CN108119951B

CN108119951B - Dust-free device and dust-free method thereof

Info

Publication number: CN108119951B
Application number: CN201611075566.6A
Authority: CN
Inventors: 叶挺; 傅乾杰; 陈永明; 梁敬姣
Original assignee: Ningbo Sunny Opotech Co Ltd
Current assignee: Ningbo Sunny Opotech Co Ltd
Priority date: 2016-11-29
Filing date: 2016-11-29
Publication date: 2020-07-24
Anticipated expiration: 2036-11-29
Also published as: CN108119951A

Abstract

The dust-free device comprises an air supply unit; a dust-free unit and an air draft unit; wherein the air supply unit is that dustless unit sends into filtered gas, the convulsions unit releases in predetermined direction with keeping apart the gas of dustless unit makes gas in the dustless unit flows according to the predetermined direction, thereby improves dustless unit gas replacement efficiency to provide good dustless environment.

Description

Dust-free device and dust-free method thereof

Technical Field

The invention relates to a dust-free device and a dust-free method thereof, which are suitable for the production industry sensitive to micro dust, such as the electronic industry, the daily cosmetics industry, the food industry, the printing and packaging industry, the optical and photoelectric industry, the chemical industry, the biopharmaceutical industry, the medical appliance industry and the like.

Background

With the continuous development of modern science and technology, people have more and more strict requirements on the precision and the quality of the product piece. In some industries, such as the optical electronics industry, the precision and quality control of components in each production process are particularly strict, where the quality control includes the control of dust control, and the dust control needs to be controlled within a certain range.

In general, in industrial production where it is desirable to provide a dust free environment, the source of the generation of the dust is mainly three:

firstly, the dust-free environment requires less impurity content in the air, but at the same time requires ventilation, and is not a vacuum environment, but the normal air carries a certain amount of dust particles, so that the dust particles carried by the entering air flow are one of the reasons for carrying the dust particles in the dust-free environment, and are also a source part.

Second, in dustless environments, air flows freely, tends to settle on equipment or products therein, and creates a build up of particulate matter when not cleaned in a timely manner. Some of the devices belong to devices that require movement, such as a lift table, which again mixes dust with the ambient air during movement.

Third, in the air circulation process in the dust-free environment, the air flows out naturally in the conventional way. Here, on the one hand, the air is poorly isolated from the outside air, and on the other hand, the air in the environment is in a free-flowing state without any guiding function, so that the air therein does not easily flow out, a vortex is easily formed, and the efficiency of air replacement as a whole is extremely low.

Fourth, in a dust-free environment, a portion of the fine dust comes from the incoming product. For example, the dust particles on the surface of the product enter the environment in the air flowing process of the environment without dust, and the dust particles are difficult to go out due to the low air flowing efficiency, and most of the dust particles flow in the environment in a circulating mode all the time.

In summary, it is desirable to improve the control of the environment by the whole of the gas flow in, gas flow and gas flow out of the dustless environment, thereby improving the quality of the dustless environment and providing a high quality working environment for the product.

Disclosure of Invention

An object of the present invention is to provide a dust-free apparatus and a dust-free method thereof, which can improve the gas replacement efficiency in the environment, reduce the accumulation of dust particles in the environment, and reduce the gas vortex by guiding the flow direction of the gas flow.

An object of the present invention is to provide a dust-free apparatus and a dust-free method thereof, which control fine dust of an incoming gas by filtering the incoming gas.

An object of the present invention is to provide a dust removing apparatus and a dust removing method thereof, in which the outflow speed of gas is increased by extracting the air being exchanged while preventing the entry of the external air.

The invention aims to provide a dust-free device and a dust-free method thereof, wherein the dust-free device comprises an air supply unit, a detection unit and an air draft unit, the air supply unit supplies filtered gas to the detection unit, and the air draft unit draws the gas from the detection unit, so that the gas in the detection unit does not flow randomly but flows out towards a preset direction.

An object of the present invention is to provide a dust-free apparatus and a dust-free method thereof, wherein the detection unit is a closed environment to isolate the outside air and provide a dust-free environment.

