CN105537779A - Three-dimensional adjusting mechanism and auxiliary laser cutting device employing same - Google Patents

Three-dimensional adjusting mechanism and auxiliary laser cutting device employing same Download PDF

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Publication number
CN105537779A
CN105537779A CN201610100106.8A CN201610100106A CN105537779A CN 105537779 A CN105537779 A CN 105537779A CN 201610100106 A CN201610100106 A CN 201610100106A CN 105537779 A CN105537779 A CN 105537779A
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CN
China
Prior art keywords
regulating part
moving mass
installing plate
adjusting mechanism
dimensional adjusting
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Granted
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CN201610100106.8A
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Chinese (zh)
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CN105537779B (en
Inventor
张洪华
孙杰
刘立文
马国东
尹建刚
高云峰
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Shenzhen Hans Semiconductor Equipment Technology Co Ltd
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Han s Laser Technology Industry Group Co Ltd
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Priority to CN201610100106.8A priority Critical patent/CN105537779B/en
Publication of CN105537779A publication Critical patent/CN105537779A/en
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Publication of CN105537779B publication Critical patent/CN105537779B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/083Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B23K26/0861Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane in at least in three axial directions

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention discloses a three-dimensional adjusting mechanism. The three-dimensional adjusting mechanism comprises a movable block and a mounting plate; the movable block and the mounting plate are connected in a manner that the movable block and the mounting plate can move oppositely in a first direction, but cannot move in a second direction or a third direction; the mounting plate can move in the first direction, and the movable block can move in the second direction and the third direction to drive the mounting plate to move in the second and third directions; the first direction, the second direction and the third direction are mutually perpendicular to one another. According to the three-dimensional adjusting mechanism provided by the invention, the mounting plate can move in the three vertical directions, and when an external workpiece is connected with the mounting plate, positions of the external workpiece in the three vertical directions can be adjusted as the mounting plate can move in the three vertical directions, so that superposition of the three-dimensional adjusting mechanism in the height direction is avoided, and all components are compact to avoid space waste. The invention further discloses an auxiliary laser cutting device.

Description

Three-dimensional adjusting mechanism and comprise its laser cutting servicing unit
Technical field
The present invention relates to technical field of mechanical automation, particularly relate to a kind of three-dimensional adjusting mechanism and comprise its laser cutting servicing unit.
Background technology
Three-dimensional adjusting mechanism is widely used in mechanical automation industry, generally following mechanism is all comprised inside general three-dimensional adjusting mechanism, as dovetail groove mechanism, crossed roller-type slide block mechanism, straight-line ball formula slide block mechanism, rack and pinion mechanism, but the three-dimensional adjusting mechanism that these mechanisms are formed is generally superpose in the height direction, position is each other compact not, wastes limited space.
Summary of the invention
Based on this, be necessary that superposition and the compact not thus problem wasting limited space in position each other provide three-dimensional adjusting mechanism and comprise its laser cutting servicing unit mutually in the height direction for three-dimensional adjusting mechanism.
A kind of three-dimensional adjusting mechanism, described three-dimensional adjusting mechanism comprises moving mass and installing plate, described moving mass and described installing plate can along first direction relative movements and can not along the connection of second direction, third direction movement, described installing plate can move at described first direction, and described moving mass can move to drive described installing plate to move in described second direction and described third direction in described second direction and described third direction, described first direction, described second direction and described third direction are mutually vertical.
Three-dimensional adjusting mechanism provided by the invention, due to installing plate can move along first direction relative to moving mass can not along second direction, the connection of third direction movement, maneuvering board can drive installing plate to move in second direction and third direction, first direction, second direction and third direction are mutually vertical, then installing plate can move in three vertical directions, when outside workpiece is connected with installing plate, the position of outside workpiece in three vertical direction can be regulated, because installing plate itself can move upward at three Vertical Squares, avoid three-dimensional adjusting mechanism superposition in the height direction and realize the motion in three vertical direction, and position is compact between each parts, decrease the waste in space.
Wherein in an embodiment, described three-dimensional adjusting mechanism also comprises base, described base offers the first container cavity, and described moving mass can move along described second direction and described third direction to be located in described first container cavity; Described installing plate offers the second container cavity, described moving mass can be located in described second container cavity movably along described first direction.
