CN105302104A - Solar cell production line and control system and method thereof - Google Patents
Solar cell production line and control system and method thereof Download PDFInfo
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- CN105302104A CN105302104A CN201510825428.4A CN201510825428A CN105302104A CN 105302104 A CN105302104 A CN 105302104A CN 201510825428 A CN201510825428 A CN 201510825428A CN 105302104 A CN105302104 A CN 105302104A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 230
- 238000000034 method Methods 0.000 title claims abstract description 47
- 238000004891 communication Methods 0.000 claims abstract description 47
- 238000012545 processing Methods 0.000 claims description 74
- 238000012544 monitoring process Methods 0.000 claims description 47
- 230000005540 biological transmission Effects 0.000 claims description 20
- 238000005240 physical vapour deposition Methods 0.000 claims description 18
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 15
- 238000000137 annealing Methods 0.000 claims description 11
- 238000004140 cleaning Methods 0.000 claims description 11
- 238000007650 screen-printing Methods 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000004886 process control Methods 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 206010020843 Hyperthermia Diseases 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 235000008216 herbs Nutrition 0.000 description 1
- 230000036031 hyperthermia Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000005289 physical deposition Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
- 235000014692 zinc oxide Nutrition 0.000 description 1
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32252—Scheduling production, machining, job shop
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Quality & Reliability (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
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Abstract
The invention discloses a solar cell production line and a control system and method thereof. Host computers corresponding to various production apparatuses acquire the production data information of the production apparatuses. Corresponding communication sub modules send the production data information to a master control apparatus. The master control apparatus analyzes and processes the received production data information, generates corresponding execution information, and then sends the execution information to the corresponding host computers via the communication sub modules. According to the received execution information, the host computers control the corresponding production apparatuses to perform corresponding operation, thereby achieving automatic control of the various production apparatuses on the solar cell production line.
Description
Technical field
The present invention relates to area of solar cell, particularly relate to a kind of manufacture of solar cells line, its control system and control method.
Background technology
At present, solar cell produced by general employing manufacture of solar cells line, this production line comprises the production equipment that multiple stage carries out various processes, such as cleaning and texturing equipment, plasma enhanced chemical vapor deposition (PlasmaEnhancedChemicalVaporDeposition, PECVD) equipment, physical vapour deposition (PVD) (PhysicalVaporDeposition, PVD) equipment, screen printing apparatus, annealing device and testing, sorting equipment.
The specific works flow process of manufacture of solar cells line is as follows: (1) cleaning and texturing equipment carries out the process such as prerinse, alkali corruption, making herbs into wool, oxide layer to silicon chip substrate; (2) PECVD device forms I type passivation layer and P type doped layer at the incidence surface of silicon chip and shady face deposition respectively, and I type passivation layer and N-type doped layer, and then forms heterojunction; (3) PVD equipment is by targets such as bombardment tin indium oxide (ITO) and Al-Doped ZnOs (AZO), respectively in incidence surface and the shady face formation transparency electrode of silicon chip, afterwards, bombardment silver (Ag) target, forms back of the body electric field (BSF) by physical deposition at silicon chip shady face; (4) screen printing apparatus is by special serigraphy grid line manufacture craft, certain density electrocondution slurry is stamped in silicon chip incidence surface and shady face by printing gimmick respectively through the web plate mesh of screen process press, thus forms meticulous circuit respectively at the incidence surface of silicon chip and shady face; (5) annealing device is annealed in hyperthermia drying stove to the solar cell through serigraphy, makes resultant battery; (6) various performance parameters of testing, sorting equipment to resultant battery is measured, and carries out automatic classification test according to different parameters performance.
Can find out that its manufacturing process is comparatively complicated from the manufacturing process of above-mentioned solar cell, need each production equipment to cooperatively interact and just can complete production, need manual operation to input corresponding parameter for the control of each production equipment at present and debug accordingly.If the production equipment of a certain technique occurs that extremely will affect other production equipments quits work, thus produces chain reaction thereupon, affect the production efficiency of production line.Therefore, need the control system can unifying to control manufacture of solar cells line at present badly and Automated condtrol is carried out to manufacture of solar cells line, thus improve the production efficiency of solar energy production line.
