CN105333811B - The interdigital metal strain plate in sensitive grid side of cross direction profiles five of measurable unilateral double offset sensitive grid central cross local derviation - Google Patents
The interdigital metal strain plate in sensitive grid side of cross direction profiles five of measurable unilateral double offset sensitive grid central cross local derviation Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
Abstract
A kind of interdigital metal strain plate in sensitive grid side of cross direction profiles five of measurable unilateral double offset sensitive grid central cross local derviation, including substrate and five sensitive grids being fixed thereon, the both ends of each sensitive grid connect a pin respectively, each sensitive grid includes sensitive segment and changeover portion, and the axis of all sensitive segments is in the parallel lines in same plane；In the plane, in the axial direction i.e. axially, with axially vertical direction for laterally；Between five sensitive grid centers axial zero deflection and laterally have deviation；Each sensitive grid presses the order of sensitive grid center, is from top to bottom transversely thin first sensitive grid, dredges second sensitive grid, middle sensitive grid, close second sensitive grid and close first sensitive grid；Upper two, it is in interdigital arrangement respectively between lower two sensitive grids, each sensitive grid all-in resistance changing value under same strain is in 1：1：4：3：3.Centering sensitive grid time-sharing multiplex in the present invention, Mi Jia, the strain transverse direction single order local derviation at close second sensitive grid center can be almost measured simultaneously.
Description
Technical field
The present invention relates to sensor field, especially a kind of metal strain plate.
Background technology
The operation principle of metal resistance strain gauge is resistance strain effect, i.e. wire is in effect strained, its electricity
Resistance occurs to change accordingly with the size of mechanically deform occurred (stretching or compression).The theoretical formula of resistance strain effect
It is as follows:
Wherein R is its resistance value, and ρ is metal material resistivity, and L is metal material length, and S is metal material sectional area.
Wire is bearing to strain during mechanically deform occurs, and ρ, L, S three will change, so as to cause gold
Belong to the change of material resistance value.When metal material is stretched, length increase, sectional area reduces, resistance value increase；When compressed
When, length reduces, and sectional area increase, resistance value reduces.Therefore, as long as the change of resistance value can be measured, wire can be known
Strained situation.Metal material resistance change rate formula can be exported by relevant knowledges such as formula (1) and the mechanics of materials
Wherein Δ R is resistance variation amount, and Δ L is the change of metal material length on pulling force or pressure action direction
Amount, ε are that the strain in same direction is usually referred to as axial strain, and K is metal material ga(u)ge factor.
In actual applications, metal resistance strain gauge is pasted onto to the table of Sensor Elastic Element or tested machine components
Face.When the flexible member in sensor or tested machine components are produced strain by active force, foil gauge thereon is pasted onto
Identical mechanically deform occurs therewith, causes strain sheet resistance that corresponding change occurs.At this moment, resistance strain gage is just by mechanical quantity
Be converted to the variable quantity output of resistance.
But we are also required to understand the partial derivative of workpiece strain sometimes, for example there are three kinds of occasions, but not limited to this below
Three, it is necessary to use workpiece surface strain partial derivative：
First, due to nearby occurring that strain is concentrated, and often occurs damaging it first as workpiece at workpiece shapes mutation
Place, the strain partial derivative near at shape mutation is monitored, can intuitively obtain strain intensity at this.
Second, largely existed by comer pieces in building, bridge, plant equipment, the relevant knowledge of the mechanics of materials is taught that, bending
The axial strain of beam surface is directly proportional to section turn moment, and the axial first-order partial derivative of section turn moment is directly proportional to section shearing strain,
Exactly section shearing strain can be known by the axial first-order partial derivative of surface axial strain, and the shearing strain can not use foil gauge
Arrived in workpiece surface direct measurement；
3rd, when applied elasticity research workpiece strains, internal strain is decided by partial differential equation, and equation solution needs
Boundary condition, and workpiece surface strain partial derivative is exactly one of boundary condition, this is that general foil gauge can not provide.
In addition, to some positions of workpiece, such as the position such as at the shaft shoulder, part edge, due to the mutation of geomery, its
Bigger change often accordingly be present in strain.However, just due to the mutation of geomery so that more difficult placement in general at this
Foil gauge is, it is necessary to the product of a kind of inclined marginal position of energy measuring strain piece rather than center position strain local derviation.
The content of the invention
In order to overcome the shortcomings of that existing metal strain plate can not detect strain local derviation, the present invention provides one kind and can measured
The transverse direction point of the measurable unilateral double offset sensitive grid central cross local derviation of energy effective detection surface strain transverse direction local derviation should be changed
The interdigital metal strain plate in sensitive grid side of cloth five, particularly measuring workpiece corner, edge etc. has size restriction site to foil gauge
Horizontal single order local derviation.
