CN105470185B - Semiconductor device fabrication rotary positioning apparatus - Google Patents
Semiconductor device fabrication rotary positioning apparatus Download PDFInfo
- Publication number
- CN105470185B CN105470185B CN201510203615.9A CN201510203615A CN105470185B CN 105470185 B CN105470185 B CN 105470185B CN 201510203615 A CN201510203615 A CN 201510203615A CN 105470185 B CN105470185 B CN 105470185B
- Authority
- CN
- China
- Prior art keywords
- stomata
- fixed seat
- air guide
- guide channel
- rotating disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Abstract
A kind of semiconductor device fabrication rotary positioning apparatus, including motor, the rotating disk that is fixedly connected with the output shaft of the motor and it is bonded the motor fastening structure being fixed together with end face where the output shaft of the motor, sliding panel is additionally provided between the motor fastening structure and the rotating disk, the sliding panel is connected with the motor fastening structure, together with the sliding panel is brought into close contact with the rotating disk, the first fixed seat and the second fixed seat are provided with the rotating disk, the rotating disk is provided with the first stomata in the installation place of first fixed seat, the rotating disk is provided with the second stomata in the installation place of second fixed seat, air guide channel is provided with the sliding panel, the air guide channel connects with external air source, first stomata and the second stomata connect with the air guide channel.This semiconductor device fabrication rotary positioning apparatus can meet more processing stations demands the premise for not increasing the volume of equipment and complexity is front lower.
Description
Technical field
The present invention relates to a kind of semiconductor device fabrication rotary positioning apparatus, is not increasing entirely more particularly to one kind
The semiconductor device fabrication rotation of more processing stations requirements is disclosure satisfy that on the premise of the volume and complexity of equipment
Positioner.
Background technology
At present in the process of semiconductor devices, typically by semiconductor devices draw pick up by way of not
It is processed and detects on same station.Generally all it is by being connected draw frame machine with index dial and then being turned by index dial
It is dynamic that semiconductor devices on draw frame machine is moved to different stations so as to complete the processing to semiconductor devices.This processing
Although structure disclosure satisfy that common processing request, then obtaining more processing stations if desired just needs increase to draw knot
The number of structure, this can increase the volume of whole equipment and the complexity of equipment.How to realize is not increasing the body of whole equipment
It disclosure satisfy that more processing stations demands are a urgent problems to be solved on the premise of product and complexity.
The content of the invention
The present invention to be solved technical problem be to provide it is a kind of before the volume and complexity of whole equipment is not increased
Put the semiconductor device fabrication rotary positioning apparatus that disclosure satisfy that more processing stations demands.
To solve above technical problem, the technical scheme is that：A kind of semiconductor device fabrication is filled with rotational positioning
Put, including motor and the rotating disk that is fixedly connected with the output shaft of the motor, in addition to the output shaft institute with the motor
The motor fastening structure that fitting is fixed together in end face, its key are：In the motor fastening structure and the rotation
Sliding panel is additionally provided between disk, the sliding panel is connected with the motor fastening structure, the sliding panel and the rotating disk
It is brought into close contact together, the first fixed seat and the second fixed seat is provided with the rotating disk, the rotating disk is described first
The installation place of fixed seat is provided with the first stomata, and the rotating disk is provided with the second gas in the installation place of second fixed seat
Hole, air guide channel is provided with the sliding panel, the air guide channel connects with external air source, first stomata and the second gas
Air guide channel described in Kong Junyu connects.
As the improvement one of the present invention, in addition to it is arranged on first fixed seat and the second fixed seat line side
The 3rd fixed seat, the rotating disk is provided with the 3rd stomata, first stomata, in the installation place of the 3rd fixed seat
When thering is any one stomata to be connected with second air guide channel in two stomatas and the 3rd stomata, other remaining two stomatas
Just connected with first air guide channel.
As further improvement of the invention, in addition to it is arranged on first fixed seat and the second fixed seat line
4th fixed seat of opposite side, the rotating disk are provided with the 4th stomata in the installation place of the 4th fixed seat, and described first
When thering is any one stomata to be connected with second air guide channel in stomata, the second stomata, the 3rd stomata and the 4th stomata, remain
Other remaining three stomatas just connect with first air guide channel.
As further improvement of the present invention, first fixed seat, the 3rd fixed seat, the second fixed seat and described
4th fixed seat is arranged in the rotating disk by degree angle successively.
