CN105527501A - Small capacitance measurement method - Google Patents

Small capacitance measurement method Download PDF

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CN105527501A
CN105527501A CN201510894356.9A CN201510894356A CN105527501A CN 105527501 A CN105527501 A CN 105527501A CN 201510894356 A CN201510894356 A CN 201510894356A CN 105527501 A CN105527501 A CN 105527501A
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capacitance
discharge time
capacitor
testing
measured
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CN105527501B (en
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谢念
何峰
寻骈臻
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CETC 48 Research Institute
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605Measuring capacitance

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  • Measurement Of Resistance Or Impedance (AREA)

Abstract

The invention discloses a small capacitance measurement method. The measurement method comprises capacitance value measurement which comprises the steps of measuring the discharge time needed by discharging from a first voltage value to a second voltage value of a capacitor to be measured and a reference capacitor, and calculating the capacitance value of the capacitor to be measured according to the relation between the discharging time and the capacitance value and the measured discharging time. According to the method, the capacitance value is measured based ob the discharging time and the capacitance value, and the method has the advantages of simple operation realization, low cost required, the measurement of small capacitance without capacitance value restriction, and high measurement efficiency and precision.

Description

一种微小电容测量方法A Method for Measuring Micro Capacitance

技术领域 technical field

本发明涉及电容测量技术领域,尤其涉及一种微小电容测量方法。 The invention relates to the technical field of capacitance measurement, in particular to a tiny capacitance measurement method.

背景技术 Background technique

电容传感器因其小尺寸和低功耗以及高精度等方面的特性,在工业以及消费类产品等多种领域中都有非常广泛的应用。目前针对电容的测量,常用的方法有共振法、振荡法、充放电法及交流激励法等,其中共振法和振荡法不适合应用于对微小电容的高精度测量场合中,充放电法时漂及温漂较大,因而系统的稳定性有限;交流激励法响应时间长,且不便于实际应用。上述电容测量方法除均具有各自无法克服的局限性外,通常还需要依赖复杂的电路设计,实现操作复杂,电容测量范围固定且难以进行扩展,因而无法实现对各种大小微小电容的测量。即便通过电容数字转换器芯片的方式可以一定程度上简化电路结构,但通常该类芯片的价格高且使用复杂,且性能以及对测量电容本身依然存在多种限制。 Due to its small size, low power consumption and high precision, capacitive sensors are widely used in various fields such as industrial and consumer products. At present, commonly used methods for capacitance measurement include resonance method, oscillation method, charging and discharging method, and AC excitation method. Among them, the resonance method and oscillation method are not suitable for high-precision measurement of tiny capacitance. And the temperature drift is large, so the stability of the system is limited; the response time of the AC excitation method is long, and it is not convenient for practical application. In addition to their insurmountable limitations, the above-mentioned capacitance measurement methods usually need to rely on complex circuit design, complex operation, fixed capacitance measurement range and difficult to expand, so it is impossible to measure tiny capacitances of various sizes. Even though the circuit structure can be simplified to a certain extent by means of capacitance-to-digital converter chips, such chips are usually expensive and complicated to use, and there are still many limitations on performance and the measurement of capacitance itself.

发明内容 Contents of the invention

本发明要解决的技术问题就在于:针对现有技术存在的技术问题,本发明提供一种实现操作简单、所需成本低、能够测量微小电容且不受电容值限制,同时测量效率及精度高的微小电容测量方法。 The technical problem to be solved by the present invention is: aiming at the technical problems existing in the prior art, the present invention provides a method that is simple to operate, requires low cost, can measure tiny capacitance without being limited by the capacitance value, and has high measurement efficiency and precision. Microcapacitance measurement method.

为解决上述技术问题,本发明提出的技术方案为: In order to solve the problems of the technologies described above, the technical solution proposed by the present invention is:

一种微小电容测量方法,所述测量方法包括电容值测量步骤,所述电容值测量步骤为:分别测量待测电容与参考电容从第一电压值放电至第二电压值时所需的放电时间,根据放电时间与电容值的关系、以及测量得到的放电时间计算待测电容的电容值。 A method for measuring tiny capacitance, said measuring method comprising a capacitance value measuring step, said capacitance value measuring step being: respectively measuring the discharge time required for the capacitance to be measured and the reference capacitance to discharge from a first voltage value to a second voltage value , calculate the capacitance value of the capacitor to be tested according to the relationship between the discharge time and the capacitance value, and the measured discharge time.

