CN203525504U - Dust collecting device - Google Patents
Dust collecting device Download PDFInfo
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- CN203525504U CN203525504U CN201320558716.4U CN201320558716U CN203525504U CN 203525504 U CN203525504 U CN 203525504U CN 201320558716 U CN201320558716 U CN 201320558716U CN 203525504 U CN203525504 U CN 203525504U
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- dust
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- 239000000428 dust Substances 0.000 title claims abstract description 96
- 239000007789 gas Substances 0.000 claims description 52
- 238000009434 installation Methods 0.000 claims description 33
- 239000004744 fabric Substances 0.000 claims description 9
- 238000005229 chemical vapour deposition Methods 0.000 claims description 8
- 238000005516 engineering process Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 230000007257 malfunction Effects 0.000 claims description 5
- 238000007664 blowing Methods 0.000 claims description 4
- 239000007921 spray Substances 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 238000000034 method Methods 0.000 description 10
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 206010033799 Paralysis Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The utility model provides a dust collecting device. The dust collecting device comprises a main filter which is connected with a dust generating device so as to receive dust from the dust generating device, an auxiliary filter which is arranged below the main filter and connected with the main filter, two parallel filters which are respectively connected with the auxiliary filter and are respectively communicated with the auxiliary filter under control, three dust collecting barrels which are respectively mounted below the auxiliary filter and the two parallel filters and are respectively communicated with the auxiliary filter and the two parallel filters under control so as to collect the dust in the auxiliary filter and the two parallel filters, and a mechanical pump which is communicated with the two parallel filters under control so as to receive gas discharged from the normally working parallel filter in the two parallel filters and discharge the gas, wherein one parallel filter in the two parallel filters is suitable for later use, so that the parallel filter for later use is started to work when the other parallel filter in the two parallel filters cannot work normally. The dust collecting device can be used for effectively removing the dust, thereby better protecting the mechanical pump and a constant-pressure vacuum pump.
Description
Technical field
The utility model relates to the field of gathering dust, and relates in particular to a kind of dust arrester installation.
Background technology
Chemical vapor deposition processes is under vacuum state, and gas is passed in stove, under the state of vacuum, deposits, and equipment generally can connect vavuum pump, and vavuum pump vacuumizes and produces certain negative pressure equipment.Adopt at present chemical gaseous phase depositing process to produce in the process of various materials and generally can produce a large amount of dust, if dealing with improperly, dust not only can deposit to product the inside, the performance of product is reduced, quality is not up to standard, and because of chemical vapor deposition processes be generally vacuum state, after equipment, generally can connect mechanical pump, once dust enters into the service life that mechanical pump the inside can have a strong impact on mechanical pump, the more important thing is that the dust of taking out by mechanical pump is not easy to collect, may cause whole system paralysis, cannot use.
Utility model content
In view of the problem existing in background technology, the purpose of this utility model is to provide a kind of dust arrester installation, and it can remove dust effectively.
Another object of the present utility model is to provide a kind of dust arrester installation, and it is mechanical pump and the constant voltage vavuum pump of protective price costliness better.
To achieve these goals, the utility model provides a kind of dust arrester installation, and it comprises: main filter, be connected in the escape pipe of product dirt device to receive the dust of self-produced dirt device, and main filter is provided with connector in downstream; Inferior filter, is arranged on the below of main filter, by tube connector, is connected with the connector of main filter downstream; Two filters in parallel, bottom is connected with the upper end of inferior filter respectively and is communicated with inferior filter is controlled respectively by three-limb tube, and when a filters in parallel of two filters in parallel is standby another filters in parallel cisco unity malfunction with in two filters in parallel, this standby filters in parallel starts and works; Three buckets that gather dust, are installed on respectively the below of time filter and two filters in parallel, and controlled time filter and two filters in parallel of being communicated in respectively, for collecting the dust inside inferior filter and two filters in parallel; And mechanical pump, the controlled top that is communicated in two filters in parallel, to receive the gas that the filters in parallel of the normal work from two filters in parallel discharges and to discharge.
The beneficial effects of the utility model are as follows:
Dust arrester installation of the present utility model can be removed dust after gathering dust through three grades effectively; When product dirt device is chemical vapor deposition stove, can solve the series of problems causing due to dust in chemical vapor deposition processes; Simple to operate; According to the length of production process time and dust number can realize and being convenient for changing or clean, the mechanical pump of protective price costliness and constant voltage vavuum pump better.
