CN103606503A - Microwave modulation multi-electron-beam cold cathode electronic gun with controllable phases - Google Patents

Microwave modulation multi-electron-beam cold cathode electronic gun with controllable phases Download PDF

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CN103606503A
CN103606503A CN201310611408.8A CN201310611408A CN103606503A CN 103606503 A CN103606503 A CN 103606503A CN 201310611408 A CN201310611408 A CN 201310611408A CN 103606503 A CN103606503 A CN 103606503A
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microwave
cold
electrode plate
cathode
cold cathode
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CN103606503B (en
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袁学松
鄢扬
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University of Electronic Science and Technology of China
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University of Electronic Science and Technology of China
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Abstract

The invention belongs to a cold cathode electronic gun matched with integratable electronic vacuum radiation source devices. The cold cathode electronic gun comprises an electronic gun shell, a base of the electronic gun shell, an upper electrode plate, a lower electrode plate and a microwave input layer, wherein through holes of which the number is the same as the number of cold cathodes are formed in the microwave input layer. The through holes in the microwave input layer, the upper electrode plate and the lower electrode plate jointly form interaction cavities with the corresponding number. The cold cathodes are embedded into the lower electrode plate at the bottoms of the corresponding interaction cavities respectively. A set of array electron beam output holes of which the sizes are all smaller than microwave lengths are formed in the upper electrode plate area which is over against each interaction cavity. The cold cathode electronic gun has the advantages that beam wave interaction space is small, microwaves of different frequencies can be fed in according to requirements to modulate emission currents of the multiple cold cathode to generate multiple electron beams of different modulation frequencies and strength, the microwave modulation phase of each electron beam is controllable, multiple electron beam sources can be provided for integrated miniature electronic vacuum radiation source devices, output power is high, and the application range is effectively expanded.

Description

The controlled polyelectron of a kind of microwave phase modulation is noted cold-cathode gun
Technical field
The present invention relates to a kind of can integrated electric vacuum radiation source device supporting with electron gun, particularly a kind of adjustable feed-in microwave frequency to produce a plurality of electron beams and the controlled cold-cathode gun of phase place of different modulating frequency.
Background technology
Microwave electrovacuum radiation source device is always in widespread attention as indispensable core devices of Military Electronics system such as radar, electronic countermeasures, space communications.At above-mentioned electrovacuum radiation source device electron gun parts, occupy very important status, traditional electrical vacuum radiation source device electron gun generally adopts heat emission cathod system, development through decades, heat emission cathode technique is very ripe, be widely used in all kinds of electrovacuum radiation source devices, but there is following significantly shortcoming in heat emission negative electrode: complex structure, cost is high, cathod system consists of various metals and ceramic component, because hot cathode is operated in the hot environment of thousands of degree, in negative electrode, heat easily fracture or the short circuit of filament of use, cause device failure, during on the other hand due to work, need long period heating, not only increased the complexity of system, also reduced system effectiveness, in addition due to hot cathode complex structure, cathode temperature height is also that electrovacuum radiation source device is difficult to integrated one of the main reasons.
Micro electric vacuum radiation source device compare hot cathode electron tube it have volume little, can be integrated etc. feature, in the device of micro electric vacuum radiation source, first need to adopt field emission cold cathode to solve the generation in free electron source, field emission is on surfaces such as metal or conductors, to apply high-intensity electric field, by tunnel effect, make electronics form electron beam in entering vacuum, thereby can remove the requisite heating component of hot cathode system, significantly simplify cathode construction; Compare with thermionic emission, that field emission cold cathode has is low in energy consumption, can integrated, the series of advantages such as size is little, fast response time, so it is the desirable electron emission source of micro electric vacuum radiation source device.
The development of field emission cold cathode integrable miniature electrovacuum radiation source device at present is still restricted.Main cause is in integrable miniature electron tube, because device size is little, causes the space of noting ripple mutual effect also correspondingly greatly to reduce.Therefore the efficiency of noting ripple mutual effect in the effective raising of research small size space just becomes one of key of development integrable miniature electrovacuum radiation source device.
