CN108007410B - display substrate detection equipment, machine difference compensation method and device thereof - Google Patents
display substrate detection equipment, machine difference compensation method and device thereof Download PDFInfo
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
the invention relates to a method and a device for compensating machine difference of display substrate detection equipment and the detection equipment, wherein the compensation method comprises the following steps: acquiring basic position deviation data generated by performing position detection on a pattern formed on a display substrate by using reference detection equipment; acquiring position deviation data of each time, wherein the position deviation data of each time is generated by adopting detection equipment to be adjusted to repeatedly detect the position of the pattern formed on the display substrate for multiple times; and generating a position deviation reference compensation value according to the basic position deviation data and the position deviation data of each time so as to compensate the position deviation data generated by the detection equipment to be adjusted in the detection. The method can reduce the measurement error of the detection equipment and effectively improve the accuracy and the effectiveness of the measurement result of the detection equipment.
Description
Technical Field
the invention relates to the technical field of semiconductors, in particular to a method and a device for compensating machine error of display substrate detection equipment and the detection equipment.
Background
an OLED (Active Matrix/Organic Light Emitting Diode) display device is an Active Light Emitting display device, and includes a substrate, on which a pattern of Organic Light Emitting units arranged in a Matrix is formed.
After the pattern of the organic light emitting unit is prepared on the substrate, the pattern is usually required to be detected, and subsequent preparation steps such as circuit board welding are performed after the pattern is detected to be qualified.
at present, special detection equipment can be adopted to detect the formed patterns of the organic light-emitting units, the position deviation of each formed pattern is mainly detected, and the deviation greatly influences the quality of the formed final OLED display device.
For the detection equipment, even if different equipment with the same model has different sensitivities, the sensitivity between the equipment is also different, so that the measurement difference can not be generated, the measurement difference between the different equipment can be called as a measurement machine difference, and test tests show that the measurement machine difference can reach about 10um and far exceeds the acceptable machine difference range of 2um, so that the accuracy and the effectiveness of the measurement result for detecting the pattern of the organic light-emitting unit are caused, and therefore, a method for effectively improving the accuracy of the measurement result of the detection equipment is needed.
Disclosure of Invention
The invention provides a method and a device for compensating machine error of display substrate detection equipment and the detection equipment, which aim to solve the defects in the related art.
according to a first aspect of the embodiments of the present invention, there is provided a method for compensating for a machine error of a display substrate inspection apparatus, including:
acquiring basic position deviation data generated by performing position detection on a pattern formed on a display substrate by using reference detection equipment;
acquiring position deviation data of each time, wherein the position deviation data of each time is generated by adopting detection equipment to be adjusted to repeatedly detect the position of the pattern formed on the display substrate for multiple times;
and generating a position deviation reference compensation value according to the basic position deviation data and the position deviation data of each time so as to compensate the position deviation data generated by the detection equipment to be adjusted in the detection.
optionally, the generating a position deviation reference compensation value according to the basic position deviation data and the position deviation data of each time includes:
generating a theoretical compensation value of the position deviation according to the position deviation data of the basis and the position deviation data generated by one detection of the detection equipment to be adjusted;
Generating a position deviation repeatability compensation value according to position deviation data of each time generated by repeatedly detecting the detection equipment to be adjusted for multiple times;
And generating a position deviation reference compensation value according to the position deviation theoretical compensation value and the position deviation repeatability compensation value.
Optionally, the generating a theoretical compensation value of position deviation according to the position deviation data of the basis and the position deviation data generated by one detection of the detection device to be adjusted includes:
taking the difference value between the basic position deviation data and position deviation data generated by one detection of the detection equipment to be adjusted as the theoretical compensation value of the position deviation;
Generating a position deviation repeatability compensation value according to position deviation data generated by the detection equipment to be adjusted through repeated detection for multiple times, wherein the position deviation repeatability compensation value comprises;
Taking the average value of position deviation data generated by repeatedly detecting the detection equipment to be adjusted for multiple times as the position deviation repeatability compensation value;
generating a position deviation reference compensation value according to the position deviation theoretical compensation value and the position deviation repeatability compensation value comprises the following steps:
And taking the sum of the theoretical compensation value of the position deviation and the repeatability compensation value of the position deviation as the reference compensation value of the position deviation.