Accompanying drawing explanation
Fig. 1 is the structural representation according to dust arrester installation of the present utility model;
Fig. 2 is the enlarged drawing of the dashed circle part of Fig. 1.
Wherein, description of reference numerals is as follows:
1 main filter 6 constant voltage vavuum pumps
11 connector 7 Control Components
12 vacuum malleation safety valve 71 impulse electromagnetic valves
13 standby mouthfuls of 72 differential pressure transmitters
14 veneer 73 pressure transmitters
15 baffle plate 74 pneumatic operated valves
16 temperature-measuring port 8 gas treatment equipments
No. 2 filter 9 corrosive resistant fans
3 filters in parallel 10 are produced dirt device
31 housing 101 escape pipes
32 main anti-blowpipe S blowback gas sources
33 minutes anti-blowpipe V1-V15 valves
34 frame of filter element P1, P2, P3, P1', P2', P3' circuit
35 cloth bag T1 tube connectors
36 filter cloth T2 three-limb tubes
The 4 barrel E ports that gather dust
5 mechanical pumps
The specific embodiment
Describe in detail with reference to the accompanying drawings according to dust arrester installation of the present utility model.
With reference to Fig. 1, according to dust arrester installation of the present utility model, comprise: main filter 1, be connected in the escape pipe 101 of product dirt device 10 to receive the dust of self-produced dirt device 10, main filter 1 is provided with connector 11 in downstream; Inferior filter 2, is arranged on the below of main filter 1, by tube connector T1, is connected with the connector 11 of main filter 1 downstream; Two filters in parallel 3, bottom by three-limb tube T2 be connected with the top of inferior filter 2 respectively and respectively with inferior controlled connection of filter 2, a filters in parallel 3 of two filters in parallel 3 is standby, during with another filters in parallel 3 cisco unity malfunction in two filters in parallel 3, this standby filters in parallel 3 starts and works; Three buckets 4 that gather dust, are installed on respectively the below of time filter 2 and two filters in parallel 3, and controlled time filter 2 and two filters in parallel 3 of being communicated in respectively, for collecting the dust of inferior filter 2 and two filters in parallel 3 the insides; And mechanical pump 5, the controlled top that is communicated in two filters in parallel 3, to receive the gas that the filters in parallel 3 of the normal work from two filters in parallel 3 discharges and to discharge.
In an embodiment of main filter 1, main filter 1 is stainless steel cylindrical structure.Can be downward-sloping with respect to producing dirt device 10 when preferably, main filter 1 is installed.Because main filter 1 is directly connected with the escape pipe 101 that produces dirt device 10, consider and make dust corresponding bucket 4 the insides of gathering dust that flow to below as much as possible, and need to consider that can not make dust fall produces in dirt device 10, affect the quality of product, therefore main filter 1 main adopt after stainless steel cylinder and baffle plate 15(described) structure.Downward-sloping with respect to producing dirt device 10 when main filter 1 is installed, be conducive to downward the flowing of dust.
In an embodiment of main filter 1, main filter 1 is connected by flange (not shown) with the body that produces dirt device 10.Preferably, main filter 1 with produce being connected between the body of dirt device 10 and adopt sealing ring to seal.
In an embodiment of main filter 1, with reference to Fig. 1, one end of main filter 1 is provided with standby mouthful 13 and temperature-measuring port 16, for installing and measuring respectively, produces the vacuometer of the vacuum in dirt device 10 and the thermometer of measuring temperature.
In an embodiment of main filter 1, with reference to Fig. 1, main filter 1 its with produce the veneer 14 that is provided with to tilt and blocks this junction in the junction of escape pipe 101 of dirt device 10, for preventing that the dust of main filter 1 the inside from falling in product dirt device 10.In one embodiment, the angle of inclination of veneer 14 can be 120 degree.
In an embodiment of main filter 1, the interior detachable upper and lower staggered baffle plate 15 that is provided with of main filter 1.Preferably, the outward flange of each baffle plate 15 engages with main filter 1 inwall.At the two ends of main filter 1, be provided with alignment pin (not shown), be used for fixing this baffle plate 15, when the dust of cleaning main filter 1 the inside, this baffle plate 15 can be taken off, the effect of this baffle plate 15 is mainly for increasing the stroke of dust and gas, dust deposition as much as possible is got off, and reduce from producing in dirt device 10 temperature of gas out.When main filter 1 is cylindrical structure, the shape of baffle plate 15 can be large semi-circular adaptably, is preferably the scarce large semi-circular of 55%～60% circle.
