CN105314358A - Electronic component transfer apparatus and electronic component inspection apparatus - Google Patents
Electronic component transfer apparatus and electronic component inspection apparatus Download PDFInfo
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- CN105314358A CN105314358A CN201510140247.8A CN201510140247A CN105314358A CN 105314358 A CN105314358 A CN 105314358A CN 201510140247 A CN201510140247 A CN 201510140247A CN 105314358 A CN105314358 A CN 105314358A
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- electronic component
- component conveying
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
- G01R31/2875—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature related to heating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
- G01R31/2877—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature related to cooling
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- Environmental & Geological Engineering (AREA)
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- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The present invention relates to an electronic component transfer apparatus and an electronic component inspection apparatus. The electronic component transfer apparatus includes: parts constituting the apparatus; a hearting portion heating the parts; a humidity detection portion detecting humidity; and a temperature detection portion detecting temperature. When the temperature detected by the temperature detection portion is less than two times of dew point temperature, the parts are heated. In addition, humidity of air contacting the parts is preferably less than humidity of air contacting the humidity detection portion. Furthermore, the temperature detection portion is preferably configured to the parts.
Description
Technical field
The present invention relates to electronic component conveying device and electronic component inspection device.
Background technology
In the past, being known to check the electronic component inspection device of the electrical characteristics of the electronic units such as such as IC device, being provided with the electronic component conveying device of the maintaining part for IC device being carried to inspection portion in this electronic component inspection device.When checking IC device, IC device is configured in maintaining part, makes to be arranged at multiple probe of maintaining part and each termination contact of IC device.
Situation IC device being cooled to set point of temperature and carrying out is had in the inspection of such IC device.In this case, the arrangement components being configured with IC device is cooled thus cools IC device, and in order to not produce condensation, freeze (accumulated ice), and the humidity (humidity in device) of the atmosphere of the surrounding of above-mentioned arrangement components is reduced.
But produce condensation in the inside of electronic component conveying device, in this case, operator confirms condensation, by the operation of operator, carries out the heating for removing this condensation.Thereby, it is possible to remove above-mentioned condensation.
In addition, a kind of ctf (electronic component conveying device) is recorded at patent documentation 1, consist of: possess chamber, this chamber has the test table carrying out for parts are cooled to low temperature testing in inside, when indoor generation temperature anomaly, stop cooling, and heating is carried out to indoor return normal temperature.In this patent documentation 1, returning normal temperature by carrying out heating to indoor, suppressing to condense in indoor generation.
Patent documentation 1: Japanese Unexamined Patent Publication 2000-9793 publication
But, when the inside of electronic component conveying device produces condensation, for carrying out for the situation of the heating for removing this condensation according to the operation of operator, if operator fails to find condensation, misjudgment, then have the state of condensation to carry out the carrying of IC device to produce.Thus, have and be attached with water at IC device, short circuit and can not checking, or the possibility of IC device failure.In addition, if to produce the state cooling of condensation, then freeze.
In addition, in the ctf that above-mentioned patent documentation 1 is recorded, when indoor generation temperature anomaly, because stop cooling without exception, and heating is carried out to indoor return normal temperature, even so when originally not needing to make indoor return normal temperature, even the situation that is, not producing condensation also returns normal temperature.Therefore, have to needs of again starting working this problem long-time.
In addition, in the ctf that patent documentation 1 is recorded, when indoor generation temperature anomaly, because make indoor return normal temperature, so when condensing in indoor generation due to other reasons, this condensation can not be removed.
Summary of the invention
The object of the present invention is to provide one automatically can avoid condensation or freeze, in addition when creating condensation or freezing, the electronic component conveying device that can be removed and electronic component inspection device.
The present invention is to solve producing at least partially of above-mentioned problem, can realize as with under type or application examples.
Application examples 1
The feature of electronic component conveying device of the present invention is to possess: parts, its constituent apparatus; Heating part, it heats above-mentioned parts; Humidity detection unit, it detects humidity; And temperature detecting part, its detected temperatures, when the temperature detected by said temperature test section is less than 2 times of dew temperature, heats above-mentioned parts.
Thereby, it is possible to automatically possible trouble is avoided producing condensation at the parts forming electronic component conveying device or freezing, and when creating condensation or freezing, can be removed.
Application examples 2
In electronic component conveying device of the present invention, preferably, when the temperature detected by said temperature test section is more than 0.5 times less than 2 times of dew temperature, above-mentioned parts are heated.
Thereby, it is possible to automatically possible trouble is avoided producing condensation at the parts forming electronic component conveying device or freezing, and when creating condensation or freezing, can be removed.
Application examples 3
In electronic component conveying device of the present invention, preferably, the humidity of the air contacted with above-mentioned humidity detection unit with the humidity ratio of the air of above-mentioned component contact is low.
Thus, the situation etc. of above-mentioned parts is not installed at temperature detecting part, when the setting lower than the temperature of the surrounding of temperature detecting part of the temperature of above-mentioned parts, although the condensation of generation or the probability frozen uprise, but by making the humidity step-down of the ambient air of above-mentioned parts, the probability step-down that generation condenses or freezes can be made.
Application examples 4
In electronic component conveying device of the present invention, preferably, said temperature test section is configured at above-mentioned parts.
Thereby, it is possible to directly measure the temperature of above-mentioned parts, in addition, by said temperature test section being configured at the part being afraid of condensation, can possible trouble avoid the part condensed in this fearness produce condensation or freeze, and in addition when creating condensation or freezing, can be removed.
Application examples 5
In electronic component conveying device of the present invention, preferably, above-mentioned component configuration is in the indoor being controlled as the humidity of regulation of above-mentioned electronic component conveying device.
Thereby, it is possible to possible trouble is avoided not wanting especially produce condensation or icing above-mentioned parts generation condensation or freeze, and in addition when generation condenses or freeze, can be removed.
Application examples 6
In electronic component conveying device of the present invention, preferably, above-mentioned heating part comprises heating wire.
Thereby, it is possible to easily and promptly will condense or freeze removing.
Application examples 7
In electronic component conveying device of the present invention, preferably, above-mentioned heating part comprises air-supply source.
Thereby, it is possible to more easily and promptly will condense or freeze removing.
Application examples 8
In electronic component conveying device of the present invention, preferably, below the first threshold that the humidity of the indoor of above-mentioned electronic component conveying device becomes regulation above-mentioned heating is stopped.
Thereby, it is possible to avoid producing condensation at above-mentioned parts or freezing, and, when creating condensation or freezing, can be removed.
Application examples 9
In electronic component conveying device of the present invention, preferably, above-mentioned heating is stopped when have passed through specific time.
Thereby, it is possible to possible trouble is avoided producing condensation at above-mentioned parts or freezing, and when creating condensation or freezing, can be removed.
