CN105405601B - One kind metallization FERRITE CORE and preparation method thereof - Google Patents
One kind metallization FERRITE CORE and preparation method thereof Download PDFInfo
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- CN105405601B CN105405601B CN201510946887.8A CN201510946887A CN105405601B CN 105405601 B CN105405601 B CN 105405601B CN 201510946887 A CN201510946887 A CN 201510946887A CN 105405601 B CN105405601 B CN 105405601B
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- ferrite core
- nickel
- copper alloy
- chrome
- alloy layer
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- 229910000859 α-Fe Inorganic materials 0.000 title claims abstract description 67
- 238000001465 metallisation Methods 0.000 title claims abstract description 31
- 238000002360 preparation method Methods 0.000 title claims abstract description 16
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 48
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 45
- 229910000881 Cu alloy Inorganic materials 0.000 claims abstract description 41
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 claims abstract description 39
- 229910052751 metal Inorganic materials 0.000 claims abstract description 39
- 239000002184 metal Substances 0.000 claims abstract description 39
- 229910052709 silver Inorganic materials 0.000 claims abstract description 39
- 239000004332 silver Substances 0.000 claims abstract description 39
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 25
- 238000000034 method Methods 0.000 claims abstract description 19
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 16
- 229910000792 Monel Inorganic materials 0.000 claims description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 238000004140 cleaning Methods 0.000 claims description 11
- 229910052759 nickel Inorganic materials 0.000 claims description 8
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 abstract description 6
- 230000001070 adhesive effect Effects 0.000 abstract description 6
- 239000010410 layer Substances 0.000 description 89
- 229910052804 chromium Inorganic materials 0.000 description 13
- 239000011651 chromium Substances 0.000 description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000001771 vacuum deposition Methods 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 5
- 238000010981 drying operation Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 241000209094 Oryza Species 0.000 description 4
- 235000007164 Oryza sativa Nutrition 0.000 description 4
- 238000010276 construction Methods 0.000 description 4
- 235000009566 rice Nutrition 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 238000007664 blowing Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000003064 anti-oxidating effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000011104 metalized film Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/24—Magnetic cores
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
- C23C28/021—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one metal alloy layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/032—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
- H01F1/10—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials non-metallic substances, e.g. ferrites, e.g. [(Ba,Sr)O(Fe2O3)6] ferrites with hexagonal structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/04—Fixed inductances of the signal type with magnetic core
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Hard Magnetic Materials (AREA)
Abstract
The embodiments of the invention provide one kind metallization FERRITE CORE, including FERRITE CORE, electrode zone is provided with the FERRITE CORE, formed with the coat of metal for being connected with other devices on the electrode zone, the coat of metal includes stacking gradually the layers of chrome, nickel-copper alloy layer and silver layer to be formed in the electrode area surfaces, and the layers of chrome, nickel-copper alloy layer and silver layer are prepared by magnetron sputtering.The coat of metal of present invention metallization FERRITE CORE has adhesive force height, heat resistance is strong, solderability is good, and low cost and other advantages.The embodiment of the present invention additionally provides the preparation method of the metallization FERRITE CORE, and this method spatter film forming speed is fast, and technique whole process is pollution-free, and cost is low.
Description
Technical field
The present invention relates to paster power magnetic core manufacture field, more particularly to one kind metallization FERRITE CORE and its preparation
Method.
Background technology
Under current smart mobile phone, the spring tide of tablet personal computer, electronic component is miniaturized, the requirement of Surface Mounting Technology is more and more stronger
Strong, power inductance is even more to stand in the breach.And also more and more higher, all products must cross ROSH and halogen for the environmental requirement of product
Tested Deng items.
Traditional ferrite paster power magnetic core metallization process is mainly stained with silver paste, high temperature sintering, electricity including magnetic core end points
The processes such as nickel plating, tin, there is the shortcomings that high energy consumption, pollution big, costly, poor reliability in it, with current construction economizing type society
It can be disagreed with the development trend of green process technology, the unsuitable processing for continuing to apply to ferrite paster power magnetic core
Production.Therefore, seek a kind of friendly process ferrite paster power magnetic core metallize it is imperative.