An object of the present invention is to provide a dust-free device and a dust-free method thereof, wherein the detection unit comprises a detection part, the detection part is a moving part, and a dust-proof material is applied on the detection part, so that dust on the surface of the detection part can not freely and automatically stay on the detection part all the time during the movement of the detection part.

An object of the present invention is to provide a dust-free device and a dust-free method thereof, wherein a guide plate is provided at the detecting unit to flexibly guide the airflow to the exhausting unit and further isolate the outside air to prevent the air from flowing back to the detecting unit.

An object of the present invention is to provide a dust-free apparatus and a dust-free method thereof, in which the air draft unit has an air flow guide chamber so that an air flow with fine dust is collected therein and guided out.

To achieve at least one of the above objects, one aspect of the present invention provides a dust-free device, which includes: an air supply unit; a dust-free unit and an air draft unit; the air supply unit is used for supplying filtering air to the dust-free unit, and the air exhaust unit releases the air of the dust-free unit in a separated mode in a preset direction, so that the air in the dust-free unit flows in the preset direction.

According to some embodiments, the dust-free apparatus further includes a blower fan for sucking the outside air and a filter for filtering the sucked air and discharging the filtered air to the dust-free unit.

According to some embodiments, the dust-free apparatus further comprises a fan unit.

According to some embodiments, the dust-free apparatus further comprises a guide plate having at least one guide hole, the guide plate isolating the dust-free chamber and the air draft unit in a gas communication manner, so that the gas is guided from the dust-free chamber to the air draft unit.

According to some embodiments, the air draft unit in the dust-free device is provided with an air flow guide chamber which is communicated with the dust-free chamber through the guide hole, so that air in the dust-free chamber is guided to the air flow guide chamber to be gathered.

According to some embodiments, the suction unit of the dust-free device comprises a suction mechanism for sucking out the gas in the gas flow guiding chamber.

According to some embodiments, the air extracting mechanism in the dust-free device is at least one fan.

According to some embodiments, the direction of the air supply unit and the direction of the exhaust of the air draft unit in the dust-free device are the same.

According to some embodiments, the dust-free chamber of the dust-free device is a closed cavity, and the air is communicated with the air supply unit.

According to some embodiments, the cleanroom unit comprises at least one working member disposed in the cleanroom for cooperating with a product, the working member having a dust-proof medium on a surface thereof for preventing free movement of dust.

According to some embodiments, the dust-proof medium in the dust-free device is grease.

According to some embodiments, the dust-free unit in the dust-free installation comprises at least one working line, which is coordinated with the working of the working member, the working line being arranged to prevent free movement of dust caused by friction.

According to some embodiments, the dust-free device comprises a control unit, the control unit controls the work of the working component, and the air draft unit and the control unit are cooperatively configured so that the heat of the control unit can be dissipated through the air flow of the air draft unit.

According to some embodiments, the dust-free apparatus is configured such that the working member is a moving member.

Another aspect of the present invention provides a method of dusting, comprising the steps of:

(A) conveying a cleaning gas from a direction to a dust-free unit; and

(B) directing gas within the cleanroom unit away from the cleanroom unit from another direction of the cleanroom unit.

According to some embodiments, the clean gas is obtained by filtration in step (a) of the dusting method.

According to some embodiments, in the dust-free method, in the step (a), external air is sucked by a fan of an air supply unit, and the sucked air is filtered by a filter of the air supply unit to supply clean air to the dust-free unit.

According to some embodiments, said step (B) of said dusting method comprises the steps of:

(B1) guiding the gas of the dust-free unit to an air draft unit; and

(B2) and exhausting the gas of the air draft unit.

According to some embodiments, in the step (B1) of the dusting method, the dustless unit gas is guided to a gas flow guiding chamber of the updraft unit through at least one guiding hole.

According to some embodiments, in the step (B2) of the dusting method, the same air draft mechanism exhausts the air in the airflow guiding chamber of the air draft unit.

According to some embodiments, the method of dusting comprises the steps of: dissipating heat from a control unit through the gas in the gas flow directing chamber.

According to some embodiments, the air draft mechanism in the dust-free method is at least one fan.

According to some embodiments, the cleanroom is a clean room for providing a clean environment for a product.

