JPH11216414A - Spin coater - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable a coating liquid to be surely spin-coated on a disk substrate and to surely recover splashed excess coating liquid from the outer peripheral part of the disk substrate while rotating the disk substrate at high speed with a turntable on which the disk substrate is freely rotatably mounted being fitted to an index table. SOLUTION: An receiving port 38 of a coating cup 35 is almost horizontally supported along the outer peripheral part of a disk substrate 13 on coating liquid dropping, and on the other hand, on coating liquid dropping completion, the coating cup 35 is obliquely inclined retreated upward from a horizontal turntable 12 and the disk substrate 13, and excess coating liquid housed in the coating cup 35 is discharge by gravity fall from an excess coating liquid discharge port 35b placed in the lowermost part of the inclined coating cup 35.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating liquid on a substrate while rotating the substrate at a high speed with a turntable on which a disk-shaped substrate is rotatably mounted on a moving table (index table). The present invention relates to a spin coater capable of surely spin coating and recovering surplus coating liquid scattered from an outer peripheral portion of a substrate.

[0002]

2. Description of the Related Art In a well-known compact disk (CD) or the like, a reflective film is formed on a disk-shaped disk substrate on which an uneven signal surface is formed, and then the disk substrate is rotated at a high speed. A transparent resin is dropped on the inner peripheral portion of the substrate to form a protective film by spin coating. In addition, the recently developed bonded disc for DVD is 0.6m
UV curable resin is dropped onto the inner peripheral portion of the m-thick disk substrate, and the UV curable resin is applied by spin coating. Then, a 0.6 mm-thick disk substrate is further placed on the UV curable resin film to emit ultraviolet light. By irradiating, the two disk substrates are bonded to form a bonded disk.

As described above, a spin coater disclosed in Japanese Patent Application Laid-Open No. 3-284744 is used for applying a protective film or an ultraviolet curable resin film while rotating a disk-shaped disk substrate at a high speed.

FIG. 6 is a longitudinal sectional view for explaining a conventional spin coater. Conventional spin coater 1 shown in FIG.
00 is disclosed in Japanese Patent Application Laid-Open No. 3-284744, and will be briefly described here.

[0005] The conventional spin coater 100 has a rotating shaft 1 at the center of the bottom 101 a of the coating cup 101.
02, and a horizontal turntable (hereinafter, referred to as a turntable) 103 is provided above the rotary shaft 102. Further, on the turntable 103, a disk-shaped substrate 104 is sucked by air from the air suction passage 102a.

[0006] A lid 105 is attached to the upper portion of the coating cup 101.
A hole 105a having a size slightly larger than the size of the substrate 104 is provided at the center of the hole. A coating liquid supply nozzle 106 for dropping the coating liquid is provided at an inner peripheral portion of the hole 105a.

[0007] A surplus coating liquid discharge drain 107 is provided at the bottom 101 a in the coating cup 101.
And the coating liquid can be discharged to the outside of the coating cup 101. Further, a mist suction unit 108 for sucking mist in the coating cup 101 at a position farther than the distance from the center of the coating cup 101 to the excess coating liquid discharge drain 107.
Is provided. At this time, a vertical plate 109 is erected in the bottom 101 a of the coating cup 101 between the excess coating liquid discharge drain 107 and the mist suction unit 108, and the vertical plate 110 also faces the vertical plate 109 on the lid 105. By standing upright, the excess coating liquid is prevented from being directly sucked into the mist suction unit 108.

[0008] The conventional spin coater 100 having the above configuration.
Is performed by rotating the substrate 104 on the rotary table 103 at a high speed while dropping the coating liquid from above the inner peripheral portion of the substrate 104 by the coating liquid supply nozzle 106, so that the coating liquid is
04 is radially diffused from the inner peripheral portion to the outer peripheral portion to form a film. At this time, surplus coating liquid scatters radially from the outer periphery of the substrate 104 and flows into the coating cup 101, and the surplus coating liquid is discharged to the surplus coating liquid discharge drain 10 provided on the bottom 101a.
7 are discharged. Further, since the coating liquid supplied onto the substrate 104 is sprayed by the mist suction unit 108, the mist does not adhere to the excess coating liquid discharge drain 107, and the excess coating liquid is discharged. Clogging in the drain 107 can be prevented.

