CN105593636B - Check measurement regional compensation method when substrate - Google Patents
Check measurement regional compensation method when substrate Download PDFInfo
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- CN105593636B CN105593636B CN201480054313.3A CN201480054313A CN105593636B CN 105593636 B CN105593636 B CN 105593636B CN 201480054313 A CN201480054313 A CN 201480054313A CN 105593636 B CN105593636 B CN 105593636B
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- 238000005259 measurement Methods 0.000 title claims abstract description 165
- 239000000758 substrate Substances 0.000 title claims abstract description 93
- 238000000034 method Methods 0.000 title claims abstract description 62
- 239000011159 matrix material Substances 0.000 claims abstract description 70
- 238000007689 inspection Methods 0.000 claims abstract description 32
- 230000009466 transformation Effects 0.000 claims description 22
- 238000005452 bending Methods 0.000 claims description 14
- PXFBZOLANLWPMH-UHFFFAOYSA-N 16-Epiaffinine Natural products C1C(C2=CC=CC=C2N2)=C2C(=O)CC2C(=CC)CN(C)C1C2CO PXFBZOLANLWPMH-UHFFFAOYSA-N 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 12
- 230000000694 effects Effects 0.000 description 6
- 230000006870 function Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 101001045744 Sus scrofa Hepatocyte nuclear factor 1-beta Proteins 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/001—Industrial image inspection using an image reference approach
-
- G06T5/80—
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/0006—Industrial image inspection using a design-rule based approach
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30141—Printed circuit board [PCB]
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30168—Image quality inspection
Abstract
The present invention relates to a kind of measurement regional compensation methods when inspection substrate.The above method includes: the step of judging the validity in the first measurement region on substrate；In the case where above-mentioned first measurement region (FOV) does not have validity, carrying out the step of determining multiple effective measurement region (FOV) in adjacent multiple measurement regions within preset radius centered on above-mentioned first measurement region (FOV)；The step of extracting multiple feature objects within above-mentioned preset radius centered on above-mentioned first measurement region in above-mentioned multiple effective measurements region (FOV)；And the step of compensation matrix for above-mentioned first measurement region is generated using the information of above extracted multiple feature objects.According to the above method, even if also can be improved the reliability of inspection result when checking substrate in the case where the information using the feature object in the first measurement region does not have validity come the compensation matrix generated.
Description
Technical field
The present invention relates to a kind of measurement regional compensation methods when inspection substrate, in more detail, are related to one kind and work as and can not believe
Rely by the information in current measurement region come the compensation matrix generated validity when, using with current measurement region phase
Information in adjacent measurement region generates the method for being directed to the current compensation matrix for measuring region.Also, it is related to a kind of incite somebody to action
The measurement region of flexible printed circuit substrate is further subdivided into multiple regions, Lai Shengcheng compensation matrix, thus by being subdivided
The different regions changed compensate the seat calibration method of the liner of bending or distortion based on substrate.
Background technique
Under normal circumstances, at least one printed circuit board (printed circuit is internally provided in electronic device
board；PCB), circuit pattern, connection cushion part are installed and on this printed circuit board and padded with above-mentioned connection
A variety of circuit elements such as the driving chip of portion's electrical connection.
Under normal circumstances, in order to confirm, whether a variety of circuit elements are normally formed in above-mentioned printed circuit base as described above
Plate uses shape measuring apparatus.
Existing shape measuring apparatus sets scheduled measurement region (Field of View, FOV), and checks scheduled
Whether circuit element normally forms in said determination region.
Only the position that is measured is being needed accurately set measurement region, just can normally executed to needing to measure
The measurement of circuit element, however the measuring object of printed circuit board etc can be bent due to bottom substrate
(warp), it distorts (distortion) etc. to distort, thus needs to compensate for that.
For this purpose, can use the features objects such as the bending pattern or sectional hole patterns on printed circuit board (PCB) to generate and mend
Matrix is repaid, and compensates the position of the liner in measurement region.But the effective of the compensation matrix in region is measured when that can not trust
When property, it is desirable to provide the method for being able to solve problems.
On the other hand, under normal circumstances, flexible print circuit (Flexible Printed Circuit；FPCB) for soft
The circuit substrate of complicated circuit is formed on tough insulating film.
Flexible circuit board is as the polyester (Polyester for using flexible material；) or polyimides PET
(Polyimide；The substrate of heat-resistant plastics film such as PI), because being bent, be overlapped, fold, wind, it is bent the flexibilities such as turn round and can be real
The effective use in existing space and three-dimensional wiring etc..Therefore, be used in video camera, vehicle audio, computer and printer head,
Display, portable device and touch input unit etc..
