CN105350000B - 一种环保型铝合金材料抛光液及其制备方法 - Google Patents
一种环保型铝合金材料抛光液及其制备方法 Download PDFInfo
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- CN105350000B CN105350000B CN201510868232.3A CN201510868232A CN105350000B CN 105350000 B CN105350000 B CN 105350000B CN 201510868232 A CN201510868232 A CN 201510868232A CN 105350000 B CN105350000 B CN 105350000B
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- 238000005498 polishing Methods 0.000 title claims abstract description 50
- 229910000838 Al alloy Inorganic materials 0.000 title claims abstract description 33
- 239000000956 alloy Substances 0.000 title claims abstract description 31
- 238000002360 preparation method Methods 0.000 title claims abstract description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 48
- 238000000498 ball milling Methods 0.000 claims abstract description 31
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 24
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims abstract description 22
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 22
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims abstract description 15
- 238000004821 distillation Methods 0.000 claims abstract description 14
- 235000011187 glycerol Nutrition 0.000 claims abstract description 14
- UKGRTCZMPQERFQ-UHFFFAOYSA-N octadecyl 2-hydroxypropanoate Chemical compound CCCCCCCCCCCCCCCCCCOC(=O)C(C)O UKGRTCZMPQERFQ-UHFFFAOYSA-N 0.000 claims abstract description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000002253 acid Substances 0.000 claims abstract description 13
- 150000002148 esters Chemical class 0.000 claims abstract description 13
- 229940068918 polyethylene glycol 400 Drugs 0.000 claims abstract description 13
- 235000011067 sorbitan monolaureate Nutrition 0.000 claims abstract description 13
- 239000001590 sorbitan monolaureate Substances 0.000 claims abstract description 13
- SZYJELPVAFJOGJ-UHFFFAOYSA-N trimethylamine hydrochloride Chemical class Cl.CN(C)C SZYJELPVAFJOGJ-UHFFFAOYSA-N 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 16
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 claims description 14
- 239000004615 ingredient Substances 0.000 claims description 13
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 7
- 235000019270 ammonium chloride Nutrition 0.000 claims description 7
- 239000010936 titanium Substances 0.000 claims description 7
- 229910052719 titanium Inorganic materials 0.000 claims description 7
- 239000010935 stainless steel Substances 0.000 claims description 6
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- 238000000227 grinding Methods 0.000 claims description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 239000012530 fluid Substances 0.000 abstract description 9
- 230000000694 effects Effects 0.000 abstract description 7
- 230000007613 environmental effect Effects 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 5
- 230000008030 elimination Effects 0.000 description 2
- 238000003379 elimination reaction Methods 0.000 description 2
- -1 sorbitol anhydride Chemical class 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 1
- 229910000632 Alusil Inorganic materials 0.000 description 1
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- AJXBTRZGLDTSST-UHFFFAOYSA-N amino 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)ON AJXBTRZGLDTSST-UHFFFAOYSA-N 0.000 description 1
- 229930016911 cinnamic acid Natural products 0.000 description 1
- 235000013985 cinnamic acid Nutrition 0.000 description 1
- 230000001795 light effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F3/00—Brightening metals by chemical means
- C23F3/02—Light metals
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
实施例1 | 实施例2 | 实施例3 | 实施例4 | 实施例5 | 对比例1 | 对比例2 | |
表面粗糙度(nm) | 4.7 | 4.8 | 4.0 | 4.2 | 3.6 | 5.3 | 5.1 |
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201510868232.3A CN105350000B (zh) | 2015-12-02 | 2015-12-02 | 一种环保型铝合金材料抛光液及其制备方法 |
Applications Claiming Priority (1)
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CN201510868232.3A CN105350000B (zh) | 2015-12-02 | 2015-12-02 | 一种环保型铝合金材料抛光液及其制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN105350000A CN105350000A (zh) | 2016-02-24 |
CN105350000B true CN105350000B (zh) | 2018-06-22 |
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Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN112522709B (zh) * | 2020-12-18 | 2022-11-15 | 东莞市新东明科技有限公司 | 一种平板外壳化抛方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6821309B2 (en) * | 2002-02-22 | 2004-11-23 | University Of Florida | Chemical-mechanical polishing slurry for polishing of copper or silver films |
CN103866326A (zh) * | 2012-12-10 | 2014-06-18 | 安集微电子(上海)有限公司 | 一种金属化学机械抛光浆料及其应用 |
CN103013345B (zh) * | 2012-12-21 | 2015-02-18 | 清华大学 | 油性金刚石研磨液及其制备方法 |
US9303188B2 (en) * | 2014-03-11 | 2016-04-05 | Cabot Microelectronics Corporation | Composition for tungsten CMP |
JP2015203080A (ja) * | 2014-04-15 | 2015-11-16 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
CN104018173A (zh) * | 2014-06-11 | 2014-09-03 | 张家港保税区冠祥贸易有限公司 | 金属制品用防锈清洗剂 |
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2015
- 2015-12-02 CN CN201510868232.3A patent/CN105350000B/zh active Active
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CN105350000A (zh) | 2016-02-24 |
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Effective date of registration: 20180309 Address after: Taizhou City, Zhejiang province Luqiao District 318050 peak River Street No. 9, Mei Ting Lu Applicant after: Lin Xiaofen Address before: Hu Suzhou high tech Zone of Jiangsu province 215000 City Industrial Park and off road No. 6 standard factory Applicant before: Suzhou Jie Derui precision optical machinery company limited |
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Effective date of registration: 20181113 Address after: 530000 Tianjian International Hall, Block A, No. 2803, No. 9 Tai Road, Qingxiu District, Nanning City, Guangxi Zhuang Autonomous Region Patentee after: Guangxi Belt and Road Initiative Technology Co. Ltd. Address before: 318050 9 Mei Ting Road, Feng Jiang Street, Luqiao District, Taizhou, Zhejiang Patentee before: Lin Xiaofen |
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Effective date of registration: 20190123 Address after: 531400 Pingguo County Industrial Park, Guangxi Zhuang Autonomous Region Patentee after: Pingguo Jianfang Aluminum Material Co., Ltd. Address before: 530000 Tianjian International Hall, Block A, No. 2803, No. 9 Tai Road, Qingxiu District, Nanning City, Guangxi Zhuang Autonomous Region Patentee before: Guangxi Belt and Road Initiative Technology Co. Ltd. |
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Effective date of registration: 20201102 Address after: 533000 Pingguo Industrial Zone, Baise City, Guangxi Zhuang Autonomous Region Patentee after: GUANGXI RUI QI FENG NEW MATERIALS Co.,Ltd. Address before: 531400 Pingguo County Industrial Park, Guangxi Zhuang Autonomous Region Patentee before: Pingguo Jianfang Aluminum Material Co.,Ltd. |
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