CN105314250A - Fixing and weighing device for photoresist bottle - Google Patents
Fixing and weighing device for photoresist bottle Download PDFInfo
- Publication number
- CN105314250A CN105314250A CN201410236038.9A CN201410236038A CN105314250A CN 105314250 A CN105314250 A CN 105314250A CN 201410236038 A CN201410236038 A CN 201410236038A CN 105314250 A CN105314250 A CN 105314250A
- Authority
- CN
- China
- Prior art keywords
- photoresist bottle
- photoresist
- bottle
- weighing pan
- fixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Details Of Rigid Or Semi-Rigid Containers (AREA)
Abstract
The invention provides a fixing and weighing device for a photoresist bottle. The device comprises a weighing plate and a photoresist bottle holder. The weighing plate is provided with a supporting face used for supporting the bottom of the photoresist bottle, the supporting face and the horizontal plane form a preset dip angle, and a straight sucking tube can stretch into the lowermost point at the bottom of the photoresist bottle without making contact with the bottom of the photoresist bottle through the dip angle. The photoresist bottle holder is fixedly connected with the weighing plate and used for supporting the side wall of the photoresist bottle. By means of the fixing and weighing device for the photoresist bottle, the remaining amount of photoresist can be accurately monitored, the utilization rate of the photoresist can be better increased, and replacement of the photoresist bottle can be reminded in time.
Description
Technical field
The present invention relates to a kind of photoresist bottle fixing weighting apparatus.
Background technology
Photoresist is a kind of conventional liquid preparation in semiconductor technology, is usually stored in photoresist bottle.In use, photoresist bottle is fixed on photoresist bottle holding unit, and the suction pipe clamped by photoresist bottle holding unit stretches in photoresist bottle, to extract photoresist from photoresist bottle.
But, photoresist bottle is placed on photoresist bottle holding unit uses time, usually accurately cannot monitor remaining photoresist in photoresist bottle has how many, if change photoresist bottle prematurely, can cause unnecessary waste, cause cost increase; If do not change photoresist bottle in time, suction pipe cannot be drawn into photoresist, may cause some processing step failure.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of photoresist bottle fixing weighting apparatus, accurately can monitor the surplus of photoresist, is conducive to the degree of utilization also timely prompting changing photoresist bottle improving photoresist.
For solving the problems of the technologies described above, the invention provides a kind of photoresist bottle fixing weighting apparatus, comprising:
Weighing pan, this weighing pan has the bearing surface for supporting bottom photoresist bottle, and this bearing surface becomes an inclination angle of presetting with horizontal surface, and this inclination angle makes straight suction pipe can extend the bottom nadir of this photoresist bottle and not contact the bottom of this photoresist bottle;
Photoresist bottle holder, is fixedly connected with described weighing pan, for supporting the sidewall of this photoresist bottle.
According to one embodiment of present invention, described photoresist bottle holder is vertical with the bearing surface of described weighing pan.
According to one embodiment of present invention, this device also comprises: base, and described weighing pan is arranged on the base.
According to one embodiment of present invention, the shape of the contact surface of described photoresist bottle holder and photoresist bottle and the sidewall shape of described photoresist bottle adapt.
Compared with prior art, the present invention has the following advantages:
The photoresist bottle fixing weighting apparatus of the embodiment of the present invention has the weighing pan of inclination, photoresist bottle is made to be placed on the bearing surface of weighing pan obliquely, straight suction pipe need not bend and can reach lowest part bottom photoresist bottle, can make full use of the photoresist in bottle, and glue is seldom residual.
Furthermore, straight suction pipe need not bend the bottom lowest part reaching photoresist bottle, but the not bottom of contact lithograph glue bottle, thus do not affect the Weighing of weighing pan, can the surplus of accurate measurements photoresist, photoresist can be reacted when being finished or being about to be finished, thus photoresist bottle can be changed in time.
