CN105259630B - A kind of picture frame reference rings facial plane degree detects support meanss - Google Patents
A kind of picture frame reference rings facial plane degree detects support meanss Download PDFInfo
- Publication number
- CN105259630B CN105259630B CN201510758141.4A CN201510758141A CN105259630B CN 105259630 B CN105259630 B CN 105259630B CN 201510758141 A CN201510758141 A CN 201510758141A CN 105259630 B CN105259630 B CN 105259630B
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- Prior art keywords
- pneumatic
- picture frame
- support
- base
- nail
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
A kind of picture frame reference rings facial plane degree detection support meanss belong to precision optical machinery detection technique field, it is therefore intended that the problem of detection efficiency that solution prior art is present is low, realize the support to picture frame.The present invention includes base, main support nail, Auxiliary support nail, pressure sensor and pneumatic actuating element；Base upper surface is provided with annular groove, three main support nails are uniform in annular groove inner periphery, multiple Auxiliary support nails are provided between per two adjacent main support nails, each main support nail lower end is threadedly coupled with a pressure sensor, pressure sensor is fixed on base, and Auxiliary support nail passes through the regulation above and below pneumatic actuating element realization.The present invention is added using three-point mount support by the way of a flexible support, i.e., can provide uniform support force and ensure higher accuracy of detection, and the non-rotationally-symmetric picture frame increase scope of application is adapted to again.Simple in construction, manufacturing cost is low.
Description
Technical field
The invention belongs to precision optical machinery detection technique field, and in particular to a kind of picture frame reference rings facial plane degree detection support
Device.
Background technology
The eyeglass of light projection photoetching objective lens generally uses independent picture frame, is connected by screw between picture frame and picture frame, and lead to
Cross the benchmark annular face contacts of picture frame.In order to improve the assembly precision of projection objective, the benchmark anchor ring requirement of picture frame is with higher
Flatness demand, it is therefore desirable to which the reference plane to picture frame carries out high-precision flatness detection.Because accuracy of detection requirement is in Asia
Micron dimension, due to the influence of picture frame gravity, flatness influence of the supporting way on picture frame when picture frame is detected is larger.
Generally there are two kinds of supporting way in the prior art：One kind is planar support, precision and rigidity of this method to plane
It is required that it is higher, therefore testing cost can be increased；It is another for supported at three point and to rotate the method for demarcation, but this method detection efficiency
It is relatively low and require that picture frame has rotationally symmetrical characteristic.
The content of the invention
It is an object of the invention to propose a kind of picture frame reference rings facial plane degree detection support meanss, solve prior art and deposit
Detection efficiency it is low the problem of, realize support to picture frame.
To achieve the above object, a kind of picture frame reference rings facial plane degree of the invention detection support meanss include base, master
Support nail, Auxiliary support nail, pressure sensor and pneumatic actuating element；
The base upper surface is provided with annular groove, and three main support nails are uniform in annular groove inner periphery, per phase
M Auxiliary support nail, each main support nail lower end and a pressure sensor are provided between two adjacent main support nails
Threaded connection, the pressure sensor is fixed on the base, and the Auxiliary support nail is real by the pneumatic actuating element
Regulation above and below now.
The pneumatic actuating element includes plate minitype cylinder, Pneumatic three-way, pneumatic elbow and pneumatic valve head；Each auxiliary
Support nail is fixedly connected with the push rod of a plate minitype cylinder, and the cylinder barrel of each plate minitype cylinder is fixedly connected with base,
The plate minitype cylinder bottom air inlet is fixedly connected with Pneumatic three-way or pneumatic elbow；All Pneumatic three-ways and pneumatic elbow
It is sequentially connected with by tracheae head and the tail；The plate minitype cylinder adjusts air pressure entirely through external pneumatic pressure source.
Any one in the plate minitype cylinder is fixedly connected with the pneumatic elbow, remaining and the Pneumatic three-way
It is fixedly connected, the Pneumatic three-way and pneumatic elbow are sequentially connected with by tracheae head and the tail, one adjacent with the pneumatic elbow
Pneumatic three-way is connected by pneumatic valve head with the pneumatic pressure source.
The pressure sensor is fixed on the base by the fixed cylinder, and the pressure sensor passes through sensor
Wire terminal is connected with pressure display unit, and the pickup wire joint is fixedly connected with the base.
Value per the quantity m of the Auxiliary support nail set between two adjacent main support nails is：m≥1.
The detection support meanss also include cover plate, and the cover plate sets the annular groove upper end and the base upper end
Face is concordant.
