CN105448782A - 一种芯片视觉检测系统 - Google Patents
一种芯片视觉检测系统 Download PDFInfo
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- CN105448782A CN105448782A CN201510919829.6A CN201510919829A CN105448782A CN 105448782 A CN105448782 A CN 105448782A CN 201510919829 A CN201510919829 A CN 201510919829A CN 105448782 A CN105448782 A CN 105448782A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
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Application Number | Priority Date | Filing Date | Title |
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CN201510919829.6A CN105448782B (zh) | 2015-12-14 | 2015-12-14 | 一种芯片视觉检测系统 |
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CN201510919829.6A CN105448782B (zh) | 2015-12-14 | 2015-12-14 | 一种芯片视觉检测系统 |
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CN105448782A true CN105448782A (zh) | 2016-03-30 |
CN105448782B CN105448782B (zh) | 2018-11-20 |
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CN201510919829.6A Active CN105448782B (zh) | 2015-12-14 | 2015-12-14 | 一种芯片视觉检测系统 |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004279244A (ja) * | 2003-03-17 | 2004-10-07 | Orbotech Ltd | パターン検査装置 |
CN101882591A (zh) * | 2009-05-05 | 2010-11-10 | 旺宏电子股份有限公司 | 晶片的检测方法 |
CN102109342A (zh) * | 2009-12-29 | 2011-06-29 | 比亚迪股份有限公司 | 贴片产品自动检测方法及系统 |
CN103021899A (zh) * | 2012-12-21 | 2013-04-03 | 日月光半导体(昆山)有限公司 | 半导体产品检测机及其检测方法 |
CN205209987U (zh) * | 2015-12-14 | 2016-05-04 | 重庆远创光电科技有限公司 | 一种芯片视觉检测系统 |
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2015
- 2015-12-14 CN CN201510919829.6A patent/CN105448782B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004279244A (ja) * | 2003-03-17 | 2004-10-07 | Orbotech Ltd | パターン検査装置 |
CN101882591A (zh) * | 2009-05-05 | 2010-11-10 | 旺宏电子股份有限公司 | 晶片的检测方法 |
CN102109342A (zh) * | 2009-12-29 | 2011-06-29 | 比亚迪股份有限公司 | 贴片产品自动检测方法及系统 |
CN103021899A (zh) * | 2012-12-21 | 2013-04-03 | 日月光半导体(昆山)有限公司 | 半导体产品检测机及其检测方法 |
CN205209987U (zh) * | 2015-12-14 | 2016-05-04 | 重庆远创光电科技有限公司 | 一种芯片视觉检测系统 |
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CN105448782B (zh) | 2018-11-20 |
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CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Li Zhiyuan Inventor after: Geng Shihui Inventor after: Li Xichun Inventor after: Yang Lina Inventor after: Song Changxin Inventor before: Li Zhiyuan Inventor before: Geng Shihui Inventor before: Li Xichun |
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TR01 | Transfer of patent right |
Effective date of registration: 20210705 Address after: 400050 building 3, 113 tongtao North Road, Jiulongpo District, Chongqing Patentee after: Hanchuang vision technology (Chongqing) Co.,Ltd. Address before: 400039 b108, it Micro Enterprise Incubation Park, 3 / F, Wanchang international commercial city, 77-1 and 77-4, No.17 Shiyang Road, Shiqiaopu, high tech Zone, Chongqing Patentee before: CHONGQING FUTURE INNOVATION VISION TECHNOLOGY Co.,Ltd. |
|
CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Li Xichun Inventor after: Li Zhiyuan Inventor after: Geng Shihui Inventor after: Yang Lina Inventor after: Song Changxin Inventor before: Li Zhiyuan Inventor before: Geng Shihui Inventor before: Li Xichun Inventor before: Yang Lina Inventor before: Song Changxin |