According to some embodiments, the dust-free unit of the dust-free method comprises a working member arranged in the working chamber, and the surface of the working member is provided with a dust-proof medium to prevent free movement of dust.

According to some embodiments, the dust-proof medium in the dust-free method is grease.

According to some embodiments, the working member is a moving member in the dusting method.

According to some embodiments, the dustless unit gas input direction and the direction of leading away are the same in the dustless method, so that the gas flows in a predetermined flow direction.

Drawings

Fig. 1 is a block diagram schematic of a dust free arrangement according to a preferred embodiment of the invention.

Fig. 2 is a perspective view of an embodiment of the dust-free device according to the above preferred embodiment of the present invention.

Fig. 3 is a schematic view of the gas flow guiding of an embodiment of the dust free arrangement according to the above preferred embodiment of the invention.

Fig. 4A and 4B are schematic diagrams of the air supply unit of the implementation mode of the dust-free device according to the preferred embodiment of the invention.

Fig. 5 is a schematic view of the guiding plates of the dust free unit of the embodiment of the dust free arrangement according to the above preferred embodiment of the invention.

Fig. 6 is a schematic view of the elements of the extraction unit of an embodiment of the dust free arrangement according to the above preferred embodiment of the invention.

Fig. 7 is a block diagram of the dustless method according to the above preferred embodiment of the present invention.

Detailed Description

The following description is presented to disclose the invention so as to enable any person skilled in the art to practice the invention. The preferred embodiments in the following description are given by way of example only, and other obvious variations will occur to those skilled in the art. The basic principles of the invention, as defined in the following description, may be applied to other embodiments, variations, modifications, equivalents, and other technical solutions without departing from the spirit and scope of the invention.

It will be understood by those skilled in the art that in the present disclosure, the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for ease of description and simplicity of description, and do not indicate or imply that the referenced devices or components must be constructed and operated in a particular orientation and thus are not to be considered limiting.

In the industries such as the electronic industry, the daily cosmetics industry, the food industry, the printing and packaging industry, the optical and photoelectric industry, the chemical industry, the biopharmaceutical industry, the medical appliance industry and the like, in some industrial production processes, the dust-free environment is sensitive to dust, so that a closed dust-free environment is established for a product, such as a dust-free device, so that the product can be detected or produced. The invention aims to provide a dust-free device 100 and a dust-free method thereof, which provide a solution for the dust-free requirements of different fields, guide the gas flow direction from the whole process of the gas entering, flowing and flowing out of the dust-free environment, feed clean gas into the dust-free environment, guide the gas flow to flow out from the other direction, reduce the vortex in the dust-free environment, improve the gas replacement efficiency, take away the micro dust in the dust-free environment through the flowing gas and improve the dust-free effect; on the other hand, in a dust-free device, the circuit layout is standardized, the friction between circuits is reduced, and the accumulation of tiny dust is reduced; in addition, the dustproof medium is applied to the moving part, so that dust stays in the moving part and cannot be mixed into the airflow of the dust-free environment, the amount of the dust in the dust-free environment is reduced in a plurality of aspects, particularly the content of the dust in the flowing gas is reduced, and good detection or production environments are provided for different products in different fields.

It should be noted that "dust-free" in the dust-free apparatus and the dust-free method of the present invention is not an absolute description, but only illustrates the case where the content of the fine dust is low, or the case where the standard of the content of the environmental fine dust is achieved, and it should be understood by those skilled in the art that the present invention is not limited in this respect.

Referring to fig. 1, a dust-free apparatus 100 according to a preferred embodiment of the present invention is illustrated, the dust-free apparatus 100 including an air supply unit 10, a dust-free unit 20, and an air suction unit 30.

The dust-free unit 20 is used to provide a dust-free environment for product detection or production. The air supply unit 10 supplies clean air, such as filtered air, to the dust-free unit 20 so as to ensure the air circulation in the dust-free environment of the dust-free unit 20. The air draft unit 30 guides the air in the dust-free unit 20 to flow out.

