TW579303B - Spin coating method and apparatus, and mask used in the same method and apparatus - Google Patents

Spin coating method and apparatus, and mask used in the same method and apparatus Download PDF

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Publication number
TW579303B
TW579303B TW91108005A TW91108005A TW579303B TW 579303 B TW579303 B TW 579303B TW 91108005 A TW91108005 A TW 91108005A TW 91108005 A TW91108005 A TW 91108005A TW 579303 B TW579303 B TW 579303B
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Taiwan
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mask
disc body
disc
radiation
liquid material
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TW91108005A
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Chinese (zh)
Inventor
Yukio Kaneko
Eisaku Noguchi
Hiroyoshi Mifune
Mamoru Usami
Tomoki Ushita
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Tdk Corp
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Priority claimed from JP2001121378A external-priority patent/JP4002076B2/en
Priority claimed from JP2001121377A external-priority patent/JP4076120B2/en
Application filed by Tdk Corp filed Critical Tdk Corp
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Publication of TW579303B publication Critical patent/TW579303B/en

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Abstract

When effecting film formation on a disc body by spin coating using a radiation-hardenable liquid material, at the time of the spin coating for supplying the radiation-hardenable liquid material to the vicinity of the disc body installed on a spinner for rotating the disc body, rotating the disc body and spreading the liquid material on the disc body by a centrifugal force to thereby form coating film of the liquid material on the surface of the disc body, radiation having the action of hardening the radiation-hardenable liquid material is applied to the disc body before the rotation of the disc body is stopped during the spin coating, thereby reducing the fluidity of the liquid material applied as a coating onto the disc body.

Description

579303 A7 B7 五、發明説明（$ 發明背景 發明領域 (請先閱讀背面之注意事項再填寫本頁) 本發明有關一種藉著使用旋轉塗覆方法以塗佈可輻射 硬化材料至一圓盤體上之方法及裝置。本發明之方法及裝 置係適於製造各種圓碟體，包含C D型碟片之光碟，諸如 雷射碟（C D )、可錄式光碟（C D — R )、及可重複寫 入式光碟（CD - RW) ; DVD型之光碟，諸如唯讀數 位視頻光碟（D V D - R Ο Μ )、可錄式數位視頻光碟（ D V D - R )、可重複寫入式數位視頻光碟（DVD -R w )、及記憶體式數位視頻光碟（D V D - R A Μ )、 及一近來高度發展且以藍光雷射拷貝之碟片；及磁性光碟 ，諸如Μ〇及M D。 本發明進一步有關一種當藉著於光碟之製造期間使用 該旋轉塗覆方法在一圓碟體上施行薄膜成形時所使用之掩 模，及使用該掩模之旋轉塗覆方法與裝置，該光碟包含 CD型碟片之光碟，諸如CD、CD — R、CD — RW; DVD型光碟，諸如DVD — R〇M、DVD — R、 經濟部智慧財產局員工消費合作社印製 DVD - RW、或DVD - RAM、及近來高度發展且以 藍光雷射拷貝之碟片；或磁性光碟，諸如Μ 0及M D。 相關背景技藝 旋轉塗覆係供給一液體材料至一圓碟體之中心附近、 轉動該圓碟體及藉著該旋轉所致之離心力散佈該液體材料 、及在該圓碟體之表面上形成具有均勻厚度之液體材料塗 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -4 - 579303 A7 B7 五、發明説明（含 覆層之技術。旋轉塗覆層廣泛地係用於形成該保護層等， 譬如C D型光碟及D V D型光碟之保護層。 (請先閱讀背面之注意事項再填寫本頁) 在另一方面，近年來以藍光雷射拷貝光碟而爲下一代 之資訊記錄介質之發展業已大幅推進。習知之光碟或 D V D碟片具有聚碳酸酯等之透明基板，及由該透明基板 側穿過該透明基板施行資訊之複製（以及於一記錄型碟片 案例中之記錄），而以該藍光雷射拷貝之碟片由相向於該 基板之側邊施行資訊之記錄及複製。因此，其必需在一記 錄層（或一反射層）上形成一 0 · 1毫米（100微米） 厚度之透明透光層。 經濟部智慧財產局員工消費合作社印製 吾人已提出一種在該碟片上黏著0.1毫米厚度之透 明薄膜當作該透光層之技術，但於一些案例中已發生不便 ，即氣袍進入該薄膜及該碟片之間或在該薄膜中造成波浪 形。將該薄膜切成圓形及使其黏著之步驟亦花費很多時間 及勞力。故其將較方便的是假如以藍光雷射拷貝之碟片之 透光層能藉著旋轉塗覆法所形成，但該習知旋轉塗覆法遭 遇以下之問題，且因此已被認爲難以使用旋轉塗覆技術以 形成用藍光雷射拷貝之碟片透光層。 亦即，當於圓碟體之旋轉塗覆期間，該液體材料係滴 至該圓碟體之中心附近及旋轉該碟片，該液體材料係藉著 離心力以很均勻之薄膜厚度分佈遍及整個碟片。然而，當 該碟片之旋轉停止及該離心力變成零時，由於分佈遍及該 碟片之液體表面張力而發生該薄膜厚度之不均勻性，諸如 接近該圓碟體外圍之塗層膨脹。當所塗佈當作該塗層之液 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -5 - 579303 A7 _ B7 _ 五、發明説明（$ 體材料之黏度變得越高時，這變得特別明顯。 (請先閲讀背面之注意事項再填寫本頁) 這在一些案例中大問題，及譬如於上述以藍色雷射拷 貝之碟片透光薄膜之案例中，除非於一記錄區域中，該誤 差係相對1 0 0微米之薄膜厚度減低至在± 3微米內之誤差 (不均勻性）等級，該碟片之記錄-複製信號準確性係惡 化，但由於上述表面張力所發生之不均勻性有時候大幅超 過之。 亦於前述碟片中，已於其安裝至一碟片驅動裝置上期 間形成一用以中心定位之孔洞，且因爲存在有一於射出成 型期間用以固定沖模之溝槽等，薄膜（層）未形成在一碟 片基板之中心部份上。因此，當在這些碟片上藉著使用旋 轉塗覆技術施行薄膜形成（薄膜塗佈）時，一用以遮蓋該 基板之掩模係附著至其中心部份，以致不能塗佈該碟片， 或由其外部周邊部份而非由前述之溝槽施行塗佈。當需要 更均勻之薄膜塗佈時，提供一用以遮蓋該碟片基板之掩模 ，以致不能在該中心部份施行塗佈。 經濟部智慧財產局員工消費合作社印製 所附圖面之圖9顯示用於該碟片之旋轉塗覆裝置中之 掩模使用實例。圖9係一橫截面圖，其顯示安裝在該旋轉 塗覆裝置之旋轉器上之碟片及放置在那上面之掩模。一旋 轉器平台2 0 2係固定至一散佈軸2 0 0上，該散佈軸係 連接至一馬達（未示出）及藉著該馬達旋轉地驅動。一間 隔裝置2 0 3係固定於該旋轉器平台2 0 2上，且該碟片 2 0 4係放置在那上面。該碟片2 0 4係藉著未示出之機 構真空吸附至於該間隔裝置2 0 3。用以遮蓋該碟片之中 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 7〇1 ' 579303 Α7 Β7 五、發明説明（4 (請先閲讀背面之注意事項再填寫本頁) 心部份之掩模2 0 6係放置在該碟片2 0 4上。在此時， 一設在該旋轉器平台2 0 2之上表面中心部份附近之環形 突出部份2 0 5係裝入該掩模2 0 6之環形溝槽2 0 6 a 中。於旋轉塗覆期間，於該旋轉器平台2 0 2之中心部份 中，經過一路線2 1 0使一空間2 1 2變真空，藉此吸住 該掩模2 0 6及固定之。 於塗佈之案例中，由上面至該掩模之中心部份附近供 給一液體塗佈材料。此後，以高速旋轉該旋轉台，且供給 至該掩模±之塗佈材料係藉著旋轉離心力散佈遍及未以該 掩模覆蓋之碟片部份之整個表面。藉此，該塗佈材料之薄 膜（層）係以一實質上均勻之厚度形成在該碟片之前述部 份之整個表面上。 當中止上述旋轉塗覆製程時，必須釋放該掩模之真空 吸附及必須移去該掩模，但在此時有以下之問題。 經濟部智慧財產局員工消費合作社印製 既然該掩模係於一氣密狀態中真空吸附至該旋轉台 2 ◦ 2，當欲移去該掩模時，其難以僅只藉著真空釋放該 空間2 1 2移去該掩模。因此，於該掩模之移除期間，其 必需經過該路線2 1 0給予該空間2 1 2正壓。然而，在 另一方面’該液體塗佈材料係藉著旋轉塗覆塗佈至該掩模 2 0 6及該碟片2 0 4上，且因此該掩模2 〇 6及該碟片 2 0 4間之邊界部份（於圖9中以字母a所示部份）係亦 覆蓋著該塗佈材料。當於該狀態中時，該正壓係如上面所 述加至該空間2 1 2 ’空氣由此邊界部份逸出，且因此在 該部份中發生該液體塗佈材料之擴散。這可能導致該碟片 本紙張尺度適用中國國家標準（cns ) -7ΐΖ-- 579303 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明説明（弓 品質之降低，及於一些案例中，該碟片可能變成劣等之貨 品。 發明槪要 以上述問題之觀點而言，本發明之目的係提供一旋轉 塗覆方法及裝置，以致當以液體材料、特別是可輻射硬化 液體材料旋轉塗覆一圓碟體時不會發生一薄膜厚度之不均 勻性。 爲了達成上面之目的，本發明之旋轉塗覆方法係一種 供給可輻射硬化液體材料至一安裝在用以旋轉該圓碟體之 旋轉器上之圓碟體中心附近、轉動該圓碟體、及藉著離心 力將液體材料散佈在該圓碟體上，以藉此在該圓碟體之表 面上形成液體材料之塗覆薄膜之旋轉塗覆方法，其特徵爲 在旋轉塗覆期間於旋轉該圓碟體之前，停止將具有硬化該 可輻射硬化液體材料作用之輻射施加至該圓碟體，及減少 在該圓碟體上塗佈成一塗層之液體材料流動性之步驟。 根據此方法，在旋轉塗覆期間於該圓碟體停止旋轉之 前，減少該碟片上之液體材料流動性，藉此縱使停止該圓 碟體之旋轉，其後不會發生由於該液體材料之表面張力所 致塗覆薄膜之膨脹等，因爲該碟片上之塗覆薄膜已硬化至 某種程度及減少其流動性，且因此均勻薄膜之形成係可能 的。 於CD、DVD中亦以藍光雷射等等拷貝一碟片，萬 一其架設於一碟片驅動器上，在此大致上係形成一用以中 I--------^ 辦衣----Ί.--1T------- (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -8 - 79303 A7 B7 五、發明説明（Θ (請先閲讀背面之注意事項再填寫本頁) 心定位之孔隙，及亦有一用以於射出成型期間固定沖模之 溝槽等’且因此無塗覆薄膜形成在該碟片基板之中心部份 上。因此，於本發明之一特點中，上述旋轉塗覆方法尙包 含於塗覆之前接近該圓碟體之中心部份以掩模構件遮蓋一 部份圓碟體之步驟，且該可輻射硬化液體材料係供給至該 掩模構件上，以致當該輻射係在減少該材料流動性之步驟 施加至該圓碟體時，該輻射不能施加至該掩模構件。既然 該輻射未施加至該掩模構件，在該掩模構件上之液體材料 即不會硬化，且可輕易地達成該掩模構件之移除。 於本發明之旋轉塗覆方法中，如硬化以某種程度塗佈 至該圓碟體上當作一塗層之液體材料之暫時性硬化步驟， 其亦可能使用減少該材料流動性之步驟，及此後一旦中止 該圓碟體之旋轉及將該圓碟體由該旋轉器移至一分離地方 ’且將具有硬化該可輻射硬化液體材料作用之輻射施加至 該圓碟體，即進一步執行該主要之硬化步驟，以藉此完全 硬化塗佈當作該圓碟體上之塗層之液體材料。 本發明之旋轉塗覆裝置亦係一種旋轉塗覆裝置，其包 缝濟部智慧財產局員工消費合作社印製 栝： 一旋轉器構造，其用以固持及轉動一圓碟體； 一分配器構造，其用以供給一可輻射硬化液體材料至 藉著該旋轉器構造所固定圓碟體之中心附近；及 輻射施加機構，其用以將具有硬化該可輻射硬化液體 材料作用之輻射施加至藉著該旋轉器構造所固定之圓碟體 -9 - 本紙張尺度適用中國國家標準（CNS ) A4規格（210X：297公釐） 579303 A7 B7 五、發明説明（7) (請先閲讀背面之注意事項再填寫本頁} 其特徵爲在該可輻射硬化液體材料係藉著該分配器構 造供給至藉著該旋轉器構造所固定之圓碟體中心附近之後 ，藉著該旋轉器構造旋轉該圓碟體，藉此該液體材料係散 佈在該圓碟體上且在該圓碟體上形成該液體材料之塗覆薄 膜，其後藉著停止該旋轉器構造使該圓碟體不會旋轉，及 使該圓碟體保持旋轉，操作該輻射施加機構及減少該液體 材料在該圓碟體上之流動性。 爲了使該塗覆薄膜不能如上面所述在接近該圓碟體之 中心形成，本發明之旋轉塗覆裝置可進一步具有用以供給 掩模構件之掩模構件供給機構，用以於固持在該旋轉器構 造上之圓碟體上並接近該圓碟體之中心部份遮蓋一部份圓 碟體，且可設計成使得該分配器構造將該可輻射硬化液體 材料供給至安裝在該圓碟體之掩模構件上，及該輻射未由 該輻射施加機構施加至安裝在該圓碟體上之掩模構件。 經濟部智慧財產局員工消費合作社印製 該輻射施加機構亦能用爲一暫時性硬化輻射施加部份 ，用以由該處分離地將該圓碟體上之可輻射硬化液體材料 之塗覆薄膜硬化至某種程度，一用以完全硬化在該圓碟體 上之可輻射硬化液體材料之塗覆薄膜之主要硬化輻射施加 部份可另外設在該旋轉器構造之外。 雖然該液體材料係稱爲該可輻射硬化液體材料，當然 在此該可輻射硬化性廣泛地意指一液體材料可藉著輻射硬 化之程度，該輻射包含光（包含可見光、紫外線及紅外線 )、電磁波（波長不拘）、X射線、電子束及其它諸如超 音波之震動波。當然，照射以硬化該液體材料之輻射將與 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -10 - 579303 A7 ____ B7 五、發明説明（冷 該液體材料一致。 (請先閲讀背面之注意事項再填寫本頁) 該圓碟體亦不限於雷射唱片之光碟，諸如C D、c D —R、或CD — RW ; DVD型光碟，諸如DVd — ROM、DVD — R 、DVD — RW、或 DVd — ram 、及近來尚度發展且以藍光雷射拷貝之碟片；或磁性光碟 ，g者如Μ ◦及M D，但大致上意指具有一類似碟片形狀者 。本發明可廣泛地藉著旋轉塗覆法將該輻射可硬化材料施 加至該圓碟體。 本發明於其另一特點中提供此一用於該可輻射硬化材 料之硬化方法及裝置，當輻射係施加至一藉著旋轉塗覆法 塗佈至該碟片上之可旋轉硬化材料時，其將使碟片上之每 一點之整合塗佈量一致。 本方法係施加輻射至一塗佈於圓碟體上之可輻射硬化 液體材料之方法，以藉此硬化該液體材料，及更特別的是 一種硬化方法，其特徵爲當旋轉時平直地移動該圓碟體， 及造成其通過一放出該輻射之輻射源之照射區域，以藉此 硬化在該圓碟體上之液體材料。 經濟部智慧財產局員工消費合作社印製 該裝置亦是一種用以硬化一塗佈於圓碟體上之可輻射 硬化液體材料之硬化裝置，其特徵爲藉著用以將輻射施加 至一具有硬化可輻射硬化液體材料作用之預定施加區域之 輻射施加單元，及一用以當轉動該圓碟體及造成其通過該 輻射施加單元之施加區域時平直移動該圓碟體之圓碟體移 動構造。 於上述方法及裝置中，當旋轉時造成該圓碟體通過該 -11 - 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐） 579303 A7 _____Β7 五、發明説明（令 輻射之施加區域，藉此該輻射可均勻地施加至該整個圓碟 Μ[#ί 體。 (請先閲讀背面之注意事項再填寫本頁) 於此裝置中，該圓碟體移動構造亦可包含一滾珠螺桿 、一可沿著該滾珠螺桿之平直軸移動之螺帽、用以固定一 安裝在該螺帽上之碟片之可旋轉主軸、及一用以轉動該主 軸之馬達。 本發明亦提供一藉著使用旋轉塗覆法、該旋轉塗覆裝 置、該硬化方法、及上述硬化裝置所造成之圓碟體。 再者’本發明提供此一旋轉塗覆裝置，以解決上述問 題，及不會於該掩模之移除期間造成該液體塗覆材料於一 掩検及一^碟片間之邊界部份中之擴散，及一^用在該旋轉塗 覆裝置之掩模。 本發明之裝置係一種用以施行旋轉塗覆之裝置，其中 一液體材料係供給至一圓碟體之中心附近，其後旋轉該圓 碟體及藉著一離心力散佈該液體材料，以藉此在該圓碟體 上形成該液體材料之塗覆薄膜，其包括： 一旋轉器構造，其用以固持及轉動該圓碟體； 經濟部智慧財產局員工消費合作社印製 一掩模，其用以掩蔽該圓碟體，以致塗覆薄膜不能形 成在接近該圓碟體中心之一些區域上，該掩模具有一延伸 穿過該處之穿透孔；及 一掩模供給及移去構造，其用以供給該掩模至該圓碟 體上，及由該圓碟體移去該掩模； 其中該旋轉器構造具有一用以真空吸附該掩模之構造 ，且於該圓碟體及該掩模係安裝在該旋轉器構造上之狀態 本紙張尺度適用中國國家標準（CNS ) Α4規格（210 Χ297公釐） 7^2 - 579303 A7 B7 五、發明説明（1)0 中，該構造用以真空吸附該掩模而吸附該掩模之空間經過 該掩模之穿透孔與外在大氣相通。 (請先閲讀背面之注意事項再填寫本頁) 於本發明之旋轉塗覆裝置中，該構造用以於該旋轉器 構造中真空吸附該掩模之吸附空間經過該掩模之穿透孔與 外在大氣相通，因此假如停止將該吸附空間抽成真空，該 吸附空間將在其之後一預定時間中變成等於該大氣壓力。 或藉著在停止將該吸附空間抽成真空之後施加一會兒正壓 ，可使該吸附空間等於該大氣壓力。甚至當施加一會兒正 壓時，既然該吸附空間經過該掩模之孔洞與外在大氣相通 ’一氣流經過該孔洞流出，且因此不會發生該液體塗覆材 料於該掩模及該碟片間之邊界部份中之擴散。假設如上面 所述，造成該吸附空間等於該大氣壓力，該掩模可由該旋 轉器（由該碟片）輕易地移去。 經濟部智慧財產局員工消費合作社印製 於本發明之一具體實施例中，於上述旋轉塗覆裝置中 ’製成該掩模，以便具有一用以遮蓋該圓碟體之碟片部份 、一用以緊抓該掩模而由該碟片部份之中心部份向上延伸 之_柱體部份，且設計該穿透孔以延伸穿過該碟片部份及 該圓柱體部份。 本發明之掩模係一種用於以液體材料旋轉塗覆圓碟體 之裝置中之掩模，該圓碟體安裝在一用以轉動該圓碟體之 旋轉器構造上，且該掩模用於掩蔽該圓碟體，以致在接近 該圓碟體中心之一些區域不能施行塗覆，其特徵爲該掩模 係與設有一用以真空吸附該掩模之構造之旋轉器構造一起 使用，且該掩模係形成有一用以與該構造之吸附空間相通 -13- 本紙張尺度適用中國國家標準（CNS ) M規格（210X297公釐） A7579303 A7 B7 V. Description of the invention ($ Background of the invention (please read the precautions on the back before filling out this page) The present invention relates to a method for coating a radiation-hardenable material onto a disc body by using a spin coating method. Method and device. The method and device of the present invention are suitable for manufacturing various circular disc bodies, including optical discs of CD type, such as laser discs (CD), recordable discs (CD-R), and rewritable CD-ROM (CD-RW); DVD-type discs, such as read-only video discs (DVD-R OM), recordable digital video discs (DVD-R), rewritable digital video discs (DVD) -R w), and memory-type digital video discs (DVD-RA Μ), and recently developed discs that are copied in blue laser light; and magnetic discs such as MO and MD. The present invention further relates to a Focusing on a mask used in thin film formation on a circular disc body using the spin coating method during the manufacture of an optical disc, and a spin coating method and apparatus using the mask, the optical disc includes a CD-type disc, Such as C D, CD — R, CD — RW; DVD-type optical discs, such as DVD — ROM, DVD — R, printed by a consumer cooperative of the Intellectual Property Office of the Ministry of Economic Affairs, DVD-RW, or DVD-RAM, and recently highly developed and Blu-ray laser-copied discs; or magnetic discs, such as M 0 and MD. Related Background Art Spin coating is the supply of a liquid material near the center of a circular disc body, the rotation of the circular disc body, and the rotation Centrifugal force disperses the liquid material, and forms a liquid material with a uniform thickness on the surface of the disc body. The paper size is applicable to China National Standard (CNS) A4 (210X297 mm) -4-579303 A7 B7 V. Description of the invention (Technology with coating. Spin coating is widely used to form the protective layer, such as the protective layer of CD-type discs and DVD-type discs. (Please read the precautions on the back before filling this page) On the other hand, in recent years, the development of the next generation of information recording media using blue laser copy discs has been greatly promoted. Conventional optical discs or DVD discs have a transparent substrate such as polycarbonate, and the transparent substrate The information is copied (and recorded in the case of a recording disc) through the transparent substrate side, and the disc copied with the Blu-ray laser is recorded and copied by the side opposite to the substrate. It must form a transparent layer with a thickness of 0.1 mm (100 microns) on a recording layer (or a reflective layer). Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, I have proposed a method on the disc The technique of adhering a transparent film with a thickness of 0.1 mm is used as the light-transmitting layer, but inconvenience has occurred in some cases, that is, an air robe enters between the film and the disc or causes a wave shape in the film. The steps of cutting the film into a circle and adhering it also take much time and labor. Therefore, it will be more convenient if the light-transmitting layer of the disc copied by blue laser can be formed by the spin coating method, but the conventional spin coating method encounters the following problems, and therefore it has been considered difficult Spin coating technology is used to form a light-transmitting layer of a disc copied with a blue laser. That is, during the spin coating of the disc body, the liquid material is dropped near the center of the disc body and the disc is rotated. The liquid material is distributed throughout the disc with a very uniform film thickness by centrifugal force. sheet. However, when the rotation of the disc stops and the centrifugal force becomes zero, non-uniformities in the thickness of the film occur due to the liquid surface tension distributed throughout the disc, such as swelling of the coating near the periphery of the disc body. When the coated paper is used as the coating liquid, the size of the paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -5-579303 A7 _ B7 _ V. Description of the invention ($ The higher the viscosity of the bulk material (Please read the notes on the back before filling out this page) This is a big problem in some cases, and for example in the case of the light-transmitting film of a disc copied with a blue laser, unless In a recording area, the error is reduced to an error (non-uniformity) level within ± 3 microns compared to a film thickness of 100 microns. The accuracy of the recording-reproducing signal of the disc is deteriorated, but due to the above surface The non-uniformity caused by tension is sometimes greatly exceeded. Also in the aforementioned disc, a hole for center positioning has been formed during its installation on a disc drive, and because of the existence of a hole used during injection molding, The film (layer) is not formed on the center portion of a disc substrate by a groove or the like of a fixed die. Therefore, when film formation (film coating) is performed on these discs by using a spin coating technique, The mask used to cover the substrate is attached to its central portion so that the disc cannot be coated or coated by its outer peripheral portion rather than by the aforementioned grooves. When a more uniform film coating is required At the time, a mask is provided to cover the disc substrate so that coating cannot be performed on the center part. Figure 9 of the drawing printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs shows the use of the disc An example of the use of a mask in a spin coating apparatus. Figure 9 is a cross-sectional view showing a disc mounted on a spinner of the spin coating apparatus and a mask placed thereon. A spinner platform 2 0 The 2 series is fixed to a dispersing shaft 2 0 0, the dispersing shaft is connected to a motor (not shown) and rotationally driven by the motor. A spacer device 2 3 is fixed to the rotator platform 2 0 2 And the disc 204 is placed there. The disc 204 is vacuum-sucked to the spacer device 203 by a mechanism not shown. It is used to cover the paper size of the disc. Applicable to China National Standard (CNS) A4 specification (210X297mm) 7〇1 ' 579303 Α7 Β7 V. Description of the invention (4 (Please read the precautions on the back before filling this page) The mask 2 0 6 of the heart is placed on the disc 2 0. At this time, one The ring-shaped protruding portion 2 0 5 near the center part of the upper surface of the spinner platform 2 0 2 is fitted into the ring-shaped groove 2 0 6 a of the mask 2 06. During the spin coating, the spinner In the central part of the platform 2 02, a space 2 1 2 is vacuumed by a route 2 1 0, thereby holding the mask 2 6 and fixing it. In the case of coating, from the top to the 2 A liquid coating material is supplied near the center portion of the mask. Thereafter, the rotary table is rotated at a high speed, and the coating material supplied to the mask is spread by the rotating centrifugal force across the discs not covered with the mask. Part of the entire surface. Thereby, the film (layer) of the coating material is formed on the entire surface of the aforementioned portion of the disc with a substantially uniform thickness. When the spin coating process is stopped, the vacuum adsorption of the mask must be released and the mask must be removed, but at this time there are the following problems. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Since the mask is vacuum-adsorbed to the rotary table 2 in an air-tight state, it is difficult to release the space by vacuum only when the mask is removed 2 1 2Remove the mask. Therefore, during the removal of the mask, it must pass the route 2 10 to give the space 2 1 2 a positive pressure. However, on the other hand, the liquid coating material is applied to the mask 2 06 and the disc 2 0 4 by spin coating, and thus the mask 2 0 6 and the disc 2 0 The boundary part between the four (the part indicated by the letter a in FIG. 9) is also covered with the coating material. When in this state, the positive pressure is applied to the space 2 1 2 'as described above, and the air escapes from this boundary portion, and therefore diffusion of the liquid coating material occurs in this portion. This may cause the paper size of the disc to be in compliance with the Chinese National Standard (cns) -7ΐZ-- 579303 printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (reduction in bow quality and in some cases, the The disc may become an inferior product. In view of the above problems, an object of the present invention is to provide a spin coating method and apparatus so that a circle is spin-coated with a liquid material, particularly a radiation-hardenable liquid material. In order to achieve the above object, the spin coating method of the present invention is a method for supplying a radiation-hardenable liquid material to a spinner mounted on a disc body to rotate the disc body. Near the center of the disk body, rotating the disk body, and spreading the liquid material on the disk body by centrifugal force, thereby forming a spin coating of a coating film of liquid material on the surface of the disk body A method, characterized in that the application of radiation having the effect of hardening the radiation-hardenable liquid material is stopped before the disc body is rotated during spin coating The disc body, and a step of reducing the fluidity of the liquid material applied as a coating on the disc body. According to this method, during the spin coating, before the disc body stops rotating, the amount of fluid on the disc is reduced. The fluidity of the liquid material, so that even if the rotation of the disc body is stopped, the swelling of the coating film due to the surface tension of the liquid material will not occur, because the coating film on the disc has hardened to a certain level This kind of degree and reduce its fluidity, and therefore the formation of a uniform film is possible. In CD, DVD also copy a disc with Blu-ray laser, etc. In case it is set up on a disc drive, here is roughly The system is used to make I -------- ^ handle clothes ---- Ί .-- 1T ------- (Please read the precautions on the back before filling this page) This paper size Applicable to China National Standard (CNS) A4 specification (210X297mm) -8-79303 A7 B7 V. Description of the invention (Θ (Please read the precautions on the back before filling this page) The pores for cardiac positioning, and there is also a The grooves, etc. of the die are fixed during the injection molding and therefore no coating film is formed on the dish The center portion of the substrate. Therefore, in one feature of the present invention, the above-mentioned spin coating method includes the step of covering a portion of the disk body with a mask member near the center portion of the disk body before coating. And the radiation-hardenable liquid material is supplied to the mask member, so that when the radiation system is applied to the disc body in the step of reducing the fluidity of the material, the radiation cannot be applied to the mask member. Since the The radiation is not applied to the mask member, and the liquid material on the mask member is not hardened, and the removal of the mask member can be easily achieved. In the spin coating method of the present invention, This kind of temporary hardening step is applied to the disc body as a coating liquid material. It may also use a step to reduce the fluidity of the material, and once the rotation of the disc body is stopped and the disc is discontinued. The body is moved to a separate place by the rotator, and radiation having the effect of hardening the radiation-hardenable liquid material is applied to the disc body, that is, the main hardening step is further performed to thereby completely harden Applying a coating of liquid material as the body of the circular disc. The spin coating device of the present invention is also a spin coating device, which is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs of Jibei: a spinner structure for holding and rotating a circular dish body; a dispenser structure, It is used to supply a radiation-hardenable liquid material near the center of the disc body fixed by the rotator structure; and a radiation application mechanism is used to apply radiation having a role of hardening the radiation-hardenable liquid material to The disc body fixed by the rotator structure-9-This paper size is in accordance with Chinese National Standard (CNS) A4 (210X: 297 mm) 579303 A7 B7 V. Description of the invention (7) (Please read the precautions on the back first Refill this page} It is characterized in that after the radiation hardenable liquid material is supplied by the dispenser structure to the vicinity of the center of the disc body fixed by the spinner structure, the disc is rotated by the spinner structure The liquid material is spread on the disc body and a coating film of the liquid material is formed on the disc body, and then the disc body is stopped by stopping the spinner structure. Will rotate and keep the disc body rotating, operate the radiation application mechanism and reduce the fluidity of the liquid material on the disc body. In order to prevent the coating film from approaching the disc body as described above. The center is formed, and the spin coating device of the present invention may further have a mask member supplying mechanism for supplying a mask member for holding on a disc body on the rotator structure and approaching the center portion of the disc body. Partly covers a part of the disc body, and may be designed so that the dispenser structure supplies the radiation-hardenable liquid material to a mask member mounted on the disc body, and the radiation is not applied to the radiation applying mechanism to A mask member mounted on the disc. The radiation application mechanism printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs can also be used as a temporary hardening radiation application part to separate the disc from there. The coating film of the radiation-hardenable liquid material on the body is hardened to a certain degree. A main hardening radiation of the coating film of the radiation-hardenable liquid material that is completely hardened on the disc body. The additional part may be provided outside the rotator structure. Although the liquid material is referred to as the radiation hardenable liquid material, of course, the radiation hardenability broadly means the degree to which a liquid material can be hardened by radiation. The radiation includes light (including visible light, ultraviolet and infrared), electromagnetic waves (regardless of wavelength), X-rays, electron beams and other vibration waves such as ultrasonic waves. Of course, the radiation irradiated to harden the liquid material will be applicable to this paper standard. China National Standard (CNS) A4 specification (210X297 mm) -10-579303 A7 ____ B7 V. Description of the invention (cold the liquid material is the same. (Please read the precautions on the back before filling this page) The disc body is also not Optical discs limited to compact discs, such as CD, CD-R, or CD-RW; DVD-type optical discs, such as DVd-ROM, DVD-R, DVD-RW, or DVd-ram, and recently developed and used Blu-ray Laser-copied discs; or magnetic discs, such as M and MD, but generally means those with a disc-like shape. The present invention can widely apply the radiation hardenable material to the disc body by a spin coating method. The present invention provides, in another feature thereof, a hardening method and device for the radiation hardenable material. When radiation is applied to a spin hardenable material coated on the disc by a spin coating method, It will make the integrated coating amount uniform at every point on the disc. This method is a method of applying radiation to a radiation-hardenable liquid material coated on a disc body, thereby hardening the liquid material, and more particularly a hardening method, characterized in that it moves flatly when rotated The disc body and the liquid material causing it to pass through an irradiation area emitting a radiation source to harden the disc body. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the device is also a hardening device used to harden a radiation-hardenable liquid material coated on a disc body, which is characterized by applying radiation to a hardened Radiation application unit of a predetermined application area where the radiation hardenable liquid material acts, and a disk body moving structure for directly moving the disk body when the disk body is rotated and caused to pass through the application area of the radiation application unit . In the above method and device, the disc body passes the -11 when rotating-this paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) 579303 A7 _____ Β7 5. Description of the invention (to make the application of radiation Area, so that the radiation can be evenly applied to the entire circular disc M [# ί body. (Please read the precautions on the back before filling out this page) In this device, the structure of the circular disc body can also include a ball A screw, a nut movable along a straight axis of the ball screw, a rotatable spindle for fixing a disc mounted on the nut, and a motor for rotating the spindle. The invention also provides By using a spin coating method, the spin coating device, the hardening method, and a disc body caused by the above hardening device. Furthermore, the present invention provides such a spin coating device to solve the above problems, and During the removal of the mask, the liquid coating material is diffused in a boundary portion between a mask and a disc, and a mask used in the spin coating device. The device is a device A spin coating device in which a liquid material is supplied near the center of a circular dish body, and thereafter the circular dish body is rotated and the liquid material is dispersed by a centrifugal force, thereby forming the liquid material on the circular dish body. The coating film includes: a rotator structure for holding and rotating the disc body; a mask printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs for masking the disc body so as to be coated The film cannot be formed on some areas near the center of the disc body, the mask has a penetrating hole extending therethrough, and a mask supply and removal structure for supplying the mask to the disc On the body, and the mask is removed from the disc body; wherein the rotator structure has a structure for vacuum suction of the mask, and the disc body and the mask are mounted on the rotator structure Status This paper size is in accordance with Chinese National Standard (CNS) A4 specification (210 x 297 mm) 7 ^ 2-579303 A7 B7 5. In the description of the invention (1) 0, the structure is used to vacuum adsorb the mask and adsorb the mask Mold space passes through the mask The penetrating hole communicates with the external atmosphere. (Please read the precautions on the back before filling this page.) In the spin coating device of the present invention, the structure is used to vacuum adsorb the mask in the spinner structure. The space communicates with the external atmosphere through the penetration hole of the mask, so if the adsorption space is stopped to be evacuated, the adsorption space will become equal to the atmospheric pressure for a predetermined time thereafter. Or by stopping the After the adsorption space is evacuated, a positive pressure is applied for a while, which can make the adsorption space equal to the atmospheric pressure. Even when a positive pressure is applied for a while, since the adsorption space passes through the holes of the mask and the outside atmosphere, an airflow passes through the holes Outflow, and therefore no diffusion of the liquid coating material in the boundary portion between the mask and the disc occurs. Assuming that the adsorption space is equal to the atmospheric pressure as described above, the mask can be easily removed by the rotator (by the disc). The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed in a specific embodiment of the present invention, and made the mask in the above-mentioned spin coating device so as to have a disc portion for covering the disc body, A cylinder portion extending upward from the central portion of the disc portion to grasp the mask, and the penetrating hole is designed to extend through the disc portion and the cylinder portion. The mask of the present invention is a mask used in a device for spin-coating a disc body with a liquid material, the disc body is mounted on a rotator structure for rotating the disc body, and the mask is used for The masking of the disc body so that coating cannot be performed in some areas near the center of the disc body is characterized in that the mask is used with a rotator structure provided with a structure for vacuum-absorbing the mask, and The mask is formed to communicate with the adsorption space of the structure. 13- This paper size is in accordance with Chinese National Standard (CNS) M specification (210X297 mm) A7