Recently, with the size reduction for the electronic product for using flexible circuit board, signal generating unit and transfer unit
Become diversified and integrated, is printed with multiple circuits in narrow area.According to used purposes, flexible circuit board with
After preparing multiple panels for being printed with and executing the circuit of function by the state that constituent parts arrange, constituent parts panel is cut off, and produce
For each product.
As described above, flexible circuit board needs to print the panel of small area with a substrate is made in multiple panels
Complicated circuit, therefore, because the raising of integrated level and increase disqualification rate.
As a result, when making flexible circuit board, the whether undesirable inspection of circuit for checking and printing in each panel is executed
Operation.
At this point, due to the bending (warp) of the characteristic of the flexible material as flexible circuit board, distortion
(distortion) etc. it distorts than more serious, thus needs to provide the compensation method that the influence of this distortion can be minimized.
Summary of the invention
The technical issues of solution
In order to solve the above-mentioned technical problem, the object of the present invention is to provide measurement region benefits when a kind of inspection substrate
Compensation method can not trust through the information in current measurement region (FOV) working as come the validity of the compensation matrix generated
When, the information in the measurement region adjacent with current measurement region can be utilized to generate the benefit for being directed to current measurement region
Repay matrix.
On the other hand, the object of the present invention is to provide a kind of measurement regional compensation methods when inspection substrate, soft
Property printed circuit board bending or distortion serious situation under, can will thus caused by influence minimize.
The purpose of the present invention is not limited to purpose mentioned above, the ordinary skill people of the technical field of the invention
Member can be clearly understood that other unmentioned a variety of purposes from record below.
Technical solution
Measurement regional compensation method packet when the inspection substrate of the one embodiment of the present invention for solving the above problems
It includes: the step of judging the validity in the first measurement region on substrate；There is no the case where validity in above-mentioned first measurement region
Under, being come centered on above-mentioned first measurement region, determination in adjacent multiple measurement regions within preset radius is more
The step of a effective measurement region；It is extracted centered on above-mentioned first measurement region in above-mentioned multiple effective measurement regions above-mentioned
The step of multiple feature objects within preset radius；And the information using above extracted multiple feature objects
Come the step of generating the compensation matrix for above-mentioned first measurement region.
The step of judging the validity in above-mentioned first measurement region may include: to acquire most in above-mentioned first measurement region
The step of coordinate of multiple liners of periphery；The coordinate of multiple feature objects of outermost is acquired in above-mentioned first measurement region
The step of；For the first area of the first polygon of the coordinate for the multiple liners for connecting above-mentioned outermost, calculate in connection
State the ratio of the second area of the overlapping of the second polygon of the coordinate of multiple feature objects of the first polygon and above-mentioned outermost
The step of rate；And the step of whether above-mentioned ratio is greater than preset a reference value judged.
The step of determining above-mentioned multiple effective measurement regions may include: for each above-mentioned adjacent multiple measurement regions
Domain, the step of acquiring the coordinate of multiple liners of outermost in above-mentioned each measurement region；It is acquired in above-mentioned each measurement region
The step of coordinate of multiple feature objects of outermost；It is polygon for the first of the coordinate for the multiple liners for connecting above-mentioned outermost
First area of shape calculates more than the second of the coordinate for connecting multiple feature objects of above-mentioned first polygon and above-mentioned outermost
The step of ratio of the second area of the overlapping of side shape；And judge whether above-mentioned ratio is greater than the step of preset a reference value
Suddenly.
It can be by (area of the overlapping of above-mentioned first polygon and above-mentioned second polygon)/above-mentioned first area × 100
And determine above-mentioned ratio.
The coordinate of multiple liners of above-mentioned outermost can for above-mentioned outermost multiple liners centre coordinate, it is above-mentioned most
The coordinate of multiple feature objects of periphery can be the centre coordinate of multiple feature objects of above-mentioned outermost.
It can be by confirming whether above-mentioned multiple effective quantity for measuring the feature object that region respectively includes are greater than in advance
The value of setting determines above-mentioned multiple effective measurement regions.
The center in above-mentioned first measurement region can be the seat of the liner of the outermost in connection above-mentioned first measurement region
Mark is come the center of the polygon generated.
Features described above object can be the corner of sectional hole patterns, circular pattern or bending pattern in above-mentioned first measurement region
At least one of part.
