CN109596055A - The correction method of padding height measurer - Google Patents
The correction method of padding height measurer Download PDFInfo
- Publication number
- CN109596055A CN109596055A CN201811545189.7A CN201811545189A CN109596055A CN 109596055 A CN109596055 A CN 109596055A CN 201811545189 A CN201811545189 A CN 201811545189A CN 109596055 A CN109596055 A CN 109596055A
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- China
- Prior art keywords
- board
- measuring head
- measured
- benchmark
- padding
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
A kind of correction method of padding height measurer, comprising: S10 sends print to be measured to benchmark board, and the head of correction reference board is poor；S20 treats test sample piece using the benchmark board after correction and is measured；Print to be measured is sent to non-referenced board and is measured by S30；S40 makes corrections to the measuring head of non-referenced board in the difference of identical point measuring value with benchmark board according to non-referenced board；Print to be measured is sent to the measurement that non-referenced board carries out identical point by S50 again；If benchmark board point identical as non-referenced board measures difference within the scope of allowable error, stop making corrections, otherwise returns to S40.
Description
Technical field
The present invention relates to technical field of liquid crystal display more particularly to a kind of correction methods of padding height machine.
Background technique
In the production process of liquid crystal display, padding height measurer is the important optical measurement machine of TFT-LCD processing procedure
Platform is mainly used for measuring spacer material height, line width and overlapping cases etc. between TFT substrate and CF substrate.Padding elevation carrection
The basic principle of machine is using white light interference, and vertical irradiation visible light on the film on substrate, a part of light source is in film
Surface reflection, another part are irradiated into film, and the interface reflection between film and bottom, two parts reflection light generates dry
Phenomenon is related to, the height of object is measured with the difference of interference ripple.
The measurement platform of color film padding height measurer (CFPSH) has multiple measuring heads, to the spacer material on color film
Height when being measured, same detection lug can variant presence in the measuring value of different boards, it is therefore desirable to make corrections each
Measurement difference between measurement platform, when the mean value difference measured according to board is maked corrections, it is easy to different surveys occur
The difference measured between head is reversed, but machine difference mean value the phenomenon that there is no problem, this will lead to the more difficult adjustment of processing procedure.
Summary of the invention
The present invention provides a kind of correction method of padding height measurer, to solve existing padding height machine, due to not
Amount error of measurement is different between same measurement platform, impacts to the height-measuring of the spacer material on color film, leads to measurement
Erroneous judgement, and then influence display the technical issues of.
To solve the above problems, technical solution provided by the invention is as follows:
The present invention provides a kind of correction method of padding height measurer, comprising:
S10 sends print to be measured the head for correcting the benchmark board to benchmark board poor；
S20 measures the print to be measured using the benchmark board after correction；
The print to be measured is sent to non-referenced board and is measured by S30；
S40, according to the non-referenced board and the benchmark board identical point measuring value difference, to the non-base
The measuring head of quasi- board makes corrections；
The print to be measured is sent to the measurement that the non-referenced board carries out identical point by S50 again；
If the benchmark board measures difference within the scope of allowable error with the identical point of the non-referenced board, stop
It only makes corrections, otherwise returns to the S40.
In at least one embodiment of the invention, the S10 includes:
S101 arbitrarily selects a measuring head of the benchmark board as benchmark measuring head, to the print to be measured into
Row measures；
S102 measures measurement point identical with the benchmark measuring head using other measuring heads of the benchmark board；
S103 successively makes corrections according to other measuring heads and the benchmark measuring head in the same measurement difference for measuring point
Other measuring heads.
In at least one embodiment of the invention, in the S40, according to each measuring head of the non-referenced board
With the benchmark board in the difference of identical point measuring value, each measuring head of the non-referenced board is mended one by one
Just.
In at least one embodiment of the invention, in the S10, select any one cushion material height measurer as
Benchmark board.
In at least one embodiment of the invention, the padding height measurer includes at least two measuring heads.
In at least one embodiment of the invention, the padding height measurer includes detection support, the detection branch
Frame can move along the y axis.
In at least one embodiment of the invention, the measuring head is arranged in the detection support, the measuring head
It can be mobile with Z-direction along the x axis.
In at least one embodiment of the invention, the measuring head is when being measured, by moving in the Y-axis direction
The measurement bracket moves the measuring head in the X-axis direction, realizes the contraposition with point to be measured.
In at least one embodiment of the invention, the padding height measurer is connect with computer communication, the pad
Expect that data transfer to the computer is carried out data processing by the measuring head of height measurer.
In at least one embodiment of the invention, it is provided with light source on the measuring head of the padding height measurer, institute
Measuring head is stated when being measured, the light-source brightness is adjusted by adjusting the current value of the light source, so that the padding
There is not speckle in the image that height measurer is transmitted to the computer.