Accompanying drawing explanation
Fig. 1 is the block diagram of the photoresist bottle fixing weighting apparatus of the embodiment of the present invention;
Fig. 2 is the cutaway view of the photoresist bottle fixing weighting apparatus of the embodiment of the present invention.
Detailed description of the invention
Below in conjunction with specific embodiments and the drawings, the invention will be further described, but should not limit the scope of the invention with this.
With reference to figure 1 and Fig. 2, the photoresist bottle fixing weighting apparatus of the present embodiment, comprising: base 10, weighing pan 11 and photoresist bottle holder 12.
Wherein, weighing pan 11 is arranged on base 10, weighing pan 11 has the bearing surface for supporting bottom photoresist bottle 100, and this bearing surface becomes an inclination angle of presetting with horizontal surface, and this inclination angle makes straight suction pipe 13 without the need to the bending bottom nadir that just can extend photoresist bottle 100.Suction pipe 13 extends the bottom nadir of photoresist bottle 100, can make full use of the photoresist in bottle, makes glue residual less.
This weighing pan 11 for weighing to photoresist bottle 100, to react the surplus of wherein photoresist.This weighing pan 11 can adopt the mode such as electronic-weighing, mechanical weighing to realize weighs.
In addition, suction pipe 13 extends the bottom nadir of photoresist bottle 100, but the bottom of not contact lithograph glue bottle 100, to avoid affecting Weighing, thus by the surplus of weighing pan 11 accurate feedback photoresist, reaction photoresist is finished or is about to be finished, to change photoresist bottle in time in time.
It should be noted that, " bottom nadir " in the application is not strictly defined as " nadir ", comprises the nadir on vertical height and the position within the scope of this nadir permissible error is all acceptable.
Photoresist bottle holder 12 is fixedly connected with weighing pan 11, for supporting the sidewall of photoresist bottle 100.Preferably, this photoresist bottle holder 12 is vertical with the bearing surface of weighing pan 11.
More preferably, the shape of contact surface of photoresist bottle holder 12 and photoresist bottle 100 and the sidewall shape of photoresist bottle 100 adapt.Such as, photoresist bottle 100 can be cylindric, and correspondingly, this photoresist bottle holder 12 can be the face of cylinder with the shape of the contact surface of photoresist bottle 100.
Although the present invention with preferred embodiment openly as above; but it is not for limiting the present invention; any those skilled in the art without departing from the spirit and scope of the present invention; can make possible variation and amendment, the scope that therefore protection scope of the present invention should define with the claims in the present invention is as the criterion.
Claims (4)
1. a photoresist bottle fixing weighting apparatus, is characterized in that, comprising:
Weighing pan, this weighing pan has the bearing surface for supporting bottom photoresist bottle, and this bearing surface becomes an inclination angle of presetting with horizontal surface, and this inclination angle makes straight suction pipe can extend the bottom nadir of this photoresist bottle and not contact the bottom of this photoresist bottle;
Photoresist bottle holder, is fixedly connected with described weighing pan, for supporting the sidewall of this photoresist bottle.
2. photoresist bottle fixing weighting apparatus according to claim 1, it is characterized in that, described photoresist bottle holder is vertical with the bearing surface of described weighing pan.
3. photoresist bottle fixing weighting apparatus according to claim 1, is characterized in that, also comprise: base, and described weighing pan is arranged on the base.
