CN105304437A - Microwave-modulated cold cathode miniature array-type radiation source and implementation method thereof - Google Patents

Microwave-modulated cold cathode miniature array-type radiation source and implementation method thereof Download PDF

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CN105304437A
CN105304437A CN201510675065.0A CN201510675065A CN105304437A CN 105304437 A CN105304437 A CN 105304437A CN 201510675065 A CN201510675065 A CN 201510675065A CN 105304437 A CN105304437 A CN 105304437A
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microwave
cold cathode
radiation source
electron beam
resonant cavity
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CN105304437B (en
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袁学松
谢杰
王彬
李海龙
鄢扬
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University of Electronic Science and Technology of China
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University of Electronic Science and Technology of China
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Abstract

The invention discloses a microwave-modulated cold cathode miniature array-type radiation source and an implementation method thereof, and solves existing technical problems. The microwave-modulated cold cathode miniature array-type radiation source uses a microwave-modulated cold cathode electron gun to act as an electron source; an array-type interaction resonant cavity is matched with the microwave-modulated cold cathode electron gun in use; and the array-type interaction resonant cavity comprises more than two interaction resonant cavities which are arranged in an equally spaced mode, and the center-to-center spacing L of adjacent interaction resonant cavities is greater than zero. According to the invention, common-frequency or frequency doubling amplified output of signals of one radiation source in an array by using only one resonant cavity, so that the structural volume and the processing difficulty of each radiation source device in the array are reduced. Meanwhile each radiation source in the array is controllable in phase, thereby having positive significance for realizing miniaturization and integration of microwave electrical vacuum devices.

Description

A kind of microwave modulation cold cathode miniature array radiation source and its implementation
Technical field
The invention belongs to microwave, millimeter wave, submillimeter wave and Terahertz band radiation source technology field, relate to a kind of electrovacuum radiation source device, specifically, relate to a kind of microwave modulation cold cathode miniature array radiation source and its implementation.
Background technology
Microwave, millimeter wave, submillimeter wave electrovacuum radiation source device are as indispensable core devices of Military Electronics system such as radar, electronic countermeasures, space communications, always in widespread attention.Traditional electrovacuum radiation source device electron gun generally adopts thermal emission cathode system, through the development of decades, thermal emission cathode technique is very ripe, be widely used in all kinds of electrovacuum radiation source device, but thermal emission cathode exists following significantly shortcoming: complex structure, cost is high, cathod system is made up of various metals and ceramic component, because hot cathode is operated in the hot environment of thousands of degree, the filament heated in negative electrode easily ruptures or short circuit, causes device failure; On the other hand, due to needs heating power, add the complexity of system, reduce system effectiveness, need the long period just can reach working temperature, especially for high power device, its start-up time often reaches a few minutes, brings very big inconvenience to use; Meanwhile, because hot cathode complex structure is also that electrovacuum radiation source device is difficult to integrated one of the main reasons.
Hot cathode electrovacuum radiation source compared by solid-state semiconductor radiation source device, and to have volume little, accessible site, the advantages such as fast response time, but it has: anti-interference, radiation hardness ability is weak, the shortcomings such as power is low, particularly under space environment, solid state radiation sources device reliability is difficult to be guaranteed.
Micro electric vacuum radiation source device is expected to solve above-mentioned two class device Problems existing, it has the features such as volume is little, accessible site to compare hot cathode electron tube, compare solid state radiation sources device it to have anti-interference, radiation hardness ability strong, meanwhile, the features such as power output is large.In the device of micro electric vacuum radiation source, first need to adopt field emission cold-cathode to solve the generation in free electron source, compared with thermionic emission, field emission cold-cathode has low in energy consumption, the series of advantages such as accessible site, size are little, fast response time, have anti-interference compared with solid state device, radiation hardness ability is strong, high-power advantage, therefore, it is the desired electronic emission source of micro electric vacuum radiation source device.
In traditional microwave electron tube, the power output of klystron can have been accomplished very high now, but the volume of klystron is relatively large, is difficult to accomplish integrated, the amplification that traditional klystron at least needs an input, output cavity could realize signal.
Summary of the invention
The object of the invention is to overcome above-mentioned defect, provide a kind of structure simple, realize the cold cathode of microwave modulation easily miniature array radiation source.