As the improvement two of the present invention, the air guide channel has two, and respectively the first air guide channel and the second air guide are led to
Road, when the rotating disk turns to position when first stomata and first air guide channel keep connecting, described the
Two stomatas just connect with second air guide channel, lead to when the rotating disk turns to first stomata with second air guide
Road keep connection when position when, second stomata just connects with first air guide channel.
As further improvement of the invention, the sliding panel is graphite cake.
As further improvement of the present invention, bullet is provided between the sliding panel and the motor fastening structure
Spring, one end of spring prop up the sliding panel, and the other end of spring props up the motor fastening structure.
The groove that first air guide channel is circular arc, the center of circle of the circular arc are further improved as the present invention
On the axis of the output shaft of the motor, the groove includes groove floor and the groove being arranged in the groove floor
Medial surface and groove lateral surface, the radius of circle is less than the radius of circle where the groove lateral surface where the groove medial surface.
Preferably, the radius of circle where the groove medial surface is less than or equal to the inwall of first stomata described in
The minimum range of the axis of the output shaft of motor.The radius of circle is more than or equal to first gas where the groove lateral surface
Ultimate range of the inwall in hole to the axis of the output shaft of the motor.
Following beneficial effect is can use to obtain by implementing the present invention：
A kind of semiconductor device fabrication rotary positioning apparatus, including motor and the output shaft fixation company with the motor
The rotating disk connect, in addition to the motor fastening structure being fixed together is bonded with end face where the output shaft of the motor,
Sliding panel, the sliding panel and the motor fastening structure are additionally provided between the motor fastening structure and the rotating disk
Connection, together with the sliding panel is brought into close contact with the rotating disk, the first fixed seat and second are provided with the rotating disk
Fixed seat, the rotating disk are provided with the first stomata in the installation place of first fixed seat, and the rotating disk is described second
The installation place of fixed seat is provided with the second stomata, and air guide channel, the air guide channel and outside gas are provided with the sliding panel
Source connects, and first stomata and the second stomata connect with the air guide channel.By rotational processing apparatus and semiconductor devices
Processing is coordinated with rotary positioning apparatus, and semiconductor devices is placed into the first fixed seat by rotational processing apparatus, and external air source is led to
Cross air guide channel to first stomata apply negative pressure, this makes it possible to by semiconductor devices absorption in the first fixed seat so as to
It is convenient that semiconductor devices is processed.After completion of processing, rotating disk rotates, and the first fixed seat rotates to another location and outer
Portion's source of the gas applies malleation to first stomata by air guide channel and either cuts the negative pressure applied originally.Thus facilitating will
The semiconductor devices of completion of processing is moved to other stations, and same external air source can also give the second fixed seat by the second stomata
Apply negative pressure and either cut negative pressure.Which achieves can expire on the premise of the volume and complexity that do not increase whole equipment
The more processing stations demands of foot.The air guide channel has two, respectively the first air guide channel and the second air guide channel, works as institute
When stating rotating disk and turning to position when first stomata and first air guide channel keep connecting, second stomata is just
Connected with second air guide channel, keep connecting with second air guide channel when the rotating disk turns to first stomata
During position when logical, second stomata just connects with first air guide channel.First air guide channel and the second air guide channel
In some air guide channel when can provide absorption negative pressure for the first fixed seat by the first stomata or cut absorption negative pressure, the
Another air guide channel in one air guide channel and the second air guide channel can provide suction by the second stomata for the second fixed seat
Attached negative pressure cuts absorption negative pressure, will this makes it possible to air pressure when meeting that the first fixed seat and the second fixed seat are processed respectively
Ask.The sliding panel is graphite cake, and the sliding panel of graphite cake material can be brought into close contact with rotating disk so as to ensure external air source
Air pressure lossless the can be passed to the first fixed seat either the second fixed seat, while the sliding panel of graphite cake material can also
Enough facilitate between sliding panel and rotating disk relative to smooth rotation, meet process requirements.Consolidate in the sliding panel and the motor
Determine to be provided with spring between structure, one end of spring props up the sliding panel, and the other end of spring props up the motor fixed knot