579303 五、發明説明（1)1 之穿透孔，俾能於該圓碟體及該掩模係安裝在該旋轉器構 造上之狀態中以外在大氣吸附該掩模。 製成該掩模，以便具有一用以遮蓋該圓碟體之碟片部 份，及一由該碟片部份之中心部份向上延伸之掩模緊抓圓 柱體部份，且可形成該穿透孔，以便延伸穿過該碟片部份 及該圓柱體部份。 根據本發明另一特點之旋轉塗覆裝置亦包含： 一旋轉器構造，其用以固持及轉動一圓碟體； 一掩模供給及移去構造，其用於供給掩模以掩蔽該圓 碟體，以致在安裝於該旋轉器構造上之圓碟體上接近該圓 碟體中心之一些區域不能施行塗覆，及由該圓碟體移去該 掩模；及 一分配器，其用以於該圓碟體上供給一欲塗佈之液體 材料，當作一塗層； 且其特徵爲該分配器係倂入該掩模供給及移去構造中 ’及在該旋轉器構造上隨同該掩模供給及移去構造前進至 一預定位置及由該預定位置縮回。 於該旋轉塗覆裝置中，該分配器係倂入該掩模供給及 移去構造’及因此其不需要個別提供一用以移動該分配器 之驅動構造，且可使該裝置簡化。再者，用於該分配器之 安裝空間可製成較小，及因此於該裝置中提供一過剩之空 間。 於該旋轉塗覆裝置之一形式中，該掩模供給及移去構 造可設計成具有一掩模移動支臂，用以固定該掩模及該分 裝 ； 訂 . (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -14- 579303 A7 __ B7 五、發明説明（1)2 (請先閲讀背面之注意事項再填寫本頁) 配器之掩模固定機構係安裝在該支臂上；及一用以往復移 動該掩模移動支臂之驅動構造，以致該掩模固定機構及該 分配器可前進至該旋轉器構造上及由該旋轉器構造縮回。 該驅動構造較佳地爲可包含一滾珠螺桿。 本發明亦提供一藉著使用上面所述之旋轉塗覆法及旋 轉塗覆裝置施行塗覆之圓碟體。 圖面簡述 圖1係一平面圖，其顯示本發明一旋轉塗覆裝置具體 實施例之一般結構。 圖2係一局部呈剖面之側視圖，其顯示該旋轉塗覆裝 置之旋轉器部份之基本部份，隨同一安裝在此之碟片及掩 模。 圖3係一側視圖，其顯示一掩模移動支臂之遠側端點 部份’而一分配器係定位在該旋轉塗覆裝置之旋轉器部份 上方。 圖4係一側視圖，其顯示藉著該旋轉塗覆裝置之分配 經濟部智慧財產局員工消費合作社印製 器供給可用紫外線硬化之樹脂至該碟片（掩模）上之方式 〇 圖5 A係一側視圖，其顯示該旋轉塗覆裝置之暫時性 硬化紫外線輻射部份之結構，及顯示一外蓋係於其升高位 置中之狀態。 圖5 B係一側視圖，其顯示該旋轉塗覆裝置之暫時性 硬化紫外線輻射部份之結構，及顯示該外蓋係於其降低位 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -15 - 579303 Μ ____Β7 五、發明説明（1)3 置中之狀態。 圖6係一側視圖，其顯示該旋轉塗覆裝置之主要紫外 線硬化部份之梗槪。 (請先閲讀背面之注意事項再填寫本頁) 圖7顯示該旋轉塗覆裝置之主要紫外線硬化部份之基 本部份之結構，且是由其與圖6形成9 〇度之另一方向所 視之側視圖。 圖8係本發明一掩模具體實施例之橫截面視圖。 圖9說明一掩模於碟片用之旋轉塗覆裝置中之使用實 例’及係放置在一旋轉器上之碟片及掩模之橫截面視圖。 元件對照表 1 :裝置 1 0 :載入一卸載部份 1 1 :載入器部份 1 3 :供給手部 1 3 a :支臂 1 3 b :支臂 經濟部智慧財產局員工消費合作社印製 1 3 c :支臂 1 3 d :軸 1 5 :卸載器 2〇：淸潔器部份 2 2 :旋轉台 2 2 A :供給及卸下位置 2 2 B :運送位置 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -16 - 579303 經濟部智慧財產局員工消費合作社印製 A7 B7五、發明説明（如 2 4 :淸潔器 3〇：位移手形部份 3 1 :位移手部 3 1a .支臂3 1 b :支臂 3 1 c :支臂3 1 d :支臂 4〇：旋轉器部份 4 1 :旋轉器 5〇：掩模供給及卸下部份 5 1 :掩模移動支臂 5 2 :滾珠螺桿 5 5 :儲存器 5 6 :掩模 5 6 a :環形溝槽 5 6 b :圓柱體部份 5 6 c :下碟片部份5 6 d :穿透孔 6 0 :邊緣淸洗部份 6 1 :邊緣淸潔器6 3 :軸 6 5 :刀口 7〇：暫時性硬化紫外線輻射部份 7 1 :主體部份 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -17 - (請先閱讀背面之注意事項再填寫本頁) 579303 A7 B7 五、發明説明（诟 (請先閲讀背面之注意事項再填寫本頁) 7 2 :照射頭部 7 3 :連接圓柱體部份 7 4 :軌道 7 5 :滑動裝置 8 0 :主要之硬化紫外線輻射部份 8〇A :位置 8 1 : U V施加單元 8 2 :紫外線燈泡 8 5 :碟片移動構造 9 0 :薄膜厚度檢查部份 9〇A :位置 9 1 :可移動平台 9 3 :滾珠螺桿單元 9 5 :雷射位移量測計 1〇〇：碟片 1 1 0 :次級貨品卸下部份 1 1 1 :栓銷夾具 經濟部智慧財產局員工消費合作社印製 1 1 1 a :栓銷 1 1 2 :升降器 1 1 5 :栓銷夾具 1 1 5 a :检銷 1 1 6 :升降器 1 5 1 :散佈軸 1 5 2 :旋轉器平台 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -18 - 579303 A7 B7 五、發明説明（负579303 V. Description of the invention (1) The penetrating hole of (1) 1 can absorb the mask in the atmosphere outside the state where the disc body and the mask are mounted on the rotator structure. The mask is made so as to have a disc portion for covering the circular disc body, and a mask extending upward from the center portion of the disc portion to grip the cylindrical portion and form the A penetrating hole so as to extend through the disc portion and the cylindrical portion. The spin coating device according to another feature of the present invention also includes: a rotator structure for holding and rotating a disc body; a mask supplying and removing structure for supplying a mask to cover the disc body So that some areas near the center of the disc body on the disc body mounted on the rotator structure cannot be coated, and the mask is removed from the disc body; and a dispenser for A liquid material to be coated is supplied on the disc body as a coating; and it is characterized in that the dispenser is inserted into the mask supply and removal structure 'and the mask is attached to the rotator structure. The mold supply and removal structure advances to and retracts from a predetermined position. In the spin coating device, the dispenser is incorporated into the mask supply and removal structure 'and therefore it does not need to provide a driving structure for moving the dispenser separately, and the device can be simplified. Furthermore, the installation space for the dispenser can be made smaller, and thus an excess space is provided in the device. In one form of the spin coating device, the mask supply and removal structure may be designed to have a mask moving arm for fixing the mask and the dispensing; order. (Please read the note on the back first Please fill in this page again for details) Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperatives The paper size is applicable to Chinese National Standard (CNS) A4 (210X297 mm) -14- 579303 A7 __ B7 V. Invention Description (1) 2 (Please Read the precautions on the back before filling this page) The mask fixing mechanism of the adapter is installed on the arm; and a driving structure for reciprocating the mask moving arm, so that the mask fixing mechanism and the distribution The rotator can be advanced onto and retracted from the rotator configuration. The driving structure may preferably include a ball screw. The present invention also provides a disc body coated by using the spin coating method and the spin coating apparatus described above. Brief Description of the Drawings Fig. 1 is a plan view showing the general structure of a specific embodiment of a spin coating apparatus according to the present invention. Fig. 2 is a side view, partly in section, showing the essential part of the spinner part of the spin-coating device, along with the disc and mask mounted thereon. Figure 3 is a side view showing a distal end portion of a mask moving arm ' and a dispenser positioned above the spinner portion of the spin coater. Figure 4 is a side view showing the manner in which the UV-curable resin is supplied to the disc (mask) by the consumer cooperative printer of the Intellectual Property Bureau of the Ministry of Economic Affairs of the spin coating device. Figure 5 A A side view showing the structure of the temporarily hardened ultraviolet radiation portion of the spin coating device, and a state in which an outer cover is in its raised position. Fig. 5 B is a side view showing the structure of the temporarily hardened ultraviolet radiation part of the spin coating device, and showing that the outer cover is in its lowered position. The paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) -15-579303 Μ ____ Β7 V. Description of the invention (1) 3 The state in the center. Fig. 6 is a side view showing a stem of a main ultraviolet hardened portion of the spin coating apparatus. (Please read the precautions on the back before filling this page.) Figure 7 shows the structure of the basic part of the main UV-curing part of the spin coating device, and it is formed in another direction of 90 degrees from Figure 6. View from side view. FIG. 8 is a cross-sectional view of a mask embodiment of the present invention. Fig. 9 illustrates a use example of a mask in a spin coating apparatus for a disc and a cross-sectional view of the disc and the mask placed on a spinner. Component comparison table 1: Device 1 0: Load-unload part 1 1: Loader part 1 3: Supply hand 1 3 a: Arm 1 3 b: Arm Consumption Cooperative of Intellectual Property Bureau, Ministry of Economic Affairs System 1 3 c: Arm 1 3 d: Shaft 1 5: Unloader 2 0: Cleaner part 2 2: Rotary table 2 2 A: Supply and unload position 2 2 B: Transport position This paper size applies to China National Standard (CNS) A4 specification (210X 297 mm) -16-579303 Printed by A7 B7, Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (eg 2 4: Detergent 30: Displacement of hand-shaped part 3 1 : Displacement of hand 3 1a. Arm 3 1 b: Arm 3 1 c: Arm 3 1 d: Arm 40: Rotator part 4 1: Rotator 50: Mask supply and removal part 5 1: Mask moving arm 5 2: Ball screw 5 5: Reservoir 5 6: Mask 5 6 a: Ring groove 5 6 b: Cylindrical part 5 6 c: Lower disc part 5 6 d : Penetration hole 6 0: Edge cleaning part 6 1: Edge cleaning device 6 3: Shaft 6 5: Knife edge 70: Temporary hardening ultraviolet radiation part 7 1: Main body part This paper standard applies Chinese national standard (CNS) A4 specifications (210X297 Mm) -17-(Please read the notes on the back before filling this page) 579303 A7 B7 V. Description of the invention (诟 (Please read the notes on the back before filling this page) 7 2: Irradiate the head 7 3: Connecting cylinder part 7 4: rail 75: slide device 80: main hardened ultraviolet radiation part 80A: position 8 1: UV applying unit 8 2: ultraviolet light bulb 8 5: disc moving structure 9 0: Film thickness inspection part 90A: Position 9 1: Moveable platform 9 3: Ball screw unit 95 5: Laser displacement measuring instrument 100: Disc 1 1 0: Secondary goods removal part 1 1 1: Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 1 1 1 a: Locked Pin 1 1 2: Lifter 1 1 5: Locked Pin 1 1 5 a: Checked Pin 1 1 6: Lifter 1 5 1: Spreading shaft 1 5 2: Rotator platform This paper size is applicable to China National Standard (CNS) A4 (210X297 mm) -18-579303 A7 B7 V. Description of the invention (negative

份 部置 出裝 突隔 形間 器 環形盤配嘴 : 環 卡分噴 ra·······♦ 2 3 4 6 7 5 5 5 5 5 IX IX IX IX IX 經濟部智慧財產局員工消費合作社印製Partially placed out of the annular disk with protruding compartments: ring card split spray ra ······ ♦ 2 3 4 6 7 5 5 5 5 5 IX IX IX IX IX Intellectual Property Bureau of the Ministry of Economic Affairs employee consumption Printed by a cooperative

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五、發明説明（1)7 1 8 2 :主軸單元 1 8 3 :主軸 1 8 4 :伺服馬達 (請先閲讀背面之注意事項再填寫本頁} 1 8 5 :聯軸節 1 8 6 :外殼 1 8 7 :平板 2 0 0 :散佈軸 2 0 2 ··旋轉器平台 2 0 3 :間隔裝置 2 〇 4 :碟片 2 0 5 :突出部份 2 0 6 :掩模 2 0 6 a :溝槽 2 1〇：路線 2 1 2 :空間 較佳具體實施例之敘述 經濟部智慧財產局員工消費合作社印製 下文將參考各圖面敘述本發明之一較佳具體實施例。 圖1係用於光碟之旋轉塗覆裝置之平面圖，其爲本發 明之一具體實施例。該旋轉塗覆裝置係一種適用於形成一 以藍光雷射拷貝碟片之透光層之裝置，該碟片是下一代之 碟片。 一專門用於複製而以藍光雷射拷貝之碟片係藉著在一 聚碳酸酯基板上形成銘之反射薄膜所製成，該基板具有 •20- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 579303 A7 B7 五、發明説明（1)8 1 2 〇毫米之直徑及1 _ 1毫米之厚度，且藉著該濺鍍方 (請先閲讀背面之注意事項再填寫本頁) 法形成有一資訊凹坑，及以可用光線（U V，亦即紫外線 )硬化而當作一可輻射硬化材料之樹脂旋轉塗覆其表面， 以藉此形成一具有1 0 0微米厚度之透光層。本具體實施 例之裝置係一種用以施行該透光層之旋轉塗覆之裝置。 該旋轉塗覆裝置1具有以下各部份：一載入-卸載部 份1 0，其用以由外側供給一欲接受塗覆之碟片，及將遭 受該塗層處理之碟片由該裝置搭載至外側；一淸潔器部份 2 0，其用以在由該載入-卸載部份所供給碟片之表面上 移去諸如灰塵之任何外來物質，一位移手形部份3 0，其 用以於該裝置中之各不同部份之間施行該碟片之同步移動 經濟部智慧財產局員工消費合作社印製 ;一旋轉器部份4 0，其用以轉動該碟片以施行一樹脂層 之旋轉塗覆；一掩模供給及卸下部份5 0，其用以供給及 移去一掩模，該掩模於該旋轉塗覆期間遮蓋放在該旋轉器 部份上之碟片之中心部份；一邊緣淸洗部份6 0，其用以 於該塗覆期間移去任何由該碟片之外部周邊滿溢之過量樹 脂材料；一暫時性硬化紫外線輻射部份7 0，其用以於該 旋轉塗覆期間在該旋轉器上暫時性硬化塗佈至該碟片之樹 脂層表面；一主要之硬化紫外線輻射部份8 〇，其用以主 要硬化塗佈至該碟片之樹脂層；一薄膜厚度檢查部份9 0 ’其用以檢査形成在該碟片上之樹脂層之薄膜厚度；及一 次級貨品卸下部份1 1 〇，其用以卸下任何於該樹脂層之 形成中爲次級品之碟片。 下文將沿著處理之流程接連敘述上述各部份之操作細 -21 - 本紙張尺度適用中國國家檩準（CNS ) A4規格（210X297公釐） 579303 A7 B7 五、發明説明（1)9 節。 (請先閱讀背面之注意事項再填寫本頁) 該載入-卸載部份1 0之載入器部份1 1具有一栓銷 夾具1 1 1 ，其用以固定複數將在其堆疊狀態中遭受塗覆 之碟片。這些碟片係以插入其中心孔洞之栓銷夾具1 1 1 之栓銷1 1 1 a固定。一間隔裝置係插入固持在該栓銷夾 具1 1 1上之鄰接碟片之間，以藉此使鄰接之碟片彼此隔 開。一用以升高及降低該碟片堆疊之升降器1 1 2係設在 該堆疊之碟片下方。藉著該升降器1 1 2施行水平高度之 調整，以致該堆疊之最上方碟片可採取一預定之供給高度 位置。 該載入-卸載部份亦具有一供給手部1 3。該供給手 部1 3具有三隻在相等間隔下徑向地延伸之支臂（亦即每 間隔1 2 0度）。一藉著真空吸附等之使用而用以吸附及 釋放該碟片之碟片拾取構造係設在每一支臂遠側端點之底 側上。設計該供給手部1 3以在一裝置控制部份（未示出 )之預定控制下繞著其軸1 3 d移動。藉著該供給手部 1 3之一支臂1 3 a拾取該載入器1 1之栓銷夾具1 1 1 經濟部智慧財產局員工消費合作社印製 中之最上方碟片，及將該碟片移送至一在該淸潔器部份之 旋轉台2 2上之供給及卸下位置2 2 A。在此時’ 一處理 之碟片可藉著另一支臂1 3 b由該旋轉台2 2上之位置 2 2 A移送至該卸載器部份之栓銷夾具1 1 5上。又另一 支臂1 3 c係用以位移插入鄰接碟片之間之間隔裝置’該 碟片係在該載入器部份之栓銷夾具1 1 1堆疊至該卸載器 部份之栓銷夾具1 1 5上.。 -22- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X29?公釐） 579303 A7 B7 五、發明説明（龙 上述供給手部之操作細節係敘述於本申請人之日本專 利申請案第1 1 一 2 8 9 2 6 7號中。 〈靖先閑讀背面之注意事項再填寫本頁) 位移至該淸潔器部份2 0之旋轉台2 2上之碟片進入 一淸潔器2 4，同時藉著該旋轉台之順時針方向旋轉停靠 在該旋轉台上。該淸潔器2 4係具有一用以將淸潔空氣吹 至該碟片表面之吹風機，及一用以吸附諸如由來自該吹風 機之空氣所吹掉之灰塵等微粒之真空吸附裝置。最好可設 計成能控制該旋轉台之轉動速度，以致當該碟片係在該淸 潔器2 4中移動時該轉動速度可較慢，及可有充分之時間 施行該碟片之淸洗。亦可設計成能進一步延長該淸洗時間 ，就在該碟片已經進入該淸潔器2 4處一旦在一時間點停 止該旋轉台2 2之旋轉，及使得該碟片停留於該淸潔器 2 4中達一預定時間，其後重新恢復該旋轉。 雖然在本具體實施例中，爲了充分施行該碟片之清洗 ，以不同速度控制用以運送該碟片之旋轉台2 2 ，以藉此 延長該碟片停留在該淸潔器2 4中之時間，假如不必要時 ，該旋轉台可設計成以不變之速度旋轉。 經濟部智慧財產局員工消費合作社印製 當該碟片通過該淸潔器2 4及抵達一在該旋轉台2 2 上之運送位置2 2 B時（亦即由該供給及卸下位置2 2 A 旋轉1 8 0度之位置），該碟片係藉著該位移手形部份 3〇之位移手部3 1移送至該旋轉器部份。 該位移手部3 1之結構係類似於前述供給手部1 3， 但對照於具有三隻支臂之供給手部1 3，該位移手部3 1 具有四隻在相等間隔下徑向地延伸之支臂3 1 a ，3 1 b 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 「23 - &quot; 一 579303 A7 B7 五、發明説明（勿 (請先閱讀背面之注意事項再填寫本頁) ，3 1 c及3 1 d (亦即每間隔9 0度）。一藉著真空吸 附等之使用而用以吸附及釋放該碟片之碟片拾取構造係設 在每一支臂遠側端點之底側上。該位移手部3 1係設計成 在該裝置控制部份之控制下繞著其軸（未示出）移動。 該位移手部3 1藉著該四隻支臂3 1 a - 3 1 d同時 在該裝置之各不同部份之間施行該碟片之移動。圖1所示 狀態顯示該位移手部3 1之待命位置。藉著由此狀態順時 針方向旋轉該位移手部4 5度，該支臂3 1 a ，3 1 b， 經濟部智慧財產局員工消費合作社印製 3 1 c及3 1 d採取各處位置，其中他們能分別拾取位在 該淸潔器部份、該旋轉器部份、該主要之硬化紫外線輻射 部份、及該薄膜厚度檢查部份之碟片。於那些位置中，該 各個支臂藉著真空吸附拾取這些碟片。此後，該位移手部 3 1係以逆時針方向旋轉9 0度。藉此，位在該淸潔器部 份之碟片、位在該旋轉器部份之碟片、位在該主要之硬化 紫外線輻射部份之碟片、及位在該薄膜厚度檢查部份之碟 片係分別同時移至該旋轉器部份、該主要之硬化紫外線輻 射部份、該薄膜厚度檢查部份、及該淸潔器部份，且於該 各個位置中，各支臂釋放這些碟片。以此方式，藉著該位 移手部3 1施行該碟片於各個位置間之同時移動。 由該淸潔器部份2 〇位移至該旋轉器部份4 0之碟片 係在此施行旋轉塗覆。如所熟知，不只於一以藍光雷射拷 貝之碟片中，但大致上於光碟中，一於該碟片安裝至一碟 片驅動裝置期間用以中心定位之孔洞（1 5 Φ )係形成在該 碟片之中心，及在此亦有一於射出成型期間用以固定沖模 ^氏張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 「24 - ~ 579303 A7 B7 五、發明説明（衾 (請先閱讀背面之注意事項再填寫本頁} 之溝槽等，且因此塗覆薄膜（層）不會形成在一碟片基板 之中心部份，及該基板事實上係保持在該部份上。據此， 萬〜又藉著本裝置施行旋轉塗覆，附著一中心掩模當作一 用以遮蓋該碟片之中心區域之掩模構件，以防止在該區域 i形成透光樹脂薄膜。 圖2係一局部呈剖面之側視圖，其顯示該旋轉器部份 4 0之基本部份’隨同安裝在此之碟片及掩模。參考圖2 ’在此顯示該旋轉器部份4 0之旋轉器4 1及一放置在該 旋轉器4 1上之碟片1 0 0，及放置在那上面之另一掩模 5 6。更特疋g之’該旋轉器具有一連接至未示出旋轉式 驅動源（馬達）之散佈軸1 5 1 ，及可在高速下繞著一垂 直軸旋轉，且一旋轉器平台1 5 2係固定至其上方部份。 該旋轉器平台1 5 2之上方部份實質上係製成一與該碟片 1 〇 〇有相同平直徑之碟片形狀。 經濟部智慧財產局員工消費合作社印製 本具體實施例中所使用之掩模係於圖8中顯示爲一橫 截面視圖。該掩模5 6具有一用以遮蓋該碟片中心部份之 下碟片部份5 6 c ，及一由該下碟片部份5 6 c之中心向 上延伸之上圓柱體部份5 6 b。一環形溝槽5 6 a係形成 在該下碟片部份5 6 c之底側。一穿透孔5 6 d係形成穿 過該上圓柱體部份5 6 b及該下碟片部份5 6 c之中心。 一環形突出部份1 5 2 a係設在該旋轉器平台1 5 2 之上表面之中心部份上。該環形突出部份1 5 2 a之外徑 係具有一尺寸，以致其與該碟片中心孔洞之內徑呈裝配咬 合之關係，且藉著該環形突出部份1 5 2 a定位及集中安 -25- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 579303 A7 B7 五、發明説明（本 (請先閲讀背面之注意事項再填寫本I) 衣在自亥&amp;轉窃上之碟片1 〇 〇。