To achieve these goals, the technical solution used in the present invention is as follows:
A kind of microwave modulation cold cathode miniature array radiation source, comprising:
Utilize the cold-cathode gun that microwave is modulated, for as electron source;
Array interaction oscillator, with the described cold-cathode gun utilizing microwave to modulate with the use of;
Described array interaction oscillator comprises the interaction oscillator of two or more equidistant placement, and the center distance L of adjacent interaction oscillator is greater than zero;
Described interaction oscillator comprises resonant cavity housing, two relatively and be separately positioned on the electron beam drift pipeline of described resonant cavity enclosure interior upper/lower terminal, between two electron beam drift pipelines, there is gap, and the electron beam drift pipeline being positioned at upper end is collector;
The side of described resonant cavity housing is also provided with the outer conductor protruding described resonant cavity housing and the inner wire being positioned at described outer conductor, simultaneously, also be provided with pottery between and export window, and described outer conductor, described inner wire and described pottery output window are coaxial; Described outer conductor hollow is also communicated with described resonant cavity housing;
In described resonant cavity housing, be also provided with coupling loop with described inner wire homonymy, described coupling loop one end is connected with described inner wire, the other end is connected with described resonant cavity inner walls.
Further, described coupling loop, outer conductor, inner wire and pottery export window be arranged at described resonant cavity enclosure interior upper end and be positioned at described electron beam drift pipeline side.
Further, the described cold-cathode gun utilizing microwave to modulate comprises electron gun housing, and the electron gun rifle rifle core be made up of microwave input layer and lower electrode plate and cold cathode, electric pole plate;
Described electron gun rifle rifle core crosses described electron gun housing, and described microwave input layer is arranged between described lower electrode plate and described electric pole plate, and its upper and lower surface is fixed with described electric pole plate and described lower electrode plate respectively;
Described electron gun housing upper end and described interaction oscillator seal and form vacuum chamber, and its lower end and described lower electrode plate seal;
One is provided with just to electron beam and the modulated microwave interaction gap of described electron beam drift pipeline in the stage casing of described microwave input layer, described cold cathode is then embedded on the described lower electrode plate bottom described electron beam and modulated microwave interaction gap, makes described electron beam drift pipeline aim at electron gun electron beam channel;
Described electric pole plate just offers array electronic to the region of described cold cathode and described electron beam and modulated microwave interaction gap and notes delivery outlet; Each hole dimension of described array electronic note delivery outlet is all less than microwave wavelength.
Further, described cold cathode number is mated with the number of described interaction oscillator.
Further, the center distance L of adjacent described interaction oscillator meets following relation:
When requiring two adjacent interaction oscillator phase places identical, the center distance L between two interaction oscillators is the even-multiple of microwave half-wavelength in microwave input layer;
When requiring each adjacent two interaction oscillator phase places contrary, the centre-to-centre spacing between two interaction oscillators is the odd-multiple of microwave half-wavelength in microwave input layer.
Further, the even-multiple of described microwave half-wavelength is 2,4,6,8,10,12 or 14 times; The odd-multiple of described microwave half-wavelength is 3,5,7,9,11,13 or 15 times
Further, described array electronic note delivery outlet is placed in described electron gun housing cavity axial location, and lower electrode plate, electron gun rifle core both sides and electric pole plate end face, resonant cavity housing are integrally fixed by electron gun housing seal.
Further, described array electronic note delivery outlet is formed by laser ablation, and the shape in its hole is circular hole, square hole or bar hole.
Further, the dielectric of described microwave input layer to be dielectric constant be 2-10.
The implementation method of microwave modulation cold cathode miniature array radiation source, comprises the following steps:
(1) electric pole plate connects direct voltage, the step of lower electrode plate ground connection;
(2) by step that microwave inputs from microwave input layer left end; Now, multiple modulation electron beam is obtained under the effect of radio-frequency field that cold cathode surface produces at electrostatic field and microwave simultaneously;
(3) each modulation electron beam enters the step of electron beam drift pipeline by respective array electronic note delivery outlet;
(4) modulate electron beam self-oscillation in respective vacuum resonant cavity, produce with frequency/frequency multiplication microwave, modulation electron beam Conversion of Energy is microwave;
(5) export microwave by coupling loop and coaxial configuration, the same to frequency/frequency multiplication realizing input signal amplifies output, and input signal is separated with output signal simultaneously;
(6) according to each cold cathode/resonant cavity particular location in modulated microwave transmission direction, control the phase place that each exports microwave signal, realize phase place controlled.
