CN211606906U - Deep ultraviolet waveband composite sensitivity spectrometer - Google Patents
Deep ultraviolet waveband composite sensitivity spectrometer Download PDFInfo
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- CN211606906U CN211606906U CN201922194998.4U CN201922194998U CN211606906U CN 211606906 U CN211606906 U CN 211606906U CN 201922194998 U CN201922194998 U CN 201922194998U CN 211606906 U CN211606906 U CN 211606906U
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Abstract
The utility model relates to a dark ultraviolet wave band composite sensitivity spectrum appearance solves the thomson diagnostic system and has bulky, the lower problem of measuring result confidence. In the spectrometer, a signal to be measured entering from an input end of the spectrometer is divided into two beams by a spectral beam splitter; in the transmission light path, light beams are reflected by a first ion spectrum reflector and a second ion spectrum reflector; then the light beam reaches the ion spectrum grating after being collimated by the ion spectrum collimating parabolic mirror; the light beam dispersed by the grating is focused on an ion image surface reflector through an ion spectrum focusing parabolic mirror, and the ion spectrum imaging ellipsoidal mirror focuses and images the dispersed signal on an image surface; in a reflection light path, a light beam is collimated by an electron spectrum collimation parabolic mirror with a short focus, then is diffracted and split by an electron spectrum grating, and the light beam dispersed by the grating is focused on an electron spectrum image surface reflector by an electron spectrum focusing parabolic mirror; and the light beam is reflected to the electronic spectrum imaging ellipsoidal mirror, and the dispersed signal is focused and imaged on a public image surface by the electronic spectrum imaging ellipsoidal mirror.
Description
Technical Field
The utility model relates to a spectrum appearance, concretely relates to compound sensitivity spectrum appearance of dark ultraviolet band.
Background
In inertial confinement laser fusion (ICF) studies, parameters of temperature, ion/electron density, ion/electron flow velocity, etc. of the radiation field region are directly related to physical processes of absorption, scattering, focusing into filaments, energy transfer between beams, etc. of the targeted laser. The physical process reduces the target laser energy, breaks the symmetry of fusion fuel compression, and the generated super-hot electron preheating fuel increases the difficulty of compression. To the extent that ion/electron parameters determine the success or failure of fusion, studies on ion/electron parameter diagnostics have taken a crucial position in ICF. However, the high temperature and high density ions/electrons generated in the target cannot be measured by the general contact measurement. Thomson scattering diagnosis has unique advantages as a non-contact measurement mode and becomes a necessary tool for measuring high-density ion/electronic parameters. The principle is as follows: probe light is adopted to be incident to a high-temperature and high-density ion/electron area, and the plasma generates secondary radiation under the action of the incident probe light to form scattered waves; because the scattering spectra of electrons and ions are different, the temperature, density and other information of the electrons and ions of the plasma can be obtained by measuring the scattering spectra of the electrons and the ions respectively, and the fluctuation condition of the plasma can be reflected by the spectrum with time resolution.
The millimeter-scale plasma which is a diagnostic object of the existing Thomson scattering diagnostic system is positioned in the center of a vacuum spherical target chamber with the diameter of several meters, and quadruple frequency probe light (263nm) enters a plasma area to be detected from the outside of the vacuum target chamber through a vacuum window and generates Thomson scattering with the plasma; the Thomson scattering signal is weak, the Thomson scattering light is collected by a transmission type/catadioptric optical system in a near mode and is transmitted to the atmosphere environment which is a few meters away through a vacuum glass window, then the electron scattering spectrum and the ion scattering spectrum are subjected to spectral separation by a spectroscope, and finally the two branches are respectively subjected to spectrometer color separation and stripe camera scanning recording. Two spectrometers and two stripe cameras are applied in the device, and the device is large in size. In addition, the thomson diagnostic system has a fatal problem that the signal-to-noise ratio is low, and the confidence of the measurement result is reduced. The reason for the low signal-to-noise ratio is that the thomson scattered signal is weak and the ambient disturbing light is strong. In a target chamber, fundamental frequency light (1053nm), frequency doubling light, frequency tripling light and light generated by various physical mechanisms in a target shooting process form a wide-spectrum (230nm-1053nm) strong interference source, the intensity of which is several orders of magnitude higher than that of Thomson scattering light, and great challenges are brought to the application of Thomson scattering diagnosis technology.
In order to solve the above problems, the prior art proposes a deep ultraviolet thomson scattering measurement scheme using 5-fold frequency (210.6nm) probe light, wherein the thomson electron scattering spectrum of 5-fold frequency is 150nm-200nm, and the ion radiation spectrum is 200nm-220nm, so that the strong interference of 230nm-1053nm can be eliminated by using a spectral filtering method. However, deep ultraviolet light has strong absorption in common optical glass materials and in the atmosphere, and cannot be normally transmitted, which brings new problems to the measurement of electron spectrum and ion spectrum of thomson scattering. Of course, if a large vacuum chamber is used to house the entire measurement system, the problem of atmospheric attenuation can be solved; however, the volume of each device is not allowed to expand freely on the premise that hundreds of diagnostic devices can simultaneously gather and diagnose the same millimeter-scale target pill.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the problem that the prior Thomson diagnosis system has large volume and low confidence coefficient of the measuring result, and providing a deep ultraviolet band composite sensitivity spectrometer.
In order to achieve the above object, the present invention provides a method for manufacturing a semiconductor device, comprising:
a deep ultraviolet waveband composite sensitivity spectrometer