CN105259630A - A picture frame benchmark torus flatness detection supporting device - Google Patents
A picture frame benchmark torus flatness detection supporting device Download PDFInfo
- Publication number
- CN105259630A CN105259630A CN201510758141.4A CN201510758141A CN105259630A CN 105259630 A CN105259630 A CN 105259630A CN 201510758141 A CN201510758141 A CN 201510758141A CN 105259630 A CN105259630 A CN 105259630A
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- China
- Prior art keywords
- pneumatic
- picture frame
- main support
- strutting arrangement
- support nail
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
A picture frame benchmark torus flatness detection supporting device belongs to the technical field of precision machinery detection, and aims solves problems of low detection efficiency in the prior art and realizes support for a picture frame. The picture frame benchmark torus flatness detection supporting device of the invention comprises a pedestal, main support nails, auxiliary support nails, pressure transducers and a pneumatic adjusting unit. The upper end surface of the pedestal is provided with an annular groove. The three main support nails are uniformly distributed in the inner circumference of the annular groove. More than one auxiliary support nail is arranged between each two adjacent main support nail. The lower end of each main support nail is in threaded connection with one pressure transducer. The pressure transducers are fixed on the pedestal. The auxiliary support nails allow upward and downward adjusting through the pneumatic adjusting unit. According to the invention, a mode of three-point fixed support plus multi-point flexible support is employed, so that uniform support forces are provided to guarantee relatively high detection precision, and the picture frame benchmark torus flatness detection supporting device can be applicable to a picture frame which is not in non-rotating symmetry to increase an applicable scope. The structure is simple, and the manufacturing cost is low.
Description
Technical field
The invention belongs to precision optical machinery detection technique field, be specifically related to a kind of picture frame reference rings facial plane degree and detect bracing or strutting arrangement.
Background technology
The eyeglass of light projection photoetching objective lens adopts independently picture frame usually, is connected by screw between picture frame and picture frame, and passes through the benchmark annular face contacts of picture frame.In order to improve the assembly precision of projection objective, the benchmark anchor ring of picture frame requires to have higher flatness demand, therefore needs to carry out high-precision flatness detection to the reference field of picture frame.Because accuracy of detection requires in sub-micrometer scale, due to the impact of picture frame gravity, the flatness impact of supporting way when picture frame detects on picture frame is larger.
Usually have two kinds of supporting way in prior art: a kind of is planar support, the method to the precision of plane and rigidity requirement higher, therefore can increase testing cost; Another kind of rotate the method for demarcating for supported at three point, but the method detection efficiency is lower and require that picture frame has rotational symmetric characteristic.
Summary of the invention
The object of the invention is to propose a kind of picture frame reference rings facial plane degree and detect bracing or strutting arrangement, solve the problem that the detection efficiency of prior art existence is low, realize the support to picture frame.
For achieving the above object, a kind of picture frame reference rings facial plane degree detection bracing or strutting arrangement of the present invention comprises base, main support nail, supplemental support nail, pressure transducer and pneumatic actuating element;
Described base upper surface has annular groove, three described main support nails are uniform at annular groove inner periphery, m supplemental support nail is provided with between two often adjacent main support nails, each described main support nail lower end is threaded with a pressure transducer, described pressure transducer is fixed on described base, and described supplemental support nail realizes upper and lower adjustment by described pneumatic actuating element.
Described pneumatic actuating element comprises plate minitype cylinder, Pneumatic three-way, pneumatic elbow and pneumatic valve head; Each supplemental support nail is fixedly connected with the push rod of a plate minitype cylinder, and the cylinder barrel of each plate minitype cylinder is fixedly connected with base, and described plate minitype cylinder bottom air intake opening is fixedly connected with Pneumatic three-way or pneumatic elbow; All Pneumatic three-ways are connected by tracheae head and the tail in turn with pneumatic elbow; Described plate minitype cylinder entirety is by external pneumatic pressure source adjustable pressure.
