CN105181605A - Spectrometer based on Bragg reflection effect - Google Patents
Spectrometer based on Bragg reflection effect Download PDFInfo
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- CN105181605A CN105181605A CN201510413967.7A CN201510413967A CN105181605A CN 105181605 A CN105181605 A CN 105181605A CN 201510413967 A CN201510413967 A CN 201510413967A CN 105181605 A CN105181605 A CN 105181605A
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Abstract
The present invention relates to a spectrometer based on Bragg reflection effect. In the prior art, the miniaturization is difficult, and the optical resolution is low. According to the present invention, based on the layered Bragg reflection effect, through combination of the light guiding characteristics of slow light waveguide, a light field spreads between two Bragg reflection components and is emitted from the surface of the top portion layered Bragg reflection component to complete spectrum light splitting, a convergence optical component focuses the incident light field into spectral lines, and a linear array photoelectric sensor perform spectral information photoelectric conversion so as to achieve spectral detection; and the spectrometer has characteristics of simple process, high flexibility, easy miniaturization, high chromatic dispersion, high resolution, wide application range, simple system, low light machine positioning requirements, high integration, high reliability, strong function scalability and the like.
Description
Technical field
The invention belongs to optical technical field, relate to a kind of spectrometer, particularly based on a spectrometer for Bragg reflection effect, the spectral information be mainly used in the fields such as environment measuring, species analysis, color detection, food security, quality testing, resource exploration, biological life, medical, process control, Internet of Things, optical technology, photoelectric project detects.
Background technology
Spectrometer is instrument incident light being decomposed into spectrum line and carrying out acquisition process.According to the light-dividing principle of dispersive elements, be widely used in the fields such as environment measuring, species analysis, color detection, food security, quality testing, resource exploration, biological life, medical, process control, Internet of Things, optical technology, photoelectric project, such as, in environment measuring field, wide spectral Water Test Kits based on spectrometer can detect multiple water-quality guideline simultaneously, builds sampling and the online two kinds of water quality environment checking network of original position; At species analysis, extensively exist based on the infrared analysis technology of spectrometer and Raman spectrum analysis technology, and play a significant role.
The development experience of spectrometer is from prism spectrometer to the development course of diffraction grating spectrometer and interference spectroscope, existing in first technology and extensively there is a kind of spectrometer is spectrometer based on grating beam splitting, such as, the USB2000 model spectrometer of Ocean Optics, and the spectrometer of the MMS model of Zeiss company, and, based on the novel spectrometer of modified optical grating construction, see US granted patent, granted patent title: Spectroscope, inventor: KatsumiIda and TakeshiIkeda, the patent No.: US7436512B2, the license time: on October 14th, 2008.Although there is certain feature in first technology, but it is not enough still to there is essence: 1) adopt optical grating element to carry out incident beam light splitting, principle of work is the behavior of grating Diffraction of Light, grating is two-dimentional micro-nano structure device, designing and making process technology limit grating builds very flexible, grating based on micro-nano structure is difficult to realize small-sized microminiaturization dimensionally, is limited to grating micro-nano structure size in essence; 2) resolution of grating spectrograph is subject to the distribution of grating micro-nano structure and the restriction of micro-nano structure physical dimension, and optical spectra resolution is not high, affects range of application; 3) building in spectrometer system based on grating, other parts are high relative to parameter requests such as the orientation of grating and physical dimension angles, and system complex, to build dirigibility not high, and grating spectrograph integrated level is low, and reliability and function extendibility are affected.
Summary of the invention
The object of the invention is to the deficiency for above-mentioned technology, a kind of spectrometer based on Bragg reflection effect is provided, have concise in technology, dirigibility high, be easy to miniaturization, high dispersion, the feature such as resolution is high, applied range, system simple, ray machine positioning requirements is low, integrated level is high, reliability is high, function extendibility is strong.
Basic conception of the present invention is: based on stratiform Bragg reflection effect and slow optical wave guide guiding property, working lining and top laminar Bragg reflection parts are provided with in the upper part region of bottom laminate Bragg reflection parts, the side cross-sectional alignment of working lining and top laminar Bragg reflection parts, a step is formed on the surface of bottom laminate Bragg reflection parts, incident field is inciding working lining side cross-sectional, light field is propagated between two Bragg reflection parts, bottom laminate Bragg reflection parts are to the reflectivity of light field reflectivity higher than top laminar Bragg reflection parts, light field is from the surperficial outgoing of top laminar Bragg reflection parts, different wave length shooting angle is different, complete spectrum behavior, outgoing light field light path is provided with converged light member, incident field is focused into spectrum line, linear array photoelectric sensors is arranged on spectrum line position, carry out spectral information photoelectric conversion, realize spectral detection.