Compared with prior art, the present invention has following beneficial effect:
The present invention uses microwave to modulate cold cathode array electronic rifle as electron source, coordinate array interaction oscillator, after utilizing the high-frequency electric field in microwave to carry out emission density modulation to each electron beam between anode and cathode, each electron beam is by respective electric pole plate, after array electronic note delivery outlet enters respective resonant cavity, self-excitation produces with frequency/frequency multiplication microwave and further mutual effect occurs with it respectively, its energy is given microwave and is produced electromagnetic radiation by electron beam, its same frequency/frequency multiplication that a resonant cavity need be used just can to realize signal amplifies output, thus reduce structural volume and the difficulty of processing of device, in array, each radiation source phase place is controlled simultaneously, this accomplishes microminiaturization to microwave electron tube, integrated have positive effect.
Accompanying drawing explanation
Fig. 1 is the generalized section of the present invention-embodiment 1.
Fig. 2 is the generalized section of the present invention-embodiment 2.
Fig. 3 is the generalized section of the present invention-embodiment 3.
In above-mentioned accompanying drawing, the component names that Reference numeral is corresponding is as follows: 1. collector, 2. resonant cavity housing, 3. coupling loop, 4. inner wire, 4-1. outer conductor, 5. pottery exports window, 6 electric pole plates, 7. lower electrode plate, 8. cold cathode, 9. array electronic note delivery outlet, 10. electron gun housing, 11. microwave input layers, 11-1. electron beam and modulated microwave interaction gap, 12. electron beam drift pipelines.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described, and embodiments of the present invention include but not limited to the following example.
embodiment 1
As shown in Figure 1, present embodiments provide a kind of microwave modulation cold cathode miniature array radiation source, this array radiation source is made up of several radiation source equidistant placement, each radiation source is all the cold-cathode guns based on utilizing microwave to modulate, again on this basis in conjunction with interaction oscillator, this resonant cavity is made to occur to note ripple mutual effect with the electron beam modulated through characteristic frequency microwave, produce same frequency and frequency multiplication high-frequency electromagnetic signal that assigned frequency is amplified in electromagnetic viscosimeter radiation, design principle is as follows: the premodulated electron beam launched by characteristic frequency microwave modulation cold-cathode gun is through one section of drift section, again by a high-frequency resonant cavity, radio-frequency field is played and mutual effect at resonant cavity underexcitation, complete the mutual effect of note ripple, realize energy exchange, by a coupling device and output window structure, the higher frequency signal energy in resonant cavity is exported again.
A radiation source comprises a cold-cathode gun utilizing microwave to modulate and an interaction oscillator two parts (Fig. 1 only show the local of the cold-cathode gun utilizing microwave to modulate).The electron gun rifle rifle core that the cold-cathode gun utilizing microwave to modulate comprises electron gun housing and is made up of microwave input layer and lower electrode plate and cold cathode, electric pole plate.Electron gun rifle core crosses electron gun housing, and microwave input layer is arranged between lower electrode plate and described electric pole plate, and its upper and lower surface is fixed with described electric pole plate and described lower electrode plate respectively; Electron gun housing upper end and interaction oscillator seal and form vacuum chamber, and its lower end and described lower electrode plate seal.
In the present embodiment, electron gun upper, a microwave input layer is set up between lower electrode plate, and above the cold cathode in microwave input layer stage casing, offer a cavity as electron beam and modulated microwave interaction gap, cold cathode is embedded on the lower electrode plate bottom electron beam and modulated microwave interaction gap, just the array electronic that one group of each hole dimension is less than microwave wavelength is offered to the electric pole plate on electron beam and modulated microwave interaction gap and cold cathode top and note delivery outlet, as electron beam delivery outlet, bore size is less than microwave wavelength (electromagnetism field wave), open the Electric Field Distribution impact of array hole target surface little, simultaneously because bore size is less than microwave wavelength, therefore the transmission of microwave is not affected.
