CN105423907B - Six sensitive grid full-bridge of cross direction profiles, the three interdigital metal strain plate of measurable unilateral double offset sensitive grid central cross local derviation - Google Patents

Six sensitive grid full-bridge of cross direction profiles, the three interdigital metal strain plate of measurable unilateral double offset sensitive grid central cross local derviation Download PDF

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CN105423907B
CN105423907B CN201510886055.1A CN201510886055A CN105423907B CN 105423907 B CN105423907 B CN 105423907B CN 201510886055 A CN201510886055 A CN 201510886055A CN 105423907 B CN105423907 B CN 105423907B
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sensitive
sensitive grid
grid
close
segment
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CN105423907A (en
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张端
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Pizhou Huiteng Jingfa Construction Co.,Ltd.
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Zhejiang University of Technology ZJUT
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance

Abstract

A kind of six sensitive grid full-bridge of cross direction profiles, three interdigital metal strain plate of measurable unilateral double offset sensitive grid central cross local derviation, including substrate and six sensitive grids being fixed thereon, the both ends of each sensitive grid connect a pin respectively, each sensitive grid includes sensitive segment and changeover portion, and each sensitive segment axis is in coplanar straight line;In the plane in the axial direction i.e. axially, with axially vertical for transverse direction;Between each sensitive grid center axial zero deflection and laterally have deviation;Each sensitive grid presses the order of sensitive grid center, is from top to bottom transversely thin first sensitive grid, dredges second sensitive grid, middle first sensitive grid, middle second sensitive grid, close first sensitive grid and close second sensitive grid;It is in interdigital arrangement respectively between the sensitive grid of upper, middle and lower two, each sensitive grid increased resistance value under same strain is in 1:1:4:4:3:3.The present invention can detect Mi Jia, the strain transverse direction single order local derviation at close second sensitive grid center simultaneously.

Description

The sensitive grid of cross direction profiles six of measurable unilateral double offset sensitive grid central cross local derviation Three interdigital metal strain plate of full-bridge
Technical field
The present invention relates to sensor field, especially a kind of metal strain plate.
Background technology
The operation principle of metal resistance strain gauge is resistance strain effect, i.e. wire is in effect strained, its electricity Resistance occurs to change accordingly with the size of mechanically deform occurred (stretching or compression).The theoretical formula of resistance strain effect It is as follows:
Wherein R is its resistance value, and ρ is metal material resistivity, and L is metal material length, and S is metal material sectional area. Wire is bearing to strain during mechanically deform occurs, and ρ, L, S three will change, so as to cause gold Belong to the change of material resistance value.When metal material is stretched, length increase, sectional area reduces, resistance value increase;When compressed When, length reduces, and sectional area increase, resistance value reduces.Therefore, as long as the change of resistance value can be measured, wire can be known Strained situation.Metal material resistance change rate formula can be exported by relevant knowledges such as formula (1) and the mechanics of materials
Wherein Δ R is resistance variation amount, and Δ L is the change of metal material length on pulling force or pressure action direction Amount, ε are that the strain in same direction is usually referred to as axial strain, and K is metal material ga(u)ge factor.
In actual applications, metal resistance strain gauge is pasted onto to the table of Sensor Elastic Element or tested machine components Face.When the flexible member in sensor or tested machine components are produced strain by active force, foil gauge thereon is pasted onto Identical mechanically deform occurs therewith, causes strain sheet resistance that corresponding change occurs.At this moment, resistance strain gage is just by mechanical quantity Be converted to the variable quantity output of resistance.
But we are also required to understand the partial derivative of workpiece strain sometimes, for example there are three kinds of occasions, but not limited to this below Three, it is necessary to use workpiece surface strain partial derivative:
First, due to nearby occurring that strain is concentrated, and often occurs damaging it first as workpiece at workpiece shapes mutation Place, the strain partial derivative near at shape mutation is monitored, can intuitively obtain strain intensity at this.
Second, largely existed by comer pieces in building, bridge, plant equipment, the relevant knowledge of the mechanics of materials is taught that, bending The axial strain of beam surface is directly proportional to section turn moment, and the axial first-order partial derivative of section turn moment is directly proportional to section shearing strain, Exactly section shearing strain can be known by the axial first-order partial derivative of surface axial strain, and the shearing strain can not use foil gauge Arrived in workpiece surface direct measurement;
3rd, when applied elasticity research workpiece strains, internal strain is decided by partial differential equation, and equation solution needs Boundary condition, and workpiece surface strain partial derivative is exactly one of boundary condition, this is that general foil gauge can not provide.
In addition, to some positions of workpiece, such as the position such as at the shaft shoulder, part edge, due to the mutation of geomery, its Bigger change often accordingly be present in strain.However, just due to the mutation of geomery so that more difficult placement in general at this Foil gauge is, it is necessary to the product of a kind of inclined marginal position of energy measuring strain piece rather than center position strain local derviation.