In addition for the development of integrated micro electric vacuum radiation source device, be also subject to the restriction of phase problem.When the phase place in two micro electric vacuum radiation sources that integrate is inconsistent and frequency is close, between two radiation sources, will produce relevantly, this relevant impact on device normal operation is very large, is also unfavorable for the application of device simultaneously.If the radio-frequency field frequency that two radiation sources produce is consistent, phase place is controlled, and the problems referred to above can solve.Frequency unanimously can be by adopting identical resonance cavity system to be guaranteed, the controlled difficulty of phase place is larger.Therefore utilize same frequency microwave signal modulation polyelectron to note and realize controlled another key technology that just becomes development integrable miniature electrovacuum radiation source device of phase place.And then if utilize the controlled electron beam of a plurality of phase modulations to encourage the radio-frequency field in a certain resonator system simultaneously, its result can improve notes ripple interaction efficiency and radiation source bandwidth of operation, Enhanced Radiation Reduced Blast source power output.
At notification number, be CN1379433A) patent document in < < cold-cathode gun > > is disclosed, on cold cloudy frame (bottom electrode) b of this electron gun on its base a, fixed a circular metal plate cold cathode, cold cathode top is provided with a mesh grid d and support (top electrode) c thereof, mesh grid top is provided with focusing electrode f and the support e thereof of a circular hole, directly over focusing electrode f, be also provided with a mesh shields utmost point h, this mesh shields utmost point h is fixed on base a by its support g, each electrode outlet line i draws from the bottom of base a.This electron gun utilizes mesh grid D-shaped to become after electron beam, and by focusing electrode, f converges electron beam; But this electron gun can only be changed the electron beam of cold cathode transmitting is carried out to frequency modulation(FM) by electrode high pressure, due to its tuned frequency (10 3hz) well below microwave frequency (10 9hz).Thereby this type of cold-cathode gun can only be for its electron beam frequencies such as cold cathode electric light source, image elements diode (display) device far below microwave frequency; Both be not suitable for integrable miniature electrovacuum radiation source device, because the phase place of each radiation source is wherein difficult to coupling, phase coherence can cause device not work again, therefore more can not be for there being the integrated micro source device in a plurality of micro electric vacuum radiations source.
Summary of the invention
The object of the invention is the defect existing for background technology, the controlled polyelectron of a kind of microwave phase modulation of research and design is noted cold-cathode gun, to reach the space that can significantly reduce to note ripple mutual effect, and on request the microwave of feed-in different frequency modulate a plurality of cold cathode emission currents, to produce a plurality of electron beams of different modulating frequency and intensity, and the phase modulation of each electron beam is controlled, for micro electric vacuum device provides electron beam source, effectively expand the objects such as range of application.
Solution of the present invention is between the upper and lower battery lead plate of traditional cold cathode electron gun, to set up a microwave input layer, and through hole is offered at the number interval by set cold cathode in microwave input layer, each through hole forms corresponding interaction chamber in the lump with upper and lower battery lead plate respectively, each cold cathode is embedded in respectively on the lower electrode plate of corresponding interaction chamber bottom, in the electric pole plate region over against each interaction chamber and cold cathode, all offer one group of each hole dimension be less than the array hole of microwave wavelength, as electron beam delivery outlet; Containing upper and lower battery lead plate, microwave input layer and establish each cold cathode, interaction chamber in the inner and jointly form the rifle core that polyelectron is noted cold-cathode gun, this rifle core is fixed and is passed through its side and (electric pole plate) end face and electron gun housing seal and fix by lower electrode plate and base through electron gun housing; During this electron gun work, its electric pole plate is anode, when microwave is inputted with quasi-plane wave pattern, microwave medium-high frequency electric field intensity direction is parallel with electrostatic field, in interaction chamber, the microwave action of certain frequency is launched electric field in cold cathode, its electric field frequency also changes with microwave frequency, make the frequency of each produced electron beam identical with the microwave frequency of input, thereby realize the object of modulating cold cathode emission current by microwave; Simultaneously because position difference and the spacing of each cold cathode in microwave transmission direction fixed, phase difference when each cold cathode is arrived in microwave transmission between each cold cathode is just fixing, therefore the phase difference between the electron beam that each cold cathode produces is also just fixing, from and realize the controlled object of its phase place; In addition, for generally when each electron beam same-phase or the antiphase raising for the whole work efficiency of integrated a plurality of identical or different micro electric vacuum radiations source device the most obvious, the present invention is according to the microwave transmitting in microwave input layer whether identical spacing of determining successively between each adjacent two interaction chambers of phase place between each interaction chamber when each interaction chamber.Thereby, polyelectron of the present invention is noted cold-cathode gun and is comprised electron gun housing and base thereof, on, lower electrode plate and cold cathode, key is upper, between lower electrode plate, be also provided with a microwave input layer, in microwave input layer, by the number of set cold cathode, offer the through hole identical with its number, each through hole is respectively with upper, lower electrode plate forms the interaction chamber of corresponding number in the lump, each cold cathode is embedded in respectively on the lower electrode plate of corresponding interaction chamber bottom, in the electric pole plate region over against each interaction chamber and cold cathode, all offer the array hole that one group of each hole dimension is less than microwave wavelength, as electron beam delivery outlet, electric pole plate and the lower electrode plate that is embedded with a plurality of cold cathodes are fixed with the upper and lower surface of microwave input layer respectively, form cold-cathode gun rifle core, this rifle core is upwards placed in after housing inner chamber through electron gun housing and by each group electron beam delivery outlet, and rifle core lower electrode plate and base, rifle core two sides and electric pole plate end face and electron gun housing seal are fixed into one.