Beneficial effects of the present invention are：A kind of picture frame reference rings facial plane degree detection support meanss of the present invention include three
Main support nail and multiple Auxiliary supports nail, the anchor ring to be detected of picture frame to be detected are upward, the lower surface of picture frame to be detected and main branch
Nail and Auxiliary support nail joint are touched, and three main support nails are that initial alignment is carried out to picture frame to be detected and is provided non-with main function
Symmetrical support force；Auxiliary support nail above and below the realization of plate minitype cylinder by adjusting, and main function is that picture frame to be detected is carried
For uniform Auxiliary support power to balance the support force of three main strong points.Picture frame to be detected is in measurement process, first by three
Individual main support nail support picture frame bottom, and the support force of three main support nails is monitored, then by remaining Auxiliary support nail to picture frame
Bottom carries out Auxiliary support, and the support force of adjustment Auxiliary support nail is until the support force and Auxiliary support point of three fixed strong points
Support force it is close.The present invention is added using three-point mount support by the way of a flexible support, i.e., can provide uniform support
Try hard to keep and demonstrate,prove higher accuracy of detection, the non-rotationally-symmetric picture frame increase scope of application is adapted to again.The program is simple in construction, reduction
Manufacturing cost, the easy to operate requirement also reduced while improve detection efficiency to testing staff.
Brief description of the drawings
Fig. 1 detects support device structure top view for a kind of picture frame reference rings facial plane degree of the present invention；
Fig. 2 detects support device structure sectional view for a kind of picture frame reference rings facial plane degree of the present invention；
Fig. 3 detects support device structure upward view for a kind of picture frame reference rings facial plane degree of the present invention；
Wherein：1st, base, 2, pressure sensor, 3, main support nail, 4, pickup wire joint, 5, fixed cylinder, 6, board-like micro-
Type cylinder, 7, Auxiliary support nail, 8, Pneumatic three-way, 9, cover plate, 10, tracheae, 11, pneumatic elbow, 12, pneumatic valve head, 13, to be checked
Survey picture frame, 14, anchor ring to be detected.
Embodiment
Embodiments of the present invention are described further below in conjunction with the accompanying drawings.
Referring to accompanying drawing 1, accompanying drawing 2 and accompanying drawing 3, a kind of picture frame reference rings facial plane degree detection support meanss of the invention include
Base 1, main support nail 3, Auxiliary support nail 7, pressure sensor 2, fixed cylinder 5 and pneumatic actuating element；
The upper surface of base 1 is provided with annular groove, and three main support nails 3 are uniform in annular groove inner periphery, often
Three Auxiliary support nails 7 are provided between two adjacent main support nails 3, the upper summit of three main support nails should be higher than that base
Upper surface, each main lower end of support nail 3 is threadedly coupled with a pressure sensor 2, and the pressure sensor 2 is by described
Fixed cylinder 5 is fixed on the base 1, and the Auxiliary support nail 7 passes through the regulation above and below pneumatic actuating element realization.Treat
Detect that the bottom surface of picture frame 13 is contacted with main support nail 3 and Auxiliary support nail 7, the circle diameter size that the strong point is constituted is made by picture frame
The holding state of used time is determined.Anchor ring 14 to be detected is the surface upward of picture frame 13 to be detected.
The pneumatic actuating element includes plate minitype cylinder 6, Pneumatic three-way 8, pneumatic elbow 11 and pneumatic valve head 12；Often
Individual Auxiliary support nail 7 is fixedly connected with the push rod of a plate minitype cylinder 6, cylinder barrel and the base 1 of each plate minitype cylinder 6
It is fixedly connected, the bottom air inlet of plate minitype cylinder 6 is fixedly connected with Pneumatic three-way 8 or pneumatic elbow 11；It is all pneumatic
Threeway 8 and pneumatic elbow 11 are sequentially connected with by the head and the tail of tracheae 10；The plate minitype cylinder 6 is entirely through external pneumatic pressure
Source adjusts air pressure.All plate minitype cylinders 6 communicate and ensure that all Auxiliary support nails 7 provide size identical Auxiliary support
Power.
Any one in the plate minitype cylinder 6 is fixedly connected with the pneumatic elbow 11, remaining with it is described pneumatic
Threeway 8 is fixedly connected, and the Pneumatic three-way 8 and pneumatic elbow 11 are sequentially connected with by the head and the tail of tracheae 10, with the pneumatic elbow
A 11 adjacent Pneumatic three-ways 8 are connected by pneumatic valve head 12 with the pneumatic pressure source.
The pressure sensor 2 is connected by pickup wire joint 4 with pressure display unit, the pickup wire joint 4 with
The base 1 is fixedly connected.
The detection support meanss also include cover plate 9, and the cover plate 9 sets the annular groove upper end and the base 1
Upper surface is concordant.The cover plate 9 is fixedly connected by bolt with the base 1.
The device is using flow during the detection of the present invention：Pass through external pneumatic of pneumatic valve head 12 with the present invention first
The air pressure of plate minitype cylinder 6 is adjusted to zero by pressure source, places picture frame 13 to be detected on three main support nails 3.By outer
The pneumatic pressure source connect is slowly increased the air pressure in plate minitype cylinder 6, and monitors the pressure value of three pressure sensors 2.With
The increase of air pressure in plate minitype cylinder 6, the pressure value of three pressure sensors 2 can be reduced gradually, until passing through barometer
The support force of the Auxiliary support nail 7 of calculation is equal with the average value of the pressure of three pressure sensors 2.The flatness detection of the present invention
Support meanss are applied to the flatness detecting instrument devices such as three coordinates, roundness measuring equipment.