The cold-cathode gun utilizing microwave to modulate, in vacuum environment, after electric pole plate adds quiet positive potential, can make the cold cathode on lower electrode plate produce stable autoelectronic current; When microwave inputs with quasi-plane wave pattern, microwave high frequency electric field direction vector is parallel with electrostatic field, when its direction is consistent with electrostatic field, the electric field strength on cold cathode surface will be reinforced, contrary with electrostatic field time then weaken; In electron beam and modulated microwave interaction gap, the microwave action of certain frequency is in cold cathode emission electric field, its electric field frequency also changes with microwave frequency, make the frequency of produced electron beam identical with the microwave frequency of input, thus effectively achieve by the modulation of microwave to cold cathode emission electric current, under the same conditions in the present invention the space of electron beam and modulated microwave interaction gap less than 1/10th of routine techniques.The modulation amplitude of the larger electron beam of microwave power amplitude is also larger, meanwhile, can be obtained the electron beam of different frequency and intensity modulated state, realize wide band modulation by change input microwave frequency and intensity; For the microwave situation of same input power, frequency, by improving the potential difference of upper and lower battery lead plate, namely increasing electrostatic field intensity, also can increase the modulation amplitude of electron beam.
The structure of interaction oscillator is as follows: interaction oscillator is formed primarily of resonant cavity housing, two ends up and down relative in resonant cavity housing are respectively arranged with electron beam drift pipeline, between two electron beam drift pipelines, there is gap, and the electron beam drift pipeline being positioned at upper end is collector; The side of resonant cavity housing be also provided with the outer conductor of protrusion resonant cavity housing and be positioned at the inner wire of outer conductor, meanwhile, being also provided with pottery between and exporting window, and outer conductor, inner wire and pottery output window are coaxial; Outer conductor hollow is also communicated with resonant cavity housing; In resonant cavity housing, be also provided with coupling loop with inner wire homonymy, coupling loop one end is connected with inner wire, the other end is connected with resonant cavity inner walls.Wherein, coupling loop, outer conductor, inner wire and pottery export window be arranged at described resonant cavity enclosure interior upper end and be positioned at described electron beam drift pipeline side.Modulation electron beam enters electron beam drift pipeline by array electronic note delivery outlet, through one section of drift, electron beam is made to reach optimum bunching, and then pass through resonant cavity, rise with frequency or frequency multiplication microwave and mutual effect further with it at resonant cavity underexcitation, complete the mutual effect of note ripple, realize energy exchange, export window by the same frequency in resonant cavity or frequency multiplication microwave signal Energy transmission finally by coupling device and pottery.
Due to spacing and the radio-frequency field transformation parameter phase matched of each cold cathode, therefore the phase modulation of each electron beam also will mate, and reach phase place controlled.According to actual required array radiation source number determination resonant cavity and negative electrode number, resonant cavity number n is 2-200.The center distance L of each interaction oscillator according in microwave input layer transmit whether identical the phase place of microwave between adjacent two interaction chambers be determines successively, namely when requiring two adjacent interaction oscillator phase places identical, center distance between two interaction oscillators is the even-multiple of microwave half-wavelength in microwave input layer, and the value of even-multiple is 2,4,6,8,10,12 or 14 times; When requiring each adjacent two interaction oscillator phase places contrary, the centre-to-centre spacing between two interaction oscillators is the odd-multiple of microwave half-wavelength in microwave input layer, and the value of odd-multiple is 3,5,7,9,11,13 or 15 times.Wherein, microwave half-wavelength in microwave input layer is after the number first determining interaction chamber and physical dimension, is obtained by the emulation of 3 D electromagnetic simulation software.Interaction oscillator is rectangle cavity, circular cylindrical cavity or water chestnut cylindrical chamber.
