CN113697263A - Nitrogen cabinet - Google Patents
Nitrogen cabinet Download PDFInfo
- Publication number
- CN113697263A CN113697263A CN202111110192.8A CN202111110192A CN113697263A CN 113697263 A CN113697263 A CN 113697263A CN 202111110192 A CN202111110192 A CN 202111110192A CN 113697263 A CN113697263 A CN 113697263A
- Authority
- CN
- China
- Prior art keywords
- cabinet body
- nitrogen
- cabinet
- nitrogen gas
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims abstract description 73
- 229910052757 nitrogen Inorganic materials 0.000 title claims abstract description 28
- 229910001873 dinitrogen Inorganic materials 0.000 claims abstract description 17
- 238000005192 partition Methods 0.000 claims abstract description 7
- 239000011148 porous material Substances 0.000 claims description 3
- 238000003860 storage Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000009776 industrial production Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
- B65D25/02—Internal fittings
- B65D25/04—Partitions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
- B65D25/54—Inspection openings or windows
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
- B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
- B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
- B65D81/2069—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas in a special atmosphere
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/50—Containers, packaging elements or packages, specially adapted for particular articles or materials for living organisms, articles or materials sensitive to changes of environment or atmospheric conditions, e.g. land animals, birds, fish, water plants, non-aquatic plants, flower bulbs, cut flowers or foliage
Abstract
The invention provides a nitrogen cabinet, which comprises a cabinet body (1), wherein a group of partition plates (2) are arranged in the cabinet body (1), a nitrogen input pipe (3) is introduced into the cabinet body (1), and a control valve which is correspondingly matched with the nitrogen input pipe (3) is arranged on the nitrogen input pipe, and is characterized in that: be equipped with a set of through-hole (2 a) on one of them baffle (2), be equipped with moisture detector (4) in the cabinet body (1), be equipped with nitrogen gas discharge subassembly (5) in the cabinet body (1), be equipped with on the outer wall of the cabinet body (1) and form signal connection complex control module with control valve, moisture detector (4) and nitrogen gas discharge subassembly (5). The nitrogen discharge device has the advantages of simple structure and convenience in use, and can detect the nitrogen concentration in the cabinet body in real time and control the opening or closing of the nitrogen discharge assembly.
Description
The technical field is as follows:
the invention relates to the field of semiconductor storage, in particular to a nitrogen cabinet.
Background art:
with the rapid development of the semiconductor industry, the utilization rate of nitrogen gas cabinets by large semiconductors and military enterprises is higher and higher, and the nitrogen gas cabinets are used as a storage device and generally installed in workshops for storing finished products, semi-finished products, appliances and the like in the industrial production process.
However, the existing device for storing and taking materials in the nitrogen cabinet applied to industrial production has the following problem that the worker can often work in the area, the materials placed in the nitrogen cabinet can release some chemical gases, and the gases in the cabinet are replaced and then discharged indoors, so that the harm to the health of the workers in the place can be caused.
The invention content is as follows:
the invention provides a nitrogen cabinet for overcoming the defects in the prior art.
The application provides the following technical scheme:
the utility model provides a nitrogen cabinet, it includes the cabinet body, at the internal a set of baffle that is equipped with of cabinet, let in on the cabinet body has the nitrogen gas input tube, is equipped with on the nitrogen gas input tube and corresponds complex control valve, its characterized in that: the internal moisture detector that is equipped with of cabinet, at the internal nitrogen gas exhaust subassembly that is equipped with of cabinet, be equipped with on the external wall of cabinet and form signal connection complex control module with control valve, moisture detector and nitrogen gas exhaust subassembly.
On the basis of the technical scheme, the following further technical scheme can be provided:
the nitrogen gas discharge assembly comprises a shell, wherein an air outlet pipe penetrates through the shell, one end of the air outlet pipe extends out of the outer side of the cabinet body, the other end of the air outlet pipe extends into the inner side of the cabinet body, and a vacuum pump, a check valve, a buffer and a purifier are sequentially communicated with the air outlet pipe in the shell.
And a grid plate is arranged in the group of partition plates.
The buffer comprises a cavity, one end of the cavity is provided with an air inlet, the other end of the cavity is provided with an air outlet, and at least one pore plate is arranged in the cavity.
The invention has the advantages that:
the nitrogen discharge device has the advantages of simple structure and convenience in use, and can detect the nitrogen concentration in the cabinet body in real time and control the opening or closing of the nitrogen discharge assembly.