The content of the invention
In consideration of it, the embodiments of the invention provide one kind metallization FERRITE CORE and preparation method thereof, it is existing to solve
FERRITE CORE metallization process high energy consumption, pollution layer of metallized film poor reliability that is big, costly, and obtaining, performance is not
The problem of good.
In a first aspect, the embodiments of the invention provide one kind metallization FERRITE CORE, including FERRITE CORE, the iron
Electrode zone is provided with ferrite core, formed with the coat of metal for being connected with other devices, institute on the electrode zone
Stating the coat of metal includes stacking gradually the layers of chrome, nickel-copper alloy layer and silver layer to be formed in the electrode area surfaces, the layers of chrome,
Nickel-copper alloy layer and silver layer are prepared by magnetron sputtering.
Present invention metallization FERRITE CORE uses layers of chrome bottoming, can improve coat of metal adhesive force；The shape in layers of chrome again
Into nickel-copper alloy layer, to form weld layer；The silver layer is arranged on outermost layer, forms protective layer, can protect nickel-copper alloy layer not
It is oxidized；Simultaneously because silver is good with scolding tin compatibility, thus solderability can be improved.The present invention is by using above-mentioned special construction
The coat of metal, coating adhesion is high, heat resistance is strong, solderability is good, and cost is low.
Preferably, the thickness of the layers of chrome is 0.1-1.0 microns.It is highly preferred that the thickness of the layers of chrome is that 0.2-0.3 is micro-
Rice.
Preferably, the thickness of the nickel-copper alloy layer is 0.7-2.0 microns.It is highly preferred that the thickness of the nickel-copper alloy layer
Spend for 1.2-1.5 microns.
Preferably, in the nickel-copper alloy layer, the mass content of nickel is more than 70%.
Preferably, the thickness of the silver layer is 0.1-1.0 microns.It is highly preferred that the thickness of the silver layer is that 0.2-0.3 is micro-
Rice.
Because the metallic coating mass of special construction of the present invention is high, therefore the setting thickness of coating can be accordingly reduced, so as to
Welding quality is not only increased, and substantially increases production efficiency, reduces metallization cost.
To play good anti-oxidation effect, it is preferable that the silver-colored purity of the silver layer is more than 3N.
The concrete shape of present invention metallization FERRITE CORE is unlimited, such as can be I-shaped.Present invention metallization iron
Ferrite core is specifically as follows a magnetic core electrode.
A kind of metallization FERRITE CORE that first aspect of the embodiment of the present invention provides, its coat of metal include stacking gradually
Layers of chrome, nickel-copper alloy layer and silver layer, layers of chrome can improve coating adhesion, and nickel-copper alloy layer forms weld layer, and silver layer can be protected
Nickel-copper alloy layer is not oxidized, while can improve solderability；The final coat of metal has that adhesive force is high, heat resistance is strong, can
Weldering property is good, and low cost and other advantages.
Second aspect, the embodiments of the invention provide a kind of preparation method of above-mentioned metallization FERRITE CORE, including with
Lower step：
(1) FERRITE CORE is taken, the FERRITE CORE is cleaned and dried, electrode is provided with the FERRITE CORE
Region；
(2) coat of metal is prepared in the electrode area surfaces by the way of magnetron sputtering, obtains the ferrite that metallizes
Magnetic core, the coat of metal include stacking gradually the layers of chrome, nickel-copper alloy layer and silver layer to be formed in the electrode area surfaces.
The operation of the cleaning is to remove the powder on magnetic core surface and stain.
Preferably, the step of cleaning specifically includes：Alcohol-pickled 5-10 minutes are first used, then in 40-60 DEG C of temperature
Degree lower ultrasonic wave cleaning 10-20 minutes, then 1-3 minutes are rinsed with clear water, then normal temperature ultrasonic wave cleans 10-20 minutes, finally
1-3 minutes are rinsed with 50-80 DEG C of hot water.
The drying operation is to remove the moisture content on magnetic core surface, can be carried out in an oven.Preferably, oven temperature is
130-170 DEG C, minute time 10-20.
Magnetron sputtering of the present invention is carried out using magnetron vacuum coating machine, and its detailed process parameter is not done particular determination, can obtained
Obtain each coat of metal.