作为本发明的进一步改进,所述放电时间的具体测量步骤为:依次将待测电容、参考电容接至同一充放电回路中,通过所述充放电回路将接入的电容充电至第一电压值后使所述接入的电容开始放电,并记录放电至第二电压值所需的放电时间,分别测量得到待测电容、参考电容所需的放电时间。 As a further improvement of the present invention, the specific measurement steps of the discharge time are: sequentially connect the capacitor to be measured and the reference capacitor to the same charging and discharging circuit, and charge the connected capacitor to the first voltage value through the charging and discharging circuit Afterwards, the connected capacitor is started to discharge, and the discharge time required to discharge to the second voltage value is recorded, and the discharge time required to obtain the measured capacitor and the reference capacitor are measured respectively.

作为本发明的进一步改进:所述充放电回路通过脉冲信号发生器对接入的电容进行充电、通过放电电阻使接入的电容放电;所述充放电回路通过时间转换器记录放电时间。 As a further improvement of the present invention: the charge-discharge circuit charges the connected capacitor through a pulse signal generator, and discharges the connected capacitor through a discharge resistor; the charge-discharge circuit records the discharge time through a time converter.

作为本发明的进一步改进:所述电容值测量步骤还包括参考电容配置步骤,具体为配置与待测电容处于同一数量等级的电容作为参考电容。 As a further improvement of the present invention: the capacitance value measuring step further includes a reference capacitance configuration step, specifically configuring a capacitance at the same level as the capacitance to be measured as a reference capacitance.

作为本发明的进一步改进:所述第二电压值为指定比例的第一电压值,其中0<指定比例<100%。 As a further improvement of the present invention: the second voltage value is a specified ratio of the first voltage value, wherein 0<specified ratio<100%.

作为本发明的进一步改进,所述待测电容的电容值具体根据参考电容的电容值、以及待测电容与参考电容之间放电时间的比值计算得到。 As a further improvement of the present invention, the capacitance value of the capacitor under test is specifically calculated according to the capacitance value of the reference capacitor and the ratio of the discharge time between the capacitor under test and the reference capacitor.

作为本发明的进一步改进:所述待测电容的电容值具体按照下式计算得到; As a further improvement of the present invention: the capacitance value of the capacitance to be measured is specifically calculated according to the following formula;

C=C0*μ/(μ+n) C=C 0* μ/(μ+n)

其中C为待测电容的电容值,C0为参考电容的电容值,μ为待测电容从第一电压值V0放电至第二电压值Vt时所需的放电时间,μ+n为参考电容从第一电压值V0放电至第二电压值Vt时所需的放电时间,其中为待测电容与参考电容之间的放电时间差。 Among them, C is the capacitance value of the capacitor to be tested, C 0 is the capacitance value of the reference capacitor, μ is the discharge time required for the capacitor to be tested to discharge from the first voltage value V 0 to the second voltage value V t , and μ+n is The discharge time required for the reference capacitor to discharge from the first voltage value V 0 to the second voltage value V t , where is the discharge time difference between the capacitor to be measured and the reference capacitor.

作为本发明的进一步改进,所述测量方法还包括分布电容值去除步骤,具体步骤为:依次以待测电容两端导线的分布电容作为目标电容,按照所述电容值测量步骤计算目标电容的电容值,得到待测电容两端导线的分布电容值,并根据得到的分布电容值计算去除分布电容值后待测电容的最终电容值。 As a further improvement of the present invention, the measurement method also includes the step of removing the distributed capacitance value. The specific steps are: sequentially use the distributed capacitance of the wires at both ends of the capacitance to be measured as the target capacitance, and calculate the capacitance of the target capacitance according to the capacitance value measurement step. value, to obtain the distributed capacitance value of the wires at both ends of the capacitor to be measured, and calculate the final capacitance value of the capacitor to be measured after removing the distributed capacitance value according to the obtained distributed capacitance value.