The content of the invention
In order to overcome the shortcomings of that existing metal strain plate can not detect strain local derviation, the present invention provides one kind and can measured The transverse direction point of the measurable unilateral double offset sensitive grid central cross local derviation of energy effective detection surface strain transverse direction local derviation should be changed Six sensitive grid full-bridge of cloth, three interdigital metal strain plate, particularly measuring workpiece corner, edge etc. has size limiting unit to foil gauge The horizontal single order local derviation of position.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of six sensitive grid full-bridge of cross direction profiles, three interdigital gold of measurable unilateral double offset sensitive grid central cross local derviation Belong to foil gauge, including substrate, the metal strain plate also include six sensitive grids, the both ends of each sensitive grid connect one respectively Pin, six sensitive grids are fixed in the substrate;
Each sensitive grid includes sensitive segment and changeover portion, and the both ends of the sensitive segment are changeover portion, and the sensitive segment is in thin Strip, the changeover portion are in tubbiness shape, and the resistance of the sensitive segment is much larger than the resistance of the changeover portion, same strain state Under the increased resistance value of the sensitive segment be much larger than the increased resistance value of the changeover portion, the increased resistance value of the changeover portion connects It is bordering on 0;
All cross section centres of form of each sensitive segment form sensitive segment axis, and the sensitive segment axis is straight line section, institute In stating the diameter parallel of each sensitive segment in six sensitive grids and being generally aligned in the same plane, sensitive segment axis is determined in plane, edge The sensitive segment axis direction is axially, with axially vertical direction for laterally;Its both sides resistance value be present on each sensitive segment An equal cross section, take the cross-section centroid position and formed place sensitive segment by nominal mass of the sensitive segment resistance value Nominal particle, the centroid position that the nominal particle of each sensitive segment is collectively forming are the center of sensitive grid;
Zero deflection in the axial direction between each sensitive grid center, there is deviation in the horizontal;Each sensitive grid presses sensitive grid centre bit The order put, thin first sensitive grid is transversely followed successively by from top to bottom, dredges second sensitive grid, middle first sensitive grid, middle second sensitive grid, Mi Jia Sensitive grid and close second sensitive grid;It is Δ y to dredge distance between first sensitive grid center and middle first sensitive grid centerA, in middle first sensitive grid Distance is also Δ y between the heart and close first sensitive grid centerA;It is Δ to dredge distance between second sensitive grid center and middle second sensitive grid center yB, distance is also Δ y between middle second sensitive grid center and close second sensitive grid centerB, Δ yA=Δ yB;Dredge first sensitive grid center with The distance for dredging second sensitive grid center is Δ y1, the distance at middle first sensitive grid center and middle second sensitive grid center is Δ y1, close first sensitivity Distance is Δ y between grid center and close second sensitive grid center1
Each sensitive segment axis determines in plane that it is in interdigital arrangement between first sensitive grid and thin second sensitive grid that top, which is dredged, in It is in interdigital arrangement between first sensitive grid and middle second sensitive grid in portion, is in interdigital cloth between the close first sensitive grid in bottom and close second sensitive grid Put, without the interdigital arrangement between other sensitive grids;
Dredge first sensitive grid, dredge second sensitive grid, middle first sensitive grid, middle second sensitive grid, close first sensitive grid and close second sensitive grid Sensitive segment all-in resistance is in 1:1:4:4:3:3 proportionate relationship, dredge first sensitive grid, dredge second sensitive grid, middle first sensitive grid, middle second sensitivity The all-in resistance changing value of the sensitive segment of grid, close first sensitive grid and close second sensitive grid sensitive segment under identical strain is also in 1:1:4: 4:3:3 proportionate relationship.
Accordingly, connect and dredge first sensitive grid and close first sensitive grid, middle first sensitive grid, middle second sensitive grid, the thin second sensitive grid of series connection Four bridge arms of measuring bridge are just formed with close second sensitive grid.
Further, all shape of cross section sizes of each sensitive segment are consistent, take the axis point midway of each sensitive segment And the nominal particle of place sensitive segment is formed using the sensitive segment resistance value as nominal mass, the thin first sensitive grid, dredge second sensitivity Grid, middle first sensitive grid, middle second sensitive grid, the sensitive segment total length of close first sensitive grid and close second sensitive grid are in 1:1:4:4:3:3 Proportionate relationship.The program is a kind of scheme that can be selected, as long as to meet its both sides resistance value equal for the position of nominal particle Cross section position of form center can or other positions.
Among six sensitive grids, except being in interdigital arrangement between above-mentioned three pairs of sensitive grids, without between other sensitive grids Interdigital arrangement.The interdigital arrangement refers to:Two sensitive grids each sensitive segment axis institute in the plane, vertical with sensitive segment axis The sensitive segment of two sensitive grids distribution straggly on direction, the order occurred respectively to the sensitive segment of two sensitive grids in this direction and time Number is not limited.