The technical solution adopted for the present invention to solve the technical problems is：
A kind of interdigital metal in sensitive grid side of cross direction profiles five of measurable unilateral double offset sensitive grid central cross local derviation should
Become piece, including substrate, the metal strain plate also include five sensitive grids, the both ends of each sensitive grid connect one and drawn respectively
Pin, five sensitive grids are fixed in the substrate；
Each sensitive grid includes sensitive segment and changeover portion, and the both ends of the sensitive segment are changeover portion, and the sensitive segment is in thin
Strip, the changeover portion are in tubbiness shape, and the resistance of the sensitive segment is much larger than the resistance of the changeover portion, same strain state
Under the increased resistance value of the sensitive segment be much larger than the increased resistance value of the changeover portion, the increased resistance value of the changeover portion connects
It is bordering on 0；
All cross section centres of form of each sensitive segment form sensitive segment axis, and the sensitive segment axis is straight line section, institute
In stating the diameter parallel of each sensitive segment in five sensitive grids and being generally aligned in the same plane, sensitive segment axis is determined in plane, edge
The sensitive segment axis direction is axially, with axially vertical direction for laterally；Its both sides resistance value be present on each sensitive segment
An equal cross section, take the cross-section centroid position and formed place sensitive segment by nominal mass of the sensitive segment resistance value
Nominal particle, the centroid position that the nominal particle of each sensitive segment is collectively forming are the center of sensitive grid；
Zero deflection in the axial direction between each sensitive grid center, there is deviation in the horizontal；Each sensitive grid presses sensitive grid centre bit
The order put, thin first sensitive grid is transversely followed successively by from top to bottom, dredges second sensitive grid, middle sensitive grid, close second sensitive grid and Mi Jia
Sensitive grid；It is Δ y to dredge distance between first sensitive grid center and middle sensitive grid centerA, in middle sensitive grid center and close first sensitive grid
Distance is also Δ y between the heartA；It is Δ y to dredge distance between second sensitive grid center and middle sensitive grid centerB, middle sensitive grid center with it is close
Distance is also Δ y between second sensitive grid centerB, Δ yA＞ Δs yB；Dredge first sensitive grid center and thin second sensitive grid center distance be
Δy1, distance is Δ y between close second sensitive grid center and close first sensitive grid center1；Δy1=Δ yA-ΔyB；
Each sensitive segment axis determines in plane that it is in interdigital arrangement between first sensitive grid and thin second sensitive grid that top, which is dredged, under
It is in interdigital arrangement between the close first sensitive grid in portion and close second sensitive grid；
The sensitive segment all-in resistance for dredge first sensitive grid, dredging second sensitive grid, middle sensitive grid, close second sensitive grid and close first sensitive grid is in
1：1：4：3：3 proportionate relationship, dredge first sensitive grid, dredge the quick of second sensitive grid, middle sensitive grid, close second sensitive grid and close first sensitive grid
The all-in resistance changing value for feeling section sensitive segment under identical strain is also in 1：1：4：3：3 proportionate relationship.
Further, all shape of cross section sizes of each sensitive segment are consistent, take the axis point midway of each sensitive segment
And the nominal particle of place sensitive segment is formed using the sensitive segment resistance value as nominal mass, the thin first sensitive grid, dredge second sensitivity
Grid, middle sensitive grid, the sensitive segment total length of close second sensitive grid and close first sensitive grid are in 1：1：4：3：3 proportionate relationship.The program
For a kind of scheme that can be selected, as long as the position of nominal particle meets the equal cross section position of form center of its both sides resistance value i.e.
Can or other positions.
Among five sensitive grids, except being in interdigital arrangement between above-mentioned two pairs of sensitive grids, without between other sensitive grids
Interdigital arrangement.The interdigital arrangement refers to：Two sensitive grids each sensitive segment axis institute in the plane, vertical with sensitive segment axis
The sensitive segment of two sensitive grids distribution straggly on direction, the order occurred respectively to the sensitive segment of two sensitive grids in this direction and time
Number is not limited.
