CN105181605A - Spectrometer based on Bragg reflection effect - Google Patents
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Abstract
Description
技术领域 technical field
本发明属于光学技术领域，涉及一种光谱仪，特别是一种基于布拉格反射效应的光谱仪，主要应用于环境检测、物质分析、颜色检测、食品安全、质量检测、资源勘探、生物生命、医学医疗、过程控制、物联网、光学技术、光电工程等领域中的光谱信息检测。 The invention belongs to the field of optical technology, and relates to a spectrometer, especially a spectrometer based on the Bragg reflection effect, which is mainly used in environmental detection, material analysis, color detection, food safety, quality detection, resource exploration, biological life, medical treatment, Spectral information detection in the fields of process control, Internet of Things, optical technology, optoelectronic engineering, etc.
背景技术 Background technique
光谱仪是将入射光分解为光谱线并进行采集处理的仪器。根据色散组件的分光原理，，广泛应用于环境检测、物质分析、颜色检测、食品安全、质量检测、资源勘探、生物生命、医学医疗、过程控制、物联网、光学技术、光电工程等领域,例如，在环境检测领域，基于光谱仪的宽光谱水质分析仪可以同时检测多个水质指标,构建采样和原位在线两种水质环境检测网；在物质分析，基于光谱仪的红外分析技术和拉曼光谱分析技术广泛存在，并且发挥重要作用。 A spectrometer is an instrument that decomposes incident light into spectral lines and collects and processes them. According to the spectroscopic principle of the dispersion component, it is widely used in environmental detection, material analysis, color detection, food safety, quality inspection, resource exploration, biological life, medical treatment, process control, Internet of Things, optical technology, optoelectronic engineering and other fields, such as , in the field of environmental detection, the wide-spectrum water quality analyzer based on the spectrometer can detect multiple water quality indicators at the same time, and build two water quality environmental detection networks: sampling and in-situ online; in material analysis, infrared analysis technology and Raman spectral analysis based on the spectrometer Technology is widespread and plays an important role.
光谱仪的发展经历了从棱镜光谱仪向衍射光栅光谱仪和干涉光谱仪的发展历程，在先技术中存在广泛存在一种光谱仪是基于光栅分光的光谱仪，例如,海洋光学公司的USB2000型号光谱仪,以及蔡司公司的MMS型号的光谱仪,以及,基于改进型光栅结构的新型光谱仪,参见美国授权专利，授权专利名称：Spectroscope，发明人：KatsumiIda和TakeshiIkeda，专利号：US7436512B2，专利授权时间：2008年10月14日。在先技术虽然存在一定的特点，但是仍然存在本质不足：1）采用光栅元件进行入射光束分光，工作原理是光栅光场衍射行为，光栅为二维微纳结构器件，设计和制作工艺限制了光栅构建灵活性差，基于微纳结构的光栅在尺寸上难于实现小型微型化，本质上受限于光栅微纳结构尺寸；2）光栅光谱仪的分辨率受到光栅微纳结构分布以及微纳结构几何尺寸限制，光学光谱分辨率不高，影响应用范围；3）在基于光栅构建光谱仪系统中，其它部件相对于光栅的方位和几何尺寸角度等参数要求高，系统复杂、构建灵活性不高，光栅光谱仪集成度低，可靠性和功能扩充性受到影响。 The development of the spectrometer has gone through the development process from the prism spectrometer to the diffraction grating spectrometer and the interference spectrometer. In the prior art, there is a wide range of spectrometers based on grating spectrometers, such as the USB2000 spectrometer of Ocean Optics, and Zeiss’s spectrometer. The spectrometer of the MMS model, and the new spectrometer based on the improved grating structure, refer to the US authorized patent, the authorized patent name: Spectroscope, the inventors: KatsumiIda and Takeshi Ikeda, the patent number: US7436512B2, the patent authorization time: October 14, 2008. Although the prior technology has certain characteristics, there are still essential deficiencies: 1) The grating element is used to split the incident beam. The working principle is the diffraction behavior of the grating light field. The grating is a two-dimensional micro-nano structure device, and the design and manufacturing process limit the grating. The construction flexibility is poor, and the size of the grating based on the micro-nano structure is difficult to achieve miniaturization, which is essentially limited by the size of the micro-nano structure of the grating; 2) The resolution of the grating spectrometer is limited by the distribution of the micro-nano structure of the grating and the geometric size of the micro-nano structure , the resolution of the optical spectrum is not high, which affects the scope of application; 3) In the grating-based spectrometer system, other components have high requirements for parameters such as the orientation and geometric dimension angle of the grating, the system is complex, and the construction flexibility is not high. The grating spectrometer integration The degree is low, and the reliability and function expansion are affected.