Embodiment 2
Manufacture the array radiation source, same frequency homophase three chamber of a S-band, method is as follows:
For S-band (2.45GHz) array radiation source, Fig. 2 illustrates the cross-sectional view of radiation source device in the present embodiment.As shown in Figure 1, electron gun housing 10 internal diameter φ 5.45mm, external diameter φ 8mm, height 2mm, material is 99# pottery, and its lower end and lower electrode plate seal, upper end and interaction oscillator seal and form sealed vacuum room, and interaction oscillator material is oxygen-free copper.The electron gun rifle rifle core be made up of microwave input layer and lower electrode plate and cold cathode, electric pole plate crosses electron gun housing, distance between electric pole plate and lower electrode plate is 0.2mm, electron beam delivery outlet is placed in housing cavity axial location, and lower electrode plate, electron gun rifle core both sides and electric pole plate end face, resonant cavity housing are integrally fixed by electron gun housing seal; Wherein lower electrode plate (long × wide × thick) 20 × 7 × 0.75mm, material are magnetism-free stainless steel, and the cold cathode diameter on it is φ 2.8mm, thick 1 μm, carbon nano-tube sheet material; Microwave input layer (long × wide × thick) 20 × 7 × 0.25mm, material are polytetrafluoroethylene, and interaction gap, middle part area is 7 × 7mm, high to input thickness with microwave identical; Electric pole plate (long × wide × thick) 20 × 7 × 0.05mm, material are magnetism-free stainless steel, in the middle part of electric pole plate, laser ablation 20 × 20=400 length of side in scope corresponding to interaction chamber, is adopted to be the array type square hole of 0.16 × 0.16mm, as electron beam delivery outlet.Interaction oscillator body interior diameter is φ 61.2mm, the thick 2mm of cavity, and height 25mm, material is copper.Interaction oscillator body drift pipeline interior diameter is φ 10.9mm; Gap length 4.3mm.Coupling loop 3 ring body thickness 1mm, ring body width 4mm, ring axial height a=9mm, ring radial width b=8mm; Inner wire internal diameter 1.5mm, external diameter 3.5mm.Coaxial delivery outlet uses material 99# ceramic seal, and namely pottery exports window.The radiation source structure that microstrip structure processes same size size successively forms array, spacing L between adjustment radiation source obtains the high-frequency signal of out of phase, in present case, source center spacing L=122mm obtains the high frequency output signal of same phase, its structural representation as shown in Figure 2, each parts are welded together, exhaust station is vented, finally obtains the sealed vacuum pipe of ultra high vacuum degree.
In the implementation case, electric pole plate 6 connects 2000V direct voltage, lower electrode plate ground connection, the suitable cold sheet material of carbon nano-tube is adopted to make negative electrode, be that 2.45GHz(also can be other frequencies by frequency), power is that microwave E (t) of 5W inputs from microwave input layer left end, now three cathode surfaces obtain three modulated electron beams of emission density simultaneously under the effect of electrostatic field and microwave high-frequency field, each electron beam is made to reach optimum bunching by regulating the length of drift pipeline, make each clustering electron beam by respective resonant cavity again, rise with homophase microwave also mutual effect further with it frequently at resonant cavity underexcitation, complete the mutual effect of note ripple, realize energy exchange, finally by respective coupling device and ceramic output window structure by the same frequency homophase microwave signal Energy transmission in respective resonant cavity.