Description of the drawings:
FIG. 1 is a front view of the present invention;
FIG. 2 is a schematic view of the structure within the cabinet of the present invention;
FIG. 3 is a schematic view of the nitrogen purge assembly of the present invention;
FIG. 4 is a rear view of the present invention;
fig. 5 is a schematic view of the structure of the buffer in the nitrogen purge assembly.
The specific implementation mode is as follows:
as shown in fig. 1-5, a nitrogen cabinet comprises a cabinet body 1 and a cabinet door 1a, wherein two parallel partition plates 2 are connected in the cabinet body 1, the partition plates 2 are distributed up and down, a grid plate 2a is further connected on the cabinet body 1 between the two partition plates 2, and the internal space of the cabinet body 1 is divided into a plurality of storage areas which are communicated with each other through the partition plates 2 and the grid plate 2 a.
A group of transparent baffles 1b are arranged on the cabinet door 1a corresponding to each storage area, so that articles stored in the cabinet body can be seen through the transparent baffles 1 b. The transparent baffle 1b can be the same or different in shape according to the size of the storage area.
A nitrogen input pipe 3 is introduced into one side of the upper part of the cabinet body 1, a control valve which is correspondingly matched with the nitrogen input pipe 3 is arranged on the outer side of the cabinet body 1, and one end of the nitrogen input pipe 3 is communicated with a nitrogen source which is not shown in the figure. The control valve is an electromagnetic valve. An air outlet pipe 7 is arranged at the other side of the cabinet body 1.
The nitrogen gas exhaust subassembly 5 is installed at the 1 top of the cabinet body, nitrogen gas exhaust subassembly 5 include, through division board and the outer wall of the cabinet body 1 casing 5a of cutting apart in the cabinet body 1, wear to be equipped with outlet duct 5b on casing 5a, the cabinet body 1 outside is stretched out to outlet duct 5b one end, the other end passes and stretches into casing 5a to the internal side of cabinet. A vacuum pump 5c, a check valve 5d, a buffer 5e, and a purifier 5f are connected to an air outlet pipe 5b in the casing 5a in this order. .
The buffer 5e comprises a cavity a, one end of the cavity a is provided with an air inlet hole b, the other end of the cavity a is provided with an air outlet hole c, and two pore plates d are installed in the cavity a in a staggered mode.
A group of heat dissipation holes 6 are also arranged on the outer wall of the cabinet body 1 at one side of the shell 5 a. The inner wall of the cabinet body 1 is provided with a humidity detector 4, and the side wall of the cabinet body 1 is provided with a control module 8. The control valve, the vacuum pump 5c and the moisture detector 4 are in electrical signal control cooperation with the control module 8 through cables not shown in the figure.
The control module 6 is also provided with a display screen, so that the humidity value in the cabinet body can be checked in real time.
The working principle is as follows:
when moisture detector detected that the internal humidity of cabinet is less than certain numerical value, control module will control the control valve and open and let in nitrogen gas cabinet internally, then open the vacuum pump, take out the internal gas of cabinet, the exhaust cabinet body after the purification of clarifier. When the humidity detector detects that the humidity in the cabinet body reaches a certain value, the control module controls the control valve and the vacuum pump to be closed simultaneously.
Claims (4)
1. The utility model provides a nitrogen cabinet, it includes the cabinet body (1), is equipped with a set of baffle (2) in the cabinet body (1), lets in on the cabinet body (1) has nitrogen gas input tube (3), is equipped with on nitrogen gas input tube (3) to correspond complex control valve, its characterized in that: be equipped with moisture detector (4) in the cabinet body (1), be equipped with nitrogen gas discharge subassembly (5) in the cabinet body (1), be equipped with on the outer wall of the cabinet body (1) and form signal connection complex control module with control valve, moisture detector (4) and nitrogen gas discharge subassembly (5).
2. A nitrogen cabinet according to claim 1, wherein: nitrogen gas exhaust assembly (5) include casing (5 a), wear to be equipped with outlet duct (5 b) on casing (5 a), outlet duct (5 b) one end stretches out the cabinet body (1) outside, the other end stretches into the internal side of cabinet, it has vacuum pump (5 c) to communicate in proper order on outlet duct (5 b) in casing (5 a), check valve (5 d), buffer (5 e), clarifier (5 f).
