CN105448466A - Metallized iron powder core and preparation method thereof - Google Patents
Metallized iron powder core and preparation method thereof Download PDFInfo
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- CN105448466A CN105448466A CN201510942749.2A CN201510942749A CN105448466A CN 105448466 A CN105448466 A CN 105448466A CN 201510942749 A CN201510942749 A CN 201510942749A CN 105448466 A CN105448466 A CN 105448466A
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- magnetic core
- nickel
- ferrocart
- copper alloy
- metallization
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- 238000002360 preparation method Methods 0.000 title claims abstract description 16
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 title abstract 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 44
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 43
- 229910000881 Cu alloy Inorganic materials 0.000 claims abstract description 42
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 claims abstract description 42
- 229910052751 metal Inorganic materials 0.000 claims abstract description 41
- 239000002184 metal Substances 0.000 claims abstract description 41
- 229910052709 silver Inorganic materials 0.000 claims abstract description 38
- 239000004332 silver Substances 0.000 claims abstract description 38
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 26
- 238000001465 metallisation Methods 0.000 claims description 33
- 229910000792 Monel Inorganic materials 0.000 claims description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 12
- 229910052759 nickel Inorganic materials 0.000 claims description 6
- 229910052804 chromium Inorganic materials 0.000 abstract description 10
- 239000011651 chromium Substances 0.000 abstract description 10
- 239000011248 coating agent Substances 0.000 abstract description 9
- 238000000576 coating method Methods 0.000 abstract description 9
- 239000000853 adhesive Substances 0.000 abstract description 6
- 230000001070 adhesive effect Effects 0.000 abstract description 6
- 239000010410 layer Substances 0.000 description 90
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 229910052786 argon Inorganic materials 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 238000001771 vacuum deposition Methods 0.000 description 5
- 238000010276 construction Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000003064 anti-oxidating effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011104 metalized film Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/24—Magnetic cores
- H01F27/255—Magnetic cores made from particles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F2017/006—Printed inductances flexible printed inductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F2017/0066—Printed inductances with a magnetic layer
Abstract
The embodiment of the invention provides a metallized iron powder core, comprising an iron powder core, wherein an electrode area is arranged on the iron powder core; a metal coating connected with other devices is formed on the electrode area; the metal coating comprises a chromium layer, a nickel-copper alloy layer and a silver layer sequentially stacked on the electrode area; the chromium layer, the nickel-copper alloy layer and the silver layer are prepared by magnetron sputtering. The metal coating of the metallized iron powder core provided by the invention has the advantages of high adhesive force, strong heat resistance, good weldability and low cost. The embodiment of the invention also provides a preparation method of the metallized iron powder core, which is rapid in film forming speed, free of pollution during whole technical process, and low in cost.
Description
Technical field
The present invention relates to paster power magnetic core manufacture field, particularly relate to a kind of metallization ferrocart core magnetic core and preparation method thereof.
Background technology
At current smart mobile phone, under the spring tide of panel computer, microminiaturized to electronic component, the requirement of Surface Mounting Technology is more and more stronger, and power inductance stands in the breach especially.And the environmental requirement of product is also more and more higher, all products must cross every test such as ROSH and halogen.
Traditional ferrocart core paster power magnetic core metallization process mainly comprises magnetic core end points and is stained with the processes such as silver slurry, high temperature sintering, electronickelling, tin, it exists, and energy consumption is high, pollution is large, the shortcoming of cost intensive, poor reliability, disagree with the development trend of current construction conservation-minded society and green process technology, be not suitable for the processing continuing to be applied to ferrocart core paster power magnetic core.Therefore, seeking a kind of friendly process, to carry out metallization to ferrocart core paster power magnetic core imperative.
Summary of the invention
Given this, embodiments provide a kind of metallization ferrocart core magnetic core and preparation method thereof, with solve existing ferrocart core magnetic core metallization process energy consumption high, pollute large, cost intensive, and the layer of metallized film poor reliability obtained, the problem that performance is not good.
