CN109559950A - A kind of many electrons' system cold-cathode gun that microwave phase modulation is controllable - Google Patents
A kind of many electrons' system cold-cathode gun that microwave phase modulation is controllable Download PDFInfo
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- CN109559950A CN109559950A CN201710883810.XA CN201710883810A CN109559950A CN 109559950 A CN109559950 A CN 109559950A CN 201710883810 A CN201710883810 A CN 201710883810A CN 109559950 A CN109559950 A CN 109559950A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/027—Construction of the gun or parts thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2203/00—Electron or ion optical arrangements common to discharge tubes or lamps
- H01J2203/02—Electron guns
- H01J2203/0204—Electron guns using cold cathodes, e.g. field emission cathodes
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Abstract
The invention, which belongs to, can integrate electrovacuum radiation source device with applying cold-cathode gun, it include: electronics gun housing body and its pedestal, upper and lower electrode plate and the microwave input layer equipped with the number same via with cold cathode, each through-hole forms the interaction chamber of corresponding number together with upper and lower electrode plate respectively in microwave input layer, each cold cathode is embedded in respectively on the lower electrode plate of corresponding interaction chamber bottom, one group of each pore size has been opened up in the electric pole plate region of each interaction chamber of face is both less than the array electronic infusion of microwave wavelength and portalled.The invention has note wave interaction space small, can as required feed-in different frequency microwave come modulate multiple cold cathode emission electric currents, with generate different modulating frequency and intensity multiple electronics note, and each electronics note microwave phase modulation is controllable, multiple electronics notes source can be provided for integrated micro electrovacuum radiation source device, and output power, the features such as effectively expanding application range.
Description
Technical field
The present invention relates to one kind can integrate the mating electron gun of electrovacuum radiation source device, especially a kind of adjustable feed-in microwave
The frequency cold-cathode gun controllable with the multiple electronics note and phase that generate different modulating frequency.
Background technique
Microwave electrovacuum radiation source device is as the indispensable core of the Military Electronics system such as radar, electronic countermeasure, space communication
Heart device is constantly subjected to pay attention to extensively.Then occupy very important ground in above-mentioned electrovacuum radiation source device electron gun component
Position, traditional electrovacuum radiation source device electron gun generally use thermal emission cathode system, after decades of development, heat emission
Cathode technique is highly developed, is widely used in all kinds of electrovacuum radiation source devices, but there are following aobvious for thermal emission cathode
Write disadvantage: structure is complicated, at high cost, and cathod system is made of various metals and ceramic component, since hot cathode works thousands of
The hot environment of degree, the filament of heating is easily broken off or short circuit in cathode, leads to device failure;When on the other hand due to work
It needs the long period to heat, not only increases the complexity of system, also reduce system effectiveness;Additionally due to hot cathode structure is multiple
Miscellaneous, cathode temperature height is also that electrovacuum radiation source device is difficult to one of the main reason for integrated.
Micro electric vacuum radiation source device compared to hot cathode electron tube it have the characteristics that it is small in size, can integrate,
Firstly the need of the generation for solving free electron source using field emission cold cathode in the device of micro electric vacuum radiation source, field causes hair
Penetrate is to apply high-intensitive electric field on the surfaces such as metal or conductor, enter electronics by tunnel-effect to form electronics in vacuum
Note, so as to remove the essential heating component of hot cathode system, significantly simplifies cathode construction;With thermionic emission
Compare, field emission cold cathode have it is low in energy consumption, can integrate, the series of advantages such as size is small, fast response time, therefore it is micro-
The desired electronic emission source of type electrovacuum radiation source device.
The development of field emission cold cathode integrable miniature electrovacuum radiation source device is still restricted at present.Main cause
It is, since device size is small, the space for infusing wave interaction to be caused also correspondingly to subtract significantly in integrable miniature electron tube
It is small.Therefore the efficiency that research effectively improves note wave interaction in small size space, which just becomes, develops the radiation of integrable miniature electrovacuum
One of the key of source device.