In other words, during inspection or production of a product, the product may be placed in the dust-free unit 20, providing a dust-free environment for the product, in the process, clean gas is fed into the dust-free unit 20 through the air supply unit 10, the gas flow in the dust-free environment of the dust-free unit 20 is pushed, and carry away the remaining fine dust in the dust-free environment, such as fine dust carried from the surface of the product to the dust-free environment, fine dust remaining on the surface of the component in the dust-free environment, and further, the gas in the dust-free unit 20 is guided to flow to the outside in a predetermined direction by the air draft unit 30, and is not or less free-flowing in a dust-free environment, such as forming a vortex, therefore, the micro dust is brought out in time, and the residual dust in the dust-free environment of the dust-free unit 20 is reduced, so that a good dust-free environment is provided for the product.

Further, in some embodiments, the air flow guiding direction of the suction unit 30 and the air feeding direction of the air supply unit 10 are identical, so that the air flows linearly, the air flow rate is increased, and the generation of vortex flow in the dust-free unit 20 by the air is reduced. For example, the air suction unit 30 and the air supply unit 10 are located at both ends of the dust unit 20 in the same direction. Of course, in other embodiments, the air extracting unit 30 and the air blowing unit 10 may be respectively located at different directions of the dust-free unit 20, and it should be understood by those skilled in the art that the present invention is not limited in this respect.

Referring to fig. 2 to 7, an embodiment of the dust-free apparatus 100 in the above preferred embodiment of the present invention is illustrated. The dust-free apparatus 100 includes an air supply unit 10, a dust-free unit 20, and an air suction unit 30. The dust-free unit 20 is used to provide a dust-free working environment. The air supply unit 10 supplies clean air to the dust-free unit 20, and the air draft unit 30 guides the air in the dust-free unit 20 to flow out.

Further, the air supply unit 10 is in gas communication with the dust-free unit 20, and the air exhaust unit 30 is in gas communication with the dust-free unit 20. In one embodiment, the air supply unit 10 is located above the dust-free unit 20, and the air draft unit 30 is located below the dust-free unit 20, so that the air supply direction of the air supply unit 10 is consistent with the air outflow direction of the dust-free unit 20, the air circulation rate is increased, and the vortex is reduced.

Further, referring to fig. 4A and 4B, the air supply unit 10 includes a fan 11 and a filter 12, the fan 11 sucks external air into the interior, and filters the air under the action of the filter 12 to make the air become clean air to enter the dust-free unit 20.

In some embodiments, the Fan 11 and the Filter 12 may constitute an FFU (Fan Filter Unit). The fan 11 can provide a plurality of gears to provide different air suction speeds, such as setting high, medium and low gears, and the air suction speed can be selected according to different requirements. The filter 12 filters the entering air into clean air through multi-stage filtration, and the clean air is sent out at a constant speed of 0.45M/S +/-20% on the whole air outlet surface to provide continuous clean air for a working inner cavity, namely the dust-free unit 20.

Further, referring to fig. 2 and 3, the dust-free unit 20 has a dust-free chamber 21 for providing a dust-free working environment. The clean room 21 may be a closed cavity so as to provide a clean working environment and prevent outside air from directly entering the clean unit 20.

The dust-free unit 20 may further comprise a working member 22, and the working member 22 is used for coordinating the work of the product, such as the detection or production, manufacturing of the product. Preferably, the surface of the working member 22 is provided with a dust-proof medium 25 for preventing the movement of dust. The dust-proof medium 25 has a function of attaching fine dust, and the dust-proof medium 25 is exemplified by but not limited to grease. In particular, in some embodiments, the working element 22 may be a moving element. Because the dustproof medium 25 is arranged on the surface of the moving equipment, when the moving part moves, the dust on the surface of the moving part cannot move freely, and when the dust falls to the moving part, the dust is not easy to leave due to the adhesion function of the dustproof medium 25, so that the content of the dust which moves freely in the dust-free chamber 21 is reduced.

Further, the dust free unit 20 further comprises a number of working lines 23, the working lines 23 cooperating with the working components 22 and the product. The working lines 23 are arranged in a predetermined layout to avoid friction between the working lines 23, thereby reducing generation of fine dust and decreasing a flow speed of fine dust increased due to an increase in temperature in the dust-free environment.