According in dust arrester installation of the present utility model, between inferior filter 2 and main filter 1, adopt flange (not shown) to be connected with tube connector T1.Preferably, inferior filter 2 seals with the employing sealing ring that is connected between main filter 1.
According in dust arrester installation of the present utility model, with reference to Fig. 1, inferior filter 2 and the bucket that gathers dust are accordingly provided with valve V1 between 4, are used for controlling time filter 2 and gather dust barrel 4 being communicated with this.Valve V1 can be Pneumatic vacuum ball valve.
In the embodiment of bucket 4 that gathers dust, bucket 4 the bottom of respectively gathering dust can be provided with universal wheel (not shown) or described dust arrester installation and also comprises respectively the gather dust hydraulic lifting mobile handcart (not shown) of bucket 4 of carrying, the bucket 4 that makes thus to gather dust moves, to facilitate the clean of the bucket 4 that gathers dust and to change.
According in an embodiment of dust arrester installation of the present utility model, with reference to Fig. 1, described dust arrester installation also can comprise: blowback gas source S, controlledly be communicated in two filters in parallel 3, during described another filters in parallel 3 cisco unity malfunction in two filters in parallel 3, to another filters in parallel 3 described in this, provide blowback gas; Corrosive resistant fan 9, is controlledly communicated in two filters in parallel 3, to receive the portion gas after described another filters in parallel 3 reverse blowing disposals; And constant voltage vavuum pump 6, be controlledly communicated in two filters in parallel 3, with to after described another filters in parallel 3 reverse blowing disposals and by the residual gas after corrosive resistant fan 9 suctions, aspirated.Wherein, each filters in parallel 3 is the controlled outside atmosphere that is communicated in also, and each filters in parallel 3 comprises: housing 31; Main anti-blowpipe 32, is arranged at the top of housing 31 inside and is fixedly connected on housing 31 and the controlled blowback gas source S that is communicated in; Within a plurality of minutes, anti-blowpipe 33, be positioned at housing 31 and be positioned at main anti-blowpipe 32 belows and respectively with main controlled connection of anti-blowpipe 32; Frame of filter element 34, is positioned at housing 31 and is fixedly connected on housing 31; Cloth bag 35, is installed on frame of filter element 34; And filter cloth 36, be arranged between minute anti-blowpipe 33 and frame of filter element 34.
In an embodiment of main filter 1, with reference to Fig. 1, main filter 1 is provided with vacuum malleation safety valve 12 and the controlled corrosive resistant fan 9 that is communicated in, when producing the escape pipe of dirt device 10, by dust, stopped up normally to give vent to anger and cause producing pressure in dirt device 10 and raise and reach after the safety value that vacuum malleation safety valve 12 arranges, make to produce dirt device 10, main filter 1 and corrosive resistant fan 9 and be communicated with, so that produce 10 pressure releases of dirt device.Vacuum malleation safety valve 12 can arrange certain safety value; once the escape pipe that produces dirt device 10, by a large amount of dust, stopped up and can not normally give vent to anger; the pressure producing in dirt device 10 can raise; reaching after the safety value that vacuum malleation safety valve 12 arranges will releasing pressure automatically; in order to protection, produce dirt device 10; pressure release gas is out connected to corrosive resistant fan 9(through a pipeline and is even connected to described gas treatment equipment 8 below), avoid causing atmosphere pollution.
According in dust arrester installation of the present utility model, with reference to Fig. 1, described dust arrester installation also can comprise: Control Component 7, communicates to connect in inferior filter 2, two filters in parallel 3, mechanical pump 5, constant voltage vavuum pump 6 and corrosive resistant fans 9.Certainly, from broad sense angle, within valve V1-V15 also can be included in Control Component 7.
In an embodiment of Control Component 7, with reference to Fig. 1, Control Component 7 can comprise: impulse electromagnetic valve 71, is installed between the main anti-blowpipe 32 and corresponding minute anti-blowpipe 33 of each filters in parallel 3, to control the break-make between main anti-blowpipe 32 and this corresponding minute anti-blowpipe 32; Differential pressure transmitter 72, be installed on the side of each filters in parallel 3, detect the pressure differential between each filters in parallel 3 and time filter 2, if the pressure differential that pressure differential is set higher than production technology, by differential pressure transmitter 72, switch two filters in parallel 3, and open gas source S for blowback, corrosive resistant fan 9 and 6 pairs of pressure differentials of constant voltage vavuum pump and carry out blowback operation higher than the filters in parallel 3 of the pressure differential of production technology setting; And pressure transmitter 73, be installed on the top of filters in parallel 3, control the vacuum that 6 pairs of filters in parallel 3 of constant voltage vavuum pump vacuumize.