First aspect, embodiments provide a kind of metallization ferrocart core magnetic core, comprise ferrocart core magnetic core, described ferrocart core magnetic core is provided with electrode zone, described electrode zone is formed with the coat of metal for being connected with other devices, the described coat of metal comprises the layers of chrome, nickel-copper alloy layer and the silver layer that stack gradually and be formed in described electrode area surfaces, and described layers of chrome, nickel-copper alloy layer and silver layer are prepared by magnetron sputtering.
The metallize coat of metal of ferrocart core magnetic core of the present invention adopts layers of chrome bottoming, can improve coat of metal adhesive force; Nickel-copper alloy layer is formed again, to form weld layer in layers of chrome; Described silver layer is arranged on outermost layer, forms protective layer, nickel-copper alloy layer can be protected not oxidized; Simultaneously because silver and scolding tin compatibility are good, thus solderability can be improved.The present invention is by adopting the coat of metal of above-mentioned special construction, and coating adhesion is high, thermal endurance is strong, solderability is good, and cost is low.
Preferably, the thickness of described layers of chrome is 0.1-1.0 micron.More preferably, the thickness of described layers of chrome is 0.2-0.3 micron.
Preferably, the thickness of described nickel-copper alloy layer is 0.7-2.0 micron.More preferably, the thickness of described nickel-copper alloy layer is 1.2-1.5 micron.Preferably, in described nickel-copper alloy layer, the mass content of nickel is greater than 70%.
Preferably, the thickness of described silver layer is 0.1-1.0 micron.More preferably, the thickness of described silver layer is 0.2-0.3 micron.
Because the metallic coating mass of special construction of the present invention is high, therefore can the thickness setting of corresponding minimizing coating, thus not only increase welding quality, and substantially increase production efficiency, reduce metallization cost.
For playing good anti-oxidation effect, preferably, the silver-colored purity of described silver layer is more than 3N.
The metallize concrete shape of ferrocart core magnetic core of the present invention is not limit, such as, can be I shape.The present invention's ferrocart core magnetic core that metallizes is specifically as follows a magnetic core electrode.
The one metallization ferrocart core magnetic core that embodiment of the present invention first aspect provides, its coat of metal comprises the layers of chrome, nickel-copper alloy layer and the silver layer that stack gradually, layers of chrome can improve coating adhesion, nickel-copper alloy layer forms weld layer, silver layer can protect nickel-copper alloy layer not oxidized, can improve solderability simultaneously; The final described coat of metal has that adhesive force is high, thermal endurance is strong, solderability is good, and low cost and other advantages.
Second aspect, embodiments provides a kind of preparation method of above-mentioned metallization ferrocart core magnetic core, comprises the following steps:
Get ferrocart core magnetic core, described ferrocart core magnetic core is provided with electrode zone; Adopt the mode of magnetron sputtering to prepare the coat of metal at described electrode area surfaces, obtain metallization ferrocart core magnetic core, the described coat of metal comprises the layers of chrome, nickel-copper alloy layer and the silver layer that stack gradually and be formed in described electrode area surfaces.
Magnetron sputtering of the present invention adopts magnetron vacuum coating machine to carry out, and its detailed process parameter does not do particular determination, can obtain each coat of metal.
Preferably, magnetron sputtering is adopted to prepare in the process of described layers of chrome: take crome metal as target, the thickness of described layers of chrome is 0.1-1.0 micron.Preferably, the electric current that described crome metal target passes into is 20-25A.
Preferably, magnetron sputtering is adopted to prepare in the process of described nickel-copper alloy layer: take monel as target, the thickness of described nickel-copper alloy layer is 0.7-2.0 micron.Preferably, the electric current that described monel target passes into is 20-25A.Preferably, in described nickel-copper alloy layer, the mass content of nickel is greater than 70%.
Preferably, magnetron sputtering is adopted to prepare in the process of described silver layer: take argent as target, the thickness of described silver layer is 0.1-1.0 micron.Preferably, the electric current that described silver-colored target passes into is 15-20A.
Preferably, in the present invention, the vacuum degree in magnetron sputtering process is 0.1-10Pa, and Sputtering power density is 0.1-20W/cm
2.The time of magnetron sputtering determines according to presetting thickness of coating.
