CN105377732B - Glass film exfoliating device - Google Patents

Glass film exfoliating device Download PDF

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Publication number
CN105377732B
CN105377732B CN201480040414.5A CN201480040414A CN105377732B CN 105377732 B CN105377732 B CN 105377732B CN 201480040414 A CN201480040414 A CN 201480040414A CN 105377732 B CN105377732 B CN 105377732B
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China
Prior art keywords
glass
film
value
blade
characteristic value
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Active
Application number
CN201480040414.5A
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Chinese (zh)
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CN105377732A (en
Inventor
伊东翔
佐佐木博
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Nippon Electric Glass Co Ltd
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Nippon Electric Glass Co Ltd
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Priority to CN201710327827.7A priority Critical patent/CN107381199B/en
Publication of CN105377732A publication Critical patent/CN105377732A/en
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H41/00—Machines for separating superposed webs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B43/00—Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
    • B32B43/006—Delaminating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H29/00—Delivering or advancing articles from machines; Advancing articles to or into piles
    • B65H29/54—Article strippers, e.g. for stripping from advancing elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2315/00—Other materials containing non-metallic inorganic compounds not provided for in groups B32B2311/00 - B32B2313/04
    • B32B2315/08—Glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00—Means using fluid
    • B65H2406/10—Means using fluid made only for exhausting gaseous medium
    • B65H2406/12—Means using fluid made only for exhausting gaseous medium producing gas blast
    • B65H2406/122—Nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00—Means using fluid
    • B65H2406/30—Suction means
    • B65H2406/34—Suction grippers
    • B65H2406/342—Suction grippers being reciprocated in a rectilinear path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2513/00—Dynamic entities; Timing aspects
    • B65H2513/10—Speed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2513/00—Dynamic entities; Timing aspects
    • B65H2513/40—Movement
    • B65H2513/41—Direction of movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2515/00—Physical entities not provided for in groups B65H2511/00 or B65H2513/00
    • B65H2515/20—Volume; Volume flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2515/00—Physical entities not provided for in groups B65H2511/00 or B65H2513/00
    • B65H2515/30—Forces; Stresses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2553/00—Sensing or detecting means
    • B65H2553/80—Arangement of the sensing means
    • B65H2553/81—Arangement of the sensing means on a movable element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2801/00—Application field
    • B65H2801/61—Display device manufacture, e.g. liquid crystal displays

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
  • Joining Of Glass To Other Materials (AREA)

Abstract

The present invention relates to a kind of glass film exfoliating device (1), it possesses the blade (3) peeled off from supporting glass (SG) with flexible glass-film (GF) made to be layered in supporting glass (SG), load cell (4) that the characteristic value (Z) that the size of the resistance when glass film exfoliating device (1) possesses pair with stripping glass-film (GF) accordingly changes is detected and arithmetic unit (5) and according to the characteristic value (Z) and standard value (Z for detecting0) decision circuit (6) and servomotor (7) that are controlled to the translational speed (V) of blade (3).

Description

Glass film exfoliating device
Technical field
The present invention relates to a kind of glass peeled off from the supporting mass with flexible glass-film for making to be layered on supporting mass Film exfoliating device.
Background technology
It is well known that for thin-walled property (for example, thickness of slab be 300 μm) is with flexible glass-film and supports the glass The supporting glass of glass film, is set to below 2.0nm by the surface roughness Ra for turning into the composition surface in the face of the side that contacts with each other respectively, The direct ground in two composition surfaces is contacted, glass film laminate is formed so as to glass-film and supporting glass are laminated.
According to the glass film laminate, it is laminated by with supporting glass, so that the property of the easy flexure of glass-film is temporary When exclude, and glass-film moderately touches with supporting glass and acted as the component of one.Therefore, glass product The operation of the glass-film in manufacturing process is extremely easy.
For example, the glass-film of liquid crystal display (LCD) is in its manufacturing process, formed being laminated in supporting glass After glass film laminate, the various treatment such as the formation of transparency electrode are carried out.Then, in order to be fitted into product, treatment is terminated Glass-film afterwards is peeled off from supporting glass.
Here, although not using glass-film as the object peeled off in patent document 1, but disclosing for comprising thin plate glass Glass substrate and supported via resin bed the substrate support glass substrate layered product, for make support glass substrate and The device that resin bed (they below, are expressed as into supporting substrates in the lump) is peeled off from glass sheet substrate.Disclosed in the document Device possesses：From the blade between the side insertion glass sheet substrate and supporting substrates of layered product and to supporting base Multiple absorption layers that the surface of plate is adsorbed.
And, the end of the supporting substrates being partially stripped with the insertion because of blade is starting point, and absorption layer difference is successively Supporting substrates are stretched to the direction action for from glass sheet substrate separate, so that the supporting substrates are by stages from thin plate glass Glass strippable substrate.It should be noted that the pulling force for acting on supporting substrates from each absorption layer is all based on identical mode, with It is controlled by way of becoming larger the pressure improved in the working cylinder linked with each pad.
Citation
Patent document 1：International Publication No. 2010/090147
The content of the invention
Invent problem to be solved
However, in the case where the treatment associated with heating is implemented to glass-film using above-mentioned glass film laminate, Contiguity power in the presence of the glass-film and supporting glass produces the situation of skewness.For example, as a major reason, can recognize To be, because the whole position in contiguity portion of glass-film and supporting glass contiguity is not heated to identical temperature, to cause glass-film The temperature distributing disproportionation of layered product.In the case where such temperature distributing disproportionation is generated, in the portion for being heated to relatively-high temperature Position and it is heated only between the position of low temperature, acts on the size generation difference of contiguity power between glass-film and supporting glass.
Specifically, compared with other positions, the position for being heated to 300 DEG C or so in the contiguity portion of the two is made Significantly increase for the contiguity power between glass-film and supporting glass.Can speculate this is because, the glass touched by hydrogen bond Film and supporting glass because of heating to be boundary before and after 300 DEG C, to the shape of the covalent bond contiguity of the contiguity power by producing more strength State is shifted.
Then, due to the difference of the size of the contiguity power of generation between position, used by the device disclosed in patent document 1 In the case of the treatment for peeling off glass-film from supporting glass, following problem can be produced.I.e., in this case, with glass-film Whether the size with the contiguity power of supporting glass generates difference independently between position, and each absorption layer is based on phase to glass-film Same mode applies pulling force successively.
Therefore, even if at the big position of contiguity power, also the position small with contiguity power is identically to glass-film applying pulling force.By This, excessive stress on the glass-film, so as to cause to be produced on glass-film the situation of breakage.In this regard, in order to avoid The generation of such bad phenomenon, it may be considered that envision there is the big position of contiguity power change in advance, to be adapted to the stripping at the position Mode, the whole position also comprising the small position of contiguity power is peeled off in an identical manner.
In the case where making glass-film be peeled off from supporting glass by such mode, exist and be prevented from the glass-film Produce damaged possibility.However, this is caused small in contiguity power and can be implemented the position of overburden operation with faster speed originally, Also have to implement overburden operation with the speed at the position for coordinating contiguity power big.As a result, can cause to make manufacture efficiency notable Deteriorate this new problem to produce.
It should be noted that being not only laminated into being contacted to the direct ground of glass-film and supporting glass as described above Layered product makes glass-film to produce such problem in the case of being peeled off from supporting glass.For example, to the two via adhesive layer The layered product being laminated makes the supporting mass that the situation and the material from beyond by glass of glass-film stripping are constituted make glass-film In the case of stripping, because the difference of the size of the contiguity power between position is equally possible the such problem of generation.
Also, contiguity power is generated between glass-film not only in a layered product and the position in the contiguity portion of supporting mass Such problem can be produced in the case of difference in size.For example, generating contiguity each other in multiple glass film laminates In that case of the difference in size of power, because the difference is equally possible the such problem of generation.
The technical task of the invention for completing in view of the foregoing is, when making glass-film be peeled off from supporting mass, energy It is enough prevent the glass-film it is damaged while implement overburden operation as quickly as possible.
Scheme for solving problem
The device of the invention completed to solve above-mentioned problem possess make to be layered on supporting mass with flexible The stripping unit that glass-film is peeled off from supporting mass, it is characterised in that the glass film exfoliating device possesses：Detection unit, its is right The characteristic value accordingly changed with the size of resistance when peeling off glass-film is detected；And control unit, it is according to detecting Characteristic value the peeling action of stripping unit is controlled.
Here, " peeling action of stripping unit " not only comprising the glass-film relative to (fixed) state for stopping and Supporting mass, the situation that stripping unit is acted and peels off glass-film, also comprising relative to glass-film and supporting mass, is peeled off The situation (same as below) that unit is relatively acted and peels off glass-film.
According to this structure, the feature accordingly changed with the size of resistance when peeling off glass-film by detection unit pair Value is detected such that it is able to independently to being acted on therebetween at each position in glass-film and the contiguity portion of supporting mass contiguity The size of contiguity power detected.And, according to the characteristic value for detecting, control unit can control stripping unit so that its Carry out appropriate peeling action corresponding with each position.As a result, can prevent glass-film it is damaged while as far as possible It is rapidly carried out overburden operation.
In such a configuration, stripping unit is to make stripping by the crosscutting movement each other in glass-film and supporting mass From the stripping apparatus of the crosscutting movement in advance portion, peeling off advance portion turns into laminated section and the stripping that glass-film is laminated with supporting mass The border between stripping portion afterwards.
In such a configuration, characteristic value is to peeling off resistance or base that apparatus is acted on to the rightabout of moving direction In the calculated value of resistance.
If so setting, according to peeling off apparatus to the resistance of the rightabout effect of moving direction or based on resistance The calculated value of power, size that can be independently to the contiguity power at both each positions in glass-film with the contiguity portion of supporting mass is entered Row detection.As a result, peeling off apparatus can carry out appropriate peeling action corresponding with each position.
In such a configuration, calculated value can be divided by value obtained from width dimensions, the width dimensions by resistance To peel off the length in the direction along the leading section for peeling off apparatus in advance portion.
In the case where the width dimensions for peeling off advance portion change, even if in the contiguity portion of glass-film and supporting mass The size of the contiguity power of the two does not exist difference between position, and the resistance for acting on stripping apparatus can also change.Therefore, in control In the case that unit processed peels off the movement of apparatus according to the draught control, the stripping apparatus cannot carry out corresponding with each position suitable When peeling action.If however, the resistance is set into characteristic value divided by value obtained from width dimensions, with width dimensions Change is unrelated, and is capable of detecting when the value changed according to the size of the contiguity power of the two.As a result, peel off apparatus can Carry out appropriate peeling action corresponding with each position.