According in dust arrester installation of the present utility model, with reference to Fig. 1, described dust arrester installation also can comprise: gas treatment equipment 8, controlledly be communicated in filters in parallel 3, mechanical pump 5, constant voltage vavuum pump 6 and be communicated in the corrosive resistant fan 9 that is positioned at downstream, with correspondence, receive the gas that filters in parallel 3, mechanical pump 5, constant voltage vavuum pump 6 are discharged.From filters in parallel 3 gas out, substantially no longer contained dust, reached the object of dedusting, gas enters into gas treatment equipment 8 the insides through mechanical pump 5 and processes.From constant voltage vavuum pump 6 gas out, entering into equally gas treatment equipment 8 the insides processes.
In an embodiment of gas treatment equipment 8, with reference to Fig. 1, gas treatment equipment 8 can be spray column.
In producing an embodiment of dirt device 10, with reference to Fig. 1, produce dirt device 10 and can be chemical vapor deposition stove.
According in dust arrester installation of the present utility model, blowback with gas source S for the blowback gas source of nitrogen is provided.
Chemical vapor deposition stove, spray column take below as example simple declaration is according to the operation of dust arrester installation of the present utility model.
With reference to Fig. 1, startup mechanical pump 5, gas treatment equipment 8(are spray column), gas is chemical vapor deposition stove from producing dirt device 10() escape pipe 101 flow out, first enter main filter 1, in main filter 1, pass through successively veneer 14 and baffle plate 15, from main filter 1, flow out and enter into time filter 2 afterwards, while having dust in inferior filter 2, valve V1 opens, time filter 2 is communicated with the bucket 4 that gathers dust accordingly, thereby makes the dust that is filtered out in time filter 2 drop into gathering dust in bucket 4 of being communicated with it.
From inferior filter 2 top effluent airs via the control of pressure difference transmitter 72 and enter into the bottom of filters in parallel 3 one of them filters in parallel 3 of Fig. 1 left side (take be example) via the corresponding path of three-way pipe T2, the dust containing in gas falls under the effect of gravity, fall bucket 4 the insides of gathering dust (being that valve V2 opens) that are communicated with it, gas has substantially no longer contained dust after the frame of filter element 34 on filters in parallel 3 tops and cloth bag 35 filter, after reaching dedusting object, along circuit P1, flow through mechanical pump 5(while circuit P2, constant voltage vavuum pump 6, circuit P3 does not work, be blowback gas source S, constant voltage vavuum pump 6, corrosive resistant fan 9 does not carry out blowback), by mechanical pump 5 pumpings, entering into gas treatment equipment 8 the insides processes.
In production process, by differential pressure transmitter 72, detect the filters in parallel 3 and time pressure differential of filter 2 the insides in left side, if pressure differential is higher than the setting value of production technology, the dust that these filters in parallel 3 the insides are described is a lot, cloth bag 35 is stopped up by dust, now the filters in parallel 3 in differential pressure transmitter two filters in parallel 3(of 72 switchings left side from Fig. 1 is switched to the filters in parallel 3 on right side, time filter 2 upper end effluent airs enter into the bottom of the filters in parallel 3 on right side via the corresponding path of three-way pipe T2 thus, filters in parallel 3 by right side is carried out above-mentioned dust removal operation, after reaching dedusting object, along circuit P1', flow through mechanical pump 5, by mechanical pump 5 pumpings, entering into gas treatment equipment 8 the insides processes, and circuit P2', constant voltage vavuum pump 6, it (is blowback gas source S that circuit P3' does not work, constant voltage vavuum pump 6, corrosive resistant fan 9 does not carry out blowback).The filters in parallel 3(stopping up for dust i.e. the filters in parallel 3 in left side), open with the controlled valve V7 being communicated with of outside atmosphere accordingly, carry out pressure release, valve-off V7 afterwards, the corresponding unlatching of gas source S (being Open valve V13) and corrosive resistant fan 9 corresponding unlatchings (being Open valve V11) for blowback afterwards, blowback utilizes nitrogen to carry out blowback to filters in parallel 3 with gas source S, corrosive resistant fan 9 pumps out the gas of blowback from the port E of filters in parallel 3, after certain hour (being corrosive resistant fan 9 after the port E of filters in parallel 3 pumps out the gas of most of blowback), valve V11 closes, constant voltage vavuum pump 6 is opened (being Open valve V12), (being that valve V15 opens) extracted and send to gas treatment equipment 8 the insides and processed to the interior remaining gas of filters in parallel 3 out along P2 circuit, the filters in parallel 3 in 6 pairs of left sides of constant voltage vavuum pump is carried out the vacuum of blowback and is controlled by pressure transmitter 73.In like manner, when the dust of filters in parallel 3 the insides on right side is a lot, when cloth bag 35 is stopped up by dust, can adopt aforementioned identical control technique to carry out.