該環形突出部份1 5 2 a 亦裝配於一形成在該掩模5 6底側之環形溝槽5 6 a中及 定位該掩模。在該旋轉器平台之上表面上且緊接該環形突 出部份1 5 2 a之外側，一環形間隔裝置1 5 3係固定至 曰亥&amp;轉器平台1 5 2及係固定至該散佈軸1 5 1。當該碟 片1 0 0係安裝在該旋轉器平台1 5 2上時，藉著該間隔 裝置1 5 3於其內部周邊部份支撐該碟片1 〇 〇。亦即該 碟片1 0 0之大部份及該旋轉器平台1 5 2藉著該間隔裝 置彼此隔開一間隙S。 藉著一設在該旋轉器平台上之真空吸附構造吸附及固 定放置在該旋轉器平台上之碟片1 0 〇及掩模5 6。彼此 獨立地進行該碟片1 0 0之吸附及該掩模5 6之吸附在該 旋轉器平台上。換句話說，於該旋轉器中提供二獨立之真 空路線，以致可彼此獨立地控制個別之吸附作用。稍後將 參考圖2敘述用以吸附該碟片及該掩模之構造之細節。二 獨立之真空路線，亦即於該散佈軸1 5 1中提供一碟片吸 附真空路線1 6 0及一掩模吸附真空路線1 6 5。 經濟部智慧財產局員工消費合作社印製 首先將敘述該碟片之吸附。該碟片吸附真空路線 1 6 0經過第一鑽孔1 6 1與一形成在該散佈軸1 5 1中 之環形空間1 6 2相通。該環形空間1 6 2係一圍繞著該 散佈軸之環形空間，其界定在三者、亦即該旋轉器平台 1 5 2、該散佈軸1 5 1、及一附著至該旋轉器平台之下 方部份之包圍構件1 5 8之間。該環形空間1 6 2經過該 間隔裝置1 5 3、經過由該環形空間1 6 2向上地進入該 -26- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 579303 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明説明（灰 旋轉平台所形成之第二鑽孔1 6 3與形成在該旋轉器平台 1 5 2之上方部份中之第三鑽孔1 6 4相通。經由上述之 路線，該碟片吸附真空路線1 6 0與形成在該間隔裝置 1 5 3中之第三鑽孔相通，且因此藉著將該碟片吸附真空 路線1 6 0抽成真空，該碟片1 〇 〇可吸附至該間隔裝置 1 5 3。雖然在圖2只有顯示二鑽孔，亦即該第二鑽孔 1 6 3及該第三鑽孔1 6 4，實際上該鑽孔係以9 0度間 隔設在四處位置。然而，該吸附通孔之數目不限於此，但 可合適地增減，直至可有效地施行吸附作用。 現在將敘述該掩模之吸附作用。該掩模吸附真空路線 1 6 5經過橫側地形成在該散佈軸1 5 1中之第四鑽孔 1 6 6與一於螺栓1 6 7中之垂直孔洞1 6 7 a相通。該 螺栓1 6 7係用以將該旋轉器平台1 5 2固定至該散佈軸 1 5 1。g亥检1 6 7中之垂直孔洞1 6 7 a通至該螺检 之上方部份，及因此該掩模吸附真空路線1 6 5與一正好 在該掩模下方之空間1 6 8相通。據此，假如該掩模吸附 真空路線1 6 5係抽成真空，可使正好在該掩模下方之吸 附空間1 6 8之壓力降低及可吸附該掩模。 以此方式，能分別藉著分開之真空路線1 6 〇及 1 6 5彼此獨立地控制該掩模之吸附及該碟片之吸附。 藉著該掩模供給及卸載器部份5 0在該旋轉器上施行 該中心掩模5 6之供給至該碟片1 〇 〇及由該碟片丨〇 〇 移除。該掩模供給及卸載器部份5 0包含一可繞著其中心 旋轉之類似碟片形之掩模儲存器5 5，在該掩模儲存器上 裝 ： 訂 . (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） •27· 579303 A7 B7 五、發明説明（龙 放置成雙圓形配置之複數掩模5 6 (於圖1之具體實施例 (請先閲讀背面之注意事項再填寫本頁) 中合計顯示2 4個掩模），一具有用以緊抓該掩模之掩模 卡盤之掩模移動支臂5 1 ，一用以於該掩模儲存器5 5及 該旋轉器4 0之間往復移動該掩模移動支臂5 1之滾珠螺 桿5 2等。一用以供給塗覆材料（可用以形成透光薄膜之 光硬化樹脂）至談碟片上之分配器係一*體女裝在該掩模移 動支臂上。 經濟部智慧財產局員工消費合作社印製 圖3顯示位在該旋轉器4 0上方之掩模移動支臂5 1 之遠側端點部份結構。該掩模移動支臂5 1之遠側端點部 份係具有一用以在其上圓柱體部份5 6 b緊抓該掩模5 6 之卡盤1 5 4，及一用以供給該可光硬化樹脂至該碟片之 分配器1 5 6。既然該分配器1 5 6隨同該卡盤1 5 4係 設在該掩模移動支臂上，該分配器係以藉著該卡盤1 5 4 供給該掩模至該碟片上之操作同時前進至該碟片上。因此 其不必要分開地提供一用以來回地移動該分配器之驅動源 。藉著一未示出之氣缸驅動該卡盤1 5 4及該分配器 1 5 6，及可當作一單元般於一大體上垂直之方向中移動 ，藉以使他們接近該旋轉器平台上之碟片1 0 0。 該卡盤1 5 4具有二支能藉著該氣缸之驅動而打開及 關閉之卡盤爪，及能夠於該卡盤爪之間挾住/釋放該掩模 5 6之上圓柱體部份5 6 b。 在此將敘述該掩模供給及卸載部份之操作。首先，在 該掩模移動支臂5 1之遠側端點部份藉著該卡盤1 5 4由 該掩模儲存器5 5抓握及拿起一掩模5 6之上圓柱體部份 本紙張尺度適用中國國家標準（CNS ) A4規格（210Χ297公釐） :28 _ 579303 A7 __ B7 五、發明説明（灰 (請先閲讀背面之注意事項再填寫本頁) 5 6 b。藉著該掩模移動支臂沿著該滾珠螺桿5 2之線性 移動及旋轉該掩模儲存器之組合，該卡盤1 5 4能拾取在 該掩模儲存器5 5上之任何掩模5 6。在拿起該掩模之後 ，驅動該滾珠螺桿5 2，以藉此將該掩模移動支臂移動至 該旋轉器部份4 0上，且使得藉著該卡盤1 5 4所固定之 掩模之中心移至一與該旋轉器平台之中心對齊之位置。隨 後’該卡盤1 5 4及該分配器1 5 6係當作一單元降低， 且該掩模5 6係放置在該碟片1 〇 〇上及鬆開該卡盤 15 4。 在該掩模5 6已放置在該碟片1 〇 〇上之後，由該掩 模吸附真空路線1 6 5形成真空，以藉此吸附該掩模。在 此時，該掩模吸附空間1 6 8 (圖2 )經過該掩模5 6之 穿透孔5 6 d與該裝置外側之大氣相通，亦即打通至該大 氣。然而，只要該掩模吸附真空路線1 6 5係抽成真空， 該空間1 6 8係保持在比該大氣壓力較低之壓力，且因此 該掩模係吸附至該碟片上。 經濟部智慧財產局員工消費合作社印製 於此狀態中，於其液相中之可光硬化樹脂係在該分配 器1 5 6之遠側端點經過一噴嘴1 5 7供給至安裝在該碟 片上之掩模上。圖4顯示該可光硬化樹脂流出之方式。當 達成可光硬化樹脂之一預定數量之供給時，升高具有該分 配器1 5 6及該卡盤1 5 4之掩模移動支臂5 1之遠側端 ^點部份，且驅動該滾珠螺桿5 2，以藉此由該旋轉器4 0 縮回該掩模移動支臂5 1。 在縮回該掩模移動支臂5 1之後（或之前或當時）， 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） _ 29 - 579303 A7 B7 五、發明説明（灰 (請先閱讀背面之注意事項再填寫本頁) 該旋轉器平台1 5 2係以高速旋轉，藉以施行該旋轉塗覆 之操作，亦即供給至該中心部份之可光硬化樹脂實質上係 藉著該旋轉之離心力一致地分佈在該碟片之整個表面上。 在藉著該旋轉器平台之旋轉開始旋轉塗覆及一實質上 均勻薄膜厚度之樹脂層係形成在該碟片上之後，當一預定 時間消逝時，藉著該邊緣淸洗部份6 0之邊緣淸潔器6 1 施行該邊緣淸洗，用以剝除滿溢至該碟片之外周邊部份之 任何樹脂。該邊緣淸潔器6 1係可於該裝置之水平面中繞 著一軸6 3移動，且附著至該邊緣淸潔器6 1之一端點之 刀口 6 5藉著該邊緣淸潔器之來回搖擺移動接近該碟片之 外周邊表面，及剝除由該碟片外圍滿溢之任何可光硬化樹 脂。 經濟部智慧財產局員工消費合作社印製 在此碟片邊緣淸洗操作之後，藉著該暫時性硬化紫外 線輻射部份施行該可光硬化樹脂之暫時性硬化。藉著旋轉 塗覆法將樹脂薄膜均勻地形成在該碟片之表面上，當該旋 轉停止時’由於該液體樹脂之表面張力而使其薄膜厚度損 失其均勻性，且特定言之，該外周邊部份之不均勻性發生 腫大作用。亦即該樹脂之黏度越高，該薄膜厚度之不均勻 性變成越大。在本發明中，爲防止此問題，藉著該暫時性 硬化紫外線輻射部份施加紫外線，而在旋轉塗覆之後不會 ί爭止該旋轉器之旋轉，藉此施行該樹脂層之暫時性硬化。 現在將參考圖5 Α及5 Β敘述該暫時性硬化紫外線輻 射ρβ份7 〇之細節。圖5 A及5 B係該暫時性硬化紫外線 車畐射部份之側視圖，及分別顯示一將稍後敘述之照射頭蓋 - 30- 本紙張尺度適用中國國家標準（CNS ) a4規格（210X297公釐） 579303 A7 B7 五、發明説明（參 (請先閲讀背面之注意事項再填寫本頁) 已升®之狀態，及該照射頭蓋已降低之狀態。該暫時性硬 化紫外線輻射部份包含一主體部份7 1、一照射頭部7 2 、及一用以將該主體部份7 1及該照射頭部7 2在一起連 接之連接圓柱體部份7 3。一當作紫外線光源之超高壓水 銀燈（未示出）係提供於該主體部份中。該超高壓水銀燈 放射一包含能夠硬化該可用紫外線硬化樹脂之紫外線區域 (U V )波長之光線。一聚光及運送之光學系統（未示出 )係進一步安裝在該主體部份7 1中，及凝聚來自該超高 壓水銀燈之U V光，及當作一紫外線光束運送之且行進朝 向該連接之圓柱體部份7 3。該連接之圓柱體部份7 3係 一中空之圓柱體構件，及該U V光束通過該連接之圓柱體 部份及進入該照射頭部7 2。 該照射頭部7 2包含一在其中具有反射板1 7 1 a之 反射部份1 7 1 ，及由該連接之圓柱體部份使入射之紫外 經濟部智慧財產局員工消費合作社印製 -線光束偏向9 0度及使其反射往下。以一方正之外蓋 1 7 2覆蓋著該反射部份1 7 1。該外蓋1 7 2係固定至 一可在軌道7 4上垂直移動之滑動裝置7 5，該軌道固定 至該主體部份7 1 ，及該外蓋係可與該滑動裝置7 5作垂 直移動。驅動該滑動裝置7 5以藉著一氣缸作垂直移動。 能夠直接定位該滑動裝置7 5之避震器1 7 7及1 7 8係 分別設在該滑動裝置7 5之移動範圍之上端及下端。 於該碟片之運送進出該旋轉器部份4 0期間、於該掩 模之供給至安裝在該旋轉器部份中之碟片及由該碟片 1 0 0取出期間、及於該可光硬化樹脂藉著該分配器 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） _ 31 _ 579303 A7 B7 五、發明説明（念 (請先閱讀背面之注意事項再填寫本頁) 1 5 6供給至該掩模上期間，該外蓋1 7 2係在其移動範 圍之上端位於其縮回位置，亦即其升高位置（圖5 A中所 示狀態），以致不會妨礙這些操作。只有當藉著旋轉塗覆 至安裝在該旋轉器部份4 0中之碟片1 0 0所塗佈之可光 硬化樹脂層之暫時性硬化時，其係移至其降低之位置（圖 5 B中所示狀態）。施行該暫時性硬化之時機係緊接在如 上面所述者之後，已施行該液體可光硬化樹脂之旋轉塗覆 及已藉著該邊緣淸潔器部份施行該邊緣淸潔。 經濟部智慧財產局員工消費合作社印製 於該外蓋1 7 2之下部彼此同心地提供一圓柱形外周 邊外蓋1 7 3及一圓柱形內周邊外蓋1 7 4。其設計成使 得當降低該外蓋1 7 2時，該內周邊外蓋1 7 4之中心及 該碟片1 0 0在該旋轉器平台1 5 2上之中心係互相對齊 。當該外蓋1 7 2係於其降低之位置且該暫時性硬化紫外 線係施加至該碟片時，藉著該照射頭之反射板1 7 1 a往 下反射之紫外線光束通過於該外周邊外蓋1 7 3及該內周 邊外蓋間之環形空間，及往下浮現當作具有一環形照明區 域之照明光。設計該環形照明區域之外徑，以實質上與該 碟片之外徑一致，且設計其內徑，以實質上與該掩模之外 徑一致。如此’該紫外線光束之照射區域實質上與該整個 外在碟片一致。 以上述之結構’藉著該暫時性硬化紫外線輻射部份之 紫外線未施加至放置在該碟片上之掩模。於旋轉塗覆期間 ’該液體可光硬化樹脂係滴在該掩模上，及因此當該紫外^ 線係施加至該掩模時，在該掩模上及於該掩模及該碟片間 32- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公餐） 579303 A7 _B7 五、發明説明（龙 (請先閲讀背面之注意事項再填寫本頁) 之邊界部份中之樹脂係硬化，且該掩模之移除變得困難。 爲避免於此，設計使該紫外線不會施加至該掩模部份。如 上述藉著該外周邊外蓋及該內周邊外蓋提供一環形照明區 域之技術係不受限制的’但亦可採納用以藉著一些方法防 止該紫外線施加至該掩模之其他機構。 藉著該暫時性紫外線輻射部份所施加之U V係用以防 止塗在該碟片上之可光硬化樹脂層由於其表面張力而變得 具有不均勻之薄膜厚度，且因此可僅只一半硬化該樹脂層 及減少該材料之流動性至不會由於該表面張力發生該薄膜 厚度之不均勻性之範圍。依照施加當作該碟片上之塗層之 樹脂種類及薄膜厚度適合地決定用於該目的之照射強度及 照射時間。 經濟部智慧財產局員工消費合作社印製 在已施加該暫時性硬化紫外線之後停止該旋轉器之旋 轉。隨後釋放該掩模5 6之真空吸附。本發明之掩模5 6 具有一穿透孔5 6 d，且因此假如在停止將該掩模吸附真 空路線1 6 5抽成真空之後經過某一段時間，正好在該掩 模下方之吸附空間1 6 8壓力變成等於該大氣壓力，及因 此其變成可能移去該掩模5 6 d而不需施加正壓。另一選 擇爲，可設計成使得在停止將該掩模吸附真空路線1 6 5 抽成真空之後，經過該真空路線1 6 5僅只施加一會兒正 壓。於此案例中，既然該掩模5 6係形成有一穿透孔 5 6 d，即使當正壓係施加至該吸附空間1 6 8，一氣流 經過該穿透孔5 6 d排至外側，且因此不會於該掩模及該 碟片間之邊界區域中發生該液體材料之擴散問題。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） _ 33 - 579303 五、發明説明（含1 在釋放該掩模之吸附之後，藉著該掩模移動支臂5工 由該碟片100拾取該掩模56，且移送至該掩模儲存器 5 5。再者’ f睪放該碟片1 ◦ 〇在該旋轉器平台丄5 2上 之真空吸附，及藉著該位移手形部份3 〇之支臂3丨b拾 取該碟片及移至該主要硬化紫外線輻射部份8 〇之位置 8 〇 A。 該主要之硬化紫外線輻射部份8 〇具有一用以施加紫 外線之U V施加單元8 1 ，及一當轉動該 地移動該碟片1 0 0之碟片移動構造8 5 經濟部智慧財產局員工消費合作社印製 元具有一紫外線燈泡8 置。圖6係一側視圖，其顯示該主要硬化 之梗槪。 圖7顯示該主要硬 構造8 5之基本部份2 相差9 0度之方向中觀 要硬化紫外線輻射部份 以固定該碟片之主軸單 主軸單元之伺服馬達驅 7看見者，該主軸單元 間之平板1 8 7固定至 。一未示出而由軸承所 在該外殼1 8 6中。該 連接至一伺服馬達1 8 地驅動。該主軸1 8 3 2及係一用以往下 化紫外線輻射部份 5，且 看。下 之結構 元1 8 動滾珠 18 2 §亥浪珠 可旋轉 主軸1 4及係 之頂部 其係一側視 文將參考圖 。一碟片移 2，及一用 螺桿單元1 之外殼1 8 螺桿單元1 地支撐之主 8 3係經過 藉著該伺服 係適於裝入 碟片時用以線性 。該U V施加單 施加U V光之裝 紫外線輻射部份 8 0之 圖，而 6及7 動單元 以線性 8 0 ° 6係以 8 0之 軸1 8 一聯軸 馬達1 該碟片 碟片移動 由與圖6 敘述該主 包含一用 地移動該 如能由圖 一介入其 傳動螺帽 3係安裝 節1 8 5 8 4旋轉 1 0 0之 I--------4衣----^---1T------- (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -34 - 579303 A7 B7 五、發明説明（本 中心孔洞，及在此更進一步提供一用以真空吸附該碟片之 構造1 0 0。 (請先閲讀背面之注意事項再填寫本頁) 以上述之構造，當藉著該伺服馬達1 8 4旋轉時，安 裝在該主要硬化紫外線輻射部份8 0之主軸1 8 3上之碟 片1 0 0可藉著該滾珠螺桿單元線性地移動。 於塗覆在該碟片上之可光硬化樹脂層之主要硬化案例 中，該主要之硬化紫外線輻射部份控制該碟片1 〇 ◦，以 便當轉動該碟片時通過該紫外.線施加單元之照射區域。該 碟片於照射期間旋轉，藉以縱使該紫外線施加單元之施加 光強分佈不均勻，由該碟片之每一部份所接收之施加紫外 線數量可一致。 依照包含用以硬化該樹脂所需之紫外線施加時間之各 種狀態合適地決定該碟片之藉著該滾珠螺桿單元之線性移 動之控制係。譬如，該碟片可在不變之速度下於該紫外線 施加單元之照射區域中作往復移動，或可立即停止在該照 射區域中或可減速，以便延長該紫外線施加時間。 經濟部智慧財產局員工消費合作社印製 遭受該主要硬化製程之碟片1 0 0係返回至該主要硬 化紫外線輪射部份8 0之碟片平移位置8 0 A，及係送至 下一處理步驟。亦可設計成使得在完成該主要硬化製程之 後，該碟片1 0 0係移至該主要硬化紫外線輻射部份之位 置8 0B (圖1)，且該碟片係由該處位移至一用以施行 該硬蓋處理步驟之分開裝置（即進一步塗佈一當作塗層之 保護層至該透明樹脂層上之步驟）。 在完成該主要硬化製程之後，返回至該位置8 〇 A之 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇X297公釐） _ 35 _ 579303 A7 B7 五、發明説明（彰 (請先閲讀背面之注意事項再填寫本頁) 碟片1 0 0係藉著該位移手形部份3 〇之支臂3 1 C移送 至該薄膜厚度檢查部份9 0。該薄膜厚度檢查部份測量該 碟片之透光樹脂層之薄膜厚度，以檢查塗覆在該碟片上之 透光樹脂層之薄膜厚度是否在一預定之範圍內。藉著該位 移手形部份之支臂3 1 C，該碟片1 〇 〇係於該薄膜厚度 檢旦b卩份之位置9 0 A放置在一可移動平台q 1上。該可 移動平台9 1係藉著此單元9 3沿著單軸滾珠螺桿單元 9 3前進，及係移至正好在一當作薄膜厚度測量裝置之雷 射位移量測計9 5下方。該可移動平台9 1具有轉動放在 其上面之碟片之功能，及藉著該滾珠螺桿單元9 3結合該 碟片之旋轉及其線性移動，以藉此用該雷射位移量測計改 變該測量點，及在碟片用之複數測量點施行薄膜厚度測量 。於一典型之實例中，關於七處徑向位置在圓周上之八點 施行測量。據此，該測量點係8 X 7 = 5 6點。 經濟部智慧財產局員工消費合作社印製 當停靠在該可移動平台上時，遭受該薄膜厚度測量之 碟片係又送回至該位置9 0 A，及在該位置，其係藉著該 位移手形部份3 0之支臂3 1 d送至該淸潔器部份2 0。 然而，假如在該薄膜厚度檢查部份9 0中之薄膜厚度檢查 結果，吾人發現未以一適當之薄膜厚度完成該塗層，正當 由該薄膜厚度檢查部份9 0位移至該淸潔器部份期間藉著 該支臂3 1 d由該真空吸附作用釋放次級之碟片，且該碟 片係移送至一次級之碟片卸載部份1 1 0。 由該薄膜厚度檢查部份9 0位移至該淸潔器部份2 0 位置2 2 B之好碟片係藉著該旋轉台2 2之旋轉移至一位 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -36 - 579303 A7 B7 五、發明説明（和 (請先閲讀背面之注意事項再填寫本頁) 置2 2 A，且係藉著該供給手部1 3 b由該處放置於該卸 載器1 5之栓銷夾具1 1 5上，以致一栓銷1 1 5 a可裝 入該碟片之中心孔洞。類似於該載入器1 1之栓銷夾具， 該卸載器1 5之栓銷夾具1 1 5係具有一升降器1 1 6， 及當碟片係堆疊在該栓銷夾具1 1 5上時，降低該升降器 1 1 6，以致該堆疊碟片之最上方碟片之水平高度可總是 保持不變。 當一預定數目之處理碟片係堆疊在該卸載器1 5之栓 銷夾具1 1 5上時，該栓銷夾具1 1 5係如圖1所視移向 左側，以致可由該裝置之左端取出該堆疊碟片。 如此，中止根據本具體實施例之旋轉塗覆裝置之操作 循環。 上述旋轉塗覆裝置之操作係在具有一中央處理系統之 裝置之控制部份（未示出）之控制下全部自動地施行。 雖然上面已敘述本發明之一具體實施例，本發明未受 限於此具體實施例。 經濟部智慧財產局員工消費合作社印製 雖然上述具體實施例有關以一藍光雷射拷貝之碟片透 光薄膜之旋轉塗覆，其不限於此，但本發明可廣泛地應用 於一液體材料之旋轉塗覆，諸如一可輻射硬化材料之旋轉 塗覆至一圓碟體。如一實例，本發明可應用於C D / CDRW/C D - R之保護層之塗覆、DVD之保護層之 塗層、或各種硬蓋之旋轉塗覆製程、或一用以施行旋轉塗 覆之旋轉塗覆裝置。 雖然在本具體實施例中，塗佈當作塗層之樹脂係亦可 -37- 本紙張尺度適用中國國家標率（CNS ) A4規格（210X297公釐） 579303 A7 -— —_______ B7 五、發明~^ - (請先閱讀背面之注意事項再填寫本頁) 用紫外線硬化樹脂，本發明不限於此，但可應用至一具有 各種可輕射硬化材料之圓碟體之旋轉塗覆，諸如紅外線可 硬化材料及其他可光硬化材料、可電磁波硬化材料、可χ 射線硬化材料、可電子束硬化材料或、可超音波硬化材料 。本發明亦可應用於一具有各種材料之圓碟體之旋轉塗 雖然於所述具體實施例之旋轉塗覆裝置中，該暫時性 硬化紫外線輻射部份及該主要之硬化紫外線輻射部份係分 別提供當作光線（輻射）施加機構，用以硬化在該碟片上 之可光線（輻射）硬化材料，及藉著該暫時性硬化紫外線 輻射部份，施行用於半硬化之暫時性硬化，以減少該碟片 之可光硬化材料層在該旋轉器上之流動性，其後該可光硬 化材料層係在該旋轉器之外側藉著該主要之硬化紫外線輻 射部份完全硬化，該可光硬化材料層可在該旋轉器上完全 硬化’而不需獨立地提供該主要之硬化紫外線輻射部份。 經濟部智慧財產局員工消費合作社印製 本具體實施例中之掩模5 6形狀亦具有一下扁圓形部 份及一由其中心部分向上延伸之上圓柱形部份。雖然此形 狀係適用於當欲用手操作該掩模時，可藉著具簡單結構之 卡盤握住該圓柱形部份，以藉此操控該掩模，本發明之掩 模不限於此形狀，但其亦可能採用一無圓柱形部份之形狀 ，及施行該掩模之操控，譬如藉著真空吸附。 雖然在本具體實施例中，亦藉著一滾珠螺桿構成用以 驅動該掩模移動支臂之驅動機構，使得該分配器及用以固 持及移動該掩模之構造係彼此一體地設在該驅動機構上， 本紙張尺度適用中國國家標準（CNS ) Α4規格（210 X297公釐） -38 - 579303 A7 ___ B7 五、發明説明（关 亦可設計該驅動機構以由諸如氣缸之其他機構所移動。 (請先閲讀背面之注意事項再填寫本頁) 於本發明之方法及裝置中，當以可輻射硬化材料旋轉 塗覆該圓碟體時，減少塗佈至該圓碟體當作一塗層之可轄 射硬化材料之流動性，而同時不停止該圓碟體之轉動，但 保持旋轉，且因此縱使該圓碟體之旋轉停止，其決不會由 於該材料之膨漲等在此發生該薄膜厚度之不均句性。 亦’於本發明用以使該可輻射硬化材料於該圓碟體上 塗佈成一塗層之硬化方法及裝置中，該圓碟體當旋轉時係 通過該輻射之施加區域，藉此該輻射可均勻地施加至該整 個圓碟體。 經濟部智慧財產局員工消費合作社印製 亦於本發明之旋轉塗覆裝置中，用以於該旋轉器構造 中真空吸附該掩模之吸附空間構造經過該掩模之穿透孔與 該外在大氣相通，及因此假如停止將該吸附空間抽成真空 之後經過一預定時間’ g亥吸附空間變成等於該大氣壓力。 如此，該掩模可由該旋轉器上方（由該碟片上方）輕易地 移去。另一選擇爲藉著在停止將該吸附空間抽成真空之後 施加一會兒正壓，可使該吸附空間之壓力等於該大氣壓力 。甚至當施加一會兒正壓時，因爲該吸附空間經過該孔洞 與外在大氣相通，該氣流經過該掩模之孔洞流出，且因此 不會發生該液體塗覆材料於該掩模及該碟片間之邊界部份 中之擴散。假設該吸附空間之壓力等於該大氣壓力，該掩 模可由該旋轉器上方（由該碟片上方）輕易地移去。 亦於本發明另一特點之旋轉塗覆裝置中，該分配器係 倂入該掩模供給及移去構造中，且因此其不需獨立地提供 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 39 - 579303 A7 B7 五、發明説明（灰 一用以移動該分配器之驅動構造，及能簡化該裝置。再者 ，用於該分配器之安裝空間可製成較小，且因此可於該裝 置中提供一過剩之空間。 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 - 40- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）V. Description of the invention (1) 7 1 8 2: Spindle unit 1 8 3: Spindle 1 8 4: Servo motor (Please read the precautions on the back before filling out this page} 1 8 5: Coupling 1 8 6: Housing 1 8 7: Flat plate 2 0 0: Spreading shaft 2 0 2 · Rotator table 2 0 3: Spacer 2 0 4: Disc 2 0 5: Protruding portion 2 6: Mask 2 0 6 a: Groove Slot 2 10: Route 2 1 2: Description of a preferred embodiment of space Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs The following will describe one preferred embodiment of the present invention with reference to the drawings. A plan view of a spin coating device for an optical disc, which is a specific embodiment of the present invention. The spin coating device is a device suitable for forming a light-transmitting layer of a blue-ray laser-copy disc, which is the next generation A disc specially made for reproduction and reproduced in blue laser light is made by forming a reflective film with an inscription on a polycarbonate substrate. The substrate has • 20- This paper size applies to Chinese national standards. (CNS) A4 specification (210X297 mm) 579303 A7 B7 V. Description of the invention (1) 8 1 2 mm straight Diameter and thickness of 1 _ 1 mm, and an information pit is formed by the sputtering method (please read the precautions on the back before filling this page), and harden with available light (UV, that is, ultraviolet) A resin that is a radiation-hardenable material is spin-coated on its surface to form a light-transmitting layer having a thickness of 100 microns. The device of this embodiment is a spin-coating device for performing the light-transmitting coating of the light-transmissive layer. The spin coating device 1 has the following parts: a loading-unloading part 10 for supplying a disc to be coated from the outside, and a disc to be subjected to the coating process by The device is mounted to the outside; a cleaner part 20 is used to remove any foreign matter such as dust on the surface of the disc supplied by the loading-unloading part, and a hand part 3 0 is displaced It is used to implement the synchronization of the disc between different parts of the device. It is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Mobile Economy. A spinner part 40 is used to rotate the disc for execution. Spin coating of a resin layer; a mask supplying and unloading part 50, which is used to supply and remove a mask, which masks the central part of the disc placed on the spinner part during the spin coating; an edge washing part 60, which For removing any excess resin material overflowing from the outer perimeter of the disc during the coating period; a temporarily hardened ultraviolet radiation part 70, which is used for temporarily on the spinner during the spin coating A hardening coating is applied to the surface of the resin layer of the disc; a main hardening ultraviolet radiation portion 80, which is mainly used to harden the resin layer applied to the disc; a film thickness inspection portion 90 'is used for To check the film thickness of the resin layer formed on the disc; and the primary goods unloading portion 1 10, which is used to unload any disc that is a secondary product in the formation of the resin layer. The following will describe the operation details of the above parts in succession along the processing process. -21-This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) 579303 A7 B7 V. Description of invention (1) Section 9. (Please read the precautions on the back before filling out this page) The loader section 1 1 of the loader-unloader section 1 1 has a pin clamp 1 1 1 which is used to fix the plural in its stacked state Suffering from coated discs. These discs are fixed with a pin 1 1 1 a of a pin clamp 1 1 1 inserted into a central hole thereof. A spacer device is inserted between adjacent discs held on the pin holder 1 1 1 so as to separate the adjacent discs from each other. A lifter 1 12 for raising and lowering the disc stack is arranged below the disc stack. The