CN105548023B - A kind of evanescent wave type optoacoustic spectroscopy minimum gas sensor and measurement method based on fiber resonance cavity - Google Patents
A kind of evanescent wave type optoacoustic spectroscopy minimum gas sensor and measurement method based on fiber resonance cavity Download PDFInfo
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- CN105548023B CN105548023B CN201510990762.5A CN201510990762A CN105548023B CN 105548023 B CN105548023 B CN 105548023B CN 201510990762 A CN201510990762 A CN 201510990762A CN 105548023 B CN105548023 B CN 105548023B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
Abstract
The invention discloses a kind of evanescent wave type optoacoustic spectroscopy minimum gas sensor and measurement method based on fiber resonance cavity, the sensor is made of semiconductor laser light source, optical-fiber bundling device, conical fiber, quartz tuning-fork, phase-modulator, its measurement method is as follows: Step 1: the laser input optical fibre bundling device that semiconductor laser light source is launched, optical-fiber bundling device is made to constitute optical resonator after phase modulated device, laser power in optical fiber obtains amplification enhancing, then to generate stronger optics evanscent field at conical fiber；Step 2: object to be measured gas absorbs the evanescent wave field energy at conical fiber, acoustic wavefield is generated, quartz tuning-fork detects acoustic signals, inverting gas concentration.The present invention effectively improves laser excitation power, and then significantly improves the detectivity of optoacoustic spectroscopy gas sensor.
Description
Technical field
The invention belongs to laser sensor fields, and it is micro to be related to a kind of evanescent wave type optoacoustic spectroscopy based on fiber resonance cavity
Gas sensor and gas measuring method.
Background technique
Minimum gas sensor technology can component, concentration to gas detect, environmental monitoring, atmospheric physics and
There is important purposes in the fields such as monitoring of hazardous gas.Quartz enhanced photoacoustic spectroscopy sensor is a kind of common gas sensing
Device, in this sensor, the detectivity of sensor is directly proportional to the laser power at quartz tuning-fork, therefore, in order to
The detectivity for improving sensor is generally required to using the higher laser of output power, but up to the present, common
The output power of semiconductor laser is respectively less than 50mW.
If laser beam carries out circle transmission in ring seal optical fiber, using phase-modulator, such light can make
Fibre constitutes optical resonator, and the laser power in optical fiber can be accumulated (multipass quartz tuning-fork), is equivalent in optical fiber
There are gain, laser power can increase always, until laser power just no longer increases when the loss in optical fiber is equal with gain.
This fiber resonance cavity can make injection laser power obtain the amplification of tens times or even hundred times.If quartz tuning-fork put
In the fiber resonance cavity for entering optical-fiber bundling device composition, then the detectivity of optoacoustic spectroscopy gas sensor will obtain very
It is apparent to improve.
Summary of the invention
The object of the present invention is to provide a kind of novel evanescent wave type optoacoustic spectroscopy minimum gas biographies based on fiber resonance cavity
Sensor and measurement method construct optical fiber optical resonator using optical-fiber bundling device, increase effective laser power of sensing system,
And then improve the detectivity of photoacoustic spectrum sensor.
The purpose of the present invention is what is be achieved through the following technical solutions:
A kind of evanescent wave type optoacoustic spectroscopy minimum gas sensor based on fiber resonance cavity, by semiconductor laser light source, light
Fine bundling device, conical fiber, quartz tuning-fork, phase-modulator are constituted, in which: the laser that semiconductor laser light source is launched passes through light
Fine bundling device is transmitted at conical fiber, and conical fiber passes through the prong of quartz tuning-fork, optical-fiber bundling device and phase-modulator structure
At fiber resonance cavity.
Realize that minimum gas sensing is surveyed using the above-mentioned evanescent wave type optoacoustic spectroscopy gas sensor based on fiber resonance cavity
The method of amount, is realized by following steps:
Step 1: the laser input optical fibre bundling device that semiconductor laser light source is launched, make optical fiber after phase modulated device
Bundling device constitutes optical resonator, and the laser power in optical fiber obtains amplification enhancing, then to generate at conical fiber stronger
Optics evanscent field；
Step 2: object to be measured gas absorbs the evanescent wave field energy at conical fiber, acoustic wavefield is generated, quartz tuning-fork is visited
Survey acoustic signals, inverting gas concentration.
