CN105448466B - One kind metallization ferrocart core magnetic core and preparation method thereof - Google Patents
One kind metallization ferrocart core magnetic core and preparation method thereof Download PDFInfo
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- CN105448466B CN105448466B CN201510942749.2A CN201510942749A CN105448466B CN 105448466 B CN105448466 B CN 105448466B CN 201510942749 A CN201510942749 A CN 201510942749A CN 105448466 B CN105448466 B CN 105448466B
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- copper alloy
- ferrocart
- chrome
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- 238000001465 metallisation Methods 0.000 title claims abstract description 27
- 238000002360 preparation method Methods 0.000 title claims abstract description 15
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 48
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 45
- 229910000881 Cu alloy Inorganic materials 0.000 claims abstract description 42
- 229910052751 metal Inorganic materials 0.000 claims abstract description 41
- 239000002184 metal Substances 0.000 claims abstract description 41
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 claims abstract description 40
- 229910052709 silver Inorganic materials 0.000 claims abstract description 39
- 239000004332 silver Substances 0.000 claims abstract description 39
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 26
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 18
- 229910000792 Monel Inorganic materials 0.000 claims description 15
- 229910052759 nickel Inorganic materials 0.000 claims description 9
- 238000000034 method Methods 0.000 abstract description 18
- 239000000853 adhesive Substances 0.000 abstract description 6
- 230000001070 adhesive effect Effects 0.000 abstract description 6
- 239000010410 layer Substances 0.000 description 90
- 229910052804 chromium Inorganic materials 0.000 description 13
- 239000011651 chromium Substances 0.000 description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 238000001771 vacuum deposition Methods 0.000 description 5
- 241000209094 Oryza Species 0.000 description 4
- 235000007164 Oryza sativa Nutrition 0.000 description 4
- 238000010276 construction Methods 0.000 description 4
- 235000009566 rice Nutrition 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000003064 anti-oxidating effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000011104 metalized film Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/24—Magnetic cores
- H01F27/255—Magnetic cores made from particles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F2017/006—Printed inductances flexible printed inductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F2017/0066—Printed inductances with a magnetic layer
Abstract
The embodiments of the invention provide one kind metallization ferrocart core magnetic core, including ferrocart core magnetic core, electrode zone is provided with the ferrocart core magnetic core, formed with the coat of metal for being connected with other devices on the electrode zone, the coat of metal includes stacking gradually the layers of chrome, nickel-copper alloy layer and silver layer to be formed in the electrode area surfaces, and the layers of chrome, nickel-copper alloy layer and silver layer are prepared by magnetron sputtering.The coat of metal of present invention metallization ferrocart core magnetic core has adhesive force height, heat resistance is strong, solderability is good, and low cost and other advantages.The embodiment of the present invention additionally provides the preparation method of the metallization ferrocart core magnetic core, and this method spatter film forming speed is fast, and technique whole process is pollution-free, and cost is low.
Description
Technical field
The present invention relates to paster power magnetic core manufacture field, more particularly to one kind metallization ferrocart core magnetic core and its preparation
Method.
Background technology
Under current smart mobile phone, the spring tide of tablet personal computer, electronic component is miniaturized, the requirement of Surface Mounting Technology is more and more stronger
Strong, power inductance is even more to stand in the breach.And also more and more higher, all products must cross ROSH and halogen for the environmental requirement of product
Tested Deng items.
Traditional ferrocart core paster power magnetic core metallization process is mainly stained with silver paste, high temperature sintering, electricity including magnetic core end points
The processes such as nickel plating, tin, there is the shortcomings that high energy consumption, pollution big, costly, poor reliability in it, with current construction economizing type society
It can be disagreed with the development trend of green process technology, the unsuitable processing for continuing to apply to ferrocart core paster power magnetic core
Production.Therefore, seek a kind of friendly process ferrocart core paster power magnetic core metallize it is imperative.
The content of the invention
In consideration of it, the embodiments of the invention provide one kind metallization ferrocart core magnetic core and preparation method thereof, it is existing to solve
Ferrocart core magnetic core metallization process high energy consumption, pollution layer of metallized film poor reliability that is big, costly, and obtaining, performance is not
The problem of good.