Application examples 10
Electronic component conveying device of the present invention is characterised in that to possess: parts, its constituent apparatus; And heating part, it heats above-mentioned parts, heats above-mentioned parts when becoming the condition predetermined.
Thereby, it is possible to automatically possible trouble is avoided producing condensation at the parts forming electronic component conveying device or freezing, and can be removed when creating condensation or freezing.
Application examples 11
In electronic component conveying device of the present invention, preferably, above-mentioned parts have and can configure electronic unit and the cooling-part that can cool.
Thereby, it is possible to possible trouble is avoided producing condensation at above-mentioned parts or freezing, and when creating condensation or freezing, can be removed.
Application examples 12
In electronic component conveying device of the present invention, preferably, above-mentioned condition refers to: cut off the electricity supply under the state that above-mentioned cooling-part has been cooled, connect the situation of above-mentioned power supply afterwards.
Thereby, it is possible to possible trouble is avoided producing condensation at above-mentioned parts or freezing, and when creating condensation or freezing, can be removed.
Application examples 13
In electronic component conveying device of the present invention, preferably, above-mentioned condition refers to: cut off the electricity supply under the state that above-mentioned cooling-part has been cooled, and starts the situation connecting above-mentioned power supply within the time preset when above-mentioned power supply is cut off.
Thereby, it is possible to possible trouble is avoided producing condensation at above-mentioned parts or freezing, and when creating condensation or freezing, can be removed.
Application examples 14
In electronic component conveying device of the present invention, preferably, in the cooling of above-mentioned cooling-part, use liquid nitrogen, above-mentioned condition refers to the situation that above-mentioned liquid nitrogen is revealed.
Thereby, it is possible to possible trouble is avoided the part beyond setting cooled and produced condensation in this part or freeze, in addition in generation condensation or when freezing, can be removed.
Application examples 15
In electronic component conveying device of the present invention, preferably, above-mentioned condition refers to that the humidity of at least one indoor of above-mentioned electronic component conveying device is the situation of more than the Second Threshold of regulation.
Thereby, it is possible to possible trouble is avoided producing condensation at above-mentioned parts or freezing, and when creating condensation or freezing, can be removed.
Application examples 16
In electronic component conveying device of the present invention, preferably, to the gas of at least one indoor supply drying of above-mentioned electronic component conveying device, above-mentioned condition refers to: the supply stopping of above-mentioned gas or the flow of above-mentioned gas are reduced to the situation of below specified value.
Thereby, it is possible to possible trouble is avoided producing condensation at above-mentioned parts or freezing, and when producing condensation or freezing, can be removed.
Application examples 17
In electronic component conveying device of the present invention, preferably, there are the multiple master modes controlled the action of above-mentioned electronic component conveying device, above-mentioned electronic component conveying device has display part, by the image corresponding with the master mode of current setting in the above-mentioned multiple master mode of this display part display.
Thus, owing to such as showing at display part and condensation, the relevant information, processing method etc. of freezing, so operator can hold above-mentioned information, thus can easily and promptly correspondence.
Application examples 18
Electronic component inspection device of the present invention is characterised in that to possess: parts, its constituent apparatus; Heating part, it forms above-mentioned parts; Humidity detection unit, it detects humidity; Temperature detecting part, its detected temperatures; And inspection portion, it checks electronic unit, heats above-mentioned parts when the temperature detected by said temperature test section is less than 2 times of dew temperature.
Thereby, it is possible to automatically possible trouble is avoided producing condensation at the parts forming electronic component inspection device or freezing, and when creating condensation or freezing, can be removed.
Accompanying drawing explanation
Fig. 1 is the approximate vertical view of the first embodiment representing electronic component inspection device of the present invention.
Fig. 2 is the block diagram of the electronic component inspection device shown in Fig. 1.
Fig. 3 is the figure of the display frame of the display part representing the electronic component inspection device shown in Fig. 1.
Fig. 4 is the figure of the display frame of the display part representing the electronic component inspection device shown in Fig. 1.
Fig. 5 is the figure of the display frame of the display part representing the electronic component inspection device shown in Fig. 1.
Fig. 6 is the diagram of circuit of the control action representing the electronic component inspection device shown in Fig. 1.
Fig. 7 is the diagram of circuit of the control action representing the electronic component inspection device shown in Fig. 1.
Fig. 8 is the diagram of circuit of the control action representing the electronic component inspection device shown in Fig. 1.
Fig. 9 is the block diagram of the second embodiment representing electronic component inspection device of the present invention.
Figure 10 is the approximate vertical view of the 3rd embodiment representing electronic component inspection device of the present invention.
Detailed description of the invention
Below, based on embodiment shown in the drawings, electronic component conveying device of the present invention and electronic component inspection device are described in detail.
First embodiment
Fig. 1 is the approximate vertical view of the first embodiment representing electronic component inspection device of the present invention.Fig. 2 is the block diagram of the electronic component inspection device shown in Fig. 1.Fig. 3 ~ Fig. 5 is the figure of the display frame of the display part representing the electronic component inspection device shown in Fig. 1 respectively.Fig. 6 ~ Fig. 8 is the diagram of circuit of the control action representing the electronic component inspection device shown in Fig. 1 respectively.
In addition, below for convenience of explanation, as shown in Figure 1, mutually orthogonal 3 axles are set to X-axis, Y-axis and Z axis.In addition, comprise the XY planar horizontal of X-axis and Y-axis, Z axis is vertical.In addition, also the direction parallel with X-axis is called " X-direction ", also the direction parallel with Y-axis is called " Y-direction ", also the direction parallel with Z axis is called " Z-direction ".In addition, the direction of the arrow of each axle of X-axis, Y-axis and Z axis is called positive side, the opposite sense of arrow is called minus side.In addition, also the upstream side in the carrying direction of electronic unit is only called " upstream side ", downstream is only called in " downstream ".In addition, said in present specification " level " is not limited to complete level, only also comprises otherwise hinders the carrying of electronic unit, relative to the state of horizontal tilt some (such as less than the degree of 5 °).
Testing fixture (electronic component inspection device) 1 shown in Fig. 1 is such as checking/test (being only called below " inspection ") BGA (Ballgridarray; Ball grid array) encapsulation, LGA (Landgridarray; Grid array) encapsulation waits IC device, LCD (LiquidCrystalDisplay; Liquid Crystal Display), CIS (CMOSImageSensor; Cmos image sensor) etc. the device of electrical characteristics of electronic unit.In addition, below for convenience of explanation, be described for representative to use the situation of IC device as the above-mentioned electronic unit carrying out checking, be set to " IC device 90 ".