level adjustment is performed by the lifter 1 12 so that the uppermost disc of the stack can take a predetermined supply height position. The loading-unloading section also has a supply hand 13. The supply hand 13 has three arms extending radially at equal intervals (i.e. 120 degrees per interval). A disc pick-up structure for sucking and releasing the disc by use of vacuum suction or the like is provided on the bottom side of the distal end of each arm. The supply hand 13 is designed to move around its axis 1 3 d under the predetermined control of a device control section (not shown). Pick up the top clamp of the loader 1 1 by the arm 1 3 a of the supply hand 1 3 1 1 1 and print the top disc in the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and the disc The sheet is transferred to a supply and unload position 2 2 A on a rotary table 22 of the cleaner part. At this time, a processed disc can be transferred from the position 2 2 A on the rotary table 2 2 to the bolt holder 1 1 5 of the unloader section by another arm 1 3 b. Another arm 1 3 c is used to displace the spacer device inserted between adjacent discs. The disc is a pin clamp 1 1 1 stacked on the loader part to a pin on the unloader part. Fixture 1 1 5 on. . -22- This paper size applies Chinese National Standard (CNS) A4 specification (210X29? Mm) 579303 A7 B7 V. Description of the invention (The details of the operation of the above-mentioned hand supply are described in the applicant's Japanese patent application No. 1 1 1 2 8 9 2 6 7 No. <Jingxian leisurely read the precautions on the back before filling in this page) The disc on the rotary table 2 2 moved to the cleaner part 2 0 enters the cleaner 2 4. At the same time, it is docked on the rotary table by clockwise rotation of the rotary table. The cleaner 24 is provided with a blower for blowing clean air to the surface of the disc, and a vacuum suction device for adsorbing particles such as dust blown off by the air from the blower. Preferably, it can be designed to control the rotation speed of the rotary table, so that when the disc is moved in the cleaning device 24, the rotation speed can be slower, and sufficient time can be used for cleaning the disc. . It can also be designed to further extend the cleaning time, once the disc has entered the cleaning device 24 once the rotation of the rotary table 22 is stopped at a point in time, and the disk stays in the cleaning Device 24 for a predetermined time, after which the rotation is resumed. Although in this specific embodiment, in order to fully perform the cleaning of the disc, the rotating table 2 2 for transporting the disc is controlled at different speeds, thereby extending the disc to stay in the cleaner 24. Time, if not necessary, the turntable can be designed to rotate at a constant speed. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs when the disc passes the cleaner 24 and arrives at a transport position 2 2 B on the turntable 2 2 (that is, from the supply and unload position 2 2 A rotates 180 degrees), the disc is transferred to the rotator by the displacement hand 31 of the displacement hand portion 30. The structure of the displacement hand 31 is similar to that of the supply hand 13 described above, but in contrast to the supply hand 13 with three arms, the displacement hand 3 1 has four radial extensions at equal intervals. The arms 3 1 a, 3 1 b This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) "23-&quot; a 579303 A7 B7 V. Description of the invention (do not (please read the precautions on the back first) Fill out this page again), 3 1 c and 3 1 d (that is, 90 degrees every interval). A disc pick-up structure used to adsorb and release the disc through the use of vacuum adsorption, etc. is provided at each On the bottom side of the distal end of the arm. The displacement hand 31 is designed to move around its axis (not shown) under the control of the control part of the device. The displacement hand 31 is by the four Only the arms 3 1 a-3 1 d move the disc between the different parts of the device at the same time. The state shown in Figure 1 shows the standby position of the displacement hand 31. By this state Rotate the displacement hand 45 degrees in the clockwise direction, and the arms 3 1 a, 3 1 b, printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 3 1 c and 3 1 d take various positions, where they can pick up the discs located on the cleaner part, the rotator part, the main hardened ultraviolet radiation part, and the film thickness inspection part, respectively. In those positions, the arms pick up the discs by vacuum suction. Thereafter, the displacement hand 31 is rotated 90 degrees counterclockwise. As a result, the discs located in the cleaner part The disc in the rotator part, the disc in the main hardened ultraviolet radiation part, and the disc in the film thickness inspection part are moved to the rotator part at the same time. The main hardened ultraviolet radiation part, the film thickness inspection part, and the cleaner part, and in each position, each arm releases these discs. In this way, by displacing the hand 3 1 Perform the simultaneous movement of the disc between various positions. The discs that are moved from the cleaner part 20 to the spinner part 40 are spin-coated here. As is well known, not only one with blue light In laser-copied discs, but generally in optical discs, The hole (1 5 Φ) used for center positioning during the installation of the disc to a disc drive is formed in the center of the disc, and here also has a die for fixing the die during injection molding. National Standard (CNS) A4 specification (210X297 mm) "24-~ 579303 A7 B7 V. Description of the invention (衾 (Please read the precautions on the back before filling in this page) grooves, etc., and coating the film (layer ) Will not be formed in the central part of a disc substrate, and the substrate is actually held on that part. Based on this, Wan ~ again performs spin coating by this device, attaching a central mask as a A masking member for covering a central area of the disc to prevent a light-transmitting resin film from being formed in the area i. Fig. 2 is a side view, partly in section, showing the basic part of the rotator part 40 'with the disc and mask mounted thereon. Referring to Fig. 2 ', here is shown a rotator 41 of the rotator part 40 and a disc 1 0 0 placed on the rotator 41, and another mask 56 placed thereon. More specifically, the rotator has a dispersing shaft 1 5 1 connected to a rotary drive source (motor) not shown, and can rotate about a vertical axis at high speed, and a rotator platform 1 5 2 series It is fixed to the upper part. The upper part of the rotator platform 15 2 is substantially made into a disk shape having the same flat diameter as the disk 100. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The mask used in this embodiment is shown in FIG. 8 as a cross-sectional view. The mask 5 6 has a disc portion 5 6 c for covering the lower portion of the disc center portion, and a cylindrical portion 5 6 extending upward from the center of the lower disc portion 5 6 c. b. An annular groove 5 6 a is formed on the bottom side of the lower disc portion 5 6 c. A penetrating hole 5 6 d is formed through the center of the upper cylindrical portion 5 6 b and the lower disc portion 5 6 c. A ring-shaped protruding portion 15 2 a is provided on a central portion of the upper surface of the rotator platform 15 2. The outer diameter of the annular protruding portion 1 5 2 a has a size so that it is in a fitting engagement relationship with the inner diameter of the central hole of the disc, and is positioned and concentrated by the annular protruding portion 1 5 2 a. -25- This paper size applies Chinese National Standard (CNS) A4 (210X297 mm) 579303 A7 B7 V. Description of the invention (this (please read the notes on the back before filling this I) The upper disc 1 00. The annular protruding portion 15 2 a is also assembled in an annular groove 5 6 a formed on the bottom side of the mask 56 and positions the mask. On the rotator platform, On the upper surface and immediately outside the annular protruding portion 1 5 2 a, an annular spacer device 15 is fixed to the rotary platform 1 5 2 and fixed to the distribution shaft 1 5 1. When When the disc 1 0 0 is mounted on the rotator platform 15 2, the disc 1 100 is supported on the inner peripheral portion by the spacer device 15 3. That is, the disc 1 0 0 Most and the rotator platform 1 5 2 are separated from each other by a gap S by the spacer device. By a vacuum suction provided on the rotator platform The structure sucks and fixes the disk 100 and the mask 56 placed on the rotator platform. The suction of the disk 100 and the suction of the mask 56 on the rotator platform are performed independently of each other. In other words, two independent vacuum paths are provided in the rotator so that individual adsorption effects can be controlled independently of each other. Details of the structure for adsorbing the disc and the mask will be described later with reference to FIG. 2 Independent vacuum route, that is, a disc suction vacuum route 160 and a mask suction vacuum route 165 are provided in the distribution axis 15.1. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economy will first describe the Adsorption of the disc. The disc adsorption vacuum path 160 passes through the first hole 16 1 and communicates with an annular space 1 6 2 formed in the dispersing shaft 1 51. The annular space 1 6 2 is a surrounding The annular space facing the dispersing axis is defined in three of them, namely the rotator platform 1 5 2, the dispersing axis 1 5 1 and an enclosing member 1 5 8 attached to the lower part of the rotator platform The annular space 1 6 2 passes through the spacer device 1 5 3, Enter the -26 upward from the annular space -26- This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 579303 A7 B7 printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The second drilled hole 1 6 3 formed by the rotating platform communicates with the third drilled hole 1 6 4 formed in the upper part of the rotator platform 15 2. Via the above-mentioned route, the disc absorbs the vacuum route 1 6 0 communicates with a third bore formed in the spacer device 15 and, therefore, by vacuuming the disc into a vacuum path 160, the disc 100 can be attracted to the spacer device 15 3. Although only two boreholes are shown in FIG. 2, that is, the second borehole 16 3 and the third borehole 16 4, in fact, the boreholes are arranged at 90 degrees at four positions. However, the number of the adsorption through holes is not limited to this, but may be appropriately increased or decreased until the adsorption effect can be effectively performed. The adsorption effect of the mask will now be described. The mask suction vacuum path 1 6 5 passes through a fourth hole 1 6 6 formed laterally in the dispersing axis 1 5 1 and communicates with a vertical hole 16 7 a in the bolt 16 7. The bolt 1 6 7 is used to fix the rotator platform 1 5 2 to the dispersing shaft 1 5 1. The vertical hole 1 6 a in the inspection 1 6 7 leads to the upper part of the screw inspection, and therefore the mask suction vacuum line 16 5 communicates with a space 1 6 just below the mask. According to this, if the vacuum of the suction line 16 65 of the mask is evacuated, the pressure of the suction space 1 68 just below the mask can be reduced and the mask can be sucked. In this way, the adsorption of the mask and the adsorption of the disc can be controlled independently of each other by separate vacuum paths 1660 and 165, respectively. The supply and unloader portion 50 of the mask is used on the rotator to supply the center mask 56 to the disc 1 00 and removed from the disc 1 0 0. The mask supply and unloader section 50 includes a disc-shaped mask storage 55 which can be rotated around its center, and is mounted on the mask storage: order.  (Please read the precautions on the back before filling this page) This paper size is applicable to Chinese National Standard (CNS) A4 (210X297 mm) • 27 · 579303 A7 B7 V. Description of the invention (the dragon is placed in a double circular configuration Mask 5 6 (A total of 2 4 masks are shown in the specific embodiment of FIG. 1 (please read the precautions on the back before filling out this page), one with a mask chuck for gripping the mask A mask moving arm 5 1 is used to reciprocally move the ball screw 5 2 of the mask moving arm 5 1 between the mask holder 55 and the rotator 40. One is used for supplying coating The material (light-hardening resin that can be used to form a light-transmissive film) to the distributor on the disc is a woman's body on the mask's moving arm. Printed in Figure 3 by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The distal end portion of the mask moving arm 5 1 above the rotator 40. The distal end portion of the mask moving arm 51 has a cylindrical portion on it. Part 5 6 b grips the chuck 1 5 4 of the mask 5 6, and a photo-hardenable resin is supplied to the disc Distributor 1 5 6. Since the distributor 1 5 6 is provided on the mask moving arm along with the chuck 1 5 4, the distributor is used to supply the mask to the chuck 1 5 4 The operation on the disc advances to the disc at the same time. Therefore it is not necessary to separately provide a drive source for moving the dispenser back and forth. The chuck 1 5 4 and the The distributor 1 5 6 can be moved as a unit in a generally vertical direction so that they are close to the disc 1 0 0 on the rotator platform. The chuck 1 5 4 has two A chuck claw that is opened and closed as the cylinder is driven, and a cylindrical portion 5 6 b above the mask 5 6 can be held / released between the chuck claws. The mask supply will be described here. And the unloading part. First, at the distal end portion of the mask moving arm 5 1, the mask holder 5 5 grasps and picks up a mask 5 by the chuck 1 5 4. 