CN105384354A - Method and device for manufacturing glass substrate - Google Patents
Method and device for manufacturing glass substrate Download PDFInfo
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- CN105384354A CN105384354A CN201510549374.3A CN201510549374A CN105384354A CN 105384354 A CN105384354 A CN 105384354A CN 201510549374 A CN201510549374 A CN 201510549374A CN 105384354 A CN105384354 A CN 105384354A
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- glass substrate
- glass
- sheet glass
- scavenging solution
- cleaning
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Abstract
The invention relates to a method and device for manufacturing a glass substrate. The invention provides a manufacturing method of the glass substrate, the liquid containing the cleanser on the glass substrate can be remove through a contact cleaning unit, so that the black matrix peeling can be restrained. The invention relates to a manufacturing method for the glass substrate for a filter of which surface is coated by black matrix resin, and the method comprises the following steps: a cleaning step, which is a step for providing a cleaning fluid containing surfactant-material-added inorganic base series cleaning agent for the glass substrate and cleaning; a flushing step, which is a step for making a flushing fluid to permeate in the cleaning fluid attaching on the surface of the glass substrate in the cleaning step; and a removing step, which is a step for removing the cleaning fluid through adopting a contact cleaning unit arranged from one end to the other end of the glass substrate in a crossing way for inletting the flushing fluid permeated cleaning fluid in the flushing step.
Description
Technical field
The present invention relates to a kind of manufacture method of glass substrate and the manufacturing installation of glass substrate.
Background technology
Industry uses smooth sheet glass as the part of the display part of the indicating meter such as liquid crystal indicator or plasma display system.In the following description, this sheet glass is called glass substrate for display, or is only called glass substrate.Such as, in liquid crystal indicator, by changing the electric field applied the liquid crystal be sealing between glass substrate, and change the orientation of liquid crystal, and dynamic image display can be realized.Liquid crystal indicator needs when showing image to change electric field, is therefore formed on the glass substrate to execute alive transparency electrode.
In addition, in order to control the on-off to the voltage that the electrode on glass substrate applies, the liquid crystal indicator that the television set etc. needing high-quality to show uses have employed the control of the active-matrix mode using thin film transistor (TFT).This TFT is also formed on the glass substrate.Specifically, liquid-crystal display is that TFT (ThinFilmTransistor) and the liquid crystal of the transit dose controlling light and colour filter are as integrant.The manufacture method of the colour filter panel in liquid-crystal display makes with the following method usually: the different form and aspect of red, green, blue are then formed by multi color patterns such as strip or mosaic shapes by matrix successively that form black on the surface of glass substrate.
Along with high Qinghua of indicating meter, the live width and the spacing that are configured in the black matrix" of glass baseplate surface reduce.Such as, in order to reach the high-contrast of indicating meter, and need by the high graph thinning of black matrix", high Qinghua (specifically, being less than the live width of 20 μm) and realize aperture opening ratio improve and realized by the high dimensional accuracy of black matrix" opacifying property improve.In addition, along with the densification of display picture element number, pattern dimension is different according to the purposes of colour filter and each color, as an example, the size on one side of the pixel of red, green, blue is 100 μm from 200 ~ 300 μm of progress, the size of black matrix" is 10 μm and then 5 μm from 20 μm of progress, develops fine rule technology corresponding to this.
Like this, owing to utilizing very thin metallic membrane or semi-conductor to form electrode or active member, so require that the glass surface of glass substrate has high flatness and high spatter property in the glass surface of glass substrate for display.
But glass substrate for display if the substrate (hereinafter referred to as liquid crystal glass substrate) that uses of such as liquid crystal indicator, then can present the form of thinner rectangle tabular.The usual thickness of liquid crystal glass substrate is the degree of 0.05mm ~ 0.7mm, and is thinner than 1mm, and the requirement of industry to size-enlargement improves year by year.
Liquid crystal glass substrate is called that the form of female glass is supplied to the manufacturing step of liquid crystal indicator, and this female glass is so the size of the sizableness that the has glass substrate multi-disc of size needed for the liquid crystal indicator.The size custom of this female glass showed with " generation ", and such as the size of the 6th godmother's glass is 1500mm × 1850mm.Female glass obtains by the sheet glass being configured as tabular is cut into specific size.And, in order to the spot that produces when removing cutting glass plate or cutting bits etc., need to clean female glass and liquid crystal glass substrate.
In the cleaning of the glass surface of the liquid crystal glass substrate carried out in such cases, use the various liquid such as the sanitising agent such as pure water, tensio-active agent and fluorine cpd.The liquid that the cleaning of glass surface uses is removed by ejection air-flow, after end cleaning step, and shipment after sanitising agent removal step, inspection step etc., but have the surface of the liquid crystal glass base becoming goods to be fixed with the situation of detergent composition.
Detergent composition remains, and the set of this detergent composition causes being formed electrode on the glass substrate or element produces bad, and causes liquid crystal indicator to break down.In addition, also can clean when the component needed for liquid-crystal display is formed on liquid crystal glass substrate, even if but in the cleaning carried out in this case, the problem of detergent composition set also can be produced.In addition, have and cannot realize the worry of black matrix" resin to the high density of access of glass baseplate surface.
Therefore, in order to prevent detergent composition set, such as, being previously the plane ejection air-flow utilizing air knife etc. thinner as patent documentation 1 is described, having removed liquid such as cleaning the sanitising agent that uses from the glass surface of the liquid crystal glass substrate after cleaning.