[0009]

By the way, in the conventional spin coater 100 having the above-described structure, when a coating liquid is dropped on the disk-shaped substrate 104 rotating at a high speed to form a film, the coating liquid is scattered from the outer peripheral portion of the substrate 104. Although the excess coating liquid can be recovered from the excess coating liquid discharge drain 107 provided on the bottom 101a of the coating cup 101, the coating cup 101 and the turntable 1
Since the substrate 104 is permanently provided while maintaining the positional relationship shown in FIG. 6, the substrate 104 is placed on the rotary table 103 each time, and when the coating of the coating liquid is completed, the substrate 10
It is necessary to perform an operation of removing the rotary table 4 from the rotary table 103.

Along with this, in order to automatically spin coat a large number of substrates 104, a substrate transfer means (not shown) must be provided in the vicinity of the spin coater 100. Since an external force or vibration is applied, the warp angle of the substrate 104 is deteriorated.
The operation time for mounting the substrate 04 on the rotary table 103 via the substrate transfer means and for removing the substrate 04 from the rotary table 103 takes a long time, resulting in poor mass productivity.

Therefore, once the disk-shaped substrate is placed on the horizontal rotating table, the horizontal rotating table is mounted on a moving table (index table) so that the substrate is not removed until the substrate manufacturing process is completed. Even if the table is moved in the order of the manufacturing process of the substrate, a spin coater that can surely spin coat the coating liquid on the substrate and can reliably collect excess coating liquid during spin coating is desired. .

[0012]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and a first invention is directed to a horizontal rotating table on which a disk-shaped substrate is mounted and which rotates substantially horizontally, A coating liquid supply means for dropping a coating liquid onto an inner peripheral portion of the substrate while rotating the substrate mounted on the horizontal rotary table; and a ring along the outer peripheral portion of the substrate mounted on the horizontal rotary table. Provided in a shape, and a receiving port for receiving excess coating liquid scattered from the outer peripheral portion of the substrate when the coating liquid is dropped on the substrate is formed in the inner peripheral portion facing the outer peripheral portion of the substrate, And a coating cup for storing the excess coating liquid therein, and a receiving port of the coating cup for supporting the coating liquid substantially horizontally along an outer peripheral portion of the substrate when the coating liquid is dropped. On the other hand, at the end of the dropping of the coating liquid, the coating cup is inclined obliquely with respect to the horizontal rotating table and the substrate, and the coating cup is inclined by the coating cup supporting means. And a surplus coating liquid outlet provided at the lowest height portion of the coating cup which is inclined so as to discharge the surplus coating liquid contained in the coating cup by gravity drop. is there.

[0013] In a second aspect of the present invention, there is provided a horizontal rotary table on which a disk-shaped substrate is mounted and which rotates substantially horizontally, a movable table which moves with the horizontal rotary table mounted thereon, and the horizontal rotary table. A coating liquid supply means for dropping a coating liquid onto an inner peripheral portion of the substrate while rotating the substrate mounted thereon; and a ring-shaped member provided along the outer peripheral portion of the substrate mounted on the horizontal rotary table. And
A receiving port for receiving excess coating liquid scattered from the outer peripheral portion of the substrate when the coating liquid is dropped on the substrate is formed in the inner peripheral portion facing the outer peripheral portion of the substrate, and the excess coating is formed inside. A coating cup for storing the liquid; and a receiving port for the coating cup, which is supported substantially horizontally along an outer peripheral portion of the substrate when the coating liquid is dropped, while the coating cup is rotated horizontally when the coating liquid is dropped. A coating cup supporting means for supporting the table and the substrate obliquely inclined in a state of being retracted upward from the table and the substrate; Tilt to drain excess coating liquid by gravity Was a spin coater which is characterized by comprising a surplus coating liquid discharge port formed in a lowest height portion of the coating cup.

The spin coater according to the first or second aspect of the present invention may be configured such that the inner diameter of the ring-shaped coating cup is
It is characterized in that it is set slightly larger than the outer diameter of the substrate and larger than the outer diameter of the horizontal rotary table.

Further, in the spin coater according to the second invention, the moving table is moved when the coating cup is inclined.

Further, in the spin coater according to the second aspect of the present invention, a disk-shaped index table is used for the moving table, and a plurality of the horizontal rotary tables are mounted on the index table at substantially equal intervals along the circumference. The index table is intermittently rotated in accordance with a manufacturing process of the substrate.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the spin coater according to the present invention will be described below in detail with reference to FIGS.