Preferably, during preparing the layers of chrome using magnetron sputtering：Using crome metal as target, the thickness of the layers of chrome
For 0.1-1.0 microns.Preferably, the electric current that the metal chromium target is passed through is 20-25A.
Preferably, during preparing the nickel-copper alloy layer using magnetron sputtering：Using monel as target, the nickel
The thickness of copper alloy layer is 0.7-2.0 microns.Preferably, the electric current that the monel target is passed through is 20-25A.Preferably,
In the nickel-copper alloy layer, the mass content of nickel is more than 70%.
Preferably, during preparing the silver layer using magnetron sputtering：Using argent as target, the thickness of the silver layer
For 0.1-1.0 microns.Preferably, the electric current that the silver-colored target is passed through is 15-20A.
Preferably, in the present invention, the vacuum in magnetron sputtering process is 0.1-10Pa, Sputtering power density 0.1-
20W/cm2.The time of magnetron sputtering is depending on default thickness of coating.
The preparation method for the metallization FERRITE CORE that second aspect of the embodiment of the present invention provides, utilizes magnetron sputtering skill
Art, metallization solder joint is formed with metal targets chromium target, monel target and silver target sputtering, coat of metal adhesive force is high, heat resistance
By force, solderability is good, and spatter film forming speed is fast, and technique whole process is pollution-free, and cost is low, thus magnetic core electrode pads can be made to expire
The requirement of sufficient solderability, soldering resistance and adhesive force, and can enough ensure environmental protection, without any pollution and economy.
Brief description of the drawings
Fig. 1 is present invention metallization ferrite core structure figure；
Fig. 2 is the section amplification figure of Fig. 1 a-quadrant；
The upward view for the metallization FERRITE CORE that Fig. 3 is Fig. 1；
Fig. 4 is the process chart of the embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is part of the embodiment of the present invention, rather than whole embodiments.Based on this hair
Embodiment in bright, the every other implementation that those of ordinary skill in the art are obtained under the premise of creative work is not made
Example, belongs to the scope of protection of the invention.
Fig. 1-Fig. 3 is referred to, the embodiments of the invention provide one kind metallization FERRITE CORE, including FERRITE CORE
100, the side of the FERRITE CORE 100 is provided with electrode zone 101, and the electrode zone is one contacted with pcb board paster
Face, formed with the coat of metal for being connected with other devices on the electrode zone 101, Fig. 2 show a-quadrant in Fig. 1
Section structure enlarged drawing, shown in compares figure 3, the coat of metal includes stacking gradually to be formed on the surface of electrode zone 101
Layers of chrome 10, nickel-copper alloy layer 20 and silver layer 30, the layers of chrome 10, nickel-copper alloy layer 20 and silver layer 30 are prepared by magnetron sputtering.
Preferably, the thickness of the layers of chrome is 0.1-1.0 microns.It is highly preferred that the thickness of the layers of chrome is that 0.2-0.3 is micro-
Rice.
Preferably, the thickness of the nickel-copper alloy layer is 0.7-2.0 microns.It is highly preferred that the thickness of the nickel-copper alloy layer
Spend for 1.2-1.5 microns.Preferably, in the nickel-copper alloy layer, the mass content of nickel is more than 70%.
Preferably, the thickness of the silver layer is 0.1-1.0 microns.It is highly preferred that the thickness of the silver layer is that 0.2-0.3 is micro-
Rice.
The coat of metal of the above-mentioned special construction of the present invention has that adhesive force is high, heat resistance is strong, solderability is good, and cost is low etc.
Advantage.
The metallization FERRITE CORE of the embodiment of the present invention can use as the magnetic core of chip inductor.The shape of the coat of metal
According to the shape of electrode zone and it can be actually needed and be arranged to rectangle, circle or other shapes.
Referring to Fig. 4, the embodiments of the invention provide a kind of preparation method of above-mentioned metallization FERRITE CORE, including with
Lower step：
(1) FERRITE CORE is taken, the FERRITE CORE is cleaned and dried, electrode is provided with the FERRITE CORE
Region；
The operation of the cleaning is to remove the powder on magnetic core surface and stain.