Wherein in an embodiment, described three-dimensional adjusting mechanism also comprises elasticity fitting, described elasticity fitting can be arranged in described installing plate in described second direction and described third direction and abut described moving mass, and described elasticity fitting can be arranged in described moving mass at described first direction and abut described base.
Wherein in an embodiment, described three-dimensional adjusting mechanism also comprises the first regulating part, second regulating part and the 3rd regulating part, described first regulating part connects with one end of described moving mass through the end that wears of described installing plate, described second regulating part and described 3rd regulating part are all arranged in described base and connect with described moving mass, rotating described first regulating part can drive described installing plate to move at first direction relative to described moving mass, rotating described second regulating part can make described moving mass and described installing plate move in second direction, rotating described 3rd regulating part can make described moving mass and described installing plate move at third direction.
Wherein in an embodiment, described three-dimensional adjusting mechanism also comprises motion base plate, and described moving mass is connected with described motion base plate away from one end of described installing plate.
Wherein in an embodiment, described moving mass is provided with holding tank near one end of described installing plate, described first regulating part is located in the described holding tank of described moving mass through the end that wears of described installing plate, and described second regulating part and described 3rd regulating part are all arranged in described base and abut with described moving mass.
Wherein in an embodiment, described first regulating part is threaded with described installing plate, described second regulating part is all connected with described whorl of base with described 3rd regulating part, rotating described first regulating part can drive described installing plate to move at described first direction relative to described moving mass, rotating described second regulating part can make described moving mass and described installing plate move in described second direction, rotates described 3rd regulating part and described moving mass and described installing plate can be made to move at described third direction.
Wherein in an embodiment, described three-dimensional adjusting mechanism also comprises the first elastic component, second elastic component and the 3rd elastic component, the described holding tank of described moving mass comprises the first holding tank and the second holding tank that are interconnected, the end wearing end described in described first regulating part is placed in described first holding tank, described first elastic component is arranged in described first regulating part and is placed in described second holding tank, one end of described first elastic component abuts with described moving mass, the other end of described first elastic component abuts with described installing plate, described base is provided with the 3rd holding tank be oppositely arranged with described second regulating part and the 4th holding tank be oppositely arranged with described 3rd regulating part, described second elastic component is placed in described 3rd holding tank, described 3rd elastic component is placed in described 4th holding tank, one end of described second elastic component and described 3rd elastic component all supports described base, the other end all supports described moving mass.
Wherein in an embodiment, described three-dimensional adjusting mechanism also comprises retainer and slide block, described retainer to be located between described base with described installing plate and to be fixedly connected with described base, described retainer is provided with slideway, described slide block can move on described slideway, described second regulating part and described 3rd regulating part support described moving mass by described slide block, and described second elastic component and described 3rd elastic component all support described moving mass by described slide block.
A kind of laser cutting servicing unit, comprises the three-dimensional adjusting mechanism described in above-mentioned any one.
Laser cutting servicing unit provided by the invention, comprise three-dimensional adjusting mechanism, due to installing plate can move along first direction relative to moving mass can not along second direction, the connection of third direction movement, maneuvering board can drive installing plate to move in second direction and third direction, first direction, second direction and third direction are mutually vertical, then installing plate can move in three vertical directions, when outside workpiece is connected with installing plate, the position of outside workpiece in three vertical direction can be regulated, because installing plate itself can move upward at three Vertical Squares, avoid three-dimensional adjusting mechanism superposition in the height direction and realize the motion in three vertical direction, and position is compact between each parts, decrease the waste in space.
Accompanying drawing explanation
The explosive view of the laser cutting servicing unit that Fig. 1 provides for the embodiment of the present invention;
The structure chart of the laser cutting servicing unit that Fig. 2 provides for the embodiment of the present invention;
Fig. 3 is the top view of Fig. 2;
Fig. 4 is the front view of Fig. 2;
Fig. 5 is the A-A face sectional view of Fig. 4;
The explosive view of the three-dimensional adjusting mechanism of the laser cutting servicing unit that Fig. 6 provides for the embodiment of the present invention;
The structure chart of the three-dimensional adjusting mechanism of the laser cutting servicing unit that Fig. 7 provides for the embodiment of the present invention;
Fig. 8 is the plane at Fig. 7 mono-visual angle;
Fig. 9 is the B-B face sectional view of Fig. 8;
Figure 10 is the plane at another visual angle of Fig. 7;
Figure 11 is the C-C face sectional view of Figure 10.