The invention has the benefit that the correction method of padding height measurer provided by the invention, is able to solve difference
Measurement platform between measurement difference, and then improve measure accuracy.
Detailed description of the invention
It, below will be to embodiment or the prior art in order to illustrate more clearly of embodiment or technical solution in the prior art
Attached drawing needed in description is briefly described, it should be apparent that, the accompanying drawings in the following description is only some of invention
Embodiment for those of ordinary skill in the art without creative efforts, can also be attached according to these
Figure obtains other attached drawings.
Fig. 1 is the step flow chart of the correction method of padding height measurer of the present invention.
Specific embodiment
The explanation of following embodiment is referred to the additional illustration, the particular implementation that can be used to implement to illustrate the present invention
Example.The direction term that the present invention is previously mentioned, such as [on], [under], [preceding], [rear], [left side], [right side], [interior], [outer], [side]
Deng being only the direction with reference to annexed drawings.Therefore, the direction term used be to illustrate and understand the present invention, rather than to
The limitation present invention.The similar unit of structure is with being given the same reference numerals in the figure.
The present invention is directed to existing padding height-measuring machine, right since amount error of measurement is different between different measurement platforms
The technical issues of height-measuring of spacer material on color film impacts, and leads to the erroneous judgement of measurement, and then influences display
As shown in Figure 1, the present invention provides a kind of correction method of padding height-measuring machine, comprising:
S10 sends print to be measured the head for correcting the benchmark board to benchmark board poor；
S20 measures the print to be measured using the benchmark board after correction；
The print to be measured is sent to non-referenced board and is measured by S30；
S40, according to the non-referenced board and the benchmark board identical point measuring value difference, to the non-base
The measuring head of quasi- board makes corrections；
The print to be measured is sent to the measurement that the non-referenced board carries out identical point by S50 again；
If the benchmark board measures difference within the scope of allowable error with the identical point of the non-referenced board, stop
It only makes corrections, otherwise returns to the S40.
Wherein, the print to be measured is the color membrane substrates for being provided with spacer material, to the spacer material on the color membrane substrates
Height is measured.
The padding height measurer includes platform body, detection support and at least two measuring heads；The board sheet
Body is provided with the measuring head in the detection support to carry the print to be measured and the fixed print to be measured；Institute
It is upper removable along the y axis to state detection support, the measuring head moves along the x axis in the detection support, to be used for
Realize the contraposition of the point to be measured on the measuring head and the print to be measured, the X-direction and the Y direction are mutual
Vertically, i.e., the moving direction of the moving direction and the measuring head of the described detection support is orthogonal, and the measuring head is in Z axis side
It is moved on (direction vertical with plane where the print to be measured), to realize the measurement to the point to be measured.
The padding height measurer is connect with computer communication, and the measuring head of the padding height measurer will measure number
According to the computer is transmitted to, the data processing software on the computer is analyzed and processed the measurement data received.
It is provided with light source on the measuring head of the padding height measurer, print to be measured described in the light source vertical irradiation,
When the measuring head is measured, the brightness of the light source is adjusted by adjusting the current value of the light source, so that described
There is not speckle in the image that padding height measurer is transmitted to the computer.
Make corrections padding height measurer between machine difference when, arbitrarily select a cushion material height measurer as norm force machine
Platform, other padding height measurers are then non-referenced board.
In the S10, in the head difference timing for carrying out the benchmark board, the benchmark board is arbitrarily selected first
Then one measuring head measures the print to be measured as benchmark measuring head using the benchmark measuring head, utilizes later
Other measuring heads of the benchmark board measure the print to be measured, other measuring heads measure point with the base
The point that quasi- measuring head measures is identical, measures then according to other measuring heads and the benchmark measuring head in same measurement point
Difference successively makes corrections to other measuring heads.After the completion of each measuring head of the benchmark board is maked corrections, we recognize at this time
Each measuring head for the benchmark board is benchmark measuring head.
In the S20, the print to be measured is measured using the benchmark board after correction, at this point, with institute
On the basis of the height for stating the measurement of benchmark board.
In the S40, the print to be measured is measured using each measuring head of non-referenced board, all amounts
The point that gauge head measures is identical as the point that benchmark board measures, according to the measurement height of each measuring head and benchmark board amount
The difference between height is surveyed, is maked corrections one by one to each measuring head of the non-referenced board.
In the S50, after the machine difference correction of the non-referenced board, then that the same print to be measured sent to this is non-
Benchmark board carries out the measurement of identical point, judges the difference between the non-referenced board and the benchmark board measured value,
If the two difference, within the scope of allowable error, correction terminates, the correction of next non-referenced board is carried out；If in error range
It is interior, then back in step S40, continue to make corrections to the non-referenced board, until error within the allowable range.It makes corrections one by one
Difference between the measuring head of each padding height machine is carried out compared to the mean value difference measured according to each padding height machine
Correction, correction method provided by the invention are able to solve different platform and measure the larger problem of Territorial Difference, i.e., a part of area
Domain measurement value is relatively low, and another part field measurements are higher, but whole measurement mean value can't see the problem of changing.
