CN105452804B - The manufacturing method of Roentgen apparatus and structure - Google Patents

The manufacturing method of Roentgen apparatus and structure Download PDF

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Publication number
CN105452804B
CN105452804B CN201380076108.2A CN201380076108A CN105452804B CN 105452804 B CN105452804 B CN 105452804B CN 201380076108 A CN201380076108 A CN 201380076108A CN 105452804 B CN105452804 B CN 105452804B
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tables
component
ray
supporting mass
determinand
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CN105452804A (en
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渡部贵志
丹尼尔希尔顿
山姆豪克
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Nikon Metrology NV
Nikon Corp
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Nikon Metrology NV
Nikon Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/046—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
    • G01N23/087—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays using polyenergetic X-rays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V5/00—Prospecting or detecting by the use of ionising radiation, e.g. of natural or induced radioactivity
    • G01V5/20—Detecting prohibited goods, e.g. weapons, explosives, hazardous substances, contraband or smuggled objects
    • G01V5/22—Active interrogation, i.e. by irradiating objects or goods using external radiation sources, e.g. using gamma rays or cosmic rays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V5/00—Prospecting or detecting by the use of ionising radiation, e.g. of natural or induced radioactivity
    • G01V5/20—Detecting prohibited goods, e.g. weapons, explosives, hazardous substances, contraband or smuggled objects
    • G01V5/22—Active interrogation, i.e. by irradiating objects or goods using external radiation sources, e.g. using gamma rays or cosmic rays
    • G01V5/226—Active interrogation, i.e. by irradiating objects or goods using external radiation sources, e.g. using gamma rays or cosmic rays using tomography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V5/00—Prospecting or detecting by the use of ionising radiation, e.g. of natural or induced radioactivity
    • G01V5/20—Detecting prohibited goods, e.g. weapons, explosives, hazardous substances, contraband or smuggled objects
    • G01V5/22—Active interrogation, i.e. by irradiating objects or goods using external radiation sources, e.g. using gamma rays or cosmic rays
    • G01V5/232—Active interrogation, i.e. by irradiating objects or goods using external radiation sources, e.g. using gamma rays or cosmic rays having relative motion between the source, detector and object other than by conveyor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/33—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/646—Specific applications or type of materials flaws, defects

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Abstract

A kind of manufacturing method can inhibit device and structure that detection accuracy reduces is provided.Detection device (1) is to determinand (S) exposure and to detect device by the x-ray of determinand, projects and pass through at least part of detector (4) of the transmitted by X-ray of determinand from X-ray source comprising the X-ray source for projecting x-ray, the tables (3) for keeping determinand, detection and the 1st guide device (5A) and the 2nd guide device (5B) of direction movement that guide tables past while supporting tables parallel with the optical axis of X-ray source (Zr).Detection device, the guide surface (GP) of parallel with optical axis (Zr) and the movement to provide tables plane, by the detection zone (DR) of the transmitted by X-ray of detector.

Description

The manufacturing method of Roentgen apparatus and structure
Technical field
The present invention relates to the manufacturing methods of Roentgen apparatus and structure.
Background technique
As in a non-destroying manner obtain interior of articles information device, such as have it is right documented by following note patent documents Object illumination x-ray, and detect the Roentgen apparatus of the transmitted by X-ray by the object.
[advanced technical literature]
No. 2009/0268869 specification of [patent document 1] U.S. Patent Application Publication No.
Summary of the invention
Invent the project to be solved
For detection device, it is necessary to promote measurement of the mobile tables of measurement bearing objects in the position of moving direction and fill It sets, determines the precision of the position of moving direction.In detection device, when the position of the device of the mobile tables of guidance bearing objects When setting, excessively being separated with the detection position of detector that detection is perforated through the transmitted by X-ray of object, positioning accurate that tables locate Degree has a possibility that reduction.As a result, detection accuracy is likely to decrease.
Aspect of the invention, purpose provide it is a kind of can inhibit detection accuracy reduce Roentgen apparatus and structure system Make method.
To the means to solve the problem
1st aspect of the invention, is a kind of Roentgen apparatus, is to tested object exposure and to detect through the tested object X-ray has: X-ray source, projects x-ray from luminous point；Microscope carrier supports the tested object；Detector, detection are penetrated from the X-ray source Out, pass through at least part of the transmitted by X-ray for being detected object；Mobile device, to change between the luminous point and the tested object Distance or the luminous point between the detector at a distance from least one party distance, and make the X-ray source, the microscope carrier or the inspection One of device is surveyed as mobile object and is displaced into the 1st direction；And the 1st measuring device and the 2nd measuring device, it is measurement the 1st The position of the mobile object in direction；1st measuring device and the 2nd measuring device are disposed on the removable of the mobile device The 2nd direction intersected in region with the 1st direction.
2nd aspect of the invention, is a kind of Roentgen apparatus, is to tested object exposure and to detect through the tested object X-ray has: X-ray source, projects x-ray from luminous point；Microscope carrier supports the tested object；Detector, detection are penetrated from the X-ray source Out, pass through at least part of the transmitted by X-ray for being detected object；And guide device, to change the luminous point and the checking matter The distance of body or the luminous point at a distance from the detector at least one party distance, by the X-ray source, the microscope carrier and the detection The movement of at least one of device is provided with the guide surface of plane, to guide the movement；Include the guide surface and the guide surface Parallel plane is disposed in the region with detector detection by the transmitted by X-ray of the tested object.
3rd aspect of the invention, is a kind of Roentgen apparatus, is to tested object exposure and to detect through the tested object X-ray has: X-ray source, projects x-ray from luminous point；Microscope carrier supports the tested object；Detector, detection are penetrated from the X-ray source Out, pass through at least part of the transmitted by X-ray for being detected object；And guide device, it is to guide the X-ray source, the microscope carrier and be somebody's turn to do At least one of detector, with link the luminous point and the detector and receive the parallel side of the axis at light-receiving surface center of the x-ray To movement；Guide surface, parallel with the guide surface comprising providing the plane of motion of the X-ray source, the microscope carrier and the detector Plane, is disposed on the connection luminous point and the detector receives near the axis at light-receiving surface center of the x-ray.
4th aspect of the invention, is a kind of manufacturing method of structure, it includes: it is made the design about structure shape Information is made the structure according to the design information, is surveyed for the tested object using aforementioned Roentgen apparatus with the structure of production It measures the shape of the made structure and compares the resulting shape information of the measurement and the design information.
Invention effect
A kind of aspect according to the present invention, it is possible to provide manufacture for the Roentgen apparatus and structure that detection accuracy can be inhibited to reduce Method.
Detailed description of the invention
Fig. 1 is the figure for showing an example of device of implementation form.
Fig. 2 is the perspective view of an example for the supporting mass for showing that the device of implementation form has.
Fig. 3 shows the side view of the 1st side wall of supporting mass shown in Fig. 2.
Fig. 4 is the side view for showing the 2nd side wall of supporting mass shown in Fig. 2.
Fig. 5 is the bottom view of an example for the supporting mass for showing that the device of implementation form has.
Fig. 6 is the line A-A cross-sectional view of Fig. 1.
Fig. 7 is the top view of detection device.
Fig. 8 is the perspective view for the tables' supporting mass for showing that detection device has.
Fig. 9 is the figure to illustrate to make to be displaced into the construction of tables' rotary axis direction.
Figure 10 is the figure to illustrate to make to be displaced into the construction of tables' rotary axis direction.
Figure 11 is the figure for showing the 2nd movable link of bearing tables.
Figure 12 is the figure for showing counterweight.
Figure 13 is the figure to illustrate the guide surface of guide device.
Figure 14 is the figure to illustrate the guide surface of guide device.
Figure 15 is the figure to illustrate the guide surface of guide device.
Figure 16 is the figure for showing detection zone.
Figure 17 is the figure for showing detection zone.
Figure 18 is the figure for showing detection zone and guiding relation of plane.
Figure 19 is shown in the detection zone of comparative example and the figure of guidance relation of plane.
Figure 20 is shown in the detection zone of this implementation form and the figure of guidance relation of plane.
Figure 21 is the figure for showing detection zone and guidance relation of plane in this implementation form.
Figure 22 is the figure for showing the variation of detection zone and guidance relation of plane in this implementation form.
Figure 23 is the figure for showing the variation of tables' supporting mass.
Figure 24 is the figure for showing the variation of tables' supporting mass.
Figure 25 is the figure for showing the variation of tables' supporting mass.
Figure 26 is the figure for showing the variation of configuration of the 1st guide device and the 2nd guide device.
Figure 27 is the figure for showing the detection device of variation of implementation form.
Figure 28 is the figure for showing the detection device of variation of implementation form.
Figure 29 is the figure for showing the detection device of variation of implementation form.
Figure 30 is the sectional view for showing an example of X-ray source of this implementation form.
Figure 31 is the flow chart to the action example for illustrating the detection device of implementation form.
Figure 32 is the figure to the action example for illustrating the detection device of implementation form.
Figure 33 is the figure to the action example for illustrating the detection device of implementation form.
Figure 34 is the flow chart for showing the program example using the detection device measurement determinand shape of implementation form etc..
Figure 35 is the figure for showing the program example using the detection device measurement determinand shape of implementation form etc..
Figure 36 is the figure for showing the program example using the detection device measurement determinand shape of implementation form etc..
Figure 37 is the figure for showing the program example using the detection device measurement determinand shape of implementation form etc..
Figure 38 is the figure for showing an example of structure manufacture system for the detection device for having implementation form.
Figure 39 is the flow chart for showing the process flow carried out with structure manufacture system.
Figure 40 is the figure for showing the detection device of variation of implementation form.
[main element symbol description]
1,1a, 1b, 1c, 1e, 1f: detection device
2:X line source
3: tables
6R: flank
6H: through hole
6SA: the 1 side wall
6SB: the 2 side wall
6B, 6Bf: bottom
Specific embodiment
For to implement form of the invention (implementation form), referring to drawing, detailed description is as follows.The present invention not by The implementation form recorded below limits.
In the following description, be setting one XYZ orthogonal coordinate system, on one side referring to this XYZ orthogonal coordinate system, while illustrate The positional relationship in each portion.If the set direction in horizontal plane be Z-direction, in direction orthogonal with Z-direction in horizontal plane be X Axis direction distinguishes orthogonal direction (that is, vertical direction) with Z-direction and X-direction for Y direction.Also, setting around X-axis, Y-axis And rotation (inclination) direction of Z axis is respectively θ X, θ Y and θ Z-direction.
Fig. 1 is the figure for showing an example of device of implementation form.Fig. 2 is the supporting mass for showing the device of implementation form and having An example perspective view.Fig. 3 is the side view for showing the 1st side wall of supporting mass shown in Fig. 2.Fig. 4 is display branch shown in Fig. 2 Hold the side view of the 2nd side wall of body.Fig. 5 is the bottom view of an example for the supporting mass for showing that the device of implementation form has.As The detection device 1 of the Roentgen apparatus of this implementation form is penetrated to the determinand S exposure XL as tested object, detection Cross the transmitted by X-ray of determinand S.X-ray is such as wavelength 1pm to the electromagnetic wave of 30nm degree.X-ray is super comprising about 50eV In the hard x-ray of soft x-ray, about 0.1keV to the soft x-ray of 2keV, the x-ray of about 2keV to 20keV and about 20keV to 100keV extremely Few one kind.
In this implementation form, detection device 1 comprising to determinand S exposure, and detects and is perforated through determinand S's Transmitted by X-ray, the x-ray CT for obtaining the internal information (for example, internal structure) of determinand S in a non-destroying manner examine Check device.This In implementation form, determinand S, the industry part including, for example, machine components or electronic component etc..X-ray CT examines Check device, Comprising to industry part exposure, Check device is examined to examine the industry x-ray CT of the Check industry part.
In Fig. 1, detection device 1, comprising project x-ray XL X-ray source 2, as bearing determinand S microscope carrier tables 3, Detect projected from X-ray source 2 and at least part of detector 4 of the transmitted by X-ray of determinand S that is supported by tables 3, with And the guide device 5 that guide tables 3 past while supporting tables 3 mobile with the optical axis parallel direction of x-ray XL.With x-ray XL's Optical axis parallel direction is Z-direction.In this implementation form, tables 3 are supported in tables' supporting mass 7.Tables 3, as long as having branch Hold the function of determinand S, also can further have toward X-direction, Y direction, Z-direction, θ X-direction, θ Y-direction and At least one party in θ Z-direction is to mobile mechanism.Guide device 5, guidance tables' supporting mass 7 are past parallel with the optical axis of x-ray XL Direction is mobile.By such construction, tables 3 are guided device 5 by tables' supporting mass 7 and guide, the past optical axis with x-ray XL Parallel direction is mobile.
In this implementation form, detection device 1 has installation X-ray source 2, detector 4, the supporting mass 6 with guide device 5.X-ray Source 2, detector 4 and guide device 5 are supported with same supporting mass 6.By such construction, due to X-ray source 2, detector 4 And guide device 5 is similarly to act together with supporting mass 6, therefore compare with the situation that these are installed on the tripe systems divine force that created the universe, The variation of positional relationship when can reduce postural change.As a result, detection device 1, can inhibit because of X-ray source 2, detector 4 and draws Lead the reduction of detection accuracy caused by the variation of the positional relationship between device 5.
Supporting mass 6, as shown in Fig. 2, having the 1st side wall 6SA as the 1st supporting member, the as the 2nd supporting member 2 side wall 6SB, with bottom 6B as the 3rd supporting member.1st side wall 6SA and the 2nd side wall 6SB is the 1st end to be located at these The 3rd side wall 6SC and the work for the 2nd end side 6SA2,6SB2 for being located at these as the 4th supporting member of the portion side 6SA1,6SB1 Link for the 4th side wall 6SD of the 5th supporting member.1st side wall 6SA, the 2nd side wall 6SB, the 3rd side wall 6SC and the 4th side wall 6SD are The part of the plate or wall-like that are erected from the bottom 6B for plate portion.Specifically, the 1st side wall 6SA, the 2nd side wall 6SB, the 3rd Side wall 6SC and the 4th side wall 6SD, as shown in figure 5, being from the partially erected of each side of the bottom 6B of rectangular shape.1st side wall 6SA, the 2nd side wall 6SB, the 3rd side wall 6SC, the 4th side wall 6SD and bottom 6B, from these wall surface by orthogonal direction from when shape Shape is all rectangular shape.
Direction is opposite each other with the 2nd side wall 6SB by 1st side wall 6SA, and wall surface is at parallel.3rd side wall 6SC and the 4th side wall Direction is opposite each other by 6SD, and wall surface is at parallel.The wall surface of 1st side wall 6SA and the wall surface of the 2nd side wall 6SB and the 3rd side wall 6SC The wall surface of wall surface and the 4th side wall 6SD are orthogonal.By bottom 6B and the 1st side wall 6SA, the 2nd side wall 6SB, the 3rd side wall 6SC and the 4th In the space 6SP that side wall 6SD is surrounded, the machine type that configuration detection device 1 has, the tables 3 for for example making bearing determinand S Rotation or the mechanism etc. mobile toward X-direction or Y direction.
3rd side wall 6SC, it is shown as shown in Figure 2, Figure 3 and Figure 4, there is court to leave direction the 1st protrusion 6SCX outstanding of itself. With the 3rd side wall 6SC likewise, direction the 2nd protrusion 6SDD outstanding that also there is the 4th side wall 6SD court to leave itself.Such as Fig. 1 institute Show, the X-ray source supporting member 2S of bearing X-ray source 2 is installed in the 1st protrusion 6SCX.Bearing detection is installed in the 2nd protrusion 6SDD The detector supporting member 4S of device 4.By such construction, X-ray source 2 is installed in the 1st of the 1st side wall 6SA and the 2nd side wall 6SB The end side 6SA1,6SB1.Detector 4 is installed in the 2nd end side 6SA2,6SB2 of the 1st side wall 6SA and the 2nd side wall 6SB.
As shown in Figures 2 to 5, the 1st side wall 6SA, the 2nd side wall 6SB, the 3rd side wall 6SC, the 4th side wall 6SD and bottom 6B, tool The multiple thin layers portion 6G for having thickness (size with plate face orthogonal direction) small compared with other parts.In this implementation form, thin layer portion 6G For rectangle.The thickness (size with plate face orthogonal direction) of 6R between adjoining platelet portion 6G, the thickness of thinner layer portion 6G it is big and compared with Interval between adjacent 2 thin layer portions 6G is big.As previously mentioned, 6R between adjoining platelet portion 6G, is the 1st side wall 6SA, the 2nd side wall The flank of 6SB, the 3rd side wall 6SC, the 4th side wall 6SD and bottom 6B.Hereinafter, by the referred to as rib appropriate of 6R between adjoining platelet portion 6G Portion 6R.