The dust free unit 20 further includes a guide plate 24, and the guide plate 24 separates the dust free unit 20 and the suction unit 30 in a gas communication manner.

Referring to fig. 3 and 6, the drafts unit 30 has an airflow guiding chamber 31 and includes at least one drafts mechanism 32. The air draft mechanism 32 guides the air flow in the air flow guide chamber 31 to the outside.

The guide plate 24 of the dust-free unit 20 has at least one guide hole 241 for communicating the dust-free chamber 21 of the dust-free unit 20 with the airflow guiding chamber 31 of the air draft unit 30, so that the dust-laden air in the dust-free chamber 21 is guided to the airflow guiding chamber 31, and further the air in the airflow guiding chamber 31 is exhausted by the air draft mechanism 11, and the reverse flow of the outside air into the dust-free chamber 21 is prevented.

In this embodiment of the present invention, the air draft unit 30 of the dust-free device 100 is provided with two air draft structures 32, which are respectively arranged in two directions, for example, one direction corresponding to the air flow of the air supply unit 10 and the other direction perpendicular to the air flow of the air supply unit 10, so as to increase the air flow outlet, so that the air in the air flow guiding chamber 31 of the air draft unit 30 can be discharged more quickly. Of course, in other embodiments of the present invention, the ventilation unit 30 may be provided with more ventilation mechanisms 32, or the ventilation mechanisms may be provided only in a certain direction, such as a direction consistent with the airflow direction of the air supply unit 10, and the present invention is not limited in this respect.

In some embodiments, referring to fig. 5, the guide plate 24 has a plurality of guide holes 241 arranged in a predetermined layout.

It should be noted that the guide plate 24 and the guide hole 241 may be configured and shaped according to installation requirements, such as different sizes, linear square holes, or according to requirements of the working member 22 in the dust-free unit 20, and the present invention is not limited in this respect.

By the guiding function of the guiding hole 241, the gas flexibly enters the gas flow guiding chamber 31, on one hand, the gas flow direction is guided, on the other hand, the gas in the dust free chamber 21 and the gas in the gas flow guiding chamber 31 are relatively isolated, and the gas in the gas flow guiding chamber 31 is prevented from returning to the dust free chamber 21 again.

Preferably, the drafts mechanism 32 may be implemented as at least one fan. For example, four fans are uniformly distributed at the bottom of the updraft unit 30 to uniformly and rapidly exhaust the air collected in the airflow guide chamber 31. The location and number of the fans may be set as desired and the invention is not limited in this regard.

It is worth mentioning that the suction unit 30 isolates the clean room unit 20 from the outside air and guides the air to be discharged outside, thereby preventing the outside air from flowing back into the clean room 21.

Referring to fig. 2 and 3, the dust-free apparatus 100 may further include a control unit 40 for controlling the operation of the work member 22. In one embodiment, the drafts unit 30 is configured in coordination with the control unit 40 to improve the dissipation of heat from the control unit 40. More specifically, the installation chamber of the control unit 40 is in gas communication with the airflow guide chamber 31 so as to take away heat generated from the control unit 30 when gas flows in the airflow guide chamber of the suction unit.

It should be noted that the specific structure of the dust-free apparatus 100 shown in the drawings is only illustrative of one way in which the dust-free apparatus 100 applying the dust-free principle of the present invention can be implemented, and in other embodiments, the dust-free apparatus 100 can be implemented in other shapes and structures, and the specific structure of the dust-free apparatus 100 can be designed according to the field of application and the production and inspection requirements, and those skilled in the art should understand that the present invention is not limited in this respect.

In the working process of the dust-free device 100, the air supply unit 10 is used for sucking external air into the fan 11, the external air passes through the air supply unit 10, the filter 12 is used for purifying the dust-free unit 20 to provide clean air with uniform air speed, the clean air enters the dust-free chamber 21 to push the original gas with tiny dust in the dust-free chamber 21 to flow, the gas with tiny dust passes through the guide hole 241 of the guide plate 24 and is guided to the air flow guide chamber 31 of the air draft unit 30, the gas with tiny dust is gathered in the air flow guide chamber 31 to become turbid air, further, the turbid air is discharged out of the dust-free device 100 through the exhaust fan 11, the processes are analogized in sequence, the air flow of the dust-free device 100 forms a circulation system, the source continuously supplies clean air and discharges the turbid air, thereby reaching the dust-free standard and providing a good dust-free environment for the product.