As shown in Figure 1, testing fixture 1 is divided into: pallet supply area A1; Device supply area (being only called below " supply area ") A2; Inspection area A3; Device recovery zone (being only called below " recovery zone ") A4; Pallet removing region A5.Above-mentioned each region is mutually by separations such as not shown wall portion, gates.And supply area A2 becomes the first Room R1 divided by wall portion, gate etc., in addition, inspection area A3 becomes the second Room R2 divided by wall portion, gate etc., and recovery zone A4 becomes the 3rd Room R3 divided by wall portion, gate etc. in addition.In addition, the first Room R1 (supply area A2), the second Room R2 (inspection area A3) and the 3rd Room R3 (recovery zone A4) are configured to guarantee air-tightness, thermal insulation respectively.Thus, the first Room R1, the second Room R2 and the 3rd Room R3 can maintain humidity, temperature respectively as much as possible.In addition, the humidity of regulation and the temperature of regulation is controlled as respectively in the first Room R1 and the second Room R2.
IC device 90 removes region A5 successively through above-mentioned each region from pallet supply area A1 to pallet, and the inspection area A3 in midway is examined.Such testing fixture 1 possesses: carry IC device 90 in each region and have the electronic component conveying device of control part 80; The inspection portion 16 checked is carried out in the A3 of inspection area; And not shown inspection control part.In addition, in testing fixture 1, by the Structure composing electronic component conveying device except inspection portion 16 and inspection control part.
Pallet supply area A1 is that supply is arranged with multiple region not checking the pallet 200 of the IC device 90 of state.Can stacked multiple pallet 200 at pallet supply area A1.
Supply area A2 is the region multiple IC devices 90 on the pallet 200 from pallet supply area A1 being supplied to respectively inspection area A3.In addition, to be provided with the first tray conveying mechanism 11A, the second tray conveying mechanism 11B of transportation tray 200 one by one across the mode of pallet supply area A1 and supply area A2.
Temperature adjustment part (soaking into plate) 12, first device be provided with as the configuration section of configuration IC device 90 at supply area A2 carries head (handling article) 13 and the 3rd tray conveying mechanism 15.
Temperature adjustment part 12 is heated multiple IC device 90 or cool, thus this IC device 90 is adjusted (control) to the device being suitable for the temperature checked.That is, temperature adjustment part 12 to configure IC device 90, and the cooling-part that can cool (parts).In the construction shown in fig. 1, temperature adjustment part 12 configures along Y-direction and is fixed with two.And, to be handled upside down from the IC device 90 that pallet supply area A1 moves into the pallet 200 of (carrying) by the first tray conveying mechanism 11A and to be placed in any one temperature adjustment part 12.
First device carrying 13 is supported in the A2 of supply area and can moves.Thus, the first device carrying 13 can bear the carrying of the IC device 90 between pallet 200 and temperature adjustment part 12 moved into from pallet supply area A1, and the carrying of IC device 90 between temperature adjustment part 12 and device supply unit 14 described later.In addition, the first device carrying 13 has the multiple handle parts (not shown) holding IC device 90, and each handle part possesses adsorption nozzle, is held by absorption IC device 90.
3rd tray conveying mechanism 15 is mechanisms that the empty pallet 200 of the state be removed by whole IC device 90 is carried in X direction.And after this carrying, empty pallet 200 returns pallet supply area A1 by the second tray conveying mechanism 11B from supply area A2.
Inspection area A3 is the region checked IC device 90.This inspection area A3 is provided with the device supply unit (supply shuttle) 14 of the electronic unit trucking department as carrying IC device 90, inspection portion 16, second device carrying head (abutting part) 17 and device recoverer (recovery dolly) 18.
Device supply unit 14 is the devices that will be carried to by the IC device 90 of adjustment temperature (control temperature) near inspection portion 16.This device supply unit 14 is supported between supply area A2 and inspection area A3 and can moves in X direction.In addition, in the construction shown in fig. 1, device supply unit 14 is configured with two along Y-direction, and the IC device 90 on temperature adjustment part 12 is handled upside down and is placed in arbitrary device supply unit 14.In addition, in device supply unit 14, can heat IC device 90 or cool equally with temperature adjustment part 12, this IC device 90 is adjusted to the temperature being suitable for checking.That is, device supply unit 14 to configure IC device 90, and the cooling-part that can cool (parts).
Inspection portion 16 is the unit checking the electrical characteristics of IC device 90/test, and is namely the maintaining part keeping this IC device 90 when checking IC device 90.The multiple probes be electrically connected with the terminal of this IC device 90 under the state keeping IC device 90 are provided with in inspection portion 16.And the terminal of IC device 90 is electrically connected with probe (contact), carries out the inspection of IC device 90 via probe.The inspection of IC device 90 is carried out based on program, and this program is stored in the storage part of the inspection control part that the not shown tester that is connected with inspection portion 16 possesses.In addition, in inspection portion 16, identical with temperature adjustment part 12, can heat IC device 90 or cool, this IC device 90 is adjusted to the temperature being suitable for checking.That is, inspection portion 16 can configure IC device 90 and the cooling-part (parts) that can cool.
Second device carrying 17 in the A3 of inspection area can the mode of movement be supported.Thus, the IC device 90 on the device supply unit 14 moved into from supply area A2 can be carried and be placed on inspection portion 16 by the second device carrying 17.In addition, when checking IC device 90, IC device 90 presses to inspection portion 16 by the second device carrying 17, thus, IC device 90 is abutted with inspection portion 16.Therefore, as described above, the terminal of IC device 90 is electrically connected with the probe of inspection portion 16.In addition, the second device carrying 17 has the multiple handle parts (not shown) holding IC device 90, and each handle part possesses adsorption nozzle, is held by absorption IC device 90.In addition, in the second device carrying 17, identical with temperature adjustment part 12, can heat IC device 90 or cool, IC device 90 is adjusted to the temperature being suitable for inspection.That is, the second device carrying 17 can configure IC device 90 and the cooling-part (parts) that can cool.
Device recoverer 18 is devices that IC device 90 after the inspection of inspection portion 16 being terminated is carried to recovery zone A4.This device recoverer 18 is supported to and can moves in X direction between inspection area A3 and recovery zone A4.In addition, in the construction shown in fig. 1, device recoverer 18 is identical with device supply unit 14, is configured with two along Y-direction, and the IC device 90 on inspection portion 16 is handled upside down and is placed in arbitrary device recoverer 18.This is transported through the second device carrying 17 and carries out.
Recovery zone A4 is the region checking that the IC device 90 after terminating is recovered.This recovery zone A4 is provided with recovery pallet 19, the 3rd device carrying head (handling article) 20 and the 6th tray conveying mechanism 21.In addition, empty pallet 200 has also been prepared at recovery zone A4.