Claims (10)
1. a dust arrester installation, is characterized in that, comprising:
Main filter (1), is connected in the escape pipe (101) of product dirt device (10) to receive the dust of self-produced dirt device (10), and main filter (1) is provided with connector (11) in downstream;
Inferior filter (2), is arranged on the below of main filter (1), by tube connector (T1), is connected with the connector (11) of main filter (1) downstream;
Two filters in parallel (3), bottom by three-limb tube (T2), be connected with the upper end of inferior filter (2) respectively and respectively with controlled connection of inferior filter (2), when a filters in parallel (3) of two filters in parallel (3) is standby another filters in parallel (3) cisco unity malfunction with in two filters in parallel (3), this standby filters in parallel (3) starts and works;
Three buckets (4) that gather dust, be installed on respectively the below of time filter (2) and two filters in parallel (3), and controlled time filter (2) and two filters in parallel (3) of being communicated in respectively, for collecting the dust of time filter (2) and two filters in parallel (3) the inside; And
Mechanical pump (5), the controlled top that is communicated in two filters in parallel (3), to receive the gas that the filters in parallel (3) of the normal work from two filters in parallel (3) discharges and to discharge.
2. dust arrester installation according to claim 1, is characterized in that, downward-sloping with respect to producing dirt device (10) when main filter (1) is installed.
3. dust arrester installation according to claim 1, it is characterized in that, main filter (1) its with produce the veneer (14) that is provided with to tilt and blocks this junction in the junction of escape pipe (101) of dirt device (10), for preventing that the dust of main filter (1) the inside from falling in product dirt device (10).
4. dust arrester installation according to claim 1, is characterized in that, the detachable upper and lower staggered baffle plate (15) that is provided with in main filter (1).
5. dust arrester installation according to claim 1, is characterized in that, described dust arrester installation also comprises:
Gas source for blowback (S), controlled two filters in parallel (3) that are communicated in, provide blowback gas to another filters in parallel (3) described in this during described another filters in parallel (3) cisco unity malfunction in two filters in parallel (3);
Corrosive resistant fan (9), controlled two filters in parallel (3) that are communicated in, to receive the portion gas after described another filters in parallel (3) reverse blowing disposal; And
Constant voltage vavuum pump (6), controlled two filters in parallel (3) that are communicated in, with to after described another filters in parallel (3) reverse blowing disposal and by the residual gas after corrosive resistant fan (9) suction, aspirated;
Wherein, each filters in parallel (3) is the controlled outside atmosphere that is communicated in also, and each filters in parallel (3) comprising:
Housing (31);
Main anti-blowpipe (32), is arranged at the inner top of housing (31) and is fixedly connected on housing (31) and the controlled gas source for blowback (S) that is communicated in;
A plurality of minutes anti-blowpipes (33), be positioned at housing (31) and be positioned at main anti-blowpipe (32) below and respectively with controlled connection of main anti-blowpipe (32);
Frame of filter element (34), is positioned at housing (31) and is fixedly connected on housing (31);
Cloth bag (35), is installed on frame of filter element (34); And
Filter cloth (36), is arranged between a minute anti-blowpipe (33) and frame of filter element (34).
6. dust arrester installation according to claim 5, it is characterized in that, main filter (1) is provided with vacuum malleation safety valve (12) and the controlled corrosive resistant fan (9) that is communicated in, when the escape pipe that produces dirt device (10) is stopped up normally to give vent to anger by dust, cause producing pressure dirt device (10) in and raise and reach after the safety value of vacuum malleation safety valve (12) setting, make to produce dirt device (10), main filter (1) and corrosive resistant fan (9) and be communicated with, so that produce dirt device (10) pressure release.