Supporting mass 6, since the 1st side wall 6SA, the 2nd side wall 6SB, the 3rd side wall 6SC, the 4th side wall 6SD and bottom 6B are with thin Layer portion 6G, therefore quality can be inhibited to increase.Also, due to the 1st side wall 6SA, the 2nd side wall 6SB, the 3rd side wall 6SC, the 4th side wall 6SD And bottom 6B has flank 6R, therefore supporting mass 6 can also inhibit because of strength reduction caused by having multiple thin layer portion 6G.
In this implementation form, supporting mass 6 is the material production small with linear expansion coefficient.The small material of linear expansion coefficient, example Such as, the nickel that 36% is added in iron, the alloy for being referred to as constant steel (invar or super invar) are may be used at.These materials, Generally it is very expensive.As previously mentioned, since supporting mass 6 has thin layer portion 6G, can be reduced and be used in this implementation form The usage amount of the material of supporting mass 6.Therefore when supporting mass 6 is using linear expansion coefficient small expensive material, if supporting mass 6 has If there are multiple thin layer portion 6G, the manufacturing cost of supporting mass 6 can be inhibited to increase.
As previously mentioned, being equipped with X-ray source 2, detector 4 and guide device 5 in supporting mass 6.Support the table of determinand S Platform 3 is to be supported by tables' supporting mass 7 and guide device 5 by supporting mass 6.Since supporting mass 6 is the material small with linear expansion coefficient Material makes, therefore when carrying out the measurement of shape of determinand S etc. with detection device 1, even if in the temperature around supporting mass 6 It rises, can also inhibit supporting mass 6 because of change in size caused by temperature.As a result, can be by X caused by the thermal expansion because of supporting mass 6 The variation of relative positional relationship between line source 2, detector 4, guide device 5 and tables 3 inhibits in irreducible minimum.Therefore, it detects The situation that device 1 can reduce the measurement accuracy of the shape of determinand S etc., inhibits in irreducible minimum.
In this implementation form, the 1st side wall 6SA, the 2nd side wall 6SB, the 3rd side wall 6SC, the 4th side wall 6SD and bottom 6B, such as It is to make integral structure in a manner of casting etc..By this mode, supporting mass 6 can be readily manufactured.Certainly, supporting mass 6 It also can be with the production of the manufacturing method other than casting.
1st side wall 6SA and the 2nd side wall 6SB, it is shown as shown in Figure 2, Figure 3 and Figure 4, have and runs through and wall surface orthogonal direction Multiple through hole 6H.Each through hole 6H is located at the different location of the wall surface of the 1st side wall 6SA and the 2nd side wall 6SB, specifically, It is to be arranged in Y direction and Z-direction in different location.By such construction, it can readily enter branch from multiple through hole 6H Hold the space 6SP of body 6.Therefore, readily configuration can be cleaned in the machine type that the detection device 1 of space 6SP has Or maintenance etc..Further, since multiple through hole 6H are to be set to different location in Y direction and Z-direction, therefore using not Same through hole 6H readily enters the different location of inner space SP.Therefore, even if the machine type that detection device 1 has is The different location in space 6SP is configured, the cleaning or maintenance of aforementioned machines class also can be readily carried out.
In this implementation form, detection device 1 is accommodated in the inner space that the x-ray XL that one is formed as projecting from X-ray source 2 is carried out In the chamber component 8 of SP.In this implementation form, detection device 1 is configured in internal space S P.In this implementation form, detection device 1 The supply opening 26 for having gas G adjusted at least part supply temperature of X-ray source 2.The configuration of supply opening 26 is internal empty Between SP.
As shown in Figure 1, supporting mass 6 has multiple foot 6F.Multiple foot 6F are mounted on the bottom of supporting mass 6 shown in Fig. 2 6B.Foot 6F is contacted with the bottom 8B of chamber component 8.By the setting of foot 6F, below supporting mass 6 that is, with chamber component 8 The opposite face in the bottom direction 8B is separated with the bottom 8B of chamber component 8.Also that is, below supporting mass 6 with chamber component 8 Space is formed between the 8B of bottom.Also, the bottom 8B of at least part and chamber component 8 below supporting mass 6 can be and connect Touching.The bottom 6B of supporting mass 6, the bottom side 8B configured in the chamber component 8 as setting object.Also that is, bottom 6B is inspection Survey the setting side (setting subject side) of device 1.In this implementation form, detection device 1, though supporting mass 6 is loaded into chamber structure The bottom 8B of part 8, but the setting method of supporting mass 6 is not limited to this.Such as supporting mass 6 is suspended to setting by usable cable wire etc. Object.Multiple foot 6F of supporting mass 6 have and pass through chamber component 8, example to the vibration for the outside for inhibiting to come self-test device 1 Such as it is transferred to the vibration proof mechanism of X-ray source 2.Vibration proof mechanism is using such as air spring or the spring formed with metal.Also, vibrationproof Mechanism can not be each for multiple foot 6F.
In this implementation form, chamber component 8 is arranged on bearing surface FR.Bearing surface FR includes the ground such as workshop.Chamber structure Part 8 is supported by multiple foot 8S.Chamber component 8 is configured on bearing surface FR by foot 8S.In this implementation form, by setting for foot 8S It sets, is separated below chamber component 8 with bearing surface FR.Also that is, being formed between bearing surface FR below chamber component 8 Space.Certainly, at least part below chamber component 8 can also be contacted with bearing surface FR.In this implementation form, chamber Room component 8 includes lead.Chamber component 8 can prevent the x-ray XL of inner space SP from leaking to the exterior space RP of chamber component 8.
In this implementation form, the pyroconductivity component small compared with chamber component 8 is installed in chamber component 8.This implementation form In, this component is disposed on the outside of chamber component 8.This component can inhibit the temperature of inner space SP by exterior space RP Temperature (temperature change) influence.Also that is, this component have inhibit exterior space RP heat be transferred to inner space SP every The function of hot component.This component, such as include plastic cement.In this implementation form, this component, such as comprising expanded polystyrene (EPS) or Iron.For example, iron can be configured in the inside of chamber component.This occasion, chamber component 8 are also configured with iron branch in addition to lead component Component, therefore the intensity of energy reinforcement chamber component 8.Also, chamber component 8 can directly be contacted with the component of iron or chamber component 8 At least part is contacted with the component of iron.
X-ray source 2 is to determinand S exposure XL.X-ray source 2 has the injection part 2E for projecting x-ray XL.X-ray source 2 forms point X-ray source.In this implementation form, injection part 2E includes point X-ray source.It is (so-called that X-ray source 2 irradiates coniform x-ray to determinand S Cone beam).Also, the intensity of the x-ray XL of the adjustable injection of X-ray source 2.Adjust the intensity that x-ray XL is projected from X-ray source 2 When, it can be the intensity adjustment that x-ray XL is carried out according to x-ray absorption characteristic of determinand S etc..In addition, the X projected from X-ray source 2 The expansion shape of line is not limited to coniform, can also be the x-ray (so-called fan beam) of such as fan-shaped.
Injection part 2E is towards +Z direction.+Z direction is the direction from X-ray source 2 towards detector 4.In this implementation form, from At least part for the x-ray XL that injection part 2E is projected is to advance in internal space S P towards +Z direction.
Supply opening 26, gas G adjusted at least part supply temperature of X-ray source 2.In this implementation form, detection Device 1 has the adjustment device 25 of the temperature of adjustment gas G.Adjustment device 25 is with the movement of such as electric power.Supply opening 26 is in the future The gas G of self-adjusting apparatus 25 is supplied to inner space SP.In this implementation form, the adjustment configuration of device 25 is in chamber component 8 Exterior space RP.Adjustment device 25 is set to bearing surface FR.Adjustment device 25 is connect with conduit 26P.Conduit 26P will adjust device 25 are connect with the inner space SP of chamber component 8.
Conduit 26P is opened on the inner space SP of chamber component 8.The function of this opening is supplied as internal volume SP The supply opening 26 of gas G.In this implementation form, device 25 is adjusted, such as import the gas of exterior space RP, adjust the gas Temperature.Adjusted device 25 adjusts the gas G of temperature, is sent to supply opening 26 by conduit 26P.Supply opening 26 is configured to and X At least part direction of line source 2 is opposite.The gas G of supply opening self-adjusting apparatus in 26 future 25 is supplied at least the one of X-ray source 2 Part.
Detector 4, in internal space S P, compared with X-ray source 2 and the configuration of tables 3 in the side+Z.The injection of detector 4 and X-ray source 2 The portion direction 2E is opposite.The position of detector 4 is to be fixed on commitment positions.Also, detector 4, which can be, to be moved.Tables 3, inside In portion space S P, it can be moved between X-ray source 2 and detector 4.Detector 4 has scintillator portion 36 and receives in scintillator portion The acceptance part 37 of 36 light generated, scintillator portion 36 have comprising the transmitted by X-ray that is perforated through determinand S from X-ray source 2 The injection face 4DP that x-ray XL is injected.The injection face 4DP of detector 4 is opposite with the direction determinand S of tables 3 is supported in.It penetrates Enter the face that the x-ray that face 4DP is detector 4 is injected.In this implementation form, it is the x-ray XL irradiated from X-ray source 2 and is shone from X-ray source 2 At least one party in the transmitted by X-ray of determinand S is penetrated and be perforated through, injection face 4DP is injected.
Scintillator portion 36, comprising generating the flashing with the light of the x-ray different wave length because being irradiated by x-ray XL (scintillation) substance.Acceptance part 37 includes photomultiplier tube.Photomultiplier tube includes to turn luminous energy by photoelectricity effect It is changed to the photoelectric tube of electric energy.It is defeated to be converted into electric signal by after the light that scintillator portion 36 generates gives amplification for acceptance part 37 Out.Detector 4 has multiple scintillator portions 36.Scintillator portion 36 configures multiple in X/Y plane.Scintillator portion 36 is configured to Array-like.Detector 4 has multiple acceptance parts 37 with each connection in multiple scintillator portions 36.Detector 4, but it will also penetrate The x-ray entered is not converted into light and is directly changed into electric signal.
The movement of detection device 1 is controlled with control device 9.Control device 9 is for example to control moving for X-ray source 2 The result for the transmitted by X-ray made or be perforated through determinand S from detection by detector 4 calculates the shape of determinand S or controls The movement of tables 3 or the movement of control adjustment device 25.Control device 9, such as computer.
Fig. 6 is the A-A arrow cross-sectional view of Fig. 1.Fig. 7 is the top view of detection device.Fig. 8 is that display detection device has Tables' supporting mass perspective view.Symbols Z r shown in Fig. 6 and Fig. 7, represents the optical axis of X-ray source 2.In this implementation form, light Axis Zr is parallel with Z axis.It is also same in example below.As shown in FIG. 6 and 7, tables 3 are supported by tables' ontology 3B.Tables 3, have To support supporting device (also known as object supporting device) 3S of determinand S.Supporting device 3S is for example, by using by negative pressure The mode of absorption bearing target object.Supporting device 3S, is not limited to suction type, can also use for example to press from both sides with component Hold the mode of bearing target object.Tables 3 are equipped with supporting device 3S, and the face of supporting device 3S bearing determinand S is bearing Face 3P.In this implementation form, the optical axis of X-ray source 2 be the luminous point of the x-ray issued in X-ray source 2 and detector 4 are had it is more The line that the center of a acceptance part 37 is linked.The center for multiple acceptance parts 37 that detector 4 has is X-axis side in Fig. 1 To and Y direction each center line intersect point.
Tables' ontology 3B bearing tables 3 and the mounting object for being fixed on tables 3.Tables ontology 3B, has to make tables The 3 rotation drive device 3D rotated around the axis Yr orthogonal with bearing surface 3P.The axis Yr orthogonal with the bearing surface 3P of tables 3, with It is also appropriate in lower explanation to be known as tables' rotary shaft Yr.Tables rotary shaft Yr, due to being the axis parallel with Y-axis, tables 3 are past The rotation of θ Y-direction.Rotation drive device 3D, such as have electric motor, tables 3 are rotated with the rotary force of electric motor.
Tables 3, have the rotary encoder 10 to the rotation amount (in the position of θ Y-direction) for measuring tables 3.Rotation is compiled Code device 10 detects the scale of scale component 10S including, for example, the scale component 10S set on tables' ontology 3B and set on tables 3 Encoder head 10E.By such construction, rotary encoder 10 measures rotation amount of the tables 3 with respect to tables' ontology 3B.Fig. 1 institute The control device 9 shown, such as the rotation amount of the tables 3 according to measured by rotary encoder 10, control rotation drive device 3D's Movement, to control the rotation amount of tables 3.
Tables' ontology 3B is mounted on the 1st movable link 11.1st movable link 11 is to be installed in the conduct of base station 12 to draw Lead the track 13R bearing of component.Base station 12 is mounted on the 2nd movable link 14.2nd movable link 14 is by being mounted on tables' branch The guiding mechanism 15 between body 7 and the 2nd movable link 14 is held, tables' supporting mass 7 is installed on.As previously discussed, tables 3 pass through table Playscript with stage directions body 3B, the 1st movable link 11, track 13R, base station 12, the 2nd movable link 14 and guiding mechanism 15, are supported in tables Supporting mass 7.
As shown in fig. 7, base station 12 has in 11 side of the 1st movable link with a plurality of of the substantially parallel configuration of predetermined distance (being 2 in this implementation form) track 13R, 13R.2 tracks 13R, 13R are towards X-direction extension.1st movable link 11 It is guided by track 13R, 13R, is moved along track 13R, 13R toward X-direction.1st movable link 11 is screwed into itself by helical axis 16 The nut having.Helical axis 16 is mounted on the output shaft of actuator 17.In this implementation form, actuator 17 is electric motor.It causes Dynamic device 17 rotates helical axis 16.It is rotatable that helical axis 16, which is with bearing 18A, 18B bearing supported by base station 12,.This reality It applies in form, helical axis 16 is the mode substantially parallel with X-axis with the axis of itself, is supported by bearing 18A, 18B.
When actuator 17 rotates, helical axis 16 also rotates.Had since helical axis 16 is screwed into the 1st movable link 11 Nut, therefore when helical axis 16 rotates, the 1st movable link 11 is i.e. mobile toward X-direction.This implementation form, it is movable the 1st Ball is configured between nut possessed by component 11 and helical axis 16.Also that is, the 1st movable link 11 is by ball screw mechanism It is mobile toward X-direction.At this point, as previously mentioned, 2 articles of tracks 13R, 13R guide the 1st movable link 11 toward the movement of X-direction.
The amount of movement (position of X-direction) of 1st movable link 11 is with the detection of linear encoder 19.Linear encoder 19 wraps 19E containing encoder head and linear scale 19S.Linear scale 19S is mounted on 11 side of the 1st movable link of base station 12.Encoder Read head 19E is mounted on the position opposite with the linear scale 19S of the 1st movable link 11.Linear encoder 19, measurement the 1st are movable Amount of movement of the opposite base station 12 of component 11 in X-direction.Control device 9 shown in FIG. 1, such as measured according to linear encoder 19 The 1st movable link 11 amount of movement, control the movement of actuator 17 to control the amount of movement of the 1st movable link 11.Also that is, control Device 9 processed, according to the amount of movement for the 1st movable link 11 that linear encoder 19 measures, movement of the control tables 3 in X-direction Amount.
As shown in FIG. 6 and 7, the 2nd movable link 14 for installing base station 12 is by more (being 2 in this implementation form) A installation of guiding mechanism 15,15 is supported on tables' supporting mass 7.Guiding mechanism 15 includes the track 15R as guiding elements and moves Kinetoplast 15M.Moving body 15M is installed on track 15R, by track 15R, guides the movement toward track 15R extending direction.By this Kind construction, the 2nd movable link 14 can the past direction movements orthogonal with the bearing surface 3P of tables 3.Track 15R is installed on tables' bearing Body 7.
As shown in Fig. 6 and Fig. 8, tables' supporting mass 7 includes the 1st component 7A, the 2nd component 7B and the 3rd component 7C.1st component 7A is configured in the 1st side side wall 6SA of supporting mass 6.2nd component 7B is configured in the 2nd side side wall 6SB of supporting mass 6.3rd component 7C, As shown in figure 8, the 1st end 7BT1 of the 1st end 7AT1 and the 2nd component 7B of the 1st component 7A is linked.This implementation form In, the 1st component 7A, the 2nd component 7B and the 3rd component 7C are all the component of plate.1st component 7A and the 2nd component 7B, plate face is each other Direction is opposite.