Using the linear relationship between metal material increased resistance value and strain, this foil gauge is as common foil gauge It can be used for measuring strain.On the other hand, according in numerical differentiation theory, (such as Yi Fengkang is compiled, National Defense Industry Press 1978 December in year publishes《Numerical computation method》Page 21 (1.4.11)-(1.4.14) formulas make equidistant interpolation analysis) on single order local derviation Circular, the numerical computation method of f (x, y) y directions first-order partial derivative is as follows:
Wherein y1=y0+ h, y2=y1+ h, it is (x, y to pay special attention to above formula2) position first-order partial derivative value formula, the formula Smaller truncated error is o (h2) be step-length square higher order indefinite small.By being generally acknowledged that sensitive gate resistance in formula (2) engineering Variable quantity direct ratio and the strain at sensitive grid center, with reference to each sensitive gate resistance and the ratio of the resistance change under same strain Example relation, dredge the resistance of first sensitive grid and close first sensitive grid and subtract the resistance value of middle first sensitive grid, then divided by thin first sensitive grid The distance at center and close first sensitive grid center is the horizontal single order numerical value local derviation of strain, and according to numerical differentiation theory, this is that close first is quick Feel the horizontal single order numerical value local derviation at grid center, this is not in the middle part of foil gauge but the horizontal single order local derviation in portion on the lower side;Equally, dredge The resistance of second sensitive grid and close second sensitive grid and the resistance value for subtracting middle second sensitive grid, then divided by thin second sensitive grid center and close second The distance at sensitive grid center is the horizontal single order numerical value local derviation of strain, and according to numerical differentiation theory, this is at close second sensitive grid center Horizontal single order numerical value local derviation, nor foil gauge in the middle part of but the horizontal single order local derviation in portion on the lower side.The horizontal stroke of position at above-mentioned two It can be measured simultaneously to single order local derviation.Therefore the advantage of the foil gauge is that its downside can be used for measurement workpiece corner, edge etc. one As foil gauge due to size limitation can not measuring point two at close positions horizontal single order local derviation.
It should be noted that keeping thin first sensitive grid, thin second sensitive grid, middle first sensitive grid, middle second sensitive grid, close first quick in technique It is in 1 to feel the variable quantity of grid and close second sensitive grid changeover portion all-in resistance and changeover portion resistance under external strain:1:4:4:3:3 Numerical relation is to heighten measurement accuracy, also can conduct if the resistance of changeover portion and the lower resistance change of strain be can not ignore Systematic error is eliminated in detection.
Further, the metal strain plate also includes cover plate, and the cover plate is covered in the sensitive grid and substrate.
Further, the sensitive grid is wire form, foil, diaphragm type or thick-film type sensitive grid.
Further, the substrate is glued membrane substrate, glass fabric substrates, asbestos base bottom, metallic substrates or temporary substrate.
Six sensitive grid upper, middle and lower are arranged in substrate.It is of course also possible to it is other arrangements.
Beneficial effects of the present invention are mainly manifested in:Foil gauge can the close first sensitive grid center of effective detection, close second be quick simultaneously Feel the strain transverse direction single order local derviation at grid centers, the measurable workpiece corner in downside of particularly foil gauge, edge etc. are to foil gauge There is close positions transverse direction single order local derviation at the two of size restriction site.
Brief description of the drawings
Fig. 1 is six sensitive grid full-bridge of cross direction profiles, the three interdigital gold of measurable unilateral double offset sensitive grid central cross local derviation Belong to the schematic diagram of foil gauge.
Fig. 2 is six sensitive grid full-bridge of cross direction profiles, the three interdigital gold of measurable unilateral double offset sensitive grid central cross local derviation Belong to foil gauge top view.
Fig. 3 is measuring bridge schematic diagram.
Fig. 4 is two kinds of sensitive segment length configuration calculation specifications figures of sensitive grid.
Embodiment
The invention will be further described below in conjunction with the accompanying drawings.