In described plate minitype cylinder, any one is fixedly connected with described pneumatic elbow, remaining is fixedly connected with described Pneumatic three-way, described Pneumatic three-way is connected by tracheae head and the tail in turn with pneumatic elbow, and a Pneumatic three-way adjacent with described pneumatic elbow is connected with described pneumatic pressure source by pneumatic valve head.
Described pressure transducer is fixed on described base by described stationary magazine creel, and described pressure transducer is connected with pressure display unit by pickup wire joint, and described pickup wire joint is fixedly connected with described base.
The value of the quantity m of the supplemental support nail arranged between two often adjacent main support nails is: m >=1.
Described detection bracing or strutting arrangement also comprises cover plate, and it is concordant with described base upper surface that described cover plate arranges described annular groove upper end.
Beneficial effect of the present invention is: a kind of picture frame reference rings facial plane degree of the present invention detects bracing or strutting arrangement and comprises three main support nails and multiple supplemental support nail, the anchor ring to be detected of picture frame to be detected upwards, the lower surface of picture frame to be detected and main support nail and supplemental support nail joint are touched, and three main support nails and Main Function are for carrying out initial alignment and providing asymmetrical anchorage force to picture frame to be detected; Supplemental support nail realizes up-down adjustment by plate minitype cylinder, and Main Function is for providing uniform supplemental support power to balance the anchorage force of three main strong points to picture frame to be detected.Picture frame to be detected is in measuring process, first support bottom picture frame by three main support nails, and monitor the anchorage force of three main support nails, followed closely by remaining supplemental support and carry out supplemental support to bottom picture frame, the anchorage force of adjustment supplemental support nail is until the anchorage force of three fixed support points is close with the anchorage force of supplemental support point.The present invention adopts 3 fixed supports to add the mode of multiple spot flexible support, and uniform anchorage force namely can be provided to ensure higher accuracy of detection, and the picture frame that can adapt to again rotation asymmetry increases the scope of application.Program structure is simple, reduces manufacturing cost, easy to operate improve detection efficiency while also reduce requirement to testing staff.
Accompanying drawing explanation
Fig. 1 is that a kind of picture frame reference rings facial plane degree of the present invention detects support device structure vertical view;
Fig. 2 is that a kind of picture frame reference rings facial plane degree of the present invention detects support device structure cut-open view;
Fig. 3 is that a kind of picture frame reference rings facial plane degree of the present invention detects support device structure upward view;
Wherein: 1, base, 2, pressure transducer, 3, main support nail, 4, pickup wire joint, 5, stationary magazine creel, 6, plate minitype cylinder, 7, supplemental support nail, 8, Pneumatic three-way, 9, cover plate, 10, tracheae, 11, pneumatic elbow, 12, pneumatic valve head, 13, picture frame to be detected, 14, anchor ring to be detected.
Embodiment
Below in conjunction with accompanying drawing, embodiments of the present invention are described further.
See accompanying drawing 1, accompanying drawing 2 and accompanying drawing 3, a kind of picture frame reference rings facial plane degree of the present invention detects bracing or strutting arrangement and comprises base 1, main support nail 3, supplemental support nail 7, pressure transducer 2, stationary magazine creel 5 and pneumatic actuating element;
Described base 1 upper surface has annular groove, three described main support nails 3 are uniform at annular groove inner periphery, three supplemental support nails 7 are provided with between often adjacent two main support nails 3, the upper summit of three main support nails should higher than the upper surface of base, each described main support nail 3 lower end is threaded with a pressure transducer 2, described pressure transducer 2 is fixed on described base 1 by described stationary magazine creel 5, and described supplemental support nail 7 realizes upper and lower adjustment by described pneumatic actuating element.The bottom surface of picture frame 13 to be detected is followed closely 7 with main support nail 3 and supplemental support and is contacted, and the holding state when circle diameter size that the strong point is formed is used by picture frame is determined.Anchor ring 14 to be detected is the surface upward of picture frame 13 to be detected.