optionally, the position deviation data includes a difference between an actual position coordinate and a theoretical position coordinate of the pattern formed on the display substrate.
optionally, the pattern formed on the display substrate is a pattern of organic light emitting units formed on the display substrate.
according to a second aspect of the embodiments of the present invention, there is provided a machine difference compensation device of a display substrate inspection apparatus, including:
a basic deviation data acquisition unit configured to acquire basic positional deviation data generated by position detection of a pattern formed on a display substrate using a reference detection device;
A repeated deviation data acquisition unit, configured to acquire position deviation data of each time, where the position deviation data of each time is generated by performing repeated position detection on a pattern formed on the display substrate for multiple times by using a detection device to be adjusted;
and the deviation reference compensation value generating unit is used for generating a position deviation reference compensation value according to the basic position deviation data and the position deviation data of each time so as to compensate the position deviation data generated by the detection equipment to be adjusted in the detection.
optionally, the offset reference compensation value generating unit includes:
The deviation theoretical compensation value operator unit is used for generating a position deviation theoretical compensation value according to the basic position deviation data and position deviation data generated by one detection of the detection equipment to be adjusted;
The deviation repeatability compensation value operator unit is used for generating a position deviation repeatability compensation value according to position deviation data generated by repeatedly detecting the detection equipment to be adjusted for multiple times;
and the deviation reference compensation value calculating unit is used for generating a position deviation reference compensation value according to the position deviation theoretical compensation value and the position deviation repeatability compensation value.
Optionally, the operator unit of the theoretical offset compensation value is specifically configured to use a difference between the basic position offset data and position offset data generated by one of the detections of the detection device to be adjusted as the theoretical offset compensation value;
The deviation repeatability compensation value operator unit is specifically used for taking the average value of position deviation data of each time generated by repeated detection of the detection equipment to be adjusted as the position deviation repeatability compensation value;
The deviation reference compensation value operator unit is specifically configured to use a sum of the theoretical compensation value of the position deviation and the repetitive compensation value of the position deviation as the reference compensation value of the position deviation.
Optionally, the position deviation data includes a difference between an actual position coordinate and a theoretical position coordinate of the pattern formed on the display substrate.
According to a third aspect of embodiments of the present invention, there is provided a display substrate detection apparatus including any one of the compensation devices described above.
According to the embodiment, in the compensation method, the position deviation reference compensation value is based on the position deviation data generated by the reference detection equipment, and the measurement error caused by the detection equipment when the detection equipment to be adjusted repeatedly measures for multiple times is considered, when the detection equipment to be adjusted subsequently detects the position, the generated position deviation data is adjusted through the position deviation reference compensation value, so that the measurement error of the detection equipment can be reduced, and the accuracy and the effectiveness of the measurement result of the detection equipment can be effectively improved.
it is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the invention, as claimed.
drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.
Fig. 1 is a flowchart illustrating a method of compensating for a machine difference of a display substrate inspection apparatus according to an embodiment of the present invention;
fig. 2 is a flowchart illustrating a method of compensating for a machine difference of a display substrate inspection apparatus according to another embodiment of the present invention;
FIG. 3 is a line graph showing the relative abscissa positional deviation compensation values obtained by the machine difference compensation method according to an embodiment of the present invention;
Fig. 4 is a line graph of the associated ordinate position deviation compensation value obtained by the machine difference compensation method according to an embodiment of the present invention;
FIG. 5 is a line graph of relative abscissa positional deviation data obtained by a machine difference compensation method according to an embodiment of the present invention;
FIG. 6 is a line graph of relative ordinate position deviation data obtained by a machine error compensation method according to an embodiment of the invention;
Fig. 7 is a block diagram illustrating a motion compensation apparatus of a display substrate inspection device according to an embodiment of the present invention.
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the invention, as detailed in the appended claims.
