CN105527501A - Small capacitance measurement method - Google Patents
Small capacitance measurement method Download PDFInfo
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- CN105527501A CN105527501A CN201510894356.9A CN201510894356A CN105527501A CN 105527501 A CN105527501 A CN 105527501A CN 201510894356 A CN201510894356 A CN 201510894356A CN 105527501 A CN105527501 A CN 105527501A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2605—Measuring capacitance
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Abstract
The invention discloses a small capacitance measurement method. The measurement method comprises capacitance value measurement which comprises the steps of measuring the discharge time needed by discharging from a first voltage value to a second voltage value of a capacitor to be measured and a reference capacitor, and calculating the capacitance value of the capacitor to be measured according to the relation between the discharging time and the capacitance value and the measured discharging time. According to the method, the capacitance value is measured based ob the discharging time and the capacitance value, and the method has the advantages of simple operation realization, low cost required, the measurement of small capacitance without capacitance value restriction, and high measurement efficiency and precision.
Description
Technical field
The present invention relates to capacitance measuring technique field, particularly relate to a kind of micro capacitance method.
Background technology
Capacitive transducer, because of the characteristic of its small size and the aspect such as low-power consumption and high precision, has application widely in the multiple fields such as industry and consumer product.At present for the measurement of electric capacity, conventional method has resonant method, succusion, charge and discharge electrical method and ac-excited method etc., wherein resonant method and succusion are not suitable for being applied in the high-acruracy survey occasion to small capacitance, and during charge and discharge electrical method, comparatively greatly, thus the stability of system is limited for drift and temperature drift; The ac-excited method response time is long, and is not easy to practical application.Above-mentioned capacitance measurement method is except all having the limitation that cannot overcome separately, and usually also need to rely on complicated circuit design, realize complicated operation, capacitive measurement scales is fixed and is difficult to expand, and thus cannot realize the measurement to all size small capacitance.Even if can simplify circuit structure to a certain extent by the mode of capacitive digital converter chip, but the price of such chip is high and use complicated usually, and performance and multiple restriction is still existed to measurement electric capacity itself.
Summary of the invention
The technical problem to be solved in the present invention is just: the technical matters existed for prior art, the invention provides one realize simple to operate, required cost low, can small capacitance be measured and not limit by capacitance, measure efficiency and the high micro capacitance method of precision simultaneously.
For solving the problems of the technologies described above, the technical scheme that the present invention proposes is:
A kind of micro capacitance method, described measuring method comprises measured capacitance value step, described measured capacitance value step is: measure discharge time required when testing capacitance and reference capacitance are discharged to the second magnitude of voltage from the first magnitude of voltage respectively, according to the relation of discharge time and capacitance and measure the capacitance that the discharge time obtained calculates testing capacitance.
As a further improvement on the present invention, the concrete measuring process of described discharge time is: be connected in same charging and discharging circuit by testing capacitance, reference capacitance successively, electric discharge is started by making the electric capacity of described access after the capacitor charging to the first of access magnitude of voltage by described charging and discharging circuit, and record the discharge time be discharged to needed for the second magnitude of voltage, measure the discharge time obtained needed for testing capacitance, reference capacitance respectively.
As a further improvement on the present invention: described charging and discharging circuit to be charged, made by discharge resistance the capacitor discharge of access by the electric capacity of pulse signal generator to access; Described charging and discharging circuit is by time converter record discharge time.
As a further improvement on the present invention: described measured capacitance value step also comprises reference capacitance configuration step, be specially configuration and be in the electric capacity of same quantitative levels as reference electric capacity with testing capacitance.
As a further improvement on the present invention: described second magnitude of voltage is the first magnitude of voltage of designated ratio, wherein 0< designated ratio <100%.
As a further improvement on the present invention, the capacitance of described testing capacitance specifically according to the capacitance of reference capacitance and between testing capacitance and reference capacitance the ratio calculation of discharge time obtain.
As a further improvement on the present invention: the capacitance of described testing capacitance specifically calculates according to the following formula;
C=C
0*μ/(μ+n)
Wherein C is the capacitance of testing capacitance, C
0for the capacitance of reference capacitance, μ is that testing capacitance is from the first magnitude of voltage V
0be discharged to the second magnitude of voltage V
tthe discharge time of Shi Suoxu, μ+n is that reference capacitance is from the first magnitude of voltage V
0be discharged to the second magnitude of voltage V
tthe discharge time of Shi Suoxu is wherein that the discharge time between testing capacitance and reference capacitance is poor.