The preparation method of the metallization ferrocart core magnetic core that embodiment of the present invention second aspect provides, utilize magnetron sputtering technique, form metallization solder joint with the sputtering of metal targets chromium target, monel target and silver-colored target, coat of metal adhesive force is high, thermal endurance is strong, solderability is good, and spatter film forming speed is fast, and technique whole process is pollution-free, cost is low, thus magnetic core electrode pads can be made can to meet the requirement of solderability, soldering resistance and adhesive force, can environmental protection be ensured again, without any pollution and economy.
Accompanying drawing explanation
Fig. 1 is that the present invention metallizes ferrocart core core structure figure;
Fig. 2 is the section amplification figure of the a-quadrant of Fig. 1;
Fig. 3 is the upward view of the metallization ferrocart core magnetic core of Fig. 1;
Fig. 4 is the process chart of the embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Refer to Fig. 1-Fig. 3, embodiments provide a kind of metallization ferrocart core magnetic core, comprise ferrocart core magnetic core 100, the side of described ferrocart core magnetic core 100 is provided with electrode zone 101, this electrode zone is the one side contacted with pcb board paster, described electrode zone 101 is formed with the coat of metal for being connected with other devices, Figure 2 shows that the section structure enlarged drawing of a-quadrant in Fig. 1, shown in contrast Fig. 3, this coat of metal comprises the layers of chrome 10 stacking gradually and be formed in described electrode zone 101 surface, nickel-copper alloy layer 20 and silver layer 30, described layers of chrome 10, nickel-copper alloy layer 20 and silver layer 30 are prepared by magnetron sputtering.
Preferably, the thickness of described layers of chrome is 0.1-1.0 micron.More preferably, the thickness of described layers of chrome is 0.2-0.3 micron.
Preferably, the thickness of described nickel-copper alloy layer is 0.7-2.0 micron.More preferably, the thickness of described nickel-copper alloy layer is 1.2-1.5 micron.Preferably, in described nickel-copper alloy layer, the mass content of nickel is greater than 70%.
Preferably, the thickness of described silver layer is 0.1-1.0 micron.More preferably, the thickness of described silver layer is 0.2-0.3 micron.
The coat of metal of the above-mentioned special construction of the present invention has that adhesive force is high, thermal endurance is strong, solderability is good, and low cost and other advantages.
The metallization ferrocart core magnetic core of the embodiment of the present invention can be used as the magnetic core use of chip inductor.The shape of the coat of metal can be set to rectangle, circle or other shapes according to the shape of electrode zone and actual needs.
Refer to Fig. 4, embodiments provide a kind of preparation method of above-mentioned metallization ferrocart core magnetic core, comprise the following steps:
(1) get ferrocart core magnetic core, passed through mask tool rack in substrate frame, only expose electrode zone, then advance in vacuum sputtering equipment and vacuumize; In vacuum chamber, input argon gas again, and the pressure maintaining argon gas in vacuum chamber is 2 × 10
-1pa-8 × 10
-1within the scope of Pa;
Adopt the object of mask be in order to prevent magnetic core edge in sputter procedure on sputter metal cause the situation of short circuit;
(2) described ferrocart core magnetic core is provided with electrode zone; Adopt the mode of magnetron sputtering to prepare the coat of metal at described electrode area surfaces, obtain metallization ferrocart core magnetic core, the described coat of metal comprises the layers of chrome, nickel-copper alloy layer and the silver layer that stack gradually and be formed in described electrode area surfaces.
Magnetron sputtering of the present invention adopts magnetron vacuum coating machine to carry out, and its detailed process parameter does not do particular determination, can obtain each coat of metal.
Preferably, magnetron sputtering is adopted to prepare in the process of described layers of chrome: take crome metal as target, the thickness of described layers of chrome is 0.1-1.0 micron.Preferably, the electric current that described crome metal target passes into is 20-25A.
Preferably, magnetron sputtering is adopted to prepare in the process of described nickel-copper alloy layer: take monel as target, the thickness of described nickel-copper alloy layer is 0.7-2.0 micron.Preferably, the electric current that described monel target passes into is 20-25A.Preferably, in described nickel-copper alloy layer, the mass content of nickel is greater than 70%.
Preferably, magnetron sputtering is adopted to prepare in the process of described silver layer: take argent as target, the thickness of described silver layer is 0.1-1.0 micron.Preferably, the electric current that described silver-colored target passes into is 15-20A.