Further, in some embodiments, a guiding channel may be disposed at the airflow outlet of the ventilation unit 30 to release the exhausted turbid gas to a predetermined device or environment, or a purifying device may be disposed to release the turbid gas to the surrounding environment after being purified, so as to reduce secondary pollution to the environment.

In some embodiments of the present invention, the components of the dust-free apparatus 100, such as the air supply unit 10, the dust-free unit 20, and the air draft unit 30, may be made of dust-free materials, thereby further increasing the dust-free rating that can be achieved by the dust-free apparatus 100.

According to the above embodiments of the present invention, referring to fig. 7, the present invention provides a method 1000 of dustless, which comprises the steps of:

1100: delivering cleaning gas to a dust-free unit 20 from a direction; and

1200: the gas in the clean-free unit 20 is directed away from the clean-free unit 20 from the other direction of the clean-free unit 20.

Wherein the clean gas in step 1100 can be obtained by filtering, for example, by delivering clean gas, such as FFU, through the air supply unit 10 composed of a fan 11 and a filter 12, the fan 11 sucks in external air, and then filtering the air sucked by the fan 11 through the filter 12 to obtain clean gas, and delivering the clean gas to the dust-free unit 20, so as to provide continuous clean gas for the dust-free unit 20.

Further, the clean-free unit 20 may include at least one working member 22 disposed in the clean room 21 to facilitate a work of providing a product. A dust-proof medium 25 is applied to the working member 22 to prevent free movement of dust within the clean room 21.

The dust-free unit 20 may further include an operating line 23, wherein the operating line 23 is arranged in a predetermined layout to prevent friction between the operating lines 23, so as to reduce generation of dust and cause free movement of dust.

In step 1200, the cleanroom unit 20 may be a closed unit having a cleanroom 21, and the cleanroom 21 is in gas communication with the cleanroom unit 20.

Wherein the step 1200 may comprise the steps of:

1201: guiding the gas of the dust-free unit 20 to an air draft unit 30;

1202: the air of the exhaust unit 30 is exhausted.

Wherein in step 1201, the dust-free unit 20 and the air draft unit 30 are isolated by a guide plate 24 having at least one guide hole 241 so as to guide air into the air draft unit 30 in an isolated manner. The gas in the clean room 21 is guided to a gas flow guide chamber 31 of the suction unit 30 through the guide hole 241 so that the replaced gas is collected in the suction unit 30.

Wherein in step 1202, the gas in the gas flow guiding chamber 31 is exhausted by an exhaust fan 11 mechanism. Preferably, the exhaust fan 11 may be at least one fan. The air in the dust-free unit 20 is exhausted through the air exhaust unit 30, the dust-free unit 20 is isolated, and external air is prevented from flowing backwards into the dust-free unit 20.

Preferably, in the step 1200, the gas conveying direction and the guiding-away direction of the dust-free unit 20 are consistent, so that the gas flows linearly, the flow efficiency is improved, and the vortex is reduced.

Further, the drafts unit 30 is coordinated with a control unit 40 so that the heat of the control unit 40 is dissipated through the air in the drafts unit 30. In some embodiments, the gas in the gas flow guiding chamber 31 may be made to pass through the control unit 40, so as to take away heat of the control unit 40 during the gas flow.

It will be appreciated by persons skilled in the art that the embodiments of the invention described above and shown in the drawings are given by way of example only and are not limiting of the invention. The objects of the invention have been fully and effectively accomplished. The functional and structural principles of the present invention have been shown and described in the examples, and any variations or modifications of the embodiments of the present invention may be made without departing from the principles.