Preferably, the step of cleaning specifically includes：Alcohol-pickled 5-10 minutes are first used, then in 40-60 DEG C of temperature
Degree lower ultrasonic wave cleaning 10-20 minutes, then 1-3 minutes are rinsed with clear water, then normal temperature ultrasonic wave cleans 10-20 minutes, finally
1-3 minutes are rinsed with 50-80 DEG C of hot water.
The drying operation is to remove the moisture content on magnetic core surface, can be carried out in an oven.Preferably, oven temperature is
130-170 DEG C, minute time 10-20.
(2) coat of metal is prepared in the electrode area surfaces by the way of magnetron sputtering, obtains the ferrite that metallizes
Magnetic core, the coat of metal include stacking gradually the layers of chrome, nickel-copper alloy layer and silver layer to be formed in the electrode area surfaces.
Magnetron sputtering of the present invention is carried out using magnetron vacuum coating machine, and its detailed process parameter is not done particular determination, can obtained
Obtain each coat of metal.
Specifically, the magnetic-core arranging after drying is put into special tool well, fixed, only expose electrode zone i.e.
Can, then it is attached on the horse of vacuum coating, promotes vacuum machine, vacuumize, then argon gas is inputted into vacuum chamber, and remain true
The pressure of argon gas is 2 × 10 in cavity-1Pa-8×10-1In the range of Pa.
Preferably, during preparing the layers of chrome using magnetron sputtering：Using crome metal as target, the thickness of the layers of chrome
For 0.1-1.0 microns.Preferably, the electric current that the metal chromium target is passed through is 20-25A.
Preferably, during preparing the nickel-copper alloy layer using magnetron sputtering：Using monel as target, the nickel
The thickness of copper alloy layer is 0.7-2.0 microns.Preferably, the electric current that the monel target is passed through is 20-25A.
Preferably, during preparing the silver layer using magnetron sputtering：Using argent as target, the thickness of the silver layer
For 0.1-1.0 microns.Preferably, the electric current that the silver-colored target is passed through is 15-20A.
Preferably, in the present invention, the vacuum in magnetron sputtering process is 0.1-10Pa, Sputtering power density 0.1-
20W/cm2.The time of magnetron sputtering is depending on default thickness of coating.
The preparation method of the above-mentioned metallization FERRITE CORE of the embodiment of the present invention, spatter film forming speed is fast, technique whole process nothing
Pollution, cost are low.
The present invention is further elaborated below by way of more specifically embodiment.
Embodiment one
A kind of preparation method of above-mentioned metallization FERRITE CORE, comprises the following steps：
(1) FERRITE CORE is taken, the FERRITE CORE is cleaned and dried, electrode is provided with the FERRITE CORE
Region；
Its cleaning operation is specially：FERRITE CORE is placed in stainless steel basket, first soaks 5 minutes in alcohol, so
Cleaned 10 minutes after 50 DEG C of ultrasonic waves；Rinsed 1 minute with clear water again；Then normal temperature ultrasonic wave cleans 20 minutes；Finally with heat
Water rinses 2 minutes；Dried up with blowing hot wind, then shakeout and be placed in Dropbox, it is to be dried；
The drying operation is carried out in an oven, and specifically, magnetic core is divided in Dropbox, put into baking oven, baking oven temperature
Degree is set as 150 DEG C, 15 minutes time；It is dried to no steam；
(2) coat of metal is prepared in the electrode area surfaces by the way of magnetron sputtering, obtains the ferrite that metallizes
Magnetic core, the coat of metal include stacking gradually the layers of chrome, nickel-copper alloy layer and silver layer to be formed in the electrode area surfaces.
Sputter layers of chrome：Magnetic-core arranging is got well and is put into special tool, is fixed, only exposes electrode zone, then
It is attached on the horse of vacuum coating, promotes vacuum machine, vacuumize, background vacuum is more than 5 × 10-3Pa, by metal chromium target
On power supply is logical, argon gas is filled with, starts sputter, the logical current settings of chromium target are 20A, and the thickness of gained layers of chrome is 0.1 micron；
Before sputter, chromium target is splashed in advance, peels off the oxide or debris on surface.