The above offers the through hole identical with its number by the number of set cold cathode in microwave input layer, and the number of cold cathode is 2-10.Described microwave input layer is that dielectric constant is the insulating medium layer of 2-10.Described each through hole forms respectively the interaction chamber of corresponding number in the lump with upper and lower battery lead plate, according to transmitting in microwave input layer, whether identical the phase place of microwave between adjacent two interaction chambers be determines the center distance of each adjacent two interaction chambers successively, when requiring each adjacent two interaction chamber phase places when identical, centre-to-centre spacing between two interaction chambers is the even-multiple of microwave half-wavelength in microwave input layer, when requiring each adjacent two interaction chamber single spin-echo, the centre-to-centre spacing between two interaction chambers is the odd-multiple of microwave half-wavelength in microwave input layer.The even-multiple of described microwave half-wavelength is 2,4,6,8,10,12,14 times, and the odd-multiple of described microwave half-wavelength is 3,5,7,9,11,13,15 times; And microwave half-wavelength in described microwave input layer is first to determine after the number and physical dimension of interaction chamber, by 3 D electromagnetic simulation software " CST MICROWAVE STUDIO " emulation, obtain.Described each hole dimension is all less than the array electronic of microwave wavelength and notes delivery outlet, and electron beam delivery outlet is circular hole, square hole or bar hole.Described interaction chamber is rectangle cavity, circular cylindrical cavity or water chestnut cylindricality cavity.
Between the upper and lower battery lead plate of the present invention due to the cold-cathode gun traditional, set up a microwave input layer, and through hole is offered at the number interval by set cold cathode in microwave input layer, each through hole forms corresponding interaction chamber in the lump with upper and lower battery lead plate respectively, each cold cathode is embedded on the lower electrode plate of each interaction chamber bottom, over against the electric pole plate on each interaction chamber and cold cathode top, offers array hole that one group of each hole dimension is less than microwave wavelength as electron beam delivery outlet.Therefore this cold-cathode gun, when electric pole plate adds after quiet positive potential in vacuum environment, can make each cold cathode on lower electrode plate produce stable autoelectronic current, when certain cold cathode surface is inputted and passed to microwave with quasi-plane wave pattern, the high-frequency electric field direction vector of microwave is parallel with electrostatic field, when its direction is consistent with electrostatic field, the electric field strength on this cold cathode surface will be reinforced, weaken when contrary with electrostatic field, the electron beam delivery outlet of each emission current after modulation by separately enter after a plurality of (or one) miniature resonant system can be smoothly and in each resonant cavity the electromagnetic field of high frequency of self-oscillation or outside input there is energy exchange, make the electromagnetic field of high frequency amplitude power in each resonant cavity obtain the microwave source that increases the formation of rear output electromagenetic wave radiation, the microwave phase of each radiation source output is with electron beam modulating frequency phase place is consistent separately simultaneously, because electron beam modulating frequency phase place is controlled, therefore each radiation source phase place is also controlled, the two large key technologies of developing integrated source, a plurality of micro electric vacuum radiations source device have been solved.The modulation amplitude of larger each electron beam of microwave power amplitude is also larger, inputs a plurality of electron beams that microwave frequency and intensity can obtain different frequency and intensity modulated state by changes simultaneously, realizes broadband and modulates; For the microwave situation of same input power, frequency, by improving the potential difference of upper and lower battery lead plate, increase electrostatic field intensity, also can increase the modulation amplitude of electron beam; In cold-cathode gun of the present invention, respectively note ripple interaction space and can be contracted to routine techniques below 1/10, relatively single micro electric vacuum radiation source power output at least can improve more than 2 times.Thereby the present invention has, and to note ripple interaction space little, the microwave of feed-in different frequency is modulated a plurality of cold cathode emission currents on request, to produce a plurality of electron beams of different modulating frequency and intensity, and each electron beam microwave phase modulation is controlled, for integrated micro electrovacuum radiation source device provides a plurality of electron beams source, and power output is large, the features such as range of application have effectively been expanded.