FIG. 1 is a partial cross-sectional view illustrating a spin coater according to the present invention, and FIG. 2 illustrates a state in which a coating liquid is dropped on a rotating disk substrate in the spin coater according to the present invention. FIG. 3 is a partial cross-sectional view of the motor, and FIG. 3 is a shaft-side rubber roller rotatably supporting a horizontal rotary table provided on the moving table shown in FIGS. 1 and 2, and a motor provided on a base table. FIG. 5 is a schematic diagram for explaining a state of contact and separation and a driving state with a pair of rubber rollers on the side.

The spin coater according to the present invention is used for applying a coating liquid such as a transparent resin for a protective film or an ultraviolet curable resin for bonding onto a substrate while rotating a disk-shaped substrate (disk substrate) at a high speed. Applicable.

In the embodiments, the spin coater according to the present invention will be described below by applying the spin coater to a process of manufacturing a bonded disc for DVD.

As shown in FIGS. 1 and 2, in the spin coater 1 according to the present invention, a disk-shaped movable table (hereinafter referred to as an index table) is provided on an upper surface 2a of a base table 2 fixed on a chassis (not shown). 3 is approximately 45 around the rotation axis 4
It is mounted so that it can be rotated intermittently over eight stages at intervals of °. And index table 3
Are supported substantially parallel to the base table 2, while the rotating shaft 4 supported by the index table 3 is perpendicular to the base table 2.

The index table 3 has a state in which eight cam followers (needle bearings) 6 are attached at equal intervals along the outer periphery of the cylindrical holder 5 via a cylindrical holder 5 to a rotary shaft 4 press-fitted into the center portion. The rotating shaft 4 is rotatably supported via bearings 8 and 8 in a bearing holder 7, and a shaft stopper member 9 is attached to the lower end of the rotating shaft 4 on the lower bearing 8 side. . A roller cam gear 11 having a helical cam (not shown) orthogonal to the rotating shaft 4 is rotatably provided on a bracket 10 mounted on the base 2 near the cam follower 6. The index table 3 is arranged so that the eight cam followers 6 attached to the rotating shaft 4 are sequentially slid into contact with a helical cam (not shown) of the roller cam gear 11 at intervals of approximately 45 ° about the rotating shaft 4. It can rotate intermittently over eight stages. The intermittent drive of the index table 3 can be realized by a well-known Geneva mechanism instead of the roller cam gear 11.

Next, on the index table 3, a horizontal rotating table (hereinafter, referred to as a rotating table) 12 for spin coating, which is a part of the main part of the present invention, is a disk-shaped substrate (hereinafter, a disk substrate). 13) on which the rotating shaft 1 is mounted.
45 along the circumference so that it can be rotated approximately horizontally around
゜ Eight places are provided at intervals. In FIGS. 1 and 2, 1
Only the rotary table 12 is shown. And
The rotary table 12 on the index table 3 is not directly connected to a motor serving as a rotary drive source. As will be described later, only when the rotary table 12 reaches a spin coating stage by driving the index table 3,
The motor 3 with the turntable 12 side attached to the base 2
It is connected to 0.

The rotary table 12 is rotatably supported via bearings 16 and 16 in a bearing holder 15 in which a rotary shaft 14 pressed into the center is mounted on the index table 3 and a lower bearing. A bearing nut 17 is provided at the lower end of the rotating shaft 14 on the 16 side,
A bushing 19 fitted with a rubber roller 18 is attached to prevent the rotation shaft 14 from falling off. At this time, the bearing holder 15 is positioned and attached by a hole 3c drilled from the upper surface 3a to the lower surface 3a of the index table 3, and attached to the upper surface 3a and the lower surface 3a of the index table 3 so as to protrude. ing. Therefore, the rotating shaft 14 extending downward from the lower bearing 16 side in the bearing holder 15
The rubber roller 18 provided coaxially via a bushing 19 is provided toward a shaft 30a side of a motor 30 attached to the base 2 as described later.

The disk substrate 13 placed on the rotary table 12 is sucked from the air suction passage 15a formed in the bearing holder 15 by the air passing through the air suction passage 14a formed in the rotating shaft 14. .