Detailed description of the invention
For the ease of understanding the present invention, below with reference to relevant drawings, the present invention is described more fully.Preferred embodiment of the present invention is given in accompanying drawing.But the present invention can realize in many different forms, is not limited to embodiment described herein.On the contrary, provide the object of these embodiments be make the understanding of disclosure of the present invention more comprehensively thorough.
It should be noted that, when element is called as " being fixed on " another element, directly can there is element placed in the middle in it on another element or also.When an element is considered to " connection " another element, it can be directly connected to another element or may there is centering elements simultaneously.Term as used herein " vertical ", " level ", "left", "right" and similar statement are just for illustrative purposes.
See Fig. 1, Fig. 2 and Fig. 3, one embodiment of the invention provides a kind of laser cutting servicing unit, comprise fixed mount 10, first smooth billows 20, second smooth billows 30, gas generator 40 and liquid generating mechanism 50, first smooth billows 20, second smooth billows 30, gas generator 40 and liquid generating mechanism 50 are all located at fixed mount 10, transparent area a can be formed between first smooth billows 20 and the second smooth billows 30, first smooth billows 20 are or/and the second smooth billows 30 can move with the glazed area changing transparent area a on fixed mount 10, laser can irradiate workpiece through transparent area, from gas generator 40 spray gas can act on from liquid generating mechanism 50 spray liquid with changes liquid shape and outflow position, liquid can cool workpiece.
Laser cutting servicing unit provided by the invention, first smooth billows 20 are or/and the second smooth billows 30 can move with the glazed area regulating transparent area a on fixed mount 10, laser can irradiate workpiece through above-mentioned printing opacity a district, so, when the glazed area of transparent area a is adjustable, the light spot shape through transparent area a can be multiple pattern, thus the Energy distribution of laser can change, laser cutting device meets the diversified requirement of cutting condition, reaches good cutting effect.
Particularly, the second smooth billows 30 mode motionless relative to fixed mount 10 can be adopted to make the first smooth billows 20 relative to the mode of fixed mount 10 movement, the glazed area of transparent area a be changed; Also the first smooth billows 20 mode motionless relative to fixed mount 10 can be taked to make the second smooth billows 30 relative to the mode of fixed mount 10 movement, the glazed area of transparent area a be changed; The first smooth billows 20 can also be adopted and the second smooth billows 30 go in the same direction or relatively and the mode of row makes the glazed area of transparent area a change.When the first smooth billows 20 and the second smooth billows 30 move relative to fixed mount 10 simultaneously, its speed between the two can difference also can be identical.
Refer again to Fig. 1, above-mentioned laser cutting servicing unit also comprises line slideway 60, first slide block 70 and the second slide block 80, line slideway 60 is located at fixed mount 10, first slide block 70 and the second slide block 80 are all slidably connected with line slideway 60, first smooth billows 20 are connected with the first slide block 70, and the second smooth billows 30 are connected with the second slide block 80.
Because the first smooth billows 20 are connected with the first slide block 70, second smooth billows 30 are connected with the second slide block 80, first slide block 70 and the second slide block 80 can move on line slideway 60, then the first slide block 70 and the second slide block 80 the first smooth billows 20 and the second smooth billows 30 can be driven to go in the same direction relative to fixed mount 10 or relative and row with the glazed area changing transparent area a.
See Fig. 2, the first smooth billows 20 comprise the first moving part 21, first connecting portion 22 and the first smooth billows portion 23, first connecting portion 22 is connected between the first moving part 21 and the first smooth billows portion 23, and the first moving part 21 is connected with the first slide block 70; Second smooth billows 30 comprise the second moving part 31, second connecting portion 32 and the second smooth billows portion 33, second connecting portion 32 is connected between the second moving part 31 and the second smooth billows portion 33, second moving part 32 is connected with the second slide block 80, forms transparent area a between the first smooth billows portion 23 and the second smooth billows portion 33.
Particularly, first connecting portion 22 is vertically connected at the edge of the first moving part 21, first smooth billows portion 23 is vertically connected at the first connecting portion 22 one end away from the first moving part 21, and the first moving part 21 and the first smooth billows part 23 are not positioned at the both sides of the first connecting portion 22.Second connecting portion 32 is vertically connected at the edge of the second moving part 31, and the second smooth billows portion 33 is vertically connected at the second connecting portion 32 one end away from the second moving part 31, and the second moving part 31 and the second smooth billows part 33 lay respectively at the both sides of the second connecting portion 32.