Accompanying drawing explanation
Fig. 1 is the controlled cold-cathode gun structural representations of noting of microwave phase modulation of the present invention more;
Fig. 2 is identical three the electron beam cold-cathode guns of embodiment 1 phase place the cathode current emission temporal evolution figure after modulation;
Fig. 3 is that identical three the electron beam cold-cathode guns of embodiment 1 phase place each electron beam after modulation passes electron beam delivery outlet 2-1 after-current temporal evolution figure;
Three electron beam cold cathode the cathode current emission temporal evolution figure after microwave modulation when Fig. 4 is the adjacent two electron beam single spin-echo of embodiment 2;
When Fig. 5 is the adjacent two electron beam single spin-echo of embodiment 2, three electron beam cold cathodes each electron beam after microwave modulation passes electron beam delivery outlet 2-1 after-current temporal evolution figure;
Fig. 6. 3 six electron beam cold-cathode guns of embodiment are the cathode current emission temporal evolution figure after microwave modulation;
Fig. 7. 3 six electron beam cold-cathode guns of embodiment each electron beam after microwave modulation passes electron beam delivery outlet 2-1 after-current temporal evolution figure.
In figure: 1. electron gun housing, 1-1. base, 2. electric pole plate, 2-1. electron beam delivery outlet, 3. microwave input layer, 3-1. interaction chamber, 4. lower electrode plate, 5. cold cathode.
Embodiment
Embodiment 1:
Many notes cold-cathode gun for the micro electric vacuum radiation source of 3 millimeters of frequency ranges is example: its electron gun housing 1 inner chamber is wide is 5mm, and long limit is 10mm, height 5mm, and wall thickness 2mm, inwall chamfering circular arc curvature is radius 1mm, material is 99 #pottery, its lower end and base 1-1 sealing, upper end are connected to form sealed vacuum chamber with resonator system in use, and vacuum degree can reach 10 -5handkerchief; Base 1-1 material is also 99 #pottery, (long * wide * thick) 14 * 7 * 4mm.Microwave input layer 3(is long * wide * thick) 20 * 2 * 0.25mm, in this microwave input layer, establish three through holes, (long * wide * thick) in each hole is 2 * 1.8 * 0.25mm, and when in the implementation case, microwave is through three interaction chambers in microwave input layer as requested, phase place is identical, thereby by 3 D electromagnetic simulation software " CST MICROWAVE STUDIO " emulation, obtain in transport layer centre distance between each hole and be 2.74mm, lower electrode plate 4(length * wide * thick) 20 * 2 * 0.75mm, material are magnetism-free stainless steel, three cold cathode 5 diameter phi on it are 1mm, thick 1um, material is carbon nano-tube sheet material, and the centre distance that wherein second cold cathode is positioned at bottom crown upper surface center, former and later two cold cathodes is 2.74mm, electric pole plate 2(is long * wide * thick) 20 * 2 * 0.05mm, material is also magnetism-free stainless steel, microwave input layer 3 upper, lower surface is fixing with electric pole plate 2 and lower electrode plate 4 respectively, the electron gun rifle core forming, in its medium wave input layer, establish three through holes and upper, lower electrode plate 2, 4 form three interaction chamber 3-1 in the lump, and make cold cathode 5 be placed in each interaction chamber bottom centre position, then on electric pole plate 2, in the scope of each interaction chamber 3-1, adopt laser one group of 11 * 11=121 of etching respectively, the array square hole that each hole length of side is 0.1 * 0.1mm is as three electron beam delivery outlet 2-1, whole electron gun rifle core passes electron gun housing 1 and middle interaction chamber 3-1 is placed in behind the center of electron gun housing, the lower electrode plate of rifle core 4 and base 1-1, the two side of rifle core and the surface of electric pole plate 2 and 1 sealing of electron gun housing are fixed into one.