[prior art document]
[patent documentation]
[patent documentation 1] Japanese Patent Laid-Open 2009-6299 publication
Summary of the invention
[inventing the problem that will solve]
But, described technology due to be by air knife formed ejection air-flow, even if so utilize ejection air-flow clean from the surface removal of glass substrate the liquid used, also cannot prevent the set of detergent composition completely.If accelerate from the spouting velocity of the ejection air-flow of air knife, then the water cleaned in the liquid used can volatilize, and has detergent composition along the situation of the emission direction linearly set of the ejection air-flow from air knife.If the glass substrate of detergent composition forms black matrix", colour filter in set, be deteriorated and the problem of peeling off with regard to there is adhering state.On the other hand, if slow down the spouting velocity of the ejection air-flow from air knife, then can remain on the glass substrate containing the liquid of sanitising agent, thoroughly cannot remove sanitising agent in the sanitising agent removal step removing sanitising agent, and have sanitising agent to remain situation on the glass substrate.If form black matrix", colour filter under the state remaining sanitising agent on the glass substrate, then there is adhering state and be deteriorated and the problem of peeling off.
Therefore, the object of the present invention is to provide the manufacture method of glass substrate that black matrix" can be suppressed to peel off by utilizing cleaning unit to remove the liquid containing sanitising agent on glass substrate and the manufacturing installation of glass substrate.
[technique means of dealing with problems]
A form of the present invention is the manufacture method that a kind of surface forms the colour filter glass substrate of black matrix" resin, and it has following form.Be preferably:
[form 1]
A manufacture method for colour filter glass substrate, is characterized in that possessing following steps:
Cleaning step, comprises the scavenging solution of the mineral alkali system clean-out system being added with surface active material to glass substrate supply and cleans,
Rinse step, makes washing fluid infiltrate into the scavenging solution on the surface being attached to described glass substrate in described cleaning step, and
Removal step, by infiltration in described rinse step there being the described scavenging solution of described washing fluid to pass into from one end of described glass substrate across to the cleaning unit set by the other end, and removes this scavenging solution.
[form 2]
According to the manufacture method of form 1, wherein about described removal step, described glass substrate being passed at least rear step in the step before and after described cleaning unit, in order to prevent described scavenging solution dry, and the surperficial feeding liquid to described glass substrate.
[form 3]
According to the manufacture method of form 1 or 2, wherein about described removal step,
The described scavenging solution of cleaned described glass substrate is reclaimed, and measures the concentration of the scavenging solution reclaimed,
The concentration of the described scavenging solution recorded is lower, more strengthens the power described cleaning unit being pressed against described surface.
[form 4]
Manufacture method any one of form 1 to 3, is wherein utilizing described cleaning unit to remove in the front and back step of described scavenging solution, adds water and suppress the drying on described surface to described surface.
[form 5]
Manufacture method any one of form 1 to 4, wherein about described removal step,
After utilizing described cleaning unit to remove described scavenging solution, utilize glass substrate described in described liquid rinse, and measure the electric conductivity of cleaned described liquid,
The electric conductivity of the described liquid recorded is higher, more strengthens the power described cleaning unit being pressed against described surface.
Another form of the present invention is the manufacturing installation that surface forms the colour filter glass substrate of black matrix" resin, and it has following form.
[form 6]
Manufacture method according to any one of form 1 to 5, wherein said cleaning unit be make relative to be about to the scavenging solution before carrying out described rinse step temperature and temperature head is more than 0 DEG C and the washing fluid of less than 25 DEG C described rinse step initial stage infiltration remove.
[form 7]
A manufacturing installation for colour filter glass substrate, is characterized in that possessing as lower device:
Washing unit, it comprises the scavenging solution of the mineral alkali system clean-out system being added with surface active material to glass substrate supply and cleans, and
Removal device, it makes washing fluid penetrate into be attached in the scavenging solution on the surface of described glass substrate, and by infiltration there being the described scavenging solution of described washing fluid to pass into from one end of described glass substrate across to the cleaning unit set by the other end, and remove described scavenging solution.
[effect of invention]
According to the present invention, can utilize cleaning unit physically remove on glass substrate containing the liquid of sanitising agent, and suppress peeling off of black matrix".
Accompanying drawing explanation
Fig. 1 is used to the schema of the summary of an example of the manufacture method of the glass substrate that this example is described.
Fig. 2 is the schematic diagram of an example of the washing unit piecewise of this example.
Fig. 3 is the vertical view of an example of the cleaning unit of this example.
Fig. 4 is the side-view of the cleaning unit shown in Fig. 3.
Fig. 5 is the vertical view of an example of the folder rod used in this example.
Fig. 6 represents to be recycled to concentration that clean-out system reclaims the scavenging solution in storage tank and the chart of an example of relation of power nip rolls being pressed against sheet glass.
Embodiment
The composition > of < sheet glass
Sheet glass (glass substrate) is the glass for the manufacture of the indicating meter such as comprising the flat-panel monitors such as liquid-crystal display (FPD).Below, be described for FPD sheet glass.This sheet glass is by surface configuration black matrix" and the wavelength selective elements of light transmission and the rgb pixel that make redness (R)/green (G)/blueness (B), and forms colour filter.Black matrix", by the light leak of the back lighting device beyond blocking rgb pixel region, prevents the colour mixture of the rgb pixel adjoined each other, and improves display comparison degree.That is, the penetrating region of the light of colour filter determines according to the shape of black matrix" and configuration.The thickness of sheet glass is such as 0.1mm ~ 0.7mm.The size of sheet glass is such as 680mm × 880mm (G4 size), 2200mm × 2500mm (G8 size).
Sheet glass for the manufacture of FPD is suitably non-alkali glass or micro-alkali glass.When sheet glass is non-alkali glass, the composition of glass is such as
SiO
250 quality % ~ 70 quality %,
Al
2o
30 quality % ~ 25 quality %,
B
2o
31 quality % ~ 15 quality %,
MgO0 quality % ~ 10 quality %,
CaO0 quality % ~ 20 quality %,
SrO0 quality % ~ 20 quality %,
BaO0 quality % ~ 10 quality %.
Herein, the total content of MgO, CaO, SrO and BaO is 5 quality % ~ 30 quality %.
When sheet glass is containing the alkali-metal micro-alkali glass of trace, the R' of composition also containing 0.1 quality % ~ 0.5 quality % of glass
2o, the R' preferably containing 0.2 quality % ~ 0.5 quality %
2o.Herein, R' is at least a kind of being selected from Li, Na and K.In addition, R'
2the total of the content of O can be less than 0.1 quality %.