Summary of the invention
In view of this, embodiments provide a kind of manufacture of solar cells line, its control system and control method, in order to realize controlling manufacture of solar cells line automation.
Therefore, the control system of a kind of manufacture of solar cells line that the embodiment of the present invention provides, comprise: the multiple host computers corresponding with each production equipment in manufacture of solar cells line, comprise the communication facilities with each described host computer multiple communicator module one to one and overhead control equipment; Wherein,
Each described host computer, for obtaining the production data information of corresponding described production equipment and sending to corresponding described communicator module; Receive the execution information of described communicator module transmission and control described production equipment; Described production data information comprises described production equipment current operation state information and Product processing parameter information;
Each described communicator module, sends to described overhead control equipment after the described production data information for being sent by the described host computer of the correspondence received processes in the form of a message; And after the described execution information that the described overhead control equipment received sends in the form of a message being processed, send to corresponding described host computer;
Described overhead control equipment, for carrying out analyzing and processing to the described production data information received, sends to corresponding described communicator module after generating corresponding described execution information in the form of a message.
In a kind of possible embodiment, in the above-mentioned control system that the embodiment of the present invention provides, each described host computer, specifically for obtaining the described production data information of corresponding described production equipment with the communication protocol of setting, and with described communication protocol, described production data information is sent to corresponding described communicator module; The execution information sent with described communication protocol according to the described communicator module received controls described production equipment.
In a kind of possible embodiment, in the above-mentioned control system that the embodiment of the present invention provides, described overhead control equipment, specifically comprises: message processing unit, message monitoring means and controlled processing unit; Wherein,
Described message processing unit, message for comprising production data information described in sending the described communicator module received by described message monitoring means carries out analyzing and processing, generate corresponding comprise the message of process information after send to described controlled processing unit by described message monitoring means; Analyzing and processing is carried out to the message comprising control command that the described controlled processing unit received by described message monitoring means is sent, generate corresponding comprise the message of execution information after send to corresponding described communicator module by described message monitoring means;
Described controlled processing unit, for the control command of production equipment corresponding to the message generation comprising process information sent according to described message processing unit, the message comprising described control command is sent described message processing unit by described message monitoring means.
In a kind of possible embodiment, in the above-mentioned control system that the embodiment of the present invention provides, described overhead control equipment, also comprises: with the database interface unit of DataBase combining;
Described controlled processing unit, also for being sent the message comprising reading and writing data instruction to described database interface unit by described message monitoring means, received the message comprising reading and writing data feedback information of described database interface unit transmission by described message monitoring means;
Described database interface unit, for comprising the message of reading and writing data instruction described in being sent by described message monitoring means according to the described controlled processing unit that receives, performs corresponding read-write operation to the described database connected.
In a kind of possible embodiment, in the above-mentioned control system that the embodiment of the present invention provides, described overhead control equipment, also comprises: data dictionary unit, for storing format information corresponding to data dissimilar in described database;
Described database interface unit, specifically for according to receiving described controlled processing unit by comprising the message of reading and writing data instruction described in described message monitoring means transmission, after inquiring about the format information of the corresponding data stored in described data dictionary unit, corresponding read-write operation is performed to the described database connected.
In a kind of possible embodiment, in the above-mentioned control system that the embodiment of the present invention provides, described overhead control equipment, also comprise: log management unit, for recording described message processing unit, message monitoring means, controlled processing unit, the operation note in database interface unit and data dictionary unit.
In a kind of possible embodiment, in the above-mentioned control system that the embodiment of the present invention provides, described overhead control equipment, also comprises: statistical report form unit, for the production data information of each production equipment sent according to described host computer, generate corresponding statistical report form.
In a kind of possible embodiment, in the above-mentioned control system that the embodiment of the present invention provides, described overhead control equipment, also comprises: security managing unit, for recording the operating right of each user belonging to different user groups.