Using the linear relationship between metal material increased resistance value and strain, this foil gauge is as common foil gauge
It can be used for measuring strain.On the other hand, according in numerical differentiation theory, (such as Yi Fengkang is compiled, National Defense Industry Press 1978
December in year publishes《Numerical computation method》Page 21 (1.4.11)-(1.4.14) formulas make equidistant interpolation analysis) on single order local derviation
Circular, the numerical computation method of f (x, y) y directions first-order partial derivative is as follows：
Wherein y1=y0+ h, y2=y1+ h, it is (x, y to pay special attention to above formula2) position first-order partial derivative value formula, the formula
Smaller truncated error is o (h2) be step-length square higher order indefinite small.By being generally acknowledged that sensitive gate resistance in formula (2) engineering
Variable quantity direct ratio and the strain at sensitive grid center, with reference to each sensitive gate resistance and the ratio of the resistance change under same strain
Example relation, dredge the resistance of first sensitive grid and close first sensitive grid and subtract the resistance value of middle sensitive grid, then divided by thin first sensitive grid in
The heart and the distance at close first sensitive grid center are the horizontal single order numerical value local derviation of strain, are that close first is sensitive according to theoretical this of numerical differentiation
Horizontal single order numerical value local derviation at grid center, this is not in the middle part of foil gauge but the horizontal single order local derviation in portion on the lower side；Equally, second is dredged
The resistance of sensitive grid and close second sensitive grid and the resistance value for subtracting middle sensitive grid, then divided by thin second sensitive grid center and close second sensitivity
The distance at grid center is the horizontal single order numerical value local derviation of strain, and according to numerical differentiation theory, this is the horizontal stroke at close second sensitive grid center
To single order numerical value local derviation, this is not in the middle part of foil gauge but the horizontal single order local derviation in portion on the lower side.Horizontal the one of position at above-mentioned two
Rank local derviation can be realized by centering sensitive grid time-sharing multiplex and almost measured simultaneously.Therefore the advantage of the foil gauge is that its downside can
For measure the general foil gauge such as workpiece corner, edge due to size limitation can not measuring point two at close positions transverse direction
Single order local derviation.
It should be noted that keeping dredging first sensitive grid, dredging second sensitive grid, middle sensitive grid, close second sensitive grid and close first sensitivity in technique
The variable quantity of grid changeover portion all-in resistance and changeover portion resistance under external strain is in 1：1：4：3：3 numerical relation is surveyed with heightening
Accuracy of measurement, if the resistance of changeover portion and the lower resistance change of strain be can not ignore, systematic error can be also used as in detection
Eliminated.
Further, the metal strain plate also includes cover plate, and the cover plate is covered in the sensitive grid and substrate.
Further, the sensitive grid is wire form, foil, diaphragm type or thick-film type sensitive grid.
Further, the substrate is glued membrane substrate, glass fabric substrates, asbestos base bottom, metallic substrates or temporary substrate.
Five sensitive grid upper, middle and lower are arranged in substrate.It is of course also possible to it is other arrangements.
Beneficial effects of the present invention are mainly manifested in：Centering sensitive grid time-sharing multiplex, foil gauge almost can detect close simultaneously
Strain transverse direction single order local derviation at first sensitive grid center, close second sensitive grid center, the measurable workpiece in downside of particularly foil gauge
Corner, edge etc. have close positions transverse direction single order local derviation at the two of size restriction site to foil gauge.
Brief description of the drawings
Fig. 1 is that the interdigital metal in sensitive grid side of cross direction profiles five of measurable unilateral double offset sensitive grid central cross local derviation should
Become the schematic diagram of piece.
Fig. 2 is that the interdigital metal in sensitive grid side of cross direction profiles five of measurable unilateral double offset sensitive grid central cross local derviation should
Become piece top view.
Fig. 3 is measuring bridge schematic diagram.
Fig. 4 is two kinds of sensitive segment length configuration calculation specifications figures of sensitive grid.
Embodiment
The invention will be further described below in conjunction with the accompanying drawings.
1~Fig. 3 of reference picture, a kind of sensitive grid of cross direction profiles five of measurable unilateral double offset sensitive grid central cross local derviation
The interdigital metal strain plate in side, including substrate, the metal strain plate also include five sensitive grids, the both ends difference of each sensitive grid
A pin is connected, five sensitive grids are fixed in the substrate；
Each sensitive grid includes sensitive segment and changeover portion, and the both ends of the sensitive segment are changeover portion, and the sensitive segment is in thin
Strip, the changeover portion are in tubbiness shape, and the resistance of the sensitive segment is much larger than the resistance of the changeover portion, same strain state
Under the increased resistance value of the sensitive segment be much larger than the increased resistance value of the changeover portion, the increased resistance value of the changeover portion connects
It is bordering on 0；
All cross section centres of form of each sensitive segment form sensitive segment axis, and the sensitive segment axis is straight line section, institute
In stating the diameter parallel of each sensitive segment in five sensitive grids and being generally aligned in the same plane, sensitive segment axis is determined in plane, edge
The sensitive segment axis direction is axially, with axially vertical direction for laterally；Its both sides resistance value be present on each sensitive segment
An equal cross section, take the cross-section centroid position and formed place sensitive segment by nominal mass of the sensitive segment resistance value
Nominal particle, the centroid position that the nominal particle of each sensitive segment is collectively forming are the center of sensitive grid；
Zero deflection in the axial direction between each sensitive grid center, there is deviation in the horizontal；Each sensitive grid presses sensitive grid centre bit
The order put, thin first sensitive grid is transversely followed successively by from top to bottom, dredges second sensitive grid, middle sensitive grid, close second sensitive grid and Mi Jia
Sensitive grid；It is Δ y to dredge distance between first sensitive grid center and middle sensitive grid centerA, in middle sensitive grid center and close first sensitive grid
Distance is also Δ y between the heartA；It is Δ y to dredge distance between second sensitive grid center and middle sensitive grid centerB, middle sensitive grid center with it is close
Distance is also Δ y between second sensitive grid centerB, Δ yA＞ Δs yB；Dredge first sensitive grid center and thin second sensitive grid center distance be
Δy1, distance is Δ y between close second sensitive grid center and close first sensitive grid center1；Δy1=Δ yA-ΔyB；
Each sensitive segment axis determines in plane that it is in interdigital arrangement between first sensitive grid and thin second sensitive grid that top, which is dredged, under
It is in interdigital arrangement between the close first sensitive grid in portion and close second sensitive grid, without the interdigital arrangement between other sensitive grids；
The sensitive segment all-in resistance for dredge first sensitive grid, dredging second sensitive grid, middle sensitive grid, close second sensitive grid and close first sensitive grid is in
1：1：4：3：3 proportionate relationship, dredge first sensitive grid, dredge the quick of second sensitive grid, middle sensitive grid, close second sensitive grid and close first sensitive grid
The all-in resistance changing value for feeling section sensitive segment under identical strain is also in 1：1：4：3：3 proportionate relationship.