Embodiment 3
Manufacture 2 array radiation sources, frequency multiplication homophase five chamber of a C-band (4.9GHz), method is as follows:
For C-band (4.9GHz) 2 times of frequency radiation source, the structural representation of this times of frequency radiation source as shown in Figure 3, this construction packages with assembling and embodiment 1 similar.Electron gun housing inner diameter φ 2.67mm, external diameter φ 5mm, height 1mm, material is 99# pottery, and its lower end and lower electrode plate seal, upper end and interaction oscillator seal and form sealed vacuum room, and interaction oscillator material is oxygen-free copper.The electron gun rifle rifle core be made up of microwave input layer and lower electrode plate and cold cathode, electric pole plate crosses electron gun housing, distance between electric pole plate and lower electrode plate is 0.2mm, electron beam delivery outlet is placed in housing cavity axial location, and lower electrode plate, electron gun rifle core both sides and electric pole plate end face, resonant cavity housing are integrally fixed by electron gun housing seal; Wherein lower electrode plate (long × wide × thick) 10 × 4 × 0.75mm, material are magnetism-free stainless steel, and the cold cathode diameter on it is φ 1.8mm, thick 1 μm, carbon nano-tube sheet material; Microwave input layer (long × wide × thick) 10 × 4 × 0.25mm, material are polytetrafluoroethylene, and interaction gap, middle part area is 4 × 4mm, high to input thickness with microwave identical; Electric pole plate (long × wide × thick) 10 × 4 × 0.05mm, material are magnetism-free stainless steel, in the middle part of electric pole plate, laser ablation 20 × 20=400 length of side in scope corresponding to interaction gap, is adopted to be the array type square hole of 0.1 × 0.1mm, as electron beam delivery outlet.Interaction oscillator body interior diameter is φ 30mm, the thick 2mm of cavity, and height 18mm, material is copper.Interaction oscillator drift pipeline interior diameter is φ 5.34mm; Gap length 2.3mm.Coupling loop 3 ring body thickness 0.5mm, ring body width 2mm, ring axial height a=5mm, ring radial width b=4mm; Inner wire internal diameter 0.75mm, external diameter 1.5mm.Coaxial delivery outlet uses material 99# ceramic seal, and namely pottery exports window.The radiation source structure that microstrip structure processes same size size successively forms array, and the spacing L between adjustment radiation source obtains the high-frequency signal of out of phase, source center spacing L=122mm in present case.Obtain the high frequency output signal of same phase, each parts as shown in Figure 3, weld together, exhaust station are vented by its structural representation, finally obtain the sealed vacuum pipe of ultra high vacuum degree.
In the implementation case, electric pole plate connects 1800V direct voltage, lower electrode plate 7 ground connection, the suitable cold sheet material of carbon nano-tube is adopted to make negative electrode, be that 2.45GHz(also can be other frequencies by frequency), power is that microwave E (t) of 0.1W inputs from microwave input layer left end, now five cathode surfaces obtain the modulated homophase electron beam of five emissioies simultaneously under the effect of electrostatic field and microwave high-frequency field, each electron beam is made to reach optimum bunching by regulating the length of drift pipeline, and then by respective resonant cavity, frequency multiplication homophase microwave is played and mutual effect further with it at respective resonant cavity underexcitation, complete the mutual effect of note ripple, realize energy exchange, window is exported by the frequency multiplication homophase microwave signal Energy transmission in each resonant cavity finally by coupling device and pottery.
According to above-described embodiment, just the present invention can be realized well.What deserves to be explained is; under prerequisite based on above-mentioned design principle; for solving same technical problem; even if some making on architecture basics disclosed in this invention are without substantial change or polishing; the essence of the technical scheme adopted is still the same with the present invention, therefore it also should in protection scope of the present invention.

Claims (10)

1. a microwave modulation cold cathode miniature array radiation source, comprising:
Utilize the cold-cathode gun that microwave is modulated, for as electron source;
Array interaction oscillator, with the described cold-cathode gun utilizing microwave to modulate with the use of;
Described array interaction oscillator comprises the interaction oscillator of two or more equidistant placement, and the center distance L of adjacent interaction oscillator is greater than zero;
Described interaction oscillator comprises resonant cavity housing (2), two relatively and be separately positioned on electron beam drift pipeline (12) of the inner upper/lower terminal of described resonant cavity housing (2), between two electron beams drift pipeline (12), there is gap, and electron beam drift pipeline (12) being positioned at upper end is collector (1);
The side of described resonant cavity housing (2) is also provided with the outer conductor (4-1) protruding described resonant cavity housing (2) and the inner wire (4) being positioned at described outer conductor (4-1), simultaneously, also be provided with pottery between and export window (5), and described outer conductor (4-1), described inner wire (4) and described pottery export window (5) coaxially; Described outer conductor (4-1) hollow is also communicated with described resonant cavity housing (2);
In described resonant cavity housing (2), be also provided with coupling loop (3) with described inner wire (4) homonymy, described coupling loop (3) one end is connected with described inner wire (4), the other end is connected with described resonant cavity housing (2) inwall.
2. microwave modulation cold cathode miniature array radiation source according to claim 1, it is characterized in that, described coupling loop (3), outer conductor (4-1), inner wire (4) and pottery export window (5) and are arranged at the inner upper end of described resonant cavity housing (2) and the side being positioned at described electron beam drift pipeline (12).