Preferably, in the present invention, the vacuum degree in magnetron sputtering process is 0.1-10Pa, and sputtering power is 0.1-20W/cm
2.The time of magnetron sputtering determines according to presetting thickness of coating.
The preparation method of the embodiment of the present invention above-mentioned metallization ferrocart core magnetic core, spatter film forming speed is fast, and technique whole process is pollution-free, and cost is low.
Below by way of embodiment more specifically, the present invention is further elaborated.
Embodiment one
Metallize the preparation method of ferrocart core magnetic core, comprises the following steps:
Get ferrocart core magnetic core, described ferrocart core magnetic core is provided with electrode zone; Adopt the mode of magnetron sputtering to prepare the coat of metal at described electrode area surfaces, obtain metallization ferrocart core magnetic core, the described coat of metal comprises the layers of chrome, nickel-copper alloy layer and the silver layer that stack gradually and be formed in described electrode area surfaces.
(1) sputter layers of chrome: be put in special tool well by magnetic-core arranging, fix, only expose electrode zone, then installs on the horse of vacuum coating, and advance vacuum machine, vacuumize, background vacuum is greater than 5 × 10
-3on Pa is logical by crome metal target power supply, be filled with argon gas, start sputter, the current settings that chromium target is logical is 20A, and the thickness of gained layers of chrome is 0.1 micron;
Before sputter, chromium target is spattered in advance, the oxide of stripper surface or foreign material.
(2) sputter nickel-copper alloy layer: the power supply of closing chromium target, opens the power supply of monel target, and the current settings that monel target is logical is 20A, and the thickness of gained nickel-copper alloy layer is 0.8 micron;
(3) sputter silver layer: the power supply of closing monel target, opens the power supply of argent target, and the current settings that silver-colored target is logical is 15A, and the thickness of gained silver layer is 0.1 micron.
Embodiment two
Metallize the preparation method of ferrocart core magnetic core, comprises the following steps:
Get ferrocart core magnetic core, described ferrocart core magnetic core is provided with electrode zone; Adopt the mode of magnetron sputtering to prepare the coat of metal at described electrode area surfaces, obtain metallization ferrocart core magnetic core, the described coat of metal comprises the layers of chrome, nickel-copper alloy layer and the silver layer that stack gradually and be formed in described electrode area surfaces.
(1) sputter layers of chrome: be put in special tool well by magnetic-core arranging, fix, only expose electrode zone, then installs on the horse of vacuum coating, and advance vacuum machine, vacuumize, background vacuum is greater than 5 × 10
-3on Pa is logical by crome metal target power supply, be filled with argon gas, start sputter, the current settings that chromium target is logical is 25A, and the thickness of gained layers of chrome is 0.5 micron;
(2) sputter nickel-copper alloy layer: the power supply of closing chromium target, opens the power supply of monel target, and the current settings that monel target is logical is 25A, and the thickness of gained nickel-copper alloy layer is 2.0 microns;
(3) sputter silver layer: the power supply of closing monel target, opens the power supply of argent target, and the current settings that silver-colored target is logical is 20A, and the thickness of gained silver layer is 0.6 micron.
Embodiment three
Metallize the preparation method of ferrocart core magnetic core, comprises the following steps:
Get ferrocart core magnetic core, described ferrocart core magnetic core is provided with electrode zone; Adopt the mode of magnetron sputtering to prepare the coat of metal at described electrode area surfaces, obtain metallization ferrocart core magnetic core, the described coat of metal comprises the layers of chrome, nickel-copper alloy layer and the silver layer that stack gradually and be formed in described electrode area surfaces.
(1) sputter layers of chrome: be put in special tool well by magnetic-core arranging, fix, only expose electrode zone, then installs on the horse of vacuum coating, and advance vacuum machine, vacuumize, background vacuum is greater than 5 × 10
-3on Pa is logical by crome metal target power supply, be filled with argon gas, start sputter, the current settings that chromium target is logical is 22A, and the thickness of gained layers of chrome is 0.3 micron.
(2) sputter nickel-copper alloy layer: the power supply of closing chromium target, opens the power supply of monel target, and the current settings that monel target is logical is 22A, and the thickness of gained nickel-copper alloy layer is 1.0 microns.