1~Fig. 4 of reference picture, a kind of sensitive grid of cross direction profiles six of measurable unilateral double offset sensitive grid central cross local derviation Three interdigital metal strain plate of full-bridge, including substrate, the metal strain plate also include six sensitive grids, the both ends of each sensitive grid A pin is connected respectively, and six sensitive grids are fixed in the substrate;
Each sensitive grid includes sensitive segment and changeover portion, and the both ends of the sensitive segment are changeover portion, and the sensitive segment is in thin Strip, the changeover portion are in tubbiness shape, and the resistance of the sensitive segment is much larger than the resistance of the changeover portion, same strain state Under the increased resistance value of the sensitive segment be much larger than the increased resistance value of the changeover portion, the increased resistance value of the changeover portion connects It is bordering on 0;
All cross section centres of form of each sensitive segment form sensitive segment axis, and the sensitive segment axis is straight line section, institute In stating the diameter parallel of each sensitive segment in six sensitive grids and being generally aligned in the same plane, sensitive segment axis is determined in plane, edge The sensitive segment axis direction is axially, with axially vertical direction for laterally;Its both sides resistance value be present on each sensitive segment An equal cross section, take the cross-section centroid position and formed place sensitive segment by nominal mass of the sensitive segment resistance value Nominal particle, the centroid position that the nominal particle of each sensitive segment is collectively forming are the center of sensitive grid;
Zero deflection in the axial direction between each sensitive grid center, there is deviation in the horizontal;Each sensitive grid presses sensitive grid centre bit The order put, thin first sensitive grid is transversely followed successively by from top to bottom, dredges second sensitive grid, middle first sensitive grid, middle second sensitive grid, Mi Jia Sensitive grid and close second sensitive grid;It is Δ y to dredge distance between first sensitive grid center and middle first sensitive grid centerA, in middle first sensitive grid Distance is also Δ y between the heart and close first sensitive grid centerA;It is Δ to dredge distance between second sensitive grid center and middle second sensitive grid center yB, distance is also Δ y between middle second sensitive grid center and close second sensitive grid centerB, Δ yA=Δ yB;Dredge first sensitive grid center with The distance for dredging second sensitive grid center is Δ y1, the distance at middle first sensitive grid center and middle second sensitive grid center is Δ y1, close first sensitivity Distance is Δ y between grid center and close second sensitive grid center1
Each sensitive segment axis determines in plane that it is in interdigital arrangement between first sensitive grid and thin second sensitive grid that top, which is dredged, in It is in interdigital arrangement between first sensitive grid and middle second sensitive grid in portion, is in interdigital cloth between the close first sensitive grid in bottom and close second sensitive grid Put, without the interdigital arrangement between other sensitive grids;
Dredge first sensitive grid, dredge second sensitive grid, middle first sensitive grid, middle second sensitive grid, close first sensitive grid and close second sensitive grid Sensitive segment all-in resistance is in 1:1:4:4:3:3 proportionate relationship, dredge first sensitive grid, dredge second sensitive grid, middle first sensitive grid, middle second sensitivity The all-in resistance changing value of the sensitive segment of grid, close first sensitive grid and close second sensitive grid sensitive segment under identical strain is also in 1:1:4: 4:3:3 proportionate relationship.
Accordingly, connect and dredge first sensitive grid and close first sensitive grid, middle first sensitive grid, middle second sensitive grid, the thin second sensitive grid of series connection Four bridge arms of measuring bridge are just formed with close second sensitive grid.
Further, all shape of cross section sizes of each sensitive segment are consistent, take the axis point midway of each sensitive segment And the nominal particle of place sensitive segment is formed using the sensitive segment resistance value as nominal mass, the thin first sensitive grid, dredge second sensitivity Grid, middle first sensitive grid, middle second sensitive grid, the sensitive segment total length of close first sensitive grid and close second sensitive grid are in 1:1:4:4:3:3 Proportionate relationship.The program is a kind of scheme that can be selected, as long as to meet its both sides resistance value equal for the position of nominal particle Cross section position of form center can or other positions.
Among six sensitive grids, except being in interdigital arrangement between above-mentioned three pairs of sensitive grids, without between other sensitive grids Interdigital arrangement.The interdigital arrangement refers to:Two sensitive grids each sensitive segment axis institute in the plane, vertical with sensitive segment axis The sensitive segment of two sensitive grids distribution straggly on direction, the order occurred respectively to the sensitive segment of two sensitive grids in this direction and time Number is not limited.
The sensitive grid full-bridge three of cross direction profiles six of the measurable unilateral double offset sensitive grid central cross local derviation of the present embodiment Interdigital metal strain plate, including substrate 1, the metal strain plate also include six sensitive grids, the both ends difference of each sensitive grid A pin is connected, six sensitive grids are fixed in the substrate 1.
It is quick that thin first sensitive grid 2, thin second sensitive grid 3, middle first sensitive grid 4, middle second sensitive grid 5, close first can be fixed on substrate 1 Grid 6 and close second sensitive grid 7 are felt, for shape, the positions and dimensions for keeping each sensitive grid to fix;Substrate 1 is very thin, so as to by test specimen It is quick that the strain on surface is accurately transfer to thin first sensitive grid 2, thin second sensitive grid 3, middle first sensitive grid 4, middle second sensitive grid 5, close first Feel grid 6 and close second sensitive grid 7.Substrate 1 can be glued membrane substrate, glass fabric substrates, asbestos base bottom, metallic substrates and interim base Bottom.Generally with cohere, weld, substrate is fixed on the tested position of test block by the mode such as ceramic spraying.It can be also printed in substrate 1 Some are used for the lines of foil gauge positioning.
Cover plate is made of materials such as paper or glue, be covered in thin first sensitive grid 2, dredge second sensitive grid 3, middle first sensitive grid 4, in In second sensitive grid 5, close first sensitive grid 6, close second sensitive grid 7 and substrate 1, play the protective layer of protection against the tide, corrosion protection, loss prevention etc..
