CN105259666B - A kind of Jiao Chang tracks based on dynamic regulation make the device of micro-structural - Google Patents
A kind of Jiao Chang tracks based on dynamic regulation make the device of micro-structural Download PDFInfo
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- CN105259666B CN105259666B CN201510860470.XA CN201510860470A CN105259666B CN 105259666 B CN105259666 B CN 105259666B CN 201510860470 A CN201510860470 A CN 201510860470A CN 105259666 B CN105259666 B CN 105259666B
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- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
Abstract
A kind of Jiao Chang tracks based on dynamic regulation make the device of micro-structural.Including femto-second laser, dynamic femtosecond vectorial field array produces and regulator control system and tightly focused micro-machining system.Operation principle is：Holographic grating is loaded in spatial light modulator to generate vectorial field array, is focused on through microcobjective, obtains the tightly focused Jiao Chang with certain light intensity distribution.The vectorial field array of dynamic change is obtained by designing the holographic grating of dynamic change, it can produce Jiao Chang tracks change over time, that given shape (such as quadrangle, octagon, fan are leaf) is presented after tightly focused.Jiao Chang tracks based on generation can obtain micro-structural corresponding with Jiao Chang tracks.The present invention has the particular advantages moved without sample or light source compared to the method for other making micro-nano structures, the micro-structural of making is close to wavelength magnitude, arbitrarily devised two-dimensional/three-dimensional micro-structural can be processed, has the advantages that efficient, repeatability is high, stability is good when making micro-structural.
Description
Technical field
The invention belongs to the regulation and control of light field polarization and femtosecond laser micro-nano technology field, and in particular to utilize flying for dynamic regulation
Second vectorial field array regulation and control Jiao Chang tracks and the apparatus and method that micro-nano technology is carried out based on this.
Background technology：
In more than ten years in past, with the continuous development of femtosecond laser technology, the application of femtosecond laser micro-nano technology is increasingly
Extensively.By its intrinsic ultrashort and superpower characteristic, more traditional Long Pulse LASER has in terms of microfabrication to be permitted femtosecond laser
More incomparable unique advantage：The non-thermofusible of process, the accuracy of processing stage, the sub-micron of processing dimension are special
Property, the popularity etc. of rapidoprint, thus be widely used for processing metal, semiconductor and dielectric material etc..Meanwhile femtosecond swashs
Light micro-processing technology is also a kind of method that two dimension or three-dimensional structure are made in transparent material.But femtosecond laser micro-nano adds
Work also has the characteristics of processing efficiency is low, this be due in general Laser Processing be all based on single-spot scanning mode added
Work.In order to improve the efficiency of processing, the interference hot spot of multiple beam or multiple-beam interference can be used to carry out parallel fabrication, but this
The shortcomings that a little methods is to lack flexibility in the two-dimensional/three-dimensional micro-structural of processed complex.
An important attribute as light field is polarized, very important effect is played in the regulation and control of light.It is recent years, right
The spatial domain regulation and control of light field, especially regulate and control to the spatial domain of polarization state, have achieved some impressive progresses, and have turned into wide concerned
Research field.Vectorial field or non-uniform polarisation light field, i.e., diverse location has the light of different polarization states in light field wave surface
, as a kind of particularly important space structure light field, the distribution of its non-uniform polarisation causes the temporal-spatial evolution behavior of novelty and permitted
The new kink characteristics for being different from scalar field more.Radial polarisation light field can be by tightly focused into 0.16 λ2The far field of super diffraction limit is burnt
Spot, and linearlypolarized laser can only realize 0.26 λ under the same conditions2Focused spot.Utilize light field polarization state and the joint of position phase
Regulation and control, rotation direction (angular) the polarization vector light field for carrying vortex position phase can be established, smaller super diffraction pole can be obtained after tightly focused
Limit far-field focus.Especially, tightly focused radial polarisation light field can generate strong longitudinal electric field component (referred to as longitudinal field, i.e., its
Polarization direction is axially).Recently, femtosecond vectorial field has been used for the micro-nano knot that sub-wavelength is prepared in solid material surface
Structure.For single vectorial field, general only one focused spot of generation under the conditions of tightly focused, and the micro-nano technology of single focal spot