6 The upper cylinder part of this paper applies the Chinese National Standard (CNS) A4 specification (210 × 297 mm): 28 _ 579303 A7 __ B7 V. Description of the invention (gray ( Read the precautions on the back before filling in this page) 5 6 b. By the combination of the mask moving support arm linearly moving along the ball screw 5 2 and rotating the mask reservoir, the chuck 1 5 4 can Pick up any mask 5 6 on the mask stocker 55. After picking up the mask, drive the ball screw 5 2 to thereby move the mask moving arm to the rotator portion 4 0, and the center of the mask fixed by the chuck 1 54 is moved to a position aligned with the center of the rotator platform. Then 'the chuck 1 5 4 and the distributor 1 5 6 are Lowered as a unit, and the mask 56 is placed on the disc 100 and the chuck 15 4 is released. After the mask 56 has been placed on the disc 100, a vacuum is formed by the mask suction vacuum route 16 65 to thereby adsorb the mask. At this time, the mask adsorption space 16 (Fig. 2) passes through the penetrating hole 5 6 d of the mask 56 to communicate with the atmosphere outside the device, that is, the atmosphere is opened to the atmosphere. However, as long as the mask suction vacuum line 16 5 system is evacuated, the space 16 8 system is kept at a lower pressure than the atmospheric pressure, and therefore the mask system is adsorbed on the disc. The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs is printed in this state, and the light-hardenable resin in its liquid phase is supplied to the disc installed at the far end of the dispenser 1 56 through a nozzle 15 7 On-chip mask. Fig. 4 shows the manner in which the photocurable resin flows out. When a predetermined amount of photocurable resin is reached, the distal end portion of the mask moving arm 51 having the dispenser 1 56 and the chuck 1 54 is raised, and the The ball screw 5 2 is used to retract the mask moving arm 5 1 by the rotator 40. After retracting the mask and moving the arm 5 1 (or before or at the time), this paper size applies the Chinese National Standard (CNS) A4 (210X297 mm) _ 29-579303 A7 B7 V. Description of the invention (grey (please Read the precautions on the back before filling this page.) The spinner platform 1 5 2 rotates at high speed to perform the spin coating operation, that is, the photocurable resin supplied to the center is essentially The rotating centrifugal force is uniformly distributed on the entire surface of the disc. After the spin coating is started by the rotation of the spinner platform and a resin layer of substantially uniform film thickness is formed on the disc, when a When the predetermined time elapses, the edge cleaner 6 1 performs the edge scrubbing by the edge scrubber 6 0 to remove any resin overflowing to the peripheral portion outside the disc. The edge The cleaner 6 1 can move around an axis 6 3 in the horizontal plane of the device, and is attached to the edge of the edge cleaner 6 1 at one end of the blade 6 5 by the edge cleaner to swing back and forth to approach the dish. Peripheral surface outside the film, and stripped Any light-curable resin overflowing the periphery of the disc. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs after the disc washes, the light-curable resin is applied by the temporarily hardened ultraviolet radiation. Temporary hardening. A resin film is uniformly formed on the surface of the disc by a spin coating method, and when the rotation is stopped, 'the uniformity of the film thickness is lost due to the surface tension of the liquid resin. In other words, the non-uniformity of the outer peripheral portion is enlarged. That is, the higher the viscosity of the resin, the larger the non-uniformity of the thickness of the film becomes. The hardening ultraviolet radiation part applies ultraviolet rays, and does not contend the rotation of the spinner after spin coating, thereby performing temporary hardening of the resin layer. The temporary properties will now be described with reference to FIGS. 5A and 5B. Details of the hardened ultraviolet radiation ρβ part 7 〇. Figures 5 A and 5 B are side views of the temporarily hardened ultraviolet car projecting part, and respectively show an irradiation head which will be described later -30- This paper size is in accordance with Chinese National Standard (CNS) a4 specification (210X297 mm) 579303 A7 B7 V. Description of the invention (see (please read the precautions on the back before filling this page) The status of ®® and the The irradiated head cover has been lowered. The temporarily hardened ultraviolet radiation portion includes a main body portion 71, an irradiated head portion 72, and a main body portion 71 and the irradiated head portion 72 together. Connected connecting cylinder part 73. An ultra-high pressure mercury lamp (not shown) serving as an ultraviolet light source is provided in the main body part. The ultra-high pressure mercury lamp emits an ultraviolet region containing a UV-curable resin capable of curing (UV) wavelength light. An optical system (not shown) for condensing and transporting is further installed in the main body 71, and condenses UV light from the ultra-high pressure mercury lamp, and is transported as an ultraviolet beam And travel towards the connected cylindrical part 73. The connected cylindrical portion 7 3 is a hollow cylindrical member, and the UV beam passes through the connected cylindrical portion and enters the irradiation head 72. The irradiation head 7 2 includes a reflecting portion 17 1 having a reflecting plate 17 1 a therein, and printed by the consumer consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs of the Ministry of Ultraviolet Economy printed by the connected cylindrical portion. The light beam is deflected at 90 degrees and made to reflect downward. The reflecting part 1 7 1 is covered with a side 1 1 2. The outer cover 1 7 2 is fixed to a sliding device 75 that can be vertically moved on the rail 7 4, the rail is fixed to the main body 7 1, and the outer cover can be vertically moved with the sliding device 75. . The sliding device 75 is driven for vertical movement by an air cylinder. The shock absorbers 1 7 7 and 1 7 8 capable of directly positioning the sliding device 75 are respectively provided at the upper end and the lower end of the moving range of the sliding device 75. During the transport of the disc into and out of the rotator part 40, during the supply of the mask to the disc installed in the rotator part and during the removal from the disc 100, and during The paper size of the hardened resin applies the Chinese national standard (CNS) A4 specification (210X297 mm) by this dispenser. _ 31 _ 579303 A7 B7 V. Description of the invention (read (please read the precautions on the back before filling this page) 1 While 5 6 is being supplied to the mask, the outer cover 1 7 2 is located in its retracted position, that is, in its raised position (the state shown in FIG. 5A), above its moving range, so as not to hinder these Operation. Only when the light-curable resin layer coated on the disc 100 installed in the rotator part 40 is temporarily hardened by spin coating, it is moved to its lowered position ( The state shown in Figure 5B). The timing of the temporary hardening is immediately after the spin coating of the liquid photocurable resin has been performed and the edge cleaner has been applied as described above. This marginal cleanliness is implemented. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs The lower part of the outer cover 17 2 concentrically provides a cylindrical outer peripheral outer cover 1 7 3 and a cylindrical inner peripheral outer cover 1 7 4. It is designed such that when the outer cover 1 72 is lowered, the inner The center of the peripheral cover 1 74 and the center of the disc 1 0 0 on the rotator platform 15 2 are aligned with each other. When the cover 1 7 2 is in a lowered position and the temporarily hardened ultraviolet light is When applied to the disc, the ultraviolet light beam reflected downward by the reflection plate 1 7 1 a of the irradiation head passes through the annular space between the outer peripheral cover 17 and the inner peripheral cover, and emerges downward. As the illumination light with a circular illumination area, the outer diameter of the circular illumination area is designed to be substantially consistent with the outer diameter of the disc, and the inner diameter is designed to be substantially consistent with the outer diameter of the mask. In this way, the irradiation area of the ultraviolet beam is substantially the same as that of the entire external disc. With the structure described above, the ultraviolet rays of the temporarily hardened ultraviolet radiation portion are not applied to the mask placed on the disc. During the spin coating, the liquid photocurable resin is dripped on the On the mold, and therefore when the UV light is applied to the mask, on the mask and between the mask and the disc 32- This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) Meal) 579303 A7 _B7 V. The resin in the boundary part of the description of the invention (please read the precautions on the back before filling this page) is hardened, and the removal of the mask becomes difficult. To avoid this, Designed so that the ultraviolet rays will not be applied to the mask portion. As described above, the technique of providing a circular lighting area by the outer peripheral cover and the inner peripheral cover is not limited, but it can also be adopted by Some methods prevent the ultraviolet light from being applied to other mechanisms of the mask. The UV applied by the temporary ultraviolet radiation part is used to prevent the photo-curable resin layer coated on the disc from becoming uneven in film thickness due to its surface tension, and therefore can only harden only half The resin layer and the fluidity of the material are reduced to the extent that unevenness in the thickness of the film does not occur due to the surface tension. The irradiation intensity and irradiation time used for this purpose are appropriately determined in accordance with the kind of resin and the thickness of the film applied as the coating on the disc. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs After the temporary hardening ultraviolet rays have been applied, the rotation of the rotator is stopped. The vacuum adsorption of the mask 56 is then released. The mask 5 6 of the present invention has a penetrating hole 5 6 d, and therefore if a certain period of time elapses after the vacuum of the vacuum adsorption of the mask 1 6 5 is stopped, the adsorption space 1 just below the mask The 6 8 pressure becomes equal to the atmospheric pressure, and therefore it becomes possible to remove the mask 5 6 d without applying a positive pressure. Alternatively, it may be designed so that after the vacuum of the mask suction vacuum line 16 5 is stopped to be evacuated, only a moment of positive pressure is applied through the vacuum line 16 5. In this case, since the mask 5 6 is formed with a penetrating hole 5 6 d, even when a positive pressure is applied to the adsorption space 1 6 8, an airflow is discharged to the outside through the penetrating hole 5 6 d, and Therefore, the diffusion problem of the liquid material does not occur in the boundary region between the mask and the disc. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) _ 33-579303 V. Description of the invention (including 1 After releasing the adsorption of the mask, the support arm is moved by the mask through the mask. The sheet 100 picks up the mask 56 and transfers it to the mask holder 5 5. Furthermore, 'f 睪 puts the disc 1 ◦ 〇 vacuum suction on the rotator platform 丄 52, and by the displacement hand shape The arm 3 丨 b of the part 3 〇 picks up the disc and moves to the position 8 OA of the main hardened ultraviolet radiation part 8 0. The main hardened ultraviolet radiation part 8 〇 has a UV for applying ultraviolet rays The applying unit 8 1 and a disc moving structure 8 when the place is moved to move the disc 1 0 5 The printed unit of the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs has an ultraviolet light bulb 8 set. FIG. 6 is a side view, It shows the main hardened stalk. Figure 7 shows the main hard structure 8 5 of the basic part 2 90 degrees away from the direction of the middle to be hardened ultraviolet radiation part to fix the disc's spindle single-spindle unit servo motor Drive 7 seeers, the level between the spindle units 1 8 7 is fixed to. One is not shown in the housing 1 8 6 where the bearing is located. The connection is driven by a servo motor 18. The main shaft 1 8 3 2 and the conventional UV radiation part 5 And look. The lower structure element 1 8 moving ball 18 2 § Hai Langzhu can rotate the main shaft 14 and the top of the system. The side of the system will refer to the figure. A disc is moved 2 and a screw unit 1 is used. Housing 1 8 Screw unit 1 Ground support of the main 8 3 is used to linearize when the servo system is suitable for loading discs. The UV application unit applies UV light to the ultraviolet radiation part 8 0, and 6 And 7 moving units with linear 80 ° 6 series with 8 0 axis 1 8 a coupling motor 1 the disc movement is described with FIG. 6 the main includes a land movement and if the transmission screw can be intervened by FIG. 1 Cap 3 is a mounting section 1 8 5 8 4 Rotate 1 0 0 of I -------- 4 clothing ---- ^ --- 1T ------- (Please read the precautions on the back first (Fill in this page again) This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) -34-579303 A7 B7 V. Description of the invention (holes in this center, and further here Provide a structure for vacuum suction of the disc 1 0. (Please read the precautions on the back before filling this page) With the above structure, when rotating by the servo motor 1 8 4, it is installed on the main hardening The disc 1 0 on the main axis 1 8 of the ultraviolet radiation part 80 can be moved linearly by the ball screw unit. In the main hardening case of the photo-curable resin layer coated on the disc, the The main hardening ultraviolet radiation part controls the disc 1 〇◦ so as to pass the ultraviolet when the disc is rotated. Irradiation area of the line application unit. The disc is rotated during the irradiation period, so that even if the applied light intensity distribution of the ultraviolet application unit is uneven, the number of applied ultraviolet rays received by each part of the disc can be uniform. The control system for the linear movement of the disc by the ball screw unit is appropriately determined in accordance with various states including the ultraviolet application time required to harden the resin. For example, the disc can be moved back and forth in the irradiation area of the UV application unit at a constant speed, or it can be stopped in the irradiation area immediately or decelerated to extend the UV application time. The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints the discs subject to the main hardening process. 