CN105400269A - Metal and electronic device coating process for marine use and other environments - Google Patents

Metal and electronic device coating process for marine use and other environments Download PDF

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Publication number
CN105400269A
CN105400269A CN201510679248.XA CN201510679248A CN105400269A CN 105400269 A CN105400269 A CN 105400269A CN 201510679248 A CN201510679248 A CN 201510679248A CN 105400269 A CN105400269 A CN 105400269A
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CN
China
Prior art keywords
parylene
coating
compound
conformal coating
silane
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Pending
Application number
CN201510679248.XA
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Chinese (zh)
Inventor
S·E·马丁
E·R·达维奇
A·M·达维奇
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HZO Inc
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HZO Inc
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Filing date
Publication date
Priority claimed from US12/104,080 external-priority patent/US20090263581A1/en
Priority claimed from US12/104,152 external-priority patent/US20090263641A1/en
Application filed by HZO Inc filed Critical HZO Inc
Publication of CN105400269A publication Critical patent/CN105400269A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • H05K3/284—Applying non-metallic protective coatings for encapsulating mounted components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D165/00—Coating compositions based on macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain; Coating compositions based on derivatives of such polymers
    • C09D165/04—Polyxylylenes
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • C09D5/16—Antifouling paints; Underwater paints
    • C09D5/1656—Antifouling paints; Underwater paints characterised by the film-forming substance
    • C09D5/1662—Synthetic film-forming substance
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
    • C09D7/40—Additives
    • C09D7/60—Additives non-macromolecular
    • C09D7/61—Additives non-macromolecular inorganic
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
    • C09D7/40—Additives
    • C09D7/66—Additives characterised by particle size
    • C09D7/69—Particle size larger than 1000 nm
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • H05K3/285—Permanent coating compositions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2601/00—Inorganic fillers
    • B05D2601/20—Inorganic fillers used for non-pigmentation effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
    • B05D3/141—Plasma treatment
    • B05D3/142—Pretreatment
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00—Use of inorganic substances as compounding ingredients
    • C08K3/18—Oxygen-containing compounds, e.g. metal carbonyls
    • C08K3/20—Oxides; Hydroxides
    • C08K3/22—Oxides; Hydroxides of metals
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00—Use of inorganic substances as compounding ingredients
    • C08K3/28—Nitrogen-containing compounds
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00—Use of inorganic substances as compounding ingredients
    • C08K3/38—Boron-containing compounds
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L65/00—Compositions of macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain; Compositions of derivatives of such polymers
    • C08L65/04—Polyxylenes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0201—Thermal arrangements, e.g. for cooling, heating or preventing overheating
    • H05K1/0203—Cooling of mounted components
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0201—Thermal arrangements, e.g. for cooling, heating or preventing overheating
    • H05K1/0203—Cooling of mounted components
    • H05K1/021—Components thermally connected to metal substrates or heat-sinks by insert mounting
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0137—Materials
    • H05K2201/0179—Thin film deposited insulating layer, e.g. inorganic layer for printed capacitor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
    • H05K2201/0203—Fillers and particles
    • H05K2201/0206—Materials
    • H05K2201/0209—Inorganic, non-metallic particles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
    • H05K2201/09872—Insulating conformal coating

Abstract

The present disclosure relates, in part, to Parylene based conformal coating compositions having improved properties, e.g., improved heat transfer and durability characteristics, as well as a methods and apparatus to coat objects with these compositions, and objects coated with these compositions. In some aspects, coating compositions comprising Parylene and boron nitride are disclosed. The disclosure also includes objects (e.g., electronic equipment, textiles, etc.) having a conformal coating comprising a Parylene compound and boron nitride.

Description

The metal of peculiar to vessel and other environment and electronic device coating process
The application is the divisional application based on the Chinese patent application that application number is 200980122498.6, the applying date, to be March 5, denomination of invention in 2009 be " metal of peculiar to vessel and other environment and electronic device coating process ".
Related application
The present invention is directed in part to the U.S. Patent Application No. 12/104 of application on 04 16th, 2008,080 and on 04 16th, 2008 application U.S. Patent Application No. 12/104,152, in literary composition, its content whole be incorporated by reference and and require its rights and interests 120 times at 35U.S.C. § thus.
Background technology
Conformal coating, such as, have those of high resistivity and wet fastness, is normally used for protection as the parts in commercial equipment used in human consumer, automobile, military, medical and aerospace industry.There is the multiple method applying such coating.Such as, the chemical vapour deposition under low pressure can produce thin even conformal (also referred to as conformal) coating on a variety of surfaces.To for for expanding their application and applying improving one's methods of conformal coating and have demand.In addition, the coating material composition with the characteristic will improving effect in some applications is also needed.Such as, the coating with outstanding weather resistance and outstanding heat transfer characteristic is sought especially.
Summary of the invention
Applicant has found the part ultra-thin conforma polymeric coating of resistance to moisture penetration, and such coating is applied to the method and apparatus of object.The ultra-thin conforma polymeric coating of resistance to moisture penetration directly can put on voluminous object, and especially comprising is " ready-made " electronics.Therefore, some aspects of the disclosure comprise composition, the method and apparatus for coated object.In other side, disclose conformal coating compound as parylene compound, it can form ultra-thin conforma coating on object.In other side, disclose coating composition, it comprise the conformal coating compound that can form ultra-thin conforma coating and for improvement of any one additive in multiple characteristics of conformal coating as thermally conductive material (such as boron nitride), the plurality of characteristic comprises such as resistivity, thermal conductivity, transmittance, hardness and weather resistance.In other side, the disclosure comprises " ready-made " electronics of the ultra-thin conforma coating (such as water-proof coating) with resistance to moisture penetration as mobile phone and Mp 3 player.Also disclose for ultra-thin conforma coating being applied method and apparatus on a surface of an by vapour deposition.In other side, disclose the multistage heating unit of the polymeric coating for vapour deposition ultra-thin conforma.Electronics is comprised as mobile phone, receiving set, circuit card and loud speaker with coating composition disclosed in literary composition and method object to be coated; With the equipment of Yu Haiyang and space probation; Hazardous wastes transportation equipment; Medicine equipment; Paper product; And yarn fabric.Can any solid state surface of coated object, comprise plastics, metal, timber, paper and yarn fabric.Biomedical device (biomedicaldevice) (the ear implant, prosthese etc. of such as osophone, cochlea), automobile, electric machinery, artwork (coating, timber, watercolor, chalk, ink, charcoal), military system parts, ammunition, rifle, weapon and similar object can be coated with method disclosed in literary composition and coating composition.
According to some aspects, provide coating composition, it comprises conformal coating compound and thermally conductive material.In some embodiments, this thermally conductive material is dispersed in the polymkeric substance of conformal coating compound.In some embodiments, coating composition is have the solid (such as conformal coating) that about R80-is about the hardness of R95.In some embodiments, coating composition is gaseous mixture, and it comprises the monomer of this conformal coating compound of gas phase.In certain embodiments, this gaseous mixture comprises the solid particulate of this thermally conductive material.
In some embodiments, this conformal coating compound is for be at random selected from parylene D (ParyleneD), parylene C (ParyleneC), parylene N (ParyleneN) and parylene (Parylene ) the parylene compound of compound.In some embodiments, this coating composition comprises two or more different parylene compounds.In some embodiments, this coating composition comprises the different parylene compound of two or more of purity level.In some embodiments, this coating composition has the thermal conductivity of 5-10% larger than independent parylene compound.In some embodiments, this coating composition has the thermal conductivity of the level exceeded than independent parylene compound large 10%.In some embodiments, this coating composition have larger than independent parylene compound at the most about 5% thermal conductivity.
In some embodiments, this thermally conductive material is pottery.In some embodiments, this thermally conductive material is selected from: aluminium nitride, aluminum oxide and boron nitride.In some embodiments, thermally conductive material has and is greater than 10 10the volume specific resistance of ohm * centimetre.In some embodiments, in this coating composition the quality of this thermally conductive material mostly be most this conformal coating compound in coating composition and this thermally conductive material total mass about 3% (or more).In some embodiments, in this coating composition, the quality of this thermally conductive material mostly is this conformal coating compound in this coating composition and about 1% of this thermally conductive material total mass most.
In some respects, at least part of surface of object provides conformal coating.In some embodiments, this conformal coating comprises arbitrary aforementioned coating composition.
In some embodiments, this conformal coating is at least part of surface of the object for electronics.This electronics at random can be selected from communication equipment, loud speaker, mobile phone, audio player, photographic camera, video player, remote-control equipment, global positioning system (GPS), machine element, radarscope, sounding machine, fish detector, anxious feelings Position Indicating Radio Beacon (EPIRB), anxious feelings place transmitter (ELT) and personal locator beacon (PLB).
In some embodiments, this conformal coating is at least part of surface of object, and this object is selected from paper product; Textiles; Artwork; Circuit card; Ocean exploration equipment; Space exploration equipment; Hazardous wastes transportation equipment; Automobile equipment, electromechanical equipment; Military system parts; Ammunition; Rifle; Weapon; Medicine equipment; And biomedical device, wherein this biomedical device is at random selected from osophone, the ear implant of cochlea, and prosthese.
In some embodiments, this conformal coating is at least part of surface of object, and wherein this surface is plastics, metal, timber, paper or yarn fabric.In certain embodiments, this surface is the outside surface of this object.In some other embodiment, this surface is the internal surface of this object.
In some respects, provide object, it is included in the conformal coating at least part of surface.In some embodiments, this conformal coating on this body surface comprises arbitrary aforementioned coating composition.
In some embodiments, this object is electronics, and it is at random selected from communication equipment, loud speaker, mobile phone, audio player, photographic camera, video player, remote-control equipment, global positioning system (GPS), machine element, radarscope, sounding machine, fish detector, anxious feelings Position Indicating Radio Beacon (EPIRB), anxious feelings place transmitter (ELT) and personal locator beacon (PLB).
In some embodiments, this object is selected from paper product; Textiles; Artwork; Circuit card; Ocean exploration equipment; Space exploration equipment; Hazardous wastes transportation equipment; Automobile equipment, electromechanical equipment; Military system parts; Ammunition; Rifle; Weapon; Medicine equipment; And biomedical device, wherein this biomedical device is at random selected from osophone, the ear implant of cochlea, and prosthese.
In some embodiments, this surface of this object is plastics, metal, timber, paper or textiles.In certain embodiments, this object is coated with on the outer surface.In some other embodiment, be coated with this object on an internal surface.In some embodiments, this surface covers with conformal coating substantially.Substantially the surface covered can be cover completely or fully cover to protect the lower surface of this object not contact with needing the material (such as water) protected.
In some respects, provide method conformal coating being applied to object, in some embodiments, the method comprises:
A) conformal coating compound is heated with the gaseous monomer forming conformal coating compound,
B) make thermally conductive material mix with this gaseous monomer, form gaseous mixture thus, and
C) under the conformal coating comprising this conformal coating compound and this thermally conductive material is formed at least part of surface of object condition, this object is contacted with this gaseous mixture, thus conformal coating is applied to this object.
In some embodiments of the method, this conformal coating compound for be at random selected from parylene D, parylene C, parylene N and parylene the parylene compound of compound.
In some embodiments of the method, this thermally conductive material is pottery.In other embodiments, this thermally conductive material is selected from aluminium nitride, aluminum oxide and boron nitride.In certain embodiments, this thermally conductive material is the form of solid particulate.In certain embodiments, solid particulate is about 1.8 microns of-Yue 2.5 microns.