Its processing efficiency is the significant challenge faced at present.But the vectorial field for being made up of multiple single vectorial fields
Array, due to can be with the polarization state distribution of individually designed each vectorial field and its spatial arrangement, therefore focusing field can be realized
It is three-dimensional regulate and control so that obtain more focal spots, thus have very big application potential in terms of the efficiency of micro-nano technology is improved
[K.Lou,S.X.Qian,Z.C.Ren,C.H.Tu,Y.N.Li,and H.T.Wang,“Femtosecond Laser
Processing by Using Patterned Vector Optical Fields,”Sci.Rep.3,2281(2013)；
M.Q.Cai,C.H.Tu,H.H.Zhang,S.X.Qian,K.Lou,Y.N.Li,and H.T.Wang,“Subwavelength
multiple focal spots produced by tight focused the patterned vector optical
fields,”Opt.Express 21,31469–31482(2013).]。
The spatial arrangement of polarization state distribution and vectorial field array based on single vectorial field in vectorial field array
Design, can obtain different tightly focused Field distribution of focal plane.For example a kind of vectorial field array is designed, it can produce during its tightly focused
Raw six focused spots by arranged in regular hexagon shape, to carry out micro-nano technology with this focousing field, then six points can be once processed,
If process a circular structure, it is contemplated that allow this six points slowly to rotate 60 ° with the time around central point, can so produce one
The individual circular focal spot track changed over time, a circle can be then processed based on it.If desired positive six side is processed
Shape, then need during this six focal spots are rotated, make focal spot track that hexagon be presented, and this can be by dynamically setting
Meter is carried in the holographic grating in spatial light modulator to realize.Foundation and it is such as method, it is possible to achieve other complexity are micro-
The processing and preparation of structure.Therefore on the one hand the femtosecond vectorial field array based on dynamic regulation can be realized easily to complexity
The processing of micro-nano structure, it on the other hand can also greatly improve the efficiency of micro-nano technology.Importantly, in the mistake of micro-nano technology
Cheng Zhong, it is not necessary to the movement of sample and light beam, and everything only needs dynamic to change the holography being carried in spatial light modulator
Grating achieves that the method for the Jiao Chang tracks processing micro structure based on this dynamic regulation not yet finds Patents Shen at present
Please.
The content of the invention
Goal of the invention is to need to carry out sample complicated mobile control when solving current femtosecond laser micro-nano technology
And processing efficiency it is low the problem of, there is provided a kind of complicated micro-nano structure based on dynamic regulation femtosecond vectorial field array is efficient
The apparatus and method of processing.
Technical scheme：
A kind of Jiao Chang tracks based on dynamic regulation make the device of complicated micro-nano structure, and the device includes：Femtosecond laser
Device, the generation of dynamic femtosecond vectorial field array and regulator control system and tightly focused micro-machining system.
The generation of dynamic femtosecond vectorial field array and regulator control system include：The spatial light being sequentially arranged along optical axis direction is adjusted
Device (4) processed, 4f systems supplementary lens (5), spatial filter (6), quarter wave plate (7), the rearmounted lens of 4f systems (8), Ronchi grating
(9) and for producing the computer system (14) with dynamic control holographic grating.
Tightly focused micro-machining system includes：Microcobjective (11), sample (12) and sample three-dimensional mobile platform (13)；
The femtosecond laser of femto-second laser (1) output variable declining via 1/2 wave plate (2) and polarization beam apparatus (3) composition
Subtract device to be controlled laser energy, then vertical incidence to spatial light modulator (4), loading is by calculating in spatial light modulator
Machine system (14) generation and dynamic control holographic grating, by the linearly polarized light of diffraction after spatial light modulator through 4f systems before
Lens (5) are put to be converged, using the spatial filter (6) being on the frequency plane of 4f system supplementary lens choose respectively just,
The diffraction light of negative one level, the left and right rounding polarised light for carrying vortex phase is then each changed into by a quarter wave plate (7),
Ronchi grating (9) is incident to after the rearmounted lens of 4f systems (8) convergence again, flying for dynamic regulation is obtained after Ronchi grating closes beam
Second vectorial field array.The dynamic regulation femtosecond vectorial field array obtained is incident to micro- thing after speculum (10) reflection
Mirror (11) is focused, and focus on light beam irradiation carries out the processing of micro-nano structure in sample (12) surface or inside (transparent material),
Sample can carry out three-dimensional accurate control movement by three-dimensional mobile platform (13) as needed, and the control to mobile platform is by phase therewith
Computer system (14) even is implemented.