4. photoresist bottle fixing weighting apparatus according to claim 1, is characterized in that, the shape of the contact surface of described photoresist bottle holder and photoresist bottle and the sidewall shape of described photoresist bottle adapt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410236038.9A CN105314250A (en) | 2014-05-30 | 2014-05-30 | Fixing and weighing device for photoresist bottle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410236038.9A CN105314250A (en) | 2014-05-30 | 2014-05-30 | Fixing and weighing device for photoresist bottle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105314250A true CN105314250A (en) | 2016-02-10 |
Family
ID=55242732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410236038.9A Pending CN105314250A (en) | 2014-05-30 | 2014-05-30 | Fixing and weighing device for photoresist bottle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105314250A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11216414A (en) * | 1998-01-30 | 1999-08-10 | Victor Co Of Japan Ltd | Spin coater |
| CN201017172Y (en) * | 2007-01-08 | 2008-02-06 | 和舰科技(苏州)有限公司 | Light blockage supply piping installation |
| CN101398626A (en) * | 2007-09-26 | 2009-04-01 | 中芯国际集成电路制造(上海)有限公司 | Photo resist supply device |
| CN201417363Y (en) * | 2009-05-21 | 2010-03-03 | 久弘庆股份有限公司 | Circulation and reclamation device of photoresist liquid |
| CN201473306U (en) * | 2009-08-22 | 2010-05-19 | 比亚迪股份有限公司 | Filling device |
| CN201921800U (en) * | 2011-01-19 | 2011-08-10 | 沈阳芯源微电子设备有限公司 | Nitrogen pressure type photoresist supply system capable of preventing air bubbles |
| CN204799502U (en) * | 2015-06-29 | 2015-11-25 | 钟自奇 | All -in -one is glued to full -automatic fireworks inner tube point |
-
2014
- 2014-05-30 CN CN201410236038.9A patent/CN105314250A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11216414A (en) * | 1998-01-30 | 1999-08-10 | Victor Co Of Japan Ltd | Spin coater |
| CN201017172Y (en) * | 2007-01-08 | 2008-02-06 | 和舰科技(苏州)有限公司 | Light blockage supply piping installation |
| CN101398626A (en) * | 2007-09-26 | 2009-04-01 | 中芯国际集成电路制造(上海)有限公司 | Photo resist supply device |
| CN201417363Y (en) * | 2009-05-21 | 2010-03-03 | 久弘庆股份有限公司 | Circulation and reclamation device of photoresist liquid |
| CN201473306U (en) * | 2009-08-22 | 2010-05-19 | 比亚迪股份有限公司 | Filling device |
| CN201921800U (en) * | 2011-01-19 | 2011-08-10 | 沈阳芯源微电子设备有限公司 | Nitrogen pressure type photoresist supply system capable of preventing air bubbles |
| CN204799502U (en) * | 2015-06-29 | 2015-11-25 | 钟自奇 | All -in -one is glued to full -automatic fireworks inner tube point |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2014056011A3 (en) | Mixing device | |
| JP2017072413A (en) | Measuring cup | |
| CN105314250A (en) | Fixing and weighing device for photoresist bottle | |
| CN103549868A (en) | Cup body fixing seat | |
| CN104588457B (en) | A kind of easy-to-dismount upper die of bending machine assembly | |
| CN203625012U (en) | High-efficiency liquid splash-proof device | |
| CN203567972U (en) | Liquid subpackage quantitative counter | |
| CN205384155U (en) | Supplementary weighing device | |
| CN207522271U (en) | A kind of processing setting tool of roof prism | |
| CN105522544A (en) | Adjusting platform installed on workbench | |
| CN102962782B (en) | Self-positioning adjusting mechanism | |
| CN208588336U (en) | A kind of assembled height measuring instrument for bearing | |
| CN105203191A (en) | Hydraulic balance | |
| CN103901062A (en) | Sample platform mounted on powder X-ray diffractometer and used for testing solid block-shaped sample | |
| CN205239974U (en) | Filling machine | |
| CN203964998U (en) | Gravity balance | |
| CN210221265U (en) | Electronic platform scale | |
| CN203609168U (en) | Cup body fixing seat | |
| CN202594768U (en) | Oil metering device | |
| CN105276344B (en) | Photoetching glue bottle holding unit | |
| CN204891912U (en) | Experiment constant temperature electro -heat equipment | |
| CN204594547U (en) | A kind of conventional volumetric glass calibrating installation | |
| CN203790962U (en) | Four-mouth flat bottom flask capable of being vacuumized for laboratory | |
| CN215924363U (en) | Oral liquid quantitative filling device | |
| CN208125486U (en) | Cone calorimetry novel specimen installs case assembly |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160210 |