Described pneumatic actuating element comprises plate minitype cylinder 6, Pneumatic three-way 8, pneumatic elbow 11 and pneumatic valve head 12; Each supplemental support nail 7 is fixedly connected with the push rod of a plate minitype cylinder 6, and the cylinder barrel of each plate minitype cylinder 6 is fixedly connected with base 1, and described plate minitype cylinder 6 bottom air inlet is fixedly connected with Pneumatic three-way 8 or pneumatic elbow 11; All Pneumatic three-ways 8 are connected by tracheae 10 head and the tail in turn with pneumatic elbow 11; Described plate minitype cylinder 6 entirety is by external pneumatic pressure source adjustable pressure.All plate minitype cylinders 6 communicate and ensure the supplemental support power that all supplemental support nail 7 provides size identical.
In described plate minitype cylinder 6, any one is fixedly connected with described pneumatic elbow 11, remaining is fixedly connected with described Pneumatic three-way 8, described Pneumatic three-way 8 is connected by tracheae 10 head and the tail in turn with pneumatic elbow 11, and a Pneumatic three-way 8 adjacent with described pneumatic elbow 11 is connected with described pneumatic pressure source by pneumatic valve head 12.
Described pressure transducer 2 is connected with pressure display unit by pickup wire joint 4, and described pickup wire joint 4 is fixedly connected with described base 1.
Described detection bracing or strutting arrangement also comprises cover plate 9, and it is concordant with described base 1 upper surface that described cover plate 9 arranges described annular groove upper end.Described cover plate 9 is fixedly connected with described base 1 by bolt.
During detection of the present invention, this device use flow process is: first by the pneumatic pressure source external with pneumatic valve head 12 of the present invention, the air pressure of plate minitype cylinder 6 is adjusted to zero, place picture frame 13 to be detected on three main support nails 3.Slowly increase the air pressure in plate minitype cylinder 6 by external pneumatic pressure source, and monitor the force value of three pressure transducers 2.Along with the increase of plate minitype cylinder 6 internal gas pressure, the force value of three pressure transducers 2 can reduce gradually, until the anchorage force of the supplemental support nail 7 calculated by air pressure is equal with the mean value of the pressure of three pressure transducers 2.Flatness of the present invention detects bracing or strutting arrangement and is applicable to the flatness detecting instrument such as three-dimensional, roundness measuring equipment device.
Claims (6)
1. picture frame reference rings facial plane degree detects a bracing or strutting arrangement, comprises base (1) and main support nail (3), it is characterized in that, also comprises supplemental support nail (7), pressure transducer (2) and pneumatic actuating element;
Described base (1) upper surface has annular groove, three described main support nails (3) are uniform at annular groove inner periphery, m supplemental support nail (7) is provided with between two often adjacent main support nails (3), each described main support nail (3) lower end is threaded with a pressure transducer (2), described pressure transducer (2) is fixed on described base (1), and described supplemental support nail (7) realizes upper and lower adjustment by described pneumatic actuating element.
2. a kind of picture frame reference rings facial plane degree according to claim 1 detects bracing or strutting arrangement, it is characterized in that, described pneumatic actuating element comprises plate minitype cylinder (6), Pneumatic three-way (8), pneumatic elbow (11) and pneumatic valve head (12); Each supplemental support nail (7) is fixedly connected with the push rod of a plate minitype cylinder (6), the cylinder barrel of each plate minitype cylinder (6) is fixedly connected with base (1), and described plate minitype cylinder (6) bottom air inlet is fixedly connected with Pneumatic three-way (8) or pneumatic elbow (11); All Pneumatic three-ways (8) are connected by tracheae (10) head and the tail in turn with pneumatic elbow (11); Described plate minitype cylinder (6) entirety is by external pneumatic pressure source adjustable pressure.
3. a kind of picture frame reference rings facial plane degree according to claim 2 detects bracing or strutting arrangement, it is characterized in that, in described plate minitype cylinder (6), any one is fixedly connected with described pneumatic elbow (11), remaining is fixedly connected with described Pneumatic three-way (8), described Pneumatic three-way (8) is connected by tracheae (10) head and the tail in turn with pneumatic elbow (11), and a Pneumatic three-way (8) adjacent with described pneumatic elbow (11) is connected with described pneumatic pressure source by pneumatic valve head (12).