The centre wavelength of described femto-second laser (1) is 775~810nm, pulse width is 50~150fs, repeats frequency
Rate is 1~5kHz.
It is described to be loaded into the holographic grating of spatial light modulator (4) in micro process at any time through computer system (14)
Between dynamic change to generate the femtosecond vectorial field array of dynamic regulation, and then the burnt field rail changed over time needed for producing
Mark；The shape of the micro-nano structure of preparation can be controlled by the design of Jiao Chang tracks.
Described sample (12) can be metal, semiconductor or dielectric material (carrying out micro-nano technology on surface), can also
It is that (such as glass, fused silica, lithium niobate or periodically poled lithium niobate, internally or surface carries out micro-nano and added transparent solid material
Work).
The advantages of the present invention
(1) shape for the micro-nano structure that the present invention processes can be realized by the design and dynamic control of Jiao Chang tracks, because
This can realize the preparation and processing of complicated micro-nano structure；
(2) polarization regulation and control of the present invention based on vectorial field array are so as to produce the tightly focused Jiao Chang of more focal spots, and are based on
More focal spots carry out micro Process, improve the efficiency of micro-nano technology；
(3) present invention, without the movement of sample or light beam, only needs dynamic regulation to be loaded into when processing single micro-nano structure
Holographic grating in spatial light modulator.The technology of the present invention is ripe, and step is simple, and stability is strong, and repeatability is high.
Brief description of the drawings
Fig. 1 is the schematic device that micro-structural is made using the femtosecond vectorial field array of dynamic regulation.
Fig. 2 be based on vectorial field array Jiao Chang tracks regulation and control schematic diagram, (a) vectorial field array arrangement schematic diagram and
Its characterising parameter, the rotation of the vectorial field array shown in (b) figure (a), (c) focal spot as caused by vectorial field array rotation
Rotate schematic diagram.
Fig. 3 is the regular hexagon Jiao Chang tracks forming process schematic diagram based on dynamic regulation vectorial field array.The first row：
Vectorial field array schematic diagram after rotating to an angle, the second row：Jiao Chang corresponding with the vectorial field array of the first row points
Cloth, the third line：Caused regular hexagon Jiao Chang tracks are progressively rotated based on vectorial field array and form schematic diagram.Simulated conditions：
(a) r=r0, α=0, (b) r=1.10r0, α=π/15, (c) r=1.15r0, π/15 of α=2, (d) r=1.15r0, α=π/5,
(e) r=1.10r0, π/15 of α=4.
Fig. 4 is that square Jiao Chang tracks form schematic diagram, (a) vectorial field array arrangement schematic diagram, (b) figure (a) arrow
Focal spot distribution corresponding to light field array is measured, (c) vectorial field array progressively rotates the square focal spot track of pi/2 formation.
Fig. 5 regular hexagon (a) and square (b) Jiao Chang tracks based on caused by process preparation inside lithium niobate
Corresponding micro-structural.The first row：Analog result, the second row：Experimental result.
Fig. 6 is based on burnt caused by the vectorial field array for arranging (c), (d) as tetragonal crystal system (a), (b) and trigonal system
Field track and the corresponding micro-structural that preparation is processed inside lithium niobate.The first row：Analog result, the second row：Experimental result.
Fig. 7 is the periodicity regular hexagon micro-structural prepared based on regular hexagon focal spot track inside lithium columbate crystal.
Fig. 8 is the two layers of embedded regular hexagon of periodicity prepared based on regular hexagon focal spot track inside lithium columbate crystal
Micro-structural.
Embodiment
In conjunction with drawings and examples, the present invention is described in more detail, it is noted that but the invention is not limited in
These embodiments.
Embodiment 1, the Jiao Chang tracks based on dynamic regulation make the device of micro-structural
As shown in figure 1, the femtosecond vectorial field array proposed by the present invention using dynamic regulation makes the device of micro-structural
Including：Femto-second laser, the generation of dynamic femtosecond vectorial field array and regulator control system, tightly focused micro-machining system.