In addition, in sheet glass, except described composition,
SnO can also be contained
20.01 quality % ~ 1 quality % (preferably 0.01 quality % ~ 0.5 quality %),
Fe
2o
30 quality % ~ 0.2 quality % (preferably 0.01 quality % ~ 0.08 quality %),
Consider environmental pressure, also can in fact not containing As
2o
3, Sb
2o
3and PbO.
The flow process > of the manufacture method of < sheet glass
Fig. 1 is the schema of an example of the flow process of the manufacture method representing sheet glass.Below, each step S1 ~ S10 of schema is described.
At first, in step sl, in order to manufacture the sheet glass with described composition, the frit prepared generates melten glass by heating, and draws method, draws down method or floating method etc. again and be configured as the glass ribbon with specific thicknesses continuously by melten glass or preform glass under utilization.In step s 2, the glass ribbon generated in step S1 is cut, and obtain the plain sheet glass with specific dimensions.In step s3, the plain sheet glass obtained in step S2 is with the pallet be positioned in across the form in order to protect the holding paper on the surface of plain sheet glass to carry out the laminate of lamination for carrying and take care of plain sheet glass.
Secondly, in step s 4 which, take out plain sheet glass from the laminate of plain sheet glass, plain sheet glass is cut into the size of the sheet glass as goods.In step s 5, the sheet glass obtained in step S4 is carried out to the end face processing treatment such as etching of the grinding of end face and grinding, end face.
Secondly, in step s 6, the cleaning of sheet glass is carried out.In the cleaning step of sheet glass, small that is attached to the glass of glass sheet surface is that cullet, dust, spot, adhesivity foreign matter etc. are removed.In addition, in the cleaning step of sheet glass, in order to make the surface of the sheet glass through cleaning can not again adhere to these foreign matters, and use the mineral alkali system clean-out system comprising tensio-active agent.
Secondly, in the step s 7, to carrying out optical check through the sheet glass of cleaning in step s 6.In step s 8, sheet glass qualified in the inspection of step S7 is placed on pallet with the form replacing the laminate of lamination with the holding paper for the protection of glass sheet surface, and packed.In step s 9, through the laminate of sheet glass of packaging by the ship-to of shipment to FPD manufacturer.With regard to the viewpoint preventing the foreign matter from holding paper to be attached to glass sheet surface, the holding paper be clipped in the laminate of the sheet glass of shipment uses not containing the pulp based paper of recycled writing paper.
In addition, the laminate being positioned in the plain sheet glass on pallet in step s3 can reach the long-time of several weeks or several months in step slo certainly.Now, with regard to the viewpoint of cost and environment protection, the holding paper be clipped in the laminate of taken care of plain sheet glass uses recycled writing paper.Laminate through the plain sheet glass of long-term keeping is in the manner described, through the cutting step of step S4 to the packaging step of step S8, and shipment in step s 9.In addition, to be positioned on pallet in step s 8 and the laminate carrying out the sheet glass packed can reach the long-time of several weeks or several months in step slo certainly.
The flow process > of the cleaning step of < sheet glass
Secondly, the details of the cleaning step of the sheet glass carried out in the step S6 of Fig. 1 is described.In the cleaning step of sheet glass, the mineral alkali system clean-out system being added with tensio-active agent is used to carry out the cleaning of glass sheet surface.
In cleaning step, such as, use the mineral alkali system clean-out system being added with tensio-active agent, carry out the cleaning of glass sheet surface.Mineral alkali system clean-out system generates by adding alkaline components to the diluent utilizing water to be obtained by commercially available sheet glass cleaning solution dilution.As sheet glass scavenging solution, the SemiClean series etc. that the PK-LCG series that Paccar (ParkerCorporation) such as can be used to manufacture or Heng Bang oil prodution industry limited-liability company manufacture.More particularly, can use and be added with the scavenging solution as tensio-active agent such as polyoxy alkylene ether or polyoxyethylene alkylene ether.Polyoxy alkylene ether or polyoxyethylene alkylene ether etc. are nonionogenic tenside (nonionic surfactants), other anion surfactants (anionic surfactant) used in scavenging solution are compared with such as alkyl sulfonic acid, easily residue in the surface of sheet glass, and cause peeling off of black matrix".Even if nonionogenic tenside is dissolved in water, also can not demonstrate ionic, but when glass sheet surface forms black matrix", due to stronger key as covalent linkage cannot be formed, so the black matrix" that nonionogenic tenside is coated with can be peeled off because of video picture with glass surface.But nonionogenic tenside is to meet cleaning force and necessary composition, and is used.Sheet glass scavenging solution is that the mode of the concentration such as becoming 1 quality % ~ 5 quality % utilizes water to dilute.About the concentration of the alkaline components of diluent, the concentration being converted into potassium hydroxide (KOH) is such as 0.02 quality % ~ 0.15 quality %.Just keep the aspect of glass sheet surface cleaning, water for diluting clean-out system preferably implemented ion exchange treatment, EDI (Electrodeionization, electrodeionization) processes, utilize the filter process of reverse osmosis membrane (RO film) and the pure water that obtained by the decarbonation process of decarbonation device or ultrapure water.In addition, in order to remove deliquescent organism, preferably water is led to the process of activated carbon.Specifically, secondly the foreign matters such as micropartical are removed by preferred use strainer from water, water are led to activated carbon and organics removal, secondly, implement ion exchange treatment, EDI process, utilize the filter process of reverse osmosis membrane and the decarbonation process by decarbonation device.In ion exchange treatment, ion exchange resin membrane is used to remove from water the ionic substance contained by water, such as chlorion or sodium ion etc.In EDI process, use ion exchange resin membrane, and utilize the potential gradient that electrode imparting current potential is formed, ionic substance is removed with high precision from water.In the filtration treatment utilizing reverse osmosis membrane, ionic substance, salt and organism are removed from water.In decarbonation process, decarbonation device is used to be removed from water by carbonic acid gas.