Before the step of generating above-mentioned compensation matrix, the above method can also include the effective of the above-mentioned compensation matrix of prediction
The step of property.
The step of predicting the validity of above-mentioned compensation matrix may include: to acquire outermost in above-mentioned first measurement region
Multiple liners coordinate the step of；In above-mentioned multiple effective measurement regions (FOV), in being with above-mentioned first measurement region
The heart acquires the step of the coordinate of multiple feature objects of outermost in multiple feature objects within above-mentioned preset radius
Suddenly；For the first area of the first polygon of the coordinate for the multiple liners for connecting above-mentioned outermost, connection above-mentioned the is calculated
The ratio of the second area of the overlapping of second polygon of the coordinate of one polygon and multiple feature objects of above-mentioned outermost
Step；And the step of whether above-mentioned ratio is greater than preset a reference value judged.
Measurement regional compensation method packet when the inspection substrate of another embodiment of the present invention for solving the above problems
It includes: in the step of extracting feature object on the measurement region (FOV) of substrate；Selection is utilized in above extracted feature object
The coordinate of the feature object of adjacent at least three or more is come the polygon that is formed, thus the step of setting multiple effective coverages；
It is raw by each above-mentioned effective coverage using the coordinate for the feature object for distinguishing corresponding polygon with above-mentioned multiple effective coverages
The step of at compensation matrix；And selection is compensated the step of the coordinate of above-mentioned liner by the compensation matrix that each above-mentioned liner matches
Suddenly.
Above-mentioned effective coverage can be set centered on the barycentric coodinates of polygon corresponding with above-mentioned effective coverage
Within effective distance.
In the compensation matrix of each above-mentioned effective coverage, it is provided with above-mentioned liner and from above-mentioned liner to above-mentioned polygon
The smallest compensation matrix of distance until center of gravity can be selected as the compensation matrix for above-mentioned liner.
Above-mentioned effective distance can be formed centered on above-mentioned barycentric coodinates the feature object of above-mentioned polygon coordinate it
Between distance average distance and determine.
Above-mentioned polygon can be triangle.
Features described above object can be the corner of sectional hole patterns, circular pattern or bending pattern in above-mentioned first measurement region
At least one of part.
Above-mentioned compensation matrix can be affine transformation (affine transformation) matrix or projective transformation
(projective transformation) matrix, scale and rotation (scaling&rotation transformation) become
Change one of matrix.
Invention effect
Measurement regional compensation method when checking substrate of embodiment according to the present invention, when can not trust by current
When measuring validity of the information in region come the compensation matrix generated, the measurement region adjacent with current measurement region is utilized
Interior information is directed to the compensation matrix in current measurement region to generate, so as to improve the base for being directed to current measurement region
The reliability of plate inspection result.
It, will be by the bending of substrate or distortion etc also, when compensation in flexible printed circuit substrate measures region
It influences to minimize caused by distorting, so as to improve the reliability for checking substrate.
Effect of the invention is not limited to effect mentioned above, as long as the technical field of the invention is common
Technical staff, so that it may other unmentioned multi-effects are clearly understood that from record below.
Detailed description of the invention
Fig. 1 is to fill for executing the inspecting substrate for checking measurement regional compensation method when substrate of the embodiment of the present invention
The structure chart set.
The precedence diagram of measurement regional compensation method when Fig. 2 is the inspection substrate of the embodiment of the present invention.
The example of the substrate of measurement regional compensation method when Fig. 3 is the quasi- inspection substrate for being applicable in the embodiment of the present invention
Figure.
Fig. 4 is to judge that first measures region in measurement regional compensation method in the inspections substrate of the embodiment of the present invention
Validity method precedence diagram.
Fig. 5 is the exemplary diagram in the first measurement region of the method for illustrating to judge the validity in the first measurement region.
Fig. 6 is to judge using the information of the feature object in effective measurement region come the validity of the compensation matrix generated
The precedence diagram of method.
The flow chart of measurement regional compensation method when Fig. 7 is the inspection substrate of another embodiment of the present invention.
The substrate of measurement regional compensation method when Fig. 8 is the inspection substrate for illustrating another embodiment of the present invention shows
Example diagram.