The generation of dynamic femtosecond vectorial field array and regulator control system include：The spatial light being sequentially arranged along optical axis direction is adjusted
Device (4) processed, 4f systems supplementary lens (5), spatial filter (6), quarter wave plate (7), the rearmounted lens of 4f systems (8), Ronchi grating
(9) and for producing the computer system (14) with dynamic control holographic grating.Tightly focused micro-machining system includes：Micro- thing
Mirror (11), sample (12) and three-dimensional mobile platform (13).
The femtosecond laser of femto-second laser (1) output variable declining via 1/2 wave plate (2) and polarization beam apparatus (3) composition
Subtract device to be controlled laser energy, then vertical incidence to spatial light modulator (4), loading is by calculating in spatial light modulator
Machine system (14) generation and dynamic control holographic grating, by the linearly polarized light of diffraction after spatial light modulator through 4f systems before
Lens (5) are put to be converged, using the spatial filter (6) being on the frequency plane of 4f system supplementary lens choose respectively just,
The diffraction light of negative one level, the left and right rounding polarised light for carrying vortex phase is then each changed into by a quarter wave plate (7),
Ronchi grating (9) is incident to after the rearmounted lens of 4f systems (8) convergence again, dynamic regulation is obtained after Ronchi grating closes beam
Femtosecond vectorial field array.Entered by the dynamic regulation femtosecond vectorial field array that aforementioned system obtains after speculum (10) reflection
It is incident upon microcobjective (11) to be focused, focus on light beam irradiation carries out micro-nano on sample (12) surface or inside (transparent material) and added
Work, sample can carry out three-dimensional accurate control movement by three-dimensional mobile platform (13) as needed, the control to mobile platform by with
Connected computer system (14) implement.
Embodiment 2, using dynamic regulation femtosecond vectorial field array make micro-structural principle and method
Femtosecond laser is incident after the generation of the dynamic femtosecond vectorial field array described in embodiment 1 and regulator control system
It is focused to microcobjective, is then incident to sample surfaces or internal progress micro-nano technology, the shape of the micro-nano structure of preparation
Or pattern is determined by motion vector light field tightly focused Jiao Chang focal spot track.To specifically it introduce based on motion vector light field below
Array carries out the principle of micro-nano technology.
As shown in Fig. 2 (a), vectorial field array is made up of a series of single vectorial fields according to certain rule arrangement,
The polarisation distribution of each vectorial field can individually regulate and control, and their spatial arrangement can also required design.Vectorial field
The description of array can be represented that wherein oblique coordinates system (ξ, η) is similar brilliant by cartesian coordinate system (x, y) and oblique coordinates system (ξ, η)
The coordinate system of grillages row, the symmetry of vectorial field array are represented by the angle β of ξ and η axles.
The formation basic theory of focal spot track is introduced with special case below.If form each vector of vectorial field array
Light field is the vectorial field of rotation direction polarization, and its incident field size is identical, when it is arranged as similar three rank crystallographic system, i.e. β
=π/3, then its Jiao Chang is rendered as six focal spots after tightly focused, as shown in the solid line small circle in Fig. 2 (c).When we are by Fig. 2
(a) during vectorial field array integral-rotation α angles, then the six of its Jiao Chang focal spot also rotation alpha angle, when by vectorial field array by
During step rotation π/3, then the circular focal spot track as shown in chain double-dashed line in Fig. 2 (c) can be obtained.If want to obtain regular hexagon
Focal spot track, then during vectorial field array rotation, the distance r at six focal spot defocus fields centersAlso real-time change is needed,
Its focal spot track moves along expected hexagonal side length can be (as shown in the dotted line small circle in Fig. 2 (c)), rsReal-time change
Changing can be realized by the radius size for changing single vectorial field.
For regular hexagon, distance r of any point to center in its length of sidesWith its length of side rs0Between just like ShiShimonoseki
System：
Due to rs0Size and the light field size of single vectorial field be inversely proportional, therefore can obtain inputting the initial of light field
Light field size r0With the relation of single light field radius r in rotary course：
Fig. 3 gives the formation schematic diagram of regular hexagon Jiao Chang tracks.Corresponding anglec of rotation α difference in Fig. 3 (a)-(e)
For 0, π/15,2 π/15, π/5 and 4 π/15, the first row is the rotation of vectorial field array, and the second row is the distribution of corresponding focal spot
Situation, the third line are the focal spot tracks changed over time to be formed.When the step-length rotated every time is sufficiently small (such as π/90), then may be used
Obtain highly uniform focal spot track.