1st component 7A, the 2nd component 7B and the 3rd component 7C are disposed on and pass through determinand S as with the detection of detector 4 Transmitted by X-ray region detection zone DR on the outside of.When being benchmark with detector 4, as shown in FIG. 6 and 7, the 1st component 7A, 2nd component 7B and the 3rd component 7C is disposed on the outside of the injection face 4DP of detector 4.By such construction, tables' supporting mass 7, due to being avoided that the interference with detection zone DR, the detection zone DR of detection device 1 is whole to efficiently use.It closes In detection zone DR, remain aftermentioned.
In this implementation form, tables' supporting mass 7, be by the 1st component 7A and the 2nd component 7B and the 3rd component 7C, such as with casting The manufacturing method made or forged etc. makes integral structure.Mode is planted whereby, can readily make tables' supporting mass 7.Also, Tables' supporting mass 7 that integral structure is made with previous building methods, and by the 1st component 7A and the 2nd component 7B and the 3rd structure Part 7C is fabricated to different single parts respectively, and is subject to integrated situation by coupling members such as bolts and compares, and can improve just Property and intensity.Also, tables' supporting mass 7, it is not excluded that made with the manufacturing method other than casting or forging.
In this implementation form, tables' supporting mass 7 and aforementioned supporting mass 6 are likewise, be the material (example small with linear expansion coefficient Such as constant steel) production.The material small about linear expansion coefficient is as aforementioned.By tables' supporting mass 7 is small with linear expansion coefficient Material production, even if the temperature when carrying out the measurement of shape etc. of determinand S with detection device 1, around tables' supporting mass 7 Degree rises, change in size caused by tables' supporting mass 7 can also inhibit because of temperature.As a result, can be by tables' supporting mass 7 because of thermal expansion The positional shift of caused determinand S inhibits in irreducible minimum.Therefore, detection device 1 can measure shape of determinand S etc. The reduction of precision inhibits in irreducible minimum.
1 in 2 tracks 15R, 15R, it is mounted in the side 7AS1 of the 1st component 7A of tables' supporting mass 7.Another 1 Track 15R is then installed on the side 7BS1 of the 2nd component 7B of tables' supporting mass 7.The side 7AS1 and the 2nd component of 1st component 7A The side 7BS1 of 7B, as shown in fig. 7, being the side of 2 side of X-ray source.2 tracks 15R, 15R, can also be not mounted within X-ray source 2 Side 7AS1,7BS1 of side, but the side 7AS2 and the 2nd structure of 4 side of detector for being mounted on the 1st component 7A as shown in Figure 7 The side 7BS2 of 4 side of detector of part 7B.
It is mounted on the track 15R of the 1st component 7A and is mounted on the track 15R of the 2nd component 7B, it is parallel to be configured to essence.2 Track 15R, 15R extend towards Y direction.2nd movable link 14 has the shifting for being mounted on each track 15R, 15R and being guided Kinetoplast 15M, 15M.By such construction, the 2nd movable link 14 is guided by moving body 15M, 15M by track 15R, 15R, along rail 15R, 15R are displaced into Y direction in road.
As shown in fig. 6, the 2nd movable link 14, is to be screwed into helical axis 20 in the nut itself having.Helical axis 20 is pacified Mounted in the output shaft of actuator 21.Actuator 21 and helical axis 20 be with bearing detected material S tables 3 bearing surface 3P just Hand over the mobile mechanism for keeping tables 3 mobile that direction is parallel.In this implementation form, actuator 21 is electric motor.Actuator 21 makes Helical axis 20 rotates.Helical axis 20 is with tables' supporting mass 7, specifically by by the 1st component 7A of tables' supporting mass 7 Bearing 22A, 22B bearing of bearing are rotatable.In this implementation form, helical axis 20 is substantially flat with the axis of itself and Y-axis Capable mode is supported by bearing 22A, 22B.
When actuator 21 rotates, helical axis 20 also rotates.Had since helical axis 20 is screwed into the 2nd movable link 14 Nut, therefore when helical axis 20 rotates, the 2nd movable link 14 is i.e. mobile toward Y direction.It, can the 2nd in this implementation form Ball is configured between nut and helical axis 20 possessed by dynamic component 14.Also that is, the 2nd movable link 14 is by ball screw Mechanism is mobile toward Y direction.At this point, as previously mentioned, 2 articles of tracks 15R, 15R guide the 2nd movable link 14 toward the shifting of Y direction It is dynamic.
Tables' supporting mass 7 has multiple (being 2 in this implementation form) linear encoder 23A, 23B.Tables' supporting mass 7 has The quantity of standby linear encoder 23A, 23B are simultaneously not limited, can odd number, can also be 3 or more.2nd movable link 14 Amount of movement (position of Y direction) is detected at least one party in linear encoder 23A and linear encoder 23B.Line Property encoder 23A, include encoder head 23AE and linear scale 23AS as the 1st scale.Linear encoder 23B includes The encoder head 23BE and linear scale 23BS as the 2nd scale.Linear scale 23AS is mounted on the 1st of tables' supporting mass 7 The side 7AS1 of component 7A.Linear scale 23BS is mounted on the side 7BS1 of the 2nd component 7B of tables' supporting mass 7.Linear scale 23AS also can be used to measure the length of the 1st component 7A, and linear scale 23BS also can be used to measure the length of the 2nd component 7B.
Encoder head 23AE is to be mounted on and be installed on the 1st component 7A's in the base station 12 of the 2nd movable link 14 bearing Linear scale 23AS opposite position.Encoder head 23BE is mounted on and pacifies in the base station 12 of the 2nd movable link 14 bearing Linear scale 23BS loaded on the 2nd component 7B opposite position.Linear encoder 23A, 23B are that measurement base station 12 and the 2nd are movable Component 14 is with respect to tables' supporting mass 7 in the amount of movement of Y direction.Control device 9 shown in FIG. 1, e.g. according to uniform enconding The amount of movement of base station 12 measured by least one party and the 2nd movable link 14 in device 23A and linear encoder 23B, control actuating The movement of device 21, to control the amount of movement of base station 12 and the 2nd movable link 14.Also that is, control device 9 is according to linear encoder The amount of movement of base station 12 measured by 23A etc. and the 2nd movable link 14 controls tables 3 in the amount of movement of Y direction.
In this implementation form, at least one party in 2 linear encoders 23A, 23B that tables' supporting mass 7 has can be surveyed Length of at least one party in Y direction in the 1st component 7A and the 2nd component 7B of amount tables' supporting mass 7.This occasion, linear scale 23AS be for measuring the length of the 1st component 7A, specifically for measuring length in Y direction, and linear scale 23BS is then for measuring the length of the 2nd component 7B, specifically for measuring the length of Y direction.In this implementation form, In the length of Y direction, refer in the length with tables' rotary shaft Yr parallel direction.
1st component 7A and the 2nd component 7B, can be due to the quality for the determinand S that tables 3 support in the length of Y direction Variation.Therefore, by measurement tables 3 be supported with determinand S when the 1st component 7A and the 2nd component 7B at least one party in Y direction Length, elongation of the 1st component 7A and the 2nd component 7B caused by determinand S in Y direction can be measured (towards supporting mass 6 Bottom 6B elongation).Control device 9 acts actuator 21, so that the past bottom 6B opposite direction with supporting mass 6 of tables 3 Aforementioned elongated portion measured by least one party in mobile 2 linear encoders 23A, 23B.By this mode, due to that can correct 1st component 7A and the 2nd component 7B caused by the quality of the determinand S supported by tables 3, therefore can in the elongation of Y direction Determinand S caused by modifying factor determinand S quality itself controls tables 3 in Y-axis side in the offset of the position of Y direction To position.As a result, detection device 1 can inhibit the reduction of measurement accuracy of shape of determinand S etc. etc..
In measurement the 1st component 7A and the 2nd component 7B when the length of Y direction, as long as 2 linear encoders 23A, 23B In a side measure the 1st component 7A or the 2nd component 7B in the length of Y direction.Measuring the 1st component 7A and the 2nd component 7B, by the use of two linear encoder 23A, 23B, can find out the inclination (tables of tables 3 about the z axis when the length of Y direction The inclination of 3 opposite X/Y planes).Control device 9 can be more accurate by the measured value for using 2 linear encoders 23A, 23B Determinand S caused by finding out because of determinand S quality itself Y direction positional shift, to control tables 3 in Y-axis side To position.As a result, detection device 1 can inhibit the reduction such as measurement accuracy of shape of determinand S etc..
Detect base station 12 in the position of Y-direction to control tables 3 when the situation of the position of Y direction, also can be by 2 The use of linear encoder 23A, 23B both sides finds out the inclination (inclination of the tables 3 with respect to X/Y plane) of tables 3 about the z axis.Control Device 9, by the measured value for using 2 linear encoders 23A, 23B, can be more accurate find out because of determinand S quality itself Caused determinand S Y direction positional shift, to control tables 3 in the position of Y direction.As a result, control device 9 more preferably precision controlling determinand S are in the position of Y direction.As previously discussed, detection device 1 is desirable in tables' branch The 1st component 7A and each of the 2nd component 7B for holding body 7 have linear encoder 23A, 23B, by control device 9 according to the two Measurement result control or amendment tables 3 are in the position of Y direction.
As shown in fig. 6, tables' supporting mass 7 be by the 1st guide device 5A of a part of guide device 5 shown in FIG. 1, With the 2nd guide device 5B of a part of same guide device 5, installs and be supported on supporting mass 6.1st guide device 5A, comprising making For guiding elements track 5AR, be directed at the moving body 5AM of track 5AR extending direction.2nd guide device 5B, comprising making For guiding elements track 5BR, be directed at the moving body 5BM of track 5BR extending direction.
Tables' supporting mass 7, as shown in figure 8, in the 2nd end side the 7AT2 tool with the 3rd component 7C opposite side of the 1st component 7A There is the 1st lip portions 7AF, there is the 2nd lip portions 7BF in the 2nd component 7B and the 2nd end 7BT2 of the 3rd component 7C opposite side.The The opposite 2nd component 7B of the end 7AT2 of 1 lip portions 7AF from the 1st component 7A is towards opposite direction and prominent toward X-direction.2nd The opposite 1st component 7A of the end 7BT2 of lip portions 7BF from the 2nd component 7B is towards opposite direction and prominent toward X-direction.
By tables' supporting mass 7 configuration in the inner space 6SP of supporting mass 6 when, the 1st lip portions 7AF project to branch Hold the 1st side wall 6SA of the bottom 6B opposite side of body 6 end face 6SAT overlapping position, the 2nd lip portions 7BF then project to The position of the end face 6SBT overlapping of 2nd side wall 6SB of the bottom 6B opposite side of supporting mass 6.The end face 6SAT of 1st side wall 6SA with The bottom 6B of supporting mass 6 is linked by the wall portion 6SW of the 1st side wall 6SA.The end face 6SBT and supporting mass 6 of 2nd side wall 6SB Bottom 6B be to be linked by the wall portion 6SW of the 2nd side wall 6SB.Wall portion 6SW is from the 1st side wall 6SA of bottom 6B and the 2nd The bottom surface 6BI as face of the side side wall 6SB rises, and the direction orthogonal toward essence erects.Also, flank 6R is then the wall from wall portion 6SW Face is risen, and the past direction substantially orthogonal with this wall surface erects.
The track 5AR of 1st guide device 5A is mounted on the end face 6SAT of the 1st side wall 6SA.The track of 2nd guide device 5B 5BR is mounted on the end face 6SBT of the 2nd side wall 6SB.As shown in FIG. 6 and 7, the end face 6SAT and the 2nd side wall 6SB of the 1st side wall 6SA End face 6SBT be clip optical axis Zr configuration.Also that is, the end face 6SAT and the end face 6SBT of the 2nd side wall 6SB of the 1st side wall 6SA are Configuration is in the two sides of optical axis Zr.Therefore, track 5AR be installed in the end face 6SAT of the 1st side wall 6SA the 1st guide device 5A, with The 2nd guide device 5B that track 5BR is installed in the end face 6SBT of the 2nd side wall 6SB is disposed on the two sides of optical axis Zr.Also, such as Shown in Fig. 6, in this implementation form, the 1st guide device 5A and the 2nd guide device 5B are disposed on the outside of detection zone DR.
1st guide device 5A configure tables' supporting mass 7 the 1st lip portions 7AF and the 1st side wall 6SA end face 6SAT it Between.2nd guide device 5B is configured between the 2nd lip portions 7BF and the end face 6SBT of the 2nd side wall 6SB of tables' supporting mass 7.1st Component 7A and the 2nd component 7B, from the setting side of the 1st guide device 5A and the 2nd guide device 5B detecting direction 1, Yi Jichao Extend to the bottom 6B of supporting mass 6.3rd component 7C by the 1st component 7A and the 2nd component 7B setting side that is, supporting mass 6 bottom The portion side 6B is linked.By such construction, tables' supporting mass 7, in the direction that the 3rd component 7C extends that is, from the 1st component Direction or its opposite direction of the 7A towards the 2nd component 7B, are supported in supporting mass 6 at 2.Also that is, tables' supporting mass 7 is with two Arm construction, which is mounted, is supported on supporting mass 6.Therefore, tables' supporting mass 7, with the situation for being supported in supporting mass 6 in cantilever fashion It compares, the flexure for loading can be reduced.Tables' supporting mass 7, to support the tables 3 to support determinand S, by reduction Flexure to tables' supporting mass 7 of loading can also reduce the positional shift of the determinand S supported by tables 3.As a result, inspection The reduction of detection accuracy can be inhibited by surveying device 1.
The track 5AR of 1st guide device 5A is that the position Chong Die with the wall portion 6SW of the 1st side wall 6SA is arranged in.2nd guidance The position Chong Die with the wall portion 6SW of the 2nd side wall 6SB is arranged in the track 5BR of device 5B.By such construction, from the 1st guidance dress The track 5BR for setting the track 5AR and the 2nd guide device 5B of 5A reaches tables' supporting mass 7 of supporting mass 6 and the loading of tables 3 etc., The bottom 6B of supporting mass 6 can be born and reached by the wall portion 6SW of the 1st side wall 6SA and the 2nd side wall 6SB.Detection device 1, due to There are wall portion 6SW between track 5AR, 5BR and bottom 6B, therefore the 1st guide device 5A and the 2nd guide device 5B can be made in Y-axis The positional shift in direction is suppressed.
As shown in fig. 6, the past direction substantially orthogonal with the wall surface flank 6R erects from the wall portion 6SW of bottom 6B.This implementation In form, the flank 6R of bottom 6B, the wall portion 6SW with the wall portion 6SW and the 2nd side wall 6SB of the 1st side wall 6SA, are across bottom 6B Wall portion 6SW the position of overlapping is set.By such construction, because the wall portion 6SW's and the 2nd side wall 6SB from the 1st side wall 6SA Wall portion 6SW reaches the flexure of the wall portion 6SW of bottom 6B caused by the loading of the wall portion 6SW of bottom 6B, configures in the 1st side wall 6SA And the 2nd side wall 6SB opposite side bottom 6B flank 6R and be suppressed in irreducible minimum.As a result, the 1st guide device 5A and the 2nd Guide device 5B is suppressed in the positional shift of Y direction.
The track 5BR of the track 5AR and the 2nd guide device 5B of 1st guide device 5A, as shown in fig. 7, being to extend and light Axis Zr parallel direction.The moving body 5AM of 1st guide device 5A is combined with track 5AR, and the shifting of itself is guided by track 5AR It is dynamic.The moving body 5BM of 2nd guide device 5B is combined with track 5BR, and the movement of itself is guided by track 5BR.Also that is, it is mobile Body 5AM is to be directed at the direction parallel with optical axis Zr by track 5AR and track 5BR with moving body 5BM.
As shown in fig. 6, the 1st lip portions 7AF of the 1st component 7A of tables' supporting mass 7 is set to, in the face of the 3rd side component 7C 7AFP is equipped with the moving body 5AM of the 1st guide device 5A.Set on the 2nd lip portions 7BF of the 2nd component 7B of tables' supporting mass 7, Face 7BFP in the 3rd side component 7C is equipped with the moving body 5BM of the 2nd guide device 5B.The guidance dress of 1st guide device 5A and the 2nd Track 5AR, the 5BR for setting 5B, due to being mounted to supporting mass 6 as previously described, tables' supporting mass 7 is by the 1st guidance Device 5A and the 2nd guide device 5B are installed on supporting mass 6.1st component 7A of tables' supporting mass 7 is drawn by the 1st guide device 5A Lead the movement parallel with optical axis Zr.2nd component 7B of tables' supporting mass 7 is parallel with optical axis Zr by the 2nd guide device 5B guidance Movement.As a result, tables' supporting mass 7 is by the 1st guide device 5A and the 2nd guide device 5B, the past side parallel with optical axis Zr To movement.
