CN105652037B - 平面内振动梁加速度计 - Google Patents

平面内振动梁加速度计 Download PDF

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Publication number
CN105652037B
CN105652037B CN201511005831.9A CN201511005831A CN105652037B CN 105652037 B CN105652037 B CN 105652037B CN 201511005831 A CN201511005831 A CN 201511005831A CN 105652037 B CN105652037 B CN 105652037B
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support base
resonators
accelerometer
electrodes
proof mass
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CN201511005831.9A
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Chinese (zh)
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CN105652037A (zh
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S·F·贝卡
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Honeywell International Inc
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Honeywell International Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/03—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses by using non-electrical means
    • G01P15/032—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses by using non-electrical means by measuring the displacement of a movable inertial mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
CN201511005831.9A 2014-11-14 2015-11-13 平面内振动梁加速度计 Active CN105652037B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/542,323 US9689888B2 (en) 2014-11-14 2014-11-14 In-plane vibrating beam accelerometer
US14/542323 2014-11-14

Publications (2)

Publication Number Publication Date
CN105652037A CN105652037A (zh) 2016-06-08
CN105652037B true CN105652037B (zh) 2019-08-27

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Family Applications (1)

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CN201511005831.9A Active CN105652037B (zh) 2014-11-14 2015-11-13 平面内振动梁加速度计

Country Status (4)

Country Link
US (1) US9689888B2 (enExample)
EP (1) EP3021125B1 (enExample)
JP (1) JP2016095301A (enExample)
CN (1) CN105652037B (enExample)

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CN111796119B (zh) * 2020-07-20 2022-05-17 合肥工业大学 基于纳米压电梁的谐振式加速度传感器及其制备方法
US11459231B2 (en) * 2020-11-23 2022-10-04 United States Government As Represented By The Secretary Of The Army Microelectronic isolation system
US11703521B2 (en) 2020-12-04 2023-07-18 Honeywell International Inc. MEMS vibrating beam accelerometer with built-in test actuators
JP7421508B2 (ja) * 2021-02-17 2024-01-24 株式会社東芝 センサ及び電子装置
JP7518803B2 (ja) * 2021-09-02 2024-07-18 株式会社東芝 センサ及び電子装置
CN114280329A (zh) * 2021-12-27 2022-04-05 西安交通大学 一种双端固支音叉石英加速度传感器
US11965907B2 (en) * 2022-04-02 2024-04-23 Emcore Corporation Resonantly vibrating accelerometer driven in multiple vibrational modes
US11953514B2 (en) * 2022-04-02 2024-04-09 Emcore Corporation Self-compensating resonantly vibrating accelerometer driven in multiple vibrational modes
US11959935B2 (en) * 2022-04-02 2024-04-16 Emcore Corporation Resonantly vibrating accelerometer with cross-coupling signal suppression
US20230366909A1 (en) * 2022-05-13 2023-11-16 Honeywell International Inc. Vibrating beam accelerometer
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Also Published As

Publication number Publication date
US9689888B2 (en) 2017-06-27
CN105652037A (zh) 2016-06-08
EP3021125B1 (en) 2017-06-07
US20160139171A1 (en) 2016-05-19
JP2016095301A (ja) 2016-05-26
EP3021125A1 (en) 2016-05-18

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