Further for developing also by the restriction of phase problem for integrated micro electric vacuum radiation source device.When two
When the phase in the micro electric vacuum radiation source integrated is inconsistent and frequency is close, phase will be generated between two radiation sources
Dry, this relevant influence to proper device operation is very big, while being also unfavorable for the application of device.If two radiation sources
The high frequency field frequencies range of generation is consistent, and phase is controllable, then the above problem can be solved.Frequency unanimously can be by using identical resonance
Chamber system is guaranteed that controllably then difficulty is larger for phase.Therefore many electrons' system is modulated using same frequency microwave signal and realize
Phase controllably just becomes another key technology for developing integrable miniature electrovacuum radiation source device.In turn, as can using multiple
The high frequency field in a certain resonator system is infused while being motivated to the controllable electronics of phase modulation, and note wave interaction effect can be improved in result
Rate and radiation source bandwidth of operation, Enhanced Radiation Reduced Blast source output power.
" a kind of cold-cathode gun " is disclosed in patent document of the notification number for CN1379433A), which exists
A circular metal plate cold cathode is secured on cold yin frame (lower electrode) b on its pedestal a, cold cathode top is netted equipped with one
Grid d and its bracket (top electrode) c, mesh grid top are equipped with the focusing electrode f and its bracket e of a circular hole, focusing electrode f's
Surface is additionally provided with a mesh shields pole h, which is fixed on pedestal a by its bracket g, each electrode outlet line i
It is drawn from the lower part of pedestal a.After the electron gun forms electronics note using mesh grid d, electronics note is converged by focusing electrode f;But
The electron gun can only be changed by electrode high pressure carries out frequency modulation(PFM) to the electronics note of cold cathode emission, due to its tuned frequency
(103Hz) well below microwave frequency (109Hz).Thus such cold-cathode gun be only used for such as cold cathode electric light source, as
Its electronics injection rate such as element pipe (display) is far below the device of microwave frequency;Both it be not suitable for the radiation of integrable miniature electrovacuum
Source device, and because the wherein phase of each radiation source is difficult to match, phase coherence will lead to device and cannot work, therefore can not
For having in the integrated micro source device in multiple micro electric vacuum radiations source.
Summary of the invention
The purpose of the present invention is for defect existing for background technique, a kind of polyelectron that microwave phase modulation is controllable of researching and designing
Infuse cold-cathode gun, to reach the space that can significantly reduce note wave interaction, and can feed-in different frequency as required it is micro-
Wave come modulate multiple cold cathode emission electric currents, with generate different modulating frequency and intensity multiple electronics note, and each electronics infuse
Phase modulation it is controllable, for miniature electron tube provide electronics infuse source, effectively expand application range the purpose of.
Solution of the invention is that microwave input is added between the upper and lower electrode plate of traditional cold-cathode gun
Layer, and open up through-hole by the number interval of set cold cathode in microwave input layer, each through-hole respectively with upper and lower electrode plate together
Corresponding interaction chamber is formed, each cold cathode is embedded in respectively on the lower electrode plate of corresponding interaction chamber bottom, each mutual in face
The electric pole plate region of acting chamber and cold cathode opens up one group of each pore size and is less than the array hole of microwave wavelength, as electronics
Infusion is portalled;Containing upper and lower electrode plate, microwave input layer and each cold cathode, the interaction chamber that set in the inner collectively constitute polyelectron
The rifle core of cold-cathode gun is infused, which passes through electronics gun housing body and fix by lower electrode plate and pedestal, by its side
And (electric pole plate) top surface is fixed with electron gun housing seal;The electron gun work when its electric pole plate be anode, when microwave with
When quasi-plane wave mode inputs, microwave high frequency electric field direction vector is parallel with electrostatic field, the certain frequency in interaction chamber
Microwave action also changes with microwave frequency in cold cathode emission electric field, electric field frequency, makes generated each electronics note
Frequency it is identical as the microwave frequency of input, thus realize by microwave modulation cold cathode emission electric current purpose;Simultaneously because
Position of each cold cathode on microwave transmission direction is different and spacing is fixed, each cold cathode when microwave transmission is to each cold cathode
Between phase difference just secure, therefore each cold cathode generate electronics note between phase difference also just secure, thus again
Realize the controllable purpose of its phase;In addition, under normal circumstances when each electronics infuses same-phase or antiphase for integrated more
The raising of the whole work efficiency of a identical or different micro electric vacuum radiation source device is the most obvious, and the present invention is then according to microwave
Each phase is successively determined whether phase when the microwave transmitted in input layer is through each interaction chamber between each interaction chamber is identical
Spacing between adjacent two interaction chambers.Thus, many electrons' system cold-cathode gun of the present invention includes electronics gun housing body and its pedestal,
Upper and lower electrode plate and cold cathode, key is to be additionally provided with a microwave input layer between upper and lower electrode plate, in microwave input layer