The present invention includes: bottom laminate Bragg reflection parts, working lining, top laminar Bragg reflection parts, converged light member, linear array photoelectric sensors, working lining and top laminar Bragg reflection parts are disposed with in the upper surface part subregion of bottom laminate Bragg reflection parts, form working lining and carried out double-side sandwich structure by bottom laminate Bragg reflection parts and top laminar Bragg reflection parts, the side cross-sectional alignment of working lining and top laminar Bragg reflection parts, a step is formed on the surface of bottom laminate Bragg reflection parts, incident field is by the incident working lining of working lining side cross-sectional, bottom laminate Bragg reflection parts and top laminar Bragg reflection parts have high reverse--bias characteristic to working lining outgoing beam, light field is propagated between bottom laminate Bragg reflection parts and top laminar Bragg reflection parts, bottom laminate Bragg reflection parts are to the reflectivity of light field reflectivity higher than top laminar Bragg reflection parts, light field is from the surperficial outgoing of top laminar Bragg reflection parts, outgoing light field light path is provided with converged light member, incident field is focused into spectrum line, spectrum line position is provided with linear array photoelectric sensors, linear array photoelectric sensors direction is corresponding with spectrum line direction.
Described bottom laminate Bragg reflection parts and top laminar Bragg reflection parts are distributed bragg reflector mirror.
Described working lining is the one of passive waveguide layer, gain waveguide layer.
Described converged light member is the one of transmission-type converged light member, reflective converged light member, micro-nano structure converged light member.
Described linear array photoelectric sensors is the one of photodiode array, phototriode array, snowslide pipe array, photomultiplier tube array, charge-coupled image sensor, complementary metal oxide semiconductor (CMOS) electric transducer.
Described bottom laminate Bragg reflection parts are provided with bottom electrode layer away from working lining one side surface.
Described top laminar Bragg reflection parts are provided with top layer electrode layer away from working lining one side surface, and top layer electrode layer has logical light window in light field outgoing place.
In the present invention, when working lining is gain waveguide layer, at bottom laminate Bragg reflection parts, working lining one side surface is provided with bottom electrode layer, at top laminar Bragg reflection parts, working lining one side surface is provided with top layer electrode layer, top layer electrode layer has logical light window in light field outgoing place, now, the active light splitting part of System's composition, can improve spectrum performance further.
The course of work of a kind of spectrometer based on Bragg reflection effect of the present invention is: the side cross-sectional alignment of working lining and top laminar Bragg reflection parts, a step is formed on the surface of bottom laminate Bragg reflection parts, incident field is by the incident working lining of working lining side cross-sectional, bottom laminate Bragg reflection parts and top laminar Bragg reflection parts have high reverse--bias characteristic to working lining outgoing beam, light field is propagated between bottom laminate Bragg reflection parts and top laminar Bragg reflection parts, bottom laminate Bragg reflection parts are to the reflectivity of light field reflectivity higher than top laminar Bragg reflection parts, light field is from the surperficial outgoing of top laminar Bragg reflection parts, outgoing light field light path is provided with converged light member, incident field is focused into spectrum line, electric field is applied between bottom electrode layer and top layer electrode layer, the active light splitting part of System's composition, linear array photoelectric sensors carries out spectral information photoelectric conversion, realize spectral detection.
In the present invention, Bragg reflection effect, slow optical wave guide leaded light, convergence optics, spectral information photoelectric conversion technology are mature technology.Inventive point of the present invention is: based on stratiform Bragg reflection effect and, in conjunction with slow optical wave guide guiding property, light field is propagated between two Bragg reflection parts, light field is from the surperficial outgoing of top laminar Bragg reflection parts, complete spectrum, incident field is focused into spectrum line by converged light member, linear array photoelectric sensors carries out spectral information photoelectric conversion, provide a kind of concise in technology, dirigibility is high, be easy to miniaturization, high dispersion, resolution is high, applied range, system is simple, ray machine positioning requirements is low, integrated level is high, reliability is high, the spectrometer based on Bragg reflection effect that function extendibility is strong.
