CN105568390A - 一种消除硅片同心圆缺陷的方法 - Google Patents
一种消除硅片同心圆缺陷的方法 Download PDFInfo
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- CN105568390A CN105568390A CN201511004233.XA CN201511004233A CN105568390A CN 105568390 A CN105568390 A CN 105568390A CN 201511004233 A CN201511004233 A CN 201511004233A CN 105568390 A CN105568390 A CN 105568390A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
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- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
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- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
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CN201511004233.XA CN105568390B (zh) | 2015-12-28 | 2015-12-28 | 一种消除硅片同心圆缺陷的方法 |
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CN201511004233.XA CN105568390B (zh) | 2015-12-28 | 2015-12-28 | 一种消除硅片同心圆缺陷的方法 |
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CN105568390A true CN105568390A (zh) | 2016-05-11 |
CN105568390B CN105568390B (zh) | 2018-07-06 |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102263028A (zh) * | 2011-08-26 | 2011-11-30 | 上海宏力半导体制造有限公司 | 晶圆的形成方法 |
CN102995125A (zh) * | 2012-10-12 | 2013-03-27 | 孙新利 | 一种半导体硅片的热处理工艺 |
CN104962988A (zh) * | 2015-06-04 | 2015-10-07 | 宁晋晶兴电子材料有限公司 | 一种降低硅棒同心圆的硅棒制作方法 |
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2015
- 2015-12-28 CN CN201511004233.XA patent/CN105568390B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102263028A (zh) * | 2011-08-26 | 2011-11-30 | 上海宏力半导体制造有限公司 | 晶圆的形成方法 |
CN102995125A (zh) * | 2012-10-12 | 2013-03-27 | 孙新利 | 一种半导体硅片的热处理工艺 |
CN104962988A (zh) * | 2015-06-04 | 2015-10-07 | 宁晋晶兴电子材料有限公司 | 一种降低硅棒同心圆的硅棒制作方法 |
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Inventor after: Ren Bingyan Inventor after: Li Shijie Inventor after: Chen Shijie Inventor after: Wu Chengzhi Inventor after: Liu Xiaoyan Inventor after: Wu Zhe Inventor before: Li Shijie Inventor before: Chen Shijie Inventor before: Wu Chengzhi Inventor before: Liu Xiaoyan Inventor before: Wu Zhe |
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Effective date of registration: 20170321 Address after: 055550 Ningjin County, Hebei Province, crystal street, No. 279, Applicant after: NINGJIN SONGGONG ELECTRONIC MATERIAL Co.,Ltd. Address before: 055550 Ningjin County, Hebei Province, crystal street, No. 289, Applicant before: NINGJIN SAIMEI GANGLONG ELECTRONIC MATERIALS CO.,LTD. |
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Effective date of registration: 20220708 Address after: 055550 Jing Long Street, Ningjin County, Xingtai, Hebei Patentee after: JA SOLAR Co.,Ltd. Address before: 055550 279 Jing Long Street, Ningjin County, Xingtai, Hebei. Patentee before: NINGJIN SONGGONG ELECTRONIC MATERIAL Co.,Ltd. |
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