See Fig. 2, in the present embodiment, above-mentioned laser cutting servicing unit also comprises guide rails assembling plate 90, and fixed mount 10 is located at by guide rails assembling plate 90, and line slideway 60 is located at guide rails assembling plate 90, and guide rails assembling plate 90 is relative to the height adjustable of fixed mount 10.
Because gas generator 40 and liquid generating mechanism 50 are all located at fixed mount 10, line slideway 60 is located at guide rails assembling plate 90, first slide block 70 and the second slide block 80 are located at line slideway 60, and the first smooth billows 20 are connected with the first slide block 70, and the second smooth billows 30 are connected with the second slide block 80.If guide rails assembling plate 90 is relative to the height adjustable of fixed mount 10, then the first smooth billows 20 and the second smooth billows 30 are relative to the height adjustable of fixed mount 10, then the first smooth billows 20 and the second smooth billows 30 are relative to the height adjustable of gas generator 40 and liquid generating mechanism 50, thus the gas that sprays from gas generator 40 can be ensured and reach optimal value from the liquid that liquid generating mechanism 50 sprays to the distance of surface of the work, and ensure transparent area that the first smooth billows 20 and the second smooth billows 30 the are formed near focal point at laser.
For the ease of regulating guide rails assembling plate 90 relative to the height of fixed mount 10, above-mentioned laser cutting servicing unit also comprises the first regulating part and the first securing member, guide rails assembling plate 90 and fixed mount 10 are fixed by the first securing member, and the first regulating part can insert guide rails assembling plate 90 and with fixed mount 10 plane contact to regulate guide rails assembling plate 90 relative to the height of fixed mount 10.
When needing the height regulating guide rails assembling plate 90 relative to fixed mount 10, needing to turn on the first securing member, then turning the first regulating part, regulating guide rails assembling plate 90 relative to the height of fixed mount 10 with this; When not needing the height regulating guide rails assembling plate 90 relative to fixed mount 10, the first securing member is screwed in guide rails assembling plate 90 and fixed mount 10, with fixed guide installing plate 90 and fixed mount 10.Particularly, above-mentioned first regulating part is adjusting bolt, and above-mentioned first securing member is fastening bolt.
See Fig. 2, Fig. 4 and Fig. 5, in the present embodiment, above-mentioned gas generating mechanism 40 comprises air tube cover 41 and air tube 42, fixed mount 10 is located at by air tube cover 41, air tube 42 overlaps the hole of 41 ends for being located at air tube, the outlet side of air tube cover 41 is located between the first smooth billows 20 and the second smooth billows 30, and the gas outlet of air tube cover 41 is near transparent area a.
Aforesaid liquid generating mechanism 50 comprises needle mount 51 and is installed on the syringe needle 52 of needle mount 51, and needle mount 51 is located at fixed mount 10, and air tube 42 inside can be inserted in the end of syringe needle 52, syringe needle 52 and air tube 42 setting at an angle to each other.
Above-mentioned " at an angle to each other " is parts and another parts conplane projection is crossing and arranges, and its angle intersected can be acute angle, right angle or obtuse angle.
See Fig. 2 and Fig. 3, syringe needle 52 and air tube 42 setting at an angle to each other are the part setting at an angle to each other with air tube 42 that syringe needle 52 does not insert air tube 42, are also syringe needle 52 and do not insert the part of air tube 42 and air tube and overlap 41 and be held on part setting at an angle to each other between the first smooth billows portion 23 and the second smooth billows portion 33.
The liquid sprayed from the syringe needle 52 of liquid generating mechanism 50 is under the effect of the gas sprayed from the air tube 41 of gas generator 40, and the outflow shape of liquid and position can change, thus can obtain the optimal effectiveness of laser cutting fast.And syringe needle 52 and air tube 42 setting at an angle to each other, avoid liquid generating mechanism 50 and gas generator 40 superposition in the height direction.See Fig. 2, the needle mount 51 of liquid generating mechanism 50 is comparatively far away apart from syringe needle 52 position, can avoid the interference between each element.
Particularly, the diameter of air tube 42 is much larger than the diameter of syringe needle 52, and with the conveniently adjusted position of syringe needle 52 in air tube 42, syringe needle 52 can be liquid drugs injection syringe needle.Gas generator 40 adopts air tube 42 and liquid generating mechanism 50 to adopt the form of syringe needle 52, can reduce the liquid center of ejection and the gas center of the blowout distance to laser center.