Claims

1. A dust-free apparatus, comprising:

an air supply unit;

a dust-free unit, wherein the dust-free unit has a dust-free chamber and comprises at least one working component arranged in the dust-free chamber, the working component is used for matching the work of a product, and the surface of the working component is provided with a dust-proof medium to prevent dust from freely moving, wherein the air supply unit is communicated with the dust-free chamber of the dust-free unit, the dust-free unit further comprises a guide plate, and the guide plate is provided with at least one guide hole; and

an air draft unit, wherein the air draft unit is provided with an airflow guide chamber, the guide plate separates the dust-free chamber of the dust-free unit from the airflow guide chamber of the air draft unit, and the guide hole of the guide plate is communicated with the dust-free chamber and the airflow guide chamber, so that the air draft unit is communicated with the dust-free chamber of the dust-free unit; the air supply unit is used for supplying filtering air to the dust-free unit, and the air exhaust unit releases the air of the dust-free unit in a separated mode in a preset direction, so that the air in the dust-free unit flows in the preset direction.

2. The dust-free apparatus of claim 1, wherein the air supply unit comprises a blower fan which sucks in external air and a filter which filters the sucked air and discharges it to the dust-free unit.

3. The dust free device of claim 1, wherein the air supply unit is an FFU.

4. The dust free device of claim 1, wherein the suction unit comprises a suction mechanism to draw gas out of the airflow directing chamber.

5. The dust free device of claim 4, wherein the air extracting mechanism is at least one fan.

6. The dust-free apparatus as claimed in any one of claims 1 to 5, wherein the direction of the air supply unit is the same as the direction of the air exhaust unit.

7. The dust-free apparatus as claimed in any one of claims 1 to 5, wherein the dust-free chamber is a closed chamber and is in gas communication with the air supply unit.

8. The dust-free apparatus as claimed in any one of claims 1 to 5, wherein the dust-free medium is grease.

9. Dust-free installation according to any one of claims 1 to 5, wherein the dust-free unit comprises at least one working line, cooperating with the working of the working member, the working line being arranged to prevent free movement of dust caused by friction.

10. A dust free arrangement according to claim 8, wherein the dust free unit includes at least one working line cooperating with the working of the working member, the working line being arranged to prevent free movement of dust caused by friction.

11. The dust-free apparatus of any one of claims 1-5, wherein the dust-free apparatus comprises a control unit that controls operation of the working member, the air extraction unit and the control unit being cooperatively configured to facilitate dissipation of heat from the control unit via air flow through the air extraction unit.

12. The dust-free apparatus as claimed in any one of claims 1 to 5, wherein the working member is a moving member.

13. A method of dustless processing, comprising the steps of:

(A) delivering cleaning gas from a direction to a cleanroom of a cleanroom unit;

(B) when a working component is matched with a product in the dust-free chamber of the dust-free unit to work, dust is prevented from freely moving by adsorbing the dust through a dust-proof medium on the surface of the working component;

(C) guiding gas from the clean room into an airflow guiding chamber through at least one guiding hole of a guiding plate for separating the clean room and the airflow guiding chamber; and

(D) directing gas within the cleanroom unit away from the cleanroom unit from another direction of the cleanroom unit.

14. The dusting method of claim 13, wherein in step (a), the clean gas is obtained by filtration.

15. The dusting method of claim 13, wherein in step (a), the outside air is sucked by a fan of a blower unit, and the sucked air is filtered by a filter of the blower unit to deliver the clean air to the dusting unit.

16. The cleanout method of claim 13, wherein in step (D), first directing gas within the cleanout chamber of the cleanout unit to an extraction unit for forming the airflow directing chamber, and second exhausting gas from the extraction unit.

17. The dusting method of claim 16 wherein in the method, the air within the airflow directing chamber of the extraction unit is exhausted by an air extraction mechanism.

18. The dusting method of claim 17, wherein in the method, heat of a control unit is dissipated through the gas in the gas flow guiding chamber.

19. The dusting method of claim 17, wherein the air extraction mechanism is at least one fan.

20. A dusting method according to any of claims 13 to 19, wherein the dust-repellent medium is grease.

21. A dusting method according to any of claims 13 to 19, wherein said working member is a moving member.

22. The dusting method of claim 20, wherein the working member is a moving member.

23. A dusting method according to any one of claims 13 to 19, wherein the input direction and the directed exit direction of said dusting unit gas are coincident so that the gas flows in a predetermined flow direction.