发明内容 Contents of the invention
本发明的目的在于针对上述技术的不足，提供一种基于布拉格反射效应的光谱仪，具有工艺简洁、灵活性高、易于小型化、高色散、分辨率高、应用范围广、系统简单、光机定位要求低、集成度高、可靠性高、功能扩充性强等特点。 The purpose of the present invention is to address the shortcomings of the above technologies, to provide a spectrometer based on the Bragg reflection effect, which has the advantages of simple process, high flexibility, easy miniaturization, high dispersion, high resolution, wide application range, simple system, and optical-mechanical positioning. Low requirements, high integration, high reliability, and strong function expansion.
本发明的基本构思是：基于层状布拉格反射效应和慢光波导导光特性，在底部层状布拉格反射部件的上面部分区域设置有工作层和顶部层状布拉格反射部件，工作层和顶部层状布拉格反射部件的侧面断面对齐，在底部层状布拉格反射部件的表面构成一个台阶，入射光场在入射到工作层侧面断面，光场在两个布拉格反射部件之间传播，底部层状布拉格反射部件对光场反射率高于顶部层状布拉格反射部件的反射率，光场从顶部层状布拉格反射部件的表面出射，不同波长出射角度不同，完成光谱分光行为，出射光场光路上设置有汇聚光学部件，将入射光场聚焦成光谱线，线阵光电传感器设置在光谱线位置，进行光谱信息光电转化，实现光谱检测。 The basic concept of the present invention is: based on the layered Bragg reflection effect and the light guiding characteristics of the slow light waveguide, a working layer and a top layered Bragg reflection part are arranged on the upper part of the bottom layered Bragg reflection part, and the working layer and the top layered Bragg reflection part The side sections of the Bragg reflectors are aligned, and a step is formed on the surface of the bottom layered Bragg reflector. The incident light field is incident on the side section of the working layer, and the light field propagates between the two Bragg reflectors. The bottom layered Bragg reflector The reflectivity of the light field is higher than that of the top layered Bragg reflector. The light field emerges from the surface of the top layered Bragg reflector. Different wavelengths have different exit angles to complete the spectral splitting behavior. Converging optics are set on the light path of the exit light field. The component focuses the incident light field into spectral lines, and the line array photoelectric sensor is set at the position of the spectral lines to perform photoelectric conversion of spectral information and realize spectral detection.