In some embodiments, the method comprises:
A) parylene compound is heated to the temperature of about 125 DEG C of-Yue 200 DEG C to form gaseous state parylene compound, wherein carries out the heating of this parylene compound with two or more heating phases,
B) this gaseous state parylene compound is heated to the temperature of about 650 DEG C of-Yue 700 DEG C with this gaseous state parylene compound of cracking, forms parylene monomer thus,
C), under the condition be formed at least part of surface of object at the conformal coating comprising parylene polymkeric substance, this object is contacted with this parylene monomer, thus coating is applied to this object.
In some embodiments of the method, steps A comprises the temperature this parylene compound being heated to about 125 DEG C of-Yue 180 DEG C and the temperature this parylene compound being heated to about 200 DEG C of-Yue 220 DEG C.
In some embodiments of the method, carry out the heating of this gaseous state parylene compound with two or more stages.In some embodiments, step B comprises and this gaseous state parylene compound is heated to the temperature of about 680 DEG C and gaseous state parylene compound is heated to the temperature at least about 700 DEG C.
In some embodiments, parylene compound is selected from parylene D, parylene C, parylene N and parylene compound.
In some embodiments, before the method is also included in step C, contact under the condition this body surface being activated at this silane object and gaseous silane.In some embodiments, silane is selected from with one or more silane.
In some embodiments of aforesaid method, this object during step C in the temperature of about 5 DEG C of-Yue 30 DEG C.In some embodiments, this conformal coating being applied to this surface is about 100 Ai-Yue 3.0 millimeters.In some embodiments, this conformal coating on this surface is applied to for about 0.0025 millimeter of-Yue 0.050 mm thick.
In some embodiments of aforesaid method, this object is electronics, at random be selected from communication equipment, loud speaker, mobile phone, audio player, photographic camera, video player, remote-control equipment, global positioning system (GPS), machine element, radarscope, sounding machine, fish detector, anxious feelings Position Indicating Radio Beacon (EPIRB), anxious feelings place transmitter (ELT) and personal locator beacon (PLB).
In some embodiments of aforesaid method, this object is selected from paper product; Textiles; Artwork; Circuit card; Ocean exploration equipment; Space exploration equipment; Hazardous wastes transportation equipment; Automobile equipment, electromechanical equipment; Military system parts; Ammunition; Rifle; Weapon; Medicine equipment; And biomedical device, wherein this biomedical device is at random selected from osophone, the ear implant of cochlea and prosthese.
In some embodiments of aforesaid method, this surface is plastics, metal, timber, paper and yarn fabric.
In some respects, the object with the coating being applied at least part of surface (outer or interior) by the method for above-mentioned any one is provided.
In some respects, device conformal coating being applied to object is provided.
In some embodiments, this device comprises: the evaporator room comprising at least two humidity provinces; The pyrolysis chamber be connected with this evaporator room operability; And the vacuum chamber to be connected with this pyrolysis chamber's operability.In some embodiments, this device also comprises the web member that operability connects this pyrolysis chamber and this vacuum chamber, wherein this web member can between this pyrolysis chamber and this vacuum chamber delivering gas, and wherein this web member comprises T-valve port.In some embodiments, be connected to this T-valve port and the tool operation by thermally conductive material injecting gas, by this web member, this gas be transported to this vacuum chamber from pyrolysis chamber.In some embodiments, thermally conductive material is drawn into by T-valve port and comprises in the web member of gas by the vacuum produced in this vacuum chamber.
In some embodiments, this vacuum chamber comprises the sediment chamber that vacuum production part and operability are connected to this pyrolysis chamber.In some embodiments, this vacuum production part (vacuum tool) comprises one or more vacuum pump.
In some embodiments, this evaporator room has two humidity provinces, and in some embodiments, this evaporator room is tube furnace.
In some embodiments, this pyrolysis chamber has multiple humidity province.In some embodiments, this pyrolysis chamber has two humidity provinces.In some embodiments, this pyrolysis chamber is tube furnace.
Embodiment of the present invention comprise:
1. coating composition, comprises conformal coating compound and thermally conductive material.
2. the coating composition of embodiment 1, wherein this conformal coating compound is at random selected from parylene D, parylene C, parylene N and parylene the parylene compound of compound.
3. the coating composition of embodiment 2, comprises the parylene compound that two or more are different.
4. the coating composition of embodiment 2 or 3, comprises two or more parylene compounds of different purity level.
5. the coating composition of any one of embodiment 1-4, wherein this thermally conductive material is pottery.
6. the coating composition of any one of embodiment 1-4, wherein this thermally conductive material is selected from aluminium nitride, aluminum oxide and boron nitride.
7. the coating composition of any one of embodiment 1-6, wherein this thermally conductive material has and is greater than 10 10the volume specific resistance of ohm * centimetre.
8. the coating composition of any one of embodiment 1-7, wherein the quality of this thermally conductive material is at most about 3% of this conformal coating compound and this thermally conductive material total mass.
9. the coating composition of any one of embodiment 1-8, wherein the quality of this thermally conductive material is at most about 1% of the total mass of this conformal coating compound and this thermally conductive material.
10. the coating composition of any one of embodiment 2-9, it has the thermal conductivity of 5-10% larger than the thermal conductivity of independent parylene compound.
The coating composition of 11. any one of embodiment 1-10, it has the hardness of about R80 to about R95.
The coating composition of 12. any one of embodiment 1-11, is wherein dispersed in this thermally conductive material in the polymkeric substance of this conformal coating compound.
13. conformal coatings at least part of surface of object, it comprises the coating composition of any one of embodiment 1-12.
The conformal coating of 14. embodiments 13, wherein this object is electronics, and this electronics is at random selected from communication equipment, loud speaker, mobile phone, audio player, photographic camera, video player, remote-control equipment, global positioning system (GPS), machine element, radarscope, sounding machine, fish detector, anxious feelings Position Indicating Radio Beacon (EPIRB), anxious feelings place transmitter (ELT) and personal locator beacon (PLB).
The conformal coating of 15. embodiments 13, wherein this object is selected from paper product; Textiles; Artwork; Circuit card; Ocean exploration equipment; Space exploration equipment; Hazardous wastes transportation equipment; Automobile equipment, electromechanical equipment; Military system parts; Ammunition; Rifle; Weapon; Medicine equipment; And biomedical device, wherein biomedical device is at random selected from osophone, the ear implant of cochlea and prosthese.
The conformal coating of 16. any one of embodiment 13-15, wherein this surface is plastics, metal, timber, paper or yarn fabric.
The conformal coating of 17. any one of embodiment 13-16, wherein this surface is the outside surface of this object.
The coating composition of 18. any one of embodiment 1-11, wherein this coating composition is gaseous mixture, and this gaseous mixture comprises the monomer of the conformal coating compound of gas phase.
The coating composition of 19. embodiments 18, wherein this gaseous mixture comprises the solid particulate of this thermally conductive material.
20. objects being included in the conformal coating at least part of surface, wherein this conformal coating is made up of the coating composition of any one of embodiment 1-12.
The object of 21. embodiments 20, wherein this object is electronics, and this electronics is at random selected from communication equipment, loud speaker, mobile phone, audio player, photographic camera, video player, remote-control equipment, global positioning system (GPS), machine element, radarscope, sounding machine, fish detector, anxious feelings Position Indicating Radio Beacon (EPIRB), anxious feelings place transmitter (ELT) and personal locator beacon (PLB).
The object of 22. embodiments 20, wherein this object is selected from paper product; Textiles; Artwork; Circuit card; Ocean exploration equipment; Space exploration equipment; Hazardous wastes transportation equipment; Automobile equipment, electromechanical equipment; Military system parts; Ammunition; Rifle; Weapon; Medicine equipment; And biomedical device, wherein biomedical device is at random selected from osophone, the ear implant of cochlea and prosthese.
The object of 23. any one of embodiment 20-22, wherein this surface is plastics, metal, timber, paper or yarn fabric.
The object of 24. any one of embodiment 20-23, wherein this surface is outside surface.
The object of 25. any one of embodiment 20-24, wherein covers this surface substantially with this conformal coating.
26. methods conformal coating being applied to object, comprising:
A) conformal coating compound is heated with the gaseous monomer forming conformal coating compound,
B) thermally conductive material and this gaseous monomer are combined, form gaseous mixture thus, and
C) under the conformal coating comprising this conformal coating compound and this thermally conductive material is formed at least part of surface of this object condition, this object is contacted with this gaseous mixture, thus this conformal coating is applied to this object.
The method of 27. embodiments 26, wherein this conformal coating compound is parylene compound, and it is at random selected from parylene D, parylene C, parylene N and parylene compound.
The method of 28. embodiments 26 or 27, wherein this thermally conductive material is pottery.
The method of 29. embodiments 26 or 27, wherein this thermally conductive material is selected from aluminium nitride, aluminum oxide and boron nitride.
The method of 30. any one of embodiment 26-29, wherein this thermally conductive material is solid particulate form.
The method of 31. embodiments 30, wherein this solid particulate is about 1.8 microns of-Yue 2.5 microns.
32. methods conformal coating being applied to object, comprising:
A) parylene compound is heated to the temperature of about 125 DEG C of-Yue 200 DEG C to form gaseous state parylene compound, wherein carries out the heating of this parylene compound with two or more heating phases,
B) this gaseous state parylene compound is heated to the temperature of about 650 DEG C of-Yue 700 DEG C with this gaseous state parylene compound of cracking, forms parylene monomer thus,
C), under the condition be formed at least part of surface of object at the conformal coating comprising parylene polymkeric substance, this object is contacted with this parylene monomer, thus coating is applied to this object.
The method of 33. embodiments 32, wherein steps A comprises the temperature this parylene compound being heated to about 125 DEG C of-Yue 180 DEG C and the temperature this parylene compound being heated to about 200 DEG C of-Yue 220 DEG C.
The method of 34. embodiments 32 or 33, wherein carries out the heating of gaseous state parylene compound with two or more stages.
The method of 35. any one of embodiment 32-34, wherein step B comprises and this gaseous state parylene compound is heated to the temperature of about 680 DEG C and this gaseous state parylene compound is heated to the temperature at least about 700 DEG C.
The method of 36. any one of embodiment 32-35, wherein this parylene compound is selected from parylene D, parylene C, parylene N and parylene compound.
The method of 37. any one of embodiment 26-36, before being also included in step C, makes this object contact under the condition of the surface active of this object at this silane with gaseous silane.
The method of 38. embodiments 37, wherein this silane is selected from with one or more silane.
The method of 39. any one of embodiment 26-38, wherein during step C, this object is at the temperature of about 5 DEG C of-Yue 30 DEG C.
The method of 40. any one of embodiment 26-39, wherein this conformal coating is about 100 Ai-Yue 3.0 millimeters.
The method of 41. any one of embodiment 26-40, wherein this conformal coating is about 0.0025 millimeter of-Yue 0.050 mm thick.
The method of 42. any one of embodiment 26-41, wherein this object is electronics, and this electronics is at random selected from communication equipment, loud speaker, mobile phone, audio player, photographic camera, video player, remote-control equipment, global positioning system (GPS), machine element, radarscope, sounding machine, fish detector, anxious feelings Position Indicating Radio Beacon (EPIRB), anxious feelings place transmitter (ELT) and personal locator beacon (PLB).
The method of 43. any one of embodiment 26-41, wherein this object is selected from paper product; Textiles; Artwork; Circuit card; Ocean exploration equipment; Space exploration equipment; Hazardous wastes transportation equipment; Automobile equipment, electromechanical equipment; Military system parts; Ammunition; Rifle; Weapon; Medicine equipment; And biomedical device, wherein biomedical device is at random selected from osophone, the ear implant of cochlea and prosthese.