100: base board checking device 110: control unit
120: platform part 130: determination part
140: storage unit 150: display unit
160: user interface portion 200: the first measures region
210: liner 220: feature object
300: substrate 320: triangle
330: effective coverage 340: liner
P1: the first the P2: the second polygon of polygon
S1: the first area S2: second area
Specific embodiment
As long as referring to the multiple embodiments being described in detail together with appended attached drawing, it will be able to be clearly understood that of the invention
Purpose, effect and the technical pattern for realizing these.In the course of describing the present invention, judging to known function
Or in the case where the illustrating and unnecessarily can obscure the gist of the invention of structure, the detailed description to this will be omitted.Also,
The term that aftermentioned multiple terms are defined as structure, effect and function etc. is considered in the present invention, this can be according to using
Personnel, the intention for operating personnel or convention etc. and it is different.
However the invention is not limited to multiple embodiments as disclosed below, but can be with mutually different a variety of shapes
State embodies.However, the present embodiment is only for making disclosure of the invention become more complete, in order to lead technology belonging to the present invention
The those of ordinary skill in domain completely understands scope of the invention and provides, and the present invention, which only passes through in patent claims, to be remembered
The scope of the claims of load defines.Therefore, depending on definition should be based on the entire content of this specification.
In the specification, when referring to some certain structural element of part " comprising ", as long as no especially opposite note
It carries, this, which means that, is not precluded other structures element, but can also include other structures element.
Hereinafter, a preferred embodiment of the present invention is described in detail referring to attached drawing.
The inspecting substrate of measurement regional compensation method when Fig. 1 is the inspection substrate for executing one embodiment of the invention
The structure chart of device.
As shown in Figure 1 above, base board checking device 100 may include control unit 110, be used for control base board check device
100 work, and the operation for performing various functions is handled；Platform part 120, mobile and carrying are used as check object
Substrate, to be fixed；Determination part 130, for executing inspection for the substrate for being equipped on above-mentioned platform part 120；Storage
Portion 140, storage are used for the program and data of drive substrate check device 100；Display unit 150 is used for output substrate check device
100 working condition and inspection result etc.；And user interface portion 160, for receiving the instruction etc. of user of service.
Firstly, setting measurement region on substrate to set the inspection area for executing inspecting substrate.Above-mentioned survey
Determining region means in order to check whether aforesaid substrate is bad and is set in the scheduled region on aforesaid substrate, and in substrate
On can have multiple said determination regions.Said determination region (can not be schemed with video camera included by above-mentioned determination part 130
Show) coverage (Field of View, FOV) on the basis of set.
Then, the reference data for being directed to said determination region is obtained.Said reference data for example can be for for substrate
The flat image of theoretical property.Can there are the shape of CAD (CAD) information or lattice to(for) aforesaid substrate from record
Said reference data are obtained in primary (gerber) information.Above-mentioned CAD information or the primary information of lattice include aforesaid substrate
Design basis information, under normal circumstances, including configuration information relevant to liner, circuit pattern, sectional hole patterns etc..
On the other hand, said reference data can be obtained from the learning information obtained by mode of learning.For example, above-mentioned
Mode of learning can embody as follows: information substrate be retrieved in above-mentioned storage unit 140, if search result does not have substrate letter
Breath, then implement hollow plate study, then, if the substrates letter such as liner and wiring information for terminating above-mentioned hollow plate study to calculate hollow plate
Breath, then in the mode etc. of above-mentioned database purchase aforesaid substrate information.That is, printing electricity can be learnt in above-mentioned mode of learning
The hollow plate of base board obtains the design basis information of printed circuit board, and can be learnt by above-mentioned mode of learning
Information, it is hereby achieved that said reference data.
Then, the determination data for being directed to said determination region is obtained.Said determination data can be to be examined using aforesaid substrate
The image for looking into device 100 actually to shoot aforesaid substrate corresponding with said reference data.Said determination data with
Reference data is similar, but can slightly distort due to the bending of aforesaid substrate or distortion than reference data.
Therefore, in order to compensate for this distortion, it can use the coordinate of multiple feature objects in measurement region to generate compensation
Matrix, and use this to the position of the liner on compensation measurement region.Features described above object (feature) can be aforesaid substrate
On at least one of sectional hole patterns, circular pattern or the corner parts of bending pattern.
But the compensation matrix generated can not be being trusted using the information of multiple feature objects in said determination region
Validity in the case where, if being directly applicable in above-mentioned compensation matrix in said determination region, can occur that substrate can not be trusted
The problem of inspection result.
In order to solve this problem, the measurement regional compensation method when inspection substrate of the embodiment of the present invention can be applicable in
Following method.
The precedence diagram of measurement regional compensation method when Fig. 2 is the inspection substrate of one embodiment of the invention, Fig. 3 is applicable
The exemplary diagram for checking the measurement region for measuring regional compensation method when substrate of one embodiment of the invention.