Recovery pallet 19 is fixed in the A4 of recovery zone, is configured with 3 in X direction in the construction shown in fig. 1.In addition, empty pallet 200 is also configured with 3 in X direction.And the IC device 90 moved on the device recoverer 18 of recovery zone A4 is handled upside down and is placed in any one in these recovery pallets 19 and empty pallet 200.Thus, IC device 90 is recovered according to check result, classifies.
3rd device carrying 20 is supported to can move in the A4 of recovery zone.Thus, IC device 90 can be carried to recovery pallet 19, empty pallet 200 from device recoverer 18 by the 3rd device carrying 20.In addition, the 3rd device carrying 20 has the multiple handle parts (not shown) keeping IC device 90, and each handle part possesses adsorption nozzle, is held by absorption IC device 90.
6th tray conveying mechanism 21 is the mechanisms of being carried in X direction by the empty pallet 200 moved into from pallet removing region A5.And after this carrying, empty pallet 200 is distributed in the position of reclaiming and having IC device 90, that is, become any one in above-mentioned 3 empty pallets 200.
Pallet removing region A5 is the region that the pallet 200 being arranged with the multiple IC devices 90 checking complete state is recovered, removes.In pallet removing region A5, can stacked multiple pallet 200.
In addition, to be provided with the 4th tray conveying mechanism 22A, the 5th tray conveying mechanism 22B of transportation tray 200 one by one across the mode of recovery zone A4 and pallet removing region A5.
By being placed with, 4th tray conveying mechanism 22A checks that the pallet 200 of complete IC device 90 is carried to the mechanism of pallet removing region A5 from recovery zone A4.The empty pallet 200 being used for reclaiming IC device 90 is removed from pallet the mechanism that region A5 is carried to recovery zone A4 by the 5th tray conveying mechanism 22B.
The inspection control part of above-mentioned tester, such as based on the program being stored in not shown storage part, carries out the inspection etc. of electrical characteristics to the IC device 90 being configured at inspection portion 16.
In addition, control part 80 such as controls the driving of following part, comprising: the first tray conveying mechanism 11A; Second tray conveying mechanism 11B; Temperature adjustment part 12; First device carrying 13; Device supply unit 14; 3rd tray conveying mechanism 15; Inspection portion 16; Second device carrying 17; Device recoverer 18; 3rd device carrying 20; 6th tray conveying mechanism 21; 4th tray conveying mechanism 22A and the 5th tray conveying mechanism 22B.
In addition, as shown in Figure 2, testing fixture 1 has: the temperature sensor (temperature detecting part) 41 of detected temperatures; Detect the humidity sensor (humidity detection unit) 42 of humidity; Detect the flow sensor 43 of the flow of dry gas described later; Carry out the heating arrangements (heating part) 51 heated; Carry out the cooling body (cooling end) 52 cooled; The dry gas feed mechanism (dry gas supply unit) 53 of supply dry gas; Carry out the operating portion 6 of the operations of testing fixture 1; And annunciator 71.In addition, in fig. 2, such as, multiple parts are provided with for temperature sensor 41, humidity sensor 42, flow sensor 43 and heating arrangements 51 etc., representatively also only one of them are illustrated.In addition, control part 80 has the storage part 801 storing various information, the time meter 802 carrying out time measurement and carries out the judging part 803 of various judgement (distinguishing), and controls the driving of each several parts such as heating arrangements 51, cooling body 52, dry gas feed mechanism 53, display part 62 and annunciator 71.
Temperature sensor 41 and humidity sensor 42 are configured in each several part of the regulation of the inside of testing fixture 1 respectively, in the present embodiment, be configured in the first Room R1 and the second Room R2, by temperature sensor 41 and humidity sensor 42, the temperature in the first Room R1 and the second Room R2 and humidity can be detected respectively.In this case, temperature sensor 41 can be configured at any position in the first Room R1 and the second Room R2, but preferred disposition in temperature adjustment part 12, device supply unit 14, inspection portion 16 and the second device carrying 17.Thereby, it is possible to directly measure the temperature of temperature adjustment part 12, device supply unit 14, inspection portion 16 and the second device carrying 17.
In addition, in the present embodiment, each humidity is relative humidity respectively.
Flow sensor 43 is configured at each several part of the regulation of the inside of testing fixture 1, in the present embodiment, be configured in the stream of the respective dry gas of temperature adjustment part 12, device supply unit 14, inspection portion 16 and device recoverer 18, the flow of the dry gas in above-mentioned stream can be detected by flow sensor 43 respectively.
In addition, operating portion 6 has the display part 62 of the input part 61 and display image carrying out various input.Be not particularly limited as input part 61, such as, can exemplify keyboard, mouse etc.In addition, be not particularly limited as display part 62, such as, can exemplify display panels, organic EL display panel etc.For the operation of the operating portion 6 of operator, such as have by operation inputting part 61, cursor is made to move to the position of each action button (icon) shown at display part 62, by selecting (click) situation of carrying out, below by this operation also referred to as " pressing operation button ".
In addition, part or all in each action button of display part 62 display also can be set to the mechanical action buttons such as pressing button.
In addition, be not limited to above-mentioned structure as operating portion 6, such as, can exemplify the device etc. that can carry out the input of touch panel etc. and the display of image.
In addition, be not particularly limited as heating arrangements 51, such as, the temperature booster etc. with heating wire can be exemplified.In addition, and heating arrangements 51 also can be configured to have the air-supply sources such as fan, blows warm braw (hot blast) by air-supply source.In the present embodiment, heating arrangements 51 is configured at temperature adjustment part 12, device supply unit 14, inspection portion 16 and the second device carrying 17, can heat them.In addition, if temperature adjustment part 12, device supply unit 14, inspection portion 16 and the second device carrying 17 are heated, then respectively corresponding with this heating, the temperature being configured with the room of temperature adjustment part 12, device supply unit 14, inspection portion 16 and the carrying of the second device 17 also rises.
In addition, be not particularly limited as cooling body 52, such as, can exemplify and make refrigerant (such as, the gas of low temperature) carry out the device, Peltier element etc. that cool being configured at flowing in the body near cooling object.In the present embodiment, cooling body 52 makes refrigerant being configured in the body near above-mentioned cooling object the device carrying out cooling that flows, and makes the nitrogen of liquid nitrogen gasification as refrigerant.In addition, in the present embodiment, cooling body 52 can cool temperature adjustment part 12, device supply unit 14, inspection portion 16 and the second device carrying 17 respectively.In addition, if temperature adjustment part 12, device supply unit 14, inspection portion 16 and the second device carrying 17 are cooled, then respectively corresponding with this cooling, be configured with the temperature that temperature adjustment part 12, device supply unit 14, inspection portion 16 and the second device carry the room of 17 and also reduce.