Sputter nickel-copper alloy layer：The power supply of chromium target is closed, opens the power supply of monel target, what monel target led to
Current settings are 20A, and the thickness of gained nickel-copper alloy layer is 0.8 micron；
Sputter silver layer：The power supply of monel target is closed, opens the power supply of argent target, the logical current settings of silver-colored target
For 15A, the thickness of gained silver layer is 0.1 micron.
Embodiment two
A kind of preparation method of above-mentioned metallization FERRITE CORE, comprises the following steps：
(1) FERRITE CORE is taken, the FERRITE CORE is cleaned and dried, electrode is provided with the FERRITE CORE
Region；
Its cleaning operation is specially：FERRITE CORE is placed in stainless steel basket, first soaks 10 minutes in alcohol, so
Cleaned 20 minutes after 40 DEG C of ultrasonic waves；Rinsed 2 minutes with clear water again；Then normal temperature ultrasonic wave cleans 15 minutes；Finally with heat
Water rinses 3 minutes；Dried up with blowing hot wind, then shakeout and be placed in Dropbox, it is to be dried；
The drying operation is carried out in an oven, and specifically, magnetic core is divided in Dropbox, put into baking oven, baking oven temperature
Degree is set as 170 DEG C, 10 minutes time；It is dried to no steam；
(2) coat of metal is prepared in the electrode area surfaces by the way of magnetron sputtering, obtains the ferrite that metallizes
Magnetic core, the coat of metal include stacking gradually the layers of chrome, nickel-copper alloy layer and silver layer to be formed in the electrode area surfaces.
Sputter layers of chrome：Magnetic-core arranging is got well and is put into special tool, is fixed, only exposes electrode zone, then
It is attached on the horse of vacuum coating, promotes vacuum machine, vacuumize, background vacuum is more than 5 × 10-3Pa, by metal chromium target
On power supply is logical, argon gas is filled with, starts sputter, the logical current settings of chromium target are 25A, and the thickness of gained layers of chrome is 0.5 micron；
Sputter nickel-copper alloy layer：The power supply of chromium target is closed, opens the power supply of monel target, what monel target led to
Current settings are 25A, and the thickness of gained nickel-copper alloy layer is 2.0 microns；
Sputter silver layer：The power supply of monel target is closed, opens the power supply of argent target, the logical current settings of silver-colored target
For 20A, the thickness of gained silver layer is 0.6 micron.
Embodiment three
A kind of preparation method of above-mentioned metallization FERRITE CORE, comprises the following steps：
(1) FERRITE CORE is taken, the FERRITE CORE is cleaned and dried, electrode is provided with the FERRITE CORE
Region；
Its cleaning operation is specially：FERRITE CORE is placed in stainless steel basket, first soaks 8 minutes in alcohol, so
Cleaned 15 minutes after 60 DEG C of ultrasonic waves；Rinsed 1 minute with clear water again；Then normal temperature ultrasonic wave cleans 15 minutes；Finally with heat
Water rinses 1 minute；Dried up with blowing hot wind, then shakeout and be placed in Dropbox, it is to be dried；
The drying operation is carried out in an oven, and specifically, magnetic core is divided in Dropbox, put into baking oven, baking oven temperature
Degree is set as 130 DEG C, 20 minutes time；It is dried to no steam；
(2) coat of metal is prepared in the electrode area surfaces by the way of magnetron sputtering, obtains the ferrite that metallizes
Magnetic core, the coat of metal include stacking gradually the layers of chrome, nickel-copper alloy layer and silver layer to be formed in the electrode area surfaces.
Sputter layers of chrome：Magnetic-core arranging is got well and is put into special tool, is fixed, only exposes electrode zone, then
It is attached on the horse of vacuum coating, promotes vacuum machine, vacuumize, background vacuum is more than 1 × 10-2Pa, by metal chromium target
On power supply is logical, argon gas is filled with, starts sputter, the logical current settings of chromium target are 22A, and the thickness of gained layers of chrome is 0.3 micron.
Sputter nickel-copper alloy layer：The power supply of chromium target is closed, opens the power supply of monel target, what monel target led to
Current settings are 22A, and the thickness of gained nickel-copper alloy layer is 1.0 microns.