In the present embodiment, when the cut-in voltage that is not more than 10000V/mm, simultaneously cold cathode work when the electric field strength between electric pole plate 2 and lower electrode plate 4 is 2500V/mm, electric pole plate 2 operating voltages can be selected within the scope of 1000-2500V; The about 1.35A/cm of the current density of the present embodiment when electric field strength is 4800V/mm 2; In potential difference, be that under 1200V effect, three cold cathodes produce stable autoelectronic current I 0=31.6mA; In order to realize the modulation to electron beam, 94GHz(also be can be to other frequency) microwave E (t) inputs by microwave input layer 3 left port outside electron gun housing 1,5 watts of input powers, now microwave is with quasi-plane wave mode propagation in electric pole plate 2 and lower electrode plate 4, and the high-frequency electric field direction vector of microwave is parallel with electrostatic field; In Fig. 2, when time t=0.2011ns directly over microwave transmission to three cold cathode and when direction is consistent with electrostatic field, three cold cathode surface fields will be reinforced, and autoelectronic current will increase to I=I 0+ I 1=31.6mA+2.9mA=34.5mA, wherein I 0for electrostatic field produces three cold cathode autoelectronic current sums, it is worth not temporal evolution; I 1three cold cathode autoelectronic currents that cause for microwave change sum, and it is worth temporal evolution; T=0.065ns constantly before, microwave is transferred to each cathode surface successively, and three electron beam phase modulations are same-phase, so modulated current I 1increase gradually.At t=0.2064ns, constantly directly over microwave transmission to three cold cathode and when direction is contrary with electrostatic field, cold cathode surface field will be weakened, autoelectronic current will be reduced to I=I 0-I 2=31.6mA-2.5mA=29.1mA, wherein I 2also three cold cathode autoelectronic currents that cause for microwave change sum, and it is worth temporal evolution; In Fig. 3, provided the electron beam of three cold cathode 5 generations respectively through the electric current temporal evolution figure after electron beam delivery outlet 2-1, the phase modulation that can be clearly seen that three electron beams in Fig. 3 is consistent, and the nearest electron beam of distance microwave input is first modulated, is then that second electron beam and the 3rd electron beam are modulated successively.Along with the time changes, the electric current that the implementation case electron gun produces three electron beams of field emission will together change with microwave, and amplitude of variation sum between 31.6mA, forms modulation condition and phase place consistent at 29.1mA; Three electron beams after modulation are respectively through entering a plurality of (or one) miniature resonant system after interaction chamber 3-1 separately and electron beam delivery outlet 2-1, for a plurality of (or one) micro electric vacuum radiation source device provides electron beam source.
Embodiment 2:
Still the many notes cold-cathode gun for the micro electric vacuum radiation source of 3 millimeters of frequency ranges is example: its electron gun housing 1, base 1-1, electron beam delivery outlet 2-1, interaction chamber 3-1, cold cathode 5 its structures, size are all identical with embodiment 1, the identical requirement of phase place when the present embodiment passes through first with the 3rd interaction chamber according to microwave, during through second interaction chamber phase place with through first, single spin-echo during three interaction chambers, by 3 D electromagnetic simulation software " CST MICROWAVE STUDIO " emulation, obtain in microwave input layer 3 centre-to-centre spacing between each hole and be 3.86mm, thereby the array electronic on electric pole plate 2 is noted the distance between delivery outlet 2-1 adjacent array center, centre-to-centre spacing between adjacent interaction chamber 3-1 on microwave input layer 3, on lower electrode plate 4, between adjacent cold cathode 5, centre-to-centre spacing is also 3.86mm, all the other are also all identical with background technology.