In a kind of possible embodiment, in the control system described in above-mentioned any one that the embodiment of the present invention provides, described communicator module, specifically comprises: information receiving unit and information process unit; Wherein,
Described information receiving unit, for receiving the production data information that corresponding described host computer sends, and sends to described information process unit by described production data information; Receive the described execution information that described overhead control equipment sends, and described execution information is sent to described information process unit;
Described information process unit, sends to described overhead control equipment in the form of a message after the described production data information received being added to corresponding described production equipment identification information; Corresponding host computer is sent to the communication protocol of correspondence after the described execution information received is processed.
A kind of manufacture of solar cells line that the embodiment of the present invention provides, comprises the control system described in above-mentioned any one, and multiple production equipment.
In a kind of possible embodiment, in the above-mentioned manufacture of solar cells line that the embodiment of the present invention provides, described production equipment, specifically comprises: cleaning and texturing equipment, plasma enhanced chemical vapor deposition PECVD device, physical vapour deposition (PVD) PVD equipment, screen printing apparatus, annealing device.
In a kind of possible embodiment, in the above-mentioned manufacture of solar cells line that the embodiment of the present invention provides, semiconductor equipment communication standard interface SECS communication protocol between the host computer that described PECVD device is corresponding with described control system, is adopted to carry out the transmission of information.
In a kind of possible embodiment, in the above-mentioned manufacture of solar cells line that the embodiment of the present invention provides, the standard telecommunications modules OPC communication protocol being used for process control between the host computer that described cleaning and texturing equipment, PVD equipment, screen printing apparatus, annealing device are corresponding with described control system, is adopted to carry out the transmission of information.
The control method of a kind of manufacture of solar cells line that the embodiment of the present invention provides, adopts the control system of above-mentioned manufacture of solar cells line to control, comprising:
After manufacture of solar cells line is opened and run, each described host computer obtains the production data information of corresponding each production equipment and sends to corresponding communicator module; Described production data information comprises production equipment current operation state information and Product processing parameter information;
Each described communicator module sends to overhead control equipment after the production data information that the described host computer of the correspondence received sends being processed in the form of a message;
The production data information that described overhead control equipment interconnection receives carries out analyzing and processing, sends to corresponding described communicator module in the form of a message after generating corresponding execution information;
Each described communicator module sends to corresponding described host computer after the execution information that the described overhead control equipment received sends in the form of a message being processed;
The execution information that each described host computer sends according to the described communicator module received controls described production equipment.
The beneficial effect of the embodiment of the present invention, comprising:
A kind of manufacture of solar cells line that the embodiment of the present invention provides, its control system and control method, the production data information of each production equipment obtained by the host computer corresponding with each production equipment, overhead control equipment is sent to by the communicator module of correspondence, the production data information that overhead control equipment interconnection receives carries out analyzing and processing, corresponding host computer is sent to by corresponding communicator module after generating corresponding execution information, host computer controls all kinds of production equipments corresponding to it according to the execution information received and carries out corresponding operation, thus the Automated condtrol realized production equipment all kinds of on manufacture of solar cells line.
Accompanying drawing explanation
The structural representation of the control system of the manufacture of solar cells line that Fig. 1 provides for the embodiment of the present invention;
The structural representation of overhead control equipment in the control system of the manufacture of solar cells line that Fig. 2 provides for the embodiment of the present invention;
The structural representation of the communicator module in the control system of the manufacture of solar cells line that Fig. 3 provides for the embodiment of the present invention;
The schematic flow sheet of the method for the employing control system control manufacture of solar cells line that Fig. 4 provides for the embodiment of the present invention.
Embodiment
Below in conjunction with accompanying drawing, a kind of manufacture of solar cells line, its control system and the control method that the embodiment of the present invention provides is described in detail.