As shown in above-mentioned Fig. 2 and Fig. 3, first, it is determined that the validity (S100) of the first measurement region F14 on substrate.?
In the embodiment of the present invention, the validity of the first measurement region F14 on substrate means from being included in above-mentioned first measurement region
The validity of the compensation matrix generated in the information of feature object in the F14 of domain does not have the feelings of validity in above-mentioned compensation matrix
Under condition, judge above-mentioned first measurement region (FOV) without validity.Judge the validity of above-mentioned first measurement region (FOV)
Method can consider a variety of methods according to designer, and the embodiment of the present invention benefit judges the first measurement with the following method
The validity in region (FOV).
Fig. 4 is to judge that first measures region in measurement regional compensation method in the inspections substrate of the embodiment of the present invention
Validity method precedence diagram, Fig. 5 is to measure for the first of the method for illustrating judge the validity in the first measurement region
The exemplary diagram in region.
Firstly, acquiring the coordinate (S200) of multiple liners 210 of outermost in above-mentioned first measurement region 200.Then,
The coordinate (S210) of multiple feature objects 220 of outermost is acquired in above-mentioned first measurement region 200.
The coordinate of multiple liners 210 of above-mentioned outermost can be sat for each center of multiple liners of above-mentioned outermost
The coordinate of mark, multiple feature objects of above-mentioned outermost can be each center of multiple feature objects 210 of above-mentioned outermost
Coordinate.
Also, the first polygon P1 of the coordinate of multiple liners 210 of the above-mentioned outermost of setting connection and connection are above-mentioned most
Second polygon P2 of the coordinate of multiple feature objects 220 of periphery, and calculate the area for above-mentioned first polygon P1
The above-mentioned first polygon P1 of S1 and the equitant area S2 ratio (S220) of above-mentioned second polygon P2.
At this point, above-mentioned ratio can be used as indicating the feature object in the first measurement region around liner
The index for the uniformity (uniformity) being distributed evenly.Above-mentioned ratio is bigger, it is meant that and uniformity is higher, and this means that
The validity of above-mentioned compensation matrix is high.
Then, judge whether above-mentioned ratio is greater than preset a reference value (S230).
Above-mentioned ratio can be defined by following mathematical expression 1.
[mathematical expression]
(the first face area P1 of the first polygon of area P2/ of the overlapping of the first polygon and above-mentioned second polygon
Product) * 100
Above-mentioned preset a reference value can be set to guarantee the validity of compensation matrix by repeatedly testing
A reference value, and this according to circumstances can carry out a variety of settings.
If judging, above-mentioned first measurement region F14 does not have validity, comes centered on above-mentioned first measurement region F14
Multiple effective measurement regions (S110) are determined in adjacent multiple measurement regions within preset radius.
At this point, the center in above-mentioned first measurement region can be the liner of the outermost in connection above-mentioned first measurement region
Coordinate come the center of the polygon generated.
As shown in figure 3, being come centered on above-mentioned first measurement region F14 adjacent multiple within preset radius
Measurement region F8, F9, F13, F15, F18, F19, F20 can be chosen to be candidate measurement region first.
Determine that the method in effectively measurement region can be directed to each above-mentioned candidate in above-mentioned selected candidate measurement region
Measurement region is applicable in method identical with for judging the first measurement method of validity in region described above respectively.
Also, it is base that whether the quantity for being included in the feature object in each above-mentioned candidate measurement region, which is greater than preset value,
Plinth can just be chosen to be effectively measurement region only in the case where being greater than preset value.Above two method can be with
Separately from can also be applicable in simultaneously.
If it is determined that above-mentioned multiple effective measurement region F8, F9, F15, F18, F19, F20, then in above-mentioned multiple effective measurements
Above-mentioned preset radius is extracted centered on above-mentioned first measurement region F14 in region F8, F9, F15, F18, F19, F20
Within multiple feature objects (S120).At this point, and non-used above-mentioned multiple effective measurement region F8, F9, F15, F18, F19,
All feature objects in F20, but extract from more within the preset radius in center of above-mentioned first measurement region F14
A feature object.
Moreover, prediction is using the information of above extracted multiple feature objects come the validity of the compensation matrix generated
(S130).At this point, the prediction technique of validity is similar with the above explained first measurement judgment method of validity in region.
Fig. 6 is to judge to utilize effectively survey in measurement regional compensation method when checking substrate of the embodiment of the present invention
The information of the feature object in region is determined come the precedence diagram of the method for the validity of the compensation matrix generated.