In addition, dry gas feed mechanism 53 is configured to supply the low gas such as air, nitrogen of (flowing) humidity (following, also referred to as dry gas) to each several part of the regulation of the inside of testing fixture 1.When IC device 90 being cooled to set point of temperature and checking, cool according to its each several part to necessity, by each portion's supply dry gas to necessity, condensation can be prevented, freeze (accumulated ice).In the present embodiment, dry gas feed mechanism 53 can to temperature adjustment part 12, device supply unit 14, inspection portion 16 and device recoverer 18 supply dry gas, that is, can supply dry gas to the first Room R1, the second Room R2 and the 3rd Room R3.
In addition, a humidity of 17 air contacted is carried with temperature adjustment part 12, device supply unit 14, inspection portion 16 and the second device, preferably low than the humidity of the air contacted with humidity sensor 42.Thus, temperature adjustment part 12 is not installed at temperature sensor 41, device supply unit 14, in the situations such as inspection portion 16 and the second device carrying 17, and in design temperature adjustment part 12, device supply unit 14, when the temperature of inspection portion 16 and the second device carrying 17 is lower than the temperature of the surrounding of temperature sensor 41, although the condensation of generation or the probability frozen uprise, but by making temperature adjustment part 12, device supply unit 14, the humidity of the ambient air of inspection portion 16 and the second device carrying 17 reduces, the probability producing condensation or freeze can be reduced.
In addition, for the dry gas that dry gas feed mechanism 53 uses, in the present embodiment, when being cooled by cooling body 52, being the miscellaneous gas of low air of nitrogen after cooling body 52 uses and humidity, is only the air that above-mentioned humidity is low when above-mentioned cooling stops.
In testing fixture 1, at least one condensation forming each parts (structure member) of testing fixture 1 or at least one condition of freezing are pre-stored within the storage part 801 of control part 80.And, judged whether any one condition met in above-mentioned condition by judging part 803, and when meeting in above-mentioned condition the condition of any one, heated by heating arrangements 51 pairs of said structure parts.
In addition, also above-mentioned condition is called " condensation condition " below.In addition, in the present embodiment, said structure parts are illustrated as temperature adjustment part 12, device supply unit 14, inspection portion 16 and the second device carrying 17, also they are referred to as " cooling-part " below.
In the present embodiment, the condensation condition of following (1) ~ (3) is stored at storage part 801.
The humidity of the indoor of at least one party in (1) first Room R1 and the second Room R2 is in the situation of threshold value (Second Threshold) more than the α of the regulation preset.
When meeting this condensation condition, namely, when the humidity of the first Room R1 is more than threshold alpha, the cooling-part be configured in the first Room R1 is heated, in addition, when the humidity of the second Room R2 is more than threshold alpha, the cooling-part be configured in the second Room R2 is heated.In addition, do not represent such difference below, be only called " heating ".
(2) cut off the electricity supply under the state that cooling-part is cooled, situation about switching on power afterwards.
Preferably this condensation condition is also attached with condition, that is: " cut off the electricity supply under the state that cooling-part is cooled, start situation about switching on power within the specific time t1 preset when above-mentioned power supply is cut off ".Its reason is, even if cut off the electricity supply under the state that cooling-part is cooled, when switching on power afterwards, if through words for a long time after supply disconnecton, in this period, the temperature of cooling-part rises, and does not produce condensation, icing possibility is high.
In addition, when meeting this condensation condition, each cooling-part is heated.In addition, be below only called " heating ".
(3) supply of dry gas or the flow of dry gas is stopped to be reduced to the situation of below specified value.
Preferably this condensation condition is also attached with condition, that is: " the supply stopping of dry gas or the flow of dry gas are reduced to below the specified value that presets, and are the situations in cooling process ".Its reason is if not in cooling process, does not produce condensation, the possibility of freezing is high.
In addition, when meeting this condensation condition, to stopping the supply of dry gas or the flow of dry gas by fixed cooling-part to specified value, be namely configured with the indoor supply dry gas of above-mentioned cooling parts.In addition, do not represent such difference below, be only called " supply dry gas ".
Next, the control action of testing fixture 1 is described.
Testing fixture 1 has the multiple master modes controlling its action.In the present embodiment, there is as above-mentioned master mode the first master mode (power failure recovery mode), the second master mode (crossing Humidity Detection pattern) and the 3rd master mode (dry gas abnormal patterns).
First master mode is the state that is cut off from the power supply master mode to the process (initial treatment) of the situation of power connection.In addition, the second master mode is the master mode of the process monitoring humidity and carry out after initial treatment.In addition, the 3rd master mode monitors the supply of dry gas and the master mode of the process carried out after being initial treatment.
Below, based on Fig. 6, the process of the state be cut off from power supply to the situation of power connection is described, based on Fig. 7 to monitoring after initial treatment that the process that humidity is carried out is described, based on Fig. 8 to monitoring that after initial treatment the process that the supply of dry gas is carried out is described.
First the control action of the state disconnected from power supply to the testing fixture 1 in initial treatment when power connection is described.
In addition, carried out the metering of time in the past when primary power source is disconnected by time meter 802, the time (elapsed time) of being measured by this time meter 802 is set to " ta ".
As shown in Figure 6, first, switch on power (step S101), humidity (relative humidity) RH (step S102) in the first Room R1 and the second Room R2 is detected afterwards by humidity sensor 42, in the first Room R1 and the second Room R2, judge whether humidity RH is more than threshold alpha (step S103) respectively.
When judging that humidity RH is more than threshold alpha, producing condensation, freezing, or having condensation, icing possibility, carrying out reporting (B) (step S111).
In addition, threshold alpha is not particularly limited, and is the value suitably set according to terms and conditions, is preferably set in the scope of less than more than 90% 100%, is more preferably set as in the scope of less than more than 95% 100%.Such as be set as 100% in the present embodiment.
In step S111, show the image shown in Fig. 3 at the picture 620 of display part 62, and annunciator 71 is worked, produce warning tones.Thus, operator can understand and creates exception, namely creates the exception with condensation, relevant possibility of freezing, in addition, can be understood the details, processing method etc. of this exception by the image shown at display part 62.In addition, the image shown in Fig. 3 is an example, is described below to this example.
As shown in Figure 3, above-mentioned image has the first image (main window) 621 shown on the whole at picture 620, and be called as dialog box etc. there is the second image (subpanel) 622 shown on the first image 621 littlely than the first image 621.
In the first image 621, upper left display " in stopping " in Fig. 3 of picture 620.
In addition, in the second image 622, show in frame 623 and " create humidity at index abnormal." etc. the current state (abnormal content) of testing fixture 1, " after selecting RETRY, CLEANOUT, ask START." etc. the various message such as processing method.In addition, above-mentioned index is " the second Room R2 (inspection area A3) ".