In this example, by adding to the diluent of sheet glass scavenging solution more than the a kind alkaline components be selected from the group be made up of KOH, NaOH, ETDA (ethylenediamine tetraacetic acid (EDTA))-4Na, ETDA-4K, Na4P2O7 (tetrasodium pyrophosphate) and K4P2O7 (tetrapotassium pyrophosphate), and generate the clean-out system used in cleaning step.About the concentration of the alkaline components of this clean-out system, the concentration being converted into potassium hydroxide (KOH) is more than 1 quality %.Described alkaline components is compared with other alkaline components, high to the etching of glass, and solvability is excellent.Especially, with regard to etching, solvability and prevent from, to the dysgenic viewpoint forming thin film transistor on the glass sheet, being preferably used alone KOH as alkaline components.In addition, KOH and NaOH is compared with other alkaline components, favourable in drainage sunk well.
In addition, about the clean-out system used in cleaning step, alkaline components concentration is higher, and the cleaning force removing foreign matter from sheet glass is stronger.But if the excessive concentration of alkaline components, then the washing unit that can produce sheet glass corrodes, and generates the problems such as crystallization in clean-out system.Therefore, the concentration of the alkaline components of clean-out system is preferably more than 10 quality %.In addition, in order to make the operation of clean-out system become easy, the concentration of the alkaline components of clean-out system is more preferably no more than 5 quality %.
In this example, the purging method of sheet glass has cleaning piecewise and batch cleaning 2 kinds of purging methods.First, to utilizing the purging method of the sheet glass cleaned piecewise to be described.Fig. 2 is the schematic diagram of an example of the washing unit piecewise of the sheet glass G cleaned piecewise.Washing unit 1 comprises the cleaning unit 10 carrying out cleaning step piecewise.Sheet glass G utilizes the mineral alkali system clean-out system being added with tensio-active agent to clean in cleaning unit 10.
Fig. 3 is the vertical view of cleaning unit 10, and Fig. 4 is the side-view of cleaning unit 10.In Fig. 3 and Fig. 4, eliminate the Handling device of moving glass sheet G.
Cleaning unit 10 as shown in Figure 3, possesses brush unit 12, sponge unit 14, spray unit 16 and nip rolls (niproller) 15,17.These unit sequentially configure from the upstream side in the carrying direction of sheet glass G to downstream side.Cleaning unit 10 as shown in Figure 4, also possesses clean-out system storage tank 18, pure water storage tank 19, nozzle 18a, 18b, 18c, 18d, 19a, 19b.
Brush unit 12 has cleaning brush roll 12a, 12b.Cleaning brush roll 12a, 12b configures along the carrying direction of sheet glass G.Cleaning brush roll 12a, 12b is configured in the upper and lower of sheet glass G in pairs in two that can clean carried sheet glass G respectively surperficial modes.Cleaning brush roll 12a, 12b with respectively as shown in Figure 3 as configure across the mode in the carrying direction of sheet glass G.At the periphery of cleaning brush roll 12a, 12b, multiple cleaning brush is installed.Rotated by the axle of cleaning brush roll 12a, 12b, make cleaning brush contact the surface of the sheet glass G carried, and the surface of sheet glass G is cleaned.In figure 3, cleaning brush roll 12a, 12b are configured with 2 row along the carrying direction of sheet glass G, but also can only configure 1 row, can also configure more than 3 row.
Sponge unit 14 has cleaning sponge roller 14a, 14b.Cleaning sponge roller 14a, 14b configures along the carrying direction of sheet glass G.Cleaning sponge roller 14a, 14b is configured in the upper and lower of sheet glass G in pairs in two of the sheet glass G that can clean carrying respectively surperficial modes.Cleaning sponge roller 14a, 14b with respectively as shown in Figure 3 as configure across the mode in the carrying direction of sheet glass G.At the periphery of cleaning sponge roller 14a, 14b, cleaning sponge is installed.Rotated by the axle of cleaning sponge roller 14a, 14b, make cleaning sponge contact the surface of the sheet glass G of carrying, and the surface of sheet glass G is cleaned.In figure 3, cleaning sponge roller 14a, 14b are configured with 2 row along the carrying direction of sheet glass G, but also can only configure 1 row, can also configure more than 3 row.
Nip rolls 15,17 is sanitising agents in order to remove front and the back side being attached to sheet glass G, liquid and be configured in the upper and lower of sheet glass G in pairs, is the direction orthogonal with the carrying direction of sheet glass G to have the part from one end of sheet glass G across the washing unit to the sponge set by the other end.Nip rolls 15,17 is the cleaning units (physical cleaning unit) being removed sanitising agent, liquid by contact sheet glass G.Fig. 5 is the vertical view of an example of nip rolls.As shown in the drawing, nip rolls 15,17 configures in the mode in the carrying direction across sheet glass G in the same manner as cleaning sponge roller 14a, 14b.At the periphery of nip rolls 15,17, cleaning sponge is installed.Nip rolls 15,17 is mainly removed and is used clean-out system to carry out cleaning and being attached to the clean-out system on sheet glass G.The distance of nip rolls 15,17 and sheet glass G is suitably controlled by the position control (and not shown) of nip rolls 15,17, under the state of contact sheet glass G, axle rotation is carried out by nip rolls 15,17, and clean the surface of the sheet glass G of sponge contact carrying, thus sanitising agent, the liquid removal on the surface of sheet glass G will be attached to.Nip rolls 15 is configured between sponge unit 14 and spray unit 16, and nip rolls 17 is configured in the downstream side of spray unit 16.At the upstream side of nip rolls 15 and/or downstream side, spray equipment (and not shown) is set to prevent the drying of sheet glass G.Spray equipment such as sprays pure water or ultrapure water and soaks sheet glass G, thus, prevents sheet glass G from occurring dry in cleaning step.If drying occurs sheet glass G, be then attached to the clean-out system set on sheet glass G, even if use nip rolls 15,17 and spray unit 16 to be also difficult to remove.Therefore, prevent drying by soaking sheet glass G, thus easily use nip rolls 15 grade to remove clean-out system.In addition, closer arrange in the scope that spray equipment directly should not drench on nip rolls 15,17 at washing fluids such as the pure water sprayed from spray equipment, ultrapure waters.In addition, the size of nip rolls 15,17 in the handling process of sheet material glass G can the whole front of cover sheets glass G and the back side just can, suitably can change according to the size of sheet glass G.In addition, cover the shape of sponge of two peripherys of nip rolls 15,17, thickness, material can according to used clean-out system, suitably change from the pure water amount of spray equipment ejection etc.