As a further improvement on the present invention, described measuring method also comprises distributed capacitance removal step, concrete steps are: successively using the distributed capacitance of testing capacitance two ends wire as target capacitance, the capacitance of target capacitance is calculated according to described measured capacitance value step, obtain the distributed capacitance of testing capacitance two ends wire, and calculate the final capacitance removing testing capacitance after distributed capacitance according to the distributed capacitance that obtains.
As a further improvement on the present invention: during the capacitance of described calculating target capacitance, especially by the wire of target capacitance place end is connected in charging and discharging circuit, the discharge time needed for measurement target electric capacity.
As a further improvement on the present invention: the distributed capacitance that the final capacitance of described testing capacitance deducts two ends wire by the capacitance of the testing capacitance calculated obtains.
Compared with prior art, the invention has the advantages that:
1) micro capacitance method of the present invention, based on the characteristic between discharge time and capacitance, by measuring the capacitance calculating testing capacitance discharge time between testing capacitance and reference capacitance, do not need to rely on complicated circuit structure, realize simple to operate and measure efficiency and precision high, simultaneously owing to being comparing based on discharge time between reference capacitance with testing capacitance, thus the measurement of the very little small capacitance of capacitance can be realized, and measurement range is unrestricted, the application scenario of measurement is extensive;
2) micro capacitance method of the present invention, by successively testing capacitance, reference capacitance being connected in same charging and discharging circuit when discharge time measures, by charging and discharging circuit, the electric capacity of access is carried out identical charge and discharge process, testing capacitance and reference capacitance can be made to be in same charge and discharge operating mode under, thus discharge time and capacitance are set up linear relationship, the capacitance of testing capacitance can be calculated accurately based on contrast discharge time in this discharge process;
3) micro capacitance method of the present invention, only need discharge time to measure the time required when being discharged to a certain proportion of supply voltage value, without the need to completing whole discharge process, compared with having needed whole discharge process with traditional measurement method, greatly can shorten Measuring Time, effectively improve and measure efficiency;
4) in micro capacitance method of the present invention, by the reference capacitance of configuration with the same order of magnitude of testing capacitance, by the same order of magnitude electric capacity between the comparison of discharge time determine can reduce the capacitance of testing capacitance gain offsets, thus improve the precision of capacitance measurement further; Simultaneously by reference to the configuration of electric capacity, the measurement of the small capacitance to each quantitative levels can be realized, not by the restriction of capacitance size;
5) micro capacitance method of the present invention, on the basis of measured capacitance value, by measuring the distributed capacitance at testing capacitance two ends respectively, to compare traditional resonant method, advocate approach etc., effectively can eliminate distributed capacitance in micro capacitance and, on the impact of measurement result, obtain the accurate capacitance of testing capacitance.
Accompanying drawing explanation
Fig. 1 is the realization flow schematic diagram of the present embodiment micro capacitance method.
Fig. 2 is the structural representation of charging and discharging circuit in the present embodiment.
Fig. 3 be the present embodiment micro capacitance method realize principle schematic.
Fig. 4 is that the discharge curve of testing capacitance and reference capacitance in the present embodiment contrasts schematic diagram.
Fig. 5 is the structural principle schematic diagram of distributed capacitance in testing capacitance.
Fig. 6 be the present embodiment micro capacitance method comprise remove distributed capacitance step realize principle schematic.
Embodiment
Below in conjunction with Figure of description and concrete preferred embodiment, the invention will be further described, but protection domain not thereby limiting the invention.
As shown in Figure 1, the present embodiment micro capacitance method comprises measured capacitance value step, measured capacitance value step is: measure discharge time required when testing capacitance and reference capacitance are discharged to the second magnitude of voltage from the first magnitude of voltage respectively, according to the relation of discharge time and capacitance and measure the capacitance that the discharge time obtained calculates testing capacitance.
Due under identical operating mode, length discharge time of electric capacity is relevant to capacitance, namely discharge time and capacitance linear, the present embodiment is based on this characteristic between discharge time and capacitance, by measuring the capacitance calculating testing capacitance discharge time between testing capacitance and reference capacitance, do not need to rely on complicated circuit structure, realize simple to operate and measure efficiency and precision high, simultaneously owing to being comparing based on discharge time between reference capacitance with testing capacitance, thus the measurement of the very little small capacitance of capacitance can be realized, and measurement range is unrestricted, the application scenario measured is extensive.