Further, all shape of cross section sizes of each sensitive segment are consistent, take the axis point midway of each sensitive segment
And the nominal particle of place sensitive segment is formed using the sensitive segment resistance value as nominal mass, the thin first sensitive grid, dredge second sensitivity
Grid, middle sensitive grid, the sensitive segment total length of close second sensitive grid and close first sensitive grid are in 1：1：4：3：3 proportionate relationship.The program
For a kind of scheme that can be selected, as long as the position of nominal particle meets the equal cross section position of form center of its both sides resistance value i.e.
Can or other positions.
Among five sensitive grids, except being in interdigital arrangement between above-mentioned two pairs of sensitive grids, without between other sensitive grids
Interdigital arrangement.The interdigital arrangement refers to：Two sensitive grids each sensitive segment axis institute in the plane, vertical with sensitive segment axis
The sensitive segment of two sensitive grids distribution straggly on direction, the order occurred respectively to the sensitive segment of two sensitive grids in this direction and time
Number is not limited.
The sensitive grid side of cross direction profiles five of the measurable unilateral double offset sensitive grid central cross local derviation of the present embodiment is interdigital
Metal strain plate, including substrate 1, the metal strain plate also include five sensitive grids, and the both ends of each sensitive grid connect respectively
A piece pin, five sensitive grids are fixed in the substrate 1.
It is quick that thin first sensitive grid 2, thin second sensitive grid 3, middle sensitive grid 4, close second sensitive grid 5 and close first can be fixed on substrate 1
Grid 6 are felt, for shape, the positions and dimensions for keeping each sensitive grid to fix；Substrate 1 is very thin, so as to which the strain of surface of test piece is accurate
Really it is delivered to thin first sensitive grid 2, dredges second sensitive grid 3, middle sensitive grid 4, close second sensitive grid 5 and close first sensitive grid 6.Substrate 1 can
To be glued membrane substrate, glass fabric substrates, asbestos base bottom, metallic substrates and temporary substrate.Generally with cohere, weld, ceramics spray
Substrate is fixed on the tested position of test block by the modes such as painting.Some lines for being used for foil gauge positioning can be also printed in substrate 1.
Cover plate is made of materials such as paper or glue, is covered in thin first sensitive grid 2, is dredged second sensitive grid 3, middle sensitive grid 4, close second
In sensitive grid 5, close first sensitive grid 6 and substrate 1, play the protective layer of protection against the tide, corrosion protection, loss prevention etc..
Pin 7 is used to connect sensitive grid and measuring circuit, dredges first sensitive grid 2, dredges second sensitive grid 3, middle sensitive grid 4, close second
Sensitive grid 5 and close first sensitive grid 6 respectively have two pins 7, pair with foil and membrane type foil gauge, the thin first that pin 7 is connected with it
Sensitive grid 2, thin second sensitive grid 3, middle sensitive grid 4, close second sensitive grid 5 and close first sensitive grid 6 combine as a whole.Dredge first sensitive grid 2
Two pins are 7-1 and 7-2, and two pins for dredging second sensitive grid 3 be 7-3 and 7-4, two pins of middle sensitive grid 4 for 7-5 with
7-6, two pins of close second sensitive grid 5 are 7-7 and 7-8, and two pins of close first sensitive grid 6 are 7-9 and 7-10.