In a first aspect, the embodiments of the invention provide one kind metallization ferrocart core magnetic core, including ferrocart core magnetic core, the iron
Electrode zone is provided with powder core magnetic core, formed with the coat of metal for being connected with other devices, institute on the electrode zone
Stating the coat of metal includes stacking gradually the layers of chrome, nickel-copper alloy layer and silver layer to be formed in the electrode area surfaces, the layers of chrome,
Nickel-copper alloy layer and silver layer are prepared by magnetron sputtering.
The coat of metal of present invention metallization ferrocart core magnetic core uses layers of chrome bottoming, can improve coat of metal adhesive force；Again
Nickel-copper alloy layer is formed in layers of chrome, to form weld layer；The silver layer is arranged on outermost layer, forms protective layer, can protect nickel
Copper alloy layer is not oxidized；Simultaneously because silver is good with scolding tin compatibility, thus solderability can be improved.The present invention is by using above-mentioned
The coat of metal of special construction, coating adhesion is high, heat resistance is strong, solderability is good, and cost is low.
Preferably, the thickness of the layers of chrome is 0.1-1.0 microns.It is highly preferred that the thickness of the layers of chrome is that 0.2-0.3 is micro-
Rice.
Preferably, the thickness of the nickel-copper alloy layer is 0.7-2.0 microns.It is highly preferred that the thickness of the nickel-copper alloy layer
Spend for 1.2-1.5 microns.Preferably, in the nickel-copper alloy layer, the mass content of nickel is more than 70%.
Preferably, the thickness of the silver layer is 0.1-1.0 microns.It is highly preferred that the thickness of the silver layer is that 0.2-0.3 is micro-
Rice.
Because the metallic coating mass of special construction of the present invention is high, therefore the setting thickness of coating can be accordingly reduced, so as to
Welding quality is not only increased, and substantially increases production efficiency, reduces metallization cost.
To play good anti-oxidation effect, it is preferable that the silver-colored purity of the silver layer is more than 3N.
The concrete shape of present invention metallization ferrocart core magnetic core is unlimited, such as can be I-shaped.Present invention metallization iron
Powder core magnetic core is specifically as follows a magnetic core electrode.
A kind of metallization ferrocart core magnetic core that first aspect of the embodiment of the present invention provides, its coat of metal include stacking gradually
Layers of chrome, nickel-copper alloy layer and silver layer, layers of chrome can improve coating adhesion, and nickel-copper alloy layer forms weld layer, and silver layer can be protected
Nickel-copper alloy layer is not oxidized, while can improve solderability；The final coat of metal has that adhesive force is high, heat resistance is strong, can
Weldering property is good, and low cost and other advantages.
Second aspect, the embodiments of the invention provide a kind of preparation method of above-mentioned metallization ferrocart core magnetic core, including with
Lower step：
Ferrocart core magnetic core is taken, electrode zone is provided with the ferrocart core magnetic core；Described by the way of magnetron sputtering
Electrode area surfaces prepare the coat of metal, obtain the ferrocart core magnetic core that metallizes, and the coat of metal includes stacking gradually to be formed
Layers of chrome, nickel-copper alloy layer and the silver layer of the electrode area surfaces.
Magnetron sputtering of the present invention is carried out using magnetron vacuum coating machine, and its detailed process parameter is not done particular determination, can obtained
Obtain each coat of metal.
Preferably, during preparing the layers of chrome using magnetron sputtering：Using crome metal as target, the thickness of the layers of chrome
For 0.1-1.0 microns.Preferably, the electric current that the metal chromium target is passed through is 20-25A.
Preferably, during preparing the nickel-copper alloy layer using magnetron sputtering：Using monel as target, the nickel
The thickness of copper alloy layer is 0.7-2.0 microns.Preferably, the electric current that the monel target is passed through is 20-25A.Preferably,
In the nickel-copper alloy layer, the mass content of nickel is more than 70%.
Preferably, during preparing the silver layer using magnetron sputtering：Using argent as target, the thickness of the silver layer
For 0.1-1.0 microns.Preferably, the electric current that the silver-colored target is passed through is 15-20A.