In the present embodiment, when the cut-in voltage that is not more than 10000V/mm, simultaneously cold cathode work when the electric field strength between electric pole plate 2 and lower electrode plate 4 is 2500V/mm, electric pole plate 2 operating voltages can be selected within the scope of 1000-2500V; When being 4800V/mm, electric field strength can produce about 1.35A/cm 2current density; In potential difference, be that under 1200V effect, three cold cathodes produce stable autoelectronic current and I 0=31.6mA; In order to realize the modulation to electron beam, 94GHz(also be can be to other frequency) microwave E (t) inputs by microwave input layer 3 left port outside electron gun housing 1,5 watts of input powers, now microwave is with quasi-plane wave mode propagation in electric pole plate 2 and lower electrode plate 4, and the high-frequency electric field direction vector of microwave is parallel with electrostatic field; In Fig. 4 time t=0.05ns to 0.01ns constantly between, so to produce electron beam phase modulations contrary directly over 2 cold cathodes of microwave transmission to the time due to adjacent two cold cathodes, three cold cathode overall emission electric currents are substantially constant is still 31.6mA.When t=0.131ns, directly over three cold cathodes of microwave transmission to the and when direction is consistent with electrostatic field, the 3rd cold cathode surface field will be reinforced, and autoelectronic current will increase to I=I 0+ I 1=31.6mA+1.0mA=32.6mA, wherein I 0for electrostatic field produces three cold cathode autoelectronic current sums, it is worth not temporal evolution; I 1three cold cathode autoelectronic currents that cause for microwave change sum (because phase modulation is contrary between two, the modulated current sum of electron beam 1 and electron beam 2 is 0, therefore modulated current sum only have in embodiment 1 with phase time 1/3rd), it is worth temporal evolution; At t=0.1364ns, constantly for being transferred to directly over the 3rd cold cathode and when direction is contrary with electrostatic field, cold cathode surface field will be weakened, autoelectronic current will be reduced to I=I 0-I 2=31.6mA-0.9mA=30.7mA, wherein I 2also three cold cathode autoelectronic currents that cause for microwave change sum, and it is worth temporal evolution; The electron beam that has provided three cold cathode 5 generations in Fig. 5 passes respectively the electric current temporal evolution figure after the defeated 2-1 of electron beam portals, the phase modulation that can be clearly seen that three electron beams in Fig. 5 is adjacent anti-phase, and nearest first electron beam of distance microwave input is first modulated, is then that second electron beam and the 3rd electron beam are modulated successively.Along with the time changes; The electric current that the present embodiment electron gun produces three electron beams of field emission will together change with microwave, and amplitude of variation sum between 32.6mA, forms the single spin-echo of modulation condition and adjacent electron beam at 30.7mA; Three electron beams after modulation are respectively through entering a plurality of (or one) miniature resonant system after interaction chamber 3-1 separately and electron beam delivery outlet 2-1, for a plurality of (or one) micro electric vacuum radiation source device provides electron beam source.
Embodiment 3
Many notes cold-cathode gun for the micro electric vacuum radiation source of 3 millimeters of frequency ranges is example: its electron gun housing 1 inner chamber is wide is 5mm, and long limit is 24mm, height 5mm, and wall thickness 2mm, inwall chamfering circular arc curvature is radius 1mm, material is 99 #pottery, its lower end and base 1-1 sealing, upper end are connected to form sealed vacuum chamber with resonator system in use, and vacuum degree can reach 10 -5handkerchief, base 1-1 material is also 99 #pottery, (long * wide * thick) 28 * 7 * 4mm, microwave input layer 3(is long * wide * thick) 34 * 2 * 0.25mm, material is polytetrafluoroethylene, in this microwave input layer, establish six through holes, (long * wide * thick) in each hole is 2 * 1.8 * 0.25mm, the present embodiment according to microwave through first during with the 3rd interaction chamber phase place identical, during through second, four, five, six interaction chamber phase place identical and with the requirement of first and third single spin-echo, thereby by 3 D electromagnetic simulation software " CST MICROWAVE STUDIO " emulation obtain in microwave input layer 3 from first to the 6th through hole, centre distance each adjacent two holes is followed successively by: 3.86,3.86,3.86,2.74,2.74mm, lower electrode plate 4(length * wide * thick) 34 * 2mm * 0.75mm, material are magnetism-free stainless steel, 3.86,3.86,3.86,2.74,2.74mm the centre distance that six cold cathode 5 diameter phi on it are between 1mm, thick 1um, each adjacent two cold cathodes is followed successively by:, material is carbon nano-tube sheet material, electric pole plate 2(is long * wide * thick) 34 * 2 * 0.05mm, material is also magnetism-free stainless steel, microwave input layer 3 upper, lower surface is fixing with electric pole plate 2 and lower electrode plate 4 respectively, the electron gun rifle core forming, set six through holes and upper in its medium wave input layer, lower electrode plate 2, 4 form six interaction chamber 3-1 in the lump, and cold cathode 5 is placed on the lower electrode plate 4 of each interaction chamber bottom centre position, then on electric pole plate 2, in the scope of each interaction chamber 3-1, adopt laser one group of 11 * 11=121 of etching respectively, the array square hole that each hole length of side is 0.1 * 0.1mm is as six electron beam delivery outlet 2-1, whole electron gun rifle core passes electron gun housing 1 and the mid point between the 3rd and the 4th interaction chamber is placed in behind the center of electron gun housing, the lower electrode plate of rifle core 4 and base 1-1, the two side of rifle core and the surface of electric pole plate 2 and 1 sealing of electron gun housing are fixed into one.