The utility model has the advantages that the correction method of padding height measurer provided by the invention, is able to solve different measurement platforms
Between measurement difference, and then improve measure accuracy.
In conclusion although the present invention has been disclosed above in the preferred embodiment, but above preferred embodiment is not to limit
The system present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention
Decorations, therefore protection scope of the present invention subjects to the scope of the claims.
Claims (10)
1. a kind of correction method of padding height measurer characterized by comprising
S10 sends print to be measured the head for correcting the benchmark board to benchmark board poor；
S20 measures the print to be measured using the benchmark board after correction；
The print to be measured is sent to non-referenced board and is measured by S30；
S40, according to the non-referenced board and the benchmark board identical point measuring value difference, to the non-referenced machine
The measuring head of platform makes corrections；
The print to be measured is sent to the measurement that the non-referenced board carries out identical point by S50 again；
If the benchmark board measures difference within the scope of allowable error with the identical point of the non-referenced board, stop mending
Just, the S40 is otherwise returned to.
2. the correction method of padding height measurer according to claim 1, which is characterized in that the S10 includes:
S101 arbitrarily selects a measuring head of the benchmark board as benchmark measuring head, to the print amount of progress to be measured
It surveys；
S102 measures measurement point identical with the benchmark measuring head using other measuring heads of the benchmark board；
S103 successively makes corrections other according to other measuring heads and the benchmark measuring head in the same measurement difference for measuring point
Measuring head.
3. the correction method of padding height measurer according to claim 1, which is characterized in that in the S40, according to
Each measuring head of the non-referenced board and the benchmark board identical point measuring value difference, to the non-referenced machine
Each measuring head of platform is maked corrections one by one.
4. the correction method of padding height measurer according to claim 1, which is characterized in that in the S10, selection
Any one cushion material height measurer is as benchmark board.
5. the correction method of padding height measurer according to claim 1, which is characterized in that the padding elevation carrection
Machine includes at least two measuring heads.
6. the correction method of padding height measurer according to claim 5, which is characterized in that the padding elevation carrection
Machine includes detection support, and the detection support can move along the y axis.
7. the correction method of padding height measurer according to claim 6, which is characterized in that the measuring head setting exists
In the detection support, the measuring head can be mobile with Z-direction along the x axis.
8. the correction method of padding height measurer according to claim 7, which is characterized in that the measuring head is carrying out
When measurement, by moving the measurement bracket in the Y-axis direction, move the measuring head in the X-axis direction, realize with wait measure
The contraposition of point.
9. the correction method of padding height measurer according to claim 1, which is characterized in that the padding elevation carrection
Machine is connect with computer communication, and the measuring head of the padding height measurer counts data transfer to the computer
According to processing.
10. the correction method of padding height measurer according to claim 9, which is characterized in that the padding height is surveyed
Light source is provided on the measuring head of amount machine, the measuring head is adjusted when being measured by adjusting the current value of the light source
The light-source brightness is saved, so that speckle does not occur in the image that the padding height measurer is transmitted to the computer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811545189.7A CN109596055A (en) | 2018-12-17 | 2018-12-17 | The correction method of padding height measurer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811545189.7A CN109596055A (en) | 2018-12-17 | 2018-12-17 | The correction method of padding height measurer |
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| Publication Number | Publication Date |
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| CN109596055A true CN109596055A (en) | 2019-04-09 |
Family
ID=65963054
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| CN201811545189.7A Pending CN109596055A (en) | 2018-12-17 | 2018-12-17 | The correction method of padding height measurer |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110488512A (en) * | 2019-06-11 | 2019-11-22 | 惠科股份有限公司 | A kind of correction method and correcting system of display panel measuring device |
| CN113091673A (en) * | 2021-03-23 | 2021-07-09 | 深圳市华星光电半导体显示技术有限公司 | Line width measuring method and line width measuring device |
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| US20100250178A1 (en) * | 2009-03-25 | 2010-09-30 | Mitutoyo Corporation | Corrected ball diameter calculating method and form measuring instrument |
| CN103250025A (en) * | 2010-03-01 | 2013-08-14 | 瑞尼斯豪公司 | Correcting errors in measurements taken using a coordinate positioning apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110488512A (en) * | 2019-06-11 | 2019-11-22 | 惠科股份有限公司 | A kind of correction method and correcting system of display panel measuring device |
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Address after: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Applicant after: TCL Huaxing Photoelectric Technology Co.,Ltd. Address before: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Applicant before: Shenzhen China Star Optoelectronics Technology Co.,Ltd. |
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Application publication date: 20190409 |