Preferably, in the present invention, the vacuum in magnetron sputtering process is 0.1-10Pa, Sputtering power density 0.1-
20W/cm2.The time of magnetron sputtering is depending on default thickness of coating.
The preparation method for the metallization ferrocart core magnetic core that second aspect of the embodiment of the present invention provides, utilizes magnetron sputtering skill
Art, metallization solder joint is formed with metal targets chromium target, monel target and silver target sputtering, coat of metal adhesive force is high, heat resistance
By force, solderability is good, and spatter film forming speed is fast, and technique whole process is pollution-free, and cost is low, thus magnetic core electrode pads can be made to expire
The requirement of sufficient solderability, soldering resistance and adhesive force, and can enough ensure environmental protection, without any pollution and economy.
Brief description of the drawings
Fig. 1 is present invention metallization ferrocart core core structure figure；
Fig. 2 is the section amplification figure of Fig. 1 a-quadrant；
The upward view for the metallization ferrocart core magnetic core that Fig. 3 is Fig. 1；
Fig. 4 is the process chart of the embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is part of the embodiment of the present invention, rather than whole embodiments.Based on this hair
Embodiment in bright, the every other implementation that those of ordinary skill in the art are obtained under the premise of creative work is not made
Example, belongs to the scope of protection of the invention.
Fig. 1-Fig. 3 is referred to, the embodiments of the invention provide one kind metallization ferrocart core magnetic core, including ferrocart core magnetic core
100, the side of the ferrocart core magnetic core 100 is provided with electrode zone 101, and the electrode zone is one contacted with pcb board paster
Face, formed with the coat of metal for being connected with other devices on the electrode zone 101, Fig. 2 show a-quadrant in Fig. 1
Section structure enlarged drawing, shown in compares figure 3, the coat of metal includes stacking gradually to be formed on the surface of electrode zone 101
Layers of chrome 10, nickel-copper alloy layer 20 and silver layer 30, the layers of chrome 10, nickel-copper alloy layer 20 and silver layer 30 are prepared by magnetron sputtering.
Preferably, the thickness of the layers of chrome is 0.1-1.0 microns.It is highly preferred that the thickness of the layers of chrome is that 0.2-0.3 is micro-
Rice.
Preferably, the thickness of the nickel-copper alloy layer is 0.7-2.0 microns.It is highly preferred that the thickness of the nickel-copper alloy layer
Spend for 1.2-1.5 microns.Preferably, in the nickel-copper alloy layer, the mass content of nickel is more than 70%.
Preferably, the thickness of the silver layer is 0.1-1.0 microns.It is highly preferred that the thickness of the silver layer is that 0.2-0.3 is micro-
Rice.
The coat of metal of the above-mentioned special construction of the present invention has that adhesive force is high, heat resistance is strong, solderability is good, and cost is low etc.
Advantage.
The metallization ferrocart core magnetic core of the embodiment of the present invention can use as the magnetic core of chip inductor.The shape of the coat of metal
According to the shape of electrode zone and it can be actually needed and be arranged to rectangle, circle or other shapes.
Referring to Fig. 4, the embodiments of the invention provide a kind of preparation method of above-mentioned metallization ferrocart core magnetic core, including with
Lower step：
(1) ferrocart core magnetic core is taken, by it by mask tool rack to substrate frame, only exposing electrode zone, so
Promote and vacuumized in vacuum sputtering equipment afterwards；Argon gas is inputted into vacuum chamber again, and maintain the pressure of argon gas in vacuum chamber 2 ×
10-1Pa-8×10-1In the range of Pa；
Purpose using mask is to prevent that metal causes the situation of short circuit on sputter in sputter procedure at magnetic core edge；
(2) it is provided with electrode zone on the ferrocart core magnetic core；In the electrode zone table by the way of magnetron sputtering
Face prepares the coat of metal, obtains the ferrocart core magnetic core that metallizes, and the coat of metal includes stacking gradually to be formed in the electrode district
Layers of chrome, nickel-copper alloy layer and the silver layer of field surface.