In the present embodiment, when the cut-in voltage that is not more than 10000V/mm, simultaneously cold cathode work when the electric field strength between electric pole plate 2 and lower electrode plate 4 is 2500V/mm, electric pole plate 2 operating voltages can be selected within the scope of 1000-2500V; When being 4800V/mm, electric field strength can produce about 1.35A/cm 2current density; In potential difference, be that under 1200V effect, six cold cathodes produce stable autoelectronic current and I 0=63.5mA; In order to realize the modulation to electron beam, 94GHz(also be can be to other frequency) microwave E (t) inputs by microwave input layer 3 left port outside electron gun housing 1,5 watts of input powers, now microwave is with quasi-plane wave mode propagation in electric pole plate 2 and lower electrode plate 4, and the high-frequency electric field direction vector of microwave is parallel with electrostatic field; In Fig. 6 when time t=0.045ns when microwave transmission is to directly over the first two cold cathode time, two one of cold cathode surface fields are reinforced one and are weakened, autoelectronic current and be still about 63.5mA, when time t=0.075ns when microwave transmission is to directly over front four cold cathodes time, four two of cold cathode surface fields are reinforced two and are weakened, autoelectronic current and be still about 63.5mA; In Fig. 6 when time t=0.101ns microwave transmission to directly over all cold cathodes time, the surface field single spin-echo that wherein front four cold cathodes run into, the surface field phase place that latter two cold cathode runs into is identical, so autoelectronic current will increase to I=I 0+ I 1=63.5mA+2.0mA=65.5mA, wherein I 0for electrostatic field produces six cold cathode autoelectronic current sums, it is worth not temporal evolution, I 1six cold cathode autoelectronic currents that cause for microwave change sum (being mainly the contribution of the 5th, six electron beams), and it is worth temporal evolution; When t=0.106ns, microwave transmission is to directly over all cold cathodes time, the surface field single spin-echo that wherein front four cold cathodes run into, and the surface field phase place that latter two cold cathode runs into is identical, so autoelectronic current will increase to I=I 0+ I 2=63.5mA-1.7mA=61.8mA, wherein I 0for electrostatic field produces six cold cathode autoelectronic current sums, it is worth not temporal evolution, I 2six cold cathode autoelectronic currents that cause for microwave change sum (being mainly the contribution of the 5th, six electron beams), and it is worth temporal evolution; In Fig. 7, provided the electron beam of six cold cathode 5 generations respectively through the electric current temporal evolution figure after electron beam delivery outlet 2-1, in Fig. 7, can be clearly seen that the phase modulation homophase of second, four, five, six electron beams, and first and third electron beam phase place is identical and with other electron beam reverse-phase, and nearest first electron beam of distance microwave input is first modulated, is then that second and third, four, five, six electron beams are modulated successively.Along with the time changes, the electric current that the present embodiment electron gun produces six electron beams of field emission will together change with microwave, and amplitude of variation sum between 65.5mA, forms modulation condition and phase place consistent at 61.8mA; Six electron beams after modulation are respectively through entering a plurality of (or one) miniature resonant system after interaction chamber 3-1 separately and electron beam delivery outlet 2-1, for a plurality of (or one) micro electric vacuum radiation source device provides electron beam source.