作为本发明的进一步改进:所述计算目标电容的电容值时,具体通过将目标电容所在端的导线连接至充放电回路中,测量目标电容所需的放电时间。 As a further improvement of the present invention: when calculating the capacitance value of the target capacitor, the discharge time required by the target capacitor is measured by connecting the wire at the end of the target capacitor to the charging and discharging circuit.

作为本发明的进一步改进:所述待测电容的最终电容值由计算得到的待测电容的电容值减去两端导线的分布电容值得到。 As a further improvement of the present invention: the final capacitance value of the capacitor under test is obtained by subtracting the distributed capacitance values of the wires at both ends from the calculated capacitance value of the capacitor under test.

与现有技术相比,本发明的优点在于: Compared with the prior art, the present invention has the advantages of:

1)本发明微小电容测量方法,基于放电时间与电容值之间的特性,通过测量待测电容与参考电容之间的放电时间来计算待测电容的电容值,不需要依赖复杂的电路结构,实现操作简单且测量的效率和精度高,同时由于是基于参考电容与待测电容之间放电时间的比较,因而可以实现电容值非常小的微小电容的测量,且测量范围不受限制,测量的应用场合广泛; 1) The micro capacitance measurement method of the present invention is based on the characteristics between the discharge time and the capacitance value, and calculates the capacitance value of the capacitance to be measured by measuring the discharge time between the capacitance to be measured and the reference capacitance, without relying on a complicated circuit structure. The operation is simple and the measurement efficiency and precision are high. At the same time, because it is based on the comparison of the discharge time between the reference capacitor and the capacitor to be measured, it can realize the measurement of tiny capacitors with very small capacitance values, and the measurement range is not limited. Wide range of applications;

2)本发明微小电容测量方法,放电时间测量时通过依次将待测电容、参考电容接至同一充放电回路中,通过充放电回路将接入的电容进行相同的充、放电过程,可以使得待测电容与参考电容处于同一充、放电工况下,从而将放电时间与电容值建立线性关系,基于该放电过程中的放电时间对比即可准确的计算待测电容的电容值; 2) The micro capacitance measurement method of the present invention, when measuring the discharge time, connect the capacitance to be measured and the reference capacitance to the same charge and discharge circuit in sequence, and conduct the same charge and discharge process on the connected capacitors through the charge and discharge circuit, so that the waiting The measured capacitor and the reference capacitor are under the same charging and discharging conditions, so that a linear relationship between the discharge time and the capacitance value is established, and the capacitance value of the capacitor to be measured can be accurately calculated based on the comparison of the discharge time during the discharge process;

3)本发明微小电容测量方法,放电时间仅需测量放电至一定比例的电源电压值时所需的时间,无需完成整个放电过程,与传统测量方法需要完成整个放电过程相比,可以大大缩短测量时间,有效提高测量效率; 3) In the tiny capacitance measurement method of the present invention, the discharge time only needs to measure the time required to discharge to a certain proportion of the power supply voltage value, and does not need to complete the entire discharge process. Compared with the traditional measurement method that needs to complete the entire discharge process, the measurement can be greatly shortened. Time, effectively improve the measurement efficiency;

4)本发明微小电容测量方法中,通过配置与待测电容同一数量级的参考电容,由同一数量级的电容之间放电时间的比较确定待测电容的电容值,可以降低增益偏移,从而进一步提高电容测量的精度;同时通过参考电容的配置,可以实现对各数量等级的微小电容的测量,不受电容大小的限制; 4) In the tiny capacitance measurement method of the present invention, by configuring a reference capacitor of the same order of magnitude as the capacitance to be measured, the capacitance value of the capacitor to be measured can be determined by comparing the discharge time between capacitors of the same order of magnitude, which can reduce the gain offset, thereby further improving The accuracy of capacitance measurement; at the same time, through the configuration of the reference capacitance, the measurement of tiny capacitances of various levels can be realized without being limited by the size of the capacitance;

5)本发明微小电容测量方法,在电容值测量的基础上,通过分别测量待测电容两端的分布电容值,相比较传统共振法、激励法等,可以有效消除微小电容测量中分布电容对测量结果的影响,获得待测电容精确的电容值。 5) The micro-capacitance measurement method of the present invention, on the basis of capacitance value measurement, measures the distributed capacitance values at both ends of the capacitor to be measured respectively. Compared with the traditional resonance method, excitation method, etc., it can effectively eliminate the impact of distributed capacitance on the measurement of micro-capacitance measurement. Influenced by the results, the accurate capacitance value of the capacitance to be measured can be obtained.