Claims (6)
1. a kind of picture frame reference rings facial plane degree detects support meanss, including base (1) and main support nail (3), it is characterised in that
Also include Auxiliary support nail (7), pressure sensor (2) and pneumatic actuating element；
Base (1) upper surface is provided with annular groove, and three main support nails (3) are uniform in annular groove inner periphery, often
Be provided with m Auxiliary support nail (7) between two adjacent main support nails (3), each main support nail (3) lower end with one
Pressure sensor (2) is threadedly coupled, and the pressure sensor (2) is fixed on the base (1), and the Auxiliary support follows closely (7)
Pass through the regulation above and below pneumatic actuating element realization.
2. a kind of picture frame reference rings facial plane degree detection support meanss according to claim 1, it is characterised in that the gas
Dynamic adjustment unit includes plate minitype cylinder (6), Pneumatic three-way (8), pneumatic elbow (11) and pneumatic valve head (12)；Each auxiliary
Support nail (7) is fixedly connected with the push rod of a plate minitype cylinder (6), the cylinder barrel and base of each plate minitype cylinder (6)
(1) it is fixedly connected, plate minitype cylinder (6) bottom air inlet is fixedly connected with Pneumatic three-way (8) or pneumatic elbow (11)；
All Pneumatic three-ways (8) and pneumatic elbow (11) are sequentially connected with from beginning to end by tracheae (10)；The plate minitype cylinder (6) is overall
Air pressure is adjusted by external pneumatic pressure source.
3. a kind of picture frame reference rings facial plane degree detection support meanss according to claim 2, it is characterised in that the plate
Any one in formula minitype cylinder (6) is fixedly connected with the pneumatic elbow (11), and remaining is fixed with the Pneumatic three-way (8)
Connection, the Pneumatic three-way (8) and pneumatic elbow (11) are sequentially connected with from beginning to end by tracheae (10), with the pneumatic elbow (11)
An adjacent Pneumatic three-way (8) is connected by pneumatic valve head (12) with the pneumatic pressure source.
4. a kind of picture frame reference rings facial plane degree detection support meanss according to claim 1, it is characterised in that the pressure
Force snesor (2) is fixed on the base (1) by fixed cylinder (5), and the pressure sensor (2) passes through pickup wire joint
(4) it is connected with pressure display unit, the pickup wire joint (4) is fixedly connected with the base (1).
5. a kind of picture frame reference rings facial plane degree detection support meanss according to claim 1, it is characterised in that per adjacent
Two main support nails (3) between the quantity m value of Auxiliary support nail (7) that sets be：m≥1.
6. a kind of picture frame reference rings facial plane degree detection support meanss according to claim 1, it is characterised in that the inspection
Surveying support meanss also includes cover plate (9), and the cover plate (9) sets the annular groove upper end to be put down with the base (1) upper surface
Together.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510758141.4A CN105259630B (en) | 2015-11-10 | 2015-11-10 | A kind of picture frame reference rings facial plane degree detects support meanss |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510758141.4A CN105259630B (en) | 2015-11-10 | 2015-11-10 | A kind of picture frame reference rings facial plane degree detects support meanss |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105259630A CN105259630A (en) | 2016-01-20 |
| CN105259630B true CN105259630B (en) | 2017-10-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510758141.4A Active CN105259630B (en) | 2015-11-10 | 2015-11-10 | A kind of picture frame reference rings facial plane degree detects support meanss |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106424434B (en) * | 2016-11-02 | 2018-11-02 | 广东万丰摩轮有限公司 | A kind of method of automatic detecting wheel rim flatness |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201142318Y (en) * | 2007-11-13 | 2008-10-29 | 上海微电子装备有限公司 | High-precision fast leveling mechanism |
| CN102226948A (en) * | 2011-05-19 | 2011-10-26 | 张瑞杰 | Leveling system of floating cylinder |
| CN102809801A (en) * | 2012-08-10 | 2012-12-05 | 中国科学院国家天文台南京天文光学技术研究所 | Pneumatic type support system of primary mirror of astronomical telescope |
| CN204203531U (en) * | 2014-10-21 | 2015-03-11 | 深圳华大基因研究院 | Planar regulation device |
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Effective date of registration: 20190830 Address after: Room 601-10, 6th floor, 52 Block 2, Jingyuan North Street, Beijing Economic and Technological Development Zone, 100176 Patentee after: Beijing Guowang Optical Technology Co., Ltd. Address before: 130033 southeast Lake Road, Jilin, Changchun, No. 3888 Patentee before: Changchun Inst. of Optics and Fine Mechanics and Physics, Chinese Academy of Sci |