As previously mentioned, tables 3 are to be installed on tables' supporting mass 7 by the 1st movable link 11 and the 2nd movable link 14 etc.. Therefore, tables 3 are to be installed on supporting mass 6 by tables' supporting mass 7.And tables 3 can be by tables' supporting mass 7, by the 1st guidance The past direction parallel with optical axis Zr device 5A and the 2nd guide device 5B is mobile.Also that is, the 1st guide device 5A is disposed on detection The outside of region DR guides the past direction parallel with optical axis Zr of tables 3 mobile while supporting tables 3.2nd guide device 5B It is disposed on the outside of detection zone DR and the position different from the 1st guide device 5A, guides tables while supporting tables 3 The 3 past directions parallel with optical axis Zr are mobile.
As shown in fig. 6, the 1st guide device 5A, have it is parallel with optical axis Zr, stipulated that X-ray source 2, tables 3 and detector 4 In at least 1 movement the 1st guide surface GP1 of plane.2nd guide device 5B, have it is parallel with optical axis Zr, stipulated that X-ray source 2, in tables 3 and detector 4 at least 1 movement the 2nd guide surface GP2 of plane.In this implementation form, X-ray source 2 and detector At least one party can be mobile in 4.The movement of at least one party, can be with the 1st in this occasion, X-ray source 2 and detector 4 Guide device 5A and the 2nd guide device 5B are guided.If passing through at least part of the 1st guide surface GP1 and the 2nd guide surface When at least part of plane of GP2 is guide surface GP, in detection zone DR of the guide surface GP by the transmitted by X-ray of detector 4. In this implementation form, guide surface GP is to pass through detection in the direction orthogonal with the bearing bearing surface 3P of tables 3 of determinand S In the DR of region.In example shown in fig. 6, guide surface GP is parallel with the 1st guide surface GP1 and the 2nd guide surface GP2 and includes these The plane in face.Guide surface GP is the plane of the movement of regulation tables 3.About guide surface GP, remain aftermentioned.
As shown in FIG. 6 and 7, tables' supporting mass 7 is to be screwed into helical axis 27 in the nut 7NT itself having.This implementation In form, nut 7NT, as shown in Fig. 6 and Fig. 8, though being provided at the 1st component 7A of tables' supporting mass 7, nut 7NT can also It is provided at the 2nd component 7B or the 3rd component 7C.Helical axis 27 is mounted in the output shaft of actuator 28 shown in Fig. 7.This implementation In form, actuator 28 is electric motor.Actuator 28 rotates helical axis 27.Helical axis 27 is by supporting mass 6, specifically Be be supported in the 1st side wall 6SA of supporting mass 6 bearing 29A, 29B bearing be it is rotatable.In this implementation form, helical axis 27 It is the mode substantially parallel with optical axis Zr with the axis of itself, is supported by bearing 29A, 29B.
When actuator 28 rotates, helical axis 27 also rotates.Had since helical axis 27 is screwed into tables' supporting mass 7 Nut 7NT, therefore when helical axis 27 rotates, tables' supporting mass 7 is i.e. mobile toward the direction optical axis Zr.In this implementation form, table Ball is equipped between nut 7NT and helical axis 27 possessed by platform supporting mass 7.Also that is, tables' supporting mass 7 is by ball screw Mechanism is mobile toward the direction optical axis Zr.At this point, as previously mentioned, 2 tracks 5AR, 5BR guide tables' supporting mass 7 toward the direction optical axis Zr Movement.
Supporting mass 6 has multiple (being 2 in this implementation form) linear encoder 24A, 24B.Supporting mass 6 has linear The quantity of encoder 24A, 24B are simultaneously not limited, and be can be odd number, can also are 3 or more.Amount of movement (the light of tables' supporting mass 7 The position in the direction axis Zr) it is to be detected at least one party in linear encoder 24A and linear encoder 24B.Uniform enconding Device 24A includes encoder head 24AE and linear scale 24AS.Linear encoder 24B includes encoder head 24BE and linear mark Ruler 24BS.
Linear scale 24AS as the 1st scale and linear scale 24BS as the 2nd scale has and is arranged in the 1st side To the pattern of (being the direction optical axis Zr in this implementation form).Linear scale 24AS is to be fixed on the 1st side wall possessed by supporting mass 6 The end face 6SAT of 6SA.Linear scale 24BS as the 2nd scale is then fixed on the end of the 2nd side wall 6SB possessed by supporting mass 6 Face 6SBT.As the encoder head 24AE of the 1st measuring device, the pattern of linear scale 24AS is detected to measure as motive objects Tables' supporting mass 7 of body is in the position of the 1st direction (being the direction optical axis Zr in this implementation form).Volume as the 2nd measuring device Code device read head 24BE detects tables supporting mass 7 of the pattern of linear scale 24BS to measure as mobile device in the 1st direction Position.In this implementation form, encoder head 24AE, 24BE, be disposed in the moving area of mobile device with the 1st side The 2nd direction (being X-direction in this implementation form) intersected to (being the direction optical axis Zr in this implementation form).Encoder head 24AE is mounted in the side 7AFS with the 2nd lip portions 7BF opposite side of the 1st lip portions 7AF possessed by tables' supporting mass 7. Encoder head 24BE is mounted on and the 1st lip portions 7AF opposite side of the 2nd lip portions 7BF possessed by tables' supporting mass 7 Side 7BFS.As previously discussed, encoder head 24AE, 24BE is supported by tables' supporting mass 7 as mobile device.Also, In this implementation form, encoder head 24AE, 24BE are to clip optical axis Zr configuration.2 linear encoders 24A, 24B are to clip light Axis Zr is configured in its two sides and the outside of detection zone DR.Also that is, 2 linear encoders 24A, 24B are to clip detection zone DR, configuration is on the outside and two sides.
Linear encoder 24A, 24B, measurement tables' supporting mass 7 is with respect to supporting mass 6 in the amount of movement in the direction optical axis Zr.Fig. 1 Shown in control device 9, for example, according in linear encoder 24A and linear encoder 24B at least one party measurement tables' branch The amount of movement of body 7 is held, controls the movement of actuator 28 to control the amount of movement of tables' supporting mass 7.Also that is, 9 basis of control device The amount of movement of tables' supporting mass 7 measured by linear encoder 24A etc. controls tables 3 in the amount of movement in the direction optical axis Zr.
It, can in detection tables' supporting mass 7 in the position in the direction optical axis Zr to control tables 3 when the position in the direction optical axis Zr By using, 2 linear encoders 24A, 24B's configuring on the outside of detection zone DR and clip detection zone DR configuration is double Side finds out tables' supporting mass 7 in tables' rotary shaft Yr or around the inclination (inclination of the tables' supporting mass 7 with respect to ZY plane) of Y-axis.Control Device 9 processed can correctly find out tables' supporting mass 7 with respect to tables by the measured value for using 2 linear encoders 24A, 24B Determinand S caused by rotary shaft Yr or inclination around Y-axis controls the position of tables 3 in the positional shift in the direction optical axis Zr. As a result, control device 9 can control determinand S in the position in the direction optical axis Zr with good accuracy.As previously discussed, detection dress 1 is set, preferably has linear encoder 24A, 24B in the two sides for clipping optical axis Zr, control device 9 is according to the measurement result of the two Tables 3 are controlled in the position in the direction optical axis Zr.
Fig. 9 and Figure 10 is the figure to illustrate to make to be displaced into the construction of tables' rotary axis direction.In this implementation form, as before Described, tables 3 and tables' ontology 3B are to be supported in tables' branch by the 1st movable link 11, base station 12 and the 2nd movable link 14 Hold body 7.2nd movable link 14 be supported in by guiding mechanism 15 the side 7AS1 of the 1st component 7A of tables' supporting mass 7 with The side 7BS1 of 2nd component 7B, therefore, tables 3 are moved along the 1st component 7A and the 2nd component 7B.
Tables 3, have tables' ontology 3B, the 1st movable link 11, are mounted on the 1st movable link 11 and are screwed into helical axis 16 Nut 11NT, base station 12, track 13R and moving body 13M, with 2 guiding mechanisms 13 and the 2nd movable structure for being mounted on base station 12 The XY mobile mechanism STxy of part 14 etc. together, is displaced into Y direction along the 1st component 7A and the 2nd component 7B.In this implementation form, For the load for reducing the actuator shown in fig. 6 21 for moving these, tables' supporting mass 7 has counterweight (counter weight) 30.Counterweight 30 is configured in the side side 7AS2,7BS2 with the 1st component 7A and side 7AS1,7BS1 opposite side of the 2nd component 7B.
Counterweight 30, by be mounted on the 1st component 7A and the 2nd component 7B each side 7AS2,7BS2 guiding mechanism 31, 31, it is mounted on the 1st component 7A and the 2nd component 7B.In the side 7BS2 of the side 7AS2 and the 2nd component 7B of the 1st component 7A, respectively Track 31R, 31R as the guiding elements that guiding mechanism 31 has is installed.Track 31R, 31R are towards the 1st component 7A And the 2nd direction for extending component 7B that is, from the 1st lip portions 7AF and the 2nd lip portions 7BF towards the direction edge of the 3rd component 7C 1st component 7A and the 2nd component 7B extends.Merge moving body 31M, the 31M guided by this with track 31R, 31R group, is mounted in Counterweight 30.By such construction, counterweight 30 is guided the guidance of mechanism 31,31, moves along the 1st component 7A and the 2nd component 7B.
XY mobile mechanism STxy and counterweight 30 are with the connection of cable wire 32.Cable wire 32 passes through the 2nd component 7B's as shown in Figure 10 2nd side lip portions 7BF, XY mobile mechanism STxy and counterweight 30 are linked.In the 2nd lip portions 7BF of the 2nd component 7B, peace Equipped with 2 pulley 33A, 33B and pulley bearing body 33C for supporting these.Pulley 33A, 33B pacify by axis 33SA, 33SB respectively Loaded on pulley bearing body 33C.The cable wire 32 that XY mobile mechanism STxy and counterweight 30 are linked, hangs around pulley 33A, 33B.
The quality of counterweight 30 and the quality of XY mobile mechanism STxy are same degree.Therefore, be arranged respectively at the 1st component 7A and The side side 7AS1,7BS1 of 2nd component 7B and the side side 7AS2,7BS2 and the XY mobile mechanism STxy linked with cable wire 32 with Counterweight 30 is balance in quality.It therefore, can be with less strength when keeping XY mobile mechanism STxy mobile toward Y direction Make this movement.As a result, due to reducing the power to keep XY mobile mechanism STxy mobile, actuator shown in fig. 6 21 load is reduced.Also, can be used small-sized and export since the power to keep XY mobile mechanism STxy mobile is few Small actuator 21.
Figure 11 is the figure for showing the 2nd movable link 14 of bearing tables.Support tables 3 the 2nd movable link 14, be along 1st component 7A of tables' supporting mass 7 and the 2nd component 7B mobile tabular component.2nd movable link 14 includes the 1st tabular component 14A and the 2nd tabular component 14B, 14B.Moving body 15M, 15M of guiding mechanism 15,15 are installed in the 1st tabular component 14A.Draw Track 15R, the 15R for leading mechanism 15,15 are separately mounted to the 1st component 7A and the 2nd component 7B.Also that is, the 1st tabular component 14A is The 1st component 7A and the 2nd component 7B is mounted on by guiding mechanism 15,15.Also, the 1st tabular component 14A by guiding mechanism 15, 15 move along the 1st component 7A and the 2nd component 7B.
In this implementation form, the 1st tabular component 14A, with supporting mass 6 and tables' supporting mass 7 likewise, being to expand to be with line Small material (being constant steel in this implementation form) production of number.As previously mentioned, such material is very expensive.Therefore, this implementation shape In state, for the usage amount for reducing the small material of linear expansion coefficient, be in the 1st tabular component 14A combine with the 1st tabular component 2nd tabular component 14B of 14A different materials production, as the 2nd movable link 14.Specifically, a pair of that is, 2 the 2nd plates Shape component 14B, 14B are mounted on the two sides of the 1st tabular component 14A.Therefore, the 2nd tabular component 14B, 14B of a pair is clamped from two sides 1st tabular component 14A.
By this mode, can while reducing the thickness of the 1st tabular component 14A, ensure needed for the 2nd movable link 14 Intensity and rigidity.In this implementation form, the 2nd tabular component 14B, 14B is with the production of the steel such as carbon steel or stainless steel.Such steel Nickel-base alloy compared with the material as the 1st tabular component 14A is cheap.In addition, such steel strength and rigidity are also high.Therefore, i.e., Make the thickness for reducing the 2nd tabular component 14B, 14B using steel such as carbon steel or stainless steels in the 2nd tabular component 14B, 14B, also Intensity and rigidity needed for capable of readily ensuring the 2nd movable link 14.As a result, the quality that can inhibit the 2nd movable link 14 increases Add, and intensity and rigidity needed for ensuring the 2nd movable link 14.In addition, can also inhibit the manufacturing cost of the 2nd movable link 14.
The material of 2nd tabular component 14B, 14B, it is different from the linear expansion coefficient of material of the 1st tabular component 14A.Specifically For, the material of the 2nd tabular component 14B, 14B, linear expansion coefficient is big compared with the material of the 1st tabular component 14A.This implementation form In, the mountable one side in the 1st tabular component 14A of the 2nd tabular component 14B.However, due to the 1st tabular component 14A and the 2nd plate The linear expansion coefficient of shape component 14B is variant, therefore when the 2nd tabular component that linear expansion coefficient is big compared with the 1st tabular component 14A When 14B is installed on the one side of the 1st tabular component 14A, it is possible to be bent the 2nd movable link 14 because of temperature change.Therefore, originally It is that the 2nd tabular component 14B, 14B is installed respectively on the two sides of the 1st tabular component 14A in implementation form.By such construction, suppression The bending (deformation) of 2nd movable link 14 caused by making because of temperature change, to inhibit tables 3 and be supported in this determinand The positional shift of S.
The 2nd tabular component 14B, 14B of a pair, it is all preferable with the production of identical material.In addition, the 2nd tabular component 14B of a pair, 14B, shape and size are all preferable with person.In this way, due to that can make in two surface side the 1st tabular component 14A because temperature change is drawn Stretching for the 2nd tabular component 14B, the 14B risen is roughly the same, can more further inhibit the bending (deformation) of the 2nd movable link 14.
Figure 12 is the figure for showing counterweight.Counterweight 30 is by the two sides of the 1st tabular component 30A with a pair of that is, 2 the 2nd plates The construction of shape component 30B clamping.In the 1st tabular component 30A, the moving body for being guided the track 31R guidance of mechanism 31 is installed 31M.Therefore, because can will inhibit because of the deformation of the 1st tabular component 30A caused by temperature change in irreducible minimum, the 1st tabular component 30A is made with the small material of linear expansion coefficient (being constant steel in this implementation form).
As previously described, because the material very high price that linear expansion coefficient is small, if therefore all being expanded counterweight 30 with line When the small material of coefficient makes, the manufacturing cost of counterweight 30 will be will increase.It therefore, is to install in the 1st tabular component 30A compared with this 2nd tabular component 30B of cheap material production.At this point, can be by the 2nd tabular component of a pair that will be made with identical material 30B, 30B clamp the 1st tabular component 30A, make the deformation phase in the 2nd tabular component 30B on the 1st two sides tabular component 30A accordingly Together.As a result, can be while playing the function of counterweight 30, the bending (deformation) of counterweight 30 caused by inhibiting because of temperature change.
Also, can also inhibit the manufacturing cost of counterweight 30.Further, the 2nd tabular component 30B, 30B of a pair is with shape and ruler Very little identical person is preferable.In this way, since the 2nd tabular component caused by two surface side the 1st tabular component 30A is because of temperature change can be made 30B, 30B's is flexible further identical, therefore can more inhibit the bending (deformation) of counterweight 30.