Compared with prior art, advantage of the present invention:
1) optical grating element is adopted to carry out incident beam light splitting in first technology, principle of work is the behavior of grating Diffraction of Light, grating is two-dimentional micro-nano structure device, designing and making process technology limit grating builds very flexible, grating based on micro-nano structure is difficult to realize small-sized microminiaturization dimensionally, is limited to grating micro-nano structure size in essence.The present invention is based on stratiform Bragg reflection effect and slow optical wave guide guiding property, incident field is inciding working lining side cross-sectional, light field is propagated between two Bragg reflection parts, from the surperficial outgoing of top laminar Bragg reflection parts, complete spectrum, this element invention light splitting part, based on stratiform Bragg reflection parts, does not relate to the processing of two-dimentional micro-nano structure, for multi-coating technology, therefore have concise in technology, dirigibility high, be easy to the features such as miniaturization;
2) be subject to the distribution of grating micro-nano structure and the restriction of micro-nano structure physical dimension in the resolution of first technology grating spectrograph, optical spectra resolution is not high, affects range of application.The present invention does not adopt grating micro-nano structure in essence, but adopt the Bragg reflection structure of multilayer, based on the dissemination of light field in the waveguide system of Bragg reflection structure construction, principle achieves the light splitting of spectrum wide-angle, high dispersion, improve system optics spectral resolution, add the spectrometer scope of application, the present invention has the features such as resolution height and applied range;
3) build in spectrometer system based on grating in first technology, other parts are high relative to parameter requests such as the orientation of grating and physical dimension angles, and system complex, to build dirigibility not high, and grating spectrograph integrated level is low, and reliability and function extendibility are affected.In the present invention, light field is from the surperficial outgoing of top laminar Bragg reflection parts, outgoing light field light path is provided with converged light member, incident field is focused into spectrum line, linear array photoelectric sensors carries out spectral information photoelectric conversion, realize spectral detection, core component is stratiform Bragg reflector, and service system is simple, ray machine positioning requirements is low, integrated level is high, reliability is high, function extendibility is strong.
Accompanying drawing explanation
Fig. 1 is a kind of example structure schematic diagram of the present invention.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
As shown in Figure 1, a kind of spectrometer based on Bragg reflection effect, based on stratiform Bragg reflection effect and, in conjunction with slow optical wave guide guiding property, working lining and top laminar Bragg reflection parts are provided with in the upper part region of bottom laminate Bragg reflection parts, the side cross-sectional alignment of working lining and top laminar Bragg reflection parts, a step is formed on the surface of bottom laminate Bragg reflection parts, light field is propagated between two Bragg reflection parts, light field is from the surperficial outgoing of top laminar Bragg reflection parts, complete spectrum, incident field is focused into spectrum line by converged light member, linear array photoelectric sensors carries out spectral information photoelectric conversion, realize spectral detection.
A kind of spectrometer based on Bragg reflection effect of the present invention, comprise: bottom laminate Bragg reflection parts 1, working lining 2, top laminar Bragg reflection parts 3, converged light member 4, linear array photoelectric sensors 5, working lining 2 and top laminar Bragg reflection parts 3 are disposed with in the upper surface part subregion of bottom laminate Bragg reflection parts 1, form working lining 2 and carried out double-side sandwich structure by bottom laminate Bragg reflection parts 1 and top laminar Bragg reflection parts 3, the side cross-sectional alignment of working lining 2 and top laminar Bragg reflection parts 3, a step is formed on the surface of bottom laminate Bragg reflection parts 1, incident field 6 incides working lining 2 by working lining side cross-sectional, bottom laminate Bragg reflection parts 1 and top laminar Bragg reflection parts 3 pairs of working lining 2 outgoing beams have high reverse--bias characteristic, light field is propagated between bottom laminate Bragg reflection parts 1 and top laminar Bragg reflection parts 3, bottom laminate Bragg reflection parts 1 pair of light field reflectivity is higher than the reflectivity of top laminar Bragg reflection parts 3, light field is from the surperficial outgoing of top laminar Bragg reflection parts 3, outgoing light field light path is provided with converged light member 4, incident field is focused into spectrum line, spectrum line position is provided with linear array photoelectric sensors 5, linear array photoelectric sensors 5 direction is corresponding with spectrum line direction.For improving spectrometer performance further, in the present embodiment, when working lining 2 is set as gain waveguide layer, at bottom laminate Bragg reflection parts 1, working lining one side surface is provided with bottom electrode layer 7, at top laminar Bragg reflection parts 3, working lining one side surface is provided with top layer electrode layer 8, now, the active light splitting part of System's composition, can improve spectrum performance further.
In the present embodiment, bottom laminate Bragg reflection parts 1 and top laminar Bragg reflection parts 3 are distributed bragg reflector mirror; Working lining 2 is gain waveguide layer; Converged light member 4 is reflective converged light member; Linear array photoelectric sensors 5 is complementary metal oxide semiconductor (CMOS) electric transducer; Incident light is that 955 nanometers are to 990 nano waveband collimated light beams.