Dredge first sensitive grid 2, dredge second sensitive grid 3, middle sensitive grid 4, close second sensitive grid 5 and close first sensitive grid 6 according to its metal
The difference of sensitive material and processing technology, can be wire form, foil, diaphragm type, thick-film type.No matter which kind of is dredged first sensitive grid 2, dredged
Second sensitive grid 3, middle sensitive grid 4, the equal very little of thickness of close second sensitive grid 5 and close first sensitive grid 6 so that dredge first sensitive grid 2, dredge second
Sensitive grid 3, middle sensitive grid 4, the axial length of close second sensitive grid 5 and close first sensitive grid 6 depend on the deformation of workpiece with it and become
Change.It is of the invention basic it is critical that dredging first sensitive grid 2, dredging second sensitive grid 3, middle sensitive grid 4, close second sensitive grid 5 and close
Cooperation between first sensitive grid 6, there are following main points：
First, five sensitive grids are arranged in substrate, thin first sensitive grid 2 is referred to as, dredges second sensitive grid 3, middle sensitive grid
4th, close second sensitive grid 5 and close first sensitive grid 6.
Second, dredge first sensitive grid 2, thin second sensitive grid 3, middle sensitive grid 4, close second sensitive grid 5 and close first sensitive grid 6 can divide
For multiple sensitive segments 8 and multiple changeover portions 9, the connection of each sensitive segment 8 is formed sensitive grid by each changeover portion 9.Comparatively, sensitive segment
8 is elongated in shape, and resistance is larger and its resistance is more sensitive to straining；The changeover portion 9 is in tubbiness shape substantially so that the mistake
The resistance very little of section and insensitive to straining is crossed, resistance variations are close to 0 under working condition, therefore the summation of sensitive segment resistance
The all-in resistance of essentially single sensitive grid.Fig. 2 has marked sensitive segment 8 and changeover portion 9 in more detail from apparent angle.
3rd, the sensitive segment 8 of each sensitive grid is in elongated strip, and all cross section centres of form composition of each sensitive segment 8 is quick
Feel section axis, the axis of sensitive segment 8 is straight line section, the diameter parallel of each sensitive segment 8 and is generally aligned in the same plane.Each
Projection of shape of all cross sections of sensitive segment 8 along sensitive segment axis direction is consistent.Take the axis point midway of each sensitive segment
And the nominal particle of place sensitive segment is formed using the sensitive segment resistance value as nominal mass, the nominal particle of each sensitive segment is common
The centroid position of formation is the center of sensitive grid.
4th, dredge first sensitive grid 2, dredge the sensitivity of second sensitive grid 3, middle sensitive grid 4, close second sensitive grid 5 and close first sensitive grid 6
Section total length is in 1：1：4：3：3 proportionate relationship, the side illustrated on how to realize this length ratio relation to see below with reference to Fig. 4
Method；The sensitive segment all-in resistance for dredge first sensitive grid 2, dredging second sensitive grid 3, middle sensitive grid 4, close second sensitive grid 5 and close first sensitive grid 6 is in
1：1：4：3：3 proportionate relationship, dredge first sensitive grid 2, dredge second sensitive grid 3, middle sensitive grid 4, close second sensitive grid 5 and close first sensitive grid
The all-in resistance changing value of 6 sensitive segment sensitive segment under identical strain is also in 1：1：4：3：3 proportionate relationship.
5th, overlook and dredge first sensitive grid 2, dredge second sensitive grid 3, middle sensitive grid 4, close second sensitive grid 5 and close first sensitive grid 6,
They respectively have two kinds of length and axial starting point difference, terminal identical sensitive segment, and the two hop count is identical, and both reasonable selections are long
Above-mentioned each sensitive grid center all can be configured in y-axis by degree, and specific method sees below with reference to Fig. 4 explanation.Dredge first sensitive grid
2nd, the center of second sensitive grid 3, middle sensitive grid 4, close second sensitive grid 5 and close first sensitive grid 6 is dredged on the y axis, in them
The heart has lateral deviation without axial deviation.According to the top view of foil gauge in Fig. 2, dredging the sensitive segment 8 of first sensitive grid 2 has axial direction right
Claim axle xSA, the center of first sensitive grid 2 is dredged in y-axis and xSAThe intersection point of axle, the sensitive segment 8 for dredging second sensitive grid 3 have axially symmetric axle
xSB, the center of second sensitive grid 3 is dredged in y-axis and xSBThe intersection point of axle, the sensitive segment 8 of middle sensitive grid 4 have axially symmetric axle xM, middle sensitivity
The center of grid 4 is in y-axis and xMThe intersection point of axle, the sensitive segment 8 of close second sensitive grid 5 have axially symmetric axle xDB, in close second sensitive grid 5
The heart is in y-axis and xDBThe intersection point of axle, the sensitive segment 8 of close first sensitive grid 6 have axially symmetric axle xDA, the center of close first sensitive grid 6 is in y
Axle and xDAThe intersection point of axle.