Further, in a state where the index table 3 reaches the stage for spin coating, a coating liquid supply means for dropping the coating liquid above the inner peripheral portion of the disk substrate 13 placed on the rotary table 12 is provided. The coating liquid supply nozzle 20 is supported by a moving means (not shown) so as to be vertically movable or rotatable. The coating liquid supplied from the coating liquid supply nozzle 20 is:
An ultraviolet curable resin may be dropped on one of the disk substrates 13 to bond the two disk substrates 13 to form a bonded disk for DVD. The coating liquid supply nozzle 20 does not necessarily need to be installed on a spin coating stage, as will be described later in the process of manufacturing a DVD bonded disk, and a disk substrate is provided in front of the spin coating stage. There is no problem even if the coating liquid is dropped on the substrate 13 in advance.

On the other hand, on the lower surface 2b of the base table 2, the rotary shaft 1 of the rotary table 12 is placed at the stage position for spin coating.
A motor 30 serving as a rotation drive source of the motor 4 is mounted, and a shaft 30 a of the motor 30 projects from a hole 2 c formed in the base 2 toward the upper surface 2 a of the base 2.

A rotary drive base 31 is fixed to a shaft 30a of the motor 30. Furthermore, a pair of one-way clutches 32A and 32B having different rotation directions are fitted on the rotary drive base 31 with a sufficient gap between the pair of rubber rollers 33A and 33B to be able to contact the rubber roller 18. A pair of rubber rollers 33A, 3A are mounted symmetrically about the shaft 30a.
3B, bolts 34, 34 attached to the rotary drive base 31 are inserted into the one-way clutches 32A, 32B, and attached to the tips of the bolts 34, 34 so as to prevent the bolts 34, 34 from coming off. At this time, the one-way clutch 32A on the left side of the figure allows the counterclockwise rotation and rejects the clockwise rotation,
On the other hand, the one-way clutch 32B on the right side in the figure, which allows rotation in the clockwise direction and rejects rotation in the counterclockwise direction, is fitted inside the pair of rubber rollers 33A, 33B, respectively. Therefore, the directions in which the pair of rubber rollers 33A and 33B are allowed to rotate are set in opposite directions.

Then, as shown in FIGS. 3A to 3C in an enlarged manner, the rotary drive base 31 is attached to the shaft 30a of the motor 30.
Rubber rollers 33A, 33B attached via
Is a rotary shaft 1 that rotatably supports a rotary table 12 as the index table 3 is driven, as described below.
4 is rotatable with respect to a rubber roller 18 attached via a bushing 19 at the lower end thereof, and the rotary table 12 on the index table 3 is stopped at a stage for spin coating and a pair of rubber rollers 33A, 33
When B is in contact with the rubber roller 18, the driving force of the motor 30 is transmitted to the rotary table 12.

First, as shown in FIG. 3A, when the index table 3 is driven in the direction of the spin coating stage, the rotary table 12 provided on the index table 3 is rotatably supported. The rubber roller 18 attached to the lower end of the rotating shaft 14 via a bushing 19 moves from the left side toward the pair of rubber rollers 33A and 33B attached to the shaft 30a of the motor 30 via the rotary drive base 31, and approaches the driving source. Between the pair of rubber rollers 33A and 33B. At this time, the motor 30
Shaft 30a is not rotating, but the rubber roller 33A
Can be rotated counterclockwise by the one-way clutch 32A, while the rubber roller 33B can rotate the one-way clutch 3A.
2B, the rubber roller 18 on the turntable 12 can smoothly enter without causing frictional resistance between the pair of rubber rollers 33A, 33B on the motor 30 side.

Next, as shown in FIG. 3B, the rotary table 12 on the index table 3 stops at the stage for spin coating, and the rubber roller 18 on the rotary table 12 is replaced with a pair of rubber rollers on the motor 30 side. 33A, 33
In a state in which the rotary drive table 31 is in contact with B, the rotary drive table 31 fixed to the shaft 30a of the motor 30 is rotated counterclockwise. At this time, the rubber roller 33B attached to the rotary drive base 31 is
One-way clutch 32 so that it does not rotate counterclockwise
B, the outer periphery of the rubber roller 33B comes into contact with the outer periphery of the rubber roller 18 so that a static friction force is generated, and the shaft 30a of the motor 30 is integrated with the rotary drive base 31.
Rubber rollers 33A, 33B that rotate about
Rubber roller 18 on the rotary table 12 side
Rotates without slipping, so that the driving force of the motor 30 can be reliably transmitted to the rotary table 12 without generating vibration.