Embodiments provide a kind of control system of manufacture of solar cells line, as shown in Figure 1, comprise: the multiple host computers 100 corresponding with each production equipment 400 in manufacture of solar cells line, comprise the communication facilities 200 with each described host computer 100 multiple communicator module 210 one to one and overhead control equipment 300; Wherein,
Each host computer 100, for obtaining the production data information of each production equipment in such corresponding production equipment 400 and sending to corresponding communicator module 210; Received communication submodule 210 send execution information and production control equipment 400; Production data information comprises production equipment 400 current operation state information and Product processing parameter information;
Each communicator module 210, sends to overhead control equipment 300 after the production data information for being sent by the host computer 100 of the correspondence received processes in form of a message; And after the execution information that the overhead control equipment 300 received sends in form of a message being processed, send to corresponding host computer 100;
Overhead control equipment 300, for carrying out analyzing and processing to the production data information received, sends to corresponding communicator module 210 after generating corresponding execution information in form of a message.
In the specific implementation, manufacture of solar cells line generally comprises the production equipments such as cleaning and texturing equipment, PECVD device, PVD equipment, screen printing apparatus and annealing device, the control system of the above-mentioned manufacture of solar cells line that the embodiment of the present invention provides can all be arranged above-mentioned all kinds of production equipment 400 and its host computer 100 one to one.
In the above-mentioned control system that the embodiment of the present invention provides, adopting host computer 100 to carry out production control equipment 400 can make the control procedure of each production technology on production line relatively independent, stop the problem of chain reaction, namely the interruption of a production technology can not affect the carrying out of other production technologies.
Further, in the specific implementation, each host computer 100, specifically for obtaining the production data information of corresponding production equipment 400 with the communication protocol of setting, and can send to corresponding communicator module 210 with this communication protocol by production data information; According to the execution information production control equipment 400 that the communicator module 210 received sends with this communication protocol.Because the communication protocol of all kinds of production equipment 400 is likely different, when therefore obtaining the information such as corresponding production equipment 400 current operation state information and Product processing parameter at host computer 100, the communication protocol that host computer 100 generally continues to use production equipment 400 self outfit communicates with this production equipment 400, and adopts this communication protocol to communicate with corresponding communicator module 210.Such as: PECVD device can and corresponding host computer between SECS communication protocol can be adopted to carry out the transmission of information, cleaning and texturing equipment, PVD equipment, screen printing apparatus, OPC communication protocol between annealing device and corresponding host computer, can be adopted to carry out the transmission of information.The communications protocol format that each host computer 100 of dissimilar production equipment 400 adopts is different, marks production equipment 400 can ensure the reliability that data are transmitted with communications protocol format.Further, in the specific implementation, each host computer 100 at interval of the production data information of production equipment 400 corresponding to a period of time active obtaining, also can perform the operation of the production data information obtaining corresponding production equipment 400 after the instruction receiving the acquisition production data information that overhead control equipment 300 sends.
Adopt in the above-mentioned control system that the embodiment of the present invention provides with host computer 100 one to one communicator module 210 data that host computer 100 is sent after data conversion treatment, unification communicates with overhead control equipment 300 in form of a message, make overhead control equipment 300 can adopt the message of each communicator module 210 transmission of multiple threads, and adopt parallel mode to each communicator module 210 feedback message, the operational efficiency of whole system can be ensured.
In the specific implementation, the overhead control equipment 300 in the control system of the above-mentioned manufacture of solar cells line that the embodiment of the present invention provides, as shown in Figure 2, can specifically comprise: message processing unit 310, message monitoring means 320 and controlled processing unit 330; Wherein,
Message processing unit 310, the message comprising production data information for sending the communicator module 210 that received by message monitoring means 320 carries out analyzing and processing, generate corresponding comprise the message of process information after send to controlled processing unit 330 by message monitoring means 320; Analyzing and processing is carried out to the message comprising control command that the controlled processing unit 330 that received by message monitoring means 320 is sent, generate corresponding comprise the message of execution information after send to corresponding communicator module 210 by message monitoring means 320;
Controlled processing unit 330, for the control command of all kinds of production equipments 400 corresponding to the message generation comprising process information sent according to message processing unit 310, the message comprising described control command is sent to message processing unit 310 by message monitoring means 320.