In by the number of set cold cathode open up through-hole identical with its number, each through-hole forms phase with upper and lower electrode plate respectively together
The interaction chamber of number is answered, each cold cathode is embedded in respectively on the lower electrode plate of corresponding interaction chamber bottom, in each interaction of face
The array hole for being both less than microwave wavelength with one group of each pore size is opened up in the electric pole plate region of chamber and cold cathode, as electricity
Sub- infusion is portalled;Electric pole plate and upper and lower surfaces of the lower electrode plate respectively with microwave input layer embedded with multiple cold cathodes are fixed,
Cold-cathode gun rifle core is formed, which passes through electronics gun housing body and each group electronics infusion is portalled is placed in housing cavity upwards
Afterwards, electrode plate is integrally fixed with pedestal, rifle core two sides and electric pole plate top surface and electron gun housing seal under rifle core.
The above opens up through-hole identical with its number, cold cathode by the number of set cold cathode in microwave input layer
Number be 2-10.The microwave input layer is the insulating medium layer that dielectric constant is 2-10.Each through-hole respectively with it is upper,
Lower electrode plate forms the interaction chamber of corresponding number together, and the center spacing of each two neighboring interaction chamber is according to microwave input layer
It is successively determined whether phase of middle the transmitted microwave between adjacent two interaction chamber is identical, i.e., ought require each adjacent two interaction
When identical with chamber phase, center between two interaction chambers is away from the even-multiple for microwave half-wavelength in microwave input layer, when requiring
When each adjacent two interaction chambers opposite in phase, the center between two interaction chambers is away from the surprise for microwave half-wavelength in microwave input layer
Several times.The even-multiple of the microwave half-wavelength is 2,4,6,8,10,12,14 times, the odd-multiple of the microwave half-wavelength is 3,5,
7,9,11,13,15 times;And microwave half-wavelength in the microwave input layer, it is in the number and structure for determining interaction chamber first
After size, is emulated and obtained by 3 D electromagnetic simulation software " CST MICROWAVE STUDIO ".Each pore size is respectively less than
The array electronic infusion of microwave wavelength is portalled, and electronics infusion is portalled for circular hole, square hole or strip-shaped hole.The interaction chamber is length
Square cavity, circular cylindrical cavity or water chestnut cylindrical chamber.
The present invention due to being additionally arranged a microwave input layer between the upper and lower electrode plate of traditional cold-cathode gun, and
Through-hole is opened up by the number interval of set cold cathode in microwave input layer, each through-hole is formed with upper and lower electrode plate together respectively
Corresponding interaction chamber, each cold cathode embedded in each interaction chamber bottom lower electrode plate on, each interaction chamber of face and
The electric pole plate on cold cathode top opens up one group of each pore size and portals less than the array hole of microwave wavelength as electronics infusion.Cause
This cold-cathode gun after electric pole plate adds quiet positive potential, each of can make on lower electrode plate cold yin in vacuum environment
Pole generates stable autoelectronic current;When microwave is inputted with quasi-plane wave mode and passes to some cold cathode surface, microwave
High-frequency electric field direction vector it is parallel with electrostatic field, the electric-field strength when its direction is consistent with electrostatic field, on the cold cathode surface
Degree will then weaken when will be reinforced, is opposite with electrostatic field;Modulated each emission current by respective electronics infusion portal into
Enter after multiple (or one) miniature resonant systems can smoothly with self-oscillation in each resonant cavity or externally input high frequency
Energy exchange occurs for electromagnetic field, exports electromagenetic wave radiation after increasing the electromagnetic field of high frequency rail power in each resonant cavity
The microwave source of formation, while the microwave phase of each radiation source output is consistent with respective electronics note modulating frequency phase, due to electricity
Son note modulating frequency phase is controllable, therefore each radiation source phase is also controllable, solves and develops multiple micro electric vacuum radiations source
Two big key technologies of integrated source device.The modulation amplitude of the bigger each electronics note of microwave power amplitude is also bigger, passes through simultaneously
Change input microwave frequency and the available different frequency of intensity and multiple electronics of intensity modulated state note, realizes broadband tune
System;For same input power, the microwave situation of frequency, by improving the potential difference of upper and lower electrode plate, that is, increase electrostatic field strength
Degree can also increase the modulation amplitude of electronics note;Wave interaction space is respectively infused in cold-cathode gun of the present invention can be contracted to often
Rule technology 1/10 is hereinafter, 2 times or more at least can be improved in single micro electric vacuum radiation source output power relatively.The thus present invention
It is small with note wave interaction space, can the microwave of feed-in different frequency as required modulate multiple cold cathode emission electric currents, to produce
Multiple electronics note of raw different modulating frequency and intensity, and each electronics note microwave phase modulation is controllable, is integrated micro electricity
The features such as vacuum radiation source device provides multiple electronics and infuses source, and output power, effectively expands application range.