The change of Field distribution of focal plane can then be caused by changing the asymmetry parameter β of vectorial field array.If form vectorial field
Each vectorial field of array is the vectorial field of rotation direction polarization, and its incident field size is identical, when β=pi/2, is such as schemed
Shown in 4 (a), then its Jiao Chang as shown in Fig. 4 (b), is rendered as four focal spots after tightly focused.To obtain shown in Fig. 4 (c) just
The focal spot track of quadrangle, then by the geometrical relationship of square, can obtain in its length of side any point to the center of square away from
From rsWith its length of side rs0Between meet following relation：
And input the initial light field size r of light field0It is then with anglec of rotation α relation with light field size r in rotary course：
It was found from Fig. 2 to Fig. 4, the focal spot mobile route of the focal spot track to obtain other shapes, then control tightly focused
(or track) is very important, and the track of focal spot can be realized by designing the parameter of vectorial field array.Based on this
Method, we can realize the focal spot track of Various Complex, such as octagonal, quatrefoil, flaabellum shape Jiao Chang tracks.In addition, also
The nested sandwich construction of said structure can be realized.
As described above, the dynamic change vectorial field array based on careful design can obtain expected focal spot track, base
It can be processed in caused focal spot track and prepare corresponding micro-nano structure.If simple two are carried out to sample using mobile platform
Dimension rectilinear movement, can also obtain corresponding periodic structure (as shown in Figure 8).
Processing instance one
The processing unit (plant) of complex micro structure is made below in conjunction with the Jiao Chang tracks based on dynamic regulation of the present invention, is cut in z
The micro-structural of processing regular hexagon and square is described in detail inside lithium columbate crystal.
Processing unit (plant) reference picture 1, incident femtosecond laser are former based on wavefront reconstruction after spatial light modulator and 4f systems
Reason Ronchi grating closes Shu Shengcheng vectorial fields, from generating unlike single vectorial field, in order to obtain vectorial field array,
The holographic grating loaded in spatial light modulator is also array, and grating has identical cycle and orientation, holographic grating
Pattern of rows and columns and needs caused by vectorial field array have identical arrange (see Fig. 2 (a) Suo Shi).When vectorial field array
Arrangement trigonal system (β=π/3) is presented or during tetragonal crystal system (β=pi/2), six point (positions can be produced respectively in tightly focused
In regular hexagon vertex position) and four points (on square summit).In order to produce regular hexagon or square
Jiao Chang tracks, the gradual rotation of the holographic grating array being loaded into spatial light modulator reach π/3 or pi/2 up to the anglec of rotation,
During rotation, size (the single light field of caused vectorial field array of each grating in holographic grating array
Size is directly determined by raster size) change with the angle [alpha] of rotation by (2) formula or (4) formula.Caused vectorial field is through NA=
0.75 microcobjective forms the Jiao Chang tracks of regular hexagon and square after focusing on.In processing regular hexagon and square
Micro-structural when, lithium niobate sample is fixed, material is processed by caused Jiao Chang tracks, to obtain correspondingly
The micro-structural of regular hexagon and square, as shown in Figure 5.In Fig. 5, upper row be simulation result, below a line be phase
The experimental result answered.
Processing instance two
Above-mentioned example is to control Jiao Chang tracks according to formula (1)-(4), so as to obtain regular hexagon and square
Micro-nano structure.Here we provide the making of other shapes micro-structural again.
If corresponding Jiao Chang must be produced first, it is known that to prepare the micro-structural of certain shape by introduction above
Track, the diameter of the single light field of vectorial field array in rotary course can be calculated with the change of the anglec of rotation according to Jiao Chang tracks
Change.The Jiao Chang tracks of octagon and bunge bedstraw herb shape in Fig. 6 (a) and Fig. 6 (b) are by the vectorial field that is arranged by tetragonal crystal system
Array (β=pi/2) rotates pi/2 and obtained, and four focuses are respectively positioned at the up, down, left and right side of Jiao Chang tracks before starting rotation
Position on.The Jiao Chang tracks of Magen David and flaabellum shape are by the vectorial field that is arranged by trigonal system in Fig. 6 (c) and Fig. 6 (d)
Array (β=π/3) rotates π/3 and obtained.Before starting rotation, Fig. 6 (c) six focuses are located at hexagonal six summits respectively
On, and Fig. 6 (d) six focuses are respectively positioned at the outermost of six helixes.Jiao Chang tracks based on acquisition are in lithium niobate
Portion carries out micro-nano technology, obtains micro-structural consistent therewith.