As shown in Figure 6 above, firstly, acquiring the coordinate of multiple liners of outermost in above-mentioned first measurement region
(S300).Also, in above-mentioned multiple effective measurement regions, in above-mentioned presetting centered on above-mentioned first measurement region
Radius within multiple feature objects in acquire outermost multiple feature objects coordinate.
Then, setting connects the first polygon of the coordinate of multiple liners of above-mentioned outermost and connects above-mentioned outermost
Second polygon of the coordinate of multiple feature objects.If above-mentioned first polygon and the second polygon are set, it is directed to conduct
First area of the area of above-mentioned first polygon, calculating indicates what above-mentioned first polygon and above-mentioned second polygon were overlapped
The ratio (S320) of the second area of area.
If calculating above-mentioned ratio, judge whether above-mentioned ratio is greater than preset a reference value (S330).
Judging result judges to utilize above extracted multiple spies if above-mentioned ratio is greater than preset a reference value
The information for levying object is effective come the compensation matrix generated, is generated using above extracted multiple feature objects for above-mentioned the
The compensation matrix (S140) in one measurement region.
At this point it is possible to determine the type of the compensation matrix generated according to above-mentioned ratio.The type of above-mentioned compensation matrix can
Think affine transformation (affine transformation) matrix or projective transformation (projective transformation)
One of matrix, scale and rotation (scaling&rotation transformation) transformation matrix.
For example, affine transformation matrix can be generated as compensation matrix, if above-mentioned ratio is greater than if above-mentioned ratio is greater than 80
60 and less than 80, then affine transformation matrix can be generated, if above-mentioned ratio is greater than 40 and less than 60, scale and rotation can be generated
Turn transformation matrix.
The range for determining the ratio of the type of above-mentioned compensation matrix is only to illustrate, and can be set in a variety of ranges.
On the other hand, in flexible printed circuit substrate (Flexible Printed Circuit；FPCB in the case where), because
The characteristic of flexible material causes the distortions such as bending (warp) or the distortion (distortion) of substrate to become larger.As a result, surveying
Determine in region, since bending or degreeof tortuosity can also be become different by region, mended as unit of to measure region
It repays, and in the case where carrying out inspecting substrate, is unable to ensure the reliability of inspecting substrate.
Hereinafter, reliability when checking flexible printed circuit substrate in order to improve, the embodiment of the present invention is to measurement region
Further sectionalization is carried out, and the seat calibration method of compensating liner is illustrated.
Fig. 7 be another embodiment of the present invention check substrate when measurement regional compensation method precedence diagram, Fig. 8 be for
Illustrate another embodiment of the present invention check substrate when measurement regional compensation method substrate exemplary diagram.
As shown in Figure 7 above, firstly, extracting feature object 310 (S400) on the measurement region of substrate 300.At this point, such as
With the explanation carried out in the above-described embodiments, feature object 310 can be sectional hole patterns, circular pattern or the bending in measurement region domain
At least one of corner parts of pattern.
Then, the seat for selecting at least three or more adjacent feature object is utilized in above extracted feature object
The polygon for marking to be formed, and set multiple effective coverages (S410).There are multiple feature objects on measurement region, wherein
As long as selecting at least three or more adjacent feature object, so that it may form polygon.
If it is assumed that above-mentioned polygon is described as follows the case where being triangle, as shown in Figure 8 above, can measure
Three adjacent feature objects are selected to form multiple triangles 320 on region.It can use formed in this way multiple
FOV is divided into multiple regions by triangle.
It above-mentioned effective coverage 320 can be centered on the barycentric coodinates of polygon corresponding with above-mentioned effective coverage 320
It is set within effective distance, as a result, as shown in Figure 8 above, effective coverage 320 can be rounded.
Above-mentioned effective distance can be formed centered on above-mentioned barycentric coodinates the feature object of above-mentioned polygon coordinate it
Between distance average distance and determine, as an example, effective distance can be set to a variety of sizes.
Then, using the coordinate for the feature object for distinguishing corresponding polygon with above-mentioned multiple effective coverages, by each
Above-mentioned effective coverage generates compensation matrix (S420).
Above-mentioned compensation matrix can be above-mentioned affine transformation (affine transformation) matrix or projective transformation
(projective transformation) matrix, scale and rotation (scaling&rotation transformation) become
Change one of matrix.
On the other hand, if generating compensation matrix, selection is compensated by the compensation matrix that each above-mentioned liner 340 matches
State the coordinate (S430) of liner.