Detailed description of the invention
Fig. 1, which is that microwave phase modulation of the present invention controllably more, infuses cold-cathode gun structural schematic diagram;
Fig. 2 is that the cathode current emission changes over time after the identical three electronics note cold-cathode gun of 1 phase of embodiment is modulated
Figure;
Fig. 3 is that each electronics note goes out across electronics infusion after the identical three electronics note cold-cathode gun of 1 phase of embodiment is modulated
Electric current changes over time figure after the 2-1 of hole;
Three electronics note cold cathode emission of cathode electricity after microwave is modulated when Fig. 4 is adjacent two electronics of embodiment 2 note opposite in phase
Stream changes over time figure;
Three electronics note cold cathodes each electronics note after microwave is modulated is worn when Fig. 5 is adjacent two electronics of embodiment 2 note opposite in phase
It crosses the electronics infusion electric current after 2-1 that portals and changes over time figure;
3 six electronics note cold-cathode gun the cathode current emissions after microwave is modulated of Fig. 6 embodiment change over time figure;
Fig. 7 embodiment 3 six electronics note cold-cathode guns each electronics note after microwave is modulated portals 2-1 across electronics infusion
Electric current changes over time figure afterwards.
In figure: 1. electronics gun housing bodies, 1-1. pedestal, 2. electric pole plates, 2-1. electronics infusion are portalled, 3. microwave input layers,
3-1. interaction chamber, 4. lower electrode plates, 5. cold cathodes.
Specific embodiment
Embodiment 1:
By taking more note cold-cathode guns for the micro electric vacuum radiation source of 3 millimeters of frequency ranges as an example: in its electron gun shell 1
Chamber width is 5mm, long side 10mm, height 5mm, and wall thickness 2mm, inner wall chamfering circular arc curvature is radius 1mm, material 99#Ceramics,
Its lower end and pedestal 1-1 sealing, upper end are connected to form sealing vacuum chamber with resonator system when in use, and vacuum degree can achieve
10-5Pa;Pedestal 1-1 material is also 99#Ceramics, (length × width x thickness) 14 × 7 × 4mm.Microwave input layer 3(long × width x thickness) 20
× 2 × 0.25mm, three through-holes are set in the microwave input layer, and (length × width x thickness) in each hole is 2 × 1.8 × 0.25mm, this reality
It applies in case according to requiring in microwave input layer microwave identical by phase when three interaction chambers;It is thus imitative by 3 D electromagnetic
It is 2.74mm that true software " CST MICROWAVE STUDIO " emulation, which obtains the centre distance between hole each in transport layer,;Lower electricity
Pole plate 4(long × width x thickness) 20 × 2 × 0.75mm, material be magnetism-free stainless steel, three 5 diameter phis of cold cathode thereon are
1mm, thickness 1um, material are carbon nanotube sheet material, wherein second cold cathode is located at bottom crown upper surface center, front and back two
The centre distance of a cold cathode is 2.74mm;Electric pole plate 2(long × width x thickness) 20 × 2 × 0.05mm, material be also no magnetic
Stainless steel, the upper and lower surfaces of microwave input layer 3 are fixed with electric pole plate 2 and lower electrode plate 4 respectively, the electron gun rifle core of composition,
Three through-holes are set in its medium wave input layer and upper and lower electrode plate 2,4 forms three interaction chamber 3-1 together, and set cold cathode 5
In each interaction chamber bottom centre position, then using laser point in the range of each interaction chamber 3-1 of face on electric pole plate 2
Do not etch one group 11 × 11=121, the array square hole of each a length of 0.1 × 0.1mm of hole edge portals 2- as three electronics infusions
1;After entire electron gun rifle core passes through electronics gun housing body 1 and intermediate interaction chamber 3-1 is placed in the center of electronics gun housing body,
The lower electrode plate 4 of rifle core and pedestal 1-1, the surface of the two sidewalls of rifle core and electric pole plate 2 and the sealing of electronics gun housing body 1 are fixed
Integrally,.