The present embodiment course of work is: the side cross-sectional alignment of working lining 2 and top laminar Bragg reflection parts 3, a step is formed on the surface of bottom laminate Bragg reflection parts 1, incident field is by the incident working lining 2 of working lining side cross-sectional, bottom laminate Bragg reflection parts 1 and top laminar Bragg reflection parts 3 pairs of working lining 2 outgoing beams have high reverse--bias characteristic, light field is propagated between bottom laminate Bragg reflection parts 1 and top laminar Bragg reflection parts 3, bottom laminate Bragg reflection parts 1 pair of light field reflectivity is higher than the reflectivity of top laminar Bragg reflection parts 3, light field is from the surperficial outgoing of top laminar Bragg reflection parts 3, outgoing light field light path is provided with converged light member 4, incident field is focused into spectrum line, electric field is applied between bottom electrode layer 7 and top layer electrode layer 8, the active light splitting part of System's composition, linear array photoelectric sensors 5 carries out spectral information photoelectric conversion, realize the spectral detection of incident light.
The present embodiment successfully achieves the high optical resolution spectral detection of 955 nanometers to 990 nano wavebands.The present invention have concise in technology, dirigibility high, be easy to miniaturization, high dispersion, the feature such as resolution is high, applied range, system simple, ray machine positioning requirements is low, integrated level is high, reliability is high, function extendibility is strong
Above-described embodiment has been described in detail technical scheme of the present invention and beneficial effect; be understood that and the foregoing is only most preferred embodiment of the present invention; be not limited to the present invention; all make in spirit of the present invention any amendment, supplement and equivalent to replace, all should be included within protection scope of the present invention.
Claims (8)
1. the spectrometer based on Bragg reflection effect, it is characterized in that: comprise bottom laminate Bragg reflection parts, working lining, top laminar Bragg reflection parts, converged light member and linear array photoelectric sensors, working lining and top laminar Bragg reflection parts are disposed with in the upper surface part subregion of bottom laminate Bragg reflection parts, form working lining and carried out double-side sandwich structure by bottom laminate Bragg reflection parts and top laminar Bragg reflection parts, the side cross-sectional alignment of working lining and top laminar Bragg reflection parts, a step is formed on the surface of bottom laminate Bragg reflection parts, incident field is by the incident working lining of working lining side cross-sectional, bottom laminate Bragg reflection parts and top laminar Bragg reflection parts have high reverse--bias characteristic to working lining outgoing beam, light field is propagated between bottom laminate Bragg reflection parts and top laminar Bragg reflection parts, bottom laminate Bragg reflection parts are to the reflectivity of light field reflectivity higher than top laminar Bragg reflection parts, light field is from the surperficial outgoing of top laminar Bragg reflection parts, outgoing light field light path is provided with converged light member, incident field is focused into spectrum line, spectrum line position is provided with linear array photoelectric sensors, linear array photoelectric sensors direction is corresponding with spectrum line direction.
2. a kind of spectrometer based on Bragg reflection effect as claimed in claim 1, is characterized in that: described bottom laminate Bragg reflection parts and top laminar Bragg reflection parts are distributed bragg reflector mirror.
3. a kind of spectrometer based on Bragg reflection effect as claimed in claim 2, is characterized in that: described working lining is passive waveguide layer or gain waveguide layer.
4. a kind of spectrometer based on Bragg reflection effect as claimed in claim 1, is characterized in that: described converged light member is the one of transmission-type converged light member, reflective converged light member, micro-nano structure converged light member.
5. a kind of spectrometer based on Bragg reflection effect as claimed in claim 1, is characterized in that: described linear array photoelectric sensors is the one in photodiode array, phototriode array, snowslide pipe array, photomultiplier tube array, charge-coupled image sensor, complementary metal oxide semiconductor (CMOS) electric transducer.
6. a kind of spectrometer based on Bragg reflection effect as claimed in claim 1, is characterized in that: described bottom laminate Bragg reflection parts are provided with bottom electrode layer away from working lining one side surface.
7. a kind of spectrometer based on Bragg reflection effect as claimed in claim 1, is characterized in that: described top laminar Bragg reflection parts are provided with top layer electrode layer away from working lining one side surface.
8. a kind of spectrometer based on Bragg reflection effect as claimed in claim 7, is characterized in that: top layer electrode layer has same light window in light field outgoing place.
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| CN105490166A (en) * | 2016-01-21 | 2016-04-13 | 苏州苏大维格光电科技股份有限公司 | Micro-cavity laser array and visible light photometer comprising micro-cavity laser array |
| CN117277057A (en) * | 2023-11-17 | 2023-12-22 | 深圳市速腾聚创科技有限公司 | Laser emission device, laser emission module and all-solid-state laser radar |
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