The present invention is directed to minimum gas sensor measuring, constructs a kind of novel evanescent wave type optoacoustic based on fiber resonance cavity
Spectrum minimum gas sensor, wherein optical-fiber bundling device and phase-modulator constitute fiber resonance cavity, the laser function in optical fiber
Rate can be accumulated (multipass quartz tuning-fork), effectively improve laser excitation power, and then significantly improve optoacoustic
The detectivity of spectroscopic gas sensor.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the evanescent wave type optoacoustic spectroscopy minimum gas sensor based on fiber resonance cavity.
Specific embodiment
Further description of the technical solution of the present invention with reference to the accompanying drawing, and however, it is not limited to this, all to this
Inventive technique scheme is modified or replaced equivalently, and without departing from the spirit and scope of the technical solution of the present invention, should all be covered
Within the protection scope of the present invention.
Specific embodiment 1: as shown in Figure 1, the evanescent wave type optoacoustic based on fiber resonance cavity that present embodiment provides
Spectrum minimum gas sensor is by semiconductor laser light source 1, optical-fiber bundling device 2, conical fiber 3, quartz tuning-fork 4, phase-modulator 5
It constitutes, the conical fiber 3 passes through the prong of quartz tuning-fork 4, and the laser that semiconductor laser light source 1 is launched passes through optical-fiber bundling device
2 are transmitted at conical fiber 3, the evanescent wave field of stronger energy are generated at conical fiber 3, while phase-modulator 5 makes light
Fine bundling device 2 constitutes optical resonator, and to further enhance evanescent wave field energy, under test gas absorbs the energy of evanescent wave field
And sound wave is generated, quartz tuning-fork 4 receives acoustic signals, inverting gas concentration.
In present embodiment, the optical-fiber bundling device 2 is that 2 beams close 1 binding structure.
In present embodiment, the optical-fiber bundling device 2 is single mode optical fiber.
In present embodiment, the conical fiber 3 is less than 1db/km to the transmission loss of semiconductor laser.
In present embodiment, the conical fiber 3 is drawn by single mode optical fiber, and beam waist diameter is less than 10 μm, length of girdling the waist
1 ~ 10mm is spent, optical fibre refractivity is necessarily less than 2.
In present embodiment, the prong gap of the quartz tuning-fork 4 is not more than 300 μm, and cannot be less than 10 μm.
In present embodiment, the resonant frequency of the quartz tuning-fork 4 is not more than 50kHz.
In present embodiment, the Q value of the quartz tuning-fork 4 is had to be larger than under 5000(1 atmospheric pressure).
In present embodiment, the modulating frequency of the phase-modulator 5 is not less than 100MHz, and damage threshold is not less than
500mW。
Specific embodiment 2: utilizing the evanescent wave type optoacoustic light based on fiber resonance cavity present embodiments provide for a kind of
The method that minimum gas sensor realizes minimum gas measurement of concetration is composed, is realized by following steps:
Step 1: the laser input optical fibre bundling device 2 that semiconductor laser light source 1 is launched, make light after phase modulated device 5
Fine bundling device constitutes optical resonator, and the laser power in optical fiber obtains amplification enhancing, then to generate at conical fiber 3 compared with
Strong optics evanscent field；
Step 2: object to be measured gas absorbs the evanescent wave field energy at conical fiber, acoustic wavefield, quartz tuning-fork 4 are generated
Detect acoustic signals, inverting gas concentration.
In present embodiment, object to be measured gas concentration cannot be below ppb magnitude.
In present embodiment, object to be measured gas componant is determined by laser output wavelength.
In present embodiment, the energy amplification factor of evanescent wave field is the gain, loss and cone of light by optical-fiber bundling device
What fine loss codetermined.