附图说明 Description of drawings

图1是本实施例微小电容测量方法的实现流程示意图。 FIG. 1 is a schematic diagram of the implementation flow of the tiny capacitance measurement method of this embodiment.

图2是本实施例中充放电回路的结构示意图。 FIG. 2 is a schematic structural diagram of the charging and discharging circuit in this embodiment.

图3是本实施例微小电容测量方法的实现原理示意图。 FIG. 3 is a schematic diagram of the implementation principle of the tiny capacitance measurement method of this embodiment.

图4是本实施例中待测电容与参考电容的放电曲线对比示意图。 FIG. 4 is a schematic diagram of comparing discharge curves of the capacitor to be measured and the reference capacitor in this embodiment.

图5是待测电容中分布电容的结构原理示意图。 Fig. 5 is a schematic diagram of the structure and principle of the distributed capacitance in the capacitance to be measured.

图6是本实施例微小电容测量方法包含去除分布电容步骤的实现原理示意图。 FIG. 6 is a schematic diagram of the implementation principle of the tiny capacitance measurement method of this embodiment including the step of removing distributed capacitance.

具体实施方式 detailed description

以下结合说明书附图和具体优选的实施例对本发明作进一步描述,但并不因此而限制本发明的保护范围。 The present invention will be further described below in conjunction with the accompanying drawings and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

如图1所示,本实施例微小电容测量方法包括电容值测量步骤,电容值测量步骤为:分别测量待测电容与参考电容从第一电压值放电至第二电压值时所需的放电时间,根据放电时间与电容值的关系、以及测量得到的放电时间计算待测电容的电容值。 As shown in Figure 1, the micro capacitance measurement method of this embodiment includes a capacitance value measurement step, and the capacitance value measurement step is: respectively measure the discharge time required for the capacitance to be measured and the reference capacitance to discharge from the first voltage value to the second voltage value , calculate the capacitance value of the capacitor to be tested according to the relationship between the discharge time and the capacitance value, and the measured discharge time.

由于在相同工况下,电容的放电时间长短与电容值相关,即放电时间与电容值呈线性关系,本实施例基于放电时间与电容值之间的该特性,通过测量待测电容与参考电容之间的放电时间来计算待测电容的电容值,不需要依赖复杂的电路结构,实现操作简单且测量的效率和精度高,同时由于是基于参考电容与待测电容之间放电时间的比较,因而可以实现电容值非常小的微小电容的测量,且测量范围不受限制,测量的应用场合广泛。 Since under the same working conditions, the discharge time of the capacitor is related to the capacitance value, that is, the discharge time and the capacitance value are linearly related, this embodiment is based on the characteristic between the discharge time and the capacitance value, by measuring the capacitance to be measured and the reference capacitance The capacitance value of the capacitor under test can be calculated by the discharge time between them without relying on a complicated circuit structure. The operation is simple and the measurement efficiency and accuracy are high. At the same time, because it is based on the comparison of the discharge time between the reference capacitor and the capacitor under test, Therefore, the measurement of tiny capacitance with very small capacitance value can be realized, and the measurement range is not limited, and the application occasions of measurement are wide.

本实施例中,放电时间的具体测量步骤为:依次将待测电容、参考电容接至同一充放电回路中,通过充放电回路将接入的电容充电至第一电压值后使接入的电容开始放电,并记录放电至第二电压值所需的放电时间,分别测量得到待测电容、参考电容所需的放电时间。通过依次将待测电容、参考电容接至同一充放电回路中,由充放电回路将接入的电容进行相同的充、放电过程,可以使得待测电容与参考电容处于同一充、放电工况下,从而将放电时间与电容值建立线性关系,基于该放电过程中的放电时间对比即可准确的计算待测电容的电容值。 In this embodiment, the specific measurement steps of the discharge time are: sequentially connect the capacitor to be measured and the reference capacitor to the same charging and discharging circuit, charge the connected capacitor to the first voltage value through the charging and discharging circuit, and then make the connected capacitor Start discharging, and record the discharge time required to discharge to the second voltage value, and measure the discharge time required to obtain the measured capacitance and the reference capacitance respectively. By sequentially connecting the capacitor to be measured and the reference capacitor to the same charging and discharging circuit, the charging and discharging circuit will carry out the same charging and discharging process on the connected capacitors, so that the capacitor to be measured and the reference capacitor can be under the same charging and discharging conditions. , so that a linear relationship is established between the discharge time and the capacitance value, and the capacitance value of the capacitor to be measured can be accurately calculated based on the comparison of the discharge time in the discharge process.