4. a kind of picture frame reference rings facial plane degree according to claim 1 detects bracing or strutting arrangement, it is characterized in that, described pressure transducer (2) is fixed on described base (1) by stationary magazine creel (5), described pressure transducer (2) is connected with pressure display unit by pickup wire joint (4), and described pickup wire joint (4) is fixedly connected with described base (1).
5. a kind of picture frame reference rings facial plane degree according to claim 1 detects bracing or strutting arrangement, it is characterized in that, the value of the quantity m of supplemental support nail (7) arranged between two often adjacent main support nails (3) is: m >=1.
6. a kind of picture frame reference rings facial plane degree according to claim 1 detects bracing or strutting arrangement, it is characterized in that, described detection bracing or strutting arrangement also comprises cover plate (9), and it is concordant with described base (1) upper surface that described cover plate (9) arranges described annular groove upper end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510758141.4A CN105259630B (en) | 2015-11-10 | 2015-11-10 | A kind of picture frame reference rings facial plane degree detects support meanss |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510758141.4A CN105259630B (en) | 2015-11-10 | 2015-11-10 | A kind of picture frame reference rings facial plane degree detects support meanss |
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| CN105259630A true CN105259630A (en) | 2016-01-20 |
| CN105259630B CN105259630B (en) | 2017-10-03 |
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| CN201510758141.4A Active CN105259630B (en) | 2015-11-10 | 2015-11-10 | A kind of picture frame reference rings facial plane degree detects support meanss |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106424434A (en) * | 2016-11-02 | 2017-02-22 | 广东万丰摩轮有限公司 | Method for automatically detecting rim flatness |
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| CN201142318Y (en) * | 2007-11-13 | 2008-10-29 | 上海微电子装备有限公司 | High-precision fast leveling mechanism |
| CN102226948A (en) * | 2011-05-19 | 2011-10-26 | 张瑞杰 | Leveling system of floating cylinder |
| CN102809801A (en) * | 2012-08-10 | 2012-12-05 | 中国科学院国家天文台南京天文光学技术研究所 | Pneumatic type support system of primary mirror of astronomical telescope |
| CN204203531U (en) * | 2014-10-21 | 2015-03-11 | 深圳华大基因研究院 | Planar regulation device |
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2015
- 2015-11-10 CN CN201510758141.4A patent/CN105259630B/en active Active
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|---|---|---|---|---|
| CN201142318Y (en) * | 2007-11-13 | 2008-10-29 | 上海微电子装备有限公司 | High-precision fast leveling mechanism |
| CN102226948A (en) * | 2011-05-19 | 2011-10-26 | 张瑞杰 | Leveling system of floating cylinder |
| CN102809801A (en) * | 2012-08-10 | 2012-12-05 | 中国科学院国家天文台南京天文光学技术研究所 | Pneumatic type support system of primary mirror of astronomical telescope |
| CN204203531U (en) * | 2014-10-21 | 2015-03-11 | 深圳华大基因研究院 | Planar regulation device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106424434A (en) * | 2016-11-02 | 2017-02-22 | 广东万丰摩轮有限公司 | Method for automatically detecting rim flatness |
| CN106424434B (en) * | 2016-11-02 | 2018-11-02 | 广东万丰摩轮有限公司 | A kind of method of automatic detecting wheel rim flatness |
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| Publication number | Publication date |
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| CN105259630B (en) | 2017-10-03 |
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Effective date of registration: 20190830 Address after: Room 601-10, 6th floor, 52 Block 2, Jingyuan North Street, Beijing Economic and Technological Development Zone, 100176 Patentee after: Beijing Guowang Optical Technology Co., Ltd. Address before: 130033 southeast Lake Road, Jilin, Changchun, No. 3888 Patentee before: Changchun Inst. of Optics and Fine Mechanics and Physics, Chinese Academy of Sci |