In such a configuration, characteristic value can peel off the front end and stripping advance portion of apparatus and the contact site of supporting mass The distance between.
If so setting, the distance between front end and stripping advance portion according to contact site can independently in glass The size of the contiguity power at both each positions in glass film and the contiguity portion of supporting mass is detected.As a result, peeling off apparatus energy Enough carry out appropriate peeling action corresponding with each position.
In such a configuration, detection unit can include：Shooting unit, it with supporting mass comprising stripping apparatus to connecing The front end of contact portion and the image in stripping advance portion are shot；And graphics processing unit, its detected by processing image away from From.
If so setting, by image procossings such as edge detection process, before more reliably can detecting contact site The distance between end and stripping advance portion.Therefore, it is possible to improve peel off apparatus carry out appropriate stripping corresponding with each position move Precision in terms of work.
In such a configuration, control unit is performed following preferably according to characteristic value and the standard value of the regulation of characteristic value Certain control in control：(1) translational speed of stripping apparatus is accelerated；(2) translational speed for peeling off apparatus is slowed down；(3) stripping is made Stop from apparatus；(4) stripping apparatus is made to move round about.
If so setting, according to the characteristic value and the standard value of the regulation of this feature value that detect, in glass-film and branch The small position of the contiguity power of body is held, the control of translational speed of the control unit by performing (1) to accelerate and peeling off apparatus can be faster Implement the stripping of the glass-film at the position fastly.On the other hand, at the position that the contiguity power of the two is big, control unit is by dividing Stage ground execution (2) slows down the translational speed of stripping apparatus, (3) makes the stopping of stripping apparatus, (4) make stripping apparatus round about Mobile control, can more accurately prevent the position from breakage is produced on glass-film.More specifically, have and peel off apparatus Power is transmitted untill breakage is produced on glass-film to glass-film, there is the situation of delay to a certain degree.Therefore, to peeling off When the size of resistance detected, the control for stopping stripping apparatus etc. is performed in the moment, thus, it is possible to prevent glass-film Breakage.
In such a configuration, it is also possible to be configured to detection unit to peel off the direction orthogonal to the moving direction of apparatus Central portion on the basis of both sides, characteristic value, and control unit is detected separately on the basis of the central portion for peeling off apparatus Each side, the translational speed of the stripping apparatus is individually controlled according to the characteristic value for detecting.
If so setting, position glass-film and the supporting mass of the both sides on the basis of by the central portion for peeling off apparatus Contiguity power it is of different sizes in the case of, can peel off apparatus both sides in side relative to opposite side it is leading in the state of It is mobile.Thereby, it is possible to avoid to implement at faster speed originally side (the one of the small position of contiguity power of overburden operation Side) have to implement stripping with the speed for coordinating the side (side at the big position of contiguity power) that can only implement overburden operation with low speed The situation as operation.As a result, can peel off more quickly glass-film.
In such a configuration, it is also possible to be configured to peel off apparatus have from the stripping apparatus to advance portion side spray is peeled off and penetrate The fluid ejectors of fluid, control unit controls the emitted dose of the fluid sprayed by fluid ejectors according to characteristic value.
If so setting, at the small position of the contiguity power of glass-film and supporting mass, before from stripping apparatus to stripping Enter portion's side spray jet body, can further promote to make glass-film be peeled off from supporting mass.
In such a configuration, stripping unit can be adsorption element, and the adsorption element is by adsorbing glass-film Moved to the departure direction left from the opposing party with the state of the surface of the side in supporting mass, so that it is horizontal to peel off advance portion Cut movement, the stripping advance portion turn into the laminated section that glass-film and supporting mass be laminated and peel off after stripping portion between Border.
In such a configuration, characteristic value can be the resistance acted on to the rightabout of departure direction adsorption element.
If so setting, according to the resistance acted on to the rightabout of departure direction adsorption element, can be independently Size to the contiguity power at both each positions in glass-film with the contiguity portion of supporting mass is detected.As a result, absorption Component can carry out appropriate peeling action corresponding with each position.
In such a configuration, translational speed or acceleration when characteristic value can be crosscutting mobile stripping advance portion.
If so setting, translational speed or acceleration according to stripping advance portion when crosscutting mobile can be independently Size to the contiguity power at both each positions in glass-film with the contiguity portion of supporting mass is detected.As a result, absorption Component can carry out appropriate peeling action corresponding with each position.
In such a configuration, preferably control unit is according to the standard value of characteristic value and the regulation of this feature value, perform with Certain control in lower control：(1) translational speed to departure direction of adsorption element is accelerated；(2) slow down adsorption element to The translational speed of departure direction；(3) stop adsorption element；(4) adsorption element is made to be moved to the rightabout of departure direction.
If so setting, according to the characteristic value and the standard value of the regulation of this feature value that detect, in glass-film and branch The small position of the contiguity power of body is held, control unit accelerates the translational speed to departure direction of adsorption element by execution (1) Control, can more quickly implement the stripping of the glass-film at the position.On the other hand, at the position that the contiguity power of the two is big, Control unit slows down the translational speed to departure direction of adsorption element, (3) by execution (2) by stages stops adsorption element Only, (4) make the control that adsorption element is moved to the rightabout of departure direction, can more accurately prevent the position in glass Produced on film damaged.
In such a configuration, preferably glass film exfoliating device possesses multiple adsorption elements, and multiple adsorption elements are right respectively Each region that the surface of one side is divided into multiple regions is adsorbed by boundary line, and from positioned at the horizontal stroke for peeling off advance portion The adsorption element for cutting the upstream side of mobile predetermined direction is risen, and adjacent adsorption element is moved to departure direction successively, the boundary line Extend along the direction orthogonal with crosscutting mobile predetermined direction.
If so setting, because the glass film exfoliating device possesses respectively to being divided into each region in multiple regions The multiple adsorption elements for being adsorbed, the position of the glass-film therefore, it is possible to be peeled off from supporting mass to each adsorption element is entered Row sectionalization.Thereby, it is possible to more accurately to acting on the two it at each position in glass-film and the contiguity portion of supporting mass contiguity Between the size of contiguity power detected and as characteristic value.Its result is to be conducive to the adsorption element to carry out appropriate stripping respectively From action.
Invention effect
As described above, according to the present invention, when making glass-film be peeled off from supporting mass, the broken of the glass-film can prevented Glass-film is peeled off while damage as quickly as possible.
Brief description of the drawings
Fig. 1 is the top view for representing the glass film exfoliating device involved by first embodiment of the invention.
Fig. 2 is the longitudinal cross-sectional side view for representing the glass film exfoliating device involved by first embodiment of the invention.
Fig. 3 is the block diagram of the controlling organization for representing the glass film exfoliating device involved by first embodiment of the invention.
Fig. 4 is the figure of the control flow chart for representing the glass film exfoliating device involved by first embodiment of the invention.
Fig. 5 is the top view for representing the glass film exfoliating device involved by second embodiment of the present invention.
Fig. 6 is the block diagram of the controlling organization for representing the glass film exfoliating device involved by second embodiment of the present invention.
Fig. 7 is the figure of the control flow chart for representing the glass film exfoliating device involved by second embodiment of the present invention.
Fig. 8 is the top view for representing the glass film exfoliating device involved by third embodiment of the present invention.
Fig. 9 is the longitudinal cross-sectional side view for representing the glass film exfoliating device involved by third embodiment of the present invention.
Figure 10 is the block diagram of the controlling organization for representing the glass film exfoliating device involved by third embodiment of the present invention.
Figure 11 is the figure of the control flow chart for representing the glass film exfoliating device involved by third embodiment of the present invention.
Figure 12 a are the frames of the controlling organization for representing the glass film exfoliating device involved by other embodiment of the invention Figure.
Figure 12 b are the frames of the controlling organization for representing the glass film exfoliating device involved by other embodiment of the invention Figure.
Figure 12 c are the frames of the controlling organization for representing the glass film exfoliating device involved by other embodiment of the invention Figure.
Figure 13 is the side view for representing the glass film exfoliating device involved by the 4th implementation method of the invention.
Figure 14 is the top view for representing the glass film exfoliating device involved by the 4th implementation method of the invention.
Figure 15 is the block diagram of the controlling organization for representing the glass film exfoliating device involved by the 4th implementation method of the invention.
Figure 16 is the figure of the control flow chart for representing the glass film exfoliating device involved by the 4th implementation method of the invention.
Figure 17 is the side view for representing the glass film exfoliating device involved by the 5th implementation method of the invention.
Figure 18 is the block diagram of the controlling organization for representing the glass film exfoliating device involved by the 5th implementation method of the invention.
Figure 19 is the figure of the control flow chart for representing the glass film exfoliating device involved by the 5th implementation method of the invention.
Figure 20 is represented in embodiment and comparative example to as the glass-film and the supporting glass-film for peeling off object The top view of the glass film laminate that supporting glass is laminated.
Specific embodiment
Hereinafter, the glass film exfoliating device involved by embodiments of the present invention is illustrated referring to the drawings.Need It is bright, in each implementation method of following explanation, for being less than 300 μm and the glass-film with flexibility and conduct to thickness Support the glass film laminate that the supporting glass of the supporting mass of the glass-film is laminated, glass film exfoliating device be for The device for making glass-film be peeled off from supporting glass.However, as described later, glass film exfoliating device involved in the present invention also can The supporting mass that being enough in constitutes material of the glass-film from beyond by glass peels off such situation, for glass-film and supporting mass The layered product that is laminated via adhesive layer and make the situation that glass-film peels off.
First, the glass-film of object is peeled off to turning into the embodiments of the present invention, as the supporting glass-film The supporting glass of supporting mass and it is laminated with the glass-film and is said with the glass film laminate of the supporting glass It is bright.
It is respective as the side that contacts with each other for the glass-film with flexibility with the supporting glass as supporting mass The surface roughness Ra on the composition surface in face is below 2.0nm, and glass film layers are formed by contacting the direct ground in two composition surfaces Stack.In addition, glass-film has been carried out in the state of glass film laminate and heats associated treatment, with regard to glass-film stacking For body, glass-film generates temperature distributing disproportionation with the contiguity portion of supporting glass in managing in this place.Thus, in the portion in contiguity portion Interdigit, the size for acting on the contiguity power between two glass produces difference.