Claims (10)
1. a kind of evanescent wave type optoacoustic spectroscopy minimum gas sensor based on fiber resonance cavity, it is characterised in that the evanescent wave
Type optoacoustic spectroscopy minimum gas sensor is by semiconductor laser light source, optical-fiber bundling device, conical fiber, quartz tuning-fork, phase-modulation
Device is constituted, in which: the laser that semiconductor laser light source is launched is transmitted to one end of conical fiber, cone of light by optical-fiber bundling device
One end of fine other end connection phase-modulator, the other end of phase-modulator connect optical-fiber bundling device, and conical fiber passes through
The prong of quartz tuning-fork, optical-fiber bundling device and phase-modulator constitute fiber resonance cavity.
2. the evanescent wave type optoacoustic spectroscopy minimum gas sensor according to claim 1 based on fiber resonance cavity, special
Sign is that the optical-fiber bundling device is that 2 beams close 1 binding structure.
3. the evanescent wave type optoacoustic spectroscopy minimum gas sensor according to claim 1 based on fiber resonance cavity, special
Sign is that the optical-fiber bundling device is single mode optical fiber.
4. the evanescent wave type optoacoustic spectroscopy minimum gas sensor according to claim 1 based on fiber resonance cavity, special
Sign is that the conical fiber is less than 1db/km to the transmission loss of semiconductor laser.
5. the evanescent wave type optoacoustic spectroscopy minimum gas sensor according to claim 1 based on fiber resonance cavity, special
Sign is that the conical fiber is drawn by single mode optical fiber, and beam waist diameter is less than 10 μm, and girdle the waist 1 ~ 10mm of length, optical fiber refraction
Rate is less than 2.
6. the evanescent wave type optoacoustic spectroscopy minimum gas sensor according to claim 1 based on fiber resonance cavity, special
Sign is that the prong gap of the quartz tuning-fork is not more than 300 μm, and cannot be less than 10 μm.
7. the evanescent wave type optoacoustic spectroscopy minimum gas sensor according to claim 1 based on fiber resonance cavity, special
Sign is the resonant frequency of the quartz tuning-fork no more than 50kHz, and Q value is greater than 5000.
8. the evanescent wave type optoacoustic spectroscopy minimum gas sensor according to claim 1 based on fiber resonance cavity, special
Sign is the modulating frequency of the phase-modulator not less than 100MHz, and damage threshold is not less than 500mW.
9. a kind of evanescent wave type optoacoustic spectroscopy gas using described in claim 1-8 any claim based on fiber resonance cavity
The method of sensor realization minimum gas sensing measurement, it is characterised in that the method is realized by following steps:
Step 1: the laser input optical fibre bundling device that semiconductor laser light source is launched, make optical-fiber bundling after phase modulated device
Device constitutes optical resonator, and the laser power in optical fiber obtains amplification enhancing, then to generate stronger light at conical fiber
Learn evanscent field；
Step 2: object to be measured gas absorbs the evanescent wave field energy at conical fiber, acoustic wavefield, quartz tuning-fork detection sound are generated
Wave signal, inverting gas concentration.
10. according to claim 9 realized using the evanescent wave type optoacoustic spectroscopy gas sensor based on fiber resonance cavity
The method of minimum gas sensing measurement, it is characterised in that the object to be measured gas concentration cannot be below ppb magnitude.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107271368A (en) * | 2017-05-23 | 2017-10-20 | 哈尔滨工业大学 | A kind of interior cavity-enhanced photo acoustic spectrum-type trace-gas sensors device |
| CN108801928A (en) * | 2018-06-15 | 2018-11-13 | 南昌航空大学 | One kind being based on optoacoustic spectroscopy distribution type fiber-optic gas-detecting device |
| CN109946237B (en) * | 2019-04-09 | 2021-12-03 | 山东大学 | Light intensity enhanced photoacoustic spectroscopy gas detection system |
| CN110095467A (en) * | 2019-06-12 | 2019-08-06 | 苏州诺联芯电子科技有限公司 | Gas-detecting device based on evanscent field, the gas detection method based on evanscent field |
| CN111413317B (en) * | 2020-04-29 | 2021-09-21 | 中国科学院长春光学精密机械与物理研究所 | Stimulated Raman gas sensing system based on annular optical fiber resonant cavity |
| CN111537445A (en) * | 2020-05-29 | 2020-08-14 | 中国科学院长春光学精密机械与物理研究所 | Ring resonant cavity enhanced liquid component and concentration sensor based on evanescent wave |
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