At this point, can be in the compensation matrix of each above-mentioned effective coverage by each compensation matrix for matching of padding, it can be by
It is selected as and is provided with above-mentioned liner and the smallest compensation matrix of distance until from above-mentioned liner to the center of gravity of above-mentioned polygon.
Due to can be arranged in the region for overlapping with effective coverage liner 340, select the center of gravity to polygon for
The smallest compensation matrix of distance only is as the compensation matrix for corresponding liner 340, so as to improve compensating liner
Reliability when coordinate.
Like this, measurement region is further subdivided into multiple regions, Lai Shengcheng compensation matrix, so that compensation is subdivided
The coordinate of the liner of the bending or distortion based on substrate in each region changed, may finally significantly improve inspection flexible print circuit
Reliability when substrate.
In the present embodiment, although for using measurement region on feature object come cut zone, and by be divided
Different zones generate compensation matrix, and be applicable in by different liners and be illustrated, but also can be in the opposite manner
Using liner come cut zone, and compensation matrix is generated by the different regions after segmentation, and this is suitable for different spies
Levy object.
In the expression method of measurement regional compensation method when checking substrate of the embodiment of the present invention illustrated among the above
It can be embodied as that program instruction form can be performed by a variety of computer units, and be able to record in computer-readable
Medium.The above-mentioned above-mentioned computer-readable medium of computer can include program instruction, data file, data structure alone or in combination
Deng.The program instruction for being recorded in above-mentioned medium can be the program instruction for being specifically designed and constituting for the present invention, Huo Zhewei
Have been disclosed in computer software technology personnel come can carry out using program instruction.As the example of computer-readable medium, including
Magnetic medium (magnetic media), the CD-ROM of hard disk, floppy disk and tape etc, the optical medium (optical of DVD etc
Media), the magnet-optical medium (magneto-optical media) of soft CD (floptical disk) etc and read-only deposit
The hardware that reservoir (ROM), random access memory (RAM), flash memory etc. are specially constructed in a manner of storing and executing program instructions
Device.The example of program instruction not only includes such as machine language code made of compiler, but also including solution can be used
Device etc. is released, higher-level language code is performed by computer.
More than, the embodiment of the present invention is illustrated, as long as but it is to be appreciated that technology belonging to the present invention is led
The those of ordinary skill in domain, in the range of the thought of the invention that can be recorded in not departing from patent claims, by
The additional of structural element, change are deleted or additional etc. and implement a variety of modifications and changes to the present invention, and this also belongs to this hair
In bright interest field.
Claims (11)
1. a kind of measurement regional compensation method when inspection substrate, the measurement region is to check whether substrate is bad and sets
It is described to check that measurement regional compensation method when substrate includes: due to the measurement region on substrate
The step of judging the validity in the first measurement region on substrate；
In the case where above-mentioned first measurement region does not have validity, preset centered on above-mentioned first measurement region
Radius within adjacent multiple measurement regions in determine multiple effective measurement regions the step of；
In above-mentioned multiple effective measurement regions by it is above-mentioned first measurement region centered on extract above-mentioned preset radius with
The step of interior multiple feature objects；
The step of the compensation matrix for above-mentioned first measurement region is generated using the information of multiple feature objects of said extracted
Suddenly；
Wherein, judge it is above-mentioned first measurement region validity the step of include: it is above-mentioned first measurement region in acquire it is outermost
The step of coordinate of the multiple liners enclosed；
The step of acquiring the coordinate of multiple feature objects of outermost in above-mentioned first measurement region；
For the first area of the first polygon of the coordinate for the multiple liners for connecting above-mentioned outermost, connection above-mentioned the is calculated
The ratio of the second area of the overlapping of second polygon of the coordinate of one polygon and multiple feature objects of above-mentioned outermost
Step；And
The step of whether above-mentioned ratio is greater than preset a reference value judged.
2. a kind of measurement regional compensation method when inspection substrate, the measurement region is to check whether substrate is bad and sets
It is described to check that measurement regional compensation method when substrate includes: due to the measurement region on substrate
The step of judging the validity in the first measurement region on substrate；
In the case where above-mentioned first measurement region does not have validity, preset centered on above-mentioned first measurement region
Radius within adjacent multiple measurement regions in determine multiple effective measurement regions the step of；
In above-mentioned multiple effective measurement regions by it is above-mentioned first measurement region centered on extract above-mentioned preset radius with
The step of interior multiple feature objects；
The step of the compensation matrix for above-mentioned first measurement region is generated using the information of multiple feature objects of said extracted
Suddenly；
Wherein it is determined that the step of above-mentioned multiple effective measurement regions, includes:
For each above-mentioned adjacent multiple measurement regions, the seat of multiple liners of outermost is acquired in above-mentioned each measurement region
Target step；
The step of acquiring the coordinate of multiple feature objects of outermost in above-mentioned each measurement region；
For the first area of the first polygon of the coordinate for the multiple liners for connecting above-mentioned outermost, connection above-mentioned the is calculated
The ratio of the second area of the overlapping of second polygon of the coordinate of one polygon and multiple feature objects of above-mentioned outermost
Step；And
The step of whether above-mentioned ratio is greater than preset a reference value judged.