<First embodiment>
Hereinafter, the glass film exfoliating device involved by first embodiment of the invention is illustrated.
Fig. 1 is the top view for representing the glass film exfoliating device 1 involved by first embodiment of the invention, Fig. 2 be by The longitudinal cross-sectional side view of the neighbouring enlarged representation of the blade 3 set in glass film exfoliating device 1.As shown in these figures, glass-film stripping Possess from device 1：The workbench 2 that is loaded to the glass film laminate G that glass-film GF and supporting glass SG are laminated, The blade 3 of crosscutting movement each other of glass-film GF and supporting glass SG and to when blade 3 is moved along moving direction X Rightabout act on the load cell (load cell) 4 that the resistance R of the blade 3 is detected.
Fig. 3 is the block diagram of the controlling organization for representing glass film exfoliating device 1, and Fig. 4 is the figure for representing control flow chart.Such as this Shown in a little figures, used as the controlling organization of glass film exfoliating device 1, glass film exfoliating device 1 possesses：Arithmetic unit 5, it receives and Think highly of oneself set sensor 4 signal S1 and detect (calculate) characteristic value Z described later；Decision circuit 6, it is received from computing dress 5 signal S2 is put, judgement described later is implemented to characteristic value Z；Servomotor 7, signal S3 of its basis from decision circuit 6, The translational speed V of blade 3 is controlled by driven roller；And servomotor 8, signal S4 of its basis from decision circuit 6, The emitted dose Q of the compressed air A from the injection of blade 3 is controlled by regulating valve.
Workbench 2 possesses the mounting surface 2a of mounting glass film laminate G.Mounting surface 2a is plane, and its circumferential profile is formed It is rectangle.In addition, the long side surface 2b and short sides 2c of the workbench 2 of circumferential profile to constitute rectangle are laminated with glass-film respectively The parallel mode of the length direction of body G, width (direction orthogonal to the longitudinal direction), by glass film laminate G with fixation State be positioned on mounting surface 2a.
Blade 3 along the X-direction parallel with the length direction of glass film laminate G, in glass-film GF and supporting glass SG Each other crosscutting movement.And, as the mechanism for crosscutting movement, possess a pair long sides respectively along workbench 2 The driven roller (not shown) that face 2b is rolled.And, by from servomotor 7 (diagram is eliminated in Fig. 1, Fig. 2) to the driving Roller transmits power so that blade 3 is moved in X direction.Blade 3 is controlled to the translational speed V of X-direction by servomotor 7.Need It is noted that in the present embodiment, using stainless steel as blade 3 material.However, the material of blade 3 is not limited to This, for example, it is also possible to use teflon (Teflon；Registration mark) the less material of easy damaged glass-film GF when peeling off such as resin Matter.
In addition, blade 3 is formed with along the width of glass film laminate G mode more long.Also, its leading section 3a Formed in the way of turning into towards rear side from the front side of X-direction and going up a slope.And, blade 3 makes glass with being moved to X-direction Glass film GF is gradually peeled off from supporting glass SG.Thus, after the laminated section GFa being laminated as two glass GF, SG and stripping The stripping advance portion GFc crosscutting movements in X direction on the border between stripping portion GFb.It should be noted that in present embodiment In, width dimensions W is substantially the same with the length of the width of glass-film GF, and the width dimensions W is stripping advance portion GFc The leading section 3a along blade 3 direction length.
And, in the leading section 3a of blade 3, it is formed with along the width of glass film laminate G multiple for spraying The jet 3b of compressed air A.Jet 3b is connected with air compressor (not shown), from the pressure of air compressor supply Contracting air A is penetrated from blade 3 to advance portion GFc side sprays are peeled off.The aperture regulation that the emitted dose Q of compressed air A passes through regulating valve.Separately Outward, the aperture of regulating valve is controlled by servomotor 8.It should be noted that can also be from jet 3b injections except compression is empty Beyond gas A comprising the fluid such as water or grease, the liquid of interfacial agent.Here, in the present embodiment, blade 3 constitutes stripping From unit (stripping apparatus), air compressor constitutes fluid ejectors with regulating valve.
Load cell 4 is respectively arranged with the two ends of blade 3.Two load cells 4 are present in the center of blade 3 Symmetrical position on the basis of portion.And, load cell 4a, 4b are respectively in the contiguity portion of glass-film GF and supporting glass SG The resistance R (R1, R2) that changes by the size of the contiguity power of two glass GF, SG of each position detected.
Next, reference picture 3 and Fig. 4 are carried out to the detailed content of the controlling organization of above-mentioned glass film exfoliating device 1 Explanation.First, passed to arithmetic unit 5 as signal S1 from the resistance R (R1, R2) that two load cells 4 (4a, 4b) detect Pass.The arithmetic unit 5 that have received the signal S1 from load cell 4 advances with i.e. R1+R2 by by resistance R's divided by stripping The width dimensions W of portion GFc and detect (calculate) characteristic value Z.That is, characteristic value Z is as the calculated value based on resistance R by Z= (R1+R2)/W is represented.Characteristic value Z be with from supporting glass SG peel off glass-film GF when the size of resistance accordingly change Value.This feature value Z that arithmetic unit 5 will be detected (calculate) sends as signal S2 to decision circuit 6.Here, in this reality Apply in mode, detection unit is constituted by load cell 4 and arithmetic unit 5.
The decision circuit 6 for receiving the signal S2 from arithmetic unit 5 judges it is as the signal S2's for receiving first Characteristic value Z is than standard value Z that it specifies0Small situation (Z ＜ Z0：Hereinafter referred to as pattern 1), as the spy of the signal S2 for receiving Value indicative Z is than standard value Z that it specifies0Big situation (Z ＞ Z0：Hereinafter referred to as pattern 2) and as the signal S2's for receiving The standard value Z that characteristic value Z specifies with it0Equal situation (Z=Z0：Hereinafter referred to as pattern 3) in which kind of situation.Here, mark Quasi- value Z0Value for example determined by following process.(process 1) is calculated makes touching by hydrogen bond for two glass GF, SG Position can move blade 3 when peeling off and be unlikely to be produced on glass-film GF the limit of breakage translational speed V (with Under, translational speed V is labeled as reference speed V0).(process 2) is by the reference speed V in blade 3 to calculate0By transporting when mobile The value for calculating the characteristic value Z that device 5 is detected is defined as standard value Z0.It should be noted that standard value Z0(reference speed V0) Value is different because of various conditions such as the thicknesss of slab of glass-film GF, thus preferably before the overburden operation of implementation glass-film GF beforehand through Experiment etc. calculates appropriate value.
And, in the case of pattern 1, as the signal S3 of result of determination via servo amplifier to servomotor After 7 transmission, the servomotor 7 for receiving signal S3 increases the power transmitted to driven roller.Thus, perform and accelerate blade 3 To the control of the translational speed V of X-direction.It should be noted that can be with the characteristic value Z for detecting and standard value Z0Between difference Component interlock, translational speed V is controlled in the mode that the bigger translational speed V of difference component is faster, it is also possible to difference component independently with The mode of constant speed is only accelerated to control translational speed V.
In addition, in the case of pattern 1, as the signal S4 of result of determination via servo amplifier to servo-electric After machine 8 is transmitted, the servomotor 8 for receiving signal S4 increases the aperture of regulating valve.Thus, performing increases compressed air A's The control of emitted dose Q.Here, identically with the translational speed V of blade 3, can be with characteristic value Z and standard value Z0Between difference Amount is interlocked, and controls emitted dose Q in the bigger more increased modes of emitted dose Q of difference component, it is also possible in the way of only increasing constant basis Control emitted dose Q.
In the case of pattern 2, for the value of characteristic value Z, decision circuit 6 further implements following judgement.Namely it is decided that It is the standard value Z of the value in the threshold value as the translational speed V for slowing down blade 3 or the mobile stopping for making blade 3 of characteristic value Z1 Following situation (Z0＜ Z≤Z1：Hereinafter referred to as pattern 21), the value of characteristic value Z compare Z1It is big and as stopping the movement of blade 3 Only or make the standard value Z of the threshold value that blade 3 moves to the direction opposite with X-direction2Following situation (Z1＜ Z≤Z2：Hereinafter, Referred to as pattern 22) and the value of characteristic value Z compare Z2Big situation (Z ＞ Z2：Hereinafter referred to as pattern 23) in which kind of situation.Need It is noted that these standard values Z1、Z2Can be determined by arbitrary method.For example, standard value Z1、Z2Can be by being set to Standard value Z0Constant times and calculate, but preferably with above-mentioned standard value Z0Appropriate value is calculated in advance likewise by experiment.
And, in the case of pattern 21, as the signal S3 of result of determination via servo amplifier to servo-electric After machine 7 is transmitted, the servomotor 7 for receiving signal S3 reduces the power transmitted to driven roller.Thus, perform and slow down blade 3 Control from the translational speed V to X-direction.In addition, in the case of pattern 22, servomotor 7 stops driven roller, so that Execution makes the control of the mobile stopping of blade 3.Also, in the case of pattern 23, servomotor 7 makes driven roller to phase negative side To rolling, so as to perform the control for making blade 3 be moved to the direction opposite with X-direction.Here, in the present embodiment, judge 6 and two servomotor of circuit 7,8 constitutes control unit.It should be noted that can be with the characteristic value Z and standard value for detecting Z0Difference component interlock, with the movement of the blade 3 in the case of the bigger translational speed V of difference component slower mode control model 21 Speed V, it is also possible to difference component blade 3 independently in the way of constant speed of only slowing down in the case of control model 21 Translational speed V.In addition, in the case of pattern 21, the aperture of regulating valve is reduced by servomotor 8, it is empty to reduce compression The emitted dose Q of gas A.Also, in the case of pattern 22,23, regulating valve is completely closed by servomotor 8, so that pressure The emitted dose Q of contracting air A is zero.
In the case of pattern 3, transmitted to servomotor 7 via servo amplifier in the signal S3 as result of determination Afterwards, the servomotor 7 for receiving signal S3 maintains the power transmitted to driven roller.Thus, maintain blade 3 to X-direction Translational speed V.In addition, after the signal S4 as result of determination is transmitted via servo amplifier to servomotor 8, receiving The servomotor 8 of signal S4 maintains the aperture of adjustment valve.Thus, the emitted dose Q of air A is maintained.