本发明包括：底部层状布拉格反射部件、工作层、顶部层状布拉格反射部件、汇聚光学部件、线阵光电传感器，在底部层状布拉格反射部件的上表面部分区域依次设置有工作层和顶部层状布拉格反射部件，构成工作层被底部层状布拉格反射部件和顶部层状布拉格反射部件进行双面夹层结构,工作层和顶部层状布拉格反射部件的侧面断面对齐，在底部层状布拉格反射部件的表面构成一个台阶，入射光场通过工作层侧面断面入射工作层，底部层状布拉格反射部件和顶部层状布拉格反射部件对工作层出射光束具有高反射特性,光场在底部层状布拉格反射部件和顶部层状布拉格反射部件之间传播，底部层状布拉格反射部件对光场反射率高于顶部层状布拉格反射部件的反射率，光场从顶部层状布拉格反射部件的表面出射，出射光场光路上设置有汇聚光学部件，将入射光场聚焦成光谱线，光谱线位置设置有线阵光电传感器,线阵光电传感器方向与光谱线方向相对应。 The invention comprises: a bottom layered Bragg reflection part, a working layer, a top layered Bragg reflection part, a converging optical part, and a linear array photoelectric sensor, and a working layer and a top layer are sequentially arranged on the upper surface part of the bottom layered Bragg reflection part Shaped Bragg reflector, the working layer is double-sided sandwiched by the bottom layered Bragg reflector and the top layered Bragg reflector, the side sections of the working layer and the top layered Bragg reflector are aligned, and the bottom layered Bragg reflector The surface forms a step, and the incident light field enters the working layer through the side section of the working layer. The bottom layered Bragg reflection part and the top layered Bragg reflection part have high reflection characteristics for the outgoing beam of the working layer, and the light field is between the bottom layered Bragg reflection part and The top layered Bragg reflectors propagate between the top layered Bragg reflectors, the reflectivity of the bottom layered Bragg reflectors to the light field is higher than that of the top layered Bragg reflectors, the light field emerges from the surface of the top layered Bragg reflectors, and the outgoing light field light Converging optical components are set on the road to focus the incident light field into spectral lines. A linear array photoelectric sensor is installed at the position of the spectral line, and the direction of the linear array photoelectric sensor corresponds to the direction of the spectral line.
所述的底部层状布拉格反射部件和顶部层状布拉格反射部件为分布式布拉格反射镜。 The bottom layered Bragg reflector and the top layered Bragg reflector are distributed Bragg reflectors.
所述的工作层为无源波导层、增益波导层的一种。 The working layer is one of a passive waveguide layer and a gain waveguide layer.
所述的汇聚光学部件为透射式汇聚光学部件、反射式汇聚光学部件、微纳结构汇聚光学部件的一种。 The converging optical component is one of a transmissive converging optical component, a reflective converging optical component, and a micro-nano structure converging optical component.
所述的线阵光电传感器为光电二极管阵列、光电三极管阵列、雪崩管阵列、光电倍增管阵列、电荷耦合器件、互补金属氧化物半导体电传感器的一种。 The linear array photoelectric sensor is one of a photodiode array, a phototransistor array, an avalanche tube array, a photomultiplier tube array, a charge-coupled device, and a complementary metal-oxide-semiconductor electric sensor.
所述的底部层状布拉格反射部件远离工作层一侧表面设置有底层电极层。 A bottom electrode layer is provided on the surface of the bottom laminar Bragg reflection component away from the working layer.
所述的顶部层状布拉格反射部件远离工作层一侧表面设置有顶层电极层，顶层电极层在光场出射处开有通光窗口。 The surface of the top layered Bragg reflection component away from the working layer is provided with a top electrode layer, and the top electrode layer has a light-through window at the exit of the light field.
本发明中，当工作层为增益波导层时，在底部层状布拉格反射部件远离工作层一侧表面设置有底层电极层，在顶部层状布拉格反射部件远离工作层一侧表面设置有顶层电极层，顶层电极层在光场出射处开有通光窗口，此时，系统构成了有源分光部件，可以进一步提高光谱分光性能。 In the present invention, when the working layer is a gain waveguide layer, a bottom electrode layer is provided on the surface of the bottom laminar Bragg reflector away from the working layer, and a top electrode layer is provided on the surface of the top laminar Bragg reflector away from the working layer. , the top electrode layer has a light-through window at the exit of the light field. At this time, the system constitutes an active light-splitting component, which can further improve the spectral light-splitting performance.