In the present embodiment, when the electric field strength between electric pole plate 2 and lower electrode plate 4 no more than 10000V/mm, simultaneously it is cold
When the cut-in voltage of cathode work is 2500V/mm, 2 operating voltage of electric pole plate can select within the scope of 1000-2500V;Work as electricity
The current density about 1.35A/cm of the present embodiment when field intensity is 4800V/mm2;Three cold yin in the case where potential difference is 1200V effect
Pole generates stable autoelectronic current I0=31.6mA;It can also be other frequencies by 94GHz(to realize the modulation to electronics note
Rate) microwave E (t) is by 3 left port of the microwave input layer input outside electronics gun housing body 1, and 5 watts of input power, microwave is powering at this time
With quasi-plane wave mode propagation in pole plate 2 and lower electrode plate 4, and the high-frequency electric field direction vector of microwave is parallel with electrostatic field;
In Fig. 2 in time t=0.2011ns right above microwave transmission to three cold cathodes and when direction is consistent with electrostatic field, three
A cold cathode surface field will be reinforced, and autoelectronic current will increase to I=I0+I1=31.6mA+2.9mA=34.5mA,
Middle I0The sum of three cold cathode autoelectronic currents are generated for electrostatic field, value does not change over time;I1For three caused by microwave
The sum of cold cathode autoelectronic current variation, value changes over time;Before t=0.065ns moment, microwave is successively transferred to
Each cathode surface, and three electronics note phase modulations are same-phase, therefore modulate electric current I1It is gradually increased.In t=0.2064ns
Right above moment microwave transmission to three cold cathodes and when direction is opposite with electrostatic field, cold cathode surface field will be weakened,
Autoelectronic current will be reduced to I=I0-I2=31.6mA-2.5mA=29.1mA, wherein I2It also is three cold yin caused by microwave
The sum of pole autoelectronic current variation, value changes over time;The electronics note difference that three cold cathodes 5 generate is given in Fig. 3
Across electronics infusion portal 2-1 after electric current change over time figure, can be clearly seen that in Fig. 3 three electronics note modulation phase
Position is consistent, and the nearest electronics note of distance microwave input terminal is modulated first, followed by second electronics note and the
Three electronics notes are successively modulated.With time change, the implementation case electron gun generates three electronics note of field emission
Electric current will change together with microwave, the sum of amplitude of variation forms modulation condition and phase one between 29.1mA to 31.6mA
It causes;Enter after modulated three electronics note is each passed through respective interaction chamber 3-1 and electronics infusion is portalled 2-1 it is multiple (or
One) miniature resonant system, electronics, which is provided, for multiple (or one) micro electric vacuum radiation sources device infuses source.
Embodiment 2:
Still by taking more note cold-cathode guns for the micro electric vacuum radiation source of 3 millimeters of frequency ranges as an example: its electron gun shell
1, portal 2-1, interaction chamber 3-1, its structure and size of cold cathode 5 of pedestal 1-1, electronics infusion are same as Example 1;This reality
Example is applied according to microwave by first requirement identical with phase when third interaction chamber, by second interaction chamber phase
Opposite in phase when position is with by first and third interaction chamber, passes through 3 D electromagnetic simulation software " CST MICROWAVE
STUDIO " emulation obtains between hole each in microwave input layer 3 center away from being 3.86mm, thus the array on electric pole plate 2
Formula electronics infusion is portalled the distance between 2-1 adjacent array center, center between adjacent interaction chamber 3-1 on microwave input layer 3
Away from center between adjacent cold cathode 5 on, lower electrode plate 4 away from being also 3.86mm;Remaining is also identical as background technique.