Magnetron sputtering of the present invention is carried out using magnetron vacuum coating machine, and its detailed process parameter is not done particular determination, can obtained
Obtain each coat of metal.
Preferably, during preparing the layers of chrome using magnetron sputtering：Using crome metal as target, the thickness of the layers of chrome
For 0.1-1.0 microns.Preferably, the electric current that the metal chromium target is passed through is 20-25A.
Preferably, during preparing the nickel-copper alloy layer using magnetron sputtering：Using monel as target, the nickel
The thickness of copper alloy layer is 0.7-2.0 microns.Preferably, the electric current that the monel target is passed through is 20-25A.Preferably,
In the nickel-copper alloy layer, the mass content of nickel is more than 70%.
Preferably, during preparing the silver layer using magnetron sputtering：Using argent as target, the thickness of the silver layer
For 0.1-1.0 microns.Preferably, the electric current that the silver-colored target is passed through is 15-20A.
Preferably, in the present invention, the vacuum in magnetron sputtering process is 0.1-10Pa, sputtering power 0.1-20W/
cm2.The time of magnetron sputtering is depending on default thickness of coating.
The preparation method of the above-mentioned metallization ferrocart core magnetic core of the embodiment of the present invention, spatter film forming speed is fast, technique whole process nothing
Pollution, cost are low.
The present invention is further elaborated below by way of more specifically embodiment.
Embodiment one
A kind of preparation method for the ferrocart core magnetic core that metallizes, comprises the following steps：
Ferrocart core magnetic core is taken, electrode zone is provided with the ferrocart core magnetic core；Described by the way of magnetron sputtering
Electrode area surfaces prepare the coat of metal, obtain the ferrocart core magnetic core that metallizes, and the coat of metal includes stacking gradually to be formed
Layers of chrome, nickel-copper alloy layer and the silver layer of the electrode area surfaces.
(1) sputter layers of chrome：Magnetic-core arranging is got well and is put into special tool, is fixed, only exposes electrode zone, so
It is attached to afterwards on the horse of vacuum coating, promotes vacuum machine, vacuumize, background vacuum is more than 5 × 10-3Pa is by metal chromium target
On power supply is logical, argon gas is filled with, starts sputter, the logical current settings of chromium target are 20A, and the thickness of gained layers of chrome is 0.1 micron；
Before sputter, chromium target is splashed in advance, peels off the oxide or debris on surface.
(2) sputter nickel-copper alloy layer：The power supply of chromium target is closed, opens the power supply of monel target, monel target
Logical current settings are 20A, and the thickness of gained nickel-copper alloy layer is 0.8 micron；
(3) sputter silver layer：The power supply of monel target is closed, opens the power supply of argent target, the logical electric current of silver-colored target
It is set as 15A, the thickness of gained silver layer is 0.1 micron.
Embodiment two
A kind of preparation method for the ferrocart core magnetic core that metallizes, comprises the following steps：
Ferrocart core magnetic core is taken, electrode zone is provided with the ferrocart core magnetic core；Described by the way of magnetron sputtering
Electrode area surfaces prepare the coat of metal, obtain the ferrocart core magnetic core that metallizes, and the coat of metal includes stacking gradually to be formed
Layers of chrome, nickel-copper alloy layer and the silver layer of the electrode area surfaces.
(1) sputter layers of chrome：Magnetic-core arranging is got well and is put into special tool, is fixed, only exposes electrode zone, so
It is attached to afterwards on the horse of vacuum coating, promotes vacuum machine, vacuumize, background vacuum is more than 5 × 10-3Pa is by metal chromium target
On power supply is logical, argon gas is filled with, starts sputter, the logical current settings of chromium target are 25A, and the thickness of gained layers of chrome is 0.5 micron；
(2) sputter nickel-copper alloy layer：The power supply of chromium target is closed, opens the power supply of monel target, monel target
Logical current settings are 25A, and the thickness of gained nickel-copper alloy layer is 2.0 microns；
(3) sputter silver layer：The power supply of monel target is closed, opens the power supply of argent target, the logical electric current of silver-colored target
It is set as 20A, the thickness of gained silver layer is 0.6 micron.