The OLED display device comprises a substrate base plate, wherein a pattern of organic light-emitting units arranged in a matrix is formed on the substrate base plate, after the pattern of the organic light-emitting units is prepared on the substrate base plate, special detection equipment is usually needed to detect the position of the formed pattern of the organic light-emitting units, the position deviation of the pattern is detected, and the obtained position deviation data is used as a measurement result and can be used as one of reference bases for determining the quality of the OLED display device.
in order to reduce the measurement error, the method in the related art may compensate the measurement error by using a compensation value, specifically, by using position deviation data set by one reference detection as a reference, comparing position deviation data of other detection devices with position deviation data of the reference, and using a difference between the two as a compensation value, the measurement error of the detection device may be properly reduced by compensating the measurement error by the compensation value, but the accuracy of the measurement result is still not ideal.
based on this, the embodiment of the present invention provides a method for compensating for machine error of a display substrate detection device, which can effectively improve the accuracy of a measurement result obtained by the detection device, as shown in fig. 1, the method includes the following steps:
Step S10 of acquiring basic positional deviation data generated by position detection of a pattern formed on a display substrate using a reference detection device;
Step S20, acquiring position deviation data of each time, wherein the position deviation data of each time is generated by adopting the detection equipment to be adjusted to repeatedly detect the position of the pattern formed on the display substrate for a plurality of times;
And step S30, generating a position deviation reference compensation value according to the basic position deviation data and the position deviation data of each time so as to compensate the position deviation data generated by the detection device to be adjusted in the detection.
The pattern formed on the display substrate may be various patterns, and if the display substrate is a display substrate of a liquid crystal display device, various patterns, such as a gate electrode, a source/drain electrode, an active layer, or a pixel unit, may be formed on the display substrate during the manufacturing process.
the position of the pattern on the display substrate can be detected by using a corresponding detection device, which is not limited to the type of pattern to be detected.
for the OLED display substrate, since the position of the formed pattern of the organic light emitting unit greatly affects the quality of the OLED display device, it is necessary to control the position deviation of the pattern of the organic light emitting unit, and thus, after the pattern of the organic light emitting unit is prepared on the display substrate, it is necessary to detect the position deviation of the formed pattern by using a special detection apparatus.
the pattern formed on the display substrate includes a large number of patterns arranged in a matrix, and when detecting, the position detection can be performed by selecting the patterns with a plurality of numbers and positions according to needs, and generally, each pattern does not need to be detected.
the detection device may perform position detection of a pattern formed on the display substrate, detect a magnitude of positional deviation of the pattern on the display substrate, and may generate data including the magnitude of positional deviation of a plurality of patterns, which may be referred to as positional deviation data.
The reference detection device is a detection device which has high sensitivity and shows small difference of a measuring machine through an experimental result, and position deviation data generated by detecting the position of a pattern formed on the display substrate by the reference detection device is used as basic position deviation data, and the position deviation data is relatively accurate data.
the detection device to be adjusted may be any detection device used for detection, and multiple repeated position detection is performed on the patterns formed on the display substrate by using the detection device to be adjusted, that is, the same detection device to be adjusted is used for performing position detection on the same position and the same number of patterns on the same display substrate by using the same method, so as to obtain position deviation data of each time.
and comparing the obtained basic position deviation data with the position deviation data of each time to generate a position deviation reference compensation value, wherein the position deviation reference compensation value is used for compensating the position measurement data generated by the subsequent detection equipment to be adjusted, and the position measurement data which is finally obtained by the detection equipment to be adjusted and is output as a measurement result is compensated data.
The position deviation reference compensation value is based on the position deviation data generated by the reference detection equipment, and the measurement machine difference caused by the detection equipment when the detection equipment to be adjusted repeatedly measures for many times is considered, when the detection equipment to be adjusted subsequently detects the position, the generated position deviation data is adjusted through the position deviation reference compensation value, the measurement machine difference of the detection equipment to be detected can be reduced, and the accuracy and the effectiveness of the measurement result of the detection equipment are effectively improved.
after the patterns formed on the display substrate are detected, the quality of the display substrate can be evaluated according to the obtained measuring results, the display substrate with good quality can be selected as required to carry out other processes of subsequently preparing a display device product, the accuracy of the measuring results of the detecting equipment is improved, a reliable basis is provided for the subsequent judgment of the product quality, the measuring results are also used for evaluating the reference data of the mask quality of the patterns for preparing the display substrate, the accuracy of the measuring results is improved, reliable data support is provided for monitoring the quality of the mask, and the monitoring capability of the quality of the mask is improved.