The method of 44. any one of embodiment 26-43, wherein this surface is plastics, metal, timber, paper or yarn fabric.
45. objects, it has the coating being applied to surface at least partly by the method for any one of embodiment 26-41.
The object of 46. embodiments 45, wherein this surface is outside surface.
47. devices conformal coating being applied to object, comprising:
Evaporator room, comprises at least two humidity provinces;
Pyrolysis chamber, it is operatively connected to this evaporator room; With
Vacuum chamber, it is operatively connected to this pyrolysis chamber.
The device of 48. embodiments 47, also comprises the web member that is connected of this pyrolysis chamber and this vacuum operating chamber ground, wherein this web member can between this pyrolysis chamber and this vacuum chamber delivering gas, and wherein this web member comprises T-valve port.
The device of 49. embodiments 47 or 48, wherein this T-valve port is connected with for the tool operation by thermally conductive material injecting gas, by this web member, this gas is transported to this vacuum chamber from this pyrolysis chamber.
The device of 50. any one of embodiment 47-49, wherein this vacuum chamber comprises vacuum production part and is operatively connected to the sediment chamber of this pyrolysis chamber.
The device of 51. embodiments 50, wherein this vacuum production part comprises one or more vacuum pump.
The device of 52. any one of embodiment 47-51, wherein this evaporator room has two humidity provinces.
The device of 53. any one of embodiment 47-52, wherein this evaporator room is tube furnace.
The device of 54. any one of embodiment 47-53, wherein this pyrolysis chamber has multiple humidity province.
The device of 55. any one of embodiment 47-54, wherein this pyrolysis chamber has two humidity provinces.
The device of 56. any one of embodiment 47-55, wherein this pyrolysis chamber is tube furnace.
Accompanying drawing explanation
Come in conjunction with the drawings can understand the further advantage of the present invention, in accompanying drawing with reference to following explanation:
Figure 1A-E be various parylene and chemical structural drawing.Figure 1A is the figure of parylene N.Figure 1B is the figure of parylene C.Fig. 1 C is the figure of parylene D.Fig. 1 D is parylene figure.Fig. 1 E is silane (has another name called ) figure.
Fig. 2 A is the schematic diagram of an embodiment of device for chemical vapour deposition parylene.
Fig. 2 B is the schematic diagram of an embodiment of the device of the coating applying parylene and powder.
Fig. 3 A-C is that this is coated with the schematic diagram of three embodiments of the object of parylene.Fig. 3 A illustrates the object of the independent stratum being coated with parylene and boron nitride, and wherein boron nitride layer is near this object.Fig. 3 B illustrates the object being coated with parylene and boron nitride independent stratum, and wherein Parylene layer is near object.Fig. 3 C illustrates that between coating, cloth is dispersed with the object of the Parylene layer of boron nitride.
Embodiment
The disclosure provides the composition, the method and apparatus that comprise for object being coated with conformal polymkeric substance in some respects.In some respects, provide conformal coating compound (such as parylene), it can form ultra-thin conforma coating on object.In other side, coating composition is provided, it comprise conformal coating compound (such as parylene) and for improvement of any one additive (one or more additives) in multiple characteristics of conformal coating as thermally conductive material, the plurality of characteristic comprises such as resistivity, thermal conductivity, transmittance, hardness and weather resistance.In other side, provide the object as electronics, it has the ultra-thin conforma coating (such as water-proof coating) of resistance to moisture penetration.Also the method and apparatus being applied ultra-thin conforma coating by vapour deposition at least part of surface of object is provided for.In some aspects, provide multistage heating unit, it is for the vapour deposition of the polymeric coating of ultra-thin conforma.
The discovery of particularly important disclosed in literary composition is that conformal coating can be applied directly to " assembled in advance " or " ready-made " equipment, as consumer electronic devices.Therefore; likely with method and composition disclosed in literary composition conformal coating is applied to all or part of outside surface (such as formed airtight or close to airtight sealing-in) of " assembled in advance " or " ready-made " equipment; and the internal part of proterctive equipment is not subject to environmental damage thus, as moisture penetration and oxidation.Therefore, use method disclosed in literary composition, some object of such as electronics (device) will not take apart, be coated with and then ressemble, but can be coated with in its " ready-made " state.The conformal coating such as comprising parylene compound can be applied to the circuit card of electronic equipment internal and the outside surface (such as with single stage method) of electronics by method disclosed in literary composition.Therefore, the method may be used for the special favourable condition with " ready-made " electronics.Method disclosed in literary composition also to improving easness and efficiency is very useful, can conformally be coated with other object a lot of by the method.
The object of said composition disclosed in applicable literary composition and the method conformal coating includes but not limited to electronics, photographic camera, circuit card, computer chip, paper, yarn fabric, battery, loud speaker, solid fuel, sanitation, Hazardous wastes transportation equipment, Hazardous wastes, medicine equipment, uses the equipment, space suit etc. of Yu Haiyang and space probation.In some embodiments, this object is electronics, and it is at random selected from communication equipment, loud speaker, mobile phone, audio player, photographic camera, video player, remote-control equipment, global positioning system (GPS), machine element, radarscope, sounding machine, fish detector, anxious feelings Position Indicating Radio Beacon (EPIRB), anxious feelings place transmitter (ELT) and personal locator beacon (PLB).
In some embodiments, this object be not suitable for water-immersed those, include but not limited to that ready-made electronic unit is as other object open in kneetop computer, photographic camera, receiving set, mobile phone, paper, yarn fabric, battery, loud speaker, solid fuel, medical facilities, paper, space suit and literary composition or that prior art is known.In other embodiments, this object can be injured object when being immersed in the water, such as but not limited to metallic screw and other hardware, paper product and yarn fabric.In other embodiments, this object can be need those of snappiness function, such as sound speaker.In further embodiment, this object can be wish to make it from those of oxygen, such as but not limited to fuel cell, and weapon live shell and ammunition.In further embodiment, this object can be those that must isolate with environment such as Hazardous wastes product.In further embodiment, this object can be need to protect it from those of Chemical exposure, such as but not limited to Hazardous wastes transportation equipment.
This coating can be applied to the object with kinds of surface material, comprises such as pottery, polymkeric substance, plastics, metal, solidifying liq etc.In some embodiments, this object to be coated can be heating or heat dissipation and/or need the object of rough coatings.In some embodiments, this object can generate heat or absorb heat, as cold packaging, solidifying liq and gas and heat pump.In some embodiments, object should be subject to violent physical impact in its usage period.In some respects, the method that may be used for being coated with such object and surface is provided in the disclosure.
This conformal coating disclosed in literary composition can be applicable to user's electronics, merchant navy vessel, yacht, military affairs (aerospace and defence), industry and the equipment of medical industry and other broad range.In some instances, this conformal coating is specified to " sealing " device.Such coating avoids, by being exposed to moisture, being immersed in the water to such as protecting the device be generally used in boats and ships and hazardous environment, the impact of dust, high wind and chemical and the operation troubles that causes.This coating can improve tolerance and the persistence of perishable and deteriorated high value special product and operating equipment.
In some embodiments, this conformal coating can on the inside and outside surface of object, and especially, this conformal coating in this object outside can be mutually continuous with this conformal coating at this interior of articles.
Wish that use-case is as in the pretreated example of the compound of organic compound such as silane at some, any object with the solid state surface that can be exposed to pre-treatment compound (such as in its gas phase) is suitable.Therefore, when uncoated object may be not suitable for being immersed in the water, embodiment provide be coated with useful silane as the object of pretreated at least one conformal coating compound.Be not suitable for water-immersed uncoated object can be immersed in the water after those of partially or completely losing functionality.In preferred embodiments, this object can be when uncoated be immersed in the water with subsequent drying after become those of afunction at least in part, include but not limited to ready-made electronic unit, as kneetop computer, receiving set and mobile phone.
If there is opening at this outside surface of this object, described opening allows this conformal coating compound gas (optionally and/or silane gas) to enter interior of articles, then the object at least scribbling conformal coating compound (and optionally using silane pretreatment) can have conformal coating in the outside of this object with at this interior of articles.In a preferred embodiment, this outside conformal coating is mutually continuous with inner conformal coating.
Coated object is particluarly suitable for the application in the severe environmental conditions that army runs into.In some embodiments, coated object can meet the application requiring of military standard MILPRF-38534, the general property requirement of hybrid microcircuit, multi-chip module (MCM) and similar devices.In some embodiments, coated object can meet the application requiring of military standard MIL-PRF-38535, for the general property requirement of unicircuit or microcircuit.In some embodiments, coated object can meet the application requiring of military standard MIL-PRF-38534 and MIL-PRF-38535 simultaneously.
Another embodiment comprises the object scribbling parylene and boron nitride composition (such as by method disclosed herein).With the object that the method is to be coated comprise be suitable at least part of surface of this object formed comprise the condition of the conformal coating of parylene polymkeric substance and boron nitride under, there is any object of the solid surface that can contact with boron nitride with gaseous state parylene monomer.Such object includes but not limited to disclosed in electronics, circuit card, paper, yarn fabric, battery, loud speaker, solid fuel, medical facilities, Hazardous wastes transportation equipment, Hazardous wastes, the equipment using Yu Haiyang and space probation, space suit and literary composition and/or other object known in the art.In some embodiments, this object can be heating or heat dissipation, such as but not limited to computer, the drilling equipment for depth drill, the electronics that exposes on oil rig.In other embodiments, this object can be the object of the coarse especially coating of requirement.
If there is opening at the outside surface of this object, described opening allows the gaseous mixture comprising this conformal coating compound and this thermally conductive material (such as boron nitride powder) to enter the inside of this object, then the object at least scribbling conformal coating compound and thermally conductive material such as boron nitride can have conformal coating in the outside of this object and in the inside of this object.In preferred embodiments, this outside conformal coating is mutually continuous with this inner conformal coating.Such as, electronics such as mobile phone on circuit card in this equipment and battery and can have conformal coating on the keyboard and screen of mobile phone.
In some embodiments, parylene and boron nitride can between cloth be dispersed in the coating 8' on object 7'.Fig. 3 C.In some embodiments, between parylene and boron nitride, cloth dispersion can be on a molecular scale.In some embodiments, between parylene and boron nitride, the coating of cloth dispersion is about 0.0025 millimeter of-Yue 0.050 millimeter.In other embodiments, this coating that between parylene and boron nitride, cloth disperses is for being less than about 2.0 millimeters.
In other embodiments, in the independent stratum of this object, find that at least one conformal coating is as parylene conformal coating and boron nitride.The conformal coating considered includes but not limited to poly-naphthalene (1-4-naphthalene), diamines (o-tolidine), tetrafluoroethylene polyimide.In preferred embodiments, polymeric coating can be parylene C.In other embodiments, the parylene of other form can be used, include but not limited to parylene N, parylene D and parylene in preferred embodiments, the layer of boron nitride and polymeric coating is each is about 0.05 mm of thickness.In other preferred embodiment, every layer mainly can comprise polymeric coating or mainly comprise boron nitride.In some embodiments, nitric acid boron layer 2' can than Parylene layer 3' closer to object 1'.Fig. 3 A.In other embodiments, Parylene layer 5' can than boron nitride 6' closer to object 4'.Fig. 3 B.