In the present embodiment, the concrete measuring process of discharge time is: be connected in same charging and discharging circuit by testing capacitance, reference capacitance successively, electric discharge is started by making the electric capacity of access after the capacitor charging to the first of access magnitude of voltage by charging and discharging circuit, and record the discharge time be discharged to needed for the second magnitude of voltage, measure the discharge time obtained needed for testing capacitance, reference capacitance respectively.By successively testing capacitance, reference capacitance being connected in same charging and discharging circuit, by charging and discharging circuit, the electric capacity of access is carried out identical charge and discharge process, testing capacitance and reference capacitance can be made to be in same charge and discharge operating mode under, thus discharge time and capacitance are set up linear relationship, the capacitance of testing capacitance can be calculated accurately based on contrast discharge time in this discharge process.
The present embodiment charging and discharging circuit as shown in Figure 2, comprise pulse signal generator, the testing capacitance of access or reference capacitance and discharge resistance, by capacitor charging from pulse signal generator to access, made the capacitor discharge of access by discharge resistance, the simple and good stability of structure.The discharge time of the present embodiment also in setup times converter record charging and discharging circuit, specifically adopt High-precision time-to-digital converter, high-precision discharge time can be acquired intuitively.Testing capacitance, reference capacitance, when measuring, access in charging and discharging circuit by the discharge time of testing capacitance and reference capacitance successively, make all to connect to form Low-pass low-pass filter circuit with same discharge resistance; As shown in Figure 3, pulse signal is produced by pulse signal generator, by the capacitor charging that accesses in the charging and discharging circuit supply voltage to the first magnitude of voltage, then charging and discharging circuit is discharged by discharge resistance, when being discharged to the second magnitude of voltage, required time carries out record by time-to-digit converter, can measure after testing capacitance and reference capacitance perform above-mentioned steps respectively and obtain corresponding discharge time, by measuring the capacitance that can calculate testing capacitance discharge time obtained.
The electricity of electric capacity is linear with the voltage at its two ends, and can be expressed as Q=UC, wherein Q is the electricity of electric capacity, and U is the voltage at electric capacity two ends, and C is capacitance, thus can determine corresponding electric capacitance change by magnitude of voltage.In the present embodiment, second magnitude of voltage is the first magnitude of voltage of designated ratio, wherein 0< designated ratio <100%, can arrange according to the actual requirements, namely only need discharge time to measure the time required when being discharged to a certain proportion of supply voltage value, without the need to completing whole discharge process, compared with having needed whole discharge process with traditional measurement method, greatly can shorten Measuring Time, effectively improve and measure efficiency.The present embodiment specifically gets 90%, and the discharge time of namely measuring is 90% of the former electric capacity electricity of 90%(being discharged to the first magnitude of voltage) time required time, the second magnitude of voltage specifically also can be arranged according to the actual requirements.
In the present embodiment, measured capacitance value step also comprises reference capacitance configuration step, and be specially configuration and be in the electric capacity of same quantitative levels as with reference to electric capacity with testing capacitance, if testing capacitance is pF level, then corresponding selection pF level electric capacity is as reference electric capacity.Before testing capacitance is measured, usually its quantitative levels (order of magnitude) can be determined, the present embodiment is by the reference capacitance of configuration with the same order of magnitude of testing capacitance, by the same order of magnitude electric capacity between the comparison of discharge time determine the capacitance of testing capacitance, gain offsets can be reduced, thus improve the precision of capacitance measurement further, simultaneously by reference to the configuration of electric capacity, the measurement of the small capacitance to each quantitative levels can be realized, not by the restriction of capacitance size, testing capacitance is specifically as follows the electric capacity of a few fF to tens nF.
In the present embodiment, the value of testing capacitance specifically according to the capacitance of reference capacitance and between testing capacitance and reference capacitance the ratio calculation of discharge time obtain.Discharge time and capacitance linear, the ratio of the capacitance namely between testing capacitance and reference capacitance and the ratio of discharge time linear, then according to the capacitance of reference capacitance, then the capacitance of testing capacitance can be calculated by the ratio of discharge time between testing capacitance and reference capacitance.
As shown in Figure 4, wherein horizontal ordinate is the time to the discharge curve that the present embodiment testing capacitance, reference capacitance record, and testing capacitance is from the first magnitude of voltage V
0be discharged to the second magnitude of voltage V
tthe discharge time of Shi Suoxu is μ s, and difference discharge time between testing capacitance and reference capacitance is ns, then μ+n is that reference capacitance is from the first magnitude of voltage V
0be discharged to the second magnitude of voltage V
tthe discharge time of Shi Suoxu, the value concrete (1) according to the following formula of testing capacitance calculates;
C=C
0*μ/(μ+n)（1）
Wherein C is the capacitance of testing capacitance, C
0for the capacitance of reference capacitance.