Processing instance three
Examples detailed above one and example two provide the side invented based on us again here both for single micro-structural is processed
Method prepares the example of two-dimensional and periodic micro-nano structure.
On the basis of the single regular hexagon micro-structural shown in Fig. 5 (a) is obtained, sample is entered using three-dimensional mobile platform
The simple two-dimensional movement of row can obtain periodic micro-structural.In manufacturing cycle structure, mobile platform is along relative to level
Direction moves linearly into 60 ° of direction, and the displacement between two regular hexagon micro-structurals is two times of the regular hexagon length of side,
Experimental results are as shown in Figure 7.
Processing instance four
The periodicity regular hexagon micro-structural of preparation is given in processing instance three, provides two layers of manufacturing cycle again here
Nested type regular hexagon micro-structural.When preparing two layers of nested periodic micro structure, it is necessary to first prepare respectively inside and outside single
Layer regular hexagon micro-structural, then according to the individual layer periodic micro/nano structure identical mode mobile example translation stage shown in Fig. 7
Two layers of nested periodic micro structure can be produced, experimental result is as shown in Figure 8.It is pointed out that due to prepared
Structure is micron dimension, it is therefore desirable to uses precise 2-D/three-dimensional mobile platform to move sample to ensure multiple lists
The side of first micro-structural can be perfect overlapping so as to the perfection of hold period structure.
Claims (2)
1. a kind of complicated micro-nano structure processing method based on dynamic regulation femtosecond vectorial field array, should be based on dynamic regulation
The device that Jiao Chang tracks make micro-structural includes：Femto-second laser, the generation of dynamic femtosecond vectorial field array and regulator control system
With tightly focused micro-machining system；The generation of dynamic femtosecond vectorial field array and regulator control system include：Along optical axis direction successively cloth
Spatial light modulator (4), 4f systems supplementary lens (5), spatial filter (6), quarter wave plate (7), the rearmounted lens of 4f systems put
(8), Ronchi grating (9) and for produce and dynamic control holographic grating computer system (14)；Tightly focused micro Process system
System includes：Microcobjective (11), sample (12) and sample three-dimensional mobile platform (13)；It is characterized in that comprise the following steps：
1) variable attenuation that the femtosecond laser of femto-second laser (1) output forms via 1/2 wave plate (2) and polarization beam apparatus (3)
Device is controlled to laser energy, then vertical incidence to spatial light modulator (4)；
2) loading by computer system (14) generation and the holographic grating of dynamic control, is adjusted by spatial light in spatial light modulator
The linearly polarized light of diffraction is converged through 4f systems supplementary lens (5) after device processed, utilizes the frequency spectrum for being in 4f system supplementary lens
Spatial filter (6) on face chooses the diffraction light of positive and negative one-level respectively, is then each changed into by a quarter wave plate (7)
The left and right rounding polarised light of vortex phase is carried, then Ronchi grating (9) is incident to after the rearmounted lens of 4f systems (8) convergence, is passed through
Ronchi grating closes the femtosecond vectorial field array of acquisition dynamic regulation after beam；
3) the dynamic regulation femtosecond vectorial field array obtained is incident to microcobjective (11) after speculum (10) reflection and entered
Line focusing, focus on light beam irradiation is in sample (12) surface or the internal processing for carrying out micro-nano structure；
4) sample carries out three-dimensional accurate control movement by three-dimensional mobile platform (13) as needed, the control to mobile platform by with
Connected computer system (14) implement；
The processing of described micro-nano structure is the Jiao Chang tracks that the femtosecond vectorial field array based on dynamic regulation changes over time
Carry out；The shape of micro-nano structure is controlled by the design of Jiao Chang tracks；
The femtosecond vectorial field array of described dynamic regulation is the holography changed over time by being carried in spatial light modulator
Caused by grating comes.
2. processing method according to claim 1, it is characterised in that the centre wavelength of the femto-second laser be 775~
810nm, pulse width are 50~150fs, and repetition rate is 1~5kHz.
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