Conformal composition/coating
According to some aspects, provide the coating composition comprising conformal coating compound and thermally conductive material." conformal coating compound " that use in literary composition is the compound (compound of such as partially purified compound, purifying, the compound of synthesis, the natural compounds be separated) of the polymeric coating that can form the ultra-thin free of pinholes consistent with the geometrical shape on this surface from the teeth outwards.In literary composition, such coating is called " conformal coating ".Conformal coating compound can be called equally " coating compound of conformal (conformational) ".Conformal coating compound can be applied to body surface as coating by the various methods comprising such as chemical vapour deposition.Such as, conformal coating compound gaseous monomer can monomer condensation, be adsorbed onto surface be polymerized together with concomitantly thus under forming the condition of free of pinholes conformal coating from the teeth outwards with this surface contact of object.According to application, the thickness range of coating can be until 50 microns or larger from about 10 dusts.Such as, coating can have the thickness of maximum 3 millimeters.In some embodiments, coating has the thickness of about 0.0025 millimeter of-Yue 0.050 millimeter.Conformal coating can be electrical insulator, and (such as volume specific resistance is greater than 10 10ohm * centimetre).Alternatively, or in addition, conformal polymkeric substance has the hardness (Rockwell hardness number) that about R70-is about R90.According to application, conformal coating also can be hydrophobic.Conformal coating compound can comprise monomer and polymkeric substance (such as dimer, polymer) form and phase (such as gaseous state, solid-state) in a variety of manners to be existed.
Useful especially conformal coating compound is parylene compound.Parylene is the class name of unique series of compounds member.Be called that the basic element of this series of parylene N is poly-para xylylene, by two-compound that parylene ([2,2] are to Polycyclic aromatic hydrocarbons) is manufactured.Parylene N is completely linear high crystalline material.The second commercially member of parylene C-this series is prepared by the same monomer replacing a fragrant hydrogen modification only by chlorine atom.The third member of parylene D-this series is prepared by the same monomer being replaced two fragrant hydrogen modifications by chlorine atom.Parylene D is similar to parylene C in performance, has the extra ability of bearing more operation at high temperature.In some embodiments, parylene can be by replacing various chemical part and derived from the parylene of poly-para xylylene.In preferred embodiments, parylene can form linear high crystalline material.Also other parylene molecule can be used, derivative as escribed above and analogue.In some embodiments, can use by commercial source such as SpecialtyCoatingSystems (SCS), the parylene compound that Inc. provides.
Conformal coating compound also can include but not limited to poly-naphthalene (Isosorbide-5-Nitrae-naphthalene), diamines (o-tolidine), tetrafluoroethylene and polyimide.As is well known in the art, these polymkeric substance are applied by standard technique.
The conformal coating comprising parylene can be thermal isolation, and not easily makes coated object by Thermal release in environment.Object such as the electronics of this characteristic to heating of parylene is debatable, if hot indiffusion, then can cause the infringement ahead of time of equipment.Some parylene class conformal coatings disclosed in literary composition comprise the thermally conductive material promoted from coated object dissipation of heat.Compared with singly having the coating of parylene, by rejected heat or absorption heat, to coating, such conformal coating requires that the object of heat radiation is useful.The class of parylene disclosed in literary composition conformal coating composition also can increase hardness compared with singly having the coating of parylene.Therefore, parylene class coating composition also can to requiring that the object being coated with coarse supercoat is useful, as will be stood those of violent physical impact in their life-span.
Therefore, according to some aspects of the disclosure, conformal coating compound can be combined to obtain the coating composition compared with independent conformal coating compound with the performance that one or more improve with other additive.Such as, the coating composition having and improve thermal heat transfer capability can be produced." thermally conductive material " that use in literary composition is such material, and this material can combine to form the coating composition with the thermal conductivity larger than the thermal conductivity of independent conformal coating compound with conformal coating compound.Disclosed in literary composition, this thermally conductive material typically has higher thermal conductivity compared with conformal coating compound itself.The thermally conductive material of example has and is at least 1W/ (m*K), is at least 5W/ (m*K), is at least 10W/ (m*K), be at least 15W/ (m*K), or be at least the thermal conductivity of 20W/ (m*K).The measuring method of various thermal conductivity is there is in experienced technician by understanding, comprise the testing method such as proposed in following standard: ieee standard 98-2002, " comment the standard of the test procedure of valency warmly for preparing solid electrical insulation material ", ISBN0-7381-3277-2; ASTM standard D5470-06, " standard test methods for the heat transfer performance of heat-conduction electric insulation material "; ASTM standard E1225-04, " utilize and completely cut off-compare-solid conductive heat standard test methods of Axial Thermal Flow Technique "; ASTM standard D5930-01, " utilizing the plastic hot conductance standard test methods of transition source technology "; With ISO22007-2:2008 " mensuration-part 2 of plastics-thermal conductivity and thermal diffusivity: transition flat heat source (heat dish) method ".The thermally conductive material of example comprises various stupalith, comprises such as silicon-dioxide and silicon nitride.Thermally conductive material also can be selected from: aluminium nitride, aluminum oxide and boron nitride.Other thermally conductive material comprises such as titanium dioxide (TiO 2).Show for a person skilled in the art and easily know other thermally conductive material in addition.In some embodiments, this coating composition comprises conformal coating compound and lanthanum hexaborane (LaB 6).In some embodiments, this coating composition comprises conformal coating compound and silicon-dioxide (SiO 2).
In some respects, comprise parylene compound, as the coating composition of conformal coating compound and thermally conductive material, there is the thermal conductivity larger than independent parylene compound, in some cases, larger than the thermal conductivity of independent parylene compound about 10%.In some embodiments, the thermal conductivity of such coating composition is larger than independent parylene compound about 5-10%.Alternately or this other places, this coating composition can have the hardness larger than independent parylene, and has particularly had the hardness of about 10% larger than independent parylene.
The thermally conductive material of example is boron nitride.Boron nitride (BN) is binary compound, is made up of the boron of equal numbers and nitrogen-atoms.Therefore its empirical formula is BN.Boron nitride is isoelectronic with carbon, and as carbon, boron nitride exists with various polymorphous form, and one of them is similar to diamond, and another is similar to graphite.The polymorphic similar with diamond be one of known the hardest material and and graphite-like like polymorphic be useful lubricant.In addition, these two kinds in these polymorphics demonstrate wave absorbtion matter.(Silberberg, MartinS.Chemistry:TheMolecularNatureofMatterandChange, the 5th edition .NewYork:McGraw-Hill, 2009. the 483rd pages).Therefore, in some respects, the disclosure provides the coating composition that can comprise parylene compound and boron nitride.In these compositions, parylene compound and boron nitride can between cloth dispersion (such as boron nitride particle dispersibles in parylene polymkeric substance).Although any parylene compound can be used in these compositions, preferably parylene D, parylene C, parylene N and parylene compound, and particularly preferably parylene C compound.In these compositions, boron nitride can have hexagon sheet structure.In some embodiments, the weight of boron nitride can be less than about 80% for the gross weight of parylene compound and boron nitride.In some embodiments, the weight of boron nitride can be parylene compound and boron nitride gross weight at the most about 1%, at the most about 2%, at the most about 3%, at the most about 5%, at the most about 10% or at the most about 20%.
In some embodiments, coating composition can primarily of parylene and boron nitride composition.In other embodiments, coating composition is made up of parylene and boron nitride.In some embodiments, parylene and boron nitride account for composition at least about 50%, at least about 70%, at least about 90%, at least about 95%, at least about 99% or at least about 99.9%.
In some embodiments, the coating on object comprises parylene and boron nitride, in the coating this boron nitride can between cloth dispersion (being dispersed in the polymkeric substance of parylene compound) parylene in.Although any parylene may be used for these objects, preferably parylene C, parylene N, parylene D and parylene and particularly preferably parylene C.In some embodiments, this coating is the thickness of about 0.0025 millimeter of-Yue 0.050 millimeter.
Although in some embodiments, this parylene-boron nitride coating composition can comprise parylene C, and in other embodiments, it can comprise parylene D, parylene N or parylene figure 1A, 1B, 1C and 1D.In some embodiments, by the replacement of various chemical part, parylene can derived from parylene N or poly-para xylylene.In preferred embodiments, parylene forms completely linear high crystalline material.In some embodiments, boron nitride has hexagon sheet structure.In some embodiments, in this parylene composition, parylene and boron nitride form independently layer.In some embodiments, in the layer of parylene and boron nitride, parylene composition can have strong covalent bond.In other embodiments, between parylene and the layer of boron nitride, parylene composition can have weak Van der Waals force.
In some embodiments, parylene composition has the thermal conductivity larger than independent parylene, and such as it is with (cal/sec)/cm 2/ C measures.In certain embodiments, parylene-boron nitride composition had larger than independent parylene about 10%, about 30% or about 50% thermal conductivity.In other embodiments, parylene composition can have the hardness that according to Rockwell hardness test defines larger than independent parylene.E.L.Tobolski&A.Fee,MacroindentationHardnessTestingASMHandbook.Volume8:MechanicalTestingandEvaluation,203-211(ASMInternational，2000)。In certain embodiments, parylene-boron nitride composition had larger than independent parylene about 10%, about 30%, about 50% or about 90% hardness.In parylene-boron nitride composition, the relative quantity of parylene and boron nitride can determine thermal conductivity and the hardness of composition.In some embodiments, will lower than about 5%, lower than about 10%, lower than about 20%, lower than about 40%, lower than about 60% or lower than about 80% in the gross weight of the weight of boron nitride parylene and boron nitride in the composition.In some embodiments, the weight of boron nitride in parylene and boron nitride gross weight be in the composition at the most about 1%, at the most about 2%, at the most about 3% or at the most about 4%.
In some cases, object needs to anticipate to make body surface be easier to bond conformal coating, as passed through to apply silane.Pretreatment process needs object to be immersed in the solution comprising suitable compound, comprises such as organic compound and, as silane, then removes this object from silane-solution and make object dry.Such pre-treatment can improve the surface adhesion of conformal coating compound and raising (improvement) is mechanical and electrical properties.
Under object immerses the destroyed situation of solution possibility, such as electronics, can use alternative pretreatment process, and it comprises uses silane coated object.Such as, gas phase silane can be applied to the object be coated with the conformal coating comprising parylene compound.This can make some objects such as be not suitable for immersing but needing to be coated with parylene with pretreated those of silane surfaces.
On the other hand, the disclosure comprises the object with at least one conformal coating compound coating and at least one boron nitride coating.In some embodiments, conformal coating compound can be poly-naphthalene, diamines, tetrafluoroethylene, polyimide.Parylene C, parylene N, parylene D or parylene and parylene C can be preferably.In some embodiments, boron nitride coating can than polymeric coating closer to object, but in other embodiments, the comparable boron nitride coating of polymeric coating is closer to object.In some embodiments, each to be at least about 0.05mm thick for boron nitride and polymeric coating.
Conformal coating device
Also the device that can be used for being applied ultra-thin conforma coating at body surface by vapour deposition is disclosed.In other side, disclose the multistage heating unit for vapour deposition ultra-thin conforma polymeric coating.
In some respects, the disclosure provides the device applying to comprise the conformal coating of parylene, and it comprises the evaporator room with multiple (two or more) humidity province, and it is operatively connected to pyrolysis chamber, and this pyrolysis chamber is operatively connected to vacuum chamber.In some embodiments, this vacuum chamber can comprise the sediment chamber that operability is connected to pyrolysis chamber and vacuum tool, and this vacuum tool can be one or more vacuum pump.In some embodiments, this evaporator room can have multiple humidity province, preferably two humidity provinces.In other embodiments, this pyrolysis chamber can have multiple humidity province, preferably two humidity provinces.In some embodiments, this evaporator room and/or this pyrolysis chamber can be tube furnaces.
For conformal coating compound chemical vapour deposition is known in the art to other device on object.See such as, U.S. Patent number 4,945,856,5,078,091,5,268,033,5,488,833,5,534,068,5,536,319,5,536,321,5,536,322,5,538,758,5,556,473,5,641,358,5,709,753,6,406,544,6,737,224 and 6,406, No. 544, in the text they are incorporated by reference.