In the present embodiment, measuring method also comprises distributed capacitance removal step, concrete steps are: successively using the distributed capacitance of testing capacitance two ends wire as target capacitance, the capacitance of target capacitance is calculated according to measured capacitance value step, obtain the distributed capacitance of testing capacitance two ends wire, and calculate the final capacitance of testing capacitance according to the distributed capacitance obtained.
Electric capacity all exists between any two insulated conductors, between each several part of adjacent two circles of adjacent wire, coil, discrete element and an element internal, all there is certain electric capacity, be distributed capacitance, the impact of distributed capacitance on circuit is equivalent to a capacitor on circuit in parallel.In low-frequency ac circuit, the capacitive reactance of distributed capacitance is very large, little on the impact of circuit, therefore in low-frequency ac circuit, generally can not consider the impact of distributed capacitance, but for high frequency ac circuit, the impact of distributed capacitance just can not be ignored.
Size due to small capacitance is in a millimeter rank, and the capacitance signal that can obtain is very faint, thus directly measures in the electric capacity obtained and is also superimposed with distributed capacitance, and the value of distributed capacitance is often much bigger than testing capacitance itself usually.The present embodiment is on the basis of above-mentioned measured capacitance value, by measuring the distributed capacitance at testing capacitance two ends respectively, effectively can to eliminate in micro capacitance distributed capacitance to the impact of measurement result, obtain the accurate capacitance of testing capacitance, and traditional resonant method and succusion etc. all cannot overcome the impact of distributed capacitance.
In the present embodiment, when calculating the capacitance of target capacitance, especially by the wire of target capacitance place end is connected in charging and discharging circuit, the discharge time needed for measurement target electric capacity.Successively testing capacitance two ends wire is connected in charging and discharging circuit, the discharge time obtained needed for the distributed capacitance of two ends can be measured, thus calculate two ends distributed capacitance.
In the present embodiment, deducted the distributed capacitance of two ends wire by the capacitance of the testing capacitance calculated, acquire the final capacitance of testing capacitance.
As shown in Figure 5, C1 and C2 is equivalent to the spuious distributed capacitance of testing capacitance C two ends wire etc. respectively, and A, B are respectively the conductor interface at testing capacitance two ends.When testing capacitance is measured, as shown in Figure 6, first A, B end is accessed in charging and discharging circuit, calculate the capacitance of testing capacitance by above-mentioned measured capacitance value step, namely comprise the total capacitance value of distributed capacitance; Respectively testing capacitance C two ends distributed capacitance C1 and C2 is measured again, wherein distributed capacitance C1 is A end and is the electric capacity of B end relative to ground relative to the electric capacity on ground, distributed capacitance C2, respectively A is held, B termination enters in charging and discharging circuit and measure according to above-mentioned measured capacitance value step, the capacitance of distributed capacitance C1 and C2 can be obtained; Finally the capacitance (electric capacity between A, B two ends) of testing capacitance is deducted the capacitance of distributed capacitance C1 and C2 of acquisition, namely obtain the final capacitance of testing capacitance C, in final capacitance, eliminate distributed capacitance.
Above-mentioned just preferred embodiment of the present invention, not does any pro forma restriction to the present invention.Although the present invention discloses as above with preferred embodiment, but and be not used to limit the present invention.Therefore, every content not departing from technical solution of the present invention, according to the technology of the present invention essence to any simple modification made for any of the above embodiments, equivalent variations and modification, all should drop in the scope of technical solution of the present invention protection.
Claims (10)
1. a micro capacitance method, it is characterized in that, described measuring method comprises measured capacitance value step, described measured capacitance value step is: measure discharge time required when testing capacitance and reference capacitance are discharged to the second magnitude of voltage from the first magnitude of voltage respectively, according to the relation of discharge time and capacitance and measure the capacitance that the discharge time obtained calculates testing capacitance.
2. micro capacitance method according to claim 1, it is characterized in that: the concrete measuring process of described discharge time is: successively testing capacitance, reference capacitance are connected in same charging and discharging circuit, electric discharge is started by making the electric capacity of described access after the capacitor charging to the first of access magnitude of voltage by described charging and discharging circuit, and record the discharge time be discharged to needed for the second magnitude of voltage, measure the discharge time obtained needed for testing capacitance, reference capacitance respectively.
3. micro capacitance method according to claim 2, is characterized in that: described charging and discharging circuit by capacitor charging from pulse signal generator to access, made the capacitor discharge of access by discharge resistance; Described charging and discharging circuit is by time converter record discharge time.