The clean-out system storage tank 18 of cleaning unit 10 stores the mineral alkali system clean-out system being added with tensio-active agent used in cleaning step.Clean-out system storage tank 18 has the temperature range such as clean-out system being heated to 50 DEG C ~ 80 DEG C and the function of carrying out being incubated.The clean-out system that clean-out system storage tank 18 supplies is ejected into two surfaces of the sheet glass G of carrying in brush unit 12 by nozzle 18a, 18b.The clean-out system that clean-out system storage tank 18 supplies is ejected into two surfaces of the sheet glass G of carrying in sponge unit 14 by nozzle 18c, 18d.To be supplied by clean-out system storage tank 18 and the clean-out system being injected into two of sheet glass G surperficial is wandered from sheet glass G, be recycled to clean-out system and reclaim in storage tank (and not shown).
Pure water storage tank 19 stores described pure water or ultrapure water.Pure water storage tank 19 has and pure water or ultrapure water to be heated and the function be incubated the temperature range of such as 25 DEG C ~ 80 DEG C.The pure water that pure water storage tank 19 supplies by nozzle 19a, 19b or ultrapure water are ejected into two surfaces of the sheet glass G of carrying in spray unit 16.Supplied by pure water storage tank 19 and be injected into the surperficial pure water of two of sheet glass G or ultrapure water is wandered from sheet glass G, and being recycled to pure water agent and reclaiming in storage tank (and not shown).
In addition, in this example, as shown in Figure 4, brush unit 12 and sponge unit 14 share clean-out system storage tank 18, but also can use respective clean-out system storage tank 18.Now, brush unit 12 and sponge unit 14 can use the clean-out system of different concns to clean sheet glass G.
Secondly, the cleaning process of the sheet glass G of washing unit 1 is piecewise described.First, in the brush unit 12 of cleaning unit 10, carry out the hairbrush cleaning of sheet glass G.Specifically, be attached to two surfaces of sheet glass G from the mineral alkali system clean-out system of nozzle 18a, 18b injection, and rotated by the axle of cleaning brush roll 12a, 12b and two surfaces of sheet glass G are cleaned.
Secondly, in the sponge unit 14 of cleaning unit 10, carry out the sponge cleaning of sheet glass G.Specifically, be attached to two surfaces of sheet glass G from the mineral alkali system clean-out system of nozzle 18c, 18d injection, and rotated by the axle of cleaning sponge roller 14a, 14b and two surfaces of sheet glass G are cleaned.
Secondly, at the nip rolls 15 of cleaning unit 10, carry out the sponge cleaning of sheet glass G.Specifically, the washing fluid (such as pure water or ultrapure water) that the spray equipment (and not shown) being arranged on nip rolls 15 upstream side sprays soaks the front of sheet glass G and the back side and prevents drying, thus, fail to be inhibited by the set being attached to the clean-out system at front and the back side that sponge unit 14 is removed.When sheet glass G advances from upstream toward downstream, a pair nip rolls 15 in the front and the back side that are arranged on sheet glass G rotates, and is removed by the dirt settling in the front and the back side that are attached to sheet glass G.Portion of sponge is pressed to sheet glass G (compressing) by nip rolls 15, and utilizes axle rotation will remain in the surperficial clean-out system removal of sheet glass G two.According to supply sheet glass G and the concentration comprising the scavenging solution of clean-out system be recycled in clean-out system recovery storage tank (and not shown) controls by nip rolls 15 power be pressed against on sheet glass G.Clean-out system reclaims in storage tank the liquid reclaimed containing scavenging solution, but if scavenging solution is attached on sheet glass G, then the amount being recovered to the scavenging solution in clean-out system recovery storage tank just reduces.That is, the concentration being recycled to the scavenging solution that clean-out system reclaims in storage tank becomes the concentration of the scavenging solution before lower than the supply be stored in clean-out system storage tank 18.Therefore, being recycled to by measuring the concentration that clean-out system reclaims the scavenging solution in storage tank, can measuring because scavenging solution is attached to the dustiness of the sheet glass G that sheet glass G causes.When the dustiness height of sheet glass G, that is, when the concentration being recycled to the scavenging solution in clean-out system recovery storage tank is low, nip rolls 15 is pressed against the power on sheet glass G by enhancing, improves the cleaning force of nip rolls 15, when the dustiness of sheet glass G is low, that is, when being recycled to clean-out system and reclaiming the concentration height of the scavenging solution in storage tank, weaken the power be pressed against by nip rolls 15 on sheet glass G, reduce the cleaning force of nip rolls 15.Fig. 6 represents to be recycled to concentration that clean-out system reclaims the scavenging solution in storage tank and the chart of example nip rolls 15 being pressed against the relation of the power on sheet glass G.As shown in the drawing, the concentration of scavenging solution is lower, and scavenging solution is more attached on sheet glass G, and the front of sheet glass G and the back side more contaminated, therefore, strengthen and nip rolls 15 be pressed against power on sheet glass G to clean sheet glass G.On the other hand, the concentration of scavenging solution is higher, and scavenging solution is more non-cohesive on sheet glass G, and the front of sheet glass G and the back side are more not contaminated, therefore, weakens and nip rolls 15 is pressed against power on sheet glass G to clean sheet glass G.The concentration being recycled to the scavenging solution in clean-out system recovery storage tank is lower, more shorten the distance of nip rolls 15 and sheet glass G, and nip rolls 15 is pressed against the power on sheet glass G by enhancing.Thereby, it is possible to remove the clean-out system be attached on sheet glass G, and suppress the set that detergent composition occurs.And the pure water that the spray equipment (and not shown) being arranged on nip rolls 15 downstream side sprays or ultrapure water by soaking front and the back side of sheet glass G, and prevent the drying of sheet glass G, sheet glass G is removed to downstream simultaneously.