Next, as shown in FIG.
When the rotation drive table 31 fixed to the shaft 30a of the motor 30 is stopped from the state in which the rubber roller 18 on the rotation shaft 14 is rotated by the rotation force of the pair of rubber rollers 33A and 33B on the 0 side, the rotation shaft Although the rubber roller 18 on the 14 side tries to rotate counterclockwise continuously due to the inertial force, the rubber roller 33A attached to the rotary drive base 31 is
One-way clutch 32B so that it does not rotate clockwise
, The frictional force generated between the rubber roller 18 and the rubber roller 33A prevents the rubber roller 18 on the rotating shaft 14 from rotating and stops.

Thereafter, the index table 3 is driven, and the rubber roller 18 on the rotary table 12 is driven by the motor 30.
3 between the pair of rubber rollers 33A and 33B on the side of FIG.
It moves to the right as shown in FIG. At this time, as in the case of approaching as described with reference to FIG.

Here, returning to FIG. 1, the upper surface 2 of the base table 2 will be described.
a near the motor 30 serving as a driving source for spin coating, a coating cup 3 serving as a part of the main part of the present invention.
5 is provided with a coating cup supporting means 50 supporting the coating cup 5. At this time, the coating cup 35 is provided corresponding to the disk substrate 13 placed on the rotary table 12 in a state where the index table 3 reaches the stage for spin coating.

First, the coating cup 35 is composed of a coating cup body 36 and a coating cup lid body 37 in which the upper part of the coating cup body 36 is closed.
Are formed in a ring shape (or a substantially donut shape) in a state where they are fitted to each other. In addition, the coating cup 35
Is set slightly larger than the outer diameter of the disk substrate 13 and larger than the outer diameter of the turntable 12. Also, the coating cup 35
In a state where the coating cup body 36 and the coating cup lid 37 are covered with each other, a receiving port 38 is formed in a slit shape and a ring shape in the inner peripheral portion. And the receiving port 38 formed in the inner peripheral part of the coating cup 35 is
As will be described later, the coating liquid C is supplied from the coating liquid supply nozzle 20 onto the rotating disk substrate 13 (FIG. 2).
The excess coating liquid Y (FIG. 2) scattered from the outer peripheral portion of the disk substrate 13 when dripped is received, and the excess coating liquid Y (FIG. 2) entering from the receiving port 38 is temporarily stored in the coating cup body 36. It is designed to be stored.

An excess coating liquid outlet 36b for discharging the excess coating liquid Y (FIG. 2) to the outside is opened at the bottom 36a of the coating cup body 36. Attach the drain 39 for discharging, and use the excess coating liquid Y
(FIG. 2) is applied to the coating cup 35 via the hose 40.
It is discharged to a container 41 installed below. On this occasion,
The installation position of the surplus coating liquid outlet 36 opened at the bottom 36a of the coating cup body 36 is obliquely set in a state where the coating cup 35 is retracted upward from the turntable 12 and the disk substrate 13 by the coating cup support means 50 described later. Excessive coating liquid Y stored in coating cup 35 when tilted
(FIG. 2) is set at the lowest height of the coating cup 35 which is inclined so that it can be discharged by gravity.

Further, in the coating cup 35, a support arm 42 is integrally formed so as to protrude from an outer peripheral portion of the coating cup body 36, and this support arm 42 is supported by a coating cup support means 50 described below.

Next, the coating cup supporting means 50, which is a part of the main part of the present invention, has an upper and lower guide table 51 fixed to the upper surface 2a of the base table 2, and a cylinder 52 is mounted on the upper and lower guide table 51 by air or hydraulic pressure. It is guided so that it can move up and down freely. A lift table 53 is provided on the upper end of the cylinder 52.
A support arm 4 integrally protruding from the outer periphery of the coating cup 35 is mounted on the lift table 53.
2 is supported so as to be rotatable about the rotation shaft 54 as a fulcrum.

At the upper end of the vertical guide table 51, a tilt setting hook table 56 is attached. The tilt setting hook base 56 is provided between the coating cup 35 and the rotating shaft 5.
A hook portion 56a having a “] shape” is formed on the opposite side through the hook 4, and a stopper pin 43 attached to the support arm 42 is engaged along the inside of the hook portion 56 a so as to be vertically movable. .