On the other hand, the disclosure provides the device applying to comprise the conformal coating of conformal coating compound and thermally conductive material, it can comprise the evaporator room being operatively connected to pyrolysis chamber, this pyrolysis chamber is operatively connected to vacuum chamber, and wherein web member comprises the T-valve port operatively this pyrolysis chamber being connected to this vacuum chamber.In some embodiments, the web member operatively connecting pyrolysis chamber and vacuum chamber can be instrument gas being sent to this vacuum chamber from this pyrolysis chamber.In other embodiments, this T-valve port can be operatively be connected to the instrument in the gas for solid particulate (such as powder) or other gas inject being carried by web member.In some embodiments, this vacuum chamber can comprise the sediment chamber being operatively connected to pyrolysis chamber and vacuum tool, and wherein this vacuum tool can be one or more vacuum pump.
Embodiment is the device for chemical vapour deposition parylene, and it can comprise evaporator room and/or the pyrolysis chamber of improvement.Although this device can be used in particular for chemical vapour deposition parylene, also can be used to other conformal coating compound of vapour deposition and include but not limited to poly-naphthalene (Isosorbide-5-Nitrae-naphthalene), diamines (o-tolidine), tetrafluoroethylene polyimide and other compound well known by persons skilled in the art.In some embodiments, this device comprises the evaporator room and/or pyrolysis chamber with multiple humidity province.Although do not limit the operation of this device, think by the different desired temperature of each indoor permission, improve the heating rate of parylene.Multi-region evaporation and pyrolysis chamber can make parylene be cracked into monomer equably, and the final thickness of the parylene coatings on object is controlled better.The time that parylene can keep monomer longer in sediment chamber, therefore it can be dispersed throughout sediment chamber better.
Fig. 2 A illustrates parylene apparatus for coating.Evaporator room 1 can have two humidity provinces 10 and 11.Pyrolysis chamber 3 also has two humidity provinces 12 and 13.By from evaporator room 1 by the parts 2 of gas communication to pyrolysis chamber 3, evaporator room 1 operatively can being connected with pyrolysis chamber 3.Pyrolysis chamber 3 operatively can be connected with vacuum chamber 14, and this vacuum chamber can comprise sediment chamber 6 and operatively be connected to vacuum tool 9 by parts 8, and parts 8 can vacuumize in sediment chamber 6.Gas can be communicated to vacuum chamber 14 and comprise valve 4 by the parts 5 pyrolysis chamber 3 being operatively connected to vacuum chamber 14 from pyrolysis chamber 3, this valve can regulate the flowing from pyrolysis chamber 3 to the gas of vacuum system 14.
Evaporator room 1 can be solid to be heated to any stove/heating system of about 150 DEG C to about 200 DEG C.In preferred embodiments, this evaporator room can by gas heating to 1200 DEG C.In some embodiments, evaporator room 1 can air inclusion.Evaporator room 1 also can formation temperature is different in its heating chamber district.Finally, evaporator room 1 can keep high vacuum.In preferred embodiments, evaporator room can maintain the vacuum at least about 0.1 holder.
Evaporator room 1 is operatively connected to pyrolysis chamber 3 by the many parts known by those of ordinary skill in the art.Operability web member between evaporator room 1 and pyrolysis chamber 3 can be make gas lead to the web member of pyrolysis chamber from evaporator room 1 in some embodiments.In some embodiments, these parts 2 can especially Glass tubing, rice steamer or metal tube.In other embodiments, these parts 2 also can comprise valve, temperature sensor, other sensor well known to those skilled in the art and other conventional components.
Pyrolysis chamber 3 can be can by any stove/heating system of gas heating to about 650 DEG C of-Yue 700 DEG C.In some embodiments, pyrolysis chamber 3 can air inclusion.In some embodiments, pyrolysis chamber 3 can produce the district of differing temps in its heating chamber.Finally, in some embodiments, pyrolysis chamber 3 can keep high vacuum.In preferred embodiments, evaporator room can maintain the vacuum at least about 0.1 holder.
Evaporator room and pyrolysis chamber preferably can at the stoves of their the two or more humidity province of indoor generation, and in preferred embodiments, this stove and accessory has two humidity provinces.In some embodiments, this humidity province is positioned at furnace chamber, and before leaving stove, gas will move sequentially through humidity province like this.Preferably this stove and accessory has the top temperature of 1200 DEG C.In preferred embodiments, this stove is tube furnace.In other embodiments, this stove and accessory has glass retort.The special parameter of an embodiment of the two district's stoves being suitable for use as evaporator room and/or pyrolysis chamber can be seen in example 2.
Be connected to vacuum system 14 to many operation of components that pyrolysis chamber 3 is known by those of ordinary skill in the art.Operability web member between pyrolysis chamber 3 and vacuum system 14 can be make gas lead to the web member of vacuum system 14 from pyrolysis chamber 3 in some embodiments.In some embodiments, these parts 5 can especially Glass tubing, rice steamer or metal tube.In other embodiments, these parts 5 also can comprise valve, temperature sensor, other sensor well known to those skilled in the art and other conventional components.In preferred embodiments, these parts 5 can wrap and expand one or more valve 4, by the adjustable gas stream by parts 5 of this valve 4.
Vacuum system 14 can comprise sediment chamber 6, and it is operatively connected to vacuum tool 9 by 8.In some embodiments, vacuum can keep until at least about 0.05 holder with preferably at least about 1x10 by operability web member 8 -4holder.In other embodiments, vacuum tool 9 can be one or more vacuum pump, and it can vacuumize and be at least about 0.05 holder in sediment chamber, and preferably at least about 1x10 -4holder.In some embodiments, sediment chamber 6 has the size being enough to contain object 7 to be coated.In other embodiments, sediment chamber 6 can keep at least about 0.05 holder with preferably at least about 1x10 -4the vacuum of holder scope.
Other embodiment disclosed in literary composition is the device that can be used for chemical vapour deposition parylene and boron nitride composition, and it comprises the instrument before the deposition powder being injected chemical evapn.Fig. 2 B shows the apparatus for coating according to an embodiment.Evaporator room 15 is operatively connected with pyrolysis chamber 17 by parts 16, these parts 16 can from evaporator room 15 by gas communication to pyrolysis chamber 17.Pyrolysis chamber 17 is operatively connected with vacuum chamber 25, and this vacuum chamber is comprised sediment chamber 21 and is operatively connected with vacuum tool 24 by parts 23, and these parts 23 can vacuumize in sediment chamber 21.Gas can be communicated to vacuum chamber 25 and also can comprise valve 18 by the parts 19 pyrolysis chamber 17 being operatively connected to vacuum chamber 25 from pyrolysis chamber 17, this valve can regulate the gas stream from pyrolysis chamber 17 to vacuum system 25.Parts 19 also can have T-valve port 20, and it is also referred to as " T joint ".In some embodiments, T-valve port operatively can be connected to instrument powder being injected the gas transmitted by parts 19.In some embodiments, the instrument injecting powder includes but not limited to baking oven, powder coated equipment and pressurized air.In preferred embodiments, the instrument injecting powder comprises the powder container being operatively connected to electrovalve, and it is operatively connected to T-valve port.
Evaporator room 15 can be any stove/heating system, and solid can be heated to about 150 DEG C to about 200 DEG C by it.In some embodiments, evaporator room 15 can air inclusion.Finally, evaporator room 15 can keep high vacuum.
Be connected to pyrolysis chamber 17 to many operation of components that evaporator room 15 is known by those of ordinary skill in the art.Operability web member between evaporator room 15 and pyrolysis chamber 17 can be make gas lead to the web member of pyrolysis chamber from evaporator room 15 in some embodiments.In some embodiments, these parts 16 can especially Glass tubing, rice steamer or metal tube.In other embodiments, these parts 16 also can comprise valve, temperature sensor, other sensor well known to those skilled in the art and other conventional components.
Pyrolysis chamber 17 can be can by any stove/heating system of gas heating to about 650 DEG C of-Yue 700 DEG C.In some embodiments, pyrolysis chamber 17 can air inclusion.Finally, in some embodiments, pyrolysis chamber 17 can keep high vacuum, preferably at least 0.1 holder.
By many parts well known to those skilled in the art, pyrolysis chamber 17 can be operatively connected to vacuum system 25.Operability web member between pyrolysis chamber 17 and vacuum system 25 can be make gas lead to the web member of vacuum system 25 from pyrolysis chamber 17 in some embodiments.In some embodiments, these parts 19 can especially Glass tubing, rice steamer or metal tube.In other embodiments, these parts 19 can comprise valve, temperature sensor, other sensor well known to those skilled in the art and other conventional components.In preferred embodiments, parts 19 can comprise one or more valve 4, by the adjustable gas stream by parts 19 of this valve 4.
Vacuum system 25 can comprise sediment chamber 21, and it can operatively be connected to vacuum tool 24 by parts 23.In some embodiments, vacuum can remain at least about 0.05 holder by web member 8.In other embodiments, vacuum tool 24 can be one or more vacuum pump, and it can vacuumize and be at least about 0.05 holder in sediment chamber.In some embodiments, sediment chamber 21 has is enough to contain object 22 size to be coated.In other embodiments, sediment chamber 21 can keep the vacuum at least about 0.05 holder.
Conformal coating method
Also the method for being applied ultra-thin conforma coating on a surface of an by vapour deposition is disclosed.In some respects, the multistage heating means for ultra-thin conforma coat vapor deposition are disclosed.In other side, disclose the method deposited as the ultra-thin conforma coat vapor of thermally conductive material for comprising additive.
The deposition method of conformal coating disclosed in literary composition preferably carries out under negative pressure in closed system.Such as, under low pressure 0.1 hold in the palm from vapour deposition parylene compound to form conformal coating according to appointment.In this embodiment, first step is at about 150 DEG C of vaporizing solid parylene dimers in evaporator room.Second step be in pyrolysis chamber such as at about 680 DEG C dimer in the quantitative cleavage (pyrolysis) of two methylene radical-methene keys, to produce stable monomer diradical, to parylene.Finally, monomer in gaseous form enters room temperature deposition room, and in sediment chamber, it adsorbs and is polymerized on object to be coated.This closed system preferably has for being evaporated, the independently room of pyrolysis and deposition parylene, and described room is connected with suitable pipe fitting or tubular connection.
The conformal coating compound of the method can be provided in a variety of manners with purity level.Conformal coating compound is provided in some embodiments with the purity level of about 90%, about 92.5%, about 95%, about 96%, about 97%, about 98%, about 98.5%, about 99%, about 99.5%, about 99.9% or maximum about 100% purity.In some embodiments, never homology and/or different purity level provide conformal coating compound as the blend of conformal coating compound (such as having identical type, as parylene C).In some embodiments, as polymorphic type conformal coating compound (such as parylene C, parylene N, parylene D, parylene ) blend conformal coating compound is provided.
According to other side, method conformal coating being applied to object relates to: parylene compound is heated to the temperature of about 125 DEG C of-Yue 200 DEG C to form gaseous state parylene compound, wherein this heating of parylene compound was carried out with two or more heating phases, this gaseous state parylene compound is heated to the temperature of about 650 DEG C of-Yue 700 DEG C with cracked gaseous parylene compound, form parylene monomer thus, and under the condition be formed at least part of surface of object at the conformal coating comprising parylene polymkeric substance, object is contacted with this parylene monomer, thus coating is applied to this object.In some embodiments, parylene compound is heated to the temperature of about 125 DEG C of-Yue 180 DEG C, is then heated to the temperature of about 200 DEG C of-Yue 220 DEG C.In some embodiments, with two or more stepwise heating gaseous state parylene compounds.Such as, gaseous state parylene compound can be heated to the temperature of about 680 DEG C, then be heated to the temperature at least about 700 DEG C.