As described above, according to the characteristic value Z and the standard value Z of the regulation of this feature value for detecting0(standard value Z1、Z2) To control the movement of blade 3.And, by performing the control, make to act on the big of the resistance R of the blade 3 when blade 3 is moved It is small to change.Untill peeling off glass-film GF completions from supporting glass SG, load cell 4 is continuously repeated again to the change Resistance R after change carries out detecting this series of circulation.It should be noted that in the present embodiment, as based on resistance R's Calculated value, Z=(R1+R2)/W is detected as characteristic value Z.However, in the present embodiment, due to peeling off advance portion The value of the width dimensions W of GFc does not change substantially (width dimensions with glass-film GF are substantially the same), therefore can also be by spy Value indicative Z is set to resistance and Z=(R1+R2) is detected.
Hereinafter, to the glass film exfoliating device 1 involved by above-mentioned first embodiment is used for from supporting glass SG strippings Effect/effect in the case of glass-film GF is illustrated.
According to above-mentioned glass film exfoliating device 1, by load cell 4 and arithmetic unit 5 pairs and stripping glass-film GF When resistance size correspondence and change characteristic value Z detected such that it is able to independently to glass-film GF with supporting glass The size that each position in the contiguity portion of glass SG contiguity acts on the contiguity power between two glass GF, SG is detected.
And, according to the characteristic value Z and the standard value Z of the regulation of this feature value Z that detect0, decision circuit 6 and servo are electric Motivation 7 performs the control (mould of the translational speed V for accelerating blade 3 at the small position of the contiguity power of glass-film GF and supporting glass SG The situation of formula 1) such that it is able to implement the stripping of the glass-film GF at the position more quickly.Also, by servomotor 8 Control and penetrate compressed air A from blade 3 to peeling off advance portion GFc side sprays such that it is able to further promote glass-film GF from branch Hold the stripping of glass SG.
On the other hand, at the position that the contiguity power of two glass GF, SG is big, decision circuit 6 is with servomotor 7 by stages Execution slow down blade 3 translational speed V control (situation of pattern 21), make the mobile stopping of blade 3 control (pattern 22 Situation) and make blade 3 to the control (situation of pattern 23) of the direction movement opposite with X-direction.Thereby, it is possible to reliably Prevent from being produced on glass-film GF the problem of breakage.In addition, when above-mentioned control is performed, the emitted dose Q to air A is also carried out subtracting The appropriate controls such as few emitted dose Q.Therefore, it is more reliably prevented from the breakage of glass-film GF.
Based on the above, can prevent glass-film GF it is damaged while implement overburden operation as quickly as possible. In addition, according to above-mentioned glass film exfoliating device 1, it is different from the glass film exfoliating device involved by each implementation method described later, The parameter changed with the progress of the stripping of glass-film GF is only the resistance R for acting on blade 3.Therefore, with can reduce The data volume for the treatment of this advantage.Also, characteristic value Z is set to resistance and in the case of being detected to Z=(R1+R2), The computational load of arithmetic unit 5 is reduced, therefore, it is possible to promptly be processed.
<Second embodiment>
Hereinafter, the glass film exfoliating device involved by second embodiment of the present invention is illustrated.Need explanation It is, in the explanation of the glass film exfoliating device involved by second, third following implementation method, for above-mentioned first in fact Applying the inscape of the glass film exfoliating device involved by mode has the inscape of identical function or shape, by For marking identical reference in the accompanying drawing that is illustrated to second, third implementation method, so that the repetitive description thereof will be omitted. In addition, only pair part different from first embodiment illustrates in second, third following implementation method.
Fig. 5 is the top view for representing the glass film exfoliating device 1 involved by second embodiment of the present invention, and Fig. 6 is table Show the block diagram of the controlling organization of glass film exfoliating device 1.In addition, Fig. 7 is the figure for representing control flow chart.As shown in these figures, Glass film exfoliating device 1 involved by the second embodiment peels off dress with the glass-film involved by above-mentioned first embodiment The difference put is, blade 3 along the diagonal of glass film laminate G in glass-film GF and supporting glass SG each other Between crosscutting movement；And used as the controlling organization of glass film exfoliating device 1, glass film exfoliating device 1 is also equipped with：Shoot glass The camera 9 (diagram is eliminated in Fig. 5) of film laminated body G and the view data GD of the image to being shot by camera 9 are carried out The image processing apparatus 10 of reason.
Camera 9 is fixedly installed on the top of workbench 2 and glass film laminate G is integrally shot.By camera 9 The view data GD of the image for photographing is transmitted to image processing apparatus 10.It should be noted that camera 9 can also be following The mode of the movement to X-direction of blade 3 moves to X-direction and only the vicinity for peeling off advance portion GFc is shot.
Image processing apparatus 10 receive the view data GD from camera 9, and based on view data GD, by edge Detect to detect the width dimensions W for peeling off advance portion GFc gradually changed to the mobile phase companion of X-direction with blade 3.Then, Sent testing result as signal S5 to arithmetic unit 5.
The letter that arithmetic unit 5 is received according to the signal S1 received from load cell 4 and from image processing apparatus 10 Number S5, detect (calculate) Z=(R1+R2)/W and as with from supporting glass SG peel off glass-film GF when resistance size The characteristic value Z (calculated value based on resistance R) for accordingly changing.Then, using this feature value Z as signal S2 to decision circuit 6 Send.Here, in the present embodiment, inspection is constituted by load cell 4, camera 9, image processing apparatus 10, arithmetic unit 5 Survey unit.
Glass film exfoliating device 1 involved by the second embodiment is being used to peel off glass-film GF from supporting glass SG In the case of, it is also possible to enjoy and the glass film exfoliating device identical effect/effect involved by above-mentioned first embodiment.
It should be noted that in the present embodiment, peeling off the width dimensions W of advance portion GFc as blade 3 is to X side To movement and change.In this case, though between the position in the contiguity portion of glass-film GF and supporting glass SG two glass GF, The size of the contiguity power of SG does not exist difference, and the size of the resistance R that load cell 4 is detected can also change (broad-ruler Very little W is more long, and resistance R is bigger).However, due to resistance R is set into characteristic value Z divided by value obtained from width dimensions W, because This is unrelated with the change of width dimensions W, and is capable of detecting when to be changed according to the size of the contiguity power of two glass GF, SG Value.
<3rd implementation method>
Hereinafter, the glass film exfoliating device involved by third embodiment of the present invention is illustrated.
Fig. 8 is the top view for representing the glass film exfoliating device 1 involved by third embodiment of the present invention, Fig. 9 be by The longitudinal cross-sectional side view of the neighbouring enlarged representation of the blade 3 set in glass film exfoliating device 1.In addition, Figure 10 is to represent glass-film The figure of the controlling organization of stripping off device 1, Figure 11 is the figure for representing control flow chart.As shown in these figures, the 3rd implementation method Involved glass film exfoliating device 1 exists with the difference of the glass film exfoliating device involved by above-mentioned first embodiment In eliminating load cell 4；And used as the controlling organization of glass film exfoliating device 1, glass film exfoliating device 1 is also equipped with： Shoot multiple cameras 9 (diagram is eliminated in Fig. 8, Fig. 9) and the figure to being photographed by each camera 9 of glass film laminate G The multiple images processing unit 10 that the view data GD of picture is processed.
Each camera 9 is fixedly installed on the top of workbench 2, and width along glass film laminate G is mutually arranged Row.And, each camera 9 is (described later to include to the vicinity in X direction by blade 3 below in respective set location Peel off the region of advance portion GFc and blade 3 and the front end P of the contact site of supporting glass SG) shot.Clapped by each camera 9 The view data GD of the image taken the photograph is transmitted to the image processing apparatus 10 being connected with each camera 9.
Each image processing apparatus 10 receive the view data GD from camera 9, and based on view data GD, by side The front end P of advance portion GFc and blade 3 and the contact site of supporting glass SG is peeled off in edge detection to detect.Then, will peel off and advance The distance between portion GFc and front end P D sends as signal S6 to arithmetic unit 5.
Arithmetic unit 5 detects (calculate) that stripping is advanced according to the signal S6 received from each image processing apparatus 10 The average value D ' of the distance between portion GFc and front end P D and as with from supporting glass SG peel off glass-film GF when resistance it is big The small characteristic value Z for accordingly changing.Then, this feature value Z (=D ') is sent as signal S2 to decision circuit 6.Here, exist In present embodiment, camera 9 respectively constitutes shooting unit, and image processing apparatus 10 respectively constitute graphics processing unit.In addition, Detection unit is constituted by multiple cameras 9, multiple images processing unit 10 and arithmetic unit 5.
The decision circuit 6 for receiving the signal S2 from arithmetic unit 5 judges it is as the signal S2's for receiving first Characteristic value Z is than standard value Z that it specifies0Big situation (Z ＞ Z0：Hereinafter referred to as pattern 4), as the spy of the signal S2 for receiving Value indicative Z is than standard value Z that it specifies0Small situation (Z ＜ Z0：Hereinafter referred to as pattern 5) and as the signal S2's for receiving The standard value Z that characteristic value Z specifies with it0Equal situation (Z=Z0：Hereinafter referred to as pattern 6) in which kind of situation.Here, mark Quasi- value Z0Value for example determine by with above-mentioned first embodiment identical process.
And, in the case of pattern 4, as the signal S3 of result of determination via servo amplifier to servomotor After 7 transmission, the servomotor 7 for receiving signal S3 increases the power transmitted to driven roller.Thus, perform and accelerate blade 3 To the control of the translational speed V of X-direction.In addition, in the case of pattern 4, as the signal S4 of result of determination via servo After amplifier is transmitted to servomotor 8, the servomotor 8 for receiving signal S4 increases the aperture of regulating valve.Thus, perform Increase the control of the emitted dose Q of compressed air A.