Secondly, in the spray unit 16 of cleaning unit 10, carry out the rinse step removed by the mineral alkali system clean-out system being attached to sheet glass G surface.Specifically, from two surfaces being attached to sheet glass G through temperature controlled washing fluid (such as pure water or ultrapure water) that nozzle 19a, 19b eject, thus, the surface of sheet glass G is by pure water or ultrapure water rinsing, and the mineral alkali system clean-out system being attached to surface is flushed away.At this, so-called temperature controls to be instigate that such as temperature head is more than 0 DEG C relative to the clean-out system temperature being about to carry out before rinse step and the washing fluid of less than 25 DEG C permeated at the initial stage of rinse step.Cleaning unit 10 makes that temperature head (sanitising agent temperature-irrigating fluid temperature) is more than 0 DEG C relative to the clean-out system temperature being about to carry out before rinse step and the washing fluid of less than 25 DEG C permeated at the initial stage of rinse step.Thus, the removal efficiency of the mineral alkali system clean-out system on the surface being attached to sheet glass G can be improved.In addition, attachment pure water or ultrapure water and moistening state is become by the surface of the sheet glass G of spray unit 16.The state of surface wettability is kept to be moved to the position being provided with nip rolls 17 by the sheet glass G of cleaning unit 10.Nip rolls 17, in the same manner as nip rolls 15, cleans the sheet glass G being in the state of being soaked by spray equipment (and not shown).Utilize nip rolls 17, carry out the removal step removing pure water or ultrapure water.According to supply sheet glass G and the electric conductivity being recycled to the pure water in pure water recovery storage tank (and not shown) controls by nip rolls 17 power be pressed against on sheet glass G.Pure water reclaims in storage tank the pure water reclaimed containing clean-out system, if utilize nip rolls 17 to remove the clean-out system be attached on sheet glass G, be then recovered to the amount increase that pure water reclaims the clean-out system contained by pure water in storage tank, therefore, the electric conductivity of the pure water be recovered improves.Therefore, being recycled to by measuring the electric conductivity that pure water reclaims the pure water in storage tank, the cleanliness factor of sheet glass G can be measured.When the cleanliness factor height of sheet glass G, that is, at the clean-out system utilizing the nip rolls 15 of upstream side etc. to remove to be attached on sheet glass G and electric conductivity is low time, weaken and nip rolls 17 is pressed against the power on sheet glass G and cleans, when the cleanliness factor of sheet glass G is low, that is, when clean-out system flows into electric conductivity height in pure water recovery storage tank, nip rolls 17 is pressed against the power on sheet glass G by enhancing, and improves the cleaning force of nip rolls 17.Being recycled to pure water, to reclaim the electric conductivity of the pure water in storage tank higher, more shortens the distance of nip rolls 17 and sheet glass G, strengthens the power be pressed against by nip rolls 17 on sheet glass G.Thereby, it is possible to removed by the clean-out system be attached on sheet glass G, and suppress the set that detergent composition occurs.Suppress to occur the set of detergent composition due to clean-out system can be removed from sheet glass G, so when forming black matrix" etc. on sheet glass G, the poor attachment of black matrix" can be suppressed, bonding after peel off.The pure water that the spray equipment (and not shown) being arranged on nip rolls 17 downstream side sprays or ultrapure water by soaking front and the back side of sheet glass G, and prevent the drying of sheet glass G, and sheet glass G is removed to downstream simultaneously.Be handled upside down under the state of surface wettability by the sheet glass G of cleaning unit 10.Thereby, it is possible to control the foreign matter adhesion amount by the surface of the sheet glass G of cleaning unit 10.
About the method measuring the concentration of scavenging solution, the electric conductivity of pure water, any tester can be used, measured by general method.In addition, the power that nip rolls 15,17 presses to sheet glass G suitably can change according to electric conductivity of the concentration of the transporting velocity of sheet glass G, scavenging solution, pure water etc.In addition, the pure water cleaning step of pure water cleaning sheet glass G also can be set using after utilizing nip rolls 15,17 to clean.
Above, the purging method of the sheet glass cleaned piecewise is illustrated.By such cleaning, attachment clean-out system on the glass sheet can be removed, and owing to not using air knife, so it is dry that sheet material glass can be suppressed to occur, and the set of the detergent composition occurred because of clean-out system residual on sheet material glass can be suppressed.In addition, when forming black matrix" etc. on the glass sheet, the poor attachment of black matrix" can be suppressed, bonding after peel off.
< feature >
In the past, in order to remove the organism being attached to glass sheet surface, and adopt the method using mineral alkali system clean-out system cleaning glass sheet surface.The semiconductor elements such as TFT are formed on the surface of the sheet glass for the manufacture of FPD.Such sheet glass is in order to suppress the destruction because peeling off the semiconductor element that electrostatic or short circuit etc. cause, and effects on surface requires high cleanliness factor.Therefore, the method manufacturing the sheet glass with high cleanliness factor by using mineral alkali system clean-out system cleaning glass sheet surface is used.
But sheet glass uses mineral alkali system of KOH or NaOH system clean-out system to carry out cleaning to obtain high-cleanness, high, and the adhesion of black matrix" resin to this glass sheet surface is low, the known problem that there is black matrix" and peel off from glass sheet surface.Especially, in recent years, along with indicating meter height Qinghua, the live width and the spacing that are configured in the black matrix" of glass sheet surface reduce gradually, and therefore the adhesion of black matrix" resin to glass sheet surface is lowered into as major issue.