3. measurement regional compensation method when inspection substrate according to claim 1 or 2, wherein by (above-mentioned first is polygon
The area of the overlapping of shape and above-mentioned second polygon)/above-mentioned first area × 100 and determine above-mentioned ratio.
4. measurement regional compensation method when inspection substrate according to claim 1, wherein multiple linings of above-mentioned outermost
The coordinate of pad is the centre coordinate of multiple liners of above-mentioned outermost, and the coordinate of multiple feature objects of above-mentioned outermost is above-mentioned
The centre coordinate of multiple feature objects of outermost.
5. measurement regional compensation method when inspection substrate according to claim 1 or 2, wherein above-mentioned more by confirming
It is above-mentioned multiple effective to determine whether the quantity for the feature object that a effective measurement region respectively includes is greater than preset value
Measure region.
6. measurement regional compensation method when inspection substrate according to claim 1 or 2, wherein above-mentioned first measurement region
The center in domain is the coordinate of the liner of the outermost in connection above-mentioned first measurement region come the center of the polygon generated.
7. the measurement regional compensation method according to claim 1 or 2 when checking substrate, wherein features described above object is
At least one of sectional hole patterns, circular pattern or corner parts of bending pattern.
8. measurement regional compensation method when inspection substrate according to claim 1 or 2, wherein generating above-mentioned compensation
Before the step of matrix, further includes:
The step of acquiring the coordinate of multiple liners of outermost in above-mentioned first measurement region；
In above-mentioned multiple effective measurement regions, come within preset radius centered on above-mentioned first measurement region
The step of coordinate of multiple feature objects of outermost is acquired in above-mentioned multiple feature objects；
For the first area of the first polygon of the coordinate for the multiple liners for connecting above-mentioned outermost, connection above-mentioned the is calculated
The ratio of the second area of the overlapping of second polygon of the coordinate of one polygon and multiple feature objects of above-mentioned outermost
Step；And
The step of whether above-mentioned ratio is greater than preset a reference value judged,
In the case where above-mentioned ratio is greater than preset a reference value, the information of multiple feature objects of institute's said extracted is utilized
To generate above-mentioned compensation matrix.
9. measurement regional compensation method when inspection substrate according to claim 8, wherein determined according to above-mentioned ratio
The type of compensation matrix generated.
10. measurement regional compensation method when inspection substrate according to claim 9, wherein the kind of above-mentioned compensation matrix
Class is one of affine transformation matrix or projective transformation matrix, scale and rotational transformation matrix.
11. a kind of recording medium, wherein be stored with and require 1 or any one of 2 and claim 5 to 10 for perform claim
The program of described measurement regional compensation method when checking substrate.
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| KR20130134267A KR101510143B1 (en) | 2013-11-06 | 2013-11-06 | Method for compensating a field of view during a circuit board inspection |
| PCT/KR2014/009934 WO2015068971A1 (en) | 2013-11-06 | 2014-10-22 | Method for compensating field of view during substrate inspection |
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| CN108007410B (en) * | 2017-11-20 | 2019-12-10 | 京东方科技集团股份有限公司 | display substrate detection equipment, machine difference compensation method and device thereof |
| JP2019168315A (en) * | 2018-03-23 | 2019-10-03 | 三菱電機株式会社 | Measurement device, circuit board, display device, and method for measurement |
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| CN101140161A (en) * | 2006-09-07 | 2008-03-12 | 三丰株式会社 | Surface-profile measuring instrument |
| CN101183656A (en) * | 2006-11-13 | 2008-05-21 | 大日本网目版制造株式会社 | Surface form measuring apparatus and stress measuring apparatus and surface form measuring method and stress measuring method |
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| CN108805821A (en) | 2018-11-13 |
| WO2015068971A1 (en) | 2015-05-14 |
| KR101510143B1 (en) | 2015-04-08 |
| CN108805821B (en) | 2022-02-01 |
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