See Fig. 2, above-mentioned laser cutting servicing unit also comprises for regulating the first smooth billows 20 relative to the second regulating part 100 of the second smooth billows 30 position, and the end of the second regulating part 100 can be held between the first smooth billows 20 and the second smooth billows 30, and the second regulating part 100 can move to make between the first smooth billows 20 and the second smooth billows 30 between first smooth billows 20 and the second smooth billows 30 near or away from.Particularly, the second regulating part 100 is located at air tube cover 41 one end away from outlet side.
Second regulating part 100 is located at air tube cover 41 one end away from outlet side, the end of the second regulating part 100 can be held in the first smooth billows 20 and the second smooth billows 30, namely the second regulating part 100 is located between the first smooth billows 20 and the second smooth billows 30, form planar higher pairs respectively and between the first smooth billows 20 and the second smooth billows 30, when turning the second regulating part 100, first smooth billows 20 and the second smooth billows 30 can relative and row or go in the same direction, and improve the first smooth billows 20 and the second smooth billows 30 in motion process relative to the symmetry of air tube 42 (i.e. laser spot).
The end of the second regulating part 100 is cumulative to the width of the part near the first smooth billows 20 and the second smooth billows 30 from the part away from the first smooth billows 20 and the second smooth billows 30, and the end of the second regulating part 100 can be located between the first smooth billows 20 and the second smooth billows 30 to regulate the glazed area of the transparent area a formed between the first smooth billows 20 and the second smooth billows 30.Because the width of the end of the second regulating part 100 is narrower in the part the closer to the first smooth billows 20 and the second smooth billows 30, when then present dynasty moves the closer to the position of the first smooth billows 20 and the second smooth billows 30, distance between first smooth billows 20 and the second smooth billows 30 is larger, and namely the glazed area of transparent area a is larger.
Particularly, the shape of the second regulating part 100 end is conical, be plane contact between first smooth billows 20 and the second smooth billows 30, when turning the second regulating part 100, second regulating part 100 is located between the first smooth billows 20 and the second smooth billows 30, make under the effect of its coned face the first smooth billows 20 and the second smooth billows away from; The end shape of the second regulating part 100 also can be semi-round ball shape.Particularly, the second regulating part 100 can be adjusting bolt.
Refer again to Fig. 2, one end that above-mentioned laser cutting servicing unit also comprises the first elastic component 110, first elastic component 110 is connected with the first smooth billows 20, and the other end of the first elastic component 110 is connected with the second smooth billows 30.After the second regulating part 100 regulates the position of the first smooth billows 20 relative to the second smooth billows 30, under the effect of the first elastic component 110 pulling force, can be convenient to locate between the first smooth billows 20 and the second smooth billows 30.Particularly, the first elastic component 110 is extension spring.
See Fig. 1 and Fig. 2, in the present embodiment, can arrange gas generator 40 and be fixedly arranged on fixed mount 10, liquid generating mechanism 50 is adjustable relative to the position of fixed mount 10.Thus regulates liquid generating mechanism 50 can be facilitated relative to the position of gas generator 40, to change the liquid form and position that spray from liquid generating mechanism 50.
Above-mentioned laser cutting servicing unit can comprise for the three-dimensional adjusting mechanism 120 of regulates liquid generating mechanism 50 relative to gas generator 40 position, and three-dimensional adjusting mechanism 120 is located at fixed mount 10, and liquid generating mechanism 50 is connected with three-dimensional adjusting mechanism 120.Under the effect of three-dimensional adjusting mechanism 120, can regulates liquid generating mechanism 50 relative to the position of gas generator 40 on three different directions.
See Fig. 6 and Fig. 7, in the present embodiment, above-mentioned three-dimensional adjusting mechanism 120 comprises base 121, moving mass 122 and installing plate 123, base 121 is installed on fixed mount 10, liquid generating mechanism 50 is connected with installing plate 123, moving mass 122 is located at base 121, moving mass 122 and installing plate 123 mutually can move along first direction and can not along second direction, the connection of third direction movement, moving mass 122 can move to drive installing plate 123 to move in second direction and third direction in second direction and third direction, first direction, second direction and third direction are mutually vertical.By the setting of said structure, installing plate 123 can be made to move up at three Vertical Squares, thus liquid generating mechanism 50 is moved in three directions relative to gas generator 40.
