CN105190823B - 多x射线束管 - Google Patents
多x射线束管 Download PDFInfo
- Publication number
- CN105190823B CN105190823B CN201480008739.5A CN201480008739A CN105190823B CN 105190823 B CN105190823 B CN 105190823B CN 201480008739 A CN201480008739 A CN 201480008739A CN 105190823 B CN105190823 B CN 105190823B
- Authority
- CN
- China
- Prior art keywords
- ray
- liquid metal
- metal jet
- electron beam
- jet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910001338 liquidmetal Inorganic materials 0.000 claims abstract description 105
- 238000010894 electron beam technology Methods 0.000 claims abstract description 67
- 230000005855 radiation Effects 0.000 claims abstract description 44
- 238000003384 imaging method Methods 0.000 claims abstract description 29
- 238000010276 construction Methods 0.000 claims abstract description 19
- 239000002184 metal Substances 0.000 claims description 17
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 9
- 230000035515 penetration Effects 0.000 claims description 6
- 238000010521 absorption reaction Methods 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 3
- 230000001427 coherent effect Effects 0.000 abstract description 7
- 238000004590 computer program Methods 0.000 description 14
- 230000008901 benefit Effects 0.000 description 8
- 239000007788 liquid Substances 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000002059 diagnostic imaging Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 238000002083 X-ray spectrum Methods 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000002079 cooperative effect Effects 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2207/00—Particular details of imaging devices or methods using ionizing electromagnetic radiation such as X-rays or gamma rays
- G21K2207/005—Methods and devices obtaining contrast from non-absorbing interaction of the radiation with matter, e.g. phase contrast
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/081—Target material
- H01J2235/082—Fluids, e.g. liquids, gases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/086—Target geometry
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/10—Drive means for anode (target) substrate
Landscapes
- X-Ray Techniques (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361764043P | 2013-02-13 | 2013-02-13 | |
| US61/764,043 | 2013-02-13 | ||
| PCT/IB2014/058627 WO2014125389A1 (en) | 2013-02-13 | 2014-01-29 | Multiple x-ray beam tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105190823A CN105190823A (zh) | 2015-12-23 |
| CN105190823B true CN105190823B (zh) | 2017-11-17 |
Family
ID=50156815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480008739.5A Expired - Fee Related CN105190823B (zh) | 2013-02-13 | 2014-01-29 | 多x射线束管 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9767982B2 (enExample) |
| EP (1) | EP2956954B1 (enExample) |
| JP (1) | JP6277204B2 (enExample) |
| CN (1) | CN105190823B (enExample) |
| WO (1) | WO2014125389A1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103171819B (zh) | 2013-04-16 | 2015-11-25 | 葛兰素史克（中国）投资有限公司 | 给液器 |
| EP3217879B1 (en) | 2014-11-11 | 2020-01-08 | Koninklijke Philips N.V. | Source-detector arrangement |
| US10117629B2 (en) * | 2014-12-03 | 2018-11-06 | Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College | High energy grating techniques |
| WO2017019782A1 (en) * | 2015-07-27 | 2017-02-02 | Rensselaer Polytechnic Institute | Combination of an x-ray tube and a source grating with electron beam manipulation |
| EP3405112B1 (en) | 2016-06-16 | 2019-06-12 | Koninklijke Philips N.V. | Apparatus for x-ray imaging an object |
| JP7216650B2 (ja) * | 2017-01-19 | 2023-02-01 | コーニンクレッカ フィリップス エヌ ヴェ | Ｘ線放射を生成するためのｘ線源装置 |
| EP3385976A1 (en) * | 2017-04-05 | 2018-10-10 | Excillum AB | Vapour monitoring |
| ES3023841T3 (en) * | 2018-05-25 | 2025-06-03 | Micro X Ltd | A device and method for applying beamforming signal processing to rf modulated x-rays |
| US11237483B2 (en) | 2020-06-15 | 2022-02-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and apparatus for controlling droplet in extreme ultraviolet light source |
| EP4075474A1 (en) * | 2021-04-15 | 2022-10-19 | Excillum AB | Liquid jet target x-ray source |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1466860A (zh) * | 2000-07-28 | 2004-01-07 | 产生x-光或euv辐射的方法和装置 | |
| CN102768931A (zh) * | 2012-07-30 | 2012-11-07 | 深圳大学 | 用于大视场x射线相衬成像的x射线源 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6831963B2 (en) * | 2000-10-20 | 2004-12-14 | University Of Central Florida | EUV, XUV, and X-Ray wavelength sources created from laser plasma produced from liquid metal solutions |
| US6711233B2 (en) | 2000-07-28 | 2004-03-23 | Jettec Ab | Method and apparatus for generating X-ray or EUV radiation |
| JP3897287B2 (ja) * | 2002-04-12 | 2007-03-22 | ギガフォトン株式会社 | Ｌｐｐ光源装置 |
| DE10306668B4 (de) * | 2003-02-13 | 2009-12-10 | Xtreme Technologies Gmbh | Anordnung zur Erzeugung von intensiver kurzwelliger Strahlung auf Basis eines Plasmas |
| EP1731099A1 (en) | 2005-06-06 | 2006-12-13 | Paul Scherrer Institut | Interferometer for quantitative phase contrast imaging and tomography with an incoherent polychromatic x-ray source |
| SE530094C2 (sv) * | 2006-05-11 | 2008-02-26 | Jettec Ab | Metod för alstring av röntgenstrålning genom elektronbestrålning av en flytande substans |
| GB2441578A (en) | 2006-09-08 | 2008-03-12 | Ucl Business Plc | Phase Contrast X-Ray Imaging |
| US7693256B2 (en) | 2008-03-19 | 2010-04-06 | C-Rad Innovation Ab | Phase-contrast X-ray imaging |
| US7929667B1 (en) * | 2008-10-02 | 2011-04-19 | Kla-Tencor Corporation | High brightness X-ray metrology |
| JP2013513418A (ja) | 2009-12-10 | 2013-04-22 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 微分位相コントラストイメージングシステム |
| JP5944413B2 (ja) | 2011-02-07 | 2016-07-05 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | ダイナミックレンジを増大する微分位相コントラスト撮像装置及び方法 |
-
2014
- 2014-01-29 WO PCT/IB2014/058627 patent/WO2014125389A1/en not_active Ceased
- 2014-01-29 CN CN201480008739.5A patent/CN105190823B/zh not_active Expired - Fee Related
- 2014-01-29 JP JP2015556593A patent/JP6277204B2/ja not_active Expired - Fee Related
- 2014-01-29 EP EP14706104.8A patent/EP2956954B1/en not_active Not-in-force
- 2014-01-29 US US14/765,391 patent/US9767982B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1466860A (zh) * | 2000-07-28 | 2004-01-07 | 产生x-光或euv辐射的方法和装置 | |
| CN102768931A (zh) * | 2012-07-30 | 2012-11-07 | 深圳大学 | 用于大视场x射线相衬成像的x射线源 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6277204B2 (ja) | 2018-02-07 |
| JP2016511924A (ja) | 2016-04-21 |
| WO2014125389A1 (en) | 2014-08-21 |
| US20150380200A1 (en) | 2015-12-31 |
| EP2956954A1 (en) | 2015-12-23 |
| US9767982B2 (en) | 2017-09-19 |
| CN105190823A (zh) | 2015-12-23 |
| EP2956954B1 (en) | 2017-03-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171117 Termination date: 20200129 |