Embodiment three
A kind of preparation method for the ferrocart core magnetic core that metallizes, comprises the following steps：
Ferrocart core magnetic core is taken, electrode zone is provided with the ferrocart core magnetic core；Described by the way of magnetron sputtering
Electrode area surfaces prepare the coat of metal, obtain the ferrocart core magnetic core that metallizes, and the coat of metal includes stacking gradually to be formed
Layers of chrome, nickel-copper alloy layer and the silver layer of the electrode area surfaces.
(1) sputter layers of chrome：Magnetic-core arranging is got well and is put into special tool, is fixed, only exposes electrode zone, so
It is attached to afterwards on the horse of vacuum coating, promotes vacuum machine, vacuumize, background vacuum is more than 5 × 10-3Pa is by metal chromium target
On power supply is logical, argon gas is filled with, starts sputter, the logical current settings of chromium target are 22A, and the thickness of gained layers of chrome is 0.3 micron.
(2) sputter nickel-copper alloy layer：The power supply of chromium target is closed, opens the power supply of monel target, monel target
Logical current settings are 22A, and the thickness of gained nickel-copper alloy layer is 1.0 microns.
(3) sputter silver layer：The power supply of monel target is closed, opens the power supply of argent target, the logical electric current of silver-colored target
It is set as 18A, the thickness of gained silver layer is 0.3 micron.
Solderability, heat resistance and peel strength performance are carried out to metallization ferrocart core magnetic core obtained by the above embodiment of the present invention
Test, test result are good.
Described above is the preferred embodiment of the embodiment of the present invention, it is noted that for the common skill of the art
For art personnel, on the premise of principle of the embodiment of the present invention is not departed from, some improvements and modifications can also be made, these improvement
The protection domain of the embodiment of the present invention is also considered as with retouching.
Claims (3)
1. one kind metallization ferrocart core magnetic core, including ferrocart core magnetic core, electrode zone is provided with the ferrocart core magnetic core, it is special
Sign is, includes successively formed with the coat of metal for being connected with other devices, the coat of metal on the electrode zone
Stacking forms the layers of chrome, nickel-copper alloy layer and silver layer in the electrode area surfaces, and the layers of chrome, nickel-copper alloy layer and silver layer lead to
Cross magnetron sputtering preparation, the thickness of the nickel-copper alloy layer is 0.7-2.0 microns, and in the nickel-copper alloy layer, the quality of nickel contains
Amount is more than 70%, and the thickness of the layers of chrome is 0.2-1.0 microns, and the thickness of the silver layer is 0.2-1.0 microns.
2. metallization ferrocart core magnetic core as claimed in claim 1, it is characterised in that the silver-colored purity of the silver layer is more than 3N.
3. a kind of preparation method for the ferrocart core magnetic core that metallizes, it is characterised in that comprise the following steps：
Ferrocart core magnetic core is taken, electrode zone is provided with the ferrocart core magnetic core；In the electrode by the way of magnetron sputtering
Region surface prepares the coat of metal, obtains the ferrocart core magnetic core that metallizes, and the coat of metal includes stacking gradually to be formed described
Layers of chrome, nickel-copper alloy layer and the silver layer of electrode area surfaces；During the nickel-copper alloy layer being prepared using magnetron sputtering：With
Monel is target, and the thickness of the nickel-copper alloy layer is 0.7-2.0 microns, and in the nickel-copper alloy layer, the quality of nickel contains
Amount is more than 70%, during preparing the layers of chrome using magnetron sputtering：Using crome metal as target, the thickness of the layers of chrome is
0.2-1.0 microns, during preparing the silver layer using magnetron sputtering：Using argent as target, the thickness of the silver layer is
0.2-1.0 microns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510942749.2A CN105448466B (en) | 2015-12-16 | 2015-12-16 | One kind metallization ferrocart core magnetic core and preparation method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510942749.2A CN105448466B (en) | 2015-12-16 | 2015-12-16 | One kind metallization ferrocart core magnetic core and preparation method thereof |
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| CN105448466A CN105448466A (en) | 2016-03-30 |
| CN105448466B true CN105448466B (en) | 2018-01-23 |
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