Nitrogen cabinet with heat preservation self-purification function
Technical Field
The utility model relates to a nitrogen cabinet technical field specifically is a nitrogen cabinet with heat preservation self-purification function.
Background
A nitrogen cabinet, namely a nitrogen storage cabinet, is an oxygen concentration monitoring type nitrogen protection storage cabinet, is suitable for storing finished products, semi-finished products, raw materials, appliances and the like in the process production of semiconductor devices, and realizes the drying and storage functions of objects by controlling the humidity, the temperature and the oxygen concentration in the cabinet.
Most of present nitrogen gas cabinets do not possess the self-purification function, and there is the temperature difference in the nitrogen gas that lets in and the inside temperature of nitrogen gas cabinet to lead to nitrogen gas cabinet temperature unstable.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a nitrogen cabinet with heat preservation self-purification function to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme:
the utility model provides a nitrogen cabinet with heat preservation self-purification function, includes the outer cabinet body, the bottom fixed mounting of the outer cabinet body has a plurality of evenly distributed's removal wheel, the front side opening department of the outer cabinet body is provided with the cabinet door of symmetric distribution, be provided with the observation window on the cabinet door, the inside of the outer cabinet body is provided with self-purification mechanism, it lets in the mechanism to be provided with nitrogen gas on the right-hand member face of the outer cabinet body.
As a further aspect of the present invention: the utility model discloses a cabinet, including the outer cabinet body, the inner wall bottom fixed mounting of the outer cabinet body has the inner cabinet body, the inside fixed mounting of the inner cabinet body has a plurality of evenly distributed's rack, be provided with the second filter screen on the left and right sides terminal surface of rack, fixed mounting has the gas vent on the up end of the outer cabinet body, be provided with the vacuum pump on the gas vent, it has seted up into the gas vent to correspond nitrogen gas lets in mechanism position department on the right side wall of the outer cabinet body.
As a further aspect of the present invention: the self-purification mechanism is including the installation cover, installation cover fixed mounting is at the top of the interior cabinet body, the inside fixed mounting of installation cover has the fan, fixed mounting has a plurality of evenly distributed's first filter screen between the lateral wall of the interior cabinet body and the inside wall of the outer cabinet body.
As a further aspect of the present invention: the cabinet is characterized in that a control box is fixedly mounted on the right end face of the outer cabinet body, a display screen is arranged on the front end face of the control box, and a plurality of buttons are arranged below the display screen.
As a further aspect of the present invention: the nitrogen gas lets in the mechanism and includes going into the trachea, it is provided with flange to go into tracheal one end, it has the processing case to go into tracheal other end fixed mounting, processing case fixed mounting is on the right side wall of the outer cabinet body, it is corresponding with the position of going into the gas port to handle the case, it is provided with the insulation can on the trachea to go into.
As a further aspect of the present invention: the improved air purifier is characterized in that a static eliminator is fixedly installed inside the treatment box, a third filter screen is arranged on the left side of the static eliminator, connecting pipes which are symmetrically distributed in the left-right direction are fixedly installed on the upper end face of the heat preservation box, threaded pipes are arranged inside the heat preservation box, and two ends of each threaded pipe are communicated with an air inlet pipe.
Compared with the prior art, the beneficial effects of the utility model are that: a nitrogen cabinet with heat preservation and self-purification functions, dust particles in the nitrogen cabinet are cleaned and purified through a self-purification mechanism, nitrogen is introduced through a nitrogen introduction mechanism to achieve the nitrogen cabinet function, an exhaust port and a vacuum pump are matched with the nitrogen to introduce and discharge internal air, drying, protecting and storing of internal object nitrogen are achieved, internal air is driven to circularly flow through a fan, dust particles are filtered through a first filter screen and a second filter screen, the self-purification function in the nitrogen cabinet is achieved, a temperature sensor, a humidity sensor and the like are arranged in an outer cabinet body, a display screen is connected with the display screen to display internal temperature and humidity in real time, an operator can conveniently regulate and control the nitrogen, the nitrogen is introduced through an air inlet pipe, the nitrogen passes through the inside of a heat preservation box, heated water with the same temperature as the internal temperature of the outer cabinet body is introduced through a connecting pipe in the inside of the heat, make the nitrogen gas that lets in keep unanimous with inside temperature, avoid the cooling to realize the heat preservation function, nitrogen gas gets rid of static through the destaticizer, and it is leading-in after filtering through the third filter screen. The utility model relates to a nitrogen cabinet with heat preservation self-purification function through setting up fan, first filter screen and insulation can etc, has reached and has realized the inside self-purification function of nitrogen cabinet, improves the heat preservation effect of the internal portion of outer cabinet when nitrogen gas lets in the drying, has solved most present nitrogen gas cabinets and does not possess the self-purification function, and the nitrogen gas that lets in and the inside temperature of nitrogen gas cabinet have the difference in temperature to lead to the unstable problem of nitrogen gas cabinet temperature.
Drawings
Fig. 1 is a schematic structural diagram of a nitrogen cabinet with a heat preservation and self-purification function.
Fig. 2 is a schematic structural diagram of the interior of a nitrogen gas cabinet with a heat preservation and self-purification function.
FIG. 3 is a schematic structural diagram of a treatment box in a nitrogen cabinet with heat preservation and self-purification functions.
Fig. 4 is a schematic structural diagram of a heat preservation box in a nitrogen cabinet with a heat preservation self-purification function.