Pin 8 is used to connect sensitive grid and measuring circuit, dredge first sensitive grid 2, dredge second sensitive grid 3, middle first sensitive grid 4, in Second sensitive grid 5, close first sensitive grid 6 and close second sensitive grid 7 respectively have two pins 8, pair with foil and membrane type foil gauge, pin 8 with Its thin first sensitive grid 2 connected, thin second sensitive grid 3, middle first sensitive grid 4, middle second sensitive grid 5, close first sensitive grid 6 and close second are quick Sense grid 7 combine as a whole.Two pins for dredging first sensitive grid 2 are 8-1 and 8-2, and two pins for dredging second sensitive grid 3 are 8-3 and 8- 4, two pins of middle first sensitive grid 4 are 8-5 and 8-6, and two pins of middle second sensitive grid 5 are 8-7 and 8-8, close first sensitive grid 6 Two pins be 8-9 and 8-10, two pins of close second sensitive grid 7 are 8-11 and 8-12.
Dredge first sensitive grid 2, dredge second sensitive grid 3, middle first sensitive grid 4, middle second sensitive grid 5, close first sensitive grid 6 and close second sensitivity Grid 7 can be wire form, foil, diaphragm type, thick-film type according to its metal sensitive material and the difference of processing technology.No matter which kind of Dredge first sensitive grid 2, dredge the thickness of second sensitive grid 3, middle first sensitive grid 4, middle second sensitive grid 5, close first sensitive grid 6 and close second sensitive grid 7 Spend equal very little so that dredge first sensitive grid 2, dredge second sensitive grid 3, middle first sensitive grid 4, middle second sensitive grid 5, close first sensitive grid 6 and close The axial length of second sensitive grid 7 depends on the deformation of workpiece with it and changed.It is of the invention basic it is critical that to dredge first quick Feel the cooperation between grid 2, thin second sensitive grid 3, middle first sensitive grid 4, middle second sensitive grid 5, close first sensitive grid 6 and close second sensitive grid 7, There are following main points:
First, six sensitive grids are arranged in substrate, thin first sensitive grid 2 is referred to as, dredges second sensitive grid 3, middle first sensitivity Grid 4, middle second sensitive grid 5, close first sensitive grid 6 and close second sensitive grid 7.
Second, dredge first sensitive grid 2, dredge second sensitive grid 3, middle first sensitive grid 4, middle second sensitive grid 5, close first sensitive grid 6 and close Second sensitive grid 7 can be divided into multiple sensitive segments 9 and multiple changeover portions 10, and each sensitive segment 9 is connected to form sensitivity by each changeover portion 10 Grid.Comparatively, sensitive segment 9 is elongated in shape, resistance is larger and its resistance is more sensitive to straining;The changeover portion 10 is basic In tubbiness shape so that the resistance very little of the changeover portion and insensitive to straining, under working condition resistance variations close to 0, Therefore the summation of sensitive segment resistance is essentially the all-in resistance of single sensitive grid.Fig. 2 is marked in more detail from apparent angle Sensitive segment 9 and changeover portion 10.
3rd, the sensitive segment 9 of each sensitive grid is in elongated strip, and all cross section centres of form composition of each sensitive segment 9 is quick Feel section axis, the axis of sensitive segment 9 is straight line section, the diameter parallel of each sensitive segment 9 and is generally aligned in the same plane.Each Projection of shape of all cross sections of sensitive segment 9 along sensitive segment axis direction is consistent.Take the axis point midway of each sensitive segment And the nominal particle of place sensitive segment is formed using the sensitive segment resistance value as nominal mass, the nominal particle of each sensitive segment is common The centroid position of formation is the center of sensitive grid.
4th, dredge first sensitive grid 2, dredge second sensitive grid 3, middle first sensitive grid 4, middle second sensitive grid 5, close first sensitive grid 6 and close The sensitive segment total length of second sensitive grid 7 is in 1:1:4:4:3:3 proportionate relationship, on how to realize that this length ratio relation is seen below Text combines the method that Fig. 4 illustrates;Dredge first sensitive grid 2, dredge second sensitive grid 3, middle first sensitive grid 4, middle second sensitive grid 5, close first sensitivity The sensitive segment all-in resistance of grid 6 and close second sensitive grid 7 is in 1:1:4:4:3:3 proportionate relationship;Dredge first sensitive grid 2, dredge second sensitive grid 3rd, the sensitive segment of middle first sensitive grid 4, middle second sensitive grid 5, close first sensitive grid 6 and close second sensitive grid 7 is sensitive under identical strain The all-in resistance changing value of section is also in 1:1:4:4:3:3 proportionate relationship.Accordingly, connect dredge first sensitive grid 2 and close first sensitive grid 6, Middle first sensitive grid 4, series connection dredge second sensitive grid 3 and close second sensitive grid 7, middle second sensitive grid 5 just form four bridges of measuring bridge Arm.