本实施例充放电回路如图2所示,包括脉冲信号发生器、接入的待测电容或参考电容以及放电电阻,通过脉冲信号发生器向接入的电容充电、通过放电电阻使接入的电容放电,结构简单且稳定性好。本实施例还设置时间转换器记录充放电回路中的放电时间,具体采用高精度时间数字转换器,可以直观的获取得到高精度的放电时间。待测电容和参考电容的放电时间测量时,依次将待测电容、参考电容接入至充放电回路中,使得均与同一个放电电阻连接组成Low-pass低通滤波电路;如图3所示,由脉冲信号发生器产生脉冲信号,将充放电回路中接入的电容充电到第一电压值的电源电压,然后充放电回路通过放电电阻进行放电,放电至第二电压值时所需时间通过时间数字转换器进行记录,待测电容和参考电容分别执行上述步骤后即可测量得到对应的放电时间,由测量得到的放电时间即可计算待测电容的电容值。 The charge-discharge circuit of this embodiment is shown in Figure 2, including a pulse signal generator, a connected capacitor to be measured or a reference capacitor, and a discharge resistor. The pulse signal generator charges the connected capacitor, and the connected capacitor is charged through the discharge resistor. Capacitor discharge, simple structure and good stability. In this embodiment, a time converter is also set to record the discharge time in the charge-discharge circuit. Specifically, a high-precision time-to-digital converter is used to intuitively obtain high-precision discharge time. When measuring the discharge time of the capacitor to be tested and the reference capacitor, connect the capacitor to be tested and the reference capacitor to the charge and discharge circuit in turn, so that they are connected to the same discharge resistor to form a low-pass filter circuit; as shown in Figure 3 , the pulse signal generator generates a pulse signal to charge the capacitor connected in the charging and discharging circuit to the power supply voltage of the first voltage value, and then the charging and discharging circuit discharges through the discharge resistor, and the time required for discharging to the second voltage value passes The time-to-digital converter records, and the corresponding discharge time can be measured after performing the above steps on the capacitor to be tested and the reference capacitor, and the capacitance value of the capacitor to be tested can be calculated from the measured discharge time.

电容的电量和其两端的电压成线性关系,可表示为Q=UC,其中Q为电容的电量,U为电容两端的电压,C为电容值,因而通过电压值可以确定对应的电容量变化。本实施例中,第二电压值为指定比例的第一电压值,其中0<指定比例<100%,可根据实际需求进行设置,即放电时间仅需测量放电至一定比例的电源电压值时所需的时间,无需完成整个放电过程,与传统测量方法需要完成整个放电过程相比,可以大大缩短测量时间,有效提高测量效率。本实施例具体取90%,即测量的放电时间为放电至第一电压值的90%(原电容电量的90%)时所需时间,第二电压值具体还可根据实际需求进行设置。 The power of the capacitor is linearly related to the voltage across it, which can be expressed as Q=UC, where Q is the power of the capacitor, U is the voltage across the capacitor, and C is the capacitance value, so the corresponding capacitance change can be determined by the voltage value. In this embodiment, the second voltage value is a specified ratio of the first voltage value, where 0<specified ratio<100%, which can be set according to actual needs, that is, the discharge time only needs to be measured when the discharge reaches a certain ratio of the power supply voltage value. Compared with the traditional measurement method that needs to complete the entire discharge process, it can greatly shorten the measurement time and effectively improve the measurement efficiency. In this embodiment, 90% is specifically taken, that is, the measured discharge time is the time required to discharge to 90% of the first voltage value (90% of the original capacitor capacity), and the second voltage value can also be set according to actual needs.