6th, it is Δ y to dredge distance between the center of first sensitive grid 2 and the center of middle sensitive grid 4A, the center of middle sensitive grid 4
Distance is also Δ y between the center of close first sensitive grid 6A；Dredge the spacing at the center of second sensitive grid 3 and the center of middle sensitive grid 4
From for Δ yB, distance is also Δ y between the center of middle sensitive grid 4 and the center of close second sensitive grid 5B, Δ yA＞ Δs yB；It is quick to dredge first
The distance for feeling the center of grid 2 and the center of thin second sensitive grid 3 is Δ y1, in the center of close second sensitive grid 5 and close first sensitive grid 6
Distance is Δ y between the heart1, Δ y1=Δ yA-ΔyB, as shown in Figure 2.As shown in Figure 2, each sensitive segment axis is determined in plane,
It is in interdigital arrangement that top, which is dredged between first sensitive grid 2 and thin second sensitive grid 3, is between the close second sensitive grid 5 in bottom and close first sensitive grid 6
Interdigital arrangement, without the interdigital arrangement between other sensitive grids.The interdigital arrangement refers to：The axis of each sensitive segment 8 of two sensitive grids
Institute is in the plane, quick in this direction two in the sensitive segment distribution straggly with two sensitive grids in sensitive segment axis vertical direction
The order and number that the sensitive segment of sense grid occurs respectively are not limited.Due to dredging first sensitive grid 2, dredging second sensitive grid 3, middle sensitive grid
4th, the relative position of close second sensitive grid 5 and close first sensitive grid 6 is ensured relatively accurately to be secured by foil gauge production technology, this
And the present invention can detect workpiece and strain one of key of horizontal partial derivative.
In summary, the thin first sensitive grid 2 of the present invention, thin second sensitive grid 3, middle sensitive grid 4, close second sensitive grid 5 and close first are quick
The all-in resistance changing value for feeling sensitive segment sensitive segment under identical strain of grid 6 is also in 1：1：4：3：3 proportionate relationship, each sensitivity
The central axial zero deflection of grid, laterally there is deviation, and it is Δ y to dredge distance between the center of first sensitive grid 2 and the center of middle sensitive grid 4A,
Distance is also Δ y between the center of middle sensitive grid 4 and the center of close first sensitive grid 6A；Dredge the center of second sensitive grid 3 and middle sensitivity
Distance is Δ y between the center of grid 4B, distance is also Δ y between the center of middle sensitive grid 4 and the center of close second sensitive grid 5B, Δ
yA＞ Δs yB；The distance for dredging the center of first sensitive grid 2 and the center of thin second sensitive grid 3 is Δ y1, the center of close second sensitive grid 5 with
Distance is Δ y between the center of close first sensitive grid 61, Δ y1=Δ yA-ΔyB。
It is R to make and the resistance of first sensitive grid 2 is dredged under free stateU0, the middle resistance of sensitive grid 4 is RM0, the close resistance of first sensitive grid 6 is
RL0, should there is RL0+RR0=RM0=R0.When the foil gauge of the present invention is placed in into certain surface strain, dredging the resistance of first sensitive grid 2 is
R0+ΔRU, the middle resistance of sensitive grid 4 is R0+ΔRM0, the close resistance of first sensitive grid 6 is R0+ΔRL；On the other hand, dredge first sensitive grid 2 with
And the center of close first sensitive grid 6 is located at y-axis and x in Fig. 2 respectivelySAIntersection point and y-axis and xDAIntersection point, at a distance of 2 Δs in transverse direction
yA.Formula using the relation and numerical differentiation of sensitive gate resistance and surface strain has：
WhereinAt the close center of first sensitive grid 6, εUTo dredge the strain at the center of first sensitive grid 2, εMFor in middle sensitive grid 4
Strain at the heart, εLFor the strain at the close center of first sensitive grid 6.This is the original that the present embodiment measurement surface strains horizontal local derviation
Reason.Pay special attention to, the numerical differentiation that above formula is calculated be the close center of first sensitive grid 6 at strain transverse direction single order local derviation, the position
For the bottom rather than middle part of foil gauge, therefore there is size limitation to foil gauge with being easy to measure workpiece corner, edge etc.
The advantage of the horizontal single order local derviation at position.Equally, dredging second sensitive grid 3, middle sensitive grid 4 and close second sensitive grid 5 can coordinate calculating close
Strain transverse direction first-order partial derivative at the center of second sensitive grid 5, the position are the bottom rather than middle part of foil gauge.Above-mentioned close first is sensitive
The horizontal single order local derviation of strain of the center of grid 6 and the strain transverse direction first-order partial derivative of the close center of second sensitive grid 5 can lead to
The time-sharing multiplex of centering sensitive grid 4 is crossed to realize almost while measure.