Figure 13, Figure 14 and Figure 15 are the figures to illustrate the guide surface of guide device.Figure 13 and Figure 14 shows with and moves The section when moving direction of body 5M, 5Ma that is, the plane orthogonal with track 5R, 5Ra extending direction incision is (hereinafter, appropriate Claim cross section).In this implementation form, the tables 3 that are supported of guidance tables' supporting mass 7 shown in Fig. 6, Fig. 7 and Fig. 8 etc. are toward optical axis The guide device 5 that is, the 1st guide device 5A and the 2nd guide device 5B of the movement in the direction Zr, as shown in Fig. 6 and Figure 13, respectively With the 1st guide surface GP1 and the 2nd guide surface GP2.1st guide surface GP1 and the 2nd guide surface GP2 is regulation moving body 5AM, 5BM Movement plane.The both sides of 1st guide device 5A and the 2nd guide device 5B pass through tables' supporting mass shown in Fig. 6 and Fig. 7 etc. 7 guidance tables 3 it is mobile when, the plane that the 1st guide surface GP1 and the 2nd guide surface GP2 become the movement of regulation tables 3 is (following Together).
Guide device 5 shown in Figure 13, that is, the 1st guide device 5A and the 2nd guide device 5B, track 5R (5AR, 5BR) It is in contact with each other with moving body 5M (5AM, 5BM).Guide device 5 has 2 contact surface SR1 between moving body 5M and track 5R With contact surface SR2.In the contact area of moving body 5M and track 5R, contact surface SR1 is greater than contact surface SR2.Therefore, in cross section In contact surface SR1 contact length Lh of the contact length Lw compared with contact surface SR2 big (Lw > Lh).Hereinafter, thinking moving body 5M Moving direction that is, the opposite axis (hereinafter, appropriate cite approvingly guide shaft) parallel with the direction of track 5R extension in moving body 5M The inclined situation of axg, moving body 5M.Inhibit this inclined effect, contact of the contact length Lw compared with contact surface SR2 in cross section Length Lh big contact surface SR1 is big compared with contact surface SR2.In this implementation form, guide device 5, the 1st guide device 5A and Guide surface GP, the 1st guide surface GP1 and the 2nd guide surface GP2 of 2nd guide device 5B, refer to inhibit moving body 5M, 5AM, 5BM in The inclined biggish contact surface SR1 of effect around leading axle axg.
Guide device 5a that is, the 1st guide device 5Aa and the 2nd guide device 5Ba shown in Figure 14 are in track 5Ra Between (5ARa, 5BRa) and moving body 5Ma (5AMa, 5BMa) there are rolling element (in this example be pearl) 5RL1,5RL2,5RL3, 5RL4.Moving body 5Ma is to be guided by rolling element 5RL1,5RL2,5RL3,5RL4 by track 5Ra.Track 5Ra, the shape in cross section Shape is slightly longer rectangular.
In cross section, in the long side of track 5Ra, equipped with adjacent rolling element 5RL1 and rolling element 5RL2.Also, cross section In, in the short side of track 5Ra, equipped with adjacent rolling element 5RL2 and rolling element 5RL3 and equipped with adjacent rolling element 5RL1 and rolling element 5RL4.In cross section, it is assumed that one by the contact portion of rolling element 5RL1 and moving body 5Ma and closest to mobile Biggish face (hereinafter, suitably claiming the 1st face) part of 5MP1 of body 5Ma and the contact portion of rolling element 5RL2 and moving body 5Ma And the line segment L1 linked closest to the part of the 1st face 5MP1.This line segment L1 expansion parallel with leading axle axg is formed Plane, be set as plane VP1.
Secondly, in cross section, it is assumed that one by the contact portion of rolling element 5RL2 (or rolling element 5RL1) and moving body 5Ma and Closest to the part of lesser face (hereinafter, suitably claim the 2nd face) 5MP2 of moving body 5Ma and rolling element 5RL3 (or rolling element 5RL4) with the contact portion of moving body 5Ma and the line segment L2 that is linked closest to the part of the 2nd face 5MP2.By this line segment L2 with Leading axle axg parallel expansion is formed by plane, is set as plane VP2.
Plane VP1 and plane VP2 is the face for the movement that track 5Ra provides moving body 5Ma.In moving body 5Ma and track The part of 5Ra overlapping, plane VP1 are big compared with the area of plane VP2.Therefore, length that is, line segment L1 of the plane VP1 in cross section Length Lwa, compared with plane VP2 the length in cross section that is, length Lha compared with line segment L2 it is big (Lwa > Lha).
Then, consider the inclined situation of moving body 5Ma around the leading axle axg of guide device 5a.Inhibit this inclined It acts on, the plane VP1 contact length Lwa in cross section big compared with the contact length Lha of plane VP2, is greater compared with plane VP2 's.In this implementation form, guide surface GP, the 1st guide surface of guide device 5a, the 1st guide device 5Aa and the 2nd guide device 5Ba GP1 and the 2nd guide surface GP2 refers to the biggish plane VP1 of tilting action for inhibiting the moving body 5Ma around leading axle axg.
Guide device 5b shown in figure 15 has parallel and relative configuration 2 contact surfaces SR1, SR2.Contact surface SR1, SR2 is the face that track 5Rb connects with moving body 5Mb.The 1st face 5MP1 of biggish face of moving body 5Mb, is contact surface SR1, SR2 The face of side.The 2nd face 5MP2 of lesser face of moving body 5Mb is the face for connecting the 1st face 5MP1,5MP1 of a pair.Guide device 5b, It is in the 2nd face 5MP2 mounting structure object.When the occasion of the guide device 5b with 2 contact surfaces SR1, SR2, with 2 contact surfaces SR1, SR2 are parallel and are guide surface GP in the plane of the equidistant position with each contact surface SR1, SR2.It is connect from each Contacting surface SR1, SR2 is all Lh/2 to the distance of guide surface GP.Also, guide surface GP passes through leading axle axg.
In this implementation form, as shown in fig. 6, guide surface GP is orthogonal with the bearing bearing surface 3P of tables 3 of determinand S Direction, by detection zone DR.The bearing surface 3P of tables 3 is to vertical direction, Yi Jichong when detection device 1 is arranged The direction of power effect is orthogonal.Therefore, when the relationship of guide surface GP and detection zone DR be as it is aforementioned when, tables 3 and tables' bearing The loading direction of body 7 etc. and guide surface GP, that is, orthogonal.In this way, the 1st guide device 5A and the 2nd guide device 5B, due to rail Road 5AR, 5BR and moving body 5AM, 5BM can bear aforementioned loading with the lap of larger area, therefore preferably.
Figure 16 and Figure 17 is the figure for showing detection zone.Figure 16 shows that the injection face 4DP of detector 4 is rectangle (containing just It is rectangular) when detection zone DR.Figure 17 then shows the detection zone DRa of detector 4a injected when face 4DPa is round.Detection When the injection face 4DP of device 4 is rectangle, detection zone DR be by by Fig. 1 it is equal shown in X-ray source 2 light emitting region (focus) The outer rim 4E for the injection face 4DP that XS and detector 4 receive x-ray, which is linked, is formed by face P1, P2, P3, P4 and injection face 4DP The region surrounded.This occasion, detection zone DR be using inject face 4DP as bottom surface, using light emitting region XS as the quadrangular pyramid on vertex.
As shown in figure 17, when the injection face 4DPa of detector 4a is round, detection zone DRa is by X shown in Fig. 1 etc. The outer rim 4Ea that the light emitting region XS and detector 4a of line source 2 receive the injections face 4DPa of x-ray linked be formed by face Pa and The region that injection face 4DPa is surrounded.This occasion, it is bottom surface, light emitting region XS for vertex that detection zone DRa, which is to inject face 4DPa, Circular cone.Injection face 4DP can be the polygonal other than rectangle, the polygonal such as triangle or hexagon, inject face 4DPa can be oval other than circle etc..
Figure 18 is the figure for showing detection zone and guiding relation of plane.In this implementation form, as shown in fig. 6, the 1st guidance dress It sets 5A and the 2nd guide device 5B is to clip optical axis Zr configuration, tables' supporting mass 7 of slightly U-shaped is supported on supporting mass 6.This Occasion, guide surface GP are at least part and the of the 2nd guide device 5B by the 1st guide surface GP1 of the 1st guide device 5A At least part of plane of 2 guide surface GP2.In detection device 1 shown in fig. 6, the 1st guide surface GP1 and the 2nd guide surface GP2 It is in the tables direction rotary shaft Yr or Y direction, in same position.This occasion, guide surface GP are with the 1st guide device 5A The 2nd guide surface GP2 of 1 guide surface GP1 and the 2nd guide device 5B is parallel and includes these plane.Also that is, guide surface GP is Pass through whole planes of the 1st guide surface GP1 and the 2nd guide surface GP2.1st guide surface GP1 and the 2nd guide surface GP2 is such as used Illustrated by Figure 13 and Figure 14.
Detection device 1 shown in fig. 6, guide surface GP (or comprising guide surface GP and the plane parallel with guide surface GP) are logical It crosses in the detection zone DR of the transmitted by X-ray of detector 4 and includes optical axis Zr and parallel with optical axis Zr.As long as guide surface GP passes through In detection zone DR.As long as meeting this condition, without as guide surface GPa as shown in figure 18 comprising optical axis Zr, also without It needs parallel with optical axis Zr such as guide surface GPb.
Figure 19 is the figure for showing detection zone and guidance relation of plane in comparative example.Figure 20 is shown in this implementation form Detection zone and guidance relation of plane figure.Symbol DPH, DPL in Figure 19 and Figure 20 represent the injection face 4DP of detector 4 Inspection center.In this example, inspection center DPH, DPL are present on optical axis Zr.If from guide surface GP to inspection center DPH away from It is LH from (shortest distance), (shortest distance) is LL with a distance from from guide surface GP to inspection center DPL.
Comparative example is guide surface GP configuration outside detection zone DR, and the two does not intersect.In this implementation form, guide surface GP By in detection zone DR.In this implementation form, further, guide surface GP is configured to comprising optical axis Zr and flat with optical axis Zr Row.Guide surface GP is enlarged and displayed in Figure 19 and Figure 20.Guide surface GP is with the 1st guide device 5A and the 2nd guide device 5B institute The surface of the side moving body 5AM, 5BM for track 5AR, the 5BR having is provided.The surface of track 5AR, 5BR, it is possible to because adding Work error etc. and do not become design size and shape.Therefore, with guide surface GP, macroscopic as defined in the surface of track 5AR, 5BR Though lower is plane, then non-planar under microcosmic.To, guide surface GP, as shown in FIG. 19 and 20, it is microcosmic under in its Y of Z-direction The position of axis direction is different.
Guide surface GP is that regulation moving body 5AM, 5BM, the tables' supporting mass 7 for being installed on these and tables' supporting mass 7 support Tables 3 movement plane.When the Y direction position of guide surface GP is different in Z-direction, the face GP of being guided provides its shifting Dynamic tables 3, the i.e. opposite X-axis inclination of bearing surface 3P as shown in FIG. 6 that is, opposite XZ plane inclination.As a result, by tables 3 Bearing surface 3P bearing determinand S, also opposite X-axis inclination.Inspection center DPH, DPL pass through by the bearing surface 3P of tables 3 The determinand S of bearing.Therefore, when determinand S is tilted with respect to X-axis, the knot of the positional shift origin-location of determinand S The detection accuracy of fruit, detection device 1 shown in fig. 6 reduces.
According to Abbe's principle, the positional shift of determinand S caused by the inclination of the bearing surface 3P of tables 3 is with drawing Guide face GP and inspection center's DPH, DPL distance LH, LL are bigger and bigger.From guide surface GP to inspection center DPH, DPL away from It is small compared with comparative example in this implementation form from LH, LL.Therefore, this implementation form can make the Y direction position because of guide surface GP In Z-direction it is different caused by determinand S positional shift, it is small compared with comparative example.As a result, this implementation form, can inhibit The reduction of the detection accuracy of detection device 1.
In this implementation form, guide surface GP passes through detection zone DR.This occasion, guide surface GP, which can be, passes through uniform enconding Encoder head 24AE, 24BE of device 24A, 24B read the position of linear scale 24AS, 24BS (hereinafter, title encoder appropriate Reading position).In this way, can reduce encoder head 24AE caused by encoder reading position is separated with guide surface GP, 24BE reads error when linear scale 24AS, 24BS.Therefore, detection device 1 can inhibit control device 9 and be read according to encoder Head 24AE, 24BE measurement result control tables' supporting mass 7 it is mobile when precision reduce.As a result, detection device 1 can inhibit inspection Survey the reduction of precision.
Figure 21 is the figure for showing detection zone and guidance relation of plane in this implementation form.In example shown in Figure 21, in The light emitting region XS of the X-ray source 2 in the direction optical axis Zr between the injection face 4DP of detector 4 at a distance from be Lz.In this implementation form, As long as guide surface GP passes through in detection zone DR.During Figure 20 is exemplified, though guide surface GP be arranged to comprising optical axis Zr, And it is parallel with optical axis Zr, but as long as guide surface GP is by being not necessarily to configure guidance by this method in detection zone DR Face GP.Though guide surface GP1, GP2 shown in Figure 21 are parallel with optical axis Zr, optical axis Zr is not included.Guide surface GP1, GP2, due to It is by detection zone DR, therefore such configuration is also possible.
Detector 4 can not detect the object outside detection zone DR.Therefore, if when the situation of guide surface GP1, in detection quilt Measure object S and be located at occasion at a distance from the light emitting region XS of X-ray source 2 in the range of Lz1, inspection center can position draw leaving The position of guide face GP1.For example, detector 4 detects the distance position away from light emitting region XS in the position of Lz1 when the situation of guide surface GP1 When setting the determinand S of DP1, determinand S is in detection zone DR.Therefore since guide surface GP1 can be made to measurement center Distance be 0, therefore can inhibit because the Y direction position of guide surface GP1 in Z-direction variation caused by determinand S position Set offset.
Detector 4 detects the distance position away from light emitting region XS in the determinand S of the position DP2 of Lz2, when being guide surface When the situation of GP1, determinand S must be in detection zone DR.Therefore, because the extremely measurement center guide surface GP1 at least must Must there are the distance of Δ Y1, therefore the position of the Y direction position of guide surface GP1 determinand S caused by Z-direction variation Offset is possible to become larger.Also that is, when the situation of guide surface GP1, the distance of the injection face 4DP away from detector 4 is in the area of Lz-Lz1 In domain, it can effectively inhibit the positional shift of determinand S.
Guide surface GP2, until the distance of optical axis Zr is close compared with guide surface GP1.When the situation of guide surface GP2, detector 4 is in detection In the determinand S of the position DP2 of Lz2 (< Lz1), determinand S is in detection zone for distance position away from light emitting region XS In DR.Therefore since guide surface GP2 can be made extremely to measure the distance 0 at center, the Y direction because of guide surface GP2 can be made Position change in Z-direction caused by determinand S positional shift, when situation compared with guide surface GP1 is small.
When the situation of guide surface GP2, detector 4 in detection the distance away from light emitting region XS compared with Lz2 close to XS Lz3 position When setting the determinand S of DP3, determinand S is outside detection zone DR.Therefore, guide surface GP2 is at least not necessary to measurement center There is the distance of Δ Y2.As a result, being possible to be unable to fully inhibit due to the Y direction position of guide surface GP2 is in Z-direction variation The positional shift of caused determinand S.Also that is, when the situation of guide surface GP2, in the distance of the injection face 4DP away from detector 4 In the region of Lz-Lz2, it can effectively inhibit the positional shift of determinand S.
It is made by by guide surface GP comprising optical axis Zr and parallel with optical axis Zr, detects in detector 4 away from light emitting region XS The distance position DP3 that is located at Lz3 determinand S when, guide surface GP can be made to the distance 0 at the center of measurement.As a result, can The positional shift for making the determinand S because of caused by the Y direction position of guide surface GP in Z-direction variation, compared with guide surface GP2 Situation when it is small.Also that is, by guide surface GP be made comprising optical axis Zr and it is parallel with optical axis Zr when, in the injection face away from detector 4 Region until the distance to Lz of 4DP that is, theoretically in full detection zone DR, can be effectively suppressed the position of determinand S Offset.
As previously discussed, by arriving guide surface GP in the distance of the injection face 4DP of distance detector 4 close to optical axis Zr Until farther away region, it all can effectively inhibit the positional shift of determinand S.The distance of injection face 4DP away from detector 4 is got over Greatly, it is more amplified according to the picture of the determinand S of the transmitted by X-ray detected of detector 4.Also that is, detection device 1 can be with high magnification Detect the picture of (measurement) determinand S.Therefore, make guide surface GP close to optical axis Zr, detection device 1 can be from low range to high power Rate detects the picture of (measurement) determinand S, therefore preferably.Also that is, guide surface GP with optical axis Zr in substantially the same position or reality Matter same position is preferable, and with Zr, optical axis same position more preferably.Also, also guide surface GP can be configured by light emitting region XS, it is formed by region with having the region for about 10% degree of area for relatively injecting face 4DP.In detection zone DR, optical axis Region near Zr, can refer in the X/Y plane centered on optical axis Zr, with inject face 4DP such as 5%, 10%, The region of the area of 15% degree.Also, can also make the region near optical axis Zr, in X-ray source 2 nearby for centered on optical axis Zr X/Y plane in region and be there is the region of the area of 5% degree of injection face 4DP, and in inject face 4DP nearby then For the region in the X/Y plane centered on optical axis Zr and the region of the area of 15% degree with injection face 4DP.Also that is, The area of the changeable nearby range along Z-direction.