Particularly, in overhead control equipment 300, the effect of message monitoring means 320 carries out real-time dynamic detection to all message in overhead control equipment 300, after capturing message, when the prefix (i.e. the transmit leg of message) of message being detected for non-message processing unit 310, message monitoring means 320 can send message to message processing unit 310, message processing unit 310 pairs of message are packed, after resolve and analysis etc. processes, find out and comprise production equipment running parameter in message, equipment operation state, the information such as production data and production equipment control, the message comprising process information is generated according to these information, namely message monitoring means 320 can be sent to after carrying out message secondary packing process, message monitoring means 320 sends to corresponding take over party's (i.e. controlled processing unit 330 or communicator module 210), the supervision of message in overhead control equipment 300 is achieved by the dynamic coordinate work of message processing unit 310 and message monitoring means 320, guarantee the reliability of Message Transmission.
Further, the overhead control equipment 300 in the control system of the above-mentioned manufacture of solar cells line that the embodiment of the present invention provides, as shown in Figure 2, can also comprise: with the database interface unit 340 of DataBase combining;
Controlled processing unit 330, also for being sent the message comprising reading and writing data instruction to database interface unit 340 by message monitoring means 320, received the message comprising reading and writing data feedback information of database interface unit 340 transmission by message monitoring means 320;
Database interface unit 340, for the message comprising reading and writing data instruction sent by message monitoring means 320 according to the controlled processing unit 330 received, performs corresponding read-write operation to the database connected.
Particularly, in the above-mentioned overhead control equipment 300 that the embodiment of the present invention provides, adopt database interface unit 340 pairs of databases to carry out the operation of data message, can stop direct control data stock risk.
Further, the overhead control equipment in the control system of the above-mentioned manufacture of solar cells line provided in the embodiment of the present invention, as shown in Figure 2, can also comprise: data dictionary unit 350, for the format information that data dissimilar in stored data base are corresponding; Such as specifically store data type, the information such as data tableau format;
Database interface unit 340, specifically for according to receiving the message comprising reading and writing data instruction that controlled processing unit 330 sent by message monitoring means 320, after the format information of the corresponding data stored in data query dictionary unit 350, corresponding read-write operation is performed to the database of connection.
Further, overhead control equipment 300 in the control system of the above-mentioned manufacture of solar cells line provided in the embodiment of the present invention, as shown in Figure 2, can also comprise: log management unit 360, for recording messages processing unit 310, message monitoring means 320, controlled processing unit 330, the operation note in database interface unit 340 and data dictionary unit 350.
In the specific implementation, message processing unit 310 in overhead control equipment 300, message monitoring means 320, controlled processing unit 330, database interface unit 340 and data dictionary unit 350 are after carrying out any data manipulation, all can send the message comprising operation note to log management unit 360, the reproduction of operating process can be realized completely or follow the tracks of operating process by message monitoring means 320.
Further, overhead control equipment 300 in the control system of the above-mentioned manufacture of solar cells line provided in the embodiment of the present invention, as shown in Figure 2, can also comprise: statistical report form unit 370, for the production data information of each production equipment sent according to host computer 100, generate corresponding statistical report form.
In the specific implementation, receive the execution information of the production data information comprising all kinds of production equipment 400 at host computer 100 after, control all kinds of production equipment 400 executable operations, the information such as the production data of all kinds of production equipment 400 are sent to overhead control equipment 300 by corresponding communicator module 210 simultaneously, after sending to message processing unit 310 to process after message monitoring means 320 in overhead control equipment captures message, statistical report form unit 370 is sent to by message monitoring means 320, statistical report form unit 370 generates corresponding statistical report form according to the production data information of all kinds of production equipment, and carry out total score and analyse, to realize information query and statistics function.
Further, overhead control equipment 300 in the control system of the above-mentioned manufacture of solar cells line provided in the embodiment of the present invention, as shown in Figure 2, can also comprise: security managing unit 380, for recording the operating right of each user belonging to different user groups, when specifically implementing, each user can be divided into different user's groups, and different operating rights is set to each user, with the safety of maintenance control system.