Above-mentioned three-dimensional adjusting mechanism 120 also can comprise motion base plate 124, 3rd regulating part 125, 4th regulating part 126 and the 5th regulating part 127, one end of moving mass 122 is connected with motion base plate 124, 3rd regulating part 125 connects with moving mass 122 through the end that wears of installing plate 123, 4th regulating part 126 and the 5th regulating part 127 are all arranged in base 121 and connect with moving mass 122, rotating the 3rd regulating part 125 can drive installing plate 123 to move at first direction relative to moving mass 122, rotating the 4th regulating part 126 can make moving mass 122 and installing plate 123 move in second direction, rotating the 5th regulating part 127 can make moving mass 122 and installing plate 123 move at third direction.
Because liquid generating mechanism 50 is connected with installing plate 123, then when installing plate 123 moves at first direction, second direction and third direction, liquid generating mechanism 50 can be driven in the motion of first direction, second direction and third direction, thus liquid generating mechanism 50 and the position-adjustable of gas generator 40 three vertical direction.
See Fig. 8 and Fig. 9, the other end of moving mass 122 is provided with holding tank 12201, 3rd regulating part 125 is located in the holding tank 12201 of moving mass 122 through the end that wears of installing plate 123, 4th regulating part 126 and the 5th regulating part 127 are all arranged in base 121 and abut with moving mass 122, 3rd regulating part 125 is threaded with installing plate 123, 4th regulating part 126 is all threaded with base 121 with the 5th regulating part 127, rotating the 3rd regulating part 125 can drive installing plate 123 to move at first direction relative to moving mass 122, rotating the 4th regulating part 126 can make moving mass 122 and installing plate 123 move in second direction, rotating the 5th regulating part 127 can make moving mass 122 and installing plate 123 move at third direction.
Certainly, the situation of moving at first direction, second direction and third direction except being made installing plate 123 by above-mentioned mode, can also arrange the 3rd regulating part 125 to be threaded with moving mass 122 through installing plate 123, the mode that the 4th regulating part 126 and the 5th regulating part 127 are all threaded with moving mass 122 through base 121 is moved to make installing plate 123 at first direction, second direction and third direction.
Particularly, above-mentioned 3rd regulating part 125, the 4th regulating part 126 and the 5th regulating part 127 include the adjusting bolt b for regulating and the adjusting nut c for locating.After regulating position by adjusting bolt b, located by adjusting nut c.
See Fig. 6, Figure 10 and Figure 11, refer again to Fig. 9 simultaneously, in the present embodiment, above-mentioned three-dimensional adjusting mechanism also comprises the second elastic component 128, 3rd elastic component 129 and the 4th elastic component 1210, the holding tank 12201 of moving mass 122 comprises the first holding tank 122011 and the second holding tank 122012 be interconnected, the end wearing end of the 3rd regulating part 125 is placed in the first holding tank 122011, second elastic component 128 is arranged in the 3rd regulating part 125 and is placed in the second holding tank 122012, one end of second elastic component 128 abuts with moving mass 122, the other end of the second elastic component 128 abuts with installing plate 123, base 121 is provided with the 3rd holding tank 12101 be oppositely arranged with the 4th regulating part 126 and the 4th holding tank 12102 be oppositely arranged with the 5th regulating part 127, 3rd elastic component 129 is placed in the 3rd holding tank 12101, 4th elastic component 1210 is placed in the 4th holding tank 12102, one end of 3rd elastic component 129 and the 4th elastic component 1210 all supports base 121, the other end all supports moving mass 122.
The setting of the second elastic component 128, can synkinesia block 122 and installing plate 123 locate in a first direction, arranging of 3rd elastic component 129 can synkinesia block 122 and installing plate 123 be located in a second direction, and arranging of the 4th elastic component 1210 can synkinesia block 122 and installing plate 123 be located on third direction.
Particularly, above-mentioned second elastic component 128, the 3rd elastic component 129 and the 4th elastic component 1210 all can be Compress Spring.
See Fig. 6, in the present embodiment, above-mentioned three-dimensional adjusting mechanism also comprises retainer 1211 and slide block 1212, retainer 1211 to be located between base 121 with installing plate 123 and to be fixedly connected with base 121, retainer 1211 is provided with slideway 12111, slide block 1212 can move on slideway 12111, and the 4th regulating part 126 and the 5th regulating part 127 support moving mass 122 by slide block 1212, and the 3rd elastic component 129 and the 4th elastic component 1210 all support moving mass 122 by slide block.