Structure, spring can keep sliding panel to be moved to the direction of rotating disk after sliding panel abrasion, so as to compensate abrasion, be further ensured that
Sliding panel is brought into close contact with rotating disk.On the axis of the output shaft of the motor, the groove includes in the center of circle of the circular arc
Groove floor and the groove medial surface and groove lateral surface being arranged in the groove floor, circle where the groove medial surface
Radius be less than the groove lateral surface where circle radius.The radius of circle is less than or equal to institute where the groove medial surface
The inwall of the first stomata is stated to the minimum range of the axis of the output shaft of the motor.The radius of circle where the groove lateral surface
More than or equal to the ultimate range of the axis of output shaft of the inwall to the motor of first stomata.This structure can
Meet the smooth conducting of the first stomata and the second stomata and groove.In first fixed seat and the second fixed seat line
Side is provided with the 3rd fixed seat, and the rotating disk is provided with the 3rd stomata in the installation place of the 3rd fixed seat, and described
When thering is any one stomata to be connected with second air guide channel in one stomata, the second stomata and the 3rd stomata, it is remaining its
He just connects two stomatas with first air guide channel.In first fixed seat and the second fixed seat line opposite side
The 4th fixed seat is provided with, the rotating disk is provided with the 4th stomata, first gas in the installation place of the 4th fixed seat
It is remaining when thering is any one stomata to be connected with second air guide channel in hole, the second stomata, the 3rd stomata and the 4th stomata
Other three stomatas just connected with first air guide channel.First fixed seat, the 3rd fixed seat, the second fixed seat with
And the 4th fixed seat is arranged in the rotating disk by degree angle successively.This further increases processing stations, convenient more
Process requirements.
Brief description of the drawings
Further detailed description is done to the present invention with reference to Figure of description, wherein：
Fig. 1 is the present invention and the schematic diagram of external process equipment cooperating；
The structure that Fig. 2 is the present invention splits schematic diagram.
Embodiment
As shown in Figure 1, 2, semiconductor device fabrication rotary positioning apparatus 10 and the cooperating of external processing equipment 20, outside
The semiconductor devices adsorbed on some adsorbing mechanism of portion's process equipment 20 can enter the installation of rotary positioning apparatus 10
On seat.A kind of semiconductor device fabrication rotary positioning apparatus, including the output shaft 111 of motor 110 and the motor 110 are solid
Surely the rotating disk 120 that connects and it is bonded the motor being fixed together with the place end face of output shaft 111 of the motor 110
Fixed structure 13, sliding panel 140, the slip are additionally provided between the motor fastening structure 13 and the rotating disk 120
Plate 140 is graphite cake, and the sliding panel 140 is connected with the motor fastening structure 13, the sliding panel 140 and the rotating disk
120 are brought into close contact together, and the first fixed seat 121 and the second fixed seat 122, the rotation are provided with the rotating disk 120
Disk 120 is provided with the first stomata 125 in the installation place of first fixed seat 121, and the rotating disk 120 is fixed described second
The installation place of seat 122 is provided with the second stomata 126, is provided with air guide channel in the sliding panel 140, the air guide channel with it is outer
Portion's source of the gas connection, the stomata 126 of the first stomata 125 and second connect with the air guide channel.The air guide channel has two
It is individual, respectively the first air guide channel 141 and the second air guide channel 142, when the rotating disk 120 turns to first stomata
125 with first air guide channel 141 keep connect when position when, second stomata 126 just leads to second air guide
Road 142 connects, when the rotating disk 120, which turns to first stomata 125, to be kept connecting with second air guide channel 142
Position when, second stomata 126 just connects with first air guide channel 141.In the sliding panel 140 and the motor
Spring 15 is provided between fixed structure 13, one end of spring 15 props up the sliding panel 140, and the other end of spring 15 props up institute
State motor fastening structure 13.First air guide channel 141 is the groove of circular arc, and the center of circle of the circular arc is in the motor
On the axis of 110 output shaft 111, the groove includes groove floor 1411 and is arranged in the groove floor 1411
Groove medial surface 1412 and groove lateral surface 1413, the radius of circle is less than on the outside of the groove where the groove medial surface 1412
The radius of circle where face 1413.The radius of circle is less than or equal to first stomata 125 where the groove medial surface 1412
Inwall to the axis of the output shaft 111 of the motor 110 minimum range.The radius of circle where the groove lateral surface 1413
More than or equal to first stomata 125 inwall to the axis of the output shaft 111 of the motor 110 ultimate range.