In the specific implementation, when different users operates control system, controlled processing unit 330 can send the message comprising inquiring user operating right, message monitoring means 320 after capturing this message after the process of message processing unit 310, be sent to security managing unit 380 by message monitoring means 320 and obtain corresponding user operation authority, the feedback message that security managing unit 380 is corresponding according to the message generation of this inquiring user operating right, after being processed by message monitoring means 320 and message processing unit 310, be sent to controlled processing unit 330, controlled processing unit 330 feeds back accordingly according to the operation of feedback message to the user possessing authority.
In the specific implementation, the effect of the communication facilities 200 in the control system of the above-mentioned manufacture of solar cells line that the embodiment of the present invention provides realizes the message exchange between host computer 100 and overhead control equipment 300, it is the bridge of the information interaction of host computer 100 and overhead control equipment 300, host computer 100 and overhead control equipment 300 are all connected by the network interface of switch with communication facilities 200, the type of concrete switch can be that wireless exchange board also can be changed planes by crossover, is connected adopt Ethernet to realize communication by wireless connections or optical cable.Particularly, each communicator module 210 in above-mentioned communication facilities 200, as shown in Figure 3, can specifically comprise: information receiving unit 211 and information process unit 212; Wherein,
Information receiving unit 211, for receiving the production data information that corresponding host computer 100 sends, and sends to information process unit 212 by production data information; Receive the execution information that overhead control equipment 300 sends, and execution information is sent to information process unit 212;
Information process unit 212, sends to overhead control equipment 300 in form of a message after the production data information received being added to corresponding production equipment identification information; Corresponding host computer 100 is sent to the communication protocol of correspondence after the execution information received is processed.
The numbering etc. that production equipment identification information is specifically as follows this production equipment can show the position of this production equipment and the information of effect, production equipment identification information and production data information one are led to and is sent to overhead control equipment, be convenient to the different production data information that overhead control equipment sends for different production equipments classify, avoid confusion.
Based on same inventive concept, embodiments provide a kind of manufacture of solar cells line 002, as shown in Figure 1, comprise the above-mentioned control system 001 that the embodiment of the present invention provides, and multiple production equipment 400.
Further, the production equipment 400 in the above-mentioned manufacture of solar cells line 002 that provides of the embodiment of the present invention specifically comprises: cleaning and texturing equipment, PECVD device, PVD equipment, screen printing apparatus 440, annealing device and testing, sorting equipment.
Wherein, semiconductor equipment communication standard interface (SemiconductorEquipmentCommunicationStandard, SECS) communication protocol specifically can be adopted between the host computer 100 that PECVD device is corresponding with control system to carry out the transmission of information.Specifically standard telecommunications modules (OLEforProcessControl, OPC) communication protocol can be adopted to carry out the transmission of information between the host computer 100 that cleaning and texturing equipment, PVD equipment, screen printing apparatus, annealing device are corresponding with control system.
In addition, each production equipment is all provided with warning device.The above-mentioned control system that the embodiment of the present invention provides can adopt dynamic monitoring processing policy to the exception of single-point production equipment, when a certain single-point production equipment occurs abnormal, first control system starts the machine anomaly alarming device, send sound and light alarm signal, corresponding single-point production equipment can be changed real color at the main interface of monitoring by control end, concrete operations mode is: warning message, yellow; Warning message, red.Occur abnormal production equipment, system can take production equipment to suspend using state, no longer in this production equipment, sends product with charge free.
Based on same inventive concept, embodiments provide a kind of control method of manufacture of solar cells line, the control system of the above-mentioned manufacture of solar cells line adopting the embodiment of the present invention to provide controls, and as described in Figure 4, comprises the following steps:
After S401, manufacture of solar cells line are opened and run, each host computer 100 obtains the production data information of corresponding each production equipment 400 and sends to corresponding communicator module 210; This production data information comprises production equipment current operation state information and Product processing parameter information;
In the specific implementation, each host computer 100 and the communication between production equipment 400 and communicator module 210 adopt the communication protocol set, the communication protocol that the communication protocol of this setting is equipped with production equipment 400 self is as the criterion, such as: PECVD device can and corresponding host computer between SECS communication protocol can be adopted to carry out the transmission of information, cleaning and texturing equipment, PVD equipment, screen printing apparatus, OPC communication protocol between annealing device and corresponding host computer, can be adopted to carry out the transmission of information.