In the present embodiment, when the electric field strength between electric pole plate 2 and lower electrode plate 4 no more than 10000V/mm, simultaneously it is cold
When the cut-in voltage of cathode work is 2500V/mm, 2 operating voltage of electric pole plate can select within the scope of 1000-2500V;Work as electricity
Field intensity can produce about 1.35A/cm when being 4800V/mm2Current density;Three cold cathodes in the case where potential difference is 1200V effect
Generate stable autoelectronic current and I0=31.6mA;It can also be other frequencies by 94GHz(to realize the modulation to electronics note
Rate) microwave E (t) is by 3 left port of the microwave input layer input outside electronics gun housing body 1, and 5 watts of input power, microwave is powering at this time
With quasi-plane wave mode propagation in pole plate 2 and lower electrode plate 4, and the high-frequency electric field direction vector of microwave is parallel with electrostatic field;
In time t=between 0.05ns to the 0.01ns moment in Fig. 4, since adjacent two cold cathode generates the opposite institute of electronics note phase modulation
When with right above microwave transmission to the 2nd cold cathode, three cold cathode overall emission electric currents are basically unchanged still as 31.6mA.?
When t=0.131ns right above microwave transmission to third cold cathode and when direction is consistent with electrostatic field, third cold cathode
Surface field will be reinforced, and autoelectronic current will increase to I=I0+I1=31.6mA+1.0mA=32.6mA, wherein I0It is quiet
Electric field generates the sum of three cold cathode autoelectronic currents, and value does not change over time;I1For three cold cathodes caused by microwave
Autoelectronic current variation the sum of (due to phase modulation two-by-two on the contrary, the sum of modulation electric current of electronics note 1 and electronics note 2 be 0,
Therefore with one third when phase in the sum of modulation electric current only embodiment 1), value changes over time;At t=0.1364ns moment
When to be transferred to third cold cathode surface and direction opposite with electrostatic field, cold cathode surface field will be weakened, and field causes
Emission current will be reduced to I=I0-I2=31.6mA-0.9mA=30.7mA, wherein I2It also is three cold-cathode fields caused by microwave
The sum of emission current variation is caused, value changes over time;The electronics note that three cold cathodes 5 generate is given in Fig. 5 to be each passed through
Electric current after electronics infusion 2-1 portals changes over time figure, can be clearly seen that the phase modulation of three electronics note is in Fig. 5
Adjacent reverse phase, and the nearest first electronics note of distance microwave input terminal is modulated first, followed by second electronics note and
Third electronics note is successively modulated.With time change;The present embodiment electron gun generates three electronics note of field emission
Electric current will change together with microwave, the sum of amplitude of variation forms modulation condition and adjacent electricity between 30.7mA to 32.6mA
The opposite in phase of son note;After modulated three electronics note is each passed through respective interaction chamber 3-1 and electronics infusion is portalled 2-1
Into multiple (or one) miniature resonant systems, electronics is provided for multiple (or one) micro electric vacuum radiation sources device and infuses source.