本发明一种基于布拉格反射效应的光谱仪的工作过程为：工作层和顶部层状布拉格反射部件的侧面断面对齐，在底部层状布拉格反射部件的表面构成一个台阶，入射光场通过工作层侧面断面入射工作层，底部层状布拉格反射部件和顶部层状布拉格反射部件对工作层出射光束具有高反射特性,光场在底部层状布拉格反射部件和顶部层状布拉格反射部件之间传播，底部层状布拉格反射部件对光场反射率高于顶部层状布拉格反射部件的反射率，光场从顶部层状布拉格反射部件的表面出射，出射光场光路上设置有汇聚光学部件，将入射光场聚焦成光谱线，在底层电极层和顶层电极层之间施加电场，系统构成了有源分光部件，线阵光电传感器进行光谱信息光电转化，实现光谱检测。 The working process of the spectrometer based on the Bragg reflection effect of the present invention is as follows: the side section of the working layer and the top layered Bragg reflection part are aligned, a step is formed on the surface of the bottom layered Bragg reflection part, and the incident light field passes through the side section of the working layer The incident working layer, the bottom layered Bragg reflector and the top layered Bragg reflector have high reflection characteristics for the outgoing beam of the working layer, and the light field propagates between the bottom layered Bragg reflector and the top layered Bragg reflector, and the bottom layered Bragg reflector The reflectance of the Bragg reflector to the light field is higher than that of the top layered Bragg reflector, the light field emerges from the surface of the top layered Bragg reflector, and a converging optical component is arranged on the light path of the exit light field to focus the incident light field into For spectral lines, an electric field is applied between the bottom electrode layer and the top electrode layer, and the system constitutes an active spectroscopic component. The linear array photoelectric sensor performs photoelectric conversion of spectral information to realize spectral detection.
本发明中布拉格反射效应、慢光波导导光、汇聚光学、光谱信息光电转化技术均为成熟技术。本发明的发明点在于：基于层状布拉格反射效应和，结合慢光波导导光特性，光场在两个布拉格反射部件之间传播，光场从顶部层状布拉格反射部件的表面出射，完成光谱分光，汇聚光学部件将入射光场聚焦成光谱线，线阵光电传感器进行光谱信息光电转化，给出一种工艺简洁、灵活性高、易于小型化、高色散、分辨率高、应用范围广、系统简单、光机定位要求低、集成度高、可靠性高、功能扩充性强的基于布拉格反射效应的光谱仪。 In the present invention, Bragg reflection effect, slow light waveguide light guiding, converging optics, and spectral information photoelectric conversion technologies are all mature technologies. The inventive point of the present invention is: based on the layered Bragg reflection effect and combined with the characteristics of the slow light waveguide light, the light field propagates between the two Bragg reflection parts, and the light field exits from the surface of the top layer Bragg reflection part to complete the spectrum Light splitting and converging optical components focus the incident light field into spectral lines, and the linear array photoelectric sensor performs photoelectric conversion of spectral information, providing a simple process, high flexibility, easy miniaturization, high dispersion, high resolution, and wide application range. A spectrometer based on the Bragg reflection effect with a simple system, low requirements for optical-mechanical positioning, high integration, high reliability, and strong function expansion.