In addition, as the method for reporting in step S111 and report described later, be not limited to said method, other such as can exemplify the lighting of the illuminating parts such as lamp, flicker etc.
Next, drive dry gas feed mechanism 53, the supply (step S112) of the pathogenic dryness that hops to it, drive heating arrangements 51, begin to cool down the heating (step S113) of parts.Thus, when produce condensation, freeze, this condensation, freeze be removed.In addition, because humidity reduces, so can avoid producing condensation, freezing.
Next, the humidity RH (step S114) in the first Room R1 and the second Room R2 is detected by humidity sensor 42, in the first Room R1 and the second Room R2, judge whether humidity RH is threshold value (first threshold) below the β (step S115) specified respectively.
When judging that humidity RH is not below threshold value beta, getting back to step S114, again performing the later step of step S114, in addition, when judging that humidity RH is below threshold value beta, moving to step S116.
In addition, as long as do not produce condensation, freeze value words then threshold value beta be not particularly limited, it is the value suitably set according to various condition, but be preferably set to more than 50% less than in the scope of 100%, be more preferably more than 80% less than in the scope of 100%, be most preferably set as in the scope of less than more than 80% 90%.In addition, threshold value beta is preferably set to the value less than above-mentioned threshold alpha.
In addition, in step s 103, when judging that humidity RH is not more than threshold alpha, judge (step S104) that whether the cut-out of previous power supply is carried out in cooling process.
When be judged as the cut-out of previous power supply be carry out in cooling process, judge whether the time ta measured by time meter 802 is below specified time t1 (step S105), when the time ta of judgement is time below t1, produce condensation, freeze, or there are condensation, icing possibility, carry out reporting (A) (step S106).
As the reason that front primary power source is disconnected, such as, although particularly as being the reason that in cooling process, front primary power source is disconnected, power failure can be exemplified, situation etc. that operator presses emergency stop push button.
In addition, the time, t1 was not particularly limited, and was the value suitably set according to terms and conditions, was preferably set in the scope of less than 5 hours, in the scope being more preferably set as less than 4 hours, in the scope being most preferably set as less than 3 hours.
In step s 106, show the image shown in Fig. 4 at the picture 620 of display part 62, and annunciator 71 is worked, produce warning tones.Thus, operator recognizes and creates exception, namely creates the exception to condensation, relevant possibility of freezing, in addition, can recognize the details, processing method etc. of this exception according to the image shown at display part 62.In addition, the image shown in Fig. 4 is an example, is described below to this example.
As shown in Figure 4, in above-mentioned image, show " in stopping " in the frame 624 of upper left in the diagram.In addition, in frame 624, show " power supply disconnection in chilling process.In dry cleaning." etc. various message.
Next, drive dry gas feed mechanism 53, the supply (step S107) of the pathogenic dryness that hops to it, drive heating arrangements 51, begin to cool down the heating (step S108) of parts, begin through the metering (step S109) that time meter 802 carries out time (elapsed time) tb.Thus, when produce condensation, freeze, this condensation, freeze be removed.In addition, because humidity reduces, so can avoid producing condensation, freezing.
Next, judge whether the time tb measured by time meter 802 is more than specific time t2 (step S110), when the time tb of judgement is more than specific time t2, moves to step S116.
In addition, the time, t2 was not particularly limited, and was the value suitably set according to terms and conditions, was preferably set in the scope of more than 5 minutes, less than 1 hour, in the scope being more preferably set as more than 10 minutes, less than 40 minutes.
Next, stop the driving of heating arrangements 51, stop the heating (step S116) of cooling-part, stop the driving of dry gas feed mechanism 53, stop the supply (step S117) of dry gas, be in readiness for action (step S118).
In addition, in step S105, when the time ta of judgement is not time below t1, through time enough in the past when inferring that primary power source is disconnected, do not produce condensation, freeze, and do not process especially, be in readiness for action (step S118).
In addition, in step S104, when judge the disconnection of previous power supply be not carry out in cooling process, infer not condensation, freeze, do not process especially, be in readiness for action (step S118).Omit the explanation of later action.
Next, to monitoring humidity and the control action of the testing fixture 1 carried out is described after initial treatment.In addition, present treatment carries out with readiness for action respectively in action.
First, humidity (relative humidity) RH in the first Room R1 and the second Room R2 is detected by humidity sensor 42, as shown in Figure 7, in the first Room R1 and the second Room R2, judge whether humidity RH is more than threshold alpha (step S201) respectively.The detection of above-mentioned humidity and judgement are regular.In addition, this threshold alpha is identical with the threshold alpha of above-mentioned steps S103.
When judging that humidity RH is not threshold alpha, deduction does not produce condensation, freezes, and does not process especially, moves to step below.Omit the explanation of following action.
In addition, in step s 201, when judging that humidity RH is more than threshold alpha, producing condensation, freezing, or having the possibility producing condensation, freeze, carrying out reporting (step S202).
In step S202, show the image shown in Fig. 3 at the picture 620 of display part 62, and annunciator 71 is worked, produce warning tones.In addition, this step S202 is identical with above-mentioned steps S111.
Next, judging whether to carry out (step S203) in cooling process by cooling body 52, when judging not to be in cooling process, driving dry gas feed mechanism 53, the supply (step S204) of the pathogenic dryness that hops to it, moves to step S206.In addition, in step S203, when judging to be in cooling process, stopping the driving of cooling body 52, stopping cooling (step S205), moving to step S206.In addition, in cooling process, because carry out dry gas supply by dry gas feed mechanism 53, the supply of this dry gas proceeds.
Next, drive heating arrangements 51, begin to cool down the heating (step S206) of parts.Thus, when produce condensation, freeze, this condensation, freeze be removed.In addition, because humidity reduces, so can avoid producing condensation, freezing.
Next, detect the humidity RH (step S207) in the first Room R1 and the second Room R2 by humidity sensor 42, in the first Room R1 and the second Room R2, judge whether humidity RH is below threshold value beta (step S208) respectively.In addition, this threshold value beta is identical with the threshold value beta of above-mentioned steps S115.
When judging that humidity RH is not below threshold value beta, getting back to step S207, again performing the later part of step S207.
In addition, in step S208, when judging that humidity RH is below threshold value beta, stop the driving of heating arrangements 51, stop the heating (step S209) of cooling-part, stop the driving of dry gas feed mechanism 53, stop the supply (step S210) of dry gas, move to step below.Omit the explanation of later action.
Next, the control action of the supply the testing fixture 1 carried out that monitor dry gas after initial treatment is described.
First, as shown in Figure 8, judge whether the supply of the dry gas of dry gas feed mechanism 53 has exception (step S301).