Embodiment 3
By taking more note cold-cathode guns for the micro electric vacuum radiation source of 3 millimeters of frequency ranges as an example: in its electron gun shell 1
Chamber width is 5mm, long side 24mm, height 5mm, and wall thickness 2mm, inner wall chamfering circular arc curvature is radius 1mm, material 99#Ceramics,
Its lower end and pedestal 1-1 sealing, upper end are connected to form sealing vacuum chamber with resonator system when in use, and vacuum degree can achieve
10-5Pa;Pedestal 1-1 material is also 99#Ceramics, (length × width x thickness) 28 × 7 × 4mm;Microwave input layer 3(long × width x thickness) 34
× 2 × 0.25mm, material are polytetrafluoroethylene (PTFE), set six through-holes in the microwave input layer, (length × width x thickness) in each hole be 2 ×
1.8 × 0.25mm, the present embodiment is identical as phase when third interaction chamber by first according to microwave, by second, four,
Five, phase is identical when six interaction chambers and requirement with the first and third opposite in phase;Thus pass through 3 D electromagnetic simulation software
" CST MICROWAVE STUDIO " emulation obtains in microwave input layer 3 through-hole, each adjacent two hole from first to the 6th
Between centre distance successively are as follows: 3.86,3.86,3.86,2.74,2.74mm;Lower electrode plate 4(long × width x thickness) 34 × 2mm
× 0.75mm, material are magnetism-free stainless steel, and six 5 diameter phis of cold cathode thereon are 1mm, thickness 1um, each adjacent two cold cathode
Between centre distance successively are as follows: 3.86,3.86,3.86,2.74,2.74mm, material be carbon nanotube sheet material;Electric pole plate 2
(length × width x thickness) 34 × 2 × 0.05mm, material are also magnetism-free stainless steel, the upper and lower surfaces of microwave input layer 3 respectively with power on
Pole plate 2 and lower electrode plate 4 are fixed, the electron gun rifle core of composition, set six through-holes and upper and lower electrode plate in medium wave input layer
2,4 six interaction chamber 3-1 are formed together, and cold cathode 5 is placed in the lower electrode plate 4 of each interaction chamber bottom centre position
On, then one group 11 × 11=121 is etched respectively using laser in the range of each interaction chamber 3-1 of face on electric pole plate 2
A, the array square hole of each a length of 0.1 × 0.1mm of hole edge portals 2-1 as six electronics infusions;Entire electron gun rifle core passes through
Electronics gun housing body 1 and after the midpoint between third and the 4th interaction chamber is placed in the center of electronics gun housing body, by rifle
The lower electrode plate 4 and pedestal 1-1 of core, the sealing of the surface of the two sidewalls of rifle core and electric pole plate 2 and electronics gun housing body 1 are fixed into one
Body,.
In the present embodiment, when the electric field strength between electric pole plate 2 and lower electrode plate 4 no more than 10000V/mm, simultaneously it is cold
When the cut-in voltage of cathode work is 2500V/mm, 2 operating voltage of electric pole plate can select within the scope of 1000-2500V;Work as electricity
Field intensity can produce about 1.35A/cm when being 4800V/mm2Current density;Six cold cathodes in the case where potential difference is 1200V effect
Generate stable autoelectronic current and I0=63.5mA;It can also be other frequencies by 94GHz(to realize the modulation to electronics note
Rate) microwave E (t) is by 3 left port of the microwave input layer input outside electronics gun housing body 1, and 5 watts of input power, microwave is powering at this time
With quasi-plane wave mode propagation in pole plate 2 and lower electrode plate 4, and the high-frequency electric field direction vector of microwave is parallel with electrostatic field;
In Fig. 6 in time t=0.045ns right above microwave transmission to the first two cold cathode when, two cold cathode surface field one
It is reinforced one to be weakened, autoelectronic current and still for 63.5mA or so, in time t=0.075ns before microwave transmission is arrived
When right above four cold cathodes, four cold cathode surface field two are reinforced two and are weakened, and autoelectronic current and are still
63.5mA or so;In Fig. 6 in time t=0.101ns right above microwave transmission to all cold cathodes when, the wherein cold yin of first four
The surface field opposite in phase that pole encounters, the surface field phase that latter two cold cathode encounters is identical, therefore autoelectronic current
I=I will be increased to0+I1=63.5mA+2.0mA=65.5mA, wherein I0Six cold cathode autoelectronic currents are generated for electrostatic field
The sum of, value does not change over time, I1For the sum of variation of six cold cathode autoelectronic currents caused by microwave (predominantly the
Five, the contribution of six electronics note), value changes over time;In t=0.106ns right above microwave transmission to all cold cathodes
When, the surface field opposite in phase that wherein first four cold cathode encounters, the surface field phase that latter two cold cathode encounters is identical,
Therefore autoelectronic current will increase to I=I0+I2=63.5mA-1.7mA=61.8mA, wherein I0It is cold for electrostatic field generation six
The sum of cathode autoelectronic current, value does not change over time, I2Become for six cold cathode autoelectronic currents caused by microwave
The sum of change (contribution of predominantly the five, the six electronics note), value changes over time;Six cold cathodes 5 are given in Fig. 7 to generate
Electronics note be each passed through the electronics infusion electric current after 2-1 that portals and change over time figure, can be clearly seen that second in Fig. 7,
Four, the same phase of phase modulation of five, six electronics note, and first and third electronics note phase is identical and infuses reverse-phase with other electronics,
And the nearest first electronics note of distance microwave input terminal is modulated first, followed by second and third, four, five, six electronics note successively
It is modulated.With time change, the electric current that the present embodiment electron gun generates six electronics note of field emission will be with microwave one
With variation, the sum of amplitude of variation forms modulation condition and phase is consistent between 61.8mA to 65.5mA;Modulated six electricity
Enter multiple (or one) miniature resonant systems after son note is each passed through respective interaction chamber 3-1 and electronics infusion is portalled 2-1,
Electronics, which is provided, for multiple (or one) micro electric vacuum radiation sources device infuses source.