与现有技术相比，本发明的优点： Compared with prior art, the advantages of the present invention:
1）在先技术采用光栅元件进行入射光束分光，工作原理是光栅光场衍射行为，光栅为二维微纳结构器件，设计和制作工艺限制了光栅构建灵活性差，基于微纳结构的光栅在尺寸上难于实现小型微型化，本质上受限于光栅微纳结构尺寸。本发明基于层状布拉格反射效应和慢光波导导光特性，入射光场在入射到工作层侧面断面，光场在两个布拉格反射部件之间传播，从顶部层状布拉格反射部件的表面出射，完成光谱分光，本元件发明分光部件基于层状布拉格反射部件，不涉及到二维微纳结构加工，为多层镀膜工艺，因此具有工艺简洁、灵活性高、易于小型化等特点； 1) The prior technology uses grating elements to split the incident beam. The working principle is the diffraction behavior of the grating light field. The grating is a two-dimensional micro-nano structure device. The design and manufacturing process limit the flexibility of the grating construction. In fact, it is difficult to realize miniaturization, which is essentially limited by the size of the micro-nano structure of the grating. The invention is based on the layered Bragg reflection effect and the light guiding characteristics of the slow light waveguide. The incident light field is incident on the side section of the working layer, the light field propagates between the two Bragg reflection components, and emerges from the surface of the top layered Bragg reflection component. To complete the spectrum splitting, the splitting component invented by this component is based on the layered Bragg reflection component, which does not involve two-dimensional micro-nano structure processing, and is a multi-layer coating process, so it has the characteristics of simple process, high flexibility, and easy miniaturization;
2）在先技术光栅光谱仪的分辨率受到光栅微纳结构分布以及微纳结构几何尺寸限制，光学光谱分辨率不高，影响应用范围。本发明本质上不采用光栅微纳结构,而是采用多层的布拉格反射结构,基于光场在布拉格反射结构构建的波导体系中的传播行为,原理上实现了光谱大角度分光,高色散、提高了系统光学光谱分辨率,增加了光谱仪适用范围,本发明具有分辨率高和应用范围广等特点； 2) The resolution of the grating spectrometer in the prior art is limited by the distribution of the grating micro-nano structure and the geometric size of the micro-nano structure, and the resolution of the optical spectrum is not high, which affects the application range. In essence, the present invention does not use a grating micro-nano structure, but uses a multi-layer Bragg reflection structure. Based on the propagation behavior of the light field in the waveguide system constructed by the Bragg reflection structure, in principle, it realizes large-angle spectral splitting, high dispersion, and improved The optical spectrum resolution of the system is improved, and the scope of application of the spectrometer is increased. The present invention has the characteristics of high resolution and wide application range;
3）在先技术基于光栅构建光谱仪系统中，其它部件相对于光栅的方位和几何尺寸角度等参数要求高，系统复杂、构建灵活性不高，光栅光谱仪集成度低，可靠性和功能扩充性受到影响。本发明中，光场从顶部层状布拉格反射部件的表面出射，出射光场光路上设置有汇聚光学部件，将入射光场聚焦成光谱线，线阵光电传感器进行光谱信息光电转化，实现光谱检测，核心部件为层状布拉格反射器，系统系统简单、光机定位要求低、集成度高、可靠性高、功能扩充性强。 3) In the prior art of grating-based spectrometer systems, other components have high requirements for parameters such as orientation and geometric dimension angles relative to the grating, the system is complex, the construction flexibility is not high, the integration of the grating spectrometer is low, and the reliability and functional expansion are limited. Influence. In the present invention, the light field emerges from the surface of the top layered Bragg reflector, and a converging optical component is arranged on the optical path of the exit light field to focus the incident light field into spectral lines, and the linear array photoelectric sensor performs photoelectric conversion of spectral information to realize spectral detection , the core component is a layered Bragg reflector, the system is simple, the optical machine positioning requirements are low, the integration is high, the reliability is high, and the function expandability is strong.
附图说明 Description of drawings
图1为本发明的一种实施例结构示意图。 Fig. 1 is a schematic structural diagram of an embodiment of the present invention.
具体实施方式 Detailed ways
下面结合附图和实施例对本发明作进一步说明。 The present invention will be further described below in conjunction with drawings and embodiments.