When the lift table 53 attached to the cylinder 52 is moved upward by a predetermined height, the support arm 4
The stopper pin 43 attached to the hook 2 is tilted and the hook base 5 is set.
6 is regulated by the upper end of the hook portion 56a, so that the coating cup 35 rotates clockwise about the rotation shaft 54, whereby the coating cup 35 is placed above the disk substrate 13 placed on the turntable 12. Shelters while tilting obliquely. The state in which the coating cup 35 is tilted in this manner is a mode that can be taken at the initial stage and at the end of spin coating. At this time, the index table 3 is driven to drive the disk substrate 13 on the rotary table 12 attached to the index table 3. Is moved to a stage for spin coating, or the disk substrate 13 on the turntable 12 after spin coating is moved to the next disk manufacturing process. If the coating cup 35 is tilted at the end of the spin coating, the excess coating liquid Y (FIG. 2) stored in the coating cup 35 drops by gravity in the coating cup 35 in a direction of lower height. The excess coating liquid is reliably discharged from a drain 39 attached to a surplus coating liquid discharge port 36 provided at the lowest height portion of the inclined coating cup 35 into a container 41 via a hose 40.

On the other hand, as shown in FIG. 2, after the disk substrate 13 on the rotary table 12 attached to the index table 3 is moved to a stage for spin coating, the lift table 53 attached to the cylinder 52 is moved downward. Then, the lift table 53 attached to the cylinder 52 is moved down until the receiving port 38 of the coating cup 35 is substantially horizontal along the outer peripheral portion of the disk substrate 13. At this time, the stopper pin 43 attached to the support arm 42 is released from the restriction by the upper end of the hook portion 56a of the tilt setting hook table 56 by the downward movement of the lift table 53.
Rotates counterclockwise about the rotation shaft 54. On this occasion,
The coating cup 35 adjusts the horizontal adjustment bolt 44 so that the horizontal adjustment bolt 44 attached to the support arm 42 comes into contact with a stopper pin 55 attached to the lift table 53 so that the coating cup 35 assumes a substantially horizontal posture.

Then, while the receiving port 38 of the coating cup 35 is substantially horizontal along the outer peripheral portion of the disk substrate 13, the inner peripheral portion of the disk substrate 13 is rotated while slowly rotating the disk substrate 13 on the turntable 12. After the coating liquid C is dropped from above by the coating liquid supply nozzle 20, or after the coating liquid C is dropped at a stage before the stage for spin coating,
When the disk substrate 13 on the turntable 12 is rotated at a high speed, the dropped coating liquid C is radially diffused from the inner peripheral portion to the outer peripheral portion of the disk substrate 13 by the rotational centrifugal force, and the film is formed. At this time, the driving source for rotating the rotary table 12 that has reached the stage for spin coating is the motor 30 attached to the base fixing base 2 as described above. At this time, the disk substrate 13
The surplus coating liquid Y is scattered radially from the outer peripheral portion and flows into the inside through the receiving port 38 of the coating cup 35 and is stored therein.

Thereafter, as described above, the surplus coating liquid Y is reliably discharged to the outside of the coating cup 35 by moving the coating cup 35 upward and tilting the coating cup 35 obliquely.

Next, a process of manufacturing a bonded disc for DVD using the spin coater 1 having the above configuration will be described with reference to FIGS.

FIG. 4 is a diagram for explaining a process of manufacturing a DVD bonded disc using the spin coater according to the present invention, and FIG. 5 is a diagram for explaining a warp angle of the spin-coated bonded disc. (A) shows a case where a general spin coater is used, and (B) shows a case where a spin coater according to the present invention is used.

As shown in FIG. 4, on the index table 3, eight rotary tables 12 are installed on the same circle equally divided into eight circles.
If the motor rotates intermittently in a counterclockwise direction by 5 °, it stops repeatedly for a certain period of time. On the other hand, each process unit 61 to 63, 35, 64 to 66 fixed to the base table 2
However, by operating in the order of the stages S1 to S8 of the index table 3, a bonded disc for DVD is manufactured.