In the case of pattern 5, for the value of characteristic value Z, decision circuit 6 further implements following judgement.Namely it is decided that The value for being characteristic value Z is the standard value Z of the threshold value as the translational speed V for slowing down blade 3 or the mobile stopping for making blade 31 Situation (Z above1≤ Z ＜ Z0：Hereinafter referred to as pattern 51), the value of characteristic value Z compare Z1It is small and as stopping the movement of blade 3 Only or make the standard value Z of the threshold value that blade 3 moves to the direction opposite with X-direction2Situation (Z above2≤ Z ＜ Z1：Hereinafter, Referred to as pattern 52) and the value of characteristic value Z compare Z2Small situation (Z ＜ Z2：Hereinafter referred to as pattern 53) in which kind of situation.Need It is noted that these standard values Z1、Z2Can be determined by arbitrary method in the same manner as above-mentioned first embodiment.Example Such as, standard value Z1、Z2Can be by being set to standard value Z0Constant times and calculate.
And, in the case of pattern 51, as the signal S3 of result of determination via servo amplifier to servo-electric After machine 7 is transmitted, the servomotor 7 for receiving signal S3 reduces the power transmitted to driven roller.Thus, perform and slow down blade 3 Control from the translational speed V to X-direction.In addition, in the case of pattern 52, servomotor 7 stops driven roller, so that Execution makes the control of the mobile stopping of blade 3.Also, in the case of pattern 53, servomotor 7 makes driven roller to phase negative side To rolling, so as to perform the control for making blade 3 be moved to the direction opposite with X-direction.It should be noted that in the feelings of pattern 51 Under condition, the aperture of regulating valve is reduced by servomotor 8, to reduce the emitted dose Q of compressed air A.Also, pattern 52, In the case of 53, regulating valve is completely closed by servomotor 8, so that the emitted dose Q of compressed air A is zero.
In the case of pattern 6, transmitted to servomotor 7 via servo amplifier in the signal S3 as result of determination Afterwards, the servomotor 7 for receiving signal S3 maintains the power transmitted to driven roller.Thus, maintain blade 3 to X-direction Translational speed V.In addition, after the signal S4 as result of determination is transmitted via servo amplifier to servomotor 8, receiving The servomotor 8 of signal S4 maintains the aperture of adjustment valve.Thus, the emitted dose Q of air A is maintained.
As described above, according to the characteristic value Z and the standard value Z of the regulation of this feature value for detecting0(standard value Z1、Z2) To control the movement of blade 3.And, by performing the control, between stripping advance the portion GFc and front end P when blade 3 is moved Changed apart from D, and then its average value D ' changes.Untill peeling off glass-film GF completions from supporting glass SG, Continuously repeat camera 9 again to the change after apart from D carry out detect this series of circulation.
Glass film exfoliating device 1 involved by 3rd implementation method is being used to peel off glass-film GF from supporting glass SG In the case of, it is also possible to according to the average value D ' for peeling off the distance between advance portion GFc and front end P D, independently to glass-film GF Size with the contiguity power of two glass GF, the SG at each position in the contiguity portion of supporting glass SG is detected.Thereby, it is possible to enjoy Have and the glass film exfoliating device identical effect/effect involved by above-mentioned first embodiment.In addition, in present embodiment In, by rim detection, the distance between stripping advance portion GFc and front end P D can be reliably detected out, and then can be reliable Detect the value of characteristic value Z (=D ').Therefore, blade 3 carries out each portion in the contiguity portion of same glass-film GF and supporting glass SG The corresponding appropriate movement in position such that it is able to improve its precision.
It should be noted that the glass film exfoliating device 1 involved by present embodiment can also the second implementation described above Glass film exfoliating device involved by mode like that, is set to blade 3 along the diagonal of glass film laminate G in glass-film The structure of the crosscutting movement each other of GF and supporting glass SG.
Here, the glass film exfoliating device 1 involved by the first to the 3rd above-mentioned implementation method can also be with blade 3 Both sides on the basis of central portion, are individually controlled the translational speed to X-direction of (hereinafter referred to as both sides individually control) blade 3 V.The controlling organization for being set to the glass film exfoliating device 1 in the case of such structure is shown in Figure 12 a~Figure 12 c.
Figure 12 a are to represent to implement both sides individually control in the glass film exfoliating device 1 involved by first embodiment The figure of the controlling organization of situation.As shown in the drawing, be arranged on blade 3 two ends load cell 4a, 4b respectively to resistance R1, R2 is detected, transmitted respectively to two arithmetic units 5 as signal S1.Receive the letter from load cell 4a, 4b The arithmetic unit 5 of number S1 peels off the width dimensions W of advance portion GFc and detects and (calculate by the way that resistance R1, R2 be respectively divided by Go out) characteristic value Z.That is, characteristic value Z is set to the calculated value based on resistance R and is represented by Z=R1/W, Z=R2/W.Then, by the spy Value indicative Z sends respectively as signal S2 to decision circuit 6.Then, each signal is transmitted in the same manner as first embodiment.Thus, In the side on the basis of the central portion of blade 3 and opposite side, translational speed V1, V2 for being individually controlled blade 3 is empty with compression The emitted dose Q1 (emitted dose of the compressed air A of the side of blade 3) of gas A, the Q2 (sprays of the compressed air A of the opposite side of blade 3 The amount of penetrating).
Figure 12 b are to represent to implement both sides individually control in the glass film exfoliating device 1 involved by second embodiment The figure of the controlling organization of situation.As shown in the drawing, be arranged on blade 3 two ends load cell 4a, 4b respectively to resistance R1, R2 is detected, and is transmitted respectively to two arithmetic units 5 as signal S1.In addition, what is gradually changed peels off advance portion GFc's Width dimensions W is transmitted respectively from image processing apparatus 10 as signal S5 to two arithmetic units 5.Arithmetic unit 5 detects (meter Calculate) Z=R1/W, Z=R2/W and as characteristic value Z.Then, sent out this feature value Z as signal S2 respectively to decision circuit 6 Send.Then, each signal is transmitted in the same manner as second embodiment.Thus, the side on the basis of the central portion of blade 3 with it is another Side, is individually controlled translational speed V1, V2 of blade 3 and emitted dose Q1, Q2 of compressed air A.
Figure 12 c are to represent to implement both sides individually control in the glass film exfoliating device 1 involved by the 3rd implementation method The figure of the controlling organization of situation.As shown in the drawing, be arranged on the basis of the central portion of blade 3 each camera 9a of side with The view data GD that each camera 9b of opposite side will all photograph in respective set location is arranged on to be filled to image procossing Put 10 transmission.Each image processing apparatus 10 are filled as signal S6 using the distance between advance portion GFc and front end P D is peeled off to computing Put 5 transmissions.Now, the signal S6 that is sent from the image processing apparatus 10 that be connecteds with camera 9a and oneself be connected with camera 9b The signal S6 that image processing apparatus 10 send sends respectively to different arithmetic units 5.Arithmetic unit 5 detects (calculate) Z =D ' 1 (average value of the D of the side of blade 3), Z=D ' 2 (average value of the D of the opposite side of blade 3) and as characteristic value Z. Then, sent this feature value Z as signal S2 respectively to decision circuit 6.Then, transmit each in the same manner as the 3rd implementation method Signal.Thus, in the side on the basis of the central portion of blade 3 and opposite side, be individually controlled blade 3 translational speed V1, Emitted dose Q1, Q2 of V2 and compressed air A.
Even if it should be noted that as described above implement both sides individually control in the case of, the standard value of characteristic value Z Z0And standard value Z1、Z2Value also can be different because of the various conditions such as the thickness of slab of glass-film GF, therefore preferably beforehand through experiment Etc. calculating appropriate value.
Individually controlled according to such both sides, in the position glass-film GF of the both sides on the basis of the central portion of blade 3 With the contiguity power of supporting glass SG it is of different sizes in the case of, can be in the side in the both sides of blade 3 relative to opposite side Moved in the state of in advance.Thereby, it is possible to avoid to implement at faster speed originally side (the contiguity power of overburden operation The side at small position) have to that the side (side at the big position of contiguity power) of overburden operation can only be implemented with low speed to coordinate Speed implement overburden operation as situation.As a result, peel off more quickly glass-film GF.
<4th implementation method>
Hereinafter, the glass film exfoliating device involved by the 4th implementation method of the invention is illustrated.
Figure 13 is the side view for representing the glass film exfoliating device 11 involved by the 4th implementation method of the invention, Tu14Shi Represent the top view of glass film exfoliating device 11.As shown in these figures, glass film exfoliating device 11 possesses：As stripping unit Multiple adsorption elements 12, its can in the state of the surface to glass-film GF is adsorbed to left from supporting glass SG from Evolution is moved to Y；Multiple lowering or hoisting gears 13, it is used to make multiple adsorption elements 12 respectively to departure direction Y and departure direction Y Rightabout movement；And used as multiple load cells 14 of detection unit, it is to when each adsorption element 12 is moved pair The adsorption element 12 to the resistance R that the direction opposite with departure direction Y acts on detected and as characteristic value Z.
Figure 15 is the block diagram of the controlling organization for representing glass film exfoliating device 11, and Figure 16 is the figure for representing control flow chart. As shown in these figures, as the controlling organization of glass film exfoliating device 11, glass film exfoliating device 11 possesses：Decision circuit 15, Characteristic value Z (resistance R) that it detects load cell 14 is received as signal S7, and implements described later to characteristic value Z Judge；With servomotor 16, it from the signal S8 of decision circuit 15 according to controlling the movement of adsorption element 12.Here, In the present embodiment, decision circuit 15 constitutes control unit with servomotor 16.
Multiple lowering or hoisting gears 13 possess respectively：Main part 13a, sets servomotor 16 and is fixed on and glass-film in it GF is opposed on the plate of configuration；And being formed as bar-shaped lifting unit 13b, it is lifted by the power of servomotor 16. The hole for inserting lifting unit 13b is respectively formed with main part 13a and plate, is revolved due to the power of servomotor 16 The lifting unit 13b that the driven roller for turning will pass through this some holes remains movement freely.And, by will be from servo via driven roller The power of motor 16 is transmitted to lifting unit 13b, so that adsorption element 12 is moved, and its translational speed V is controlled.
Multiple adsorption elements 12 possess respectively：Multiple attractions are formed with the abutting part that the surface with glass-film GF abuts Multiple absorption layer 12a and concentration in hole keep the holding plate 12b of multiple absorption layer 12a.The multiple formed on each absorption layer 12a Suction hole is connected with vavuum pump, glass-film GF is produced negative pressure by the operating of the vavuum pump, so that absorption layer 12a is to glass-film Adsorbed on the surface of GF.Holding plate 12b itself is moved due to the operating of lowering or hoisting gear 13, so that holding plate 12b makes multiple Absorption layer 12a concentrates movement.It should be noted that in the present embodiment, multiple adsorption elements 12 possess same number respectively Absorption layer 12a.