本实施例中,电容值测量步骤还包括参考电容配置步骤,具体为配置与待测电容处于同一数量等级的电容作为参考电容,如若待测电容为pF级,则对应的选择pF级电容作为参考电容。待测电容测量前,通常可以确定其数量等级(数量级),本实施例通过配置与待测电容同一数量级的参考电容,由同一数量级的电容之间放电时间的比较确定待测电容的电容值,可以降低增益偏移,从而进一步提高电容测量的精度,同时通过参考电容的配置,可以实现对各数量等级的微小电容的测量,不受电容大小的限制,待测电容具体可以为几fF到几十nF的电容。 In this embodiment, the capacitance value measurement step also includes a reference capacitance configuration step, specifically configuring a capacitance at the same level as the capacitance to be measured as a reference capacitance. If the capacitance to be measured is in pF level, then correspondingly select a pF level capacitance as a reference capacitance. Before the capacitance to be measured is measured, its magnitude (magnitude) can usually be determined. In this embodiment, by configuring a reference capacitor of the same magnitude as the capacitor to be measured, the capacitance value of the capacitor to be measured is determined by comparing the discharge time between capacitors of the same magnitude. The gain offset can be reduced, thereby further improving the accuracy of capacitance measurement. At the same time, through the configuration of the reference capacitance, the measurement of tiny capacitances of various levels can be realized without being limited by the size of the capacitance. The specific capacitance to be measured can be several fF to several ten nF capacitor.

本实施例中,待测电容的值具体根据参考电容的电容值、以及待测电容与参考电容之间放电时间的比值计算得到。放电时间与电容值呈线性关系,即待测电容与参考电容之间的电容值的比值与放电时间的比值呈线性关系,则根据参考电容的电容值,再由待测电容与参考电容之间放电时间的比值即可计算得到待测电容的电容值。 In this embodiment, the value of the capacitor under test is specifically calculated according to the capacitance value of the reference capacitor and the ratio of the discharge time between the capacitor under test and the reference capacitor. The discharge time has a linear relationship with the capacitance value, that is, the ratio of the capacitance value between the capacitance to be measured and the reference capacitance is linear to the ratio of the discharge time. Then, according to the capacitance value of the reference capacitance, the distance between the capacitance to be measured and the reference capacitance is determined. The capacitance value of the capacitor to be tested can be calculated by the ratio of the discharge time.

本实施例待测电容、参考电容所记录的放电曲线如图4所示,其中横坐标为时间,待测电容从第一电压值V0放电至第二电压值Vt时所需的放电时间为μs,待测电容与参考电容之间的放电时间差为ns,则μ+n为参考电容从第一电压值V0放电至第二电压值Vt时所需的放电时间,待测电容的值具体按照下式(1)计算得到; The discharge curves recorded by the capacitor to be measured and the reference capacitor in this embodiment are shown in Figure 4, where the abscissa is time, the discharge time required for the capacitor to be measured to be discharged from the first voltage value V to the second voltage value V t is μs, the discharge time difference between the capacitor to be tested and the reference capacitor is ns, then μ+n is the discharge time required for the reference capacitor to discharge from the first voltage value V 0 to the second voltage value V t , and the discharge time of the capacitor to be tested is The value is specifically calculated according to the following formula (1);

C=C0*μ/(μ+n)(1) C=C 0* μ/(μ+n) (1)

其中C为待测电容的电容值,C0为参考电容的电容值。 Among them, C is the capacitance value of the capacitor to be measured, and C 0 is the capacitance value of the reference capacitor.

本实施例中,测量方法还包括分布电容值去除步骤,具体步骤为:依次以待测电容两端导线的分布电容作为目标电容,按照电容值测量步骤计算目标电容的电容值,得到待测电容两端导线的分布电容值,并根据得到的分布电容值计算待测电容的最终电容值。 In this embodiment, the measurement method further includes the step of removing the distributed capacitance value. The specific steps are: sequentially take the distributed capacitance of the wires at both ends of the capacitance to be measured as the target capacitance, calculate the capacitance value of the target capacitance according to the capacitance value measurement step, and obtain the capacitance to be measured The distributed capacitance value of the wires at both ends, and calculate the final capacitance value of the capacitor to be measured according to the obtained distributed capacitance value.