In the figure: 1. an outer cabinet body; 2. a cabinet door; 3. an observation window; 4. a moving wheel; 5. a control box; 6. a display screen; 7. a button; 8. a nitrogen gas introduction mechanism; 9. an inner cabinet body; 10. placing a rack; 11. mounting a cover; 12. a fan; 13. a first filter screen; 14. a second filter screen; 15. an exhaust port; 16. a vacuum pump; 17. an air inlet; 18. entering an air pipe; 19. a connecting flange; 20. a treatment tank; 21. a heat preservation box; 22. a static eliminator; 23. a third filter screen; 24. a threaded pipe; 25. and (4) connecting the pipes.
Detailed Description
The technical solution of the present patent will be described in further detail with reference to the following embodiments.
Referring to fig. 1-4, a nitrogen cabinet with heat preservation and self-purification functions comprises an outer cabinet body 1, wherein a plurality of moving wheels 4 which are uniformly distributed are fixedly mounted at the bottom of the outer cabinet body 1, cabinet doors 2 which are symmetrically distributed are arranged at the opening of the front side of the outer cabinet body 1, an observation window 3 is arranged on each cabinet door 2, a self-purification mechanism is arranged inside the outer cabinet body 1, and a nitrogen introducing mechanism 8 is arranged on the right end face of the outer cabinet body 1.
The dust particles in the nitrogen cabinet are cleaned and purified through the self-cleaning mechanism, and the nitrogen cabinet function is realized by introducing the nitrogen into the mechanism 8 through the nitrogen.
The utility model discloses a cabinet, including the outer cabinet body 1, the inner wall bottom fixed mounting of the outer cabinet body 1 has the inner cabinet body 9, the inside fixed mounting of the inner cabinet body 9 has a plurality of evenly distributed's rack 10, be provided with second filter screen 14 on the left and right sides terminal surface of rack 10, fixed mounting has gas vent 15 on the up end of the outer cabinet body 1, be provided with vacuum pump 16 on the gas vent 15, it has seted up into gas port 17 to correspond nitrogen gas and let in 8 positions departments of mechanism on the right side wall of the outer cabinet body 1.
The exhaust port 15 and the vacuum pump 16 are matched with nitrogen to introduce and exhaust internal air, so that the internal object nitrogen is dried, protected and stored.
The self-purification mechanism is including installation cover 11, installation cover 11 fixed mounting is at the top of the internal cabinet body 9, the inside fixed mounting of installation cover 11 has fan 12, fixed mounting has a plurality of evenly distributed's first filter screen 13 between the lateral wall of the internal cabinet body 9 and the inside wall of the external cabinet body 1.
The fan 12 drives the internal gas to circularly flow, so that dust particles are filtered through the first filter screen 13 and the second filter screen 14, and the self-cleaning function inside the nitrogen cabinet is realized.
The cabinet is characterized in that a control box 5 is fixedly mounted on the right end face of the outer cabinet body 1, a display screen 6 is arranged on the front end face of the control box 5, and a plurality of buttons 7 are arranged below the display screen 6.
The inside of the outer cabinet body 1 is provided with temperature sensor and humidity transducer etc., thereby display screen 6 can show inside temperature and humidity rather than being connected in real time, and the operating personnel of being convenient for regulates and control.
The nitrogen introducing mechanism 8 comprises an air inlet pipe 18, a connecting flange 19 is arranged at one end of the air inlet pipe 18, a processing box 20 is fixedly mounted at the other end of the air inlet pipe 18, the processing box 20 is fixedly mounted on the right side wall of the outer cabinet body 1, the processing box 20 corresponds to the air inlet 17 in position, and an insulation box 21 is arranged on the air inlet pipe 18.
The inside fixed mounting of processing case 20 has static eliminator 22, the left side of static eliminator 22 is provided with third filter screen 23, the up end of insulation can 21 is fixed mounting has bilateral symmetry's connecting pipe 25, the inside of insulation can 21 is provided with screwed pipe 24, the both ends of screwed pipe 24 are linked together with income trachea 18.
Leading-in nitrogen gas through income trachea 18, nitrogen gas passes through inside the insulation can 21, and the inside of insulation can 21 is through the leading-in heating water the same with the internal temperature of outer cabinet body 1 of connecting pipe 25, and nitrogen gas thermally equivalent heaies up through screwed pipe 24 for the nitrogen gas that lets in keeps unanimous with inside temperature, avoids the cooling, thereby realizes the heat preservation function, and nitrogen gas gets rid of static through static eliminator 22, and it is leading-in after filtering through third filter screen 23.
The utility model discloses a theory of operation is: a nitrogen cabinet with heat preservation and self-purification functions, dust particles in the nitrogen cabinet are cleaned and purified through a self-purification mechanism, nitrogen is introduced through a nitrogen introducing mechanism 8 to achieve the nitrogen cabinet function, an exhaust port 15 and a vacuum pump 16 are matched with the nitrogen to introduce exhausted internal air, drying, protecting and storing of internal object nitrogen are achieved, internal air is driven to circularly flow through a fan 12, dust particles are filtered through a first filter screen 13 and a second filter screen 14, the self-purification function in the nitrogen cabinet is achieved, a temperature sensor, a humidity sensor and the like are arranged in an outer cabinet body 1, a display screen 6 is connected with the display screen to display internal temperature and humidity in real time, an operator can conveniently regulate and control the nitrogen, the nitrogen is introduced through an air inlet pipe 18, the nitrogen passes through an inner part of an insulation cabinet 21, heated water with the same temperature as the inner part of the outer cabinet body 1 is introduced through a connecting pipe, through 24 nitrogen gas thermally equivalent intensification of screwed pipe for the nitrogen gas that lets in keeps unanimous with inside temperature, avoids the cooling, thereby realizes the heat preservation function, and the nitrogen gas gets rid of static through static eliminator 22, and it is leading-in after filtering through third filter screen 23.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
Although the preferred embodiments of the present patent have been described in detail, the present patent is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present patent within the knowledge of those skilled in the art.