In addition, the specific organism (tensio-active agent particularly contained by sanitising agent) being attached to glass sheet surface likely becomes the reason that black matrix" resin reduces the adhesion of glass sheet surface.Specifically, if use the mineral alkali system clean-out system being added with tensio-active agent to clean glass sheet surface, then black matrix" resin reduces the adhesion of glass sheet surface.Therefore, the reason that the adhesion likely becoming black matrix" resin from the organism of tensio-active agent reduces.In addition, the organism causing the adhesion of black matrix" resin to reduce likely comprises such as from the organism in the atmosphere under the organism of the holding paper contained by sheet glass laminate and the keeping of sheet glass laminate and carrying environment.
In this example, in the cleaning step using the mineral alkali system clean-out system being added with tensio-active agent to clean glass sheet surface, do not use air knife and utilize nip rolls to clean sheet glass, thus, following sheet glass can be manufactured: the set suppressing to occur detergent composition, and remove clean-out system, there is high cleanliness factor, and the adhesion of black matrix" resin does not reduce.Tensio-active agent contained by the clean-out system used in cleaning step brings organism, and this organism is removed from glass sheet surface by cleaning step.This organism is the organism causing black matrix" resin to reduce the adhesion of glass sheet surface.This organism to be the hold-time in GC/MS (gas chromatography plot quality analysis meter) be organism of more than 18 minutes is such as aromatics or nonionogenic tenside.The manufacture method of this example can improve the adhesion of black matrix" resin to glass sheet surface.In addition, the nonpolarity tubing string TC-1 using GLScience limited-liability company to manufacture is as the capillary column used in GC/MS.
In this example, at the cleaning step postadhesion of sheet glass at the every 1cm of quality optimization of the specific organism (tensio-active agent particularly contained by sanitising agent) of glass sheet surface
2glass sheet surface is 0.05ng ~ 0.50ng, more preferably 0.05ng ~ 0.25ng.Organic quality is more, and black matrix" resin more reduces the adhesion of glass sheet surface, and the specific organic quality being therefore attached to glass sheet surface is more few better, in this example, by controlling as the every 1cm of glass sheet surface
2for 0.05ng ~ 0.50ng, the adhesion of black matrix" resin can be improved.
So, by measuring the concentration of the scavenging solution be recycled in clean-out system recovery storage tank, being recycled to the electric conductivity of the pure water in pure water recovery storage tank, the cleanliness factor of sheet glass G can be measured.Therefore, according to the concentration of scavenging solution, the electric conductivity of pure water, by controlling as the every 1cm of glass sheet surface
2for 0.05ng ~ 0.50ng, the adhesion of black matrix" resin can be improved.
In addition, the manufacture method of this example is especially effective when manufacturing the live width of black matrix" and closely spaced colour filter panel.Colour filter panel is the sheet glass defining colour filter at surface configuration black matrix" and rgb pixel.Even if having by the sheet glass manufactured by the manufacture method of this example the black matrix" being less than 10 μm of live widths in surface configuration, black matrix" is also fully suppressed to be peeled off.Therefore, this sheet glass can have the high definition black matrix" of 3 μm ~ 5 μm of live widths in surface configuration.
In this example, in the brush unit 12 and sponge unit 14 of cleaning unit 10, after utilizing mineral alkali system clean-out system cleaned sheet glass G surface, nip rolls 15 is utilized to clean.At nip rolls 15, the mineral alkali system clean-out system being attached to sheet glass G surface is washed away by pure water or ultrapure water and removes.In addition, in the spray unit 16 of cleaning unit 10, behind cleaned sheet glass G surface, nip rolls 17 is utilized to clean.Because do not use air knife, so the drying of sheet glass G is inhibited, the mineral alkali system clean-out system being attached to sheet glass G surface is removed by nip rolls 15,17.In addition, by the difference being about to arrive the sanitising agent temperature of nip rolls 15 and the sanitising agent temperature after just having left nip rolls 15 is set to more than 0 DEG C and less than 25 DEG C, and the removal efficiency being attached to the mineral alkali system clean-out system on the surface of sheet glass G is improved.
The mineral alkali system clean-out system used in cleaning step contains tensio-active agent.Tensio-active agent is described above, is the organism causing black matrix" resin to reduce the adhesion of glass sheet surface.If use nonionogenic tenside (nonionic surfactant) in this tensio-active agent, then compared with during use anion surfactant (anionic surfactant), at the easy remaining surface promoting agent of glass sheet surface, and black matrix" is caused to peel off.Last at cleaning step, nip rolls is utilized to clean sheet glass, and utilize relative to the sanitising agent temperature being about to arrive before nip rolls and temperature head is controlled to be more than 0 DEG C and the pure water of less than 25 DEG C or ultrapure water rinsing glass sheet surface, and the clean-out system being attached to sheet glass G surface is washed away, thereby, it is possible to improve the organic effect removed and be attached to glass sheet surface.
In this example, the clean-out system used in cleaning step utilizes water to be diluted by commercially available glass substrate scavenging solution, and add the alkaline components such as KOH to obtained diluent and formed.Specifically, the alkaline components such as KOH are added to the diluent of glass substrate scavenging solution, and forms the clean-out system with the above concentration of 1 quality %.By adding alkaline components, can when easily generating the high clean-out system of alkaline components concentration without the need to manufacturing and using when the very high scavenging solution of alkaline components concentration.The clean-out system that alkaline components concentration is high can improve the etching of sheet glass, and the adhesivity foreign matter etc. that can make the foreign matter such as cullet or dust and be attached to glass sheet surface under the state being subject to loading is peeled off from glass sheet surface and effectively removes.
