments, detection unit 26 can also detect gentle into the gas pressure value in outlet cell 25 simultaneously
Bulk concentration value.Wherein, detection unit 26 is specifically as follows pressure sensor and concentration sensor.Using the side of the embodiment
Case can prevent that side leakage phenomenon occurs between filter element and bracket between two sealing rings in equipment running process, i.e., raw
Detecting during production or in use process between filter element and bracket has side leakage free, prevented gas do not pass through filter element and
It is run from side.And in order to form the prompting to surrounding, alarm unit 28 can also be installed additional.
In order to further optimize implementation result of the invention, as shown in Figure 1-3, in dust free room circulating filtration of the invention
It is on the basis of the above, above-mentioned into setting air inlet control unit on outlet cell 25 in other embodiments of device
251 and outlet control unit 252, it is electrically connected processor 27, processor 27 is receiving gas pressure value and/or gas concentration
It after value, is compared with preset value in processor 27, then processor 27 controls 251 He of air inlet control unit according to comparing result
Outlet control unit 252 is by carrying out aerating to chamber 24 into outlet cell 25 and subtracting gas.Wherein, in other embodiments,
It is above-mentioned into air inlet control unit 251 or outlet control unit 252 also can be set on outlet cell, be electrically connected processor
27, which compares after receiving gas pressure value and/or gas concentration value with preset value in processor 27,
Then processor 27 according to comparing result control air inlet control unit 251 or outlet control unit 252 by into outlet cell 3 to chamber
Room 21 carries out aerating or subtracts gas.Using the scheme of the embodiment, can be between two sealing rings in equipment running process
Keep subnormal ambient.
In order to reach the purpose of the present invention, as shown in Figure 1, in some of embodiments of dust free room of the invention,
Including shell 11, above-mentioned dust free room circulation filter is provided in the shell 11.The dust free room of the present embodiment uses above-mentioned
Dust free room circulation filter, therefore have same technical effect.
In order to reach the purpose of the present invention, as shown in Figure 1, in some of embodiments of glove box of the invention,
Including shell 11, there is the cavity 12 as dust free room in the shell 11, be provided with above-mentioned dust free room in the cavity 12 and be circulated throughout
Filter device.The glove box of the present embodiment uses above-mentioned dust free room circulation filter, therefore has same technology
Effect.
What has been described above is only a preferred embodiment of the present invention, it is noted that for those of ordinary skill in the art
For, without departing from the concept of the premise of the invention, various modifications and improvements can be made, these belong to the present invention
Protection scope.
Claims (3)
1. dust free room circulation filter characterized by comprising
Filter element is set in dust free room, forms first chamber between the filter element and the top of the dust free room；
Plate body, offers multiple through-holes thereon, and the plate body is set in the dust free room and is located under the filter element
Side, forms second chamber, is formed between the plate body and the bottom of the dust free room between the plate body and the filter element
Third chamber；
Return air channel, both ends are respectively communicated with the first chamber and the third chamber；
The first chamber and third chamber are also respectively connected with purification unit；
The filter element is installed in the dust free room by bracket, is provided between the filter element and the bracket close
Seal, is equipped with a circumferential at least chamber in the sealing ring, and the chamber is described on outlet cell into outlet cell
It is provided with an at least detection unit, the detection unit is electrically connected processor, described into the gas in outlet cell for detecting
Then the gas pressure value and/or gas concentration value are sent to the processor by pressure value and/or gas concentration value；
It is described to be electrically connected the processor into setting air inlet control unit and/or outlet control unit on outlet cell, it is described
Processor compares, so after receiving the gas pressure value and/or gas concentration value with preset value in the processor
Afterwards the processor according to comparing result control the air inlet control unit and outlet control unit by it is described into outlet cell to institute
Chamber is stated to carry out aerating and/or subtract gas；
Filter is provided on the pipeline connected between the first chamber and the purification unit；The filter element is FFU
Filter；It is described into outlet cell be pipeline；
Dust free room has been divided into first chamber, second chamber and third chamber respectively, and the operating that filter element passes through driving unit will
Gas by its filter after blow out vertically downward, take away the particulate matter in equipment, gas again successively by the second cavity, plate body,
The first cavity is come back to after third cavity and return air channel and is sucked by filter element, and such circulating filtration forms high-cleanness
Dustfree environment；
Detection unit is specially pressure sensor and concentration sensor.
2. dust free room, including shell, which is characterized in that be provided with dust free room circulation as described in claim 1 in the shell
Filter device.
3. glove box, including shell, the interior cavity having as dust free room of the shell, which is characterized in that set in the cavity
It is equipped with dust free room circulation filter as described in claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610186870.1A CN105666528B (en) | 2016-03-29 | 2016-03-29 | Dust free room circulation filter, dust free room and glove box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610186870.1A CN105666528B (en) | 2016-03-29 | 2016-03-29 | Dust free room circulation filter, dust free room and glove box |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105666528A CN105666528A (en) | 2016-06-15 |
| CN105666528B true CN105666528B (en) | 2018-12-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610186870.1A Active CN105666528B (en) | 2016-03-29 | 2016-03-29 | Dust free room circulation filter, dust free room and glove box |
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| CN (1) | CN105666528B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108119951B (en) * | 2016-11-29 | 2020-07-24 | 宁波舜宇光电信息有限公司 | Dust-free device and dust-free method thereof |
| CN108656156B (en) * | 2018-05-15 | 2020-11-06 | 上海交通大学 | Self-circulation smoke-sweeping and removing box and using method thereof |
| CN112452932B (en) * | 2020-11-18 | 2024-07-02 | 南通市德信致远环境科技有限公司 | Modularized intelligent clean room |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6071830A (en) * | 1983-09-29 | 1985-04-23 | Hitachi Plant Eng & Constr Co Ltd | Recombination type local environment control chamber |
| JPH1096332A (en) * | 1996-09-20 | 1998-04-14 | Mitsubishi Electric Corp | Clean room |
| CN100472142C (en) * | 2006-06-12 | 2009-03-25 | 亚翔工程股份有限公司 | Dustless chamber and its air conditioning method |
| CN202207518U (en) * | 2011-08-15 | 2012-05-02 | 东莞市富莱仕空调净化科技有限公司 | Workbench with air return function |
| CN104175333B (en) * | 2014-07-22 | 2016-04-20 | 威格气体纯化科技（苏州）股份有限公司 | A kind of multifunctional hand casing purifier |
| CN205835428U (en) * | 2016-03-29 | 2016-12-28 | 威格气体纯化科技（苏州）股份有限公司 | Dust free room circulation filter, dust free room and glove box |
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| CN105666528A (en) | 2016-06-15 |
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Address after: No. 58, Tingtao Road, Suzhou Industrial Park, Jiangsu 215000 Patentee after: Weige Technology (Suzhou) Co.,Ltd. Address before: 215026 No.2 workshop, Xinxing Industrial Park, 78 Xinglin street, Suzhou Industrial Park, Jiangsu Province Patentee before: VIGOR GAS PURIFICATION TECHNOLIGIES, Inc. |