3. A nitrogen cabinet according to claim 1, wherein: a grating plate (2 a) is arranged in the group of partition plates (2).
4. A nitrogen cabinet according to claim 1, wherein: the buffer (5 e) comprises a cavity (a), one end of the cavity (a) is provided with an air inlet (b), the other end of the cavity (a) is provided with an air outlet (c), and at least one pore plate (d) is arranged in the cavity (a).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111110192.8A CN113697263A (en) | 2021-09-23 | 2021-09-23 | Nitrogen cabinet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111110192.8A CN113697263A (en) | 2021-09-23 | 2021-09-23 | Nitrogen cabinet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113697263A true CN113697263A (en) | 2021-11-26 |
Family
ID=78661566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111110192.8A Pending CN113697263A (en) | 2021-09-23 | 2021-09-23 | Nitrogen cabinet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113697263A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2326695A (en) * | 1994-06-30 | 1996-01-18 | Cryovac, Inc. | Barrier package for fresh meat products |
| CN200964254Y (en) * | 2006-09-19 | 2007-10-24 | 富创得科技股份有限公司 | Nitrogen cabinet with identification and aeration device |
| CN210259571U (en) * | 2019-07-12 | 2020-04-07 | 河北圣昊光电科技有限公司 | Nitrogen cabinet with heat preservation self-purification function |
| CN212673465U (en) * | 2020-07-23 | 2021-03-09 | 河南绿友环境科技有限公司 | Sterilization and disinfection air purification unit |
-
2021
- 2021-09-23 CN CN202111110192.8A patent/CN113697263A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2326695A (en) * | 1994-06-30 | 1996-01-18 | Cryovac, Inc. | Barrier package for fresh meat products |
| CN200964254Y (en) * | 2006-09-19 | 2007-10-24 | 富创得科技股份有限公司 | Nitrogen cabinet with identification and aeration device |
| CN210259571U (en) * | 2019-07-12 | 2020-04-07 | 河北圣昊光电科技有限公司 | Nitrogen cabinet with heat preservation self-purification function |
| CN212673465U (en) * | 2020-07-23 | 2021-03-09 | 河南绿友环境科技有限公司 | Sterilization and disinfection air purification unit |
Non-Patent Citations (1)
| Title |
|---|
| 刘世浪: "LTCC电路基板金层表面斑点问题及措施", 《通讯世界》 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204865334U (en) | Environment -friendly air purification pipe | |
| CN113697263A (en) | Nitrogen cabinet | |
| CN108891727A (en) | A kind of industrial chemicals has the storage device of moisture-proof function | |
| CN208125401U (en) | Pernicious gas space simulation test module system | |
| CN205413868U (en) | Variable blast volume control system | |
| CN208040655U (en) | A kind of air compressor machine with noise elimination function | |
| KR20210036443A (en) | clean bench with capable of counting particulate matter | |
| CN203738423U (en) | Vacuum adsorption device of cantilever type machining center | |
| CN214636482U (en) | Air exhaust type PP (polypropylene) medicine cabinet for laboratory | |
| CN213016692U (en) | Cooling device of natural gas compressor | |
| CN208818439U (en) | A kind of automobile air conditioner compressor valve group air-tightness detection device | |
| CN204534995U (en) | For air-conditioning plenum box and the air-conditioning system of engine performance measuring | |
| CN217795103U (en) | Annular rubber product production vulcanizing device with waste gas treatment function | |
| CN208621250U (en) | A kind of movable multipurpose leak detector | |
| CN201277935Y (en) | Detection apparatus for gas barrier performance | |
| CN206248316U (en) | A kind of check valve reliability-test equipment | |
| CN105382010A (en) | Variable-air-volume control system | |
| CN105396437A (en) | Fully-automatic-control movable heatless regeneration adsorption type drying machine | |
| CN203577832U (en) | Novel drug weight scale | |
| CN219348340U (en) | A collect detection device for chemical industry waste gas | |
| CN210834836U (en) | Passive gas detection device | |
| JP3193463U (en) | Gas adsorption device and draft chamber | |
| CN214843899U (en) | Fluid mechanical test equipment with automatic gas collecting and discharging device | |
| CN216747655U (en) | Gas detection device for chemical safety production | |
| CN109772081A (en) | Full-automatic central dust-collection system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20211126 |
|
| RJ01 | Rejection of invention patent application after publication |