5th, overlook and dredge first sensitive grid 2, dredge second sensitive grid 3, middle first sensitive grid 4, middle second sensitive grid 5, close first sensitive grid 6 With close second sensitive grid 7, they respectively have two kinds of length and axial starting point difference, terminal identical sensitive segment, and the two hop count is identical, Above-mentioned each sensitive grid center all can be configured in y-axis by both reasonable selections length, and specific method sees below saying with reference to Fig. 4 It is bright.Dredge first sensitive grid 2, dredge second sensitive grid 3, middle first sensitive grid 4, middle second sensitive grid 5, close first sensitive grid 6 and close second sensitive grid 7 On the y axis, there is lateral deviation at their center without axial deviation for center.According to the top view of foil gauge in Fig. 2, dredge The sensitive segment 9 of first sensitive grid 2 has axially symmetric axle xSA, the center of first sensitive grid 2 is dredged in y-axis and xSAThe intersection point of axle, it is sensitive to dredge second The sensitive segment 9 of grid 3 has axially symmetric axle xSB, the center of second sensitive grid 3 is dredged in y-axis and xSBThe intersection point of axle, middle first sensitive grid 4 Sensitive segment 9 has axially symmetric axle xMA, the center of middle first sensitive grid 4 is in y-axis and xMAThe intersection point of axle, the sensitive segment of middle second sensitive grid 5 9 have axially symmetric axle xMB, the center of middle second sensitive grid 5 is in y-axis and xMBThe intersection point of axle, the sensitive segment 9 of close first sensitive grid 6 have axle To symmetry axis xDA, the center of close first sensitive grid 6 is in y-axis and xDAThe intersection point of axle, the sensitive segment 9 of close second sensitive grid 7 have axially symmetric Axle xDB, the center of close second sensitive grid 7 is in x-axis and xDBThe intersection point of axle.
6th, it is Δ y to dredge distance between the center of first sensitive grid 2 and the center of middle first sensitive grid 4A, middle first sensitive grid 4 Distance is also Δ y between center and the center of close first sensitive grid 6A;Dredge the center of second sensitive grid 3 and the center of middle second sensitive grid 5 Between distance be Δ yB, distance is also Δ y between the center of middle second sensitive grid 5 and the center of close second sensitive grid 7B, Δ yA=Δ yB;The distance for dredging the center of first sensitive grid 2 and the center of thin second sensitive grid 3 is Δ y1, the center of middle first sensitive grid 4 and middle second are quick The distance for feeling the center of grid 5 is Δ y1, distance is Δ y between the center of close first sensitive grid 6 and the center of close second sensitive grid 71, such as Shown in Fig. 2.As shown in Figure 2, each sensitive segment axis is determined in plane, and top, which is dredged between first sensitive grid 2 and thin second sensitive grid 3, is in Interdigital arrangement, is in interdigital arrangement between first sensitive grid 4 and middle second sensitive grid 5 in middle part, and the close first sensitive grid 6 in bottom is sensitive with close second It is in interdigital arrangement between grid 7, without the interdigital arrangement between other sensitive grids.The interdigital arrangement refers to:Two sensitive grids it is each quick Section 9 axis institute is felt in the plane, in the sensitive segment distribution straggly with two sensitive grids in sensitive segment axis vertical direction, in the party The order and number that the sensitive segment of upward two sensitive grid occurs respectively are not limited.Due to dredge first sensitive grid 2, dredge second sensitive grid 3, Middle first sensitive grid 4, middle second sensitive grid 5, the relative position of close first sensitive grid 6 and close second sensitive grid 7 are protected by foil gauge production technology Card is relatively accurately secured, and this is also one of key that the present invention can detect the horizontal partial derivative of workpiece strain.
In summary, the thin first sensitive grid 2 of the present invention, thin second sensitive grid 3, middle first sensitive grid 4, middle second sensitive grid 5, close first are quick The all-in resistance changing value for feeling sensitive segment sensitive segment under identical strain of grid 6 and close second sensitive grid 7 is also in 1:1:4:4:3:3 Proportionate relationship, each central axial zero deflection of sensitive grid, laterally there is deviation, in center and the middle first sensitive grid 4 of dredging first sensitive grid 2 Distance is Δ y between the heartA, distance is also Δ y between the center of middle first sensitive grid 4 and the center of close first sensitive grid 6A;It is sensitive to dredge second Distance is Δ y between the center of grid 3 and the center of middle second sensitive grid 5B, in the center of middle second sensitive grid 5 and close second sensitive grid 7 Distance is also Δ y between the heartB, Δ yA=Δ yB;The distance for dredging the center of first sensitive grid 2 and the center of thin second sensitive grid 3 is Δ y1, the distance at the center of middle first sensitive grid 4 and the center of middle second sensitive grid 5 is Δ y1, the center of close first sensitive grid 6 and close second are quick Distance is Δ y between feeling the center of grid 71
It is R to make and the resistance of second sensitive grid 3 is dredged under free stateU0, the middle resistance of second sensitive grid 5 is RM0, the close resistance of second sensitive grid 7 For RL0, should there is RU0+RL0=RM0=R0.When the foil gauge of the present invention is placed in into certain surface strain, the resistance of second sensitive grid 3 is dredged For R0+ΔRU, the middle resistance of sensitive grid 4 is R0+ΔRM0, the close resistance of second sensitive grid 7 is R0+ΔRL;On the other hand, second sensitive grid 3 is dredged And the center of close second sensitive grid 7 is located at y-axis and x in Fig. 2 respectivelySBIntersection point and y-axis and xDBIntersection point, at a distance of 2 in transverse direction ΔyA.Formula using the relation and numerical differentiation of sensitive gate resistance and surface strain has:
WhereinAt the close center of second sensitive grid 7, εUTo dredge the strain at the center of second sensitive grid 3, εMFor middle second sensitive grid 5 Strain at center, εLFor the strain at the close center of second sensitive grid 7.This is that the present embodiment measurement surface strains horizontal local derviation Principle.Pay special attention to, the numerical differentiation that above formula is calculated is the strain transverse direction single order local derviation of the close center of second sensitive grid 7, should Position is the bottom rather than middle part of foil gauge, therefore has and be easy to measurement workpiece corner, edge etc. to have size to foil gauge The advantage of the horizontal single order local derviation of restriction site.Equally, dredging first sensitive grid 2, middle first sensitive grid 4 and close first sensitive grid 6 can coordinate The strain transverse direction first-order partial derivative of the close center of first sensitive grid 6 is calculated, the position is the bottom rather than middle part of foil gauge.It is above-mentioned The close center of second sensitive grid 7 strains horizontal single order local derviation and the strain transverse direction single order local derviation of the close center of first sensitive grid 6 Number can measure simultaneously.