By being provided with slideway 12111 and the movement of slide block 1212 on slideway 12111 on retainer 1211,4th regulating part 126 and the 5th regulating part 127 support moving mass 122 by slide block 1212,3rd elastic component 129 and the 4th elastic component 1210 all support moving mass 122 by slide block 1212, thus ensure that the 4th regulating part 126 and the 5th regulating part 127 contact by slide block 1212 and moving mass 122,3rd elastic component 129 and the 4th elastic component 1210 are all contacted by slide block 1212 and moving mass 122, thus ensure that degree of regulation.
See Fig. 9, in the present embodiment, base 121 offers the first container cavity 12103, moving mass 122 can move along second direction and third direction to be located in the first container cavity 12103; Installing plate 123 offers the second container cavity 1231, moving mass 122 can be located in the second container cavity 1231 movably along first direction.One end that moving mass 122 is provided with holding tank 12201 is placed in the second container cavity 1231 and can moves relative to the second container cavity 1231.Moving mass 122 contacts with installing plate 123, and degree of regulation is improved.
Particularly, above-mentioned three-dimensional adjusting mechanism 120 also comprises elasticity fitting 1213, elasticity fitting 1213 can be arranged in installing plate 123 in second direction and third direction and abut moving mass 122, and elasticity fitting 1213 can be arranged in moving mass 122 at first direction and abut base 121.
By the effect of elasticity fitting 1213, can ensure that moving mass 122 abuts installing plate 123 along second direction and third direction, avoid installing plate 123 also to move in second direction and third direction when first direction moves, ensure the guiding accuracy of installing plate 123 at first direction; Elasticity fitting 1213 can ensure that motion base plate 124 abuts base 121 constantly at first direction simultaneously, avoid moving mass 122 also to move at first direction when second direction and third direction move, ensure the guiding accuracy of moving mass 122 at second direction and third direction.Particularly, above-mentioned elasticity fitting 1213 is spring jackscrew.
Refer again to Fig. 1 and Fig. 2, for the ease of liquid generating mechanism 50 dodging in space, in the present embodiment, above-mentioned laser cutting servicing unit also comprises Change-over frame 130, liquid generating mechanism 50 is connected with Change-over frame 130, Change-over frame 130 is connected 120 with above-mentioned three-dimensional adjusting mechanism and connects, three-dimensional adjusting mechanism connects 120 when three direction motions, Change-over frame 130 can be driven to move at three different directions, thus regulates liquid generating mechanism 50 is in the position in three directions, and then the position of liquid generating mechanism 50 relative to gas generator 40 can be changed.
Particularly, above-mentioned Change-over frame 130 is connected with the installing plate 123 of three-dimensional adjusting mechanism 120.Installing plate 123 is when first direction, second direction and third direction move, Change-over frame 130 can be driven in the motion of first direction, second direction and third direction, thus regulates liquid generating mechanism 50 is in the position of above-mentioned first direction, second direction and third direction.
The above embodiment only have expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.

Claims (10)

1. a three-dimensional adjusting mechanism, it is characterized in that, described three-dimensional adjusting mechanism comprises moving mass and installing plate, described moving mass and described installing plate can along first direction relative movements and can not along the connection of second direction, third direction movement, described installing plate can move at described first direction, and described moving mass can move to drive described installing plate to move in described second direction and described third direction in described second direction and described third direction, described first direction, described second direction and described third direction are mutually vertical.
2. three-dimensional adjusting mechanism according to claim 1, it is characterized in that, described three-dimensional adjusting mechanism also comprises base, described base offers the first container cavity, and described moving mass can move along described second direction and described third direction to be located in described first container cavity; Described installing plate offers the second container cavity, described moving mass can be located in described second container cavity movably along described first direction.
3. three-dimensional adjusting mechanism according to claim 2, it is characterized in that, described three-dimensional adjusting mechanism also comprises elasticity fitting, described elasticity fitting can be arranged in described installing plate in described second direction and described third direction and abut described moving mass, and described elasticity fitting can be arranged in described moving mass at described first direction and abut described base.