First, in the stage S1, the lower disk substrate 13 is moved by the disk transport means 61 to the rotary table 1.
2

Next, in the stage S2 in which the index table 3 is rotated counterclockwise by 45 °, the lower disk substrate 13 placed on the rotary table 12 is slowly rotated, and the coating liquid is moved by the nozzle moving means 62. After the supply nozzle 20 is moved to the inner peripheral portion of the lower disk substrate 13, the ultraviolet curing resin is dropped from the coating liquid supply nozzle 20 onto the inner peripheral portion of the lower disk substrate 13 for 5 to 6 rotations.

Next, the index table 3 is further added to 45
(4) On the stage S3 rotated in the counterclockwise direction, the upper disk substrate 13 is placed on the lower disk substrate 13 by the disk transport means 62 so as to overlap.

Next, the index table 3 is further stored in 45
ス テ ー ジ In the stage S4 rotated counterclockwise, the upper and lower disc substrates 13 superposed below the inclined coating cup 35 are moved, and then the coating cup 3
5 is lowered substantially horizontally along the upper and lower disk substrates 13, and the rotating table 12 is rotated at a high speed so that the dripped ultraviolet curable resin is moved from the inner peripheral portion to the outer peripheral portion of the disk substrate 13 by rotational centrifugal force. The film is diffused radially toward the film. At this time, the thickness of the ultraviolet curable resin film is set in the range of 0.01 to 0.1 mm by controlling the rotation speed and rotation time of the turntable 12. Then, at the stage when the spin-coating of the UV-cured tree is completed,
The coating cup 35 is retracted while being inclined above the upper and lower disk substrates 13, and at this stage, the excess coating liquid stored in the coating cup 35 is discharged to the outside.

Next, the index table 3 is further added to 45
で は On the stage S5 rotated counterclockwise, the centering means 64 centers the upper and lower disk substrates 13 (center alignment).

Next, the index table 3 is further stored in 45
(4) At the stage S6 rotated counterclockwise, the upper and lower disk substrates 13 are bonded by applying ultraviolet light to the centered upper and lower disk substrates 13 by the ultraviolet curing means 65 to cure the ultraviolet curing resin.

Next, the index table 3 is further added to 45
{After passing through the stage S7 rotated in the counterclockwise direction and further 45 ° in the stage S8 rotated in the counterclockwise direction, the upper and lower disk substrates 13 bonded to each other
By taking out the rotary table 12 from the rotary table 12, the manufacture of the bonded disc for DVD is completed.

In the bonded disc for DVD manufactured in this manner, no vibration occurs and no thermal change occurs, especially during high-speed rotation of spin-coating the ultraviolet curing resin on the disk substrate 13. Absent. When the UV-curable resin is naturally cured immediately after spin-coating the UV-curable resin on the disk substrate 13, the disk substrate 1
3 is not taken out from the rotary table 12, so that the disk substrate 13 can be moved to the ultraviolet curing resin curing step by the next ultraviolet irradiation without exerting an excessive force on the disk substrate 13.
Good results were obtained for the warpage angle, which is an important quality of the bonded disc. FIG. 5 shows the state of this warp angle.
A comparison between the case where a general spin coater is used as shown in FIG. 5A and the case where a spin coater 1 to which the present invention is applied as shown in FIG. It is remarkable that a better warp angle can be obtained when 1 is used. Note that FIGS. 5A and 5B
Shows the results of measurement on 30 bonded discs with two conditions set.

[0055]

According to the spin coater according to the present invention, the receiving port of the coating cup is supported substantially horizontally along the outer peripheral portion of the disk-shaped substrate when the coating liquid is dropped. On the other hand, since the coating cup is tilted obliquely with respect to the horizontal rotating table and the disc substrate at the end of the dropping of the coating liquid, the excess coating liquid stored in the coating cup is dropped by gravity drop to the lowest height portion of the coating cup. Can be surely discharged from the surplus coating liquid discharge port provided in the above.

According to a second aspect of the present invention, a horizontal rotary table on which a disk-shaped substrate is placed is attached to a movable table.
The receiving port of the coating cup was supported substantially horizontally along the outer periphery of the disk-shaped substrate when the coating liquid was dropped, while the coating cup was retracted upward from the horizontal rotary table and the disk substrate when the coating liquid was dropped. Since it is slanted with respect to the state, the surplus coating liquid stored in the coating cup can be reliably discharged from the surplus coating liquid discharge port provided at the lowest height part of the inclined coating cup by gravity drop In addition, the moving table can be moved when the coating cup is inclined obliquely.