In an alternative embodiment, as shown in fig. 2, the generating of the position deviation reference compensation value according to the basic position deviation data and the position deviation data of each time in step S30 includes:
step S31, generating a theoretical compensation value of the position deviation according to the basic position deviation data and the position deviation data generated by one detection of the detection equipment to be adjusted;
step S32, generating a position deviation repeatability compensation value according to position deviation data generated by repeatedly detecting the detection equipment to be adjusted for multiple times;
and step S33, generating a position deviation reference compensation value according to the position deviation theoretical compensation value and the position deviation repeatability compensation value.
In this embodiment, a theoretical position deviation compensation value is first generated from the basic position deviation data generated by the reference detection device and the position deviation data generated by the detection device to be adjusted by one-time detection, and the theoretical position deviation compensation value is obtained based on the basic position deviation data, and the theoretical position deviation compensation value is aimed at making the position deviation data acquired by the detection device to be adjusted meet the requirement of the position deviation data acquired by the reference detection device.
however, since the detecting device to be adjusted has the measurement error, if the final compensation value is obtained only by using the position deviation data generated by one-time detection, the final compensation value has a large randomness, and the measurement error of the detecting device to be adjusted due to the device itself cannot be sufficiently reflected, so the compensation value is not accurate, accordingly, in this embodiment, further, a position deviation repeatability compensation value is generated according to the position deviation data of each time generated by repeatedly detecting the detecting device to be adjusted for multiple times, the repeatability compensation value can avoid the measurement error of the detecting device to be adjusted due to the randomness, further, a position deviation reference compensation value can be generated according to the position deviation theoretical compensation value and the position deviation repeatability compensation value, the reference compensation value can more accurately reflect the measurement error of the detecting device to be adjusted, and the obtained position deviation data is adjusted by the reference compensation value, the measuring machine difference of the equipment to be detected can be reduced, and the accuracy and the effectiveness of the measuring result of the detection equipment are effectively improved.
for example, the position deviation repeatability compensation value generated by repeatedly detecting the position deviation data of each time by the detection device to be adjusted for multiple times can be directly compared with the basic position deviation data to obtain the position deviation reference compensation value, so that the purpose of reducing the measurement error of the device to be detected can be achieved.
In some examples, the step S31 may be:
Taking the difference value between the basic position deviation data and the position deviation data generated by one detection of the detection equipment to be adjusted as a theoretical compensation value of the position deviation;
The step S32 may be:
taking the average value of the position deviation data generated by the repeated detection of the detection equipment to be adjusted for multiple times as a position deviation repeatability compensation value;
the step S33 may be:
and taking the sum of the theoretical compensation value of the position deviation and the repeatability compensation value of the position deviation as a reference compensation value of the position deviation.
in this embodiment, a way of calculating a theoretical compensation value of position deviation, a repetitive compensation of position deviation, and a reference compensation value of position deviation is provided, where the theoretical compensation value of position deviation is a difference between position deviation data based on the theoretical compensation value of position deviation and position deviation data generated by a detection device to be adjusted through one-time detection, the repetitive compensation value of position deviation is an average value of the position deviation data of each time, and the reference compensation value of position deviation is a sum of the theoretical compensation value of position deviation and the repetitive compensation value of position deviation.
of course, this embodiment is only one calculation method, and those skilled in the art may also design other calculation methods as needed, for example, a weighted average value of the position deviation data of each time may also be calculated, or the detection person further sets an adjustment coefficient for the calculated position deviation reference compensation value according to the sensitivity, accuracy, and the like of different detection devices to be adjusted, and the present invention is not limited to this.
In some examples, the positional deviation data includes a difference between an actual positional coordinate and a theoretical positional coordinate of the pattern formed on the display substrate.
the actual position coordinates of the pattern formed on the display substrate are the actual positions of the pattern on the display substrate after the pattern is prepared on the display substrate, and under the condition that the theoretical position coordinates are ideal, the position of the pattern on the display substrate according to the design requirement is located, the position deviation data acquired by the detection equipment is the difference value of the two positions, the position deviation size of the pattern on the display substrate can be known through the difference value, and the product quality of the display substrate is judged according to the position deviation size.