In addition, multiple adsorption elements 12 by boundary line L1~L4 respectively to being divided into multiple regions by the surface of glass-film GF Into each region AR1~AR5 adsorbed.Boundary line L1~L4 is along orthogonal with the crosscutting mobile predetermined direction C for peeling off advance portion GFc Direction extend, it is described to peel off the stripping after advance portion GFc turns into laminated section GFa that two glass GF, SG are laminated and peels off Border between portion GFb.And, it is adjacent by from the adsorption element 12 positioned at the upstream side of crosscutting mobile predetermined direction C Adsorption element 12 is moved to departure direction Y successively, so that peeling off the advance crosscutting movements of portion GFc.It should be noted that multiple inhale Since attached component 12 to departure direction Y to adjacent adsorption element 12 to departure direction Y movements itself respectively move It is moved in a period of untill dynamic be controlled.In addition, peeling off the crosscutting mobile predetermined direction C and glass-film of advance portion GFc The length direction of GF is parallel.
Load cell 14 is folded in the holding of the lifting unit 13b and setting in adsorption element 12 set in lowering or hoisting gear 13 Between plate 12b, and it is mounted in the state of this both sides is fixed on.And, moved to departure direction Y in adsorption element 12 When, to changing because of the size of the contiguity power of two glass GF, SG at each position in the contiguity portion of glass-film GF and supporting glass SG Resistance R detected, so as to as characteristic value Z.
Next, reference picture 15 and Figure 16 enter to the detailed content of the controlling organization of above-mentioned glass film exfoliating device 11 Row explanation.When the adsorption element 12 positioned at the most upstream of crosscutting mobile predetermined direction C to region AR1 in the state of adsorbing When starting to be moved to the departure direction Y left from supporting glass SG, decision circuit 15 implements following judgement.
The decision circuit 15 for receiving the signal S7 from load cell 14 judges it is as the signal for receiving first Characteristic value Z (resistance R) of S7 is than standard value Z that it specifies0Small situation (Z ＜ Z0：Hereinafter referred to as mode 7), as receiving Signal S7 characteristic value Z (resistance R) than standard value Z that it specifies0Big situation (Z ＞ Z0：Hereinafter referred to as pattern 8) and As the standard value Z that characteristic value Z (resistance R) of the signal S7 for receiving specifies with it0Equal situation (Z=Z0：Hereinafter referred to as Pattern 9) in which kind of situation.Here, standard value Z0Value for example determined by following process.(process 1) is calculated Enable moving adsorption element 12 when being peeled off by the position that hydrogen bond touches and being unlikely in glass-film GF for two glass GF, SG The translational speed V of the damaged limit of upper generation.(process 2) will be moved in adsorption element 12 with the translational speed V of the limit for calculating The value of characteristic value Z (resistance R) detected by load cell 14 when dynamic is defined as standard value Z0.It should be noted that the mark Quasi- value Z0Value it is different because of various conditions such as the thicknesss of slab of glass-film GF, therefore preferably before the overburden operation for implementing glass-film GF Appropriate value is calculated beforehand through experiment etc..
And, in the case of mode 7, as the signal S8 of result of determination via servo amplifier to servomotor After 16 transmission, the servomotor 16 for receiving signal S8 increases the power transmitted to driven roller.Thus, perform and accelerate absorption structure The control of the translational speed V to departure direction Y of part 12.It should be noted that can be with the characteristic value Z and standard value for detecting Z0Between difference component interlock, translational speed V is controlled in the mode that the bigger translational speed V of difference component is faster, it is also possible to difference Amount independently only to accelerate constant speed in the way of control translational speed V.
In the case of pattern 8, for the value of characteristic value Z, decision circuit 15 further implements following judgement.That is, sentence Surely it is the value of characteristic value Z in the threshold as the translational speed V for slowing down adsorption element 12 or the mobile stopping for making adsorption element 12 The standard value Z of value1Following situation (Z0＜ Z≤Z1：Hereinafter referred to as pattern 81), the value of characteristic value Z compare Z1It is big and as making The mobile stopping of adsorption element 12 makes adsorption element 12 to the standard value of the threshold value of the direction movement opposite with departure direction Y Z2Following situation (Z1＜ Z≤Z2：Hereinafter referred to as pattern 82) and the value of characteristic value Z compare Z2Big situation (Z ＞ Z2：Hereinafter, Referred to as pattern 83) in which kind of situation.It should be noted that these standard values Z1、Z2Can be determined by arbitrary method.Example Such as, standard value Z1、Z2Standard value Z can be set to0Constant times and calculate, but preferably with above-mentioned standard value Z0Similarly lead to Overtesting precomputes appropriate value.
And, in the case of pattern 81, as the signal S8 of result of determination via servo amplifier to servo-electric After machine 16 is transmitted, the servomotor 16 for receiving signal S8 reduces the power transmitted to driven roller.Thus, perform and slow down absorption The control of the translational speed V to departure direction Y of component 12.In addition, in the case of pattern 82, servomotor 16 makes driving Roller stops, so as to perform the control for making the mobile stopping of adsorption element 12.It should be noted that can be with the characteristic value for detecting Z and standard value Z0Difference component interlock, with the suction in the case of the bigger translational speed V of difference component slower mode control model 81 The translational speed V of attached component 12, it is also possible to the difference component independently control model 81 in the way of constant speed of only slowing down In the case of adsorption element 12 translational speed V.
In the case of pattern 83, for the value of characteristic value Z, decision circuit 15 further implements following judgement.That is, sentence Surely whether it is the value of characteristic value Z as switching the standard value Z of threshold value as the adsorption element 12 of control objectmaxFollowing Situation (Zmax>=Z ＞ Z2：Hereinafter referred to as pattern 831) and characteristic value Z value than standard value ZmaxBig situation (Z ＞ Zmax：With Under, referred to as pattern 832) in which kind of situation.Here, standard value ZmaxValue for example determined by following process.(mistake Journey 1) abutted with the surface of the glass-film GF not peeled off from supporting glass SG in the adsorption element 12 adsorbed to region AR2 Under state, the adsorption element 12 for having adsorbed region AR1 is set to be moved to departure direction Y.Now, the suction adsorbed to region AR2 Attached component 12 is abutted with glass-film GF, so as to be moved to departure direction Y with the adsorption element 12 for having adsorbed region AR1, effect Become larger in the stress of glass-film GF and the value of characteristic value Z (resistance R) for detecting.(process 2) will make adsorption element 12 be moved to position from the limit for being unlikely to be produced on glass-film GF breakage to departure direction Y when the characteristic value Z that detects Value is defined as standard value Zmax.With regard to standard value ZmaxValue for, preferably with above-mentioned standard value Z0It is pre- likewise by experiment First calculate appropriate value.
And, in the case of pattern 831, as the signal S8 of result of determination via servo amplifier to servo-electric After machine 16 is transmitted, the servomotor 16 for receiving signal S8 makes driven roller roll round about, and execution makes adsorption element 12 To the control that the direction opposite with departure direction Y is moved.In addition, in the case of pattern 832, the absorption structure as control object Part 12 is switched on crosscutting mobile predetermined direction C in the adjacent adsorption element 12 in downstream.In other words, control object is from absorption The adsorption element 12 of region AR1 switches to the adsorption element 12 of binding domain AR2, so that the adsorption element 12 of binding domain AR2 Start the movement to departure direction Y (switching for following control object is also carried out in an identical manner).
In the case of pattern 9, passed to servomotor 16 via servo amplifier in the signal S8 as result of determination After passing, the servomotor 16 for receiving signal S8 maintains the power transmitted to driven roller.Thus, maintain adsorption element 12 to The translational speed V of departure direction Y.
As described above, according to characteristic value Z (resistance R) and the standard value Z of the regulation of this feature value for detecting0(standard Value Z1、Z2) control the movement of adsorption element 12.In addition, according to the characteristic value Z for detecting and standard value ZmaxTo switch as control The adsorption element 12 of object processed.And, controlled by performing these, so as to act on the absorption structure when adsorption element 12 is moved The size of the resistance R of part 12 changes.Untill peeling off glass-film GF completions from supporting glass SG, continuously repeat load and pass Sensor 14 carries out detecting this series of circulation again to the resistance R after the change.
Can also be obtained and the first above-mentioned implementation by the glass film exfoliating device 11 involved by the 4th implementation method The identical effect of glass film exfoliating device 1/effect involved by mode.In addition, the glass film exfoliating device 11 possesses right respectively Multiple adsorption elements 12 that each region AR1~AR5 that the surface of glass-film GF is divided into multiple regions is adsorbed.Cause This, being finely divided of position of the glass-film GF that each adsorption element 12 should can be peeled off from supporting glass SG.Thus, energy It is enough more accurately to acting on two glass GF, SG at each position in the contiguity portion that glass-film GF and supporting glass SG touches between Touch power size detected and as characteristic value Z.As a result, being conducive to the adsorption element 12 to carry out appropriate stripping respectively Action.
<5th implementation method>
Hereinafter, the glass film exfoliating device involved by the 5th implementation method of the invention is illustrated.Need explanation Be, in the explanation of the glass film exfoliating device involved by the 5th implementation method, for with the 4th above-mentioned embodiment party The inscape identical function or the inscape of shape of the glass film exfoliating device involved by formula, for real to the 5th Identical reference is marked in the accompanying drawing that the mode of applying is illustrated, so that the repetitive description thereof will be omitted, only pair with the 4th embodiment party The different part of formula illustrates.
Figure 17 is the side view for representing the glass film exfoliating device 11 involved by the 5th implementation method of the invention, Tu18Shi Represent the block diagram of the controlling organization of glass film exfoliating device 11.In addition, Figure 19 is the figure for representing control flow chart.Such as these figure institutes Show, the glass film exfoliating device 11 involved by the 5th implementation method is peeled off with the glass-film involved by the 4th above-mentioned implementation method The difference of device 11 is to eliminate load cell 14；Possess with as controlling organization：Shoot glass film laminate G Camera 17, the image processing apparatus 18 that are processed of the view data GD of image to being photographed by camera 17 and Arithmetic unit 19 for detecting (calculate) characteristic value Z described later according to the result of image processing apparatus 18.