Electric bridge is coordinated to can be used for measuring strain, strain horizontal single order local derviation the present embodiment, it is assumed that bridge input voltage is ui, output voltage uo, the schematic diagram of measuring bridge is shown in Fig. 3.When without workpiece effects of strain, each arm resistance of electric bridge is according to up time Pin direction is respectively labeled as R1、R2、R3、R4, in the also electric bridge where these sign flag resistance in the case of will not obscuring.Often The sensitive grid or resistance of foil gauge can be laid on individual electric bridge.It is identical with general foil gauge arrangement, if in multiple bridge arms Upper placement sensitive grid, the requirement of order, strain difinite quality to each installation position.During without workpiece effects of strain, the output of electric bridge Voltage equation is
Now, it is desirable to bridge balance i.e. uo=0, then it must is fulfilled for so-called bridge balance condition R1R3-R2R4=0, The electric bridge of use further meets
R1=R2=R3=R4, (5)
Since first, when meeting condition (5), according to relevant theoretical foil gauge sensitivity highest;Second, measuring strain or The method that person strains horizontal local derviation is required to condition (5) establishment.When foil gauge also strains with external world's strain, above-mentioned electric bridge Equilibrium condition is typically no longer set up, now
Due to Δ Ri< < RiFirst ≈ of (i=1,2,3,4) event is set up, and second ≈ works as Δ R1-ΔR2With Δ R3-ΔR4 Jack per line or contrary sign but | Δ R1-ΔR2| with | Δ R3-ΔR4| not in close proximity to when set up, the reasonable selection foil gauge in engineering Installation position can be realized completely.It is generally available the voltage measurement strain of formula (6) acquisition;Can convolution to straining horizontal local derviation (3) and formula (6), reasonable design arrange each bridge arm sensitive grid and resistance, such as bridge arm R1Second sensitive grid 5 in arrangement, bridge arm R2String Connection arranges close second sensitive grid 7 and thin second sensitive grid 3, remaining bridge arm configuration substitutional resistance, can obtain with the close center of second sensitive grid 7 Strain the linear magnitude of voltage u of horizontal single order local derviationo, the voltage is that small-signal need to be amplified.
With reference to Fig. 4, each sensitive grid in design drawing 2 is illustrated how.Each sensitive grid is furnished with two kinds of length and axial direction in Fig. 2 Starting point is different, terminal identical sensitive segment, and its main purpose is that the center of two interdigital each other sensitive grids can be configured In y-axis into Fig. 2, principle is shown in Fig. 4.There are two sensitive grids A and B part in Fig. 4, A there are two kinds of sensitive segments of A1 and A2, and B has Two kinds of sensitive segments of B1 and B2.Each size is shown in that Fig. 4, wherein d are the size that technique determines, it is believed that is definite value;L=2l-x is A1 and A2 Overall length, in design drawing 2 during each sensitive grid, according to resistance ratio and sensitive segment number, it may be determined that its value, therefore in Fig. 4 Think that L has determined that;In Fig. 4 it needs to be determined that amount be l and x.Because A only has two kinds of sensitive segments of A1 and A2, and the hop count of the two It is identical, as long as therefore one section of A1 and one section of A2 common center is configured in the y-axis in Fig. 4.With reference to resistance value and length Linear relationship obviously have equation below group:
Wherein first formula left sideRefer to the distance of A1 off-centring y-axis, the rightIt is then in A2 The heart offsets the distance of y-axis.According to symmetry, the l and x that can be solved from above-mentioned formula are equally applicable to B1 and B2.And then foil gauge In each sensitive grid l and x can first by the sensitive gate length, proportionate relationship, the sensitive segment hop count etc. that determine early stage first determine L in conjunction with Process length d and solved by formula (7).

Claims (5)

  1. A kind of 1. six sensitive grid full-bridge of cross direction profiles, three interdigital metal of measurable unilateral double offset sensitive grid central cross local derviation Foil gauge, including substrate, it is characterised in that:The metal strain plate also includes six sensitive grids, the both ends point of each sensitive grid Not Lian Jie a pin, fix six sensitive grids in the substrate;
    Each sensitive grid includes sensitive segment and changeover portion, and the both ends of the sensitive segment are changeover portion, and the sensitive segment is in elongate strip Shape, the changeover portion are in tubbiness shape, and the resistance of the sensitive segment is much larger than the resistance of the changeover portion, institute under same strain state The increased resistance value for stating sensitive segment is much larger than the increased resistance value of the changeover portion, the increased resistance value of the changeover portion close to 0;
    All cross section centres of form of each sensitive segment form sensitive segment axis, and the sensitive segment axis is straight line section, and described six The diameter parallel of each sensitive segment and it is generally aligned in the same plane in individual sensitive grid, sensitive segment axis determined in plane, along described Sensitive segment axis direction is axially, with axially vertical direction for laterally;It is equal to there is its both sides resistance value on each sensitive segment A cross section, take the cross-section centroid position and using the sensitive segment resistance value as nominal mass formed where sensitive segment name Particle, the centroid position that the nominal particle of each sensitive segment is collectively forming are the center of sensitive grid;
    Zero deflection in the axial direction between each sensitive grid center, there is deviation in the horizontal;Each sensitive grid is by sensitive grid center Sequentially, thin first sensitive grid is transversely followed successively by from top to bottom, dredges second sensitive grid, middle first sensitive grid, middle second sensitive grid, close first sensitivity Grid and close second sensitive grid;It is Δ y to dredge distance between first sensitive grid center and middle first sensitive grid centerA, middle first sensitive grid center with Distance is also Δ y between close first sensitive grid centerA;It is Δ y to dredge distance between second sensitive grid center and middle second sensitive grid centerB, in Distance is also Δ y between second sensitive grid center and close second sensitive grid centerB, Δ yA=Δ yB;Dredge first sensitive grid center and thin second is quick The distance for feeling grid center is Δ y1, the distance at middle first sensitive grid center and middle second sensitive grid center is Δ y1, close first sensitive grid center Distance is Δ y between close second sensitive grid center1
    Each sensitive segment axis determined in plane, and it is in interdigital arrangement between first sensitive grid and thin second sensitive grid that top, which is dredged, in middle part It is in interdigital arrangement between first sensitive grid and middle second sensitive grid, is in interdigital arrangement between the close first sensitive grid in bottom and close second sensitive grid;
    Dredge first sensitive grid, dredge the sensitivity of second sensitive grid, middle first sensitive grid, middle second sensitive grid, close first sensitive grid and close second sensitive grid Section all-in resistance is in 1:1:4:4:3:3 proportionate relationship, dredge first sensitive grid, dredge second sensitive grid, middle first sensitive grid, middle second sensitive grid, The all-in resistance changing value of the sensitive segment of close first sensitive grid and close second sensitive grid sensitive segment under identical strain is also in 1:1:4:4: 3:3 proportionate relationship.
  2. 2. the cross direction profiles six of the measurable unilateral double offset sensitive grid central cross local derviation as described in one of claim 1 are sensitive Three interdigital metal strain plate of grid full-bridge, it is characterised in that:All shape of cross section sizes of each sensitive segment are consistent, take each quick Feel the axis point midway of section and the nominal particle of place sensitive segment is formed using the sensitive segment resistance value as nominal mass, it is described to dredge First sensitive grid, the sensitive segment overall length for dredging second sensitive grid, middle first sensitive grid, middle second sensitive grid, close first sensitive grid and close second sensitive grid Degree is in 1:1:4:4:3:3 proportionate relationship.
  3. 3. the cross direction profiles six of measurable unilateral double offset sensitive grid central cross local derviation as claimed in claim 1 or 2 are sensitive Three interdigital metal strain plate of grid full-bridge, it is characterised in that:The metal strain plate also includes cover plate, and the cover plate is covered in described On sensitive grid and substrate.
  4. 4. the cross direction profiles six of measurable unilateral double offset sensitive grid central cross local derviation as claimed in claim 1 or 2 are sensitive Three interdigital metal strain plate of grid full-bridge, it is characterised in that:The sensitive grid is wire form, foil, diaphragm type or thick-film type sensitive grid.
  5. 5. the cross direction profiles six of measurable unilateral double offset sensitive grid central cross local derviation as claimed in claim 1 or 2 are sensitive Three interdigital metal strain plate of grid full-bridge, it is characterised in that:The substrate be glued membrane substrate, glass fabric substrates, asbestos base bottom or Metallic substrates.
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