First fixed seat 121 is provided with the 3rd fixed seat 123, the rotating disk 120 with the line side of the second fixed seat 122
The 3rd stomata, first stomata 125, the second stomata 126 and the 3rd are provided with the installation place of the 3rd fixed seat 123
When having any one stomata to be connected with second air guide channel 142 in stomata, other remaining two stomatas are just with described
One air guide channel 141 connects.First fixed seat 121 and the line opposite side of the second fixed seat 122 are provided with the 4th
Fixed seat 124, the rotating disk 120 are provided with the 4th stomata 128 in the installation place of the 4th fixed seat 124, and described first
There are any one stomata and second air guide channel in stomata 125, the second stomata 126, the 3rd stomata and the 4th stomata 128
During 142 connection, other remaining three stomatas just connect with first air guide channel 141.First fixed seat 121,
Three fixed seats 123, the second fixed seat 122 and the 4th fixed seat 124 are arranged on the rotating disk by 90 degree of angles successively
On 120.
It must be noted that above-described embodiment is some the non-restrictive explanations made to the present invention.But this area
Technical staff can make modification to the present invention, replace and become it will be appreciated that under without departing from the purpose and scope of the invention
More, these modifications, replacement and change still belong to protection scope of the present invention.
Claims (10)
1. a kind of semiconductor device fabrication rotary positioning apparatus, including motor (110) and the output with the motor (110)
The rotating disk (120) that axle (111) is fixedly connected, in addition to be bonded admittedly with end face where the output shaft (111) of the motor (110)
Surely the motor fastening structure (13) to link together, it is characterized in that：In the motor fastening structure (13) and the rotating disk
(120) sliding panel (140) is additionally provided between, the sliding panel (140) is connected with the motor fastening structure (13), the cunning
Dynamic plate (140) is provided with the first fixed seat together with being brought into close contact with the rotating disk (120) on the rotating disk (120)
(121) and the second fixed seat (122), the rotating disk (120) are provided with first in the installation place of first fixed seat (121)
Stomata (125), the rotating disk (120) are provided with the second stomata (126), institute in the installation place of second fixed seat (122)
State and be provided with air guide channel in sliding panel (140), the air guide channel connects with external air source, first stomata (125) and
Second stomata (126) connects with the air guide channel.
2. semiconductor device fabrication rotary positioning apparatus according to claim 1, it is characterized in that：The air guide channel has
Two, respectively the first air guide channel (141) and the second air guide channel (142), when the rotating disk (120) turns to described
During position when one stomata (125) and first air guide channel (141) keep connecting, second stomata (126) just with institute
The second air guide channel (142) connection is stated, is led when the rotating disk (120) turns to first stomata (125) with described second
Gas passage (142) keep connection when position when, second stomata (126) just connects with first air guide channel (141).
3. semiconductor device fabrication rotary positioning apparatus according to claim 2, it is characterized in that：The sliding panel
(140) it is graphite cake.
4. semiconductor device fabrication rotary positioning apparatus according to claim 3, it is characterized in that：In the sliding panel
(140) spring (15) is provided between the motor fastening structure (13), one end of spring (15) props up the sliding panel
(140), the other end of spring (15) props up the motor fastening structure (13).
5. semiconductor device fabrication rotary positioning apparatus according to claim 4, it is characterized in that：First air guide is led to
Road (141) is the groove of circular arc, and the center of circle of the circular arc is described on the axis of the output shaft (111) of the motor (110)
Groove includes groove floor (1411) and the groove medial surface (1412) and groove that are arranged in the groove floor (1411)
Lateral surface (1413), circle where the radius of circle is less than the groove lateral surface (1413) where the groove medial surface (1412)
Radius.
6. semiconductor device fabrication rotary positioning apparatus according to claim 5, it is characterized in that：The groove medial surface
(1412) radius of circle where is less than or equal to the inwall of first stomata (125) to the output shaft of the motor (110)
(111) minimum range of axis.
7. semiconductor device fabrication rotary positioning apparatus according to claim 6, it is characterized in that：The groove lateral surface
(1413) radius of circle where is more than or equal to the inwall of first stomata (125) to the output shaft of the motor (110)
(111) ultimate range of axis.
8. the semiconductor device fabrication rotary positioning apparatus according to any one of claim 2 to 7, it is characterized in that：
Also include being arranged on first fixed seat (121) and the 3rd fixed seat of the second fixed seat (122) line side
(123), the rotating disk (120) is provided with the 3rd stomata, first stomata in the installation place of the 3rd fixed seat (123)
(125) when, thering is any one stomata to be connected with second air guide channel (142) in the second stomata (126) and the 3rd stomata,
Other remaining two stomatas just connect with first air guide channel (141).