In some cases, the method is used in vacuum chamber the thin uniform layer using the practice of standard chemical vapor deposition to apply to comprise the conformal coating of parylene at 25 DEG C, and can apply with the thickness range of such as 0.01-3.0 millimeter according to the article of coating.These article, just can weather and water-fast once coating, and the exposure under the exposure that can stand under extreme weather conditions and most of chemical.Any solid surface can be coated with, comprise plastics, metal, timber, paper and yarn fabric.Disclosed in literary composition, exemplary application includes but not limited to: electronics is as mobile phone, receiving set; Circuit card and loud speaker; With equipment or the oil drilling machine operation of Yu Haiyang and space probation; Hazardous wastes transportation equipment; Medical instruments; Paper product; And yarn fabric.
In some embodiments, the time span that object can contact with gaseous state parylene monomer can change the final thickness of the parylene coatings controlled on object.In various embodiments, the final thickness of parylene coatings is about 100 Ai-Yue 3.0 millimeters.In some embodiments, the final thickness of parylene coatings is about 0.5 millimeter of-Yue 3.0 millimeters.In some embodiments, the final thickness of parylene coatings is about 0.0025 millimeter of-Yue 0.050 millimeter.Preferably, depend on the temperature of sediment chamber, the sedimentation time of available about 2 hours-Yue 18 hours (such as 5 hours) obtains the parylene coatings thickness of about 0.002 inch (0.050 millimeter).The selection of parylene coatings final thickness can depend on object to be coated and the end-use of object to a certain extent.For the object such as power button needing certain functionalization action, thinner final coating is desirable.For the object that will soak in water, thicker coating is desirable.
Some coating composition such as comprise parylene compound those to the binding property of various object, by improving with the surface that organic compound is as to be coated in silane pretreatment before applying conformal coating.Silane treatment forms free radical on the cohesible body surface of parylene.For this purpose, employ two kinds of silane: the vinyl trichlorosilane in dimethylbenzene, Virahol or freonll-11, and γ-methacryloxypropyl trimethoxy silane in methanol-water solvent ( silane or silane).But electronic unit can not allow electric pathway, this electric pathway also develops by directly contacting with the liquid that can conduct electricity, and they do not allow the residual ion often stayed after its water of dipping or liquid evaporation yet.Even without growing immediately, due to the voltage between conductor on electronic components, dendritic conductor can grow after a while.These short circuits caused by conductive fluid and dendrimer can make battery spill and make strong current to flow into the field of originally not wishing their places, and cause undesirable circuit operation or damage.If usually it is preferred that electronic equipment part such as circuit card must silane-coating and parylene independently sometimes, be then assembled into finished product.
In some respects, the disclosure provide to object silane-coating as the method of silane.In some embodiments, the method can comprise: (A.) is vaporized to form gaseous silane by silane being heated to its gasification point; (B.) at least part of surface (such as intending coating as comprised the surface of the conformal coating of parylene) of object to be coated is contacted with the gaseous silane of steps A.In some embodiments, this silane can be or and can be preferably in some embodiments, in step, silane can with the 50:50 solution of water in gasify.In some embodiments, in step, silane can 80 DEG C of gasified about 2 hours.
In some respects, the disclosure is provided for the pre-treatment of applying silane and the parylene coatings compound method at least part of surface of object.The method can comprise: (A.) is by being heated 150-200 DEG C to make the gasification of parylene dimer to form gaseous state parylene dimer; (B.) by gaseous state parylene dimer is heated to 650 DEG C-700 DEG C, gaseous state parylene dimer is cracked into gaseous state parylene monomer; (C.) make its gasification to form gaseous silane by silane being heated to its gasification point; (D.) object of parylene to be coated is contacted with the gaseous silane of step C; (E.) object of parylene to be coated is contacted time enough to deposit the parylene coatings of final thickness with the gaseous state parylene monomer of step B.In some embodiments, this parylene is selected from parylene D, parylene C, parylene N, parylene HT and the parylene derived from parylene N, and is preferably parylene C.In some embodiments, silane can be or and be preferably SilquestA-174.
In some embodiments, in step, parylene dimer by two or more stages, and preferably gasifies with two stepwise heatings of about 170 DEG C and about 200 DEG C of-Yue 220 DEG C.In some embodiments, in stepb, by two or more stages, and preferably with about 680 DEG C with carry out cracking parylene dimer to two stepwise heatings being greater than about 700 DEG C.In some embodiments, in step C, silane can with the 50:50 solution of water in gasify.In other embodiments, in step C, silane can 80 DEG C of gasified about 2 hours.In some embodiments, the final thickness of parylene coatings can be about 100 Ai-Yue 3.0 millimeters.
Comprise and comprising the steps: by the method for silane compound pre-treatment object
A. by being heated to 150 DEG C-200 DEG C, parylene dimer is gasified to form gaseous state parylene dimer;
B. by gaseous state parylene dimer being heated to about 650 DEG C of-Yue 700 DEG C, gaseous state parylene dimer is cracked into gaseous state parylene monomer;
C. be vaporized to form gaseous silane by silane being heated to its gasification point;
D. object to be coated is contacted with gaseous silane; With
E. object to be coated is contacted time enough to deposit the parylene coatings of final thickness with gaseous state parylene monomer.Current any mode for object being coated with parylene that steps A, B and E know by those of ordinary skill in the art is carried out.In addition, any one step can be different from the order provided and carries out.Such as, step D can carry out before steps A.In addition, some steps can be carried out with other step simultaneously: such as, and step D can carry out with steps A simultaneously.In preferred embodiments, parylene C can be used.See Figure 1B.In other embodiments, the parylene of other form can be used, include but not limited to parylene N, parylene D and parylene see Figure 1A, 1B and 1D.In some embodiments, by the replacement of various chemical part, parylene can derived from parylene N or poly-para xylylene.In preferred embodiments, parylene can form completely linear high crystalline material.In embodiment part, with to how carrying out the method more detailed description to propose the embodiment of the method.
In some embodiments, steps A-parylene dimer is gasified to form gaseous state parylene dimer by being heated to 150 DEG C-200 DEG C, can carry out in furnace chamber.In preferred embodiments, parylene dimer is heated to stage by stage 150 DEG C-200 DEG C of hope.In some embodiments, dimeric this of parylene heats stage by stage and occurs in multi-region furnace chamber, and this furnace chamber embodies different temperature set-points in furnace chamber different zones.Although do not limit the working method of this heating steps stage by stage, but it is believed that the method make parylene equably " cracking " thickness of the final parylene coatings on object is better controlled, because it will maintain the monomer longer time so that it can spread all over sediment chamber in sediment chamber for monomer.In some embodiments, parylene dimer is by with 2 stages, 3 stages, 4 stages or be greater than 4 stepwise heatings and gasify.In some embodiments, phase temperature is about 170 DEG C and about 200 DEG C of-Yue 220 DEG C.Although do not limit specific theory, contriver thinks, is gasified by parylene at the first evaporation stage, and at this steam of subordinate phase, by being preheating to when it enters pyrolysis chamber, it will be cracked into the temperature of monomer with higher rate.
In some embodiments, step B-gaseous state parylene dimer is cracked into gaseous state parylene monomer by gaseous state parylene dimer is heated to 650 DEG C-700 DEG C, can carry out in furnace chamber.In preferred embodiments, gaseous state parylene dimer is heated to stage by stage 650 DEG C-700 DEG C of hope.In some embodiments, dimeric this of gaseous state parylene heats stage by stage and occurs in multi-region furnace chamber, and this furnace chamber embodies different temperature set-points in furnace chamber different zones.In some embodiments, parylene dimer is by with 2 stages, 3 stages, 4 stages or be greater than 4 stepwise heatings and be cracked into monomer.In some embodiments, phase temperature is about 680 DEG C and is greater than about 700 DEG C.Although do not limit specific theory, in the first stage that it is believed that heating, gaseous state parylene dimer will be cracked into monomer, in the subordinate phase of heating, gaseous monomer will be further heated and exceed about 700 DEG C to ensure that gaseous monomer is in sediment chamber's long period, more uniformly to fill it.
The method can utilize the step (step D) wherein making gaseous silane (Fig. 1 E) and object contact to be coated.This step particularly advantageously contributes to the parylene coatings hydrophilic surface of object.In some embodiments, use during the method silane, silane or silane is to be coated with parylene compound by object.In one embodiment, object contacts with gaseous silane in a vacuum chamber.
In step C, be vaporized by silane being heated to its gasification point.In preferred embodiments, this step can make object to be pre-treated to contact with gaseous silane before carry out.In one embodiment, by silane is inserted crucible, the T ' thermopair in the vacuum chamber of crucible insertion containing object to be coated on hot plate is to carry out this step.The silane amount injecting crucible can be depending on object number and the size of vacuum chamber.In various embodiments, the scope of the silane amount of gasification is about 100ml for about 10-, or is more in some situations.In one embodiment, silane can be heated to its gasification point by hot-plate.In other embodiments, other method silane being heated to its gasification point well known to those skilled in the art can be used.In another embodiment, the mixture of silane and distilled water can be gasified.In one embodiment, 50/50 mixture of heating silane and distilled water is until gasify silane, and this process can be about 2 hours at about 80 DEG C.
Although in some embodiments, can with silane in same vacuum chamber, then with parylene by object pre-treatment, in other embodiments, two kinds of coatings can be applied in different rooms and/or in different periods.In a preferred embodiment, once under object being exposed to completely gasification silane, under this room can be placed in vacuum, start parylene deposition once reaching suitable vacuum.Preferably before introducing gaseous state parylene monomer, discharge silane steam completely from this room.Time period between applying silane pretreatment and parylene coatings is about 0 minute to about 120 minutes in various embodiments.The gasification point temperature of silane is about 80 DEG C.Although do not limit the mechanism of action of silane, it is believed that the silane of gasification is by object pre-treatment, having by making surface increases the free radical site in conjunction with parylene monomer the ability that surface accepts parylene monomer gas.
In step D, object to be coated can contact with gaseous silane.In preferred embodiments, this contact can subsequently for being undertaken in the same sediment chamber of gaseous state parylene monomer and object contact.In some embodiments, object contacts the time of about 2 hours with gas silane.
In step e, object to be coated can contact time enough to deposit parylene coatings with gaseous state parylene monomer.In preferred embodiments, this step can in sediment chamber and is carried out in the same sediment chamber that particularly preferably this object contacts with silane wherein.In other preferred embodiment, sediment chamber and object to be coated can be at room temperature.In some embodiments, depositing temperature is about 5 DEG C of-Yue 30 DEG C, preferably about 20 DEG C of-Yue 25 DEG C.In some embodiments, can by sediment chamber's cooling to accelerate deposition process.
Other embodiments provide the method with silane treatment object.The method comprises the following step:
A. be vaporized to form gaseous silane by silane being heated to its gasification point; With
B. object to be coated is contacted with gaseous silane.
In step, be vaporized by silane being heated to its gasification point.In some embodiments, or the silane of the method whole period.In preferred embodiments, this step can be carried out before being contacted with gaseous silane by object to be pre-treated.In one embodiment, by silane is placed in crucible, crucible inserts 2 on hot plate in the vacuum chamber containing object to be coated " thermopair carries out this step.The silane amount injecting crucible can be depending on object number and the size of vacuum chamber.In various embodiments, the scope of the silane amount of gasification is about 10 to about 100 milliliters, or more in some situation.In one embodiment, silane can be heated to its gasification point by hot plate.In other embodiments, other method silane being heated to its gasification point well known to those skilled in the art can be used.In another embodiment, the mixture of silane and distilled water can be gasified.In one embodiment, 50/50 mixture of heating silane and distilled water is until silane gasification, and this process can be about 2 hours at about 80 DEG C.