Claims (7)

1. the controlled polyelectron of microwave phase modulation is noted cold-cathode gun, comprise electron gun housing and base thereof, on, lower electrode plate and cold cathode, it is characterized in that upper, between lower electrode plate, be also provided with a microwave input layer, in microwave input layer, by the number of set cold cathode, offer the through hole identical with its number, each through hole is respectively with upper, lower electrode plate forms the interaction chamber of corresponding number in the lump, each cold cathode is embedded in respectively on the lower electrode plate of corresponding interaction chamber bottom, in the electric pole plate region over against each interaction chamber and cold cathode, all offer the array hole that one group of each hole dimension is less than microwave wavelength, as electron beam delivery outlet, electric pole plate and the lower electrode plate that is embedded with a plurality of cold cathodes are fixed with the upper and lower surface of microwave input layer respectively, form cold-cathode gun rifle core, this rifle core is upwards placed in after housing inner chamber through electron gun housing and by each group electron beam delivery outlet, and rifle core lower electrode plate and base, rifle core two sides and electric pole plate end face and electron gun housing seal are fixed into one.
2. by the controlled polyelectron of microwave phase modulation described in claim 1, note cold-cathode gun, described in it is characterized in that, in microwave input layer, by the number of set cold cathode, offer the through hole identical with its number, the number of cold cathode is 2-10.
3. by the controlled polyelectron of microwave phase modulation described in claim 1, note cold-cathode gun, it is characterized in that described microwave input layer is that dielectric constant is the insulating medium layer of 2-10.
4. by the controlled polyelectron of microwave phase modulation described in claim 1, note cold-cathode gun, it is characterized in that described each through hole is respectively with upper, lower electrode plate forms the interaction chamber of corresponding number in the lump, according to transmitting in microwave input layer, whether identical the phase place of microwave between adjacent two interaction chambers be determines the center distance of each adjacent two interaction chambers successively, when requiring each adjacent two interaction chamber phase places when identical, centre-to-centre spacing between two interaction chambers is the even-multiple of microwave half-wavelength in microwave input layer, when requiring each adjacent two interaction chamber single spin-echo, centre-to-centre spacing between two interaction chambers is the odd-multiple of microwave half-wavelength in microwave input layer.
5. by the controlled polyelectron of microwave phase modulation described in claim 1, note cold-cathode gun, the even-multiple that it is characterized in that described microwave half-wavelength is 2,4,6,8,10,12,14 times, and the odd-multiple of described microwave half-wavelength is 3,5,7,9,11,13,15 times; And microwave half-wavelength in described microwave input layer is first to determine after the number and physical dimension of interaction chamber, by 3 D electromagnetic simulation software " CST MICROWAVE STUDIO " emulation, obtain.
6. by the controlled polyelectron of microwave phase modulation described in claim 1, note cold-cathode gun, it is characterized in that described each hole dimension is all less than the array electronic notes delivery outlet of microwave wavelength, electron beam delivery outlet is circular hole, square hole or bar hole.
7. by the controlled polyelectron of microwave phase modulation described in claim 1, note cold-cathode gun, it is characterized in that described interaction chamber is rectangle cavity, circular cylindrical cavity or water chestnut cylindricality cavity.
CN201310611408.8A 2013-11-26 2013-11-26 The many electrons’ system cold-cathode gun that a kind of microwave phase modulation is controlled Expired - Fee Related CN103606503B (en)

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CN105161389A (en) * 2015-10-19 2015-12-16 电子科技大学 Microwave-modulated cold cathode micro radiation source and implementing method thereof
CN105304437A (en) * 2015-10-19 2016-02-03 电子科技大学 Microwave-modulated cold cathode miniature array-type radiation source and implementation method thereof

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CN105161389A (en) * 2015-10-19 2015-12-16 电子科技大学 Microwave-modulated cold cathode micro radiation source and implementing method thereof
CN105304437A (en) * 2015-10-19 2016-02-03 电子科技大学 Microwave-modulated cold cathode miniature array-type radiation source and implementation method thereof
CN105161389B (en) * 2015-10-19 2017-03-22 电子科技大学 Microwave-modulated cold cathode micro radiation source and implementing method thereof

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