The position coordinates of the pattern on the display substrate can be expressed by an abscissa and an ordinate, a plurality of patterns arranged in a matrix are usually formed on the display substrate, and a coordinate origin of a certain point on the substrate can be displayed, for example, a position of a pattern at a lower left corner, a position of a pattern at an upper right corner, a position of a pattern at a lower right corner, or a position of a pattern at a center point on the substrate can be displayed as the coordinate origin, and the abscissa and the ordinate of other patterns and the origin can be used as position coordinates, so that the position deviation data can be a position deviation value of the abscissa and a position deviation value of the abscissa of the pattern to be detected.
the position deviation theoretical compensation value comprises an abscissa position deviation theoretical compensation value X1 and an ordinate position deviation theoretical compensation value Y1, the position deviation repeatability compensation value comprises an abscissa position deviation repeatability compensation value X2 and an ordinate position deviation repeatability compensation value Y2, the position deviation reference compensation value comprises an abscissa position deviation reference compensation value X and an ordinate position deviation reference compensation value Y, X is X1+ X2, and Y is Y1+ Y2.
The compensation method of the above embodiment is further described below with reference to experimental data.
As shown in fig. 3 and 4, fig. 3 and 4 are line graphs of the acquired relevant positional deviation compensation values, fig. 3 is a line graph of the horizontal coordinate positional deviation compensation values, the horizontal coordinate of fig. 3 indicates the number of patterns for position detection of the patterns formed on the display substrate, and the vertical coordinate indicates the numerical value of the positional deviation compensation value of each pattern; fig. 4 is a line graph of the positional deviation compensation values of the vertical coordinates, the horizontal coordinates of fig. 4 indicating the number of patterns for position detection of the patterns formed on the display substrate, and the vertical coordinates indicating the numerical values of the positional deviation compensation values of the respective patterns.
Wherein, fig. 3 includes: a theoretical compensation value X1 for the abscissa position deviation of each pattern, a line graph of the repeatability compensation value X2 for the abscissa position deviation of each pattern, and a line graph of the reference compensation value X for the abscissa position deviation of each pattern; fig. 4 includes: the theoretical compensation value Y1 for the deviation of the vertical coordinate position of each pattern, the repeatability compensation value Y2 for the deviation of the vertical coordinate position of each pattern and the reference compensation value Y for the deviation of the vertical coordinate position of each pattern.
As can be seen from fig. 3 and 4, when the position is detected by the detection device to be adjusted, the position deviation repeatability compensation value of the detection device to be adjusted for repeated detection for multiple times has a great influence on the final measurement result, and the measurement error of the detection device to be adjusted is mainly caused by the repeatability of the detection device to be adjusted.
As shown in fig. 5 and 6, fig. 5 and 6 are line graphs of positional deviation data generated by position detection of patterns formed on the same display substrate by a detection device to be adjusted, fig. 5 is a line graph of abscissa positional deviation data, the abscissa of fig. 5 represents the number of patterns to be measured for the patterns formed on the display substrate, and the ordinate represents a difference (referred to as Δ X) between a value of the abscissa positional deviation generated by the position detection of each pattern by the detection device to be adjusted and a value of the abscissa positional deviation generated by the detection of each pattern formed on the same display substrate by the same method using a reference detection device; fig. 3 is a line graph of vertical coordinate positional deviation data, in which the horizontal coordinate of fig. 3 represents the number of patterns to be measured for the patterns formed on the display substrate, and the vertical coordinate represents the difference (referred to as Δ Y) between the value of vertical coordinate positional deviation generated by position detection of each pattern using the inspection apparatus to be adjusted and the value of vertical coordinate positional deviation generated by detection of each pattern formed on the same display substrate using the same method using the reference inspection apparatus.
Wherein, fig. 5 includes: a difference Δ X1 in the abscissa position deviation of each pattern generated by position detection using the compensation method of the related art and a difference Δ X2 in the ordinate position deviation of each pattern generated by position detection using the compensation method of the present embodiment; fig. 6 includes: the difference Δ Y1 in the vertical coordinate position deviation of each pattern generated by the position detection using the compensation method of the related art and the difference Δ Y2 in the vertical coordinate position deviation of each pattern generated by the position detection using the compensation method of the present embodiment are referred to, and the following table is referred to as correlation data counted from the difference in the position deviation in fig. 5 and 6.