In step S301, when the supply stopping of dry gas or the flow of dry gas are reduced to below specified value a, be judged as exception, when the flow of dry gas is not below specified value a, judge it is not abnormal (normally).In addition, carried out the detection of the flow of dry gas by flow sensor 43, detection and the above-mentioned judgement of the flow of this dry gas are regularly carried out.
In addition, specified value a is not particularly limited, and is the value suitably set according to terms and conditions, preferably sets in the scope below 100mL/ second, is more preferably set in the scope of below 10mL/ second.
When judging that the supply of dry gas has abnormal, there is generation condensation, freezing, or have generation condensation, icing possibility, and carry out reporting (step S302).
In step s 302, show the image shown in Fig. 5 at the picture 620 of display part 62, and annunciator 71 is worked, produce warning tones.Thus, operator recognizes and creates exception, namely creates the exception to condensation, relevant possibility of freezing, in addition, by the image shown at display part 62, can recognize the detailed content of this exception, processing method etc.In addition, the image shown in Fig. 5 is an example, is described below to this example.
As shown in Figure 5, above-mentioned image has the first image 621 shown in the entirety of picture 620, and shows second image 622 less than the first image 621 on the first image 621.
In the first image 621, upper left display " in stopping " in Fig. 5 of picture 620.
In addition, in the second image 622, in frame 623, show " dolly portion cleaning Traffic Anomaly." etc. the current state (abnormal content) of testing fixture 1, " please START after selection RETRY, CLEANOUT." etc. to various message such as prescribing methods.
In addition, abnormal position represents with circle 625.In addition, above-mentioned dolly portion is " device supply unit 14 ".
Next, stop cooling body 52, stop cooling (step S304), drive heating arrangements 51, begin to cool down the heating (step S305) of parts, move to step below.Thus, when produce condensation, freeze, this condensation, freeze be removed.In addition, because humidity reduces due to temperature, so can avoid producing condensation, freezing.
In addition, in step S303, in process during judgement is not cool, deduction does not produce condensation, freezes, and does not process especially, moves to step below.
In addition, in step S301, when judging that the supply of dry gas does not have abnormal, deduction does not produce condensation, freezes, and does not process especially, moves to step below.Omit the explanation of later action.
As described above, according to this testing fixture 1, when meeting any one condensation condition in multiple condensation condition, infer that generation has condensation, freezes, or, produce condensation, freeze, drive heating arrangements 51 pairs of cooling-parts to heat.
Thus, when produce have condensation, icing, this condensation, freeze be removed, can avoid in addition produce condensation, freeze.
In addition, because do not need operator to confirm condensation, freeze, operation needed for heating, testing fixture 1 infers that generation has condensation, freezes, or produce condensation, freeze, and automatically drive heating arrangements 51 pairs of cooling-parts to heat, so do not bother, in addition, the confirmation error etc. due to operator can be suppressed and make condensation, freezing is not removed.
In addition, testing fixture 1 can also have the sensor detecting condensation or freeze.When produce have condensation, icing, by this sensor can detect generation have condensation, freeze, thereby, it is possible to removing condensation, freeze.
As the sensor, be not particularly limited if the sensor condensed or freeze can be detected, such as, can exemplify leak sensor.
Second embodiment
Fig. 9 is the block diagram of the second embodiment representing electronic component inspection device of the present invention.
Below, the second embodiment is described, by with the difference of aforesaid first embodiment centered by be described, for identical item, the description thereof will be omitted.
As shown in Figure 9, the sensor of the leakage of the liquid nitrogen that the testing fixture 1 of the second embodiment uses as the refrigerant detecting cooling body 52, has leak sensor 44.
And, as condensation condition, except the condensation condition of (1) ~ (3) described at above-mentioned first embodiment, add and have " above-mentioned liquid nitrogen reveal situation " this condensation condition.
Testing fixture 1 detects the leakage of liquid nitrogen termly by leak sensor 44, when leakage liquid nitrogen being detected, drive not shown heating arrangements, heats the part of the cooled with liquid nitrogen that examined device 1 is revealed.Thereby, it is possible to avoid suppose outside part by the cooled with liquid nitrogen revealed, this part produce condensation or freeze, in addition, when create condensation or freeze, can be removed.
According to the second so above embodiment, the effect identical with aforesaid first embodiment also can be played.
3rd embodiment
Figure 10 is the approximate vertical view of the 3rd embodiment representing electronic component inspection device of the present invention.
Below, the 3rd embodiment is described, by with the difference of aforesaid first embodiment centered by be described, for identical item, the description thereof will be omitted.
As shown in Figure 10, in the testing fixture 1 of the 3rd embodiment, there is humidity sensor 45 in the outer setting of testing fixture 1, detected the humidity of the outside of testing fixture 1 by humidity sensor 45.
And, as condensation condition, except above-mentioned first embodiment describe (1) ~ (3) condensation condition except, add have " situation that the humidity of the outside of testing fixture 1 is more than the threshold value of the regulation preset " this condensation condition.
Testing fixture 1 detects the humidity of the outside of testing fixture 1 termly by humidity sensor 45, when this humidity is more than the threshold value of the regulation preset, drive not shown heating arrangements, heat the outer wall etc. of testing fixture 1.Thereby, it is possible to avoid producing condensation at the outer wall etc. of testing fixture 1 or freezing, in addition, when generation has condensation or freezes, can be removed.
Even if according to the 3rd so above embodiment, the effect identical with aforesaid first embodiment can be played.
4th embodiment
Below, the 4th embodiment is described, by with the difference of aforesaid first embodiment centered by be described, to identical item, the description thereof will be omitted.
The testing fixture 1 of the 4th embodiment is about condensation condition, the condensation condition describing (1) is changed to the condensation condition of following (1A) at above-mentioned first embodiment.
(1A) temperature detected by temperature sensor 41 is the situation of less than 2 times of dew temperature.
When the temperature detected by temperature sensor 41 is less than 2 times of dew temperature, have and become dew temperature and produce condensation, icing possibility, heat by driving heating arrangements 51 pairs of cooling-parts, when produce have condensation, icing, this condensation can be removed, freeze, in addition, can avoid producing condensation, freezing.
Dew temperature can be obtained based on the temperature detected by temperature sensor 41 with by the humidity that humidity sensor 42 detects.That is, at the storage part 801 of control part 80, be previously stored with the calibration curve such as form, arithmetic expression for obtaining dew temperature based on temperature and humidity, control part 80 uses above-mentioned calibration curve to obtain dew temperature.