Sputter silver layer：The power supply of monel target is closed, opens the power supply of argent target, the logical current settings of silver-colored target
For 18A, the thickness of gained silver layer is 0.3 micron.
Solderability, heat resistance and peel strength performance are carried out to metallization FERRITE CORE obtained by the above embodiment of the present invention
Test, test result are good.
Described above is the preferred embodiment of the embodiment of the present invention, it is noted that for the common skill of the art
For art personnel, on the premise of principle of the embodiment of the present invention is not departed from, some improvements and modifications can also be made, these improvement
The protection domain of the embodiment of the present invention is also considered as with retouching.
Claims (4)
1. one kind metallization FERRITE CORE, including FERRITE CORE, electrode zone is provided with the FERRITE CORE, it is special
Sign is, includes successively formed with the coat of metal for being connected with other devices, the coat of metal on the electrode zone
Stacking forms the layers of chrome, nickel-copper alloy layer and silver layer in the electrode area surfaces, and the layers of chrome, nickel-copper alloy layer and silver layer lead to
Cross magnetron sputtering preparation, the thickness of the nickel-copper alloy layer is 0.7-2.0 microns, and in the nickel-copper alloy layer, the quality of nickel contains
Amount is more than 70%, and the thickness of the layers of chrome is 0.2-1.0 microns, and the thickness of the silver layer is 0.2-1.0 microns.
2. metallization FERRITE CORE as claimed in claim 1, it is characterised in that the silver-colored purity of the silver layer is more than 3N.
3. a kind of preparation method for the FERRITE CORE that metallizes, it is characterised in that comprise the following steps：
(1) FERRITE CORE is taken, the FERRITE CORE is cleaned and dried, electrode district is provided with the FERRITE CORE
Domain；
(2) coat of metal is prepared in the electrode area surfaces by the way of magnetron sputtering, obtains the FERRITE CORE that metallizes,
The coat of metal includes stacking gradually the layers of chrome, nickel-copper alloy layer and silver layer to be formed in the electrode area surfaces；Using magnetic
During control sputtering prepares the nickel-copper alloy layer：Using monel as target, the thickness of the nickel-copper alloy layer is 0.7-
2.0 microns, in the nickel-copper alloy layer, the mass content of nickel is more than 70%, and the process of the layers of chrome is prepared using magnetron sputtering
In：Using crome metal as target, the thickness of the layers of chrome is 0.2-1.0 microns, and the process of the silver layer is prepared using magnetron sputtering
In：Using argent as target, the thickness of the silver layer is 0.2-1.0 microns.
4. the preparation method of metallization FERRITE CORE as claimed in claim 3, it is characterised in that have the step of the cleaning
Body includes：Alcohol-pickled 5-10 minutes are first used, then ultrasonic wave cleans 10-20 minutes at a temperature of 40-60 DEG C, then uses clear water
1-3 minutes are rinsed, then normal temperature ultrasonic wave cleaning 10-20 minutes, finally rinse 1-3 minutes with 50-80 DEG C of hot water.
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| CN107708306A (en) * | 2017-08-30 | 2018-02-16 | 奥士康精密电路（惠州）有限公司 | A kind of circuit board pressing quality-improving technique |
| CN107974663A (en) * | 2017-11-24 | 2018-05-01 | 苏州市康普来表面处理科技有限公司 | New-energy automobile inverter heat sink PVD coating process |
| CN108675834A (en) * | 2018-05-30 | 2018-10-19 | 苏州求是真空电子有限公司 | A method of improving ceramic surface metallization adhesive force |
| CN113930733B (en) * | 2021-09-14 | 2023-12-15 | 国瓷赛创电气(铜陵)有限公司 | Magnetron sputtering method for ferrite processing |
| CN114260530A (en) * | 2021-12-27 | 2022-04-01 | 烟台台芯电子科技有限公司 | Welding process of large-area ceramic copper-clad plate based on IGBT module |
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| CN1333105C (en) * | 2004-09-09 | 2007-08-22 | 蔡育平 | Magnetron sputtering vacuum plating silver process for soft-magnetic ferrite core |
| JP5195669B2 (en) * | 2009-06-29 | 2013-05-08 | Ｔｄｋ株式会社 | Ferrite core and electronic components |
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