如图1所示，一种基于布拉格反射效应的光谱仪，基于层状布拉格反射效应和，结合慢光波导导光特性，在底部层状布拉格反射部件的上面部分区域设置有工作层和顶部层状布拉格反射部件，工作层和顶部层状布拉格反射部件的侧面断面对齐，在底部层状布拉格反射部件的表面构成一个台阶，光场在两个布拉格反射部件之间传播，光场从顶部层状布拉格反射部件的表面出射，完成光谱分光，汇聚光学部件将入射光场聚焦成光谱线，线阵光电传感器进行光谱信息光电转化，实现光谱检测。 As shown in Figure 1, a spectrometer based on the Bragg reflection effect is based on the layered Bragg reflection effect and, combined with the slow light waveguide light characteristics, a working layer and a top layered layer are arranged on the upper part of the bottom layered Bragg reflection part. Bragg reflectors, the side sections of the working layer and the top layered Bragg reflector are aligned, forming a step on the surface of the bottom layered Bragg reflector, the light field propagates between the two Bragg reflectors, and the light field from the top layered Bragg reflector The surface of the reflective part emits light to complete the spectrum splitting, the converging optical part focuses the incident light field into spectral lines, and the line array photoelectric sensor performs photoelectric conversion of spectral information to realize spectral detection.
本发明的一种基于布拉格反射效应的光谱仪，包括：底部层状布拉格反射部件1、工作层2、顶部层状布拉格反射部件3、汇聚光学部件4、线阵光电传感器5，在底部层状布拉格反射部件1的上表面部分区域依次设置有工作层2和顶部层状布拉格反射部件3，构成工作层2被底部层状布拉格反射部件1和顶部层状布拉格反射部件3进行双面夹层结构,工作层2和顶部层状布拉格反射部件3的侧面断面对齐，在底部层状布拉格反射部件1的表面构成一个台阶，入射光场6通过工作层侧面断面入射到工作层2，底部层状布拉格反射部件1和顶部层状布拉格反射部件3对工作层2出射光束具有高反射特性,光场在底部层状布拉格反射部件1和顶部层状布拉格反射部件3之间传播，底部层状布拉格反射部件1对光场反射率高于顶部层状布拉格反射部件3的反射率，光场从顶部层状布拉格反射部件3的表面出射，出射光场光路上设置有汇聚光学部件4，将入射光场聚焦成光谱线，光谱线位置设置有线阵光电传感器5,线阵光电传感器5方向与光谱线方向相对应。为进一步提高光谱仪性能，本实施例中，工作层2设定为增益波导层时，在底部层状布拉格反射部件1远离工作层一侧表面设置有底层电极层7，在顶部层状布拉格反射部件3远离工作层一侧表面设置有顶层电极层8，此时，系统构成了有源分光部件，可以进一步提高光谱分光性能。 A spectrometer based on the Bragg reflection effect of the present invention includes: a bottom layered Bragg reflection component 1, a working layer 2, a top layered Bragg reflection component 3, a converging optical component 4, a linear array photoelectric sensor 5, and a layered Bragg reflection component at the bottom. The working layer 2 and the top layered Bragg reflecting part 3 are sequentially arranged on the upper surface part of the reflecting part 1, forming a double-sided sandwich structure between the working layer 2 and the bottom layered Bragg reflecting part 1 and the top layered Bragg reflecting part 3. Layer 2 is aligned with the side section of the top layered Bragg reflection part 3, and a step is formed on the surface of the bottom layered Bragg reflection part 1. The incident light field 6 enters the working layer 2 through the side section of the working layer, and the bottom layered Bragg reflection part 1 and the top layered Bragg reflection component 3 have high reflection characteristics for the outgoing beam of the working layer 2, and the light field propagates between the bottom layered Bragg reflection component 1 and the top layered Bragg reflection component 3, and the bottom layered Bragg reflection component 1 pair The reflectivity of the light field is higher than that of the top layered Bragg reflector 3, and the light field emerges from the surface of the top layered Bragg reflector 3, and a converging optical component 4 is arranged on the optical path of the exit light field to focus the incident light field into a spectrum Line, the position of the spectral line is provided with a line array photoelectric sensor 5, and the direction of the line array photoelectric sensor 5 corresponds to the direction of the spectral line. In order to further improve the performance of the spectrometer, in this embodiment, when the working layer 2 is set as a gain waveguide layer, a bottom electrode layer 7 is provided on the surface of the bottom layered Bragg reflection part 1 away from the working layer, and a bottom electrode layer 7 is arranged on the top layered Bragg reflection part 1. 3 A top electrode layer 8 is provided on the surface away from the working layer. At this time, the system constitutes an active light-splitting component, which can further improve the spectral light-splitting performance.