4. micro capacitance method according to claim 3, is characterized in that: described measured capacitance value step also comprises reference capacitance configuration step, is specially configuration and is in the electric capacity of same quantitative levels as reference electric capacity with testing capacitance.
5. micro capacitance method according to claim 4, is characterized in that: described second magnitude of voltage is the first magnitude of voltage of designated ratio, wherein 0< designated ratio <100%.
6., according to the micro capacitance method in Claims 1 to 5 described in any one, it is characterized in that: the capacitance of described testing capacitance specifically according to the capacitance of reference capacitance and between testing capacitance and reference capacitance the ratio calculation of discharge time obtain.
7. micro capacitance method according to claim 6, is characterized in that, the capacitance of described testing capacitance specifically calculates according to the following formula;
C=C
0*μ/(μ+n)
Wherein C is the capacitance of testing capacitance, C
0for the capacitance of reference capacitance, μ is that testing capacitance is from the first magnitude of voltage V
0be discharged to the second magnitude of voltage V
tthe discharge time of Shi Suoxu, μ+n is that reference capacitance is from the first magnitude of voltage V
0be discharged to the second magnitude of voltage V
tthe discharge time of Shi Suoxu is wherein that the discharge time between testing capacitance and reference capacitance is poor.
8. according to the micro capacitance method in Claims 1 to 5 described in any one, it is characterized in that, described measuring method also comprises distributed capacitance removal step, concrete steps are: successively using the distributed capacitance of testing capacitance two ends wire as target capacitance, the capacitance of target capacitance is calculated according to described measured capacitance value step, obtain the distributed capacitance of testing capacitance two ends wire, and calculate the final capacitance removing testing capacitance after distributed capacitance according to the distributed capacitance that obtains.
9. micro capacitance method according to claim 8, is characterized in that: during the capacitance of described calculating target capacitance, especially by being connected in charging and discharging circuit by the wire of target capacitance place end, the discharge time needed for measurement target electric capacity.
10. micro capacitance method according to claim 9, is characterized in that: the distributed capacitance that the final capacitance of shown testing capacitance deducts two ends wire by the capacitance of the testing capacitance calculated obtains.
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| CN107402319A (en) * | 2016-05-19 | 2017-11-28 | 苏州明皜传感科技有限公司 | Measure the probe card of micro- electric capacity |
| TWI610081B (en) * | 2016-05-27 | 2018-01-01 | 蘇州明皜傳感科技有限公司 | Probe card for measuring micro-capacitance |
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| CN106501618B (en) * | 2016-12-30 | 2019-02-26 | 上海东软载波微电子有限公司 | Capacitor's capacity measuring circuit |
| CN106645981A (en) * | 2016-12-30 | 2017-05-10 | 上海东软载波微电子有限公司 | Capacitance measuring circuit for capacitor |
| CN106501618A (en) * | 2016-12-30 | 2017-03-15 | 上海东软载波微电子有限公司 | Capacitor's capacity measuring circuit |
| CN106645981B (en) * | 2016-12-30 | 2019-08-27 | 上海东软载波微电子有限公司 | Capacitor's capacity measuring circuit |
| CN110998338A (en) * | 2017-07-31 | 2020-04-10 | ams有限公司 | Method for determining an electrical parameter and measuring device for determining an electrical parameter |
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| CN110998338B (en) * | 2017-07-31 | 2022-07-01 | 希奥检测有限公司 | Method for determining an electrical parameter and measuring device for determining an electrical parameter |
| CN108519521A (en) * | 2018-04-10 | 2018-09-11 | 杭州米芯微电子有限公司 | Capacitance measurement system, method and apparatus |
| CN108469218A (en) * | 2018-05-09 | 2018-08-31 | 广东工业大学 | A kind of capacity based distance measuring method, system, device and readable storage medium storing program for executing |
| CN108469218B (en) * | 2018-05-09 | 2020-02-07 | 广东工业大学 | Capacitance ranging method, system and device and readable storage medium |
| US10534029B1 (en) | 2018-12-07 | 2020-01-14 | Chicony Power Technology Co., Ltd. | Power conversion apparatus |
| CN113655288A (en) * | 2021-08-09 | 2021-11-16 | 湖南万鑫睿控智能技术有限责任公司 | Method for detecting capacitance value of bootstrap capacitor on line |
| CN116559545A (en) * | 2023-07-10 | 2023-08-08 | 宏晶微电子科技股份有限公司 | Capacitor frequency conversion circuit and integrated circuit chip |
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