In addition, form clean-out system by adding alkaline components to the diluent of glass substrate scavenging solution, its surface tension is lower than diluent.That is, by adding the alkaline components such as KOH to the diluent of the glass substrate scavenging solution containing tensio-active agent, and the effect that the surface tension of clean-out system is reduced can be obtained, this effect almost cannot obtain when being added in pure water separately by alkaline components.Thus, clean-out system becomes easily to penetrate into and adheres between foreign matter and sheet glass.And, utilize the synergistic effect that above-mentioned effect improves with the sheet glass etching obtained by clean-out system, and more effectively remove attachment foreign matter on the glass sheet.
The sheet glass manufactured by this example (glass substrate) is utilized to be suitable as glass substrate for plane display device, such as liquid crystal display glass substrate or organic EL (Electroluminescence, electroluminescent) glass substrate for display.And, especially LTPS (Low-temperaturepolysilicon, low temperature polycrystalline silicon)-TFT glass substrate for display for high-clear display or oxide semiconductor-TFT glass substrate for display is suitable as by the glass substrate manufactured by this example.
Above, the manufacture method of glass substrate of the present invention and manufacturing installation have been described in detail, but the present invention is not limited to described example and embodiment etc., can certainly carry out various improvement or change without departing from the spirit and scope of the invention.
[explanation of symbol]
1 washing unit piecewise
10 cleaning units
12 brush units
14 sponge unit
15 nip rolls
16 spray unit
17 nip rolls
18 clean-out system storage tanks
19 pure water storage tanks
G sheet glass
Claims (6)
1. a manufacture method for glass substrate, is characterized in that: it is the manufacture method that surface forms the colour filter glass substrate of black matrix" resin, and possesses following steps:
Cleaning step, comprises the scavenging solution of the mineral alkali system clean-out system being added with surface active material to described glass substrate supply and cleans,
Rinse step, makes washing fluid penetrate in the scavenging solution being attached to described glass baseplate surface in described cleaning step, and
Removal step, by infiltration in described rinse step there being the described scavenging solution of described washing fluid to pass into from one end of described glass substrate across to the cleaning unit set by the other end, and removes this scavenging solution.
2. the manufacture method of glass substrate according to claim 1, is characterized in that:
About described removal step, described glass substrate is being passed at least rear step in the step before and after described cleaning unit, the surperficial feeding liquid in order to prevent described scavenging solution dry to described glass substrate.
3. the manufacture method of glass substrate according to claim 1 and 2, is characterized in that:
About described removal step,
The described scavenging solution of cleaned described glass substrate is reclaimed, and measures the concentration of the scavenging solution reclaimed,
The concentration of the described scavenging solution recorded is lower, more strengthens the power described cleaning unit being pressed against described surface.
4. the manufacture method of glass substrate according to any one of claim 1 to 3, is characterized in that:
About described removal step,
After utilizing described cleaning unit to be removed by described scavenging solution, utilize described liquid to clean described glass substrate, and measure the electric conductivity of cleaned described liquid,
The electric conductivity of the described liquid recorded is higher, more strengthens the power described cleaning unit being pressed against described surface.
5. the manufacture method of glass substrate according to any one of claim 1 to 4, is characterized in that:
Described cleaning unit be make relative to be about to the scavenging solution before carrying out described rinse step temperature and temperature head is more than 0 DEG C and the washing fluid of less than 5 DEG C described rinse step initial stage infiltration remove.
6. a manufacturing installation for glass substrate, is characterized in that: it is the manufacturing installation that surface forms the colour filter glass substrate of black matrix" resin, and possesses as lower device:
Washing unit, it comprises the scavenging solution of the mineral alkali system clean-out system being added with surface active material to described glass substrate supply and cleans, and
Removal device, it makes washing fluid penetrate into be attached in the scavenging solution of described glass baseplate surface, and by infiltration there being the described scavenging solution of described washing fluid to pass into from one end of described glass substrate across to the cleaning unit set by the other end, and remove this scavenging solution.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014176538 | 2014-08-29 | ||
| JP2014-176538 | 2014-08-29 | ||
| JP2015-167033 | 2015-08-26 | ||
| JP2015167033A JP6088011B2 (en) | 2014-08-29 | 2015-08-26 | Glass substrate manufacturing method and glass substrate manufacturing apparatus |
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| Publication Number | Publication Date |
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| CN105384354A true CN105384354A (en) | 2016-03-09 |
| CN105384354B CN105384354B (en) | 2018-05-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510549374.3A Active CN105384354B (en) | 2014-08-29 | 2015-08-31 | The manufacturing method of glass substrate and the manufacture device of glass substrate |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113376877A (en) * | 2021-06-18 | 2021-09-10 | 武汉敏之捷光电科技有限公司 | Pretreatment process for LCD (liquid crystal display) panel production and manufacture |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3898351A (en) * | 1972-05-26 | 1975-08-05 | Ibm | Substrate cleaning process |
| CN101767940A (en) * | 2009-12-30 | 2010-07-07 | 东莞宏威数码机械有限公司 | Glass-cleaning and drying device |
| CN102092956A (en) * | 2010-12-01 | 2011-06-15 | 秦皇岛玻璃工业研究设计院 | Mildew-proof treatment method for flat glass |
| CN203212463U (en) * | 2013-04-22 | 2013-09-25 | 钱刚 | Double-sided frosted glass machine |
-
2015
- 2015-08-31 CN CN201510549374.3A patent/CN105384354B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3898351A (en) * | 1972-05-26 | 1975-08-05 | Ibm | Substrate cleaning process |
| CN101767940A (en) * | 2009-12-30 | 2010-07-07 | 东莞宏威数码机械有限公司 | Glass-cleaning and drying device |
| CN102092956A (en) * | 2010-12-01 | 2011-06-15 | 秦皇岛玻璃工业研究设计院 | Mildew-proof treatment method for flat glass |
| CN203212463U (en) * | 2013-04-22 | 2013-09-25 | 钱刚 | Double-sided frosted glass machine |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113376877A (en) * | 2021-06-18 | 2021-09-10 | 武汉敏之捷光电科技有限公司 | Pretreatment process for LCD (liquid crystal display) panel production and manufacture |
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| CN105384354B (en) | 2018-05-29 |
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