Figure 22 is the figure for showing the variation of the relationship between the detection zone of this implementation form and guide surface.In Figure 22, show Multiple guide surface GP, GPc, GPd, GPe by detection zone DR are shown.Guide surface GP includes optical axis Zr and puts down with optical axis Zr Row.Guide surface GPc is parallel with optical axis Zr and X-axis but does not include optical axis Zr.Guide surface GPd, GPe are parallel with optical axis Zr but do not include Optical axis Zr simultaneously intersects with X-axis.The oblique injection face 4DP for being transverse to detector 4 of guide surface GPd, GPe.As previously discussed, as long as Guide surface GP, GPc, GPd, GPe are can effectively to be inhibited by detection zone DR because of guide surface GP, GPc, GPd, GPe The positional shift of Y direction position determinand S caused by Z-direction different (variation).
Figure 23 is the figure for showing the variation of tables' supporting mass.This tables' supporting mass 7a is by the 1st component 7Aa and the 2nd structure The construction that the both ends of part 7Ba are linked respectively with the 3rd component 7Ca and the 4th component 7D.Tables supporting mass 7a, is with the 1st The part that component 7Aa, the 2nd component 7Ba, the 3rd component 7Ca and the 4th component 7D are surrounded configures the detection of tables 3 and detector 4 Region DR.1st component 7Aa has the 1st lip portions 7AFa extended towards outside between both ends.2nd component 7Ba, in both ends There is the 2nd lip portions 7BFa extended towards outside between portion.The 1st guide device 5A is installed in the 1st lip portions 7AFa, in the 2nd Lip portions 7BFa is equipped with the 2nd guide device 5B.Tables' supporting mass 7a is by the 1st guide device 5A and the 2nd guide device 5B It is installed on supporting mass 6.With tables' supporting mass 7 of implementation form likewise, the tables supporting mass 7a of this variation, is also by tables 3, tables' ontology 3B, the 1st movable link 11, base station 12 and the 2nd movable link 14 are installed on by 2 guiding mechanisms 15,15 1 component 7Aa and the 2nd component 7Ba.
This tables supporting mass 7a, is by the 1st component 7Aa and the 2nd component 7Ba respectively with the 3rd component 7Ca and the 4th component 7D The tectosome of the summary O word shape linked.Tables' supporting mass 7 of implementation form is then by the 1st component 7A and the 2nd component 7B With the tectosome of the 3rd component 7C summary U-shaped linked.By such difference structurally, this tables' supporting mass 7a with Tables' supporting mass 7 of implementation form is compared, and has the advantages that rigidity is higher.As a result, tables supporting mass 7a, can effectively inhibit because It is deformed caused by the loading of tables 3 and determinand S etc., therefore the positioning accuracy of tables 3 can be promoted.Has this tables' supporting mass The detection device 1a of 7a, detection accuracy can be promoted more.
Figure 24 is the figure for showing the variation of tables' supporting mass.This tables supporting mass 7b, is with the 1st component 7Ab and the 2nd structure Part 7Bb substantially orthogonal mode, the summary L-shaped that the one end of the one end of the 1st component 7Ab and the 2nd component 7Bb is linked The tectosome of shape.The 1st lip portions 7AFb is equipped in the other end of the 1st component 7Ab.It is equipped with the other end of the 2nd component 7Bb 2nd lip portions 7BFb.The 1st guide device 5A is installed in the 1st lip portions 7AFb, the 2nd guidance is installed in the 2nd lip portions 7BFb Device 5B.Tables' supporting mass 7b is installed on supporting mass 6b by the 1st guide device 5A and the 2nd guide device 5B.Tables 3 and detection The detection zone DR of device 4 is configured between the 1st component 7Ab and the 2nd component 7Bb.
This tables' supporting mass 7b is to be installed on supporting mass 6b with 2 guide devices 5A, 5B.It is mounted on the 1st lip portions 7AFb The 1st guide device 5A the 1st guide surface GP1, be mounted on the 2nd lip portions 7BFb the 2nd guide device 5B the 2nd guide surface GP2 is orthogonal.In 2 guide devices 5A, 5B configured by this method, guide surface GP is by the 1st guide surface GP1 and the 2nd Guide surface GP2 and the plane intersected with these.Also that is, the guide surface GP in this variation is one by the 1st guide surface GP1 The plane of part and a part of the 2nd guide surface GP2.
Guide surface GP passes through the detection zone DR of detector 4 as shown in figure 24.Therefore, it is equipped with tables' supporting mass 7b's Detection device 1b can reduce because of the position of guide surface GP in the direction orthogonal with guide surface GP caused by Z-direction changes The positional shift of determinand S.As a result, detection device 1b can inhibit the reduction of detection accuracy.
Figure 25 is the figure for showing the variation of tables' supporting mass.Aforementioned tables' supporting mass 7,7a, 7b are all using the 1st guidance The movement for adding up to 2 to guide the direction optical axis Zr of device 5A and the 2nd guide device 5B.The tables supporting mass 7c of this variation, It is then the movement that the direction optical axis Zr is guided with 1 guide device 5.Tables supporting mass 7c is by the 1st component 7Ac, the 2nd component The tectosome for the summary O word shape that 7Bc, the 3rd component 7Cc, the 4th component 7Dc are linked respectively at both ends.Tables' supporting mass 7c is to configure tables 3 and inspection in the part surrounded with the 1st component 7Ac, the 2nd component 7Bc, the 3rd component 7Cc and the 4th component 7Dc Survey the detection zone DR of device 4.4th component 7Dc has the lip portions 7F extended towards outside between both ends.In lip portions 7F Guide device 5 is installed.With tables' supporting mass 7 of implementation form likewise, the tables supporting mass 7c of this variation, is also by table Platform 3, tables' ontology 3B, the 1st movable link 11, base station 12 and the 2nd movable link 14 are installed on 2 guiding mechanisms 15,15 1 component 7Ac and the 2nd component 7Bc.
The track 5R of guide device 5 is mounted on supporting mass 6c.The moving body 5M of guide device 5 is mounted on tables' supporting mass 7c Lip portions 7F.The guide surface GP of guide device 5 be it is parallel with optical axis Zr, stipulated that the movement of tables 3 plane, be in this example It is orthogonal to X-axis.Comprising guide surface GP, the plane GPN parallel with guide surface GP, that is, guide surface GP passes through inspection as shown in figure 25 Survey the detection zone DR of device 4.Therefore, it is equipped with the detection device 1c of tables' supporting mass 7c, the position that can reduce guide surface GP exists With the positional shift of guide surface GP orthogonal direction determinand S caused by Z-direction variation.As a result, detection device 1c It can inhibit the reduction of detection accuracy.Also, due to tables' supporting mass 7c be by the 1st component 7Ac, the 2nd component 7Bc, the 3rd component 7Cc, The construction that 4th component 7Dc is linked with both ends respectively, therefore can be made with high rigidity.As a result, since tables support Deformation caused by the loading because of tables 3 and determinand S etc. can be effectively suppressed in body 7c, therefore is equipped with this tables' supporting mass 7c's Detection device 1c can more promote the positioning accuracy and detection accuracy of tables 3.
Figure 26 is the figure for showing the variation of configuration of the 1st guide device and the 2nd guide device.Aforementioned implementation form, such as Shown in Fig. 7, the track 5BR of the track 5AR and the 2nd guide device 5B of the 1st guide device 5A are all and optical axis Zr configured in parallel.Also That is, the two is configured in parallel.In this implementation form, as long as since the 1st guide device 5A and the 2nd guide device 5B are disposed on light The outside of the detection zone DR of the two sides and detector 4 of axis Zr, therefore the two need not be parallel.In this example, the 1st guide device The track 5AR of 5A is configured to parallel with the face P2 of regulation detection zone DR, and the track 5BR of the 2nd guide device 5B is configured to and advises The face P4 for determining detection zone DR is parallel.Detection zone DR is using the light emitting region XS of X-ray source 2 as vertex, penetrating with detector 4 Enter the quadrangular pyramid region that face 4DP is bottom surface.Therefore, the track of the track 5AR and the 2nd guide device 5B of the 1st guide device 5A 5BR, as from the light emitting region XS of X-ray source 2 towards detector 4, the interval of the two is gradually big.
Tables' supporting mass 7d, the 1st component 7Ad is installed on the 1st guide device 5A, the 2nd component 7Bd is installed on the 2nd guidance Device 5B.1st component 7Ad and the 2nd component 7Bd, one end are linked with the 3rd component 7Cd.It is guided in the 1st component 7Ad and the 1st Between device 5A and between the 2nd component 7Bd and the 2nd guide device 5B, it is separately installed with telescopic link mechanism 7AE, 7BE. Link mechanism 7AE, 7BE, be the 1st component 7Ad between the 1st guide device 5A at a distance from and the 2nd component 7Bd and the 2nd guide device The mechanism shunk when stretching, extension, afore-mentioned distance become smaller when distance between 5B becomes larger.Link mechanism 7AE, 7BE is absorbed with tables' branch Body 7d is held toward the afore-mentioned distance that the direction optical axis Zr is mobile and changes.By such construction, even being configured by track 5AR, 5BR At the light emitting region XS from X-ray source 2 towards the 4, the 1st guide device 5A of detector track 5AR and the 2nd guide device 5B track When interval between 5BR becomes larger, tables' supporting mass 7d also can be mobile toward the direction optical axis Zr.
Figure 27 is the figure for showing the detection device of variation of implementation form.This detection device 1e, is in implementation form 2nd side wall 6SB of the supporting mass 6 that detection device 1 has installs multiple foot 6F, and it is horizontal to will test device 1.Foot 6F, with Fig. 1 institute The bottom 8B of the chamber component 8 shown is contacted.The bottom direction 8B of 2nd side wall 6SB and chamber component 8 is oppositely disposed.Such as the above institute It states, detection device 1e, is the bottom side 8B that the 2nd side wall 6SB is setting side that is, the chamber component 8 as setting object.2nd Side wall 6SB configuration is in lower section, and the 1st side wall 6SA configuration opposite with the 2nd direction side wall 6SB is above.Also, also can be in the 1st side wall 6SA installs multiple foot 6F, and the 1st side wall 6SA is configured in lower section.
The opening portion 6HU configuration of supporting mass 6 is in side that is, configuration is in X-axis side.Tables 3 and tables ontology 3B pass through 1 movable link 11e, base station 12, the 2nd movable link 14, tables' supporting mass 7, the 1st guide device 5A and the 2nd guide device 5B peace It fills and is supported on supporting mass 6.1st component 7A of tables' supporting mass 7 and the 2nd component 7B, from the opening portion 6HU of supporting mass 6 bottom of toward Portion 6B extends.The 1st movable link 11e of bearing tables 3 and tables' ontology 3B are mobile toward Y direction.2nd movable link 14 is past X-direction is mobile.Tables' supporting mass 7 is mobile toward the direction optical axis Zr.As defined in 1st guide device 5A and the 2nd guide device 5B Guide surface GP passes through the detection zone DR of detector 4.As previously discussed, the detection device 1 of implementation form, can be such as variation It is horizontal as detection device 1e.
Figure 28 and Figure 29 is the figure for showing the detection device of variation of implementation form.This detection device 1f, has bearing X-ray source shown in body 6f, the tables 3 for supporting determinand S, the tables' supporting mass 7f for supporting tables 3, detector 4 and Figure 29 2.Supporting mass 6f has bottom 6Bf and up extends a pair of sidewalls 6Sf, 6Sf that direction is opposite each other from bottom 6Bf.In Side wall 6Sf is equipped with multiple foot 6F.Multiple foot 6F are contacted with the bottom 8B of chamber component 8 shown in FIG. 1.Supporting mass 6f passes through Tables' supporting mass 7f supports tables 3.The 1st guide device 5A is installed in the face of the side side wall 6Sf, 6Sf of bottom 6Bf to draw with the 2nd Lead device 5B.1st guide device 5A and the 2nd guide device 5B guides tables' branch between bottom 6Bf and tables' supporting mass 7f Hold the movement in the direction optical axis Zr of body 7f.
Tables 3 and tables' ontology 3B are mounted on the 1st movable link 11f.1st movable link 11f is used to be mounted on base station The 12 track 13R as guiding elements is supported by base station 12.Track 13R guides the 1st movable link 11f toward the shifting of Y direction It is dynamic.The 2nd movable link 14 for installing base station 12, is supported in tables' branch by a pair of tracks 15R, 15R as guiding elements Hold body 7f.A pair of tracks 15R, 15R guides the 2nd movable link 14 toward the movement of X-direction.By such construction, tables 3 and table Playscript with stage directions body 3B is supported by the 1st movable link 11f, base station 12 and the 2nd movable link 14 by tables' supporting mass 7f.Tables' supporting mass 7f, due to being toward the movement of the direction optical axis Zr, tables 3 are also mobile toward the direction optical axis Zr.
Actuator 17 moves the 1st movable link 11f toward Y direction by being mounted on the helical axis 16 of output shaft of itself It is dynamic.Actuator 21 keeps the 2nd movable link 14 mobile toward X-direction by being mounted on the helical axis 20 of output shaft of itself.
Tables supporting mass 7f has the 1st component 7Af, the 2nd component 7Bf and by the 1st component 7Af's and the 2nd component 7Bf The 3rd component 7Cf that one end is linked.1st component 7Af, the 2nd component 7Bf and the 3rd component 7Cf are all tabular component.1st Component 7Af and the 2nd component 7Bf are configured to that board direction is opposite each other and essence is parallel.3rd component 7Cf and the 1st component 7Af and 2nd component 7Bf is orthogonal.A pair of tracks 15R, 15R of the 2nd movable link 14 is guided to be separately mounted to the 1st component 7Af and the 2nd structure Part 7Bf.1st guide device 5A and the 2nd guide device 5B are then mounted on the 3rd component 7Cf.
The 1st component 7Af and the 2nd component 7Bf of tables' supporting mass 7f is configured in the two sides of optical axis Zr and the inspection of detector 4 Survey the outside of region DR.Linear encoder 24A is equipped between the 1st component 7Af and one side wall 6Sf.In the 2nd component 7Bf and separately Linear encoder 24B is equipped between one side wall 6Sf.The encoder head of linear encoder 24A is installed in the 1st component 7Af 24AE.In the part opposite with the direction encoder head 24AE of one side wall 6Sf, linear scale 24AS is installed.In the 2nd component 7Bf is equipped with the encoder head 24BE of linear encoder 24B.In another side wall 6Sf and the direction encoder head 24BE phase Pair part, linear scale 24BS is installed.
2 linear encoders 24A, 24B are configured in the two sides of optical axis Zr and the outside of detection zone DR.Also that is, 2 lines Property encoder 24A, 24B be to clip detection zone DR, configuration on the outside and two sides.Linear encoder 24A, 24B are measurement tables Platform supporting mass 7f is with respect to supporting mass 6f in the amount of movement in the direction optical axis Zr.Control device 9 shown in FIG. 1, for example, being according to linear The amount of movement of tables' supporting mass 7f of at least one party's measurement in encoder 24A and linear encoder 24B, controls tables' supporting mass The amount of movement of 7f.
By the outside of detection zone DR and clip detection zone DR configuration 2 linear encoder 24A, 24B both sides Use, as shown in figure 29, can finding out the inclination of tables' supporting mass 7f around X-axis, (tables' supporting mass 7f inclines with respect to XZ plane Tiltedly).Control device 9 shown in FIG. 1 can correctly find out tables' branch by the measured value for using 2 linear encoders 24A, 24B Determinand S caused by inclination of the body 7f around X-axis is held in the positional shift in the direction optical axis Zr, controls the position of tables 3.It is tied Fruit, control device 9 can control determinand S in the position in the direction optical axis Zr with good accuracy.As a result, detection device 1f can press down The reduction of detection accuracy processed.