电容在任何两个绝缘导体间皆存在,相邻的导线、线圈相邻两匝、分立的元件以及一个元件内部的各部分之间都具有一定的电容,即为分布电容,分布电容对电路的影响等效于给电路并联上一个电容器。在低频交流电路中,分布电容的容抗很大,对电路的影响不大,因此在低频交流电路中,一般可以不考虑分布电容的影响,但对于高频交流电路,分布电容的影响就不能忽略。 Capacitance exists between any two insulated conductors. There is a certain capacitance between adjacent wires, adjacent two turns of a coil, discrete components, and various parts inside a component, which is distributed capacitance. The effect is equivalent to adding a capacitor in parallel to the circuit. In low-frequency AC circuits, the capacitive reactance of distributed capacitance is very large, and has little influence on the circuit. Therefore, in low-frequency AC circuits, the influence of distributed capacitance can generally be ignored, but for high-frequency AC circuits, the influence of distributed capacitance cannot be considered. neglect.

由于微小电容的尺寸处于毫米级别,能够获得的电容信号非常微弱,因而直接测量得到的电容中还叠加有分布电容,且通常分布电容的值往往比待测电容本身要大得多。本实施例在上述电容值测量的基础上,通过分别测量待测电容两端的分布电容值,可以有效消除微小电容测量中分布电容对测量结果的影响,获得待测电容精确的电容值,而传统的共振法和振荡法等均无法克服分布电容的影响。 Since the size of the tiny capacitor is at the millimeter level, the capacitance signal that can be obtained is very weak, so the directly measured capacitance is also superimposed with distributed capacitance, and the value of the distributed capacitance is usually much larger than the measured capacitance itself. In this embodiment, on the basis of the above-mentioned capacitance value measurement, by separately measuring the distributed capacitance values at both ends of the capacitance to be measured, the influence of the distributed capacitance on the measurement results in the tiny capacitance measurement can be effectively eliminated, and the accurate capacitance value of the capacitance to be measured can be obtained. Neither the resonance method nor the oscillation method can overcome the influence of distributed capacitance.

本实施例中,计算目标电容的电容值时,具体通过将目标电容所在端的导线连接至充放电回路中,测量目标电容所需的放电时间。依次将待测电容两端导线连接至充放电回路中,即可测量得到两端分布电容所需的放电时间,从而计算得到两端分布电容值。 In this embodiment, when the capacitance value of the target capacitor is calculated, the discharge time required by the target capacitor is measured by connecting the wire at the end of the target capacitor to the charging and discharging circuit. Connect the wires at both ends of the capacitor to be measured to the charging and discharging circuit in turn, and the discharge time required for the distributed capacitance at both ends can be measured, and the distributed capacitance value at both ends can be calculated.

本实施例中,由计算得到的待测电容的电容值减去两端导线的分布电容值,获取得到待测电容的最终电容值。 In this embodiment, the final capacitance value of the capacitor to be measured is obtained by subtracting the distributed capacitance values of the wires at both ends from the calculated capacitance value of the capacitor to be measured.

如图5所示,C1和C2分别等效为待测电容C两端导线等的杂散分布电容,A、B分别为待测电容两端的导线接口。对待测电容进行测量时,如图6所示,首先将A、B端接入至充放电回路中,按上述电容值测量步骤计算得到待测电容的电容值,即包含分布电容的总电容值;再分别对待测电容C两端分布电容C1和C2进行测量,其中分布电容C1即为A端相对于地的电容、分布电容C2即为B端相对于地的电容,分别将A端、B端接入充放电回路中按照上述电容值测量步骤进行测量,即可获得分布电容C1和C2的电容值;最后将待测电容的电容值(A、B两端之间的电容)减去获得的分布电容C1和C2的电容值,即得到待测电容C的最终电容值,最终电容值中消除了分布电容值。 As shown in Figure 5, C1 and C2 are equivalent to the stray distributed capacitance of the wires at both ends of the capacitor C to be measured, respectively, and A and B are respectively the wire interfaces at both ends of the capacitor to be measured. When measuring the capacitance to be measured, as shown in Figure 6, first connect the A and B terminals to the charging and discharging circuit, and calculate the capacitance value of the capacitance to be measured according to the above capacitance value measurement steps, that is, the total capacitance value including the distributed capacitance ; Then measure the distributed capacitances C1 and C2 at both ends of the capacitance C to be measured, wherein the distributed capacitance C1 is the capacitance of the A terminal relative to the ground, and the distributed capacitance C2 is the capacitance of the B terminal relative to the ground. connected to the charge-discharge circuit and measured according to the above-mentioned capacitance value measurement steps, the capacitance values of the distributed capacitances C1 and C2 can be obtained; finally, the capacitance value of the capacitance to be measured (the capacitance between the two ends of A and B) is subtracted to obtain The capacitance values of the distributed capacitances C1 and C2 are obtained, that is, the final capacitance value of the capacitance C to be measured is obtained, and the distributed capacitance value is eliminated in the final capacitance value.