Claims (7)
1. a kind of many electrons' system cold-cathode gun that microwave phase modulation is controllable, including electronics gun housing body and its pedestal, above and below
Electrode plate and cold cathode, it is characterised in that be additionally provided with a microwave input layer between upper and lower electrode plate, pressed in microwave input layer
The number of set cold cathode opens up through-hole identical with its number, and each through-hole forms corresponding together to upper and lower electrode plate respectively
Several interaction chambers, each cold cathode are embedded in respectively on the lower electrode plate of corresponding interaction chamber bottom, in each interaction chamber of face
With the array hole for opening up one group of each pore size in the electric pole plate region of cold cathode and being both less than microwave wavelength, infused as electronics
Delivery outlet;Electric pole plate and upper and lower surfaces of the lower electrode plate respectively with microwave input layer embedded with multiple cold cathodes are fixed, and are formed
Cold-cathode gun rifle core, the rifle core pass through electronics gun housing body and by each group electronics infusion portal upwards be placed in housing cavity after,
Electrode plate is integrally fixed with pedestal, rifle core two sides and electric pole plate top surface and electron gun housing seal under rifle core.
2. by the controllable many electrons' system cold-cathode gun of microwave phase modulation described in claim 1, it is characterised in that it is described
Through-hole identical with its number is opened up by the number of set cold cathode in microwave input layer, the number of cold cathode is 2-10.
3. by the controllable many electrons' system cold-cathode gun of microwave phase modulation described in claim 1, it is characterised in that described micro-
Wave input layer is the insulating medium layer that dielectric constant is 2-10.
4. by the controllable many electrons' system cold-cathode gun of microwave phase modulation described in claim 1, it is characterised in that described each
Through-hole forms the interaction chamber of corresponding number, the center spacing of each two neighboring interaction chamber together with upper and lower electrode plate respectively
It successively determines, i.e., ought want whether identical according to phase of the microwave transmitted in microwave input layer between adjacent two interaction chamber
When asking each adjacent two interaction chambers phase identical, center between two interaction chambers is away from for microwave half-wavelength in microwave input layer
Even-multiple, when requiring each adjacent two interaction chambers opposite in phase, the center between two interaction chambers is away from microwave input layer
The odd-multiple of microwave half-wavelength.
5. by the controllable many electrons' system cold-cathode gun of microwave phase modulation described in claim 1, it is characterised in that described micro-
The even-multiple of wave half-wavelength is 2,4,6,8,10,12,14 times, and the odd-multiple of the microwave half-wavelength is 3,5,7,9,11,13,15
Times;And microwave half-wavelength in the microwave input layer, it is to pass through three after the number and structure size for determining interaction chamber first
Electromagnetic simulation software " CST MICROWAVE STUDIO " emulation is tieed up to obtain.
6. by the controllable many electrons' system cold-cathode gun of microwave phase modulation described in claim 1, it is characterised in that described each
The array electronic infusion that pore size is respectively less than microwave wavelength is portalled, and electronics infusion is portalled for circular hole, square hole or strip-shaped hole.
7. by the controllable many electrons' system cold-cathode gun of microwave phase modulation described in claim 1, it is characterised in that described mutual
Acting chamber is rectangle cavity, circular cylindrical cavity or water chestnut cylindrical chamber.
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