9. semiconductor device fabrication rotary positioning apparatus according to claim 8, it is characterized in that：Also include being arranged on institute
State the 4th fixed seat (124) of the first fixed seat (121) and the second fixed seat (122) line opposite side, the rotating disk
(120) the 4th stomata (128), first stomata (125), second are provided with the installation place of the 4th fixed seat (124)
There is any one stomata to connect with second air guide channel (142) in stomata (126), the 3rd stomata and the 4th stomata (128)
When logical, other remaining three stomatas just connect with first air guide channel (141).
10. semiconductor device fabrication rotary positioning apparatus according to claim 9, it is characterized in that：Described first fixes
Seat (121), the 3rd fixed seat (123), the second fixed seat (122) and the 4th fixed seat (124) press 90 degree of angles successively
It is arranged in the rotating disk (120).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510203615.9A CN105470185B (en) | 2015-04-27 | 2015-04-27 | Semiconductor device fabrication rotary positioning apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510203615.9A CN105470185B (en) | 2015-04-27 | 2015-04-27 | Semiconductor device fabrication rotary positioning apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105470185A CN105470185A (en) | 2016-04-06 |
| CN105470185B true CN105470185B (en) | 2018-04-06 |
Family
ID=55607753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510203615.9A Active CN105470185B (en) | 2015-04-27 | 2015-04-27 | Semiconductor device fabrication rotary positioning apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105470185B (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW504776B (en) * | 1999-09-09 | 2002-10-01 | Mimasu Semiconductor Ind Co | Wafer rotary holding apparatus and wafer surface treatment apparatus with waste liquid recovery mechanism |
| JP4503969B2 (en) * | 2003-09-30 | 2010-07-14 | 株式会社日立ハイテクインスツルメンツ | Transfer equipment |
| US7682495B2 (en) * | 2005-04-14 | 2010-03-23 | Tango Systems, Inc. | Oscillating magnet in sputtering system |
| CN204223769U (en) * | 2014-10-31 | 2015-03-25 | 扬州泽旭电子科技有限责任公司 | Semiconductor element locating steering apparatus |
| CN204792741U (en) * | 2015-04-27 | 2015-11-18 | 深圳市复德科技有限公司 | Rotational positioning device is used in semiconductor device processing |
-
2015
- 2015-04-27 CN CN201510203615.9A patent/CN105470185B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN105470185A (en) | 2016-04-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209614467U (en) | Pressing device is used in a kind of processing of large gear | |
| CN205397489U (en) | Vacuum adsorption carries mechanical arm | |
| CN209110888U (en) | It is a kind of can vacuum suction rotating jig | |
| CN105292578B (en) | A kind of laminator of bend glass | |
| CN105470185B (en) | Semiconductor device fabrication rotary positioning apparatus | |
| CN107891191A (en) | A kind of pressure vessel head automatic capturing bead cutter | |
| CN207953486U (en) | Station start stop apparatus for continous way curved surface polishing machine | |
| CN207206250U (en) | Multi-sucker formula workpiece fixed mechanism | |
| WO2023202438A1 (en) | Damage-free pickup device and pickup method for tire carcass composite part | |
| CN206029474U (en) | Bearing ring processing of adjustable size is with grinding external diameter device | |
| CN108497626A (en) | Automatic edging machine | |
| CN205022626U (en) | Car is dealt with in glass inspection | |
| CN203717601U (en) | Vacuum sucker | |
| CN105818513A (en) | Adhesive tape pasting machine | |
| CN106426997B (en) | Vulcanizer tyre catching apparatus | |
| CN206926742U (en) | A kind of wall handgrip of multi-functional automatic creeping | |
| CN208977558U (en) | A kind of vacuum adsorption mechanism and polishing machine | |
| CN204792741U (en) | Rotational positioning device is used in semiconductor device processing | |
| CN105428296B (en) | A kind of adsorbent equipment | |
| CN107738699A (en) | Crawler type glass wall adsorbs running gear | |
| CN205294245U (en) | Glass profile modeling sucking disc of high stability | |
| CN207840301U (en) | A kind of pressure vessel head automatic capturing bead cutter | |
| CN208394200U (en) | A kind of quasi- stop device of transposition tooling | |
| CN106043868A (en) | Sucking mechanism of automatic labeling device for netbook | |
| CN106348241B (en) | A kind of rotary aligning air inflation sealing device for row frame oil filling riser |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |