CN105479604B - 一种切片机硅片脱胶用水的循环利用装置 - Google Patents
一种切片机硅片脱胶用水的循环利用装置 Download PDFInfo
- Publication number
- CN105479604B CN105479604B CN201511004548.4A CN201511004548A CN105479604B CN 105479604 B CN105479604 B CN 105479604B CN 201511004548 A CN201511004548 A CN 201511004548A CN 105479604 B CN105479604 B CN 105479604B
- Authority
- CN
- China
- Prior art keywords
- degumming
- water
- silicon wafer
- tank
- slicer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/042—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with blades or wires mounted in a reciprocating frame
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201511004548.4A CN105479604B (zh) | 2015-12-28 | 2015-12-28 | 一种切片机硅片脱胶用水的循环利用装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201511004548.4A CN105479604B (zh) | 2015-12-28 | 2015-12-28 | 一种切片机硅片脱胶用水的循环利用装置 |
Publications (2)
Publication Number | Publication Date |
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CN105479604A CN105479604A (zh) | 2016-04-13 |
CN105479604B true CN105479604B (zh) | 2017-10-31 |
Family
ID=55667048
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201511004548.4A Active CN105479604B (zh) | 2015-12-28 | 2015-12-28 | 一种切片机硅片脱胶用水的循环利用装置 |
Country Status (1)
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CN (1) | CN105479604B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110202709A (zh) * | 2019-07-09 | 2019-09-06 | 深圳市雯逸水晶有限公司 | 一种单晶产品的可调式切割水洗脱胶装置 |
CN113394150B (zh) * | 2021-07-01 | 2022-01-11 | 杭州中为光电技术有限公司 | 硅片输送分散装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3113145B2 (ja) * | 1994-03-22 | 2000-11-27 | 株式会社東京精密 | ウェーハスライスベース剥離装置 |
CN101879756B (zh) * | 2010-04-01 | 2012-08-22 | 浙江硅宏电子科技有限公司 | 一种硅片脱胶机 |
CN201677412U (zh) * | 2010-04-11 | 2010-12-22 | 锦州阳光能源有限公司 | 外圆切方机循环给水装置 |
CN202555574U (zh) * | 2012-04-16 | 2012-11-28 | 保定天威英利新能源有限公司 | 硅片脱胶机及其防压篮保护机械手 |
CN203002693U (zh) * | 2012-12-07 | 2013-06-19 | 西安隆基硅材料股份有限公司 | 金刚线切割单晶硅片脱胶预清洗装置 |
CN103691721B (zh) * | 2013-12-23 | 2015-09-16 | 英利集团有限公司 | 用于太阳能硅片清洗机的供水加热方法和供水系统 |
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2015
- 2015-12-28 CN CN201511004548.4A patent/CN105479604B/zh active Active
Also Published As
Publication number | Publication date |
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CN105479604A (zh) | 2016-04-13 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A recycling device for silicon wafer degumming water of slicer Effective date of registration: 20201217 Granted publication date: 20171031 Pledgee: Zhejiang Haining Rural Commercial Bank Co.,Ltd. Pledgor: ZHEJIANG SUNOLOGY Co.,Ltd. Registration number: Y2020330001191 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20220803 Granted publication date: 20171031 Pledgee: Zhejiang Haining Rural Commercial Bank Co.,Ltd. Pledgor: ZHEJIANG SUNOLOGY Co.,Ltd. Registration number: Y2020330001191 |