In stepb, object to be coated can contact with gaseous silane.In some embodiments, object contacts the time of about 2 hours with gaseous silane.
Also the method applying the coating comprising conformal coating compound and thermally conductive material is provided for.In some embodiments, the method comprises: heating conformal coating compound is to form the gaseous monomer of conformal coating compound; Thermally conductive material and gaseous monomer are combined, form gaseous mixture thus, and under the condition at least part of surface being formed at object at the conformal coating comprising conformal coating compound and thermally conductive material, object is contacted with gaseous mixture, thus conformal coating is applied to this object.
" gaseous mixture " that use in literary composition be comprise gas phase (gaseous state) at least one composition and can be or can not be the mixture of other composition of at least one of gas phase.Such as, gaseous mixture can comprise the conformal coating compound of gas phase and the solid-phase compound (such as powder particle) be suspended in conformal coating compound steam.Similarly, gaseous mixture can comprise the conformal coating compound of gas phase and the liquid phase compound (such as atomized liquid) be suspended in conformal coating compound steam.In addition, gaseous mixture can comprise multiple gas phase composition (such as multiple different gas phase conformal coating compound).Should be understood that gaseous mixture can comprise many combinations of identical and/or different phase composition.In some embodiments, gaseous mixture comprises at least one gas phase conformal coating compound (such as parylene) and at least one thermally conductive material.In some embodiments, the thermally conductive material in gaseous mixture is solid phase (such as powder particle).In some embodiments, the thermally conductive material in gaseous mixture is liquid phase.In other embodiment also had, the thermally conductive material in gaseous mixture is gas phase.
Disclosed in the text coating process can be used for merchant navy vessel, yacht, military affairs (aerospace and defence), industry with the industry of medical treatment, and disclosed in literary composition other with the product of use known in the art.In some cases, coating process can be specified for by equipment " sealing " especially.Therefore, coating process can be used for protecting the equipment that is generally used for using in boats and ships and hazardous environment from by being exposed to moisture, be immersed in the water, dust, high wind affects and operation troubles caused by chemical.This coating can improve tolerance and the persistence of high value special product that is perishable and that degrade and operating equipment.
On the other hand, the disclosure provides the method at least part of surface conformal coating comprising parylene compound and boron nitride being applied to object, and it has: (A.) makes parylene dimer gasify to form gaseous state parylene dimer by parylene being heated to about 150 DEG C of-Yue 200 DEG C; (B.) by gaseous state parylene dimer being heated to about 650 DEG C of-Yue 700 DEG C, gaseous state parylene dimer is cracked into gaseous state parylene monomer; (C.) by the gaseous state parylene monomer of boron nitride implantation step B; (D.) object of parylene to be coated is contacted time enough with the coating of the boron nitride and parylene that deposit final thickness with the gaseous state parylene monomer of step C with boron nitride.Although any parylene can be used for the method, preferably parylene D, parylene C, parylene N and parylene and particularly preferably parylene C.In some preferred embodiments, boron nitride can be injected gaseous state parylene monomer as the powder preferably between about 18 microns and about 25 microns.In other embodiments, step D can occur at about 5 DEG C of-Yue 30 DEG C.In some embodiments, the final thickness of coating can about 100 Ai-Yue 3.0 millimeters.In some embodiments, the method can have other step e, object to be coated can be contacted with silane until this object scribbles silane in this step.
In some embodiments, depend on the article of coating, in vacuum chamber at 25 DEG C, standard chemical vapor deposition is used to put into practice the thin uniform layer comprising the conformal coating of parylene compound and boron nitride that the method is applied to the thickness range of 0.01-3.0 millimeter.These article, just can weather and water-fast once coating, and the exposure under the exposure that can stand under extreme weather conditions and most of chemical.Any solid surface can be coated with, comprise plastics, metal, timber, paper and yarn fabric.Exemplary application disclosed in literary composition includes but not limited to that electronics is as mobile phone, receiving set; Circuit card and loud speaker; With equipment or the oil drilling machine operation of Yu Haiyang and space probation; Hazardous wastes transportation equipment; Medical instruments; Paper product; And yarn fabric.
Therefore, the method for being coated with by object with the composition of parylene and boron nitride can comprise following several step: A. makes parylene dimer form gasify to form gaseous state parylene dimer by being heated to 150-200 DEG C; B. make the cracking of gaseous state parylene dimer to gaseous state parylene monomer by parylene dimer being heated to 650 DEG C-700 DEG C; C. by the gaseous state parylene monomer of boron nitride implantation step B; And object to be coated is contacted time enough to deposit the parylene coatings of final thickness with gaseous state parylene monomer with boron nitride.
Being undertaken by any mode of parylene steam coated object of the current use that the steps A of the method be coated with by object by parylene and boron nitride and B know by those of ordinary skill in the art.In addition, these steps can be different from the order provided and carry out.In preferred embodiments, parylene C is used.In other embodiments, the parylene of other form can be used, include but not limited to parylene N, parylene D and parylene in some embodiments, by the replacement of various chemical part, parylene can derived from parylene N or poly-para xylylene.In preferred embodiments, parylene forms completely linear high crystalline material.In embodiment part, with to an embodiment of how to carry out the method more detailed description and propose the method.
In some embodiments, steps A-parylene dimer form is gasified to form gaseous state parylene dimer by being heated to 150 DEG C-200 DEG C, can carry out in furnace chamber.In some embodiments, step B-make the cracking of gaseous state parylene dimer to gaseous state parylene monomer by gaseous state parylene dimer being heated to 650 DEG C-700 DEG C, can carry out in furnace chamber.In some embodiments, step C-by the gaseous state parylene monomer of boron nitride implantation step B, can carry out after stepb.In some embodiments, boron nitride can be used as powder injection gaseous state parylene monomer.An embodiment of this step is described in an embodiment.In some embodiments, boron nitride powder is at least about 500 granularities.In some embodiments, Boron Nitride powder is between about 1.8 microns and about 2.5 microns.
In step D, object to be coated and gaseous state parylene monomer contact time enough with the coating of cvd nitride boron and parylene on object with boron nitride.In some embodiments, this step can be carried out in sediment chamber.In other embodiments, sediment chamber and object to be coated can be at room temperature, for from about 5 DEG C to about 30 DEG C, or are most preferably about 20 DEG C of-Yue 25 DEG C.In some embodiments, time span that object and gaseous state parylene monomer contact with boron nitride can be changed to control the final thickness of the parylene-boron nitride coating on object.In various embodiments, the final thickness of parylene-boron nitride coating is between about 100 dusts are to about 3.0 millimeters.In some embodiments, parylene is made to deposit about 8 hours-Yue 18 hours with the coat-thickness obtaining about 0.05 millimeter.In some embodiments, parylene is made to deposit about 5 hours-Yue 18 hours with the coat-thickness obtaining about 0.05 millimeter.In preferred embodiments, the final thickness of parylene coatings is about 0.5 millimeter of-Yue 3.0 millimeters.The selection of parylene coatings final thickness can depend on object to be coated and the end-use of this object to a certain extent.For the object such as power button requiring some function actions, thinner final coating is desirable.For the object that will soak in water, thicker coating is desirable.
In some embodiments, the method can have and object to be coated contacted with silane until the pretreated other step e of this object silane.In preferred embodiments, this step can be carried out before step D.In some embodiments, when object contacts with silane, silane can be solution.In other embodiments, when object contacts with silane, silane can be gas.In some embodiments, silane can be silane (Fig. 1 E).This step particularly advantageously contributes to the parylene coatings hydrophilic surface of object.
Embodiment
Embodiment 1: for object being coated with the method and apparatus of parylene.
This embodiment uses parylene C
Painting process
This device is made up of two portions: (1) stove/hot spots; (2) vacuum section.Two stoves that this stove part is connected by the Glass tubing by being called rice steamer (retort) form.The valve connection that this stove and vacuum section flow between this stove and vacuum section by allowing gas.
This stove part of this device is manufactured by MellenFurnaceCo..(Concord, NH. are see embodiment 2.This vacuum section is manufactured by LacoTechnologiesInc. (SaltLakeCity, UT).
Operation article being coated with parylene is as follows:
(1) first furnace chamber.With the amount of enough coated articles, the parylene C of dimer form (two molecular conformations) is placed in this furnace chamber.This article are coated with the thickness of 0.01-3.0 millimeter scope.Parylene C is placed in stainless steel " boat " (standard container by metal or glass manufacture), its vacuum permanent opening by this pipe (being pushed in stove by boat with rod) inserts in stove.Sealed open after inserting parylene C.Then this stove is made to reach 150 DEG C-200 DEG C to form the environment that solid-state parylene C becomes gas.This gas is remained on the first furnace chamber until two valves are opened.Until the cold-trap in vacuum section be full of liquid nitrogen (LN2) and this trap is " cold " time first of two valves just can open.LN2 bought from the supply of locality.LN2 is placed in a gallon container of supplier.LN2 is injected from this container and is somebody's turn to do " trap ".Second valve is adjustable and open it when being extracted out from the first stove by gas by vacuum.
(2) second furnace chambers.Parylene C gas motion is second stove of 650 DEG C-700 DEG C to temperature.Heat in this stove makes parylene C gas delivery become each molecule (monomer).Then by the gas suction sediment chamber of vacuum by morphon.
(3) vacuum chamber.The vacuum section of machine is made up of the sediment chamber with two vacuum pumps.First vacuum pump reduces initial vacuum " slightly " pump.Original pressure is 1 × 10 -3the scope of holder.Then subordinate phase pump is reduced to 1 × 10 -4the resulting pressure of holder scope.Vacuum pump liquid nitrogen trap is protected, and liquid nitrogen trap protection pump is from the cold-trap elemental solid that causes of condensation of gas on the surface.
Before beginning painting process, article to be coated are placed on the shelf of sediment chamber.Within equipment and on those this equipment to be coated is not covered (using smart dodge) in dispensing area.Cover the region of electric power or mechanical connection must be kept.At room temperature material is applied on article by (75 Fahrenheit degree).
Exist at internal vacuum chamber silane (MomentivePerformanceMaterialsInc., Wilton, CT) injects a crucible of ceramic crucible.This crucible inserts 2 inches of thermopairs in vacuum chamber on hot-plate.Inject the amount of silane depends on the amount of commodity in this room, but between 10-100 milliliter.This plate will silane is heated to gasification point, and it is coated with the entire area of this chamber interior like this, is included in any object of these indoor.
Once Silquest steam is discharged from sediment chamber, by the comparatively rough vacuum of vacuum chamber, monomer gas is extracted out.When gas is drawn in this room, it turns to, so that it sprays in the entire area of this room.When monomer gas cools, article are coated with.Gas is cooled to 25 DEG C and harden at the equipment of these indoor from 600 DEG C.During this refrigerating work procedure, monomer deposits to form polymer three-dimensional chain that is uniform and free of pinholes on article surface to be coated.Depositing device controls application rate and final thickness.The required thickness of parylene coatings was determined by the time being exposed to monomer gas.Thickness can be the scope from hundreds of dust to several millimeters.
Embodiment 2: can be used in device to apply the subregion stove of parylene coatings.