7. dust arrester installation according to claim 5, is characterized in that, described dust arrester installation also comprises:
Control Component (7), communicates to connect in inferior filter (2), filters in parallel (3), mechanical pump (5), constant voltage vavuum pump (6) and corrosive resistant fan (9).
8. dust arrester installation according to claim 7, is characterized in that, Control Component (7) comprising:
Impulse electromagnetic valve (71), is installed between the main anti-blowpipe (32) and corresponding minute anti-blowpipe (33) of each filters in parallel (3), to control the break-make between main anti-blowpipe (32) and this corresponding minute anti-blowpipe (32);
Differential pressure transmitter (72), be installed on the side of each filters in parallel (3), detect the pressure differential between each filters in parallel (3) and time filter (2), if the pressure differential that pressure differential is set higher than production technology, by differential pressure transmitter (72), switch two filters in parallel (3), and open gas source for blowback (S), corrosive resistant fan (9) and constant voltage vavuum pump (6) pressure differential is carried out to blowback operation higher than the filters in parallel (3) of the pressure differential of production technology setting; And
Pressure transmitter (73), is installed on the top of filters in parallel (3), controls the vacuum that constant voltage vavuum pump (6) vacuumizes filters in parallel (3).
9. dust arrester installation according to claim 7, is characterized in that, described dust arrester installation also comprises:
Gas treatment equipment (8), controlledly be communicated in filters in parallel (3), mechanical pump (5), constant voltage vavuum pump (6) and be communicated in the corrosive resistant fan (9) that is positioned at downstream, with correspondence, receive the gas that filters in parallel (3), mechanical pump (5), constant voltage vavuum pump (6) are discharged.
10. dust arrester installation according to claim 9, is characterized in that, gas treatment equipment (8) is spray column, and producing dirt device (10) is chemical vapor deposition stove, and gas source for blowback (S) is for providing the blowback gas source of nitrogen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320558716.4U CN203525504U (en) | 2013-09-09 | 2013-09-09 | Dust collecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320558716.4U CN203525504U (en) | 2013-09-09 | 2013-09-09 | Dust collecting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203525504U true CN203525504U (en) | 2014-04-09 |
Family
ID=50411767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320558716.4U Expired - Lifetime CN203525504U (en) | 2013-09-09 | 2013-09-09 | Dust collecting device |
Country Status (1)
| Country | Link |
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| CN (1) | CN203525504U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103898475A (en) * | 2014-04-21 | 2014-07-02 | 清远先导材料有限公司 | Multi-chamber graphite deposition device and chemical vapor deposition furnace |
| CN104415635A (en) * | 2013-09-09 | 2015-03-18 | 清远先导材料有限公司 | Dust collecting device |
| CN105039931A (en) * | 2015-08-31 | 2015-11-11 | 清远先导材料有限公司 | Chemical vapor deposition furnace and chemical vapor deposition system |
-
2013
- 2013-09-09 CN CN201320558716.4U patent/CN203525504U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104415635A (en) * | 2013-09-09 | 2015-03-18 | 清远先导材料有限公司 | Dust collecting device |
| CN104415635B (en) * | 2013-09-09 | 2016-06-08 | 清远先导材料有限公司 | Dust arrester installation |
| CN103898475A (en) * | 2014-04-21 | 2014-07-02 | 清远先导材料有限公司 | Multi-chamber graphite deposition device and chemical vapor deposition furnace |
| CN103898475B (en) * | 2014-04-21 | 2017-01-18 | 清远先导材料有限公司 | Multi-chamber graphite deposition device and chemical vapor deposition furnace |
| CN105039931A (en) * | 2015-08-31 | 2015-11-11 | 清远先导材料有限公司 | Chemical vapor deposition furnace and chemical vapor deposition system |
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|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200519 Address after: 239000 east of yongyang Road, west of Nanjing Road, north of Anqing road and south of Lu'an road in Langya Economic Development Zone, Langya District, Chuzhou City, Anhui Province Patentee after: Anhui Guangzhi Technology Co.,Ltd. Address before: 511517 Guangdong city of Qingyuan province high tech Zone Industrial Park Baijia No. 27-9 Patentee before: FIRST RARE MATERIALS Co.,Ltd. |
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