Camera 17 is laminated with by the glass-film extended parallel to the crosscutting mobile predetermined direction C for peeling off advance portion GFc The mode that the total length of the side (end) of body G includes the visual field is set.And, when stripping advance portion GFc is crosscutting mobile, with constant Time interval be continuously shot the side of glass film laminate G.The view data of each image being continuously taken by camera 17 GD is transmitted to the image processing apparatus 18 being connected with camera 17.
Image processing apparatus 18 receive the view data GD from camera 17, and to photographing the moment of each image Detected the position for peeling off advance portion GFc.Then, the position for peeling off advance portion GFc at each moment that will be detected is used as letter Number S9 and sent to arithmetic unit 19.
Arithmetic unit 19 according to the signal S9 received from image processing apparatus 18, based on continuously detecting in temporal sequence Two positions for peeling off advance portion GFc, calculate and advance portion peeled off in each time interval shot in camera 17 The crosscutting movements of GFc apart from DD.Afterwards, by the time interval shot divided by camera 17 apart from DD that will be calculated, So as to continuously detect (calculate) peel off advance portion GFc it is crosscutting mobile when translational speed VV and as characteristic value Z.So Afterwards, the characteristic value Z that will be detected sends as signal S10 to decision circuit 15.Here, in the present embodiment, by camera 17th, image processing apparatus 18 and arithmetic unit 19 constitute detection unit.
Next, reference picture 18 and Figure 19 enter to the detailed construction of the controlling organization of above-mentioned glass film exfoliating device 11 Row explanation.When the adsorption element 12 positioned at the most upstream of crosscutting mobile predetermined direction C starts in the state of region AR1 has been adsorbed When being moved to the departure direction Y left from supporting glass SG, decision circuit 15 implements following judgement.
The decision circuit 15 for receiving the signal S10 from arithmetic unit 19 judges it is as the signal for receiving first Characteristic value Z (translational speed VV) of S10 is than standard value Z that it specifies0Big situation (Z ＞ Z0：Hereinafter referred to as pattern 10), conduct The characteristic value Z of the signal S10 for receiving is than standard value Z that it specifies0Small situation (Z ＜ Z0：Hereinafter referred to as pattern 11) and As the standard value Z that the characteristic value Z of the signal S10 for receiving specifies with it0Equal situation (Z=Z0：Hereinafter referred to as pattern 12) which kind of situation in.Here, standard value Z0Value for example determined by following process.(process 1) is calculated makes two Glass GF, SG's can move adsorption element 12 and be unlikely to be produced on glass-film GF when being peeled off by the position that hydrogen bond touches The translational speed V of the raw damaged limit.(process 2) will move luck in adsorption element 12 with the translational speed V of the limit for calculating The value for calculating characteristic value Z (translational speed VV) that device 19 is detected is defined as standard value Z0.It should be noted that with regard to the standard value Z0Value for, it is also preferred that calculating appropriate value beforehand through experiment etc. before the overburden operation for implementing glass-film GF.
And, in the case of pattern 10, as the signal S11 of result of determination via servo amplifier to servo-electric After machine 16 is transmitted, the servomotor 16 for receiving signal S11 increases the power transmitted to driven roller.Thus, perform and accelerate to inhale The control of the translational speed V to departure direction Y of attached component 12.
In the case of pattern 11, for the value of characteristic value Z, decision circuit 15 further implements following judgement.That is, sentence Surely it is the value of characteristic value Z in the threshold as the translational speed V for slowing down adsorption element 12 or the mobile stopping for making adsorption element 12 The standard value Z of value1Situation (Z above1≤ Z ＜ Z0：Hereinafter referred to as pattern 111), the value of characteristic value Z compare Z1It is small and as making The mobile stopping of adsorption element 12 makes adsorption element 12 to the standard value of the threshold value of the direction movement opposite with departure direction Y Z2Situation (Z above2≤ Z ＜ Z1：Hereinafter referred to as pattern 112) and the value of characteristic value Z compare Z2Small situation (Z ＜ Z2：With Under, referred to as pattern 113) in which kind of situation.It should be noted that these standard values Z1、Z2It is same with the 4th above-mentioned implementation method Can be determined by arbitrary method sample.For example, standard value Z1、Z2Standard value Z can be set to0Constant times and calculate.
And, in the case of pattern 111, in the signal S11 as result of determination via servo amplifier to servo electricity After motivation 16 is transmitted, the servomotor 16 for receiving signal S11 reduces the power transmitted to driven roller.Thus, execution slows down The control of the translational speed V to departure direction Y of adsorption element 12.In addition, in the case of pattern 112, servomotor 16 Stop driven roller, so as to perform the control for making the mobile stopping of adsorption element 12.Also, in the case of pattern 113, servo Motor 16 makes driven roller roll round about, so as to perform make adsorption element 12 be moved to the direction opposite with departure direction Y Dynamic control.
In the case of pattern 12, as the signal S11 of result of determination via servo amplifier to servomotor 16 After transmission, the servomotor 16 for receiving signal S11 maintains the power transmitted to driven roller.Thus, adsorption element 12 is maintained The translational speed V to departure direction Y.
It should be noted that in the glass film exfoliating device 11 involved by the 5th implementation method, with the above-mentioned the 4th Glass film exfoliating device 11 involved by implementation method is different, and the position of advance portion GFc is peeled off by detecting to carry out turning into control The switching of the adsorption element 12 of object processed.Specifically, start to departure direction Y in the adsorption element 12 for having adsorbed region AR1 After movement, the absorption layer 12a set in the adsorption element 12 that advance portion GFc arrival is adsorbed to region AR2 is peeled off is just During lower section, the adsorption element 12 as control object switches to the adsorption element 12 adsorbed to region AR2.Then, the suction Attached component 12 starts to move (switching of control object below is also carried out in an identical manner) to departure direction Y.
As described above, according to characteristic value Z (translational speed VV) and the standard value Z of the regulation of this feature value for detecting0 (standard value Z1、Z2) control the movement of adsorption element 12.And, by performing the control, so that it is crosscutting to peel off advance portion GFc Translational speed VV when mobile changes.Untill peeling off glass-film GF completions from supporting glass SG, photograph is continuously repeated Stripping advance portion GFc after machine 17 changes to translational speed VV again carries out shooting this series of circulation.
It should be noted that in the present embodiment, will peel off advance portion GFc it is crosscutting mobile when translational speed VV as Characteristic value Z and detected, but translational speed VV can also be replaced and acceleration is detected as characteristic value Z, according to this feature Value Z (acceleration) controls the movement of adsorption element 12.For example, setting is carried out to the translational speed VV that arithmetic unit 19 is detected The storage device of storage, makes the storage device store two values of translational speed VV for continuously detecting in temporal sequence.Afterwards, Two values of translational speed VV are sent as signal to the other arithmetic unit for setting from storage device.It is then possible to make this Arithmetic unit performs the computing of the time interval that two difference of the value of translational speed VV are shot divided by camera 17, from And detect peel off advance portion GFc it is crosscutting mobile when acceleration and as characteristic value Z.
Can also be obtained and the first above-mentioned implementation by the glass film exfoliating device 11 involved by the 5th implementation method The identical effect of glass film exfoliating device 1/effect involved by mode.
Here, the object of the stripping of glass film exfoliating device involved in the present invention is not limited to the glass supported by supporting glass Glass film.For example, in that case of the supporting mass that the material from beyond by supporting glass such as silicon is constituted peels off glass-film, also may be used To use glass film exfoliating device involved in the present invention.In addition, in above-mentioned each implementation method, for making glass-film with branch The glass film laminate for holding the direct ground contact of glass and being laminated, as the mode for making glass-film be peeled off from supporting glass. However, the layered product being laminated via adhesive layer for glass-film and supporting mass, such making glass-film be peeled off from supporting mass In the case of, it is also possible to use glass film exfoliating device involved in the present invention.In addition, for example, for supporting mass and glass-film The mutually different multiple glass film laminates of contiguity power, peel off such situation from each supporting mass each glass-film is continuously made Under, it is also possible to use glass film exfoliating device involved in the present invention.
In addition, glass film exfoliating device involved in the present invention is not limited to the knot illustrated in above-mentioned each implementation method Structure.For example, in above-mentioned first embodiment to the 3rd implementation method, for the glass in the state of fixation on the table Film laminated body, by way of making glass-film be peeled off from supporting glass as being moved blade.However, it is also possible to consolidate by blade Make to be placed with the movable workbench of glass film laminate in the state of fixed, and control its translational speed and peel off glass-film. In addition, the moving direction of blade 3 is also not necessarily limited to the length direction of glass film laminate, diagonal, and can be set to any Direction.
Also, in the glass film exfoliating device involved by above-mentioned first embodiment to the 3rd implementation method, also may be used The surface of glass-film is adsorbed to set while making pulling force effect in the glass-film so as to the multiple of the stripping of auxiliary glass film Absorption layer.In this case, it is also possible to each absorption layer is set along the moving direction of blade, is controlled according to characteristic value from each suction The attached size for padding the pulling force for acting on glass-film.Alternatively, it is also possible to according to characteristic value, selection makes pulling force from all absorption layers Act on the absorption layer of glass-film.
And, in above-mentioned first embodiment to the 3rd implementation method, camera unit is configured to be shot from top Layered product, but can also be configured to implement to shoot from below.Now, various equipment can be used as camera.For example, i.e. Make to be that opaque material is used as the situation of supporting mass for visible ray by silicon etc., can also be shone by using infrared ray sometimes Camera implements rim detection to have an X-rayed the supporting mass.
In addition, in above-mentioned each implementation method, in order to tackle some interference effects in the control of glass film exfoliating device The situation of mechanism, it is also possible to be set to implement the structure of feedback control.As one of such situation, in glass film exfoliating device On also set up detector for being detected to the translational speed of blade (adsorption element) etc..And, detector can be detected Speed as signal, the servomotor (servo amplifier) being controlled to the translational speed to blade (adsorption element) is anti- Feedback.
In addition, the example of the standard value in above-mentioned each implementation method to asking for characteristic value beforehand through experiment etc. is carried out Explanation, but can also be asked for using other methods.For example, can be asked for by simulating, it is also possible to according to front and rear Pitch time (tact time) of operation etc. is arbitrarily determined.