Electric bridge is coordinated to can be used for measuring strain, strain horizontal single order local derviation the present embodiment, it is assumed that bridge input voltage is
ui, output voltage uo, the schematic diagram of measuring bridge is shown in Fig. 3.When without workpiece effects of strain, each arm resistance of electric bridge is according to up time
Pin direction is respectively labeled as R1、R2、R3、R4, in the also electric bridge where these sign flag resistance in the case of will not obscuring.Often
The sensitive grid or resistance of foil gauge can be laid on individual electric bridge.It is identical with general foil gauge arrangement, if in multiple bridge arms
Upper placement sensitive grid, the requirement of order, strain difinite quality to each installation position.During without workpiece effects of strain, the output of electric bridge
Voltage equation is
Now, it is desirable to bridge balance i.e. uo=0, then it must is fulfilled for so-called bridge balance condition R1R3-R2R4=0,
The electric bridge of use further meets
R1=R2=R3=R4, (5)
Since first, when meeting condition (5), according to relevant theoretical foil gauge sensitivity highest；Second, measuring strain or
The method that person strains horizontal local derviation is required to condition (5) establishment.When foil gauge also strains with external world's strain, above-mentioned electric bridge
Equilibrium condition is typically no longer set up, now
Due to Δ Ri＜ ＜ RiFirst ≈ of (i=1,2,3,4) event is set up, and second ≈ works as Δ R1-ΔR2With Δ R3-ΔR4
Jack per line or contrary sign but | Δ R1-ΔR2| with | Δ R3-ΔR4| not in close proximity to when set up, the reasonable selection foil gauge in engineering
Installation position can be realized completely.It is generally available the voltage measurement strain of formula (6) acquisition；Can convolution to straining horizontal local derviation
(3) and formula (6), reasonable design arrange each bridge arm sensitive grid and resistance, such as bridge arm R1Sensitive grid 4 in arrangement, bridge arm R2Series connection
Close first sensitive grid 6 and thin first sensitive grid 2 are arranged, remaining bridge arm configuration substitutional resistance, can be obtained and the close center of first sensitive grid 6
The linear magnitude of voltage u of the horizontal single order local derviation of straino, the voltage is that small-signal need to be amplified.
With reference to Fig. 4, each sensitive grid in design drawing 2 is illustrated how.Each sensitive grid is furnished with two kinds of length and axial direction in Fig. 2
Starting point is different, terminal identical sensitive segment, and its main purpose is that the center of two interdigital each other sensitive grids can be configured
In y-axis into Fig. 2, principle is shown in Fig. 4.There are two sensitive grids A and B part in Fig. 4, A there are two kinds of sensitive segments of A1 and A2, and B has
Two kinds of sensitive segments of B1 and B2.Each size is shown in that Fig. 4, wherein d are the size that technique determines, it is believed that is definite value；L=2l-x is A1 and A2
Overall length, in design drawing 2 during each sensitive grid, according to resistance ratio and sensitive segment number, it may be determined that its value, therefore in Fig. 4
Think that L has determined that；In Fig. 4 it needs to be determined that amount be l and x.Because A only has two kinds of sensitive segments of A1 and A2, and the hop count of the two
It is identical, as long as therefore one section of A1 and one section of A2 common center is configured in the y-axis in Fig. 4.With reference to resistance value and length
Linear relationship obviously have equation below group：
Wherein first formula left sideRefer to the distance of A1 off-centring y-axis, the rightThen for A2's
The distance of off-centring y-axis.According to symmetry, the l and x that can be solved from above-mentioned formula are equally applicable to B1 and B2.And then strain
The l and x of each sensitive grid first can first determine that L is tied again by the sensitive gate length, proportionate relationship, the sensitive segment hop count etc. that determine early stage in piece
Close process length d and solved by formula (7).
Claims (5)
- A kind of 1. interdigital metal strain in sensitive grid side of cross direction profiles five of measurable unilateral double offset sensitive grid central cross local derviation Piece, including substrate, it is characterised in that：The metal strain plate also includes five sensitive grids, and the both ends of each sensitive grid connect respectively A pin is connect, five sensitive grids are fixed in the substrate；Each sensitive grid includes sensitive segment and changeover portion, and the both ends of the sensitive segment are changeover portion, and the sensitive segment is in elongate strip Shape, the changeover portion are in tubbiness shape, and the resistance of the sensitive segment is much larger than the resistance of the changeover portion, institute under same strain state The increased resistance value for stating sensitive segment is much larger than the increased resistance value of the changeover portion, the increased resistance value of the changeover portion close to 0；All cross section centres of form of each sensitive segment form sensitive segment axis, and the sensitive segment axis is straight line section, and described five The diameter parallel of each sensitive segment and it is generally aligned in the same plane in individual sensitive grid, sensitive segment axis determined in plane, along described Sensitive segment axis direction is axially, with axially vertical direction for laterally；It is equal to there is its both sides resistance value on each sensitive segment A cross section, take the cross-section centroid position and using the sensitive segment resistance value as nominal mass formed where sensitive segment name Particle, the centroid position that the nominal particle of each sensitive segment is collectively forming are the center of sensitive grid；Zero deflection in the axial direction between each sensitive grid center, there is deviation in the horizontal；Each sensitive grid is by sensitive grid center Sequentially, thin first sensitive grid is transversely followed successively by from top to bottom, dredges second sensitive grid, middle sensitive grid, close second sensitive grid and close first sensitivity Grid；It is Δ y to dredge distance between first sensitive grid center and middle sensitive grid centerA, middle sensitive grid center and close first sensitive grid center it Between distance be also Δ yA；It is Δ y to dredge distance between second sensitive grid center and middle sensitive grid centerB, middle sensitive grid center and close second are quick Distance is also Δ y between feeling grid centerB, Δ yA＞ Δs yB；The distance for dredging first sensitive grid center and thin second sensitive grid center is Δ y1, distance is Δ y between close second sensitive grid center and close first sensitive grid center1；Δy1=Δ yA-ΔyB；Each sensitive segment axis determines in plane that it is in interdigital arrangement between first sensitive grid and thin second sensitive grid that top, which is dredged, and bottom is close It is in interdigital arrangement between first sensitive grid and close second sensitive grid, without the interdigital arrangement between other sensitive grids；Dredge first sensitive grid, dredge the sensitive segment all-in resistance of second sensitive grid, middle sensitive grid, close second sensitive grid and close first sensitive grid in 1：1： 4：3：3 proportionate relationship, dredge first sensitive grid, dredge the sensitive segment of second sensitive grid, middle sensitive grid, close second sensitive grid and close first sensitive grid The all-in resistance changing value of sensitive segment is also in 1 under identical strain：1：4：3：3 proportionate relationship.