本实施例中，底部层状布拉格反射部件1和顶部层状布拉格反射部件3为分布式布拉格反射镜；工作层2为增益波导层；汇聚光学部件4为反射式汇聚光学部件；线阵光电传感器5为互补金属氧化物半导体电传感器；入射光为955纳米到990纳米波段准直光束。 In this embodiment, the bottom layered Bragg reflection component 1 and the top layered Bragg reflection component 3 are distributed Bragg reflectors; the working layer 2 is a gain waveguide layer; the converging optical component 4 is a reflective converging optical component; the linear array photoelectric sensor 5 is a complementary metal oxide semiconductor electrical sensor; the incident light is a collimated light beam in the wavelength range from 955 nanometers to 990 nanometers.
本实施例工作过程为：工作层2和顶部层状布拉格反射部件3的侧面断面对齐，在底部层状布拉格反射部件1的表面构成一个台阶，入射光场通过工作层侧面断面入射工作层2，底部层状布拉格反射部件1和顶部层状布拉格反射部件3对工作层2出射光束具有高反射特性,光场在底部层状布拉格反射部件1和顶部层状布拉格反射部件3之间传播，底部层状布拉格反射部件1对光场反射率高于顶部层状布拉格反射部件3的反射率，光场从顶部层状布拉格反射部件3的表面出射，出射光场光路上设置有汇聚光学部件4，将入射光场聚焦成光谱线，在底层电极层7和顶层电极层8之间施加电场，系统构成了有源分光部件，线阵光电传感器5进行光谱信息光电转化，实现入射光的光谱检测。 The working process of this embodiment is as follows: the side sections of the working layer 2 and the top layered Bragg reflecting part 3 are aligned, a step is formed on the surface of the bottom layered Bragg reflecting part 1, the incident light field enters the working layer 2 through the side section of the working layer, The bottom layered Bragg reflection component 1 and the top layered Bragg reflection component 3 have high reflection characteristics to the light beam emitted by the working layer 2, and the light field propagates between the bottom layered Bragg reflection component 1 and the top layered Bragg reflection component 3, and the bottom layer The reflectivity of the Bragg reflector 1 to the light field is higher than that of the top layered Bragg reflector 3, and the light field emerges from the surface of the top layered Bragg reflector 3, and a converging optical component 4 is arranged on the optical path of the outgoing light field. The incident light field is focused into spectral lines, and an electric field is applied between the bottom electrode layer 7 and the top electrode layer 8. The system constitutes an active spectroscopic component. The linear array photoelectric sensor 5 performs photoelectric conversion of spectral information to realize spectral detection of incident light.
本实施例成功实现了955纳米到990纳米波段的高光学分辨率光谱检测。本发明具有工艺简洁、灵活性高、易于小型化、高色散、分辨率高、应用范围广、系统简单、光机定位要求低、集成度高、可靠性高、功能扩充性强等特点 In this embodiment, high optical resolution spectral detection in the 955 nm to 990 nm wave band is successfully realized. The invention has the characteristics of simple process, high flexibility, easy miniaturization, high dispersion, high resolution, wide application range, simple system, low requirements for optical-mechanical positioning, high integration, high reliability, and strong function expandability.
以上所述的具体实施方式对本发明的技术方案和有益效果进行了详细说明，应理解的是以上所述仅为本发明的最优选实施例，并不用于限制本发明，凡在本发明的原则范围内所做的任何修改、补充和等同替换等，均应包含在本发明的保护范围之内。 The above-mentioned specific embodiments have described the technical solutions and beneficial effects of the present invention in detail. It should be understood that the above-mentioned are only the most preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, supplements and equivalent replacements made within the scope shall be included in the protection scope of the present invention.
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