As can be seen from fig. 5, fig. 6 and the above table, when the compensation method of the present embodiment is adopted, the difference (including Δ X and Δ Y) between the generated position deviation value and the position deviation value generated by the reference detection device is close to 0, and compared with the compensation method of the related art, the variation range of the maximum value and the minimum value of the difference Δ X is changed from 1.68um to 0.76um, and the variation range of the maximum value and the minimum value of the difference Δ Y is changed from 2.05um to 1.03um, so it is known that the difference Δ X and Δ Y are reduced by two times after the compensation method of the present embodiment is adopted, that is, after the compensation method of the present embodiment is adopted, the difference between the position deviation data generated by the detection of the detection device to be adjusted and the position deviation data generated by the detection of the reference detection device is smaller, the compensation effect is greatly improved.
corresponding to the compensation method, an embodiment of the present invention further provides a device for compensating machine error of a display substrate detection apparatus, as shown in fig. 7, the device includes:
A basic deviation data acquisition unit 20 for acquiring basic positional deviation data generated by position detection of a pattern formed on a display substrate using a reference detection device;
a repeated deviation data acquisition unit 21 configured to acquire position deviation data of each time, the position deviation data of each time being generated by performing repeated position detection on a pattern formed on the display substrate for a plurality of times by using a detection device to be adjusted;
And the deviation reference compensation value generating unit 22 is used for generating a position deviation reference compensation value according to the basic position deviation data and the position deviation data of each time so as to compensate the position deviation data generated by the detection device to be adjusted in the detection.
In an optional embodiment, the offset reference compensation value generating unit includes:
The deviation theoretical compensation value operator unit is used for generating a position deviation theoretical compensation value according to the basic position deviation data and position deviation data generated by one detection of the detection equipment to be adjusted;
The deviation repeatability compensation value operator unit is used for generating a position deviation repeatability compensation value according to position deviation data generated by repeatedly detecting the detection equipment to be adjusted for multiple times;
and the deviation reference compensation value calculating unit is used for generating a position deviation reference compensation value according to the position deviation theoretical compensation value and the position deviation repeatability compensation value.
In some examples, the theoretical offset compensation value operator unit is specifically configured to use a difference between the basic position offset data and position offset data generated by one detection of the detection device to be adjusted as the theoretical offset compensation value;
The deviation repeatability compensation value operator unit is specifically used for taking the average value of position deviation data of each time generated by repeated detection of the detection equipment to be adjusted as the position deviation repeatability compensation value;
the deviation reference compensation value operator unit is specifically configured to use a sum of the theoretical compensation value of the position deviation and the repetitive compensation value of the position deviation as the reference compensation value of the position deviation.
The units in the compensation device can be integrated into a whole or can be separately deployed. The units may be combined into one unit, or further divided into a plurality of sub-units.
through the above description of the embodiments, the compensation device of the present embodiment may be implemented by software, or by software plus necessary general hardware, and may of course be implemented by hardware. Based on such understanding, the technical solution of the present invention or a part contributing to the prior art may be embodied in the form of a software product, where the software product may be applied to a detection device, for example, as application software of the detection device, and the compensation method described above is implemented by installing corresponding application software in the detection device, so that the measurement error of the detection device may be reduced, and the accuracy and the effectiveness of the measurement result of the detection device may be effectively improved.
The embodiment of the invention also provides display substrate detection equipment which comprises the compensation device in any one of the embodiments.
According to the display substrate detection device, due to the adoption of the compensation device, the measurement error of the detection device can be reduced, and the accuracy and the effectiveness of the measurement result of the detection device are effectively improved.
other embodiments of the invention will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure disclosed herein. This invention is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the invention and including such departures from the present disclosure as come within known or customary practice within the art to which the invention pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the invention being indicated by the following claims.
it will be understood that the invention is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the invention is limited only by the appended claims.