4. three-dimensional adjusting mechanism according to claim 1, it is characterized in that, described three-dimensional adjusting mechanism also comprises the first regulating part, second regulating part and the 3rd regulating part, described first regulating part connects with one end of described moving mass through the end that wears of described installing plate, described second regulating part and described 3rd regulating part are all arranged in described base and connect with described moving mass, rotating described first regulating part can drive described installing plate to move at first direction relative to described moving mass, rotating described second regulating part can make described moving mass and described installing plate move in second direction, rotating described 3rd regulating part can make described moving mass and described installing plate move at third direction.
5. three-dimensional adjusting mechanism according to claim 4, is characterized in that, described three-dimensional adjusting mechanism also comprises motion base plate, and described moving mass is connected with described motion base plate away from one end of described installing plate.
6. three-dimensional adjusting mechanism according to claim 4, it is characterized in that, described moving mass is provided with holding tank near one end of described installing plate, described first regulating part is located in the described holding tank of described moving mass through the end that wears of described installing plate, and described second regulating part and described 3rd regulating part are all arranged in described base and abut with described moving mass.
7. three-dimensional adjusting mechanism according to claim 6, it is characterized in that, described first regulating part is threaded with described installing plate, described second regulating part is all connected with described whorl of base with described 3rd regulating part, rotating described first regulating part can drive described installing plate to move at described first direction relative to described moving mass, rotating described second regulating part can make described moving mass and described installing plate move in described second direction, rotates described 3rd regulating part and described moving mass and described installing plate can be made to move at described third direction.
8. three-dimensional adjusting mechanism according to claim 6, it is characterized in that, described three-dimensional adjusting mechanism also comprises the first elastic component, second elastic component and the 3rd elastic component, the described holding tank of described moving mass comprises the first holding tank and the second holding tank that are interconnected, the end wearing end described in described first regulating part is placed in described first holding tank, described first elastic component is arranged in described first regulating part and is placed in described second holding tank, one end of described first elastic component abuts with described moving mass, the other end of described first elastic component abuts with described installing plate, described base is provided with the 3rd holding tank be oppositely arranged with described second regulating part and the 4th holding tank be oppositely arranged with described 3rd regulating part, described second elastic component is placed in described 3rd holding tank, described 3rd elastic component is placed in described 4th holding tank, one end of described second elastic component and described 3rd elastic component all supports described base, the other end all supports described moving mass.
9. three-dimensional adjusting mechanism according to claim 8, it is characterized in that, described three-dimensional adjusting mechanism also comprises retainer and slide block, described retainer to be located between described base with described installing plate and to be fixedly connected with described base, described retainer is provided with slideway, described slide block can move on described slideway, described second regulating part and described 3rd regulating part support described moving mass by described slide block, and described second elastic component and described 3rd elastic component all support described moving mass by described slide block.
10. a laser cutting servicing unit, is characterized in that, comprises the three-dimensional adjusting mechanism as described in any one of claim 1-9.
CN201610100106.8A 2016-02-23 2016-02-23 Three-dimensional adjusting mechanism and the laser cutting servicing unit for including it Active CN105537779B (en)

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WO2003033199A1 (en) * 2001-10-19 2003-04-24 U.C. Laser Ltd. Method for improved wafer alignment
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CN102507159A (en) * 2011-11-28 2012-06-20 成都优博创技术有限公司 Light emission end focal length measurement positioning device and measurement method thereof
CN103252761A (en) * 2013-04-28 2013-08-21 合肥工业大学 Long-stroke two-dimensional nano worktable system with angle compensation function
CN103472557A (en) * 2013-09-04 2013-12-25 中国科学院半导体研究所 Cylindrical lens coupling three-dimensional adjusting structure

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003033199A1 (en) * 2001-10-19 2003-04-24 U.C. Laser Ltd. Method for improved wafer alignment
CN201242869Y (en) * 2008-07-04 2009-05-20 比亚迪股份有限公司 Fine adjustment displacement workstation device
CN202240157U (en) * 2011-09-22 2012-05-30 苏州菱欧自动化设备有限公司 Battery welding device with cooling function
CN102507159A (en) * 2011-11-28 2012-06-20 成都优博创技术有限公司 Light emission end focal length measurement positioning device and measurement method thereof
CN103252761A (en) * 2013-04-28 2013-08-21 合肥工业大学 Long-stroke two-dimensional nano worktable system with angle compensation function
CN103472557A (en) * 2013-09-04 2013-12-25 中国科学院半导体研究所 Cylindrical lens coupling three-dimensional adjusting structure

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