S402, each communicator module 210 send to overhead control equipment 300 after the production data information that the host computer 100 of the correspondence received sends being processed in the form of a message;
S403, overhead control equipment 300 carry out analyzing and processing to the production data information received, and send to corresponding communicator module 210 in form of a message after generating corresponding execution information;
S404, each communicator module 210 send to corresponding host computer 100 after the execution information that the overhead control equipment 300 received sends in form of a message being processed;
The execution information production control equipment 400 that S405, each host computer 100 send according to the communicator module 210 received.
A kind of manufacture of solar cells line that the embodiment of the present invention provides, its control system and control method, by with all kinds of production equipment production data information of each production equipment that obtains of host computer one to one, overhead control equipment is sent to by the communicator module of correspondence, the production data information that overhead control equipment interconnection receives carries out analyzing and processing, corresponding host computer is sent to by corresponding communicator module after generating corresponding execution information, host computer controls all kinds of production equipments corresponding to it according to the execution information received and carries out corresponding operation, thus the Automated condtrol realized production equipment all kinds of on manufacture of solar cells line.Each host computer communicates with adopting the communication protocol of setting between corresponding production equipment and communicator module, make the control for each production equipment relatively independent, stop the problem of chain reaction, and, adopt different communication protocol to carry out communication and can ensure the reliability that data are transmitted; Each communicator module is unified to communicate with overhead control equipment in form of a message, make overhead control equipment can adopt the message of each communicator module transmission of multiple threads, and adopt parallel mode to each communicator module feedback message, the operational efficiency of whole system can be ensured.
Obviously, those skilled in the art can carry out various change and modification to the present invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (14)
1. a control system for manufacture of solar cells line, is characterized in that, comprising: the host computer corresponding with each production equipment in manufacture of solar cells line, comprises the communication facilities with described host computer communicator module one to one and overhead control equipment; Wherein,
Each described host computer, for obtaining the production data information of corresponding described production equipment and sending to corresponding described communicator module; Receive the execution information of described communicator module transmission and control described production equipment;
Each described communicator module, sends to described overhead control equipment after the described production data information for being sent by the described host computer of the correspondence received processes in the form of a message; And after the described execution information that the described overhead control equipment received sends in the form of a message being processed, send to corresponding described host computer;
Described overhead control equipment, for carrying out analyzing and processing to the described production data information received, sends to corresponding described communicator module after generating corresponding described execution information in the form of a message.
2. the control system of manufacture of solar cells line as claimed in claim 1, it is characterized in that, each described host computer, specifically for obtaining the described production data information of corresponding described production equipment with the communication protocol of setting, and with described communication protocol, described production data information is sent to corresponding described communicator module; The execution information sent with described communication protocol according to the described communicator module received controls described production equipment; Described production data information comprises described production equipment current operation state information and Product processing parameter information.
3. the control system of manufacture of solar cells line as claimed in claim 1, it is characterized in that, described overhead control equipment, specifically comprises: message processing unit, message monitoring means and controlled processing unit; Wherein,
Described message processing unit, message for comprising production data information described in sending the described communicator module received by described message monitoring means carries out analyzing and processing, generate corresponding comprise the message of process information after send to described controlled processing unit by described message monitoring means; Analyzing and processing is carried out to the message comprising control command that the described controlled processing unit received by described message monitoring means is sent, generate corresponding comprise the message of execution information after send to corresponding described communicator module by described message monitoring means;
Described controlled processing unit, for the control command of production equipment corresponding to the message generation comprising process information sent according to described message processing unit, the message comprising described control command is sent described message processing unit by described message monitoring means.