Figure 30 is the sectional view for showing an example of X-ray source of this implementation form.Then, X-ray source 2 is described in detail.In Figure 30, X-ray source 2, which has, to be generated the filament 39 of electronics, generates because of the shock of electronics or penetrating for electronics the target 40 of x-ray and by electronics Guiding target 40 leads electronic component 41.Also, X-ray source 2 has at least part that electronic component 41 is led in receiving in this implementation form Shell 42.In this implementation form, filament 39, to lead electronic component 41 and each of target 40 be to be housed in shell 42.
Filament 39, such as include tungsten.When passing to electric current to filament 39, being heated filament 39 because of the electric current, i.e., from Filament 39 projects electronics (thermoelectron).The shape of filament 39 is front end point, projects electronics from the part of the point.The shape of filament 39 It is to be rolled into coiled type.Target 40, such as comprising tungsten, x-ray is generated because of the shock of electronics or penetrating for electronics.In this implementation form, X Line source 2 is so-called penetrating type.In this implementation form, target 40 generates x-ray XL because of penetrating for electronics.The generation x-ray XL of target 40 Part be light emitting region XS.It can also be the x-ray of reflection-type though X-ray source 2 is the X-ray source of penetrating type in this implementation form Source.Though in addition, target 40 be it is fixed, target can also be made removable.For example, target 40 is arranged to can be in Y-axis in Figure 30 Direction is mobile, and irradiation position of the electronics on target 40 appropriate can change.Also, can also be that for example target 40 is rotatable, make electronics The rotary target mode that changes with rotation of irradiation position.
For example, being anode with target 40, being cathode with filament 39, when applying voltage between target 40 and filament 39, from filament 39 thermoelectrons to fly out accelerate towards target (anode) 40, are irradiated in target 40.In this way, generate x-ray from target 40.Conductive son Component 41, at least part of configuration around the access of the electronics from filament 39 between filament 39 and target 40.Conductive son Electron lens or polarizer of the component 41 including, for example, collector lens and object lens etc. will be oriented to target 40 from the electronics of filament 39. Leading electronic component 41 makes the partial region (x-ray focus) of electronic impact target 40.In the size (spot of the electron impact area of target 40 Size) very small.By such composition, an X-ray source is essentially formed.
In this implementation form, to the outside of shell 42, supply comes from supply opening 26, the adjusted gas G of temperature.This implementation In form, at least part of the outside of supply opening 26 and shell 42 is relative direction.In this implementation form, supply opening 26 is configured At compared with (side+Y) above X-ray source 2 (shell 42).Supply opening 26, from the top of X-ray source 2 to the outside of the shell 42 of X-ray source 2 Blowing gas G.In X-ray source 2, when electron irradiation is in target 40, in the energy of the electronics, portion of energy become x-ray XL, part energy Amount becomes heat.Irradiation because of electronics to target 40, space around target 40, target 40 and the temperature meeting for configuring the component near target 40 Rise.
When the temperature of target 40 rises, it is possible to which such as target 40 generates thermal deformation or shell 42 generates thermal deformation and makes lamp Silk 39 and the relative position of target 40 generate variation.When the temperature of the X-ray source 2 comprising target 40 rises, the inside of X-ray source 2 is configured The temperature of space S P is possible to change.When the temperature of the X-ray source 2 comprising target 40 rises, i.e., it is for instance possible that tables the 3, the 1st At least part of movable link 11, base station 12 and the 2nd movable link 14 etc. is deformed, the 1st guide device 5A and the 2nd is guided Device 5B generates thermal deformation or detector 4 generates thermal deformation.When the temperature of X-ray source 2 rises, that is, it is likely to occur X-ray source 2 The relative position for generating variation or X-ray source 2 and detector 4 with the relative position of tables 3 generates variation or tables 3 and detector 4 relative position generates the situation changed.As previously discussed, when the temperature change of X-ray source 2, that is, there is the component of detection device 1 At least part generate thermal deformation or component relative position to each other and generate the possibility changed.As a result, detection device 1 Detection accuracy (inspection Check precision, measurement accuracy) be likely to decrease.
In this implementation form, there is the adjusted gas G of supply temperature in at least part for the X-ray source 2 for generating heat, therefore At least part of the component of inner space SP comprising X-ray source 2 generate thermal deformation or the temperature variation of inner space SP or Component the relative position of each other of inner space SP generates the situation changed and is suppressed.Also, in this implementation form, though in inside Space S P is configured with multiple components and the device such as X-ray source 2, tables 3 and detector 4, but to can generate heat in multiple components such as this X-ray source 2 at least part, the also adjusted gas G of supply temperature.Therefore, in the SP of inner space, temperature is adjusted The ratio that gas G can be reached, in multiple components of X-ray source 2, tables 3 and detector 4 etc., with 2 highest of X-ray source.Also, this reality Form is applied, in the SP of inner space, though multiple components configured with X-ray source 2, tables 3 and detector 4 etc., to X-ray source 2 A part of also adjusted gas G of supply temperature.This implementation form can adjust small compared with inner space SP in the SP of inner space Local space X-ray source 2 around temperature.Also, in the SP of inner space, though it is configured with X-ray source 2, tables 3 and detector 4 Deng multiple components, but not gas G adjusted to whole supply temperatures of multiple components, but to X-ray source 2 supply gas G, and can adjust in X-ray source 2, the temperature for the part that only the adjusted gas G of temperature is reached.Then, illustrate this implementation form An example of the movement of detection device.
Figure 31 is the flow chart to an example for the movement for illustrating the detection device of implementation form.Figure 32 is to illustrate reality Apply the figure of an example of the movement of the detection device of form.Figure 33 is an example to the movement for illustrating the detection device of implementation form Figure.This implementation form is the calibration (step S1) of examinations device 1, to determinand S as shown in the flow chart of Figure 31 X-ray XL irradiation and pass through the in-built of the detection (step S2) of the transmitted by X-ray of determinand S and determinand S It calculates (step S3).
Firstly, illustrating to calibrate (step S1).As shown in figure 32, it in calibration, is supported in tables 3 different from determinand S Reference feature R.Also, in calibration, from supply opening 26 by the adjusted gas G of temperature supplied at least one of X-ray source 2 Point.It is supplied to X-ray source 2 from supply opening 26 by by the adjusted gas G of temperature, with gas G adjustment comprising in X-ray source 2 The temperature of portion space S P.It, will be with the inside comprising X-ray source 2 for the gas G adjustment supplied from supply opening 26 in the explanation of next The temperature of space S P, it is appropriate to be known as determined temperature Ta.
As shown in figure 32, in this implementation form, reference feature R is sphere.Reference feature R is that shape (size) is known. Reference feature R is the object that thermal deformation is suppressed.Reference feature R is to deform the object being at least suppressed compared with determinand S. Even if temperature generates variation in the SP of inner space, the shape (size) of reference feature R also will not substantial variations.Also, this implementation In form, the shape of reference feature R is not limited to sphere.Control device 9, on one side with rotary encoder 10, linear encoder 19, 23A, 23B, 24A, 24B measure the position of tables 3, control rotation drive device 3D, the actuator 17,21,28 of tables 3 on one side, The position of the tables 3 of adjustment bearing reference feature R.Control device 9 adjusts the position of tables 3, and reference feature R is made to be configured at benchmark Position Pr.
Control device 9, it is parallel at least part of the supply of the gas G from supply opening 26, to project x-ray from X-ray source 2 And electric current is passed to filament 39.In this way, which filament 39 is heated, and electronics is projected from filament 39.The electricity projected from filament 39 Son is irradiated in target 40.Accordingly, x-ray is generated from target 40.The x-ray XL generated from X-ray source 2 is irradiated in reference feature R.In determined temperature Ta, when the x-ray XL from X-ray source 2 is irradiated in reference feature R, which penetrates benchmark structure Part R.It is perforated through the transmitted by X-ray of reference feature R, injects the injection face 4DP of detector 4.The detection of detector 4 is perforated through reference feature The transmitted by X-ray of R.In determined temperature Ta, the detection of detector 4 is according to the resulting reference feature of transmitted by X-ray for being perforated through reference feature R The picture of R.In this implementation form, in the resulting reference feature R of determined temperature Ta picture size (size) be size Wa.Detector 4 testing result is output to control device 9.
Control device 9 calculates X-ray source 2 and benchmark structure according to the size of the picture of reference feature R and the size of reference feature R The relative position of part R and detector 4.Also, though sphere is one, multiple spheres also can be used in this implementation form.Using more When a sphere, such as the side in Y direction and Z-direction or the position inequality of two side's spheres can be made.In addition, using multiple balls When body, the picture of reference feature R can not be used, but according to the mutual distance of reference feature R, calculate X-ray source 2 and reference feature R With the relative position of detector 4.Also, the calculating of the mutual distance of reference feature R, can be reference feature R center that Distance around here, can also be reference feature R shape commitment positions distance to each other.
It is (big according to the size of the resulting picture of transmitted by X-ray when the temperature T of inner space SP variation in this implementation form It is small) can also it change.According to the size for the picture that the size system of the resulting picture of transmitted by X-ray, detector 4 obtain, such as comprising being formed in The size of the picture of injection face 4DP.For example, when temperature T variation, the relative position of X-ray source 2 and reference feature R and detector 4 (in the relative position of Z-direction) can change.For example, inner space SP is benchmark temperature (ideal temperature, target temperature) Tr's When situation, according to the size of the x-ray XL for being radiated at the reference feature R for the being configured at base position Pr picture obtained by detector 4, it is Reference dimension Wr.
In the occasion that internal space S P is the temperature TX different from fiducial temperature Tr, it is possible to for example X-ray source 2, tables 3, At least part of detector 4 and chamber component 8 generates thermal deformation, and the reference feature R for supporting X-ray source 2 and tables 3 and inspection The relative position for surveying device 4 generates variation.As a result, for example, even if being intended to for reference feature R to be configured at base position Pr, and root According to the position of the measurement result adjustment tables 3 of rotary encoder 10, linear encoder 19,23A, 23B, 24A, 24B, in fact, Reference feature R is also possible to not be disposed on base position Pr.In other words, inner space SP is the occasion of temperature TX, benchmark structure Part R is possible to be disposed on the position PX different from base position Pr.Also, position PX include reference feature R with respect to X-ray source 2 and The relative position of at least one party in detector 4.
Also, when inner space SP is the relative position variation of temperature TX, X-ray source 2 and reference feature R and detector 4, inspection The size WX for the picture that device 4 obtains is surveyed, it can be different from reference dimension Wr.In this implementation form, control device 9 includes memory storage. In memory storage, the temperature T of inner space SP is stored and at temperature T according to the x-ray XL for being irradiated in reference feature R In pass through the relationship of the size (size) of the picture (image) of the resulting reference feature R of transmitted by X-ray of reference feature R.As previously mentioned, With the variation of the temperature T of inner space SP, X-ray source 2 and reference feature R and the relative position of detector 4 can also change.Also, With the variation of the relative position, the size for the picture that detector 4 obtains can also change.In memory storage, also store opposite The relationship of the size of position and picture.Also, the information stored in memory storage, can pass through at least one party in preliminary experiment and simulation It is found out.
By such mode is made, control device 9 can be according to the information stored in memory storage and with the acquirement of detector 4 The size of the picture of reference feature R calculates the relative position of the X-ray source 2 and reference feature R and detector 4 at temperature T.For example, Inner space SP is the occasion of determined temperature Ta, and control device 9 can be obtained according to the information that memory storage stores with detector 4 Reference feature R picture size Wa, calculate the phase of X-ray source 2 and reference feature R and detector 4 at determined temperature Ta To position.
After calibration, the detection (step S2) of determinand S is carried out.As shown in figure 33, in detection, by determinand S is supported on tables 3.Control device 9 controls tables 3 and configures determinand S between X-ray source 2 and detector 4.Also, in detection In, the adjusted gas G of temperature is supplied to at least part of X-ray source 2 from supply opening 26.By the adjusted gas G of temperature It is supplied to X-ray source 2 from supply opening 26, the temperature of the inner space SP comprising X-ray source 2 can be adjusted by gas G.
The adjusted gas G of temperature is supplied to the inner space SP comprising X-ray source 2 from supply opening 26 by control device 9, with Inner space SP is set to become determined temperature Ta.Control device 9, on one side with rotary encoder 10, linear encoder 19,23A, 23B, 24A, 24B measure the position of tables 3, control rotation drive device 3D, the actuator 17,21,28 of tables 3, adjustment bearing on one side The position of the tables 3 of determinand S.Control device 9, it is parallel at least part of the supply of the gas G from supply opening 26, be X-ray is projected from X-ray source 2 and electric current is passed to filament 39.In this way, which filament 39 is heated and projects electronics from filament 39.From The electron irradiation that filament 39 projects is in target 40.To generate x-ray from target 40.
At least part of the x-ray XL generated from X-ray source 2 is irradiated in determinand S.In determined temperature Ta, when from x-ray When the x-ray XL in source 2 is irradiated in determinand S, which penetrates measured Object S.It is perforated through the transmitted by X-ray of determinand S, injects the injection face 4DP of detector 4.The detection of detector 4 is perforated through determinand The transmitted by X-ray of S.In determined temperature Ta, the detection of detector 4 is according to the resulting determinand of transmitted by X-ray for being perforated through determinand S The picture of S.It is size Ws in the size (size) of the picture of the resulting determinand S of determined temperature Ta in this implementation form.Detection The testing result of device 4 is output to control device 9.
In this implementation form, control device 9 will be irradiated in the x-ray XL of determinand S by tested under determined temperature Ta The testing result of the transmitted by X-ray of earnest S is corrected using the result of calibration.For example, the amendment of control device 9 should be in set temperature The picture of resulting determinand S under Ta is spent, so that the picture of resulting determinand S becomes in fiducial temperature Tr under determined temperature Ta Under resulting picture.For example, the size of the picture of resulting determinand S at determined temperature Ta of control device 9 is the occasion of Ws, in Size Ws is multiplied by correction value Wr/Wa.Also that is, control device 9 implements Ws × (Wr/Wa) as operation.By such processing, Control device 9 can also calculate even the actual temperature in internal space S P is the occasion of determined temperature Ta in fiducial temperature Tr Under determinand S picture (as size).
In this implementation form, control device 9 is x-ray XL of the change from X-ray source 2 in the irradiation area of determinand S, On one side change determinand S position, while be directed at the determinand S irradiation x-ray XL from X-ray source 2.Also that is, control device 9 In each position of multiple determinand S, the x-ray XL from X-ray source 2 is irradiated to determinand S, is penetrated with the detection of detector 4 Cross the transmitted by X-ray of determinand S.In this implementation form, control device 9 is by the rotation of tables 3 for making to support determinand S Turn, to change determinand S to the position of X-ray source 2, changes the x-ray XL from X-ray source 2 accordingly in the irradiated region of determinand S Domain.
Also that is, in this implementation form, control device 9 on one side make support determinand S tables 3 rotation, while be directed at the quilt Measure object S exposure XL.In each position (respectively rotating angle) of tables 3, by the transmitted by X-ray of determinand S, (x-ray penetrates money Material) it is detected with detector 4.Detector 4 obtains determinand S in the picture of each position.Inspection of the control device 9 from detector 4 Survey the internal structure (step S3) that result calculates measurement object.In this implementation form, control device 9 is obtained according in determinand S Each position (respectively the rotating angle) picture that passes through the determinand S of the transmitted by X-ray (x-ray penetrates data) of determinand S.Also that is, Control device 9 obtains the picture of multiple determinand S.
Control device 9, according on one side make determinand S rotation, while be directed at acquired by determinand S exposure XL Multiple x-rays penetrate data (as) and carry out operation, then the fault image of construction determinand S, to obtain the inside structure of determinand S The three-dimensional data (three-dimensional construction) made.In this implementation form, control device 9 has again the image construction portion 9- again of construction image 1.Construction portion 9-1 uses the portrait memory portion 9-2 for saving the image obtained from detector 4, then construction image to image again.By The image resulting image of construction again, exports again to portrait memory portion 9-2.What the portrait memory portion 9-2 of output possessed builds again Structure image is shown in display (not shown).By this method, the internal structure of determinand S is calculated.As previously discussed, this implementation In form, control device 9, which has, calculates determinand S's from the detection of detector 4 by the result of the transmitted by X-ray of determinand S The function of the arithmetic unit of shape.The constructing method again of fault image as measurement object, such as have Inverse Projection, filter correction Inverse Projection or convergence method.About Inverse Projection and filter correction Inverse Projection, in such as U.S. Patent Application Publication Have in No. 2002/0154728 specification recorded.In addition, about convergence method, in such as U.S. Patent Application Publication Have in No. 2010/0220908 specification recorded.