3. microwave modulation cold cathode miniature array radiation source according to claim 2, it is characterized in that, the described cold-cathode gun utilizing microwave to modulate comprises electron gun housing (10), and the electron gun rifle core be made up of microwave input layer (11) and lower electrode plate (7) and cold cathode (8), electric pole plate (6);
Described electron gun rifle core crosses described electron gun housing (10), described microwave input layer (11) is arranged between described lower electrode plate (7) and described electric pole plate (6), and its upper and lower surface is fixed with described electric pole plate (6) and described lower electrode plate (7) respectively;
Described electron gun housing (10) upper end and described interaction oscillator seal and form vacuum chamber, and its lower end and described lower electrode plate (7) seal;
One is provided with just to electron beam and modulated microwave interaction gap (11-1) of described electron beam drift pipeline (12) in the stage casing of described microwave input layer (11), described cold cathode (8) is then embedded on the described lower electrode plate (7) of described electron beam and modulated microwave interaction gap (11-1) bottom, makes described electron beam drift pipeline (12) aim at electron gun electron beam channel;
Described electric pole plate (6) just offers array electronic to the region of described cold cathode (8) and described electron beam and modulated microwave interaction gap (11-1) and notes delivery outlet (9); Each hole dimension of described array electronic note delivery outlet (9) is all less than microwave wavelength.
4. microwave modulation cold cathode miniature array radiation source according to claim 3, it is characterized in that, described cold cathode (8) number is mated with the number of described interaction oscillator.
5. microwave modulation cold cathode miniature array radiation source according to claim 4, it is characterized in that, the center distance L of adjacent described interaction oscillator meets following relation:
When requiring two adjacent interaction oscillator phase places identical, the center distance L between two interaction oscillators is the even-multiple of microwave half-wavelength in microwave input layer;
When requiring each adjacent two interaction oscillator phase places contrary, the centre-to-centre spacing between two interaction oscillators is the odd-multiple of microwave half-wavelength in microwave input layer.
6. microwave modulation cold cathode miniature array radiation source according to claim 5, it is characterized in that, the even-multiple of described microwave half-wavelength is 2,4,6,8,10,12 or 14 times; The odd-multiple of described microwave half-wavelength is 3,5,7,9,11,13 or 15 times.
7. microwave modulation cold cathode miniature array radiation source according to claim 4, it is characterized in that, described array electronic note delivery outlet (9) is placed in described electron gun housing (10) lumen shaft line position, and lower electrode plate (7), electron gun rifle core both sides and electric pole plate (6) end face, resonant cavity housing (2) are integrally fixed by electron gun housing (10) sealing.
8. microwave modulation cold cathode miniature array radiation source according to claim 7, it is characterized in that, described array electronic note delivery outlet (9) is formed by laser ablation, and the shape in its hole is circular hole, square hole or bar hole.
9. microwave according to claim 4 modulation cold cathode miniature array radiation source, is characterized in that, described microwave input layer (11) for dielectric constant be the dielectric of 2-10.
10. the implementation method of the microwave modulation cold cathode miniature array radiation source as described in any one of claim 1-9, is characterized in that, comprise the following steps:
(1) electric pole plate connects direct voltage, the step of lower electrode plate ground connection;
(2) by step that microwave inputs from microwave input layer left end; Now, multiple modulation electron beam is obtained under the effect of radio-frequency field that cold cathode surface produces at electrostatic field and microwave simultaneously;
(3) each modulation electron beam enters the step of electron beam drift pipeline by respective array electronic note delivery outlet;
(4) modulate electron beam self-oscillation in respective resonant cavity, produce with frequency/frequency multiplication microwave, modulation electron beam Conversion of Energy is the step of microwave;
(5) export microwave by coupling loop and coaxial configuration, the same to frequency/frequency multiplication realizing input signal amplifies the step exported;
(6) according to each cold cathode/resonant cavity particular location in modulated microwave transmission direction, control the step that each exports the phase place of microwave signal, realize phase place controlled.
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CN107591305B (en) * 2017-08-29 2019-09-17 电子科技大学 A kind of compact oscillator based on cold cathode
CN110211855A (en) * 2019-06-04 2019-09-06 电子科技大学 A kind of multipole many electrons' system radiation source based on cold cathode

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