This furnace module is manufactured by MellenCompany, Inc., ConcordNH.A MellenModelTV12,
The solid tube furnace in single Huo Liangge district can operate in atmosphere at the temperature of maximum 1200 DEG C.This stove utilizes Mellen standard series 12V heating unit (the Fe-Cr-Al coil exposed in custom-designed fixture).This stove and accessory has only uses 2 " the energy-saving ceramic fiber insulation cover of long-channel.Thermopair is placed in the center in each district.Be provided for 10 feet of long cables in each district so that be connected to power supply.For level or vertical operation design this stove, it has following specification:
Table 1:
Model: TV 12-3x32-1/2Z
Maximum temperature 1200℃
Demarcate caliber I.D. 3 inches
Stove heated length 32 inches
Stove outside diameter shell (a rox) 10-12 inch
Total furnace length a rox.) 36.25 inches
Stove district number 1 or 2 districts
Voltage (nominal, 1 phase place, 50/60Hz.) 208 volts
Total power 6,400 watts
Mellen Series in PS 205 power supplys/temperature regulator
(1) MellenModelPS205-208-(2) 25-S, a Liang Gequ, digital temperature control and solid-state relay.MELLEN Series in PS 205 is made up of following:
A.) for two (2) digital temperature controls of the calibration of " S " type thermopair, 126 sections and 31 programs are characterised in that.
B.) (1) solid-state relay.
C.) (1) General Electric or equal isolating switch, the two poles of the earth, have the amperage grade of suitable size.
D.) one (1) holds the Mellen cabinet of above-mentioned parts.
E.) two (2) " S " type thermopairs, each district comprises 10it Compensative thermoelectric couple extended line, wiring board etc.
F.) distribution be necessary, wiring board, mutual connection part etc., thus manufacture the system can run completely.
For the overheating protection of power supply/temperature regulator
Utilize one (1) overheated (O.T.) alarm of independently numeral instruction, digital set(ting)value " upper limit alarm " controller.O.T. signal box is furnished with suitable thermopair, TIC extended line and enough mechanical-electric contactors, thus exceeding the power cut to this stove in the event of temperature condition in overheat sensor position.O.T. alarm options device is arranged in main temperature controller shell.
Rice steamer model: RTA-2.5x32-OBE
(1) MellenModelRTA-2.5-32-OBE, circular high-purity alpha-alumina (actual system has quartzy rice steamer) rice steamer uses together with stove as above.Rice steamer working diameter is approximately 2.5 inches of l.D. and takes advantage of 32 inches.Rice steamer has about 2.75 " O.D. and 48 of inch " inch is long, and contain necessary steel flange/seal assembly and hot baffle, thus allow airtight work.Lead-in wire is located in the cover plate of rice steamer and is used for air inlet/give vent to anger and temperature survey.Rice steamer can operate with dissimilar atmosphere.
Embodiment 3: for object being coated with the method and apparatus of parylene and boron nitride.
This embodiment uses parylene C.
Coating procedure
This device is made up of two portions: (1) stove/hot spots; (2) vacuum section.Two stoves that this stove part is connected by the Glass tubing by being called rice steamer (retort) form.The valve connection that this stove and vacuum section flow between this stove and vacuum section by allowing gas.
This stove part of this device is manufactured by MellenFurnaceCo..(Concord,NH。This vacuum section is manufactured by LacoTechnologiesInc. (SaltLakeCity, UT).
Method article being coated with parylene and boron nitride is as follows:
(1) first furnace chamber.With the amount of enough coated articles, the parylene C of dimer form (two molecular conformations) is placed in this furnace chamber.This article are coated with the thickness of 0.01-3.0mm scope.Parylene C is placed in stainless steel " boat " (standard container by metal or glass manufacture), its vacuum permanent opening by this pipe (being pushed in stove by boat with rod) inserts in stove.Sealed open after inserting parylene C.Then this stove is made to reach 150 DEG C-200 DEG C to form the environment that solid-state parylene C becomes gas.This gas is remained on the first furnace chamber until two valves are opened.Until the cold-trap of vacuum section be full of liquid nitrogen (LN2) and this trap is " cold " time first of two valves just can open.LN2 bought from the supply of locality.LN2 is placed in a gallon container of supplier.LN2 is injected from this container and is somebody's turn to do " trap ".Second valve is adjustable and open it when being extracted out from the first stove by gas by vacuum.
(2) second furnace chambers.Parylene C gas will move to the second stove that temperature is 650 DEG C-700 DEG C.Heat in this stove makes parylene C gas delivery become each molecule (monomer).Then by the gas suction sediment chamber of vacuum by morphon.
Boron nitride is in powder form placed in the KF16 pipe being connected to the KF pipe connecting with " T " KF16 valve port.This K1716 tube portion ground is full of " charging " of boron nitride powder (minimum 500 granularities).By KF16 duct occlusion.After beginning coating procedure, boron is injected coating " stream ".Boron is as flow of powder and the deposition along with coating procedure be collected.
K1716 pipe is connected to the rice steamer perpendicular to lucky monomer gas stream before it enters sediment chamber.There is a valve opened, it allows boron nitride to flow in this gas.This gas will bond with monomer and be deposited on article to be coated.This operation is similar to powder coated.This operation can be repeated to increase the boron nitride amount in being inserted on article coating.Although do not limit the characteristic of boron nitride/parylene coatings, it is believed that boron nitride is improved coating hardness and provided and make heat depart from coated object as the better method of electronics.Boron nitride is inserted parylene as powder.
(3) vacuum chamber.The vacuum section of machine is made up of the sediment chamber with two vacuum pumps.First vacuum pump reduces initial vacuum " slightly " pump.Initial vacuum is 1 × 10 -3the scope of holder.Then subordinate phase pump is reduced to 1 × 10 -4the final vacuum of holder scope.Vacuum pump liquid nitrogen trap is protected, and liquid nitrogen trap protection pump is from the cold-trap elemental solid that causes of condensation of gas on the surface.
Before beginning painting process, article to be coated are placed on the shelf of sediment chamber.Within equipment and on those this equipment to be coated is not covered (using smart dodge) in dispensing area.Cover the region of electric power or mechanical connection must be kept.At room temperature material is applied on article by (75 Fahrenheit degree).
Exist at internal vacuum chamber silane injects a crucible of ceramic crucible.This crucible inserts 2 inches of thermopairs in vacuum chamber on hot-plate.Inject the amount of silane depends on the amount of commodity in this room, such as, between 10-100 milliliter.This plate will silane is heated to gasification point, and it is coated with the entire area of this chamber interior like this, is included in any object of these indoor.
By vacuum lower in vacuum chamber, monomer gas is extracted out.When gas is drawn in this room, it turns to, so that it sprays in the entire area of this room.When monomer gas cools, article are coated with.Gas is cooled to 25 DEG C from 600 DEG C and is hardened by the equipment in these indoor.During this refrigerating work procedure, monomer deposits to form polymer three-dimensional chain that is uniform and free of pinholes on article surface to be coated.Depositing device will control application rate and final thickness.The required thickness of parylene coatings was determined by the time being exposed to monomer gas.Thickness can be the scope from hundreds of dust to several millimeters.
Although described aspects more of the present invention and embodiment, but it will be apparent to those skilled in the art that: obtaining can realizing under some or all of advantage of the present invention the various distortion to those embodiments, changes and improvements.Such as, in embodiments more of the present invention disclosed in literary composition, single parts can be replaced by multiple parts, and multiple parts can be replaced by single parts, to realize given function.Except such substituting can not effectively be implemented except the situation of embodiment of the present invention, such substitutes within the scope of the invention.Therefore disclosed embodiment is intended to be included in all such distortion do not departed under scope and spirit of the present invention that claims limit, substitutes and adjustment.The preferred feature of each aspect of the present invention and embodiment is the change in addition necessary to each other side and embodiment.
It is to be further understood that understand the present invention in order to clear, accompanying drawing of the present disclosure and explanation are simplified and relevant element has been described, simultaneously in order to clear, eliminated the parts of other element such as conventional conformal coat method or device.Such as, some conformal coating system can comprise the other parts do not illustrated in the text, such as sediment chamber, valve, vacuum pump.But those of ordinary skill in the art will recognize that these elements and other element are needs in typical conformal coating system.But, because such element is well known in the art, and because they are unfavorable for better understanding the disclosure, in literary composition, do not provide the discussion to these elements.
And in the appended claims, any key element being expressed as the means realizing specific function comprises any method realizing those functions, comprises such as, realizes the factor combination of those functions.The invention that claim in addition as device+function limits is the following fact, the function provided by various described device by with claims the mode that limits combine and assemble.Therefore, any device of such function can be provided can to think the device be equivalent to shown in literary composition.
In order to this specification sheets, except as otherwise noted, all numerical value for illustration of the amount of the expression composition of book, time, temperature, coat-thickness and other character or parameter will be understood to be modified by term " about " in all instances.Therefore, except as otherwise noted, be to be understood that the digital parameters proposed in specification sheets below and accessory claim is approximation.At least, be not equivalent to the application of the doctrine of equivalents of right as attempt restriction, digital parameters should be understood according to the significant figure of record and the common technical process that rounds up.
In addition, although propose the numerical range of wide region of the present invention and optimum configurations is approximation as discussed above, the numerical value proposed in embodiment part then accurate record as much as possible.But should be appreciated that such numerical value comprises the certain deviation produced by metering facility and/or measuring technology inherently.
Any patent be incorporated by reference in described literary composition, publication or other open material are not only completely or partially introduced with the degree of the existing definition proposed in the present invention, explanation or other open material contradiction with the material introduced in the text.Similarly arrive in necessary degree, the disclosure as proposed clearly in literary composition replaces the contradiction material be incorporated by reference in any literary composition.Be incorporated by reference in described literary composition but and the existing definition proposed in literary composition, any material of explanation or other open material contradiction or its part will only be introduced into the degree not producing contradiction between this introducing material and existing open material.

Claims (7)

1. coating composition, comprises conformal coating compound and thermally conductive material.
2. the conformal coating at least part of surface of object, it comprises the coating composition of claim 1.
3. be included in the object of the conformal coating at least part of surface, wherein this conformal coating is made up of the coating composition of claim 1.
4. conformal coating is applied to the method for object, comprises:
A) conformal coating compound is heated with the gaseous monomer forming conformal coating compound,
B) thermally conductive material and this gaseous monomer are combined, form gaseous mixture thus, and
C) under the conformal coating comprising this conformal coating compound and this thermally conductive material is formed at least part of surface of this object condition, this object is contacted with this gaseous mixture, thus this conformal coating is applied to this object.
5. conformal coating is applied to the method for object, comprises:
A) parylene compound is heated to the temperature of about 125 DEG C of-Yue 200 DEG C to form gaseous state parylene compound, wherein carries out the heating of this parylene compound with two or more heating phases,
B) this gaseous state parylene compound is heated to the temperature of about 650 DEG C of-Yue 700 DEG C with this gaseous state parylene compound of cracking, forms parylene monomer thus,
C), under the condition be formed at least part of surface of object at the conformal coating comprising parylene polymkeric substance, this object is contacted with this parylene monomer, thus coating is applied to this object.
6. object, it has the coating being applied to surface at least partly by the method for claim 4 or 5.
7. conformal coating is applied to the device of object, comprises:
Evaporator room, comprises at least two humidity provinces;
Pyrolysis chamber, it is operatively connected to this evaporator room; With
Vacuum chamber, it is operatively connected to this pyrolysis chamber.
CN201510679248.XA 2008-04-16 2009-03-05 Metal and electronic device coating process for marine use and other environments Pending CN105400269A (en)

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US12/104,080 US20090263581A1 (en) 2008-04-16 2008-04-16 Method and apparatus to coat objects with parylene and boron nitride
US12/104,080 2008-04-16
US12/104,152 US20090263641A1 (en) 2008-04-16 2008-04-16 Method and apparatus to coat objects with parylene
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