100 is returned to the disc translation position of 80, which is the main hardening ultraviolet wheel, and is sent to the next processing. step. It can also be designed so that after the main hardening process is completed, the disc 100 is moved to the position 80B (Fig. 1) of the main hardened ultraviolet radiation part, and the disc is moved from there to a use A separate device for performing the hard cap processing step (ie, a step of further applying a protective layer as a coating layer to the transparent resin layer). After the main hardening process is completed, the paper size returned to this position is 80A, which is applicable to the Chinese National Standard (CNS) A4 (21 × 297mm) _ 35 _ 579303 A7 B7 V. Description of the invention (Chang (please first Read the notes on the back and fill in this page again.) The disc 1 0 0 is moved to the film thickness inspection part 90 by the arm 3 1 C of the displacement hand section 30, and the film thickness inspection part measures the The film thickness of the transparent resin layer of the disc to check whether the film thickness of the transparent resin layer coated on the disc is within a predetermined range. By the arm 3 1 C of the displacement hand portion, The disc 100 is placed on a movable platform q 1 at the position 90 b of the film thickness inspection unit b. The movable platform 9 1 is driven by the unit 9 3 along a single-axis ball screw. The unit 9 3 advances and moves to a position just below a laser displacement measuring device 9 5 as a film thickness measuring device. The movable platform 91 has a function of rotating a disc placed on it, and by The ball screw unit 93 combines the rotation of the disc and its linear movement to This uses the laser displacement meter to change the measurement point, and to perform film thickness measurement at a plurality of measurement points for a disc. In a typical example, the measurement is performed at eight points on the circumference at seven radial positions. According to this, the measurement point is 8 X 7 = 5 6 points. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the discs subjected to the measurement of the film thickness are returned to the position when docked on the movable platform 9 0 A, and in this position, it is sent to the cleaner part 20 by the arm 3 1 d of the displacement hand part 30. However, if in the film thickness inspection part 90 As a result of the inspection of the film thickness, I found that the coating was not completed with an appropriate film thickness, and that the vacuum was applied by the arm 3 1 d during the displacement from the film thickness inspection portion 90 to the cleaner portion. Adsorption releases the secondary disc, and the disc is transferred to the primary disc unloading section 1 1 0. The film thickness inspection section 90 is moved to the cleaner section 2 0 position 2 2 The good disc of B is moved to a paper size by the rotation of the rotary table 2 2 Applicable Chinese National Standard (CNS) A4 specification (210X297 mm) -36-579303 A7 B7 V. Description of the invention (and (please read the precautions on the back before filling this page) Set 2 2 A, and by this supply The hand 1 3 b is placed there on the pin clamp 1 1 5 of the unloader 15, so that a pin 1 1 5 a can fit into the center hole of the disc. Similar to the loader 1 1 The bolt clamp of the unloader 15 has a lifter 1 1 6 and when the discs are stacked on the bolt clamp 1 1 5, the lifter 1 1 6 is lowered So that the horizontal height of the uppermost disc of the stacked discs can always be maintained. When a predetermined number of processing discs are stacked on the bolt clamp 1 15 of the unloader 15, the bolt clamp 1 15 is moved to the left as viewed in FIG. 1, so that it can be removed from the left end of the device The stacked discs. As such, the operation cycle of the spin coating apparatus according to this embodiment is suspended. The operation of the above-mentioned spin-coating device is all performed automatically under the control of a control part (not shown) of the device having a central processing system. Although a specific embodiment of the present invention has been described above, the present invention is not limited to this specific embodiment. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Although the above specific embodiment is related to spin coating of a disc light-transmitting film copied by a blue laser, it is not limited thereto, but the present invention can be widely applied to Spin coating, such as spin coating of a radiation hardenable material to a circular dish. As an example, the present invention can be applied to the protective coating of CD / CDRW / CD-R, the protective coating of DVD, or the spin coating process of various hard covers, or a spin to perform spin coating. Coating device. Although in this specific embodiment, the resin used as the coating can also be applied -37- This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) 579303 A7 ----- _______ B7 V. Invention ~ ^-(Please read the precautions on the back before filling this page) Use UV curing resin, the present invention is not limited to this, but can be applied to the spin coating of a disc body with various light-hardenable materials, such as infrared Hardenable materials and other light hardenable materials, electromagnetic hardenable materials, X-ray hardenable materials, electron beam hardenable materials, or ultrasonic hardenable materials. The present invention can also be applied to spin coating of a disc body with various materials. Although in the spin coating device of the specific embodiment, the temporarily hardened ultraviolet radiation part and the main hardened ultraviolet radiation part are respectively Provide a light (radiation) application mechanism for hardening the light (radiation) hardening material on the disc, and perform temporary hardening for semi-hardening by the temporarily hardening ultraviolet radiation part to The flowability of the photo-hardenable material layer of the disc on the rotator is reduced, and then the photo-hardenable material layer is completely hardened outside the rotator by the main hardening ultraviolet radiation part, and the photo-hardenable material layer The layer of hardened material can be fully hardened on the rotator without the need to provide the main hardened ultraviolet radiation portion independently. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The mask 56 in this embodiment also has a lower oblong portion and a cylindrical portion extending upward from its central portion. Although this shape is suitable when the mask is to be operated by hand, the cylindrical portion can be held by a chuck with a simple structure to thereby manipulate the mask, and the mask of the present invention is not limited to this shape However, it may also adopt a shape without a cylindrical portion, and perform the manipulation of the mask, such as by vacuum adsorption. Although in this specific embodiment, a driving mechanism for driving the mask moving arm is also formed by a ball screw, so that the dispenser and the structure for holding and moving the mask are integrally provided with each other in the For the drive mechanism, this paper size is in accordance with the Chinese National Standard (CNS) A4 specification (210 X297 mm) -38-579303 A7 ___ B7 5. Description of the invention (The drive mechanism can also be designed to be moved by other mechanisms such as cylinders (Please read the precautions on the back before filling this page) In the method and device of the present invention, when the disk body is spin-coated with a radiation hardenable material, the coating is reduced to the disk body as a coating The layer can govern the fluidity of the hardened material without stopping the rotation of the disc body at the same time, but it keeps rotating, and therefore even if the rotation of the disc body stops, it will never be here due to the expansion of the material, etc. The unevenness of the film thickness occurs. Also in the hardening method and device for coating the radiation hardenable material on the disc body in the present invention, the disc body passes through when rotating. The spoke The application area, so that the radiation can be uniformly applied to the entire disc body. The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed it in the spin coating device of the present invention for vacuum adsorption in the spinner structure. The adsorption space structure of the mask communicates with the external atmosphere through the penetration hole of the mask, and if a predetermined time elapses after the suction space is stopped from being evacuated, the adsorption space becomes equal to the atmospheric pressure. The mask can be easily removed from above the rotator (from above the disc). Another option is to apply a positive pressure for a while after stopping the vacuum of the adsorption space to make the pressure of the adsorption space equal to The atmospheric pressure. Even when a positive pressure is applied for a while, because the adsorption space communicates with the external atmosphere through the hole, the airflow flows out through the hole of the mask, and therefore the liquid coating material does not occur on the mask and Diffusion in the boundary portion between the discs. Assuming that the pressure in the adsorption space is equal to the atmospheric pressure, the mask can be moved above the rotator (by the Above the sheet) is easily removed. Also in the spin coating device of another feature of the present invention, the dispenser is incorporated into the mask supply and removal structure, and therefore it does not need to provide the paper size independently. China National Standard (CNS) A4 specification (210X297 mm) 39-579303 A7 B7 V. Description of the invention (Gray one is used to move the drive structure of the distributor and can simplify the device. Furthermore, it is used for the distributor The installation space can be made smaller, and therefore an excess space can be provided in the device. (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy-40- Applicable to China National Standard (CNS) A4 specification (210X297 mm)

Claims (1)

579303 A8 B8 C8 D8 六、申請專利範圍 1 (請先閲讀背面之注意事項再填寫本頁) 1 . 一種旋轉塗覆方法，其供給可輻射硬化液體材料 至一安裝在用以旋轉.該圓碟體之旋轉器上之圓碟體中心附 近、轉動該圓碟體、及藉著離心力將液體材料散佈在該圓 碟體上，以藉此在該圓碟體之表面上形成液體材料之塗覆 薄膜，其特徵爲在旋轉塗覆期間於旋轉該圓碟體之前，停 止將具有硬化該可輻射硬化液體材料作用之輻射施加至該 圓碟體，及減少在該圓碟體上塗佈成一塗層之液體材料流 動性之步驟。 2 .如申請專利範圍第1項之旋轉塗覆方法，進一步 包含於塗覆之前接近該圓碟體之中心部份以掩模構件遮蓋 一部份圓碟體之步驟，且其特徵爲該可輻射硬化液體材料 係供給至該掩模構件上，及在減少該材料流動性之步驟， 當該輻射係施加至該圓碟體時，該輻射未施加至該掩模構 件。 3 .如申請專利範圍第1項之旋轉塗覆方法，進一步 包含於減少該材料之流動性步驟之前，剝除滿溢出該圓碟 體之外周邊之可輻射硬化液體材料之步驟。 經濟部智慧財產局員工消費合作社印製 4 .如申請專利範圍第1項之旋轉塗覆方法，其中硬 化以某種程度塗佈至該圓碟體上當作塗層之液體材料之暫 時性硬化步驟係爲減少該材料流動性之步驟，及該旋轉塗 覆方法尙包含此後一旦中止該圓碟體之旋轉、將該圓碟體 由該旋轉器移至另一地方、在此將具有硬化該可輻射硬化 液體材.料作用之輻射施加至該圓碟體、及執行該主要以完 全硬化塗佈當作該圓碟體上之塗層之液體材料之步驟。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 「41 - : ' 579303 A8 B8 C8 ___ D8 _ 六、申請專利範圍 2 (請先閱讀背面之注意事項再填寫本頁) 5 .如申請專利範圍第4項之旋轉塗覆方法，其中在 執行該主要硬化之步驟，該圓碟體係當旋轉時呈直線進行 地移動，及使其通過一放出該輻射之輻射源之照射區域， 以藉此硬化在該圓碟體上之液體材料。 6 · —種圓碟體，其藉著使用如申請專利範圍第1至 5項任一項之旋轉塗覆方法施行塗覆。 7 ·如申請專利範圍第6項之圓碟體，其是一以藍光 雷射拷貝之碟片’，且其中該塗覆薄膜形成其透光層。 8 . —種旋轉塗覆裝置，其包括： 一旋轉器構造，其用以固持及轉動一圓碟體； 一分配器構造，其用以供給一可輻射硬化液體材料至 藉著該旋轉器構造所固定圓碟體之中心附近；及 輻射施加機構，其用以將具有硬化該可輻射硬化液體 材料作用之輻射施加至藉著該旋轉器構造所固定之圓碟體 經濟部智慧財產局員工消費合作社印製 其特徵爲在該可輻射硬化液體材料係藉著該分配器構 造供給至藉著該旋轉器構造所固定之圓碟體中心附近之後 ’藉著該旋轉器構造旋轉該圓碟體，藉此該液體材料係散 佈在該圓碟體上且在該圓碟體上形成該液體材料之塗覆薄 膜，其後藉著停止該旋轉器構造使該圓碟體不會旋轉，及 使該圓碟體保持旋轉，操作該輻射施加機構及減少該液體 材料在該圓碟體上之流動性。 9 ·如申請專利範圍第8項之旋轉塗覆裝置，進一步 包括用以供給掩模構件之掩模構件供給機構，用以於固持 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） · 42 - 579303 經濟部智慧財產局員工消費合作社印製 A8 B8 C8 D8々、申請專利範圍 3 在該旋轉器構造之圓碟體上並接近該圓碟體之中心部份遮 蓋一部份圓碟體，且其特徵爲該分配器構造將該可輻射硬 化液體材料供給至安裝在該圓碟體上之掩模構件上，及藉 著該輻射施加機構設計該輻射之施加區域，以致該輻射未 施加至安裝在該圓碟體上之掩模構件。 i 〇 .如申請專利範圍第8項之旋轉塗覆裝置，進一 步包括邊緣淸洗機構，其用以於施加來自該輻射施加機構 之輻射之前剝除來自該圓碟體之外周邊所滿溢之可輻射硬 化液體材料。 1 1 .如申請專利範圍第8項之旋轉塗覆裝置，其中 該輻射施加機構係一暫時性硬化輻射施加部份，用以將該 圓碟體上之可輻射硬化液體材料之塗覆薄膜硬化至某種程 度，且該裝置尙包含一用以在該旋轉器構造之外側完全硬 化在該圓碟體上之可輻射硬化液體材料之塗覆薄膜之主要 硬化輻射施加部份。 1 2 .如申請專利範圍第1 1項之旋轉塗覆裝置，其 中該主要之硬化輻射施加部份具有一輻射施加單元，用以 將具有硬化可輻射硬化液體材料作用之輻射施加至一預定 施加區域；及一圓碟體移動構造，用以當轉動該圓碟體及 造成其通過該輻射施加單元之施加區域時平直地移動該圓 碟體。 1 3 · —種圓碟體，其藉著如申請專利範圍第8至 1 2項任一項之裝置施行塗覆。 · 1 4 .如申請專利範圍第1 3項之圓碟體，其是一以 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -43 - ： (請先閱讀背面之注意事項再填寫本頁) 579303 A8 B8 C8 D8 六、申請專利範圍 4 監光雷射拷貝之碟片，且其特徵爲藉者g亥5疋轉塗覆裝置所 塗佈當作塗層之液體材料係用以形成其透光層。 1 5 · —種施加輻射至塗佈於圓碟體上之可輻射硬化 液體材料以藉此硬化該液體材料之硬化方法，其特徵爲當 旋轉時平直地移動該圓碟體，及造成其通過一放出該輻射 之輻射源之照射區域，以藉此硬化在該圓碟體上之液體材 料。 1 6 · —種圓碟體，其藉著使用如申請專利範圍第 1 5項之硬化方法所製成。 1 7 . —種用以硬化一塗佈於圓碟體上之可輻射硬化 液體材料之硬化裝置，其特徵爲藉著用以將輻射施加至具 有硬化該可輻射硬化液體材料作用之預定施加區域之輻射 施加單元，及一用以當轉動該圓碟體及造成其通過該輻射 施加單元之施加區域時平直移動該圓碟體之圓碟體移動構 造。 1 8 .如申請專利範圍第1 7項之硬化裝置，其特徵 爲該圓碟體移動構造具有一滾珠螺桿、一可沿著該滾珠螺 桿之平直軸移動之螺帽、用以固定一安裝在該螺帽上之碟 片之可旋轉主軸、及一用以轉動該主軸之馬達。 1 9 _ 一種圓碟體’其藉著使用.如申請專利範圍第 1 7或1 8項之硬化裝置所製成。 2 0 . —種用以施行旋轉塗覆之旋轉塗覆裝置，其中 一液體材料係供給至一圓碟體之中心附近，其後旋轉該圓 碟體及藉著一離心力散佈該液體材料，以藉此在該圓碟體 本^張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁) 、tr 經濟部智慧財產局員工消費合作社印製 -44- 579303 A8 B8 C8 D8 六、申請專利範圍 5 上形成該液體材料之塗覆薄膜，其包括： 一'旋轉器構造’其用以固持及轉動3亥圓碟體； (請先閲讀背面之注意事項再填寫本頁) 一掩模，其用以掩蔽該圓碟體’以致塗覆薄膜不能形 成在接近該圓碟體中心之一些區域上’該掩模具有一延伸 穿過該處之穿透孔；及 一掩模供給及移去構造，其用以供給該掩模至該圓碟 體上，及由該圓碟體移去該掩模； 其中該旋轉器構造具有一用以真空吸附該掩模之構造 ，且於該圓碟體及該掩模係安裝在該旋轉器構造上之狀態 中，該構造用以真空吸附該掩模而吸附該掩模之空間經過 該掩模之穿透孔與外在大氣相通。 2 1 .如申請專利範圍第2 0項之旋轉塗覆裝置，其 特徵爲該掩模具有一用以遮蓋該圓碟體之碟片部份、及一 由該碟片部份之中心部份向上延伸之掩模緊抓圓柱體部份 ，且該穿透孔延伸穿過該碟片部份及該圓柱體部份。. 2 2 . —種圓碟體，其藉著使用如申請專利範圍第 2〇或2 1項之旋轉塗覆裝置施行塗覆。 經濟部智慧財產局員工消費合作社印製 2 3 . —種掩模，其用於一以液體材料旋轉塗覆安裝 在旋轉該圓碟體用之旋轉器構造上之圓碟體之裝置中，及 用於掩蔽該圓碟體，以致在接近該圓碟體中心.之一些區域 不能施行塗覆，其特徵爲該掩模係與設有一用以真空吸附 該掩模之構造之旋轉器構造一起使用’且該掩模係形成有 一用以與該構造之吸附空間相通之穿透孔’俾能於該圓碟 體及該掩模安裝在該旋轉器構造上之狀態中以外在大氣吸 本紙張尺度適用中國國家標率(CNS ) A4規格（210X297公釐） -45: &quot;&quot;&quot; 579303 A8 B8 C8 —-_-__ ‘、申請專利範圍 6 附該掩模。 2 4 .如申請專利範圍第2 3項之掩模，其特徵爲一 $以遮蓋該圓碟體之碟片部份、及一由該碟片部份之中心 ^份向上延伸之掩模緊抓圓柱體部份，且其中該穿透孔延 #穿過該碟片部份及該圓柱體部份。 2 5 . —種旋轉塗覆裝·置，其包括： 〜旋轉器構造，其用以固持及轉動一圓碟體； 一掩模供給及移去構造，其用於供給掩模以掩蔽該圓 ®體，以致在安裝於該旋轉器構造之圓碟體上而接近該圓 碟體中心之一些區域不能施行塗覆，及由該圓碟體移去該 掩模；及 一分配器，其用以於該圓碟體上供給一欲塗佈之液體 材料，當作一塗層； 其特徵爲該分配器係倂入該掩模供給及移去構造中， 及在該旋轉器構造上隨同該掩模供給及移去構造前進至一 預定位置及由該預定位置縮回。 2 6 ·如申請專利範圍第2 5項之旋轉塗覆裝置，其 特徵爲該掩模供給及移去構造包含一掩模移動支臂，用以 固定該掩模及該分配器之掩模固定機構係安裝在該支臂上 ;及一用以往復移動該掩模移動支臂之驅動構.造，以致該 掩模固定機構及該分配器可前進至該旋轉器構造上及由該 旋轉器構造縮回。 2 7 ·如申請專利範圍第2 5項之旋轉塗覆裝置，其 特徵爲該驅動構造係一滾珠螺桿構造。 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇χ297公楚） (請先閲讀背面之注意事項再填寫本頁) 裝· 、v*t» 經濟部智慧財產局員工消費合作社印製 579303 A8 B8 C8 D8_ ___ 々、申請專利範園 7 2 8 .如申請專利範圍第2 5或2 6項之旋轉塗覆裝 置，其特徵爲該驅動構造驅動該掩模移動支臂，以致該掩 模固定機構可於一用以保管該掩模之掩模儲存器及該旋轉 器構造之間往復移雲力° 2 9 . —種圓碟體’其藉著使用如申請專利範圍第 2 5至2 7項任一項之旋轉塗覆裝置施行塗覆。 