Claims (8)
1. A method for compensating machine difference of display substrate detection equipment is characterized by comprising the following steps:
Acquiring basic position deviation data generated by performing position detection on a pattern formed on a display substrate by using reference detection equipment;
Acquiring position deviation data of each time, wherein the position deviation data of each time is generated by adopting detection equipment to be adjusted to repeatedly detect the position of the pattern formed on the display substrate for multiple times;
Generating a position deviation reference compensation value according to the basic position deviation data and the position deviation data of each time so as to compensate the position deviation data generated by the detection equipment to be adjusted in the detection process;
Generating a position deviation reference compensation value according to the basic position deviation data and the position deviation data of each time, comprising:
Generating a theoretical compensation value of the position deviation according to the position deviation data of the basis and the position deviation data acquired by one detection of the detection equipment to be adjusted;
Generating a position deviation repeatability compensation value according to position deviation data of each time generated by repeatedly detecting the detection equipment to be adjusted for multiple times;
And generating a position deviation reference compensation value according to the position deviation theoretical compensation value and the position deviation repeatability compensation value.
2. Compensation method according to claim 1,
the generating of the theoretical compensation value of the position deviation according to the position deviation data of the basis and the position deviation data generated by one detection of the detection equipment to be adjusted comprises the following steps:
taking the difference value between the basic position deviation data and position deviation data generated by one detection of the detection equipment to be adjusted as the theoretical compensation value of the position deviation;
generating a position deviation repeatability compensation value according to position deviation data generated by the detection equipment to be adjusted through repeated detection for multiple times, wherein the position deviation repeatability compensation value comprises;
Taking the average value of position deviation data generated by repeatedly detecting the detection equipment to be adjusted for multiple times as the position deviation repeatability compensation value;
Generating a position deviation reference compensation value according to the position deviation theoretical compensation value and the position deviation repeatability compensation value comprises the following steps:
And taking the sum of the theoretical compensation value of the position deviation and the repeatability compensation value of the position deviation as the reference compensation value of the position deviation.
3. The compensation method according to claim 1 or 2, wherein the positional deviation data includes a difference between an actual positional coordinate and a theoretical positional coordinate of the pattern formed on the display substrate.
4. The compensation method as claimed in claim 3, wherein the pattern formed on the display substrate is a pattern of organic light emitting units formed on the display substrate.
5. a machine difference compensation device of a display substrate detection device is characterized by comprising:
A basic deviation data acquisition unit configured to acquire basic positional deviation data generated by position detection of a pattern formed on a display substrate using a reference detection device;
A repeated deviation data acquisition unit, configured to acquire position deviation data of each time, where the position deviation data of each time is generated by performing repeated position detection on a pattern formed on the display substrate for multiple times by using a detection device to be adjusted;
The deviation reference compensation value generating unit is used for generating a position deviation reference compensation value according to the basic position deviation data and the position deviation data of each time so as to compensate the position deviation data acquired by the detection equipment to be adjusted in the detection process;
the deviation reference compensation value generating unit includes:
The deviation theoretical compensation value operator unit is used for generating a position deviation theoretical compensation value according to the basic position deviation data and position deviation data generated by one detection of the detection equipment to be adjusted;
the deviation repeatability compensation value operator unit is used for generating a position deviation repeatability compensation value according to position deviation data generated by repeatedly detecting the detection equipment to be adjusted for multiple times;
And the deviation reference compensation value calculating unit is used for generating a position deviation reference compensation value according to the position deviation theoretical compensation value and the position deviation repeatability compensation value.
6. compensation apparatus according to claim 5,
The deviation theoretical compensation value operator unit is specifically configured to use a difference between the basic position deviation data and position deviation data generated by one detection of the detection device to be adjusted as the position deviation theoretical compensation value;
The deviation repeatability compensation value operator unit is specifically used for taking the average value of position deviation data of each time generated by repeated detection of the detection equipment to be adjusted as the position deviation repeatability compensation value;
The deviation reference compensation value operator unit is specifically configured to use a sum of the theoretical compensation value of the position deviation and the repetitive compensation value of the position deviation as the reference compensation value of the position deviation.
7. the compensation apparatus according to claim 5 or 6, wherein the positional deviation data includes a difference between an actual positional coordinate and a theoretical positional coordinate of the pattern formed on the display substrate.
8. A display substrate inspection apparatus comprising the compensation device of any one of claims 5 to 7.
Priority Applications (1)
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