- 2. the sensitive grid side of cross direction profiles five of measurable unilateral double offset sensitive grid central cross local derviation as claimed in claim 1 Interdigital metal strain plate, it is characterised in that：All shape of cross section sizes of each sensitive segment are consistent, take the axle of each sensitive segment Line point midway and the nominal particle that place sensitive segment is formed using the sensitive segment resistance value as nominal mass, the thin first are sensitive Grid, the sensitive segment total length of second sensitive grid, middle sensitive grid, close second sensitive grid and close first sensitive grid is dredged in 1：1：4：3：3 ratio Relation.
- 3. the cross direction profiles five of measurable unilateral double offset sensitive grid central cross local derviation as claimed in claim 1 or 2 are sensitive The interdigital metal strain plate in grid side, it is characterised in that：The metal strain plate also includes cover plate, and the cover plate is covered in the sensitivity On grid and substrate.
- 4. the cross direction profiles five of measurable unilateral double offset sensitive grid central cross local derviation as claimed in claim 1 or 2 are sensitive The interdigital metal strain plate in grid side, it is characterised in that：The sensitive grid is wire form, foil, diaphragm type or thick-film type sensitive grid.
- 5. the cross direction profiles five of measurable unilateral double offset sensitive grid central cross local derviation as claimed in claim 1 or 2 are sensitive The interdigital metal strain plate in grid side, it is characterised in that：The substrate is glued membrane substrate, glass fabric substrates, asbestos base bottom or metal Substrate.
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| SU1627825A1 (en) * | 1988-06-27 | 1991-02-15 | Киевский Политехнический Институт Им.50-Летия Великой Октябрьской Социалистической Революции | Thermal method for compensating initial level of strain-gauge signal |
| DE10310392A1 (en) * | 2003-03-07 | 2004-09-16 | Hottinger Baldwin Messtechnik Gmbh | Sensor for determining strain, has structured resistance tracks, and additional piezoelectric strain-sensitive materially applied to carrier layer or spring material |
| DE102004030382A1 (en) * | 2004-06-23 | 2006-02-02 | Eads Deutschland Gmbh | Strain-measuring method for measuring transverse strain in semiconductor material uses piezoresistive resistors sensitive to transverse and normal strains |
| CN102095362A (en) * | 2010-11-20 | 2011-06-15 | 武汉理工大学 | Grid-type carbon fiber strain transducer |
| CN202329533U (en) * | 2011-08-09 | 2012-07-11 | 浙江大合建设工程检测有限公司 | Strain gauge |
| CN104913985B (en) * | 2015-05-27 | 2017-11-03 | 河海大学 | Concrete impact based on nonequilibrium condition is curved to draw the measure device and assay method damaged |
| CN105091730B (en) * | 2015-07-03 | 2019-05-10 | 广东和宇传感器有限公司 | A kind of DSOI strain gauge and preparation method thereof |
| CN105066871B (en) * | 2015-08-13 | 2017-07-25 | 浙江工业大学 | The full interdigitated metal foil gauge of axial deviation full-bridge of the axial local derviation of measurable surface strain |
| CN105004262B (en) * | 2015-08-13 | 2017-07-25 | 浙江工业大学 | The double interdigitated metal foil gauges of lateral deviation full-bridge of the horizontal local derviation of measurable surface strain |
| CN105091731B (en) * | 2015-08-13 | 2017-07-25 | 浙江工业大学 | The axial deviation sensitive grid interdigitated metal foil gauge of the axial local derviation of measurable surface strain |
| CN105066870B (en) * | 2015-08-13 | 2017-09-22 | 浙江工业大学 | The double interdigitated metal foil gauges of axial deviation full-bridge of the axial local derviation of measurable surface strain |
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