As described above, this implementation form is to keep the guide surface GP of the movement of tables 3 of regulation bearing determinand S logical It crosses in detection zone DR.Therefore, because detection device 1 can inhibit because guide surface GP is caused by the change in location in the direction optical axis Zr Tables 3 positional shift, therefore the reduction of detection accuracy can be inhibited.Also, in this implementation form, be by X-ray source 2, tables 3 and Detector 4 is supported with same supporting mass 6.Therefore, because detection device 1 can inhibit because of X-ray source 2 and tables 3 and detector 4 Postural change caused by error, therefore the reduction of detection accuracy can be inhibited.Furthermore in this implementation form, due to tables' branch Holding body 7 is to be supported on supporting mass 6 with both arms construction, therefore can inhibit the bending of tables' supporting mass 7.Therefore, because detection device 1 It can inhibit the positional shift of the tables 3 supported by tables' supporting mass 7, therefore the reduction of detection accuracy can be inhibited.As previously discussed, This implementation form is by the machine error for reducing detection device 1, to inhibit the detection accuracy of detection device 1 to reduce.Therefore, it examines It surveys device 1 and is able to achieve correct calibration.Also, since detection device 1 is able to achieve correctly calibration and inhibits to pass through determinand The detection accuracy of the transmitted by X-ray of S reduces, therefore can obtain in-built correct three-dimensional data (the three-dimensional structure of determinand S It makes).Therefore, detection device 1 is suitable for micrometric measurement.
Also, this implementation form, supplies the adjusted gas G of temperature from supply opening 26 to X-ray source 2 due to having, The temperature of X-ray source 2 can be adjusted.Therefore, at least part of X-ray source 2 can be inhibited to generate thermal deformation.In addition, by from supply opening The adjusted gas G of 26 supply temperatures, the temperature of adjustable inside space S P, to inhibit the temperature variation of inner space SP.
Also, by from the adjusted gas G of 26 supply temperature of supply opening, tables 3, the 1st movable link 11, base station the 12, the 2nd The configuration such as movable link 14 and detector 4 is adjusted in the component of internal space S P and at least part of temperature of device, Therefore it can inhibit the thermal deformation of the component and device.Also, can inhibit by from the adjusted gas G of 26 supply temperature of supply opening Such as the relative position generation variation of X-ray source 2 and determinand S (tables 3) and detector 4.Therefore, detection device 1 can inhibit The reduction of detection accuracy.For example, detection device 1 can be obtained correctly about the in-built information of determinand S.
In this implementation form, though the irradiation area to the x-ray XL of determinand S is changed, to obtain multiple determinand S Picture, the in-built three-dimensional data of determinand S is obtained according to multiple picture (image), but also can be according to 1 picture (shadow Picture) it obtains about the in-built information of determinand S.Also that is, also XL can not be being irradiated from different perspectives to determinand S In the case of, obtain the in-built 2-D data of determinand S.Then, illustrate to measure determinand S using detection device 1 Shape etc. program example.
Figure 34 is the flow chart for showing the program example using the detection device measurement determinand shape of implementation form etc..Figure 35 to Figure 37 show the figure of the program example using the shape of detection device measurement determinand of implementation form etc..Aforementioned school After standard, whens measuring the shape etc. of determinand S using detection device 1, as shown in figure 35, control device 9 keeps tables 3 mobile To initial position (home position) (step S11).Initial position is between X-ray source 2 and detector 4 and in supporting mass Near 6 opening portion 6HU.In this implementation form, when being that tables 3 carry determinand S, tables 3 can be moved to supporting mass 6 Near the 6HU of opening portion, therefore have the advantages that the operator of detection device 1 is easy to carry determinand S in tables 3.
When determinand S is equipped on tables 3, the supporting device 3S of tables 3 supports determinand S.Then, it controls Device 9 keeps at least one direction of tables 3 into X-direction, Y direction and Z-direction mobile, is moved to determinand S Measurement position (step S12).In example shown in Figure 35, control device 9 is to keep tables 3 mobile (with arrow in Figure 35 toward 2 side of X-ray source Direction shown in head M1).Then, control device 9 from X-ray source 2 to the determinand S exposure for being moved to measurement position, and with inspection It surveys device 4 and detects the transmitted by X-ray for being perforated through determinand S.At this point, as previously mentioned, control device 9 makes to support determinand S on one side The rotation of tables 3, on one side to determinand S exposure (referring to Figure 36).Control device 9 is in each position of determinand S (respectively rotating angle) obtains the picture of the determinand S according to the transmitted by X-ray (x-ray penetrates data) for being perforated through determinand S.It connects , control device 9 penetrates data (as) according to acquired x-ray and carries out operation, then the fault image of construction determinand S, with Obtain the in-built three-dimensional data of determinand S (three-dimensional construction) (step S13).
After obtaining determinand S internal structure and being three-dimensional data, control device 9 makes tables 3 be moved to initial position (step S14).In this implementation form, control device 9 is to keep direction shown in arrow M2 of the tables 3 toward Figure 37 mobile.Tables 3, which work as, to be moved to When initial position, i.e. bearing of the releasing supporting device 3S to determinand S.In this way, operator can be by determinand S from tables 3 remove.As previously described, because initial position is to be easy near the opening portion 6HU of supporting mass 6, therefore with operator from table Platform 3 removes the advantages of determinand S.
As previously discussed, detection device 1 is from opening portion 6HU that is, from the 1st side wall 6SA with supporting mass 6 shown in Fig. 2 And with the bottom 6B opposite side of the 2nd side wall 6SB and between the 1st side wall 6SA and the 2nd side wall 6SB, determinand S is placed in table Platform 3, or determinand S is taken out from tables 3.Since the opening portion 6HU of supporting mass 6 is end by the 1st side wall 6SA, the 2nd side wall The part that the end of 6SB, the end of the 3rd side wall 6SC and the end of the 4th side wall 6SD surround, therefore area is big.To by logical Opening portion 6HU is crossed, that is, is easy to determinand S being placed in tables 3, or is easy to take out determinand S from tables 3.
Figure 38 is the figure for showing an example of structure manufacture system for the detection device for having implementation form.Figure 39 is display The flow chart of the process flow of structure manufacture system.Firstly, design device 110 is made the design information about structure shape (step S101).Secondly, forming device 120 makes previous constructions object (step S102) according to design information.Secondly, detection device Coordinate (step S103) of 1 measurement about structure shape.Secondly, the portion inspection Check 132 of control device 130, by comparing from detection The shape information and previous designs information for the structure that device 1 is made check whether structure has and make (step according to design information S104)。
Secondly, the inspection portion Check 132 of control device 130 determines whether the structure being made is non-defective unit (step S105).It is made Structure when being non-defective unit (step S105, YES), structure manufacture system 200 terminates its processing.The structure being made is not When non-defective unit (step S105, NO), the inspection portion Check 132 of control device 130 determines whether the structure being made can repair (step S106).Step S106, the YES when structure of production can be repaired), prosthetic device 140 is the reprocessing (step for implementing structure S107), the processing of step S103 is returned to.When the structure of production can not be repaired (step S106, NO), structure manufacture system 200 terminate its processing.More than, terminate the processing of this flow chart.
Coordinate of the detection device 1 of implementation form due to can correctly measure structure, structure manufacture system 200 Can determine that whether the structure being made is non-defective unit.Also, structure manufacture system 200 is not when structure is not non-defective unit, implementable structure The reprocessing of the divine force that created the universe is repaired.
In aforementioned each implementation form, though detection device 1 has the composition of X-ray source, X-ray source can also be opposite detects The external device (ED) of device 1.In other words, X-ray source can not be at least part for constituting detection device.In aforementioned implementation form, Determinand S is not limited to industry part, can also be such as human body.Also, in aforementioned implementation form, detection device 1 can be with It is for medical.In addition, though X-ray source and detection device are fixed on commitment positions, revolving tables in aforementioned implementation form The picture for obtaining determinand S is transferred, but scan method is without being limited thereto.The side that can be in X-ray source and detection device is fixed on Commitment positions, another party are movable.Also, can also be the two Fang Jieneng movement of X-ray source and detection device.
Figure 40 is the figure for showing the detection device of variation of implementation form.In addition to aforementioned each implementation form, the guarantor of X-ray source Method is held, can also be the keeping method as variation shown in Figure 40.The keeping method of the X-ray source 2 of implementation form is with x-ray Source supporting member 2S keeps X-ray source 2, but can also add x-ray supporting member 2S1 again in addition.X-ray source 2 is in X-ray source 2 It is supported near injection part 2E, with another party of the X-ray source 2 of opposite x-ray injection part 2E.By such construction, injection part 2E Position, such as the Y direction that can inhibit along Figure 40 generate displacement from commitment positions.Also, can have as X-ray source supporting member 2S1 The component for supporting X-ray source 2 is being subject to fixed shape by the component of standby bearing X-ray source 2 and guiding mechanism (not shown), this occasion Under state, for example, even if X-ray source 2 generates thermal deformation with projecting x-ray, X-ray source 2 when Z-direction generates flexible situation, with The fixed occasion of component of bearing X-ray source 2 is compared, and along guiding mechanism (not shown), supports the fixation of the component of X-ray source 2 Position can change in Z-direction.Therefore, X-ray source 2 can be inhibited to be deformed.Furthermore can also inhibit with the deformation of X-ray source 2 and The situation that the injection direction of x-ray also changes.
In addition to aforementioned each implementation form, the keeping method of detector 4 can also be the guarantor as variation as shown in figure 40 Hold method.In implementation form, though detector supporting member 4S is the detection faces back side side bearing inspection from the detection x-ray of detector 4 Device 4 is surveyed, but in addition to this, as shown in figure 40, can also will test the side of device and be supported with detector supporting member 4S.This reality It applies in form, is to be equipped with supporting member 4S with the 1st side wall 6SA same position in X-direction.Also, in this variation, in X-axis Direction is to be equipped with supporting member 4S with the 2nd side wall 6SB same position.In this variation, supporting member 4S be with the 1st side The identical component production of wall 6SA.In addition, supporting member 4S can make integrally with the 1st side wall 6SA.This variation, due to need not Detector 4 the back side that is, supporting member 4S need not be configured in the opposing face for injecting face 4DP, thus, for example need not be by chamber Component 8 is expanded toward Z-direction.
In addition to aforementioned each implementation form, also can in order to adjust chamber component 8 inner space SP temperature, and use is through adjusting The liquid of temperature.For example, as shown in figure 40, the liquid for being adjusted to determined temperature is imported liquid temperature adjustment stream by liquid register 26W1 Road 26W.Liquid temperature adjustment flow path 26W is disposed on the inner space SP of chamber component 8.Liquid temperature adjustment flow path 26W, e.g. with not The steel that becomes rusty makes.It is full of the adjusted liquid of temperature (such as water) by the inside of liquid temperature adjustment flow path 26W, liquid temperature adjustment can be made The temperature on the surface of flow path 26W contacted with inner space SP becomes and the rough close temperature of the adjusted liquid of temperature.By It is contacted by the surface with the air of inner space SP, the air themperature of inner space SP can be adjusted.
This occasion, the area that the air of inner space SP is contacted with liquid temperature adjustment flow path 26W are preferable with big person.This variation In, the flow path section of liquid temperature adjustment flow path 26W is using round flow path, and all sites all can be with inner space SP on the outside of section Air contact.Also, in section, as long as at least part of liquid temperature adjustment flow path 26W is contacted with the air of inner space SP If, the temperature of inner space SP inner air can be adjusted to determined temperature.Also, in this variation, liquid temperature adjustment flow path Though 26W is 1, also settable multiple.Also, can change the fluid temperature for importing each inside when multiple situations are arranged. Also, near such as X-ray source 2 for the inner space SP that also temperature-sensitive sticker (not shown) can be arranged in chamber component 8, liquid tune Temperature of the warm device 26W1 according to the inner space SP of the chamber component 8 exported from temperature-sensitive sticker, adjustment importing liquid temperature adjustment The fluid temperature of flow path 26W.
In this variation, the liquid of temperature adjustment flow path 26W is imported from liquid register 26W1, is by configuring external empty Between RP temperature adjustment flow path 26W inside, after being configured at the temperature adjustment flow path 26W of inner space SP, again by exterior space RP and reach temperature adjustment flow path 26W.Liquid is adjusted to set temperature after reaching temperature adjustment flow path 26W inside register 26W1 After degree, it is imported into temperature adjustment flow path 26W again.Also, in this variation, although register 26W1 is disposed on exterior space RP, But inner space SP can also be disposed on.In addition, though register 26W1 is the temperature adjustment for carrying out inner space SP, except this it Outside, also can for example same temperature adjustment flow path 26W the temperature adjustment of inner space SP is carried out via X-ray source 2.In addition, it is internal to be equipped with stirring The fan FAN of the air of space S P.
The each component of aforementioned implementation form can be appropriately combined.Also, also there is the situation without using part constituent element.This Outside, it in decree permissible range, quotes and the relevant institutes such as detection device cited in aforementioned each implementation form and variation There is the announcement of Publication and United States Patent (USP) as a part described herein.It is complete by current row dealer etc. according to aforementioned implementation form At other implementation forms and application technology etc., be all contained in the range of this implementation form.

Claims (11)

1. a kind of Roentgen apparatus is the x-ray that tested object exposure and detection passes through the tested object, it is characterised in that tool It is standby:
X-ray source projects x-ray from luminous point；
Microscope carrier supports the tested object；
Detector detects at least part that the transmitted by X-ray of object is detected from X-ray source injection, by this；
Mobile device, for change at a distance between the luminous point and the tested object or the luminous point between the detector at a distance from At least one party distance, and make one of the X-ray source, the microscope carrier or the detector as mobile object and be displaced into the 1st direction；With And
1st measuring device and the 2nd measuring device are measured in the position of the mobile object in the 1st direction；
1st measuring device and the 2nd measuring device, are disposed in the moving area of the mobile device and the 1st direction The 2nd direction intersected；
1st measuring device and the 2nd measuring device clip the optical axis configuration of the X-ray source；
The line that the measurement position of 1st measuring device and the measurement position of the 2nd measuring device are linked, is disposed on this In region of the detector detection by the transmitted by X-ray of the tested object.
2. Roentgen apparatus according to claim 1, which is characterized in that the 1st measuring device and the 2nd measuring device are by this Mobile device bearing.
3. Roentgen apparatus according to claim 2, it is characterised in that be further equipped with being arranged in the 1st direction The 1st scale and the 2nd scale of pattern, fixed configurations；
1st measuring device detects the pattern of the 1st scale, and the 2nd measuring device detects the pattern of the 2nd scale, according to To measure the mobile object in the position in the 1st direction.
4. Roentgen apparatus according to claim 3, it is characterised in that be further equipped with and guide the mobile device in the 1st side To mobile guide surface；
With the bearing surface orthogonal direction that supports the tested object, the measurement position of the 1st scale of the 1st measuring device and should The measurement position of 2nd scale of the 2nd measuring device is identical as the guide surface.
5. Roentgen apparatus according to claim 4, which is characterized in that the guide surface is further equipped with the 1st guide surface and the 2nd Guide surface；
1st guide surface and the 2nd guide surface clip the optical axis configuration of the X-ray source.
6. Roentgen apparatus according to any one of claim 1 to 5, which is characterized in that in the luminous point for linking the X-ray source Receive the outer rim of the light-receiving surface of the x-ray with the detector and the face formed, the areas outside surrounded with the light-receiving surface, configure this 1 measuring device and the 2nd measuring device.
7. Roentgen apparatus according to any one of claim 1 to 5, it is characterised in that have arithmetic unit, this arithmetic unit It is the tested object exposure kept from the X-ray source to the microscope carrier, detector detection penetrating by the tested object X-ray as a result, calculating the shape of the tested object.
8. Roentgen apparatus according to claim 6, it is characterised in that there is arithmetic unit, this arithmetic unit is from the X-ray source The tested object exposure that the microscope carrier is kept, detector detection by the transmitted by X-ray of the tested object as a result, Calculate the shape of the tested object.
9. a kind of manufacturing method of structure, it is characterised in that include:
It is made the design information about structure shape；
The structure is made according to the design information；
It is tested object with the structure of production, is measured using Roentgen apparatus described in any one of any one of claims 1 to 77 made The shape for the structure made；And
Compare the resulting shape information of the measurement and the design information.
10. the manufacturing method of structure according to claim 9, which is characterized in that be according to compare the shape information with The comparison result of the design information implements the reprocessing of the structure.
11. the manufacturing method of structure according to claim 10, which is characterized in that the reprocessing is believed according to the design Breath makes the structure again.
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