4. the control system of manufacture of solar cells line as claimed in claim 3, it is characterized in that, described overhead control equipment, also comprises: with the database interface unit of DataBase combining;
Described controlled processing unit, also for being sent the message comprising reading and writing data instruction to described database interface unit by described message monitoring means, received the message comprising reading and writing data feedback information of described database interface unit transmission by described message monitoring means;
Described database interface unit, for comprising the message of reading and writing data instruction described in being sent by described message monitoring means according to the described controlled processing unit that receives, performs corresponding read-write operation to the described database connected.
5. the control system of manufacture of solar cells line as claimed in claim 4, it is characterized in that, described overhead control equipment, also comprises: data dictionary unit, for storing format information corresponding to data dissimilar in described database;
Described database interface unit, specifically for according to receiving described controlled processing unit by comprising the message of reading and writing data instruction described in described message monitoring means transmission, after inquiring about the format information of the corresponding data stored in described data dictionary unit, corresponding read-write operation is performed to the described database connected.
6. the control system of manufacture of solar cells line as claimed in claim 5, it is characterized in that, described overhead control equipment, also comprise: log management unit, for recording described message processing unit, message monitoring means, controlled processing unit, the operation note in database interface unit and data dictionary unit.
7. the control system of manufacture of solar cells line as claimed in claim 3, it is characterized in that, described overhead control equipment, also comprises: statistical report form unit, for the production data information of each production equipment sent according to described host computer, generate corresponding statistical report form.
8. the control system of manufacture of solar cells line as claimed in claim 3, it is characterized in that, described overhead control equipment, also comprises: security managing unit, for recording the operating right of each user belonging to different user groups.
9. the control system of the manufacture of solar cells line as described in any one of claim 2-8, is characterized in that, each described communicator module, specifically comprises: information receiving unit and information process unit; Wherein,
Described information receiving unit, for receiving the production data information that corresponding described host computer sends, and sends to described information process unit by described production data information; Receive the described execution information that described overhead control equipment sends, and described execution information is sent to described information process unit;
Described information process unit, sends to described overhead control equipment in the form of a message after the described production data information received being added to corresponding production equipment identification information; Corresponding host computer is sent to the communication protocol of correspondence after the described execution information received is processed.
10. a manufacture of solar cells line, is characterized in that, comprising: the control system of the manufacture of solar cells line as described in any one of claim 1-9, and multiple production equipment.
11. manufacture of solar cells lines as claimed in claim 10, it is characterized in that, described production equipment specifically comprises: cleaning and texturing equipment, plasma enhanced chemical vapor deposition PECVD device, physical vapour deposition (PVD) PVD equipment, screen printing apparatus, annealing device.
12. manufacture of solar cells lines as claimed in claim 11, is characterized in that, adopt semiconductor equipment communication standard interface SECS communication protocol to carry out the transmission of information between the host computer that described PECVD device is corresponding with described control system.
13. manufacture of solar cells lines as claimed in claim 11, it is characterized in that, between the host computer that described cleaning and texturing equipment, PVD equipment, screen printing apparatus, annealing device are corresponding with described control system, adopt the standard telecommunications modules OPC communication protocol being used for process control to carry out the transmission of information.
The control method of 14. 1 kinds of manufacture of solar cells lines, adopts the control system of the manufacture of solar cells line as described in any one of claim 1-9 to control, it is characterized in that, comprising:
After manufacture of solar cells line is opened and run, each described host computer obtains the production data information of corresponding each production equipment and sends to corresponding communicator module; Described production data information comprises production equipment current operation state information and Product processing parameter information;
Each described communicator module sends to overhead control equipment after the production data information that the described host computer of the correspondence received sends being processed in the form of a message;
The production data information that described overhead control equipment interconnection receives carries out analyzing and processing, sends to corresponding described communicator module in the form of a message after generating corresponding execution information;
Each described communicator module sends to corresponding described host computer after the execution information that the described overhead control equipment received sends in the form of a message being processed;
The execution information that each described host computer sends according to the described communicator module received controls described production equipment.
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