(3) sputter silver layer: the power supply of closing monel target, opens the power supply of argent target, and the current settings that silver-colored target is logical is 18A, and the thickness of gained silver layer is 0.3 micron.
Carry out solderability, thermal endurance and peel strength performance test to the above embodiment of the present invention gained metallization ferrocart core magnetic core, test result is good.
The above is the preferred implementation of the embodiment of the present invention; should be understood that; for those skilled in the art; under the prerequisite not departing from embodiment of the present invention principle; can also make some improvements and modifications, these improvements and modifications are also considered as the protection range of the embodiment of the present invention.
Claims (10)
1. a metallization ferrocart core magnetic core, comprise ferrocart core magnetic core, described ferrocart core magnetic core is provided with electrode zone, it is characterized in that, described electrode zone is formed with the coat of metal for being connected with other devices, the described coat of metal comprises the layers of chrome, nickel-copper alloy layer and the silver layer that stack gradually and be formed in described electrode area surfaces, and described layers of chrome, nickel-copper alloy layer and silver layer are prepared by magnetron sputtering.
2. metallization ferrocart core magnetic core as claimed in claim 1, it is characterized in that, the thickness of described layers of chrome is 0.1-1.0 micron.
3. metallization ferrocart core magnetic core as claimed in claim 1, it is characterized in that, the thickness of described nickel-copper alloy layer is 0.7-2.0 micron.
4. metallization ferrocart core magnetic core as claimed in claim 1, it is characterized in that, in described nickel-copper alloy layer, the mass content of nickel is greater than 70%.
5. metallization ferrocart core magnetic core as claimed in claim 1, it is characterized in that, the thickness of described silver layer is 0.1-1.0 micron.
6. metallization ferrocart core magnetic core as claimed in claim 1, it is characterized in that, the silver-colored purity of described silver layer is more than 3N.
7. metallize the preparation method of ferrocart core magnetic core, it is characterized in that, comprise the following steps:
Get ferrocart core magnetic core, described ferrocart core magnetic core is provided with electrode zone; Adopt the mode of magnetron sputtering to prepare the coat of metal at described electrode area surfaces, obtain metallization ferrocart core magnetic core, the described coat of metal comprises the layers of chrome, nickel-copper alloy layer and the silver layer that stack gradually and be formed in described electrode area surfaces.
8. the preparation method of metallization ferrocart core magnetic core as claimed in claim 7, is characterized in that, adopt magnetron sputtering to prepare in the process of described layers of chrome: take crome metal as target, the thickness of described layers of chrome is 0.1-1.0 micron.
9. the preparation method of metallization ferrocart core magnetic core as claimed in claim 7, it is characterized in that, magnetron sputtering is adopted to prepare in the process of described nickel-copper alloy layer: to take monel as target, the thickness of described nickel-copper alloy layer is 0.7-2.0 micron, in described nickel-copper alloy layer, the mass content of nickel is greater than 70%.
10. the preparation method of metallization ferrocart core magnetic core as claimed in claim 7, is characterized in that, adopt magnetron sputtering to prepare in the process of described silver layer: take argent as target, the thickness of described silver layer is 0.1-1.0 micron.
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| CN201510942749.2A CN105448466B (en) | 2015-12-16 | 2015-12-16 | One kind metallization ferrocart core magnetic core and preparation method thereof |
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|---|---|---|---|
| CN201510942749.2A CN105448466B (en) | 2015-12-16 | 2015-12-16 | One kind metallization ferrocart core magnetic core and preparation method thereof |
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| CN105448466B CN105448466B (en) | 2018-01-23 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109148137A (en) * | 2018-09-04 | 2019-01-04 | 珠海群创新材料技术有限公司 | A kind of high pressure resistant inductor and preparation method thereof |
| CN109741915A (en) * | 2019-01-22 | 2019-05-10 | 深圳市康磁电子有限公司 | A kind of metallization magnetic core and preparation method thereof and chip inductor |
| CN109741914A (en) * | 2019-01-22 | 2019-05-10 | 深圳市康磁电子有限公司 | A kind of multi sphere bottoming metallization magnetic core and preparation method thereof and chip inductor |
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