上述只是本发明的较佳实施例,并非对本发明作任何形式上的限制。虽然本发明已以较佳实施例揭露如上,然而并非用以限定本发明。因此,凡是未脱离本发明技术方案的内容,依据本发明技术实质对以上实施例所做的任何简单修改、等同变化及修饰,均应落在本发明技术方案保护的范围内。 The above are only preferred embodiments of the present invention, and do not limit the present invention in any form. Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention shall fall within the protection scope of the technical solution of the present invention.

Claims (10)

1. a micro capacitance method, it is characterized in that, described measuring method comprises measured capacitance value step, described measured capacitance value step is: measure discharge time required when testing capacitance and reference capacitance are discharged to the second magnitude of voltage from the first magnitude of voltage respectively, according to the relation of discharge time and capacitance and measure the capacitance that the discharge time obtained calculates testing capacitance.
2. micro capacitance method according to claim 1, it is characterized in that: the concrete measuring process of described discharge time is: successively testing capacitance, reference capacitance are connected in same charging and discharging circuit, electric discharge is started by making the electric capacity of described access after the capacitor charging to the first of access magnitude of voltage by described charging and discharging circuit, and record the discharge time be discharged to needed for the second magnitude of voltage, measure the discharge time obtained needed for testing capacitance, reference capacitance respectively.
3. micro capacitance method according to claim 2, is characterized in that: described charging and discharging circuit by capacitor charging from pulse signal generator to access, made the capacitor discharge of access by discharge resistance; Described charging and discharging circuit is by time converter record discharge time.
4. micro capacitance method according to claim 3, is characterized in that: described measured capacitance value step also comprises reference capacitance configuration step, is specially configuration and is in the electric capacity of same quantitative levels as reference electric capacity with testing capacitance.
5. micro capacitance method according to claim 4, is characterized in that: described second magnitude of voltage is the first magnitude of voltage of designated ratio, wherein 0< designated ratio <100%.
6., according to the micro capacitance method in Claims 1 to 5 described in any one, it is characterized in that: the capacitance of described testing capacitance specifically according to the capacitance of reference capacitance and between testing capacitance and reference capacitance the ratio calculation of discharge time obtain.
7. micro capacitance method according to claim 6, is characterized in that, the capacitance of described testing capacitance specifically calculates according to the following formula;
C=C 0*μ/(μ+n)
Wherein C is the capacitance of testing capacitance, C 0for the capacitance of reference capacitance, μ is that testing capacitance is from the first magnitude of voltage V 0be discharged to the second magnitude of voltage V tthe discharge time of Shi Suoxu, μ+n is that reference capacitance is from the first magnitude of voltage V 0be discharged to the second magnitude of voltage V tthe discharge time of Shi Suoxu is wherein that the discharge time between testing capacitance and reference capacitance is poor.
8. according to the micro capacitance method in Claims 1 to 5 described in any one, it is characterized in that, described measuring method also comprises distributed capacitance removal step, concrete steps are: successively using the distributed capacitance of testing capacitance two ends wire as target capacitance, the capacitance of target capacitance is calculated according to described measured capacitance value step, obtain the distributed capacitance of testing capacitance two ends wire, and calculate the final capacitance removing testing capacitance after distributed capacitance according to the distributed capacitance that obtains.
9. micro capacitance method according to claim 8, is characterized in that: during the capacitance of described calculating target capacitance, especially by being connected in charging and discharging circuit by the wire of target capacitance place end, the discharge time needed for measurement target electric capacity.
10. micro capacitance method according to claim 9, is characterized in that: the distributed capacitance that the final capacitance of shown testing capacitance deducts two ends wire by the capacitance of the testing capacitance calculated obtains.
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