In addition, in above-mentioned first embodiment to the 3rd implementation method and the 5th implementation method, with arithmetic unit It is illustrated in case of being configured to single hardware with decision circuit, but the function of arithmetic unit and decision circuit Software that structure can also possess by single computer and the computer is realized.
In addition, in above-mentioned first embodiment to the 3rd implementation method, it is also possible to replace blade and utilize flexible cord, tree Fat piece peels off glass-film.As the material of flexible cord, for example, can use polyethylene, nylon (registration mark), teflon (registration Trade mark).In addition, as the material of resin sheet, such as teflon (registration mark) can be used.Flexible cord, resin sheet and blade phase Than its thinner thickness, if therefore using these flexible cords, resin sheet, can reduce when flexible cord, resin sheet are crosscutting mobile load The value of the resistance that sensor is detected.
In addition, in the 4th above-mentioned implementation method and the 5th implementation method, glass has been adsorbed by adsorption element Moved to the departure direction left from supporting glass in the state of the surface of film, so that glass-film is peeled off.But be not limited to This, it is also possible to moved to the departure direction left from glass-film by the state of the surface that supporting glass has been adsorbed in adsorption element It is dynamic, so that glass-film is peeled off.
In addition, in the 5th above-mentioned implementation method, when stripping advance portion is crosscutting mobile, camera is continuously shot glass The side (end) of film laminated body, but the surface or the back side of glass film laminate can also be continuously shot.Set like this, Also be capable of detecting when to peel off advance portion it is crosscutting mobile when translational speed or acceleration and as characteristic value.
In addition, in the above-described embodiment, being divided into the number of the absorption layer of configuration in each region in multiple regions Identical situation is illustrated as one, but can also be changed for each region and be divided into each of multiple regions The number of the absorption layer configured in region.I.e., it is possible to be set to make the form of the configuration with distribution of absorption layer.For example, by making The number of the absorption layer near the end face of glass-film or supporting glass is more than other parts, can reduce the end face to glass Local stress concentration such that it is able to prevent peel off when breakage.It should be noted that in the case of such form, It is preferred that determining standard value according to the number for configuring the absorption layer in each region.Specifically, it is relative in the number of absorption layer In more region, the resistance that each incidental load cell of absorption layer is detected diminishes relatively, therefore preferably by standard value It is set to relatively low.On the other hand, in the relatively small number of region of number of absorption layer, each incidental load of absorption layer is passed The relative change of resistance that sensor is detected is big, therefore is preferably set to standard value of a relatively high.
【Embodiment】
As embodiments of the invention, using the glass film exfoliating device involved by the above-mentioned first to the 3rd implementation method 1, for the glass film laminate G shown in Figure 20, glass is made under four conditions described later (three embodiments, a comparative examples) Film GF is peeled off from supporting glass SG.Whether breakage is produced to be verified on glass-film GF when then, to peeling off.
First, to embodiment and comparative example in as peel off object glass-film GF, supporting glass SG and glass Film laminated body G is illustrated.As glass-film GF and supporting glass SG, the alkali-free glass produced using NEG company Glass OA-10G.The thickness of slab of two glass GF, SG is respectively glass-film GF：0.2mm, supporting glass SG：0.5mm, face size (it is vertical × It is horizontal) both sides are 1000mm × 1000mm.And, with regard to the composition surface in the face as the side that contacts with each other of two glass GF, SG For surface roughness Ra, the surface roughness Ra on the two respective composition surfaces of glass GF, SG is set to below 2.0nm, makes two glass The direct ground of glass GF, SG contacts and is laminated, so as to be made glass film laminate G.
Then, to being made after glass film laminate G implement following treatment.First, glass-film is laminated at 200 DEG C The overall heating of body G 30 minutes.Afterwards, only to the centre distance radius 50mm's from glass-film GF and the face of supporting glass SG Position (scope for having hachure being drawn in Figure 20, exaggerate diagram for convenience of description in the figure) is heated to 300 DEG C.Thus, make The size for acting on the contiguity power between two glass GF, SG at the position is more than other positions.
Hereinafter, the action to the glass film exfoliating device in three embodiments 1~3 and comparative example is illustrated.
In embodiment 1, using the glass film exfoliating device 1 involved by above-mentioned first embodiment, blade 3 is made along figure T directions movement shown in 20, so as to implement the stripping from supporting glass SG of glass-film GF.Here, in embodiment 1, by spy The standard value Z of value indicative Z0Value be set to Z0=0.04 [N/mm].In addition, by the reference speed V of the translational speed V of blade 30(Z= Z0In the case of blade 3 translational speed) value be set to V0=30 [mm/min].Then, the value in characteristic value Z compares Z0Big Situation (Z ＞ Z0Situation) under, make the translational speed V of blade 3 from reference speed V0It is decelerated to V=10 [mm/min].In addition, The value of characteristic value Z has returned to standard value Z0In the case of, blade 3 is accelerated and translational speed V is returned to reference speed V0.Need Illustrate, in embodiment 1, eliminate the control that makes the mobile stopping of blade 3 and make what blade 3 was moved round about Control.
In example 2, using the glass film exfoliating device 1 involved by above-mentioned second embodiment, blade 3 is made along figure U directions movement shown in 20, so as to implement the stripping from supporting glass SG of glass-film GF.Here, the characteristic value in embodiment 2 The standard value Z of Z0Value and blade 3 translational speed V reference speed V0Value it is same as Example 1.In addition, blade 3 The control mode of translational speed V is also same as Example 1.Also, in the embodiment 2, also omit stops the movement of blade 3 Control only and make the control that blade 3 moves round about.
In embodiment 3, using the glass film exfoliating device 1 involved by the 3rd above-mentioned implementation method, blade 3 is made along figure T directions movement shown in 20, so as to implement the stripping from supporting glass SG of glass-film GF.Here, in embodiment 3, by spy The standard value Z of value indicative Z0Value be set to Z0=10 [mm].In addition, by the reference speed V of the translational speed V of blade 30(Z=Z0's In the case of blade 3 translational speed) value be set to V0=30 [mm/min].Then, the value in characteristic value Z compares Z0Small situation (Z ＜ Z0Situation) under, make the translational speed V of blade 3 from reference speed V0It is decelerated to V=10 [mm/min].In addition, in feature The value of value Z has returned to standard value Z0In the case of, blade 3 is accelerated and translational speed V is returned to reference speed V0.Need explanation , in the embodiment 3, also omit the control that makes the mobile stopping of blade 3 and make what blade 3 was moved round about Control.
In a comparative example, using the glass film exfoliating device 1 involved by above-mentioned first embodiment, and from glass-film To terminating, the change with characteristic value Z independently makes blade 3 with the constant of V=30 [mm/min] for the beginning of the stripping of GF Translational speed V is moved, so as to peel off glass-film GF from supporting glass SG.
Shown below the result of the checking of embodiment 1~3 and comparative example.In embodiment 1~3, glass can be made Film GF is peeled off from supporting glass SG and is unlikely to produce breakage on glass-film GF.On the other hand, in a comparative example, occur in that The result of breakage is produced on glass-film GF.Based on the result it is inferred that according to glass film exfoliating device involved in the present invention, The breakage of the glass-film is prevented from when making glass-film be peeled off from supporting mass and as quickly as possible peels off glass-film.
Description of reference numerals
1 glass film exfoliating device
2 workbench
2a mounting surfaces
2b long side surfaces
2c short sides
3 blades
3a leading sections
3b jets
4 load cells
5 arithmetic units
6 decision circuits
7 servomotors
8 servomotors
9 cameras
10 image processing apparatus
11 glass film exfoliating devices
12 adsorption elements
12a absorption layers
12b holding plates
13 lowering or hoisting gears
13a main parts
13b lifting units
14 load cells
15 decision circuits
16 servomotors
17 cameras
18 image processing apparatus
19 arithmetic units
G glass film laminates
SG supporting glass
GF glass-films
GFa laminated sections
GFb stripping portions
GFc peels off advance portion
W width dimensions
The moving direction of X blades
The moving direction of T blades
The moving direction of U blades
The translational speed of V blades (adsorption element)
R resistances
A compressed airs
The emitted dose of Q compressed airs
Z characteristic values
Z0Standard value
Z1Standard value
Z2Standard value
ZmaxStandard value
P front ends
D peels off the distance between advance portion and front end
The average value of D ' distances
GD view data
S1~S11 signals
VV peels off the translational speed in advance portion
Y departure directions
C peels off the crosscutting mobile predetermined direction in advance portion
L1~L4 boundary lines
AR1~AR5 regions
DD peels off the distance of the crosscutting movement in advance portion

Claims (3)

1. a kind of glass film exfoliating device, it possess make to be layered on supporting mass with flexible glass-film from the supporting mass The stripping unit of stripping, it is characterised in that
The glass film exfoliating device possesses：
Detection unit, the characteristic value that its pair accordingly changes with the size of resistance when peeling off the glass-film is detected；With
Control unit, it is controlled according to the characteristic value for detecting to the peeling action of the stripping unit,
The stripping unit is adsorption element, and the adsorption element is by the glass-film and the supporting mass has been adsorbed Moved to the departure direction left from the opposing party in the state of the surface of one side, so that the crosscutting movement in advance portion is peeled off, it is described The side between stripping portion after peeling off advance portion and turning into laminated section that the glass-film and the supporting mass be laminated and peel off Boundary,
Described control unit makes the mobile speed to the departure direction of the adsorption element according to the change of the characteristic value Degree change, so that the translational speed for peeling off advance portion changes with following.
2. glass film exfoliating device according to claim 1, it is characterised in that
The characteristic value is the resistance acted on to the rightabout of the departure direction the adsorption element.
3. glass film exfoliating device according to claim 1 and 2, it is characterised in that
The glass film exfoliating device possesses multiple adsorption elements,
Multiple adsorption elements are respectively to being entered each region that the surface of one is divided into multiple regions by boundary line Row absorption, and from the adsorption element of the upstream side of the crosscutting mobile predetermined direction positioned at the stripping advance portion, phase The adjacent adsorption element is moved to the departure direction successively, and the boundary line is along orthogonal with the crosscutting mobile predetermined direction Direction extends.
CN201480040414.5A 2013-09-17 2014-09-12 Glass film exfoliating device Active CN105377732B (en)

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JP2013191628 2013-09-17
PCT/JP2014/074202 WO2015041165A1 (en) 2013-09-17 2014-09-12 Glass film removal device

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