[Brief description of the drawings]

FIG. 1 is a partially sectional view for explaining a spin coater according to the present invention.

FIG. 2 is a partial cross-sectional view illustrating a state where a coating liquid is dropped on a rotating disk substrate in the spin coater according to the present invention.

FIG. 3 shows a state in which a rubber roller on the shaft side rotatably supporting the horizontal rotary table provided on the moving table shown in FIGS. 1 and 2 is in contact with and separated from a pair of rubber rollers on the motor side provided on the base table; It is a schematic diagram for explaining a driving state.

FIG. 4 is a diagram for explaining a step of manufacturing a bonded disc for DVD using the spin coater according to the present invention.

5A and 5B are diagrams for explaining a warp angle of a spin-coated bonded disc, wherein FIG. 5A shows a case where a general spin coater is used, and FIG. 5B shows a case where a spin coater according to the present invention is used. FIG.

FIG. 6 is a longitudinal sectional view for explaining a conventional spin coater.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Spin coater, 3 ... Moving table (index table), 12 ... Horizontal rotary table (rotary table), 13
... Disc-shaped substrate (disk substrate), 20 ... Coating liquid supply nozzle, 35 ... Coating cup, 36 ... Coating cup body, 36b ... Excess coating liquid outlet, 38 ... Receiving port, 50 ... Coating cup support means, C ... Coating liquid, Y ... Excess coating liquid.

Claims (5)

[Claims] 1. A horizontal rotating table on which a disk-shaped substrate is mounted and rotated substantially horizontally, and a coating liquid is applied to an inner peripheral portion of the substrate while rotating the substrate mounted on the horizontal rotating table. Coating liquid supply means to be dropped, provided in a ring shape along the outer peripheral portion of the substrate placed on the horizontal rotary table, and from the outer peripheral portion of the substrate when the coating liquid is dropped on the substrate A receiving port for receiving the scattered excess coating liquid is formed in an inner peripheral portion of the substrate so as to face the outer peripheral portion of the substrate, and the coating cup stores the excess coating liquid therein; While supporting the receiving port substantially horizontally along the outer peripheral portion of the substrate, the coating cup is held horizontally at the end of the dropping of the coating liquid. Coating cup support means for supporting the turntable and the substrate at an angle to the substrate; and, when the coating cup is inclined at an angle by the coating cup support means, the excess coating liquid stored in the coating cup. And a surplus coating liquid discharge port provided at the lowest height of the coating cup inclined to be discharged by gravity drop. 2. A horizontal rotating table on which a disk-shaped substrate is placed and which rotates substantially horizontally, a moving table which moves while the horizontal rotating table is mounted, and wherein the moving table is mounted on the horizontal rotating table. A coating liquid supply means for dropping a coating liquid onto an inner peripheral portion of the substrate while rotating the substrate; a ring-shaped member provided along an outer peripheral portion of the substrate placed on the horizontal rotary table; A receiving port for receiving excess coating liquid scattered from the outer peripheral portion of the substrate when the coating liquid is dropped thereon is formed in the inner peripheral portion facing the outer peripheral portion of the substrate, and the excess coating liquid is formed therein. A coating cup to be housed, and a receiving port for the coating cup which is dropped substantially horizontally along an outer peripheral portion of the substrate when the coating liquid is dropped. Coating cup supporting means for supporting the coating cup obliquely while retracting the coating cup upward from the horizontal rotary table and the substrate at the end of dropping of the toning solution; and obliquely holding the coating cup by the coating cup supporting means. And a surplus coating liquid discharge port provided at the lowest height portion of the coating cup which is inclined so that the surplus coating liquid contained in the coating cup is discharged by gravity drop when inclined. Spin coater. 3. The ring-shaped coating cup according to claim 1, wherein the inner diameter of the coating cup is set slightly larger than the outer diameter of the substrate and larger than the outer diameter of the horizontal rotary table. Spin coater. 4. The moving table is moved when the coating cup is inclined.
The spin coater as described. 5. A disk-shaped index table is used for said movable table, and a plurality of said horizontal rotary tables are mounted on said index table at substantially equal intervals along the circumference.
The spin coater according to claim 2, wherein the index table is intermittently rotated in accordance with a manufacturing process of the substrate.