3 0 . —種圓碟體’其藉著使用如申請專利範圍第 2 8項之旋轉塗覆裝置施行塗覆。 (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家梯準（CNS ) M規格（2!〇&gt;&lt;297公釐） -47 -579303 A8 B8 C8 D8 6. Scope of patent application 1 (Please read the precautions on the back before filling out this page) 1. A spin coating method that supplies a radiation-hardenable liquid material to a device mounted for rotation. The disc Near the center of the disc body on the rotor of the body, rotating the disc body, and spreading the liquid material on the disc body by centrifugal force, thereby forming a coating of liquid material on the surface of the disc body A thin film, characterized in that, before the disc body is rotated during spin coating, the application of radiation having a function of hardening the radiation-hardenable liquid material to the disc body is stopped, and the coating on the disc body is reduced to a coating. Layer of liquid material. 2. The spin coating method according to item 1 of the scope of patent application, further comprising the step of covering a portion of the disc body with a mask member near the center portion of the disc body before coating, and the feature is that the A radiation-hardening liquid material is supplied to the mask member, and in a step of reducing the fluidity of the material, when the radiation system is applied to the disc body, the radiation is not applied to the mask member. 3. The spin coating method according to item 1 of the scope of patent application, further comprising a step of stripping the radiation-hardenable liquid material overflowing the periphery of the disc body before the step of reducing the fluidity of the material. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 4. The spin coating method as described in the scope of patent application item 1, in which the temporary hardening step of hardening liquid materials applied to the disc body as a coating to a certain extent It is a step for reducing the fluidity of the material, and the spin coating method includes the following steps: once the rotation of the disc body is stopped, the disc body is moved from the spinner to another place, and there is Radiation-hardening liquid material. Radiation applied by the material is applied to the disc body, and the steps of performing a full hardening coating of the liquid material as a coating on the disc body are performed. This paper size applies to China National Standard (CNS) A4 specification (210X297 mm) "41-: '579303 A8 B8 C8 ___ D8 _ VI. Patent application scope 2 (Please read the precautions on the back before filling this page) 5. For example, in the method for applying a spin coating according to item 4 of the patent, in which the main hardening step is performed, the disk system moves linearly when rotated, and passes through an irradiation area of a radiation source emitting the radiation, In order to thereby harden the liquid material on the disc body. 6 ·-a disc body, which is applied by using a spin coating method such as any one of claims 1 to 5 of the patent application scope. The circular disc body in the scope of the patent application No. 6 is a disc copied with a blue laser, and the coating film forms a light-transmitting layer. 8. A spin coating device, comprising: a spin A structure for holding and rotating a disc body; a dispenser structure for supplying a radiation-hardenable liquid material near the center of the disc body fixed by the rotator structure; and a radiation applying mechanism that To The radiation having the effect of hardening the radiation-hardenable liquid material is applied to the disc body fixed by the rotator structure and printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, characterized in that the radiation-hardenable liquid material is distributed through the distribution After the device structure is supplied near the center of the disc body fixed by the spinner structure, the disc body is rotated by the spinner structure, whereby the liquid material is dispersed on the disc body and on the disc. A coating film of the liquid material is formed on the body, and then the disc body is prevented from rotating by stopping the rotator structure, and the disc body is kept rotating, the radiation applying mechanism is operated and the liquid material is reduced in the The fluidity on the disc body. 9 · If the rotary coating device of item 8 of the patent application scope, further includes a mask member supply mechanism for supplying a mask member, which is used to maintain the paper standard to apply Chinese national standards ( CNS) A4 specification (210X297mm) · 42-579303 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A8 B8 C8 D8々, patent application scope 3 The structured disc body covers a part of the disc body near the center of the disc body, and is characterized in that the dispenser structure supplies the radiation-hardenable liquid material to a cover mounted on the disc body. On the mold member, and by the radiation application mechanism, the application area of the radiation is designed so that the radiation is not applied to the mask member mounted on the disc body. The device further comprises an edge cleaning mechanism for stripping the radiation-curable liquid material overflowing from the periphery of the disc body before applying the radiation from the radiation application mechanism. 1 1. The spin coating device of item 8, wherein the radiation application mechanism is a temporary hardening radiation application part for hardening the coating film of the radiation hardenable liquid material on the disc body to a certain degree, and the device The plutonium contains a main hardening radiation application portion of a coating film of a radiation hardenable liquid material that is completely hardened on the disc body on the outside of the rotator structure. 12. The spin coating device according to item 11 of the scope of patent application, wherein the main hardening radiation application part has a radiation application unit for applying radiation having a role of hardening the radiation hardenable liquid material to a predetermined application An area; and a disc body moving structure for moving the disc body straight when the disc body is rotated and caused to pass through the application area of the radiation application unit. 1 3 · —A circular dish body, which is coated by a device such as any one of claims 8 to 12 of the scope of patent application. · 1. If the circular disk body of item 13 in the scope of patent application is a Chinese standard (CNS) A4 specification (210X297 mm) -43-: (Please read the precautions on the back first) (Fill in this page again) 579303 A8 B8 C8 D8 VI. Patent application scope 4 Supervised laser-copied discs, which are characterized by the use of liquid materials applied as coatings by borrowers Used to form its light transmitting layer. 1 5 · A hardening method of applying radiation to a radiation-hardenable liquid material coated on a disc body to thereby harden the liquid material, which is characterized in that the disc body is moved straightly when rotated, and causes it Passing through an irradiation area of a radiation source emitting the radiation, thereby hardening the liquid material on the disc body. 1 6 · —A circular disc body made by using a hardening method as described in item 15 of the patent application. 1 7. A hardening device for hardening a radiation hardenable liquid material coated on a disc body, characterized in that by applying radiation to a predetermined application area having a role of hardening the radiation hardenable liquid material A radiation application unit, and a disk body moving structure for directly moving the disk body when the disk body is rotated and caused to pass through the application area of the radiation application unit. 18. The hardening device according to item 17 of the scope of patent application, characterized in that the disc body moving structure has a ball screw, a nut that can move along the straight axis of the ball screw, and is used for fixing an installation. A rotatable spindle of a disc on the nut, and a motor for rotating the spindle. 1 9 _ A disc body is made by using, for example, a hardening device of item 17 or 18 of the scope of patent application. 2 0. A spin coating device for performing spin coating, in which a liquid material is supplied near the center of a circular disc body, and then the circular disc body is rotated and the liquid material is dispersed by a centrifugal force to thereby Here, the size of the disc is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling out this page), tr Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs- 44- 579303 A8 B8 C8 D8 6. The coating film for forming the liquid material on the scope of patent application 5 includes: a 'rotator structure' which is used to hold and rotate a 3 Hai round disc body; (Please read the Note: Please fill in this page again.) A mask used to mask the disc body so that the coating film cannot be formed on some areas near the center of the disc body. The mask has a penetration extending therethrough. A hole; and a mask supply and removal structure for supplying the mask to the disk body, and removing the mask from the disk body; wherein the rotator structure has a vacuum suction for the Mask structure And in a state where the disc body and the mask are mounted on the rotator structure, the structure is used to vacuum-adsorb the mask and the space where the mask is adsorbed passes through the penetration hole of the mask and the external atmosphere Communicate. 2 1. The spin coating device according to the scope of patent application No. 20, characterized in that the mask has a disc portion for covering the circular disc body, and a center portion of the disc portion faces upward The extended mask grips the cylindrical portion, and the penetrating hole extends through the disc portion and the cylindrical portion. 2 2. — A disc body that is coated by using a spin coating device such as the scope of patent application No. 20 or 21. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 2 3. A mask for spin-coating a disc body mounted on a spinner structure for rotating the disc body with a liquid material, and For masking the disc body so that coating cannot be applied in some areas near the center of the disc body, which is characterized in that the mask is used with a rotator structure provided with a structure for vacuum-absorbing the mask. 'And the mask is formed with a penetrating hole for communicating with the adsorption space of the structure.' The paper size can be absorbed in the atmosphere outside the state where the disc body and the mask are mounted on the rotator structure. Applicable to China National Standard (CNS) A4 specification (210X297 mm) -45: &quot; &quot; &quot; 579303 A8 B8 C8 —-_-__ ', patent application scope 6 Attach this mask. 24. The mask according to item 23 of the scope of patent application, characterized by a dollar to cover the disc portion of the circular disc body, and a mask extending upward from the center of the disc portion. Grasp the cylindrical portion, and wherein the penetration hole extends # through the disc portion and the cylindrical portion. 2 5. A spin coating device including: ~ a spinner structure for holding and rotating a disc body; a mask supply and removal structure for supplying a mask to mask the circle® Body, so that some areas near the center of the disc body mounted on the disc body of the rotator structure cannot be coated, and the mask is removed from the disc body; and a dispenser for A liquid material to be coated is provided on the disc body as a coating layer; the feature is that the dispenser is inserted into the mask supply and removal structure, and the mask is provided with the mask on the rotator structure. The mold supply and removal structure advances to and retracts from a predetermined position. 2 6 · The spin coating device according to item 25 of the patent application, characterized in that the mask supply and removal structure includes a mask moving arm for fixing the mask and the mask fixing of the dispenser. The mechanism is mounted on the arm; and a driving mechanism for reciprocating the mask moving arm, so that the mask fixing mechanism and the dispenser can be advanced to the rotator structure and by the rotator. Constructed retracted. 2 7 · The spin coating device according to item 25 of the patent application, characterized in that the driving structure is a ball screw structure. This paper size is in accordance with Chinese National Standard (CNS) A4 (21〇χ297). (Please read the precautions on the back before filling out this page.) Installation, v * t A8 B8 C8 D8_ ___ 々, patent application park 7 2 8. If the patent application scope of the spin coating device 25, 26, characterized in that the driving structure drives the mask to move the arm, so that the mask The fixing mechanism can move the cloud force back and forth between a mask storage for storing the mask and the structure of the rotator ° 2 9.-A kind of circular dish body, which can be used as described in the patent application No. 2 5 to 2 The spin coating device of any one of 7 items performs coating. 30. A kind of circular disc body 'is coated by using a spin coating device such as the scope of patent application No. 28. (Please read the notes on the back before filling this page) The paper size printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs applies to the Chinese National Standard (CNS) M specification (2! 〇 &gt; &lt; 297 mm) -47 -
TW91108005A 2001-04-19 2002-04-18 Spin coating method and apparatus, and mask used in the same method and apparatus TW579303B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001121378A JP4002076B2 (en) 2001-04-19 2001-04-19 Spin coating apparatus using mask and mask for spin coating
JP2001121377A JP4076120B2 (en) 2001-04-19 2001-04-19 Spin coating method and apparatus

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CN107570362B (en) * 2017-08-11 2019-05-28 清远市德晟嘉恒能源环保工程有限责任公司 Spraying equipment for lamps and lanterns nano coating
JP6606239B1 (en) 2018-08-22 2019-11-13 株式会社オリジン Method for manufacturing coated object
CN112871578B (en) * 2021-01-19 2022-07-22 北京亚宝生物药业有限公司 Preparation device and preparation method of patch

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CN1386588A (en) 2002-12-25
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