In addition, in the present embodiment, heat when the temperature detected by temperature sensor 41 is less than 2 times of dew temperature, preferably more than 0.5 times of dew temperature, the situation of less than 2 times heats, heat when being more preferably more than 1.05 times, less than 2 times, further preferred more than 1.05 times, less than 1.5 times heat, heat particularly preferably in when more than 1.1 times, less than 1.4 times.
Even if according to the 4th so above embodiment, the effect identical with aforesaid first embodiment also can be played.
Above, be illustrated electronic component conveying device of the present invention and electronic component inspection device based on graphic mode, the present invention is not limited thereto, and the structure in each portion can be replaced into the arbitrary structures with identical function.In addition, other any constructs can also be added.
In addition, the present invention also can by plural structure (feature) combination any in the respective embodiments described above.
Description of reference numerals:
1 ... testing fixture (electronic component inspection device); 11A ... first tray conveying mechanism; 11B ... second tray conveying mechanism; 12 ... temperature adjustment part (baffle); 13 ... first device carrying head; 14 ... device supply unit (supply shuttle); 15 ... 3rd tray conveying mechanism; 16 ... inspection portion; 17 ... second device carrying head; 18 ... device recoverer (recovery dolly); 19 ... recovery pallet; 20 ... 3rd device carrying head; 21 ... 6th tray conveying mechanism; 22A ... 4th tray conveying mechanism; 22B ... 5th tray conveying mechanism; 41 ... temperature sensor; 42,45 ... humidity sensor; 43 ... flow sensor; 44 ... leak sensor; 51 ... heating arrangements; 52 ... cooling body; 53 ... dry gas feed mechanism; 6 ... operating portion; 61 ... input part; 62 ... display part; 620 ... picture; 621 ... first image; 622 ... second image; 623,624 ... frame; 625 ... circle; 71 ... annunciator; 80 ... control part; 801 ... storage part; 802 ... time meter; 803 ... judging part; 90 ... IC device; 200 ... pallet; A1 ... pallet supply area; A2 ... device supply area (supply area); A3 ... inspection area; A4 ... device recovery zone (recovery zone); A5 ... pallet removing region; R1 ... first Room; R2 ... second Room; R3 ... 3rd Room; S101 ~ S118 ... step; S201 ~ S210 ... step; S301 ~ S305 ... step.
Claims (18)
1. an electronic component conveying device, is characterized in that, possesses:
Parts, its constituent apparatus;
Heating part, it heats described parts;
Humidity detection unit, it detects humidity; And
Temperature detecting part, its detected temperatures,
When the temperature detected by described temperature detecting part is less than 2 times of dew temperature, described parts are heated.
2. electronic component conveying device according to claim 1, is characterized in that,
When the temperature detected by described temperature detecting part is more than 0.5 times less than 2 times of dew temperature, described parts are heated.
3. the electronic component conveying device according to claims 1 or 2, is characterized in that,
The humidity of the air contacted with described humidity detection unit with the humidity ratio of the air of described component contact is low.
4. the electronic component conveying device according to any one of claims 1 to 3, is characterized in that,
Described temperature detecting part is configured at described parts.
5. the electronic component conveying device according to any one of Claims 1 to 4, is characterized in that,
Described component configuration is in the indoor being controlled as the humidity of regulation of described electronic component conveying device.
6. the electronic component conveying device according to any one of Claims 1 to 5, is characterized in that,
Described heating part comprises heating wire.
7. electronic component conveying device according to claim 6, is characterized in that,
Described heating part comprises air-supply source.
8. the electronic component conveying device according to any one of claim 1 ~ 7, is characterized in that,
Described heating is stopped below the first threshold that the humidity of the indoor of described electronic component conveying device becomes regulation.
9. the electronic component conveying device according to any one of claim 1 ~ 7, is characterized in that,
Described heating is stopped when have passed through specific time.
10. an electronic unit carrying device, is characterized in that, possesses:
Parts, its constituent apparatus; And
Heating part, it heats described parts,
When becoming predetermined condition, described parts are heated.
11. electronic component conveying devices according to claim 10, is characterized in that,
Described parts have can configure electronic unit and the cooling-part that can cool.
12. electronic component conveying devices according to claim 11, is characterized in that,
Described condition refers to: cut off the electricity supply under the state that described cooling-part has been cooled, connect the situation of described power supply afterwards.
13. electronic component conveying devices according to claim 11, is characterized in that,
Described condition refers to: cut off the electricity supply under the state that described cooling-part has been cooled, and starts the situation connecting described power supply within the time preset when described power supply is cut off.
14. electronic component conveying devices according to any one of claim 11 ~ 13, is characterized in that,
Liquid nitrogen is used in the cooling of described cooling-part,
Described condition refers to the situation that described liquid nitrogen is revealed.
15. electronic component conveying devices according to any one of claim 10 ~ 14, is characterized in that,
Described condition refers to: the humidity of at least one indoor of described electronic component conveying device is the situation of more than the Second Threshold of regulation.
16. electronic component conveying devices according to any one of claim 10 ~ 15, is characterized in that,
To the gas of at least one indoor supply drying of described electronic component conveying device,
Described condition refers to: the supply stopping of described gas or the flow of described gas are reduced to the situation of below specified value.
17. electronic component conveying devices according to any one of claim 1 ~ 16, is characterized in that,
There are the multiple master modes controlled the action of described electronic component conveying device,
Described electronic component conveying device has display part, by the image corresponding with the master mode of current setting in the described multiple master mode of this display part display.
18. 1 kinds of electronic component inspection device, is characterized in that possessing:
Parts, its constituent apparatus;
Heating part, it heats described parts;
Humidity detection unit, it detects humidity;
Temperature detecting part, its detected temperatures; And
Inspection portion, it checks electronic unit,
When the temperature detected by described temperature detecting part is less than 2 times of dew temperature, described parts are heated.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014147234A JP2016023994A (en) | 2014-07-17 | 2014-07-17 | Electronic component conveyance device and electronic component inspection device |
| JP2014-147234 | 2014-07-17 |
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| CN105314358A true CN105314358A (en) | 2016-02-10 |
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| JP (1) | JP2016023994A (en) |
| KR (1) | KR101680848B1 (en) |
| CN (1) | CN105314358A (en) |
| TW (1) | TWI572869B (en) |
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| CN112834899A (en) * | 2020-12-30 | 2021-05-25 | 广州奥松电子有限公司 | Chip detection device |
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| JP7058524B2 (en) * | 2018-03-09 | 2022-04-22 | 東京エレクトロン株式会社 | Dew condensation prevention method and treatment system |
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|---|---|
| JP2016023994A (en) | 2016-02-08 |
| TWI572869B (en) | 2017-03-01 |
| TW201604553A (en) | 2016-02-01 |
| KR101680848B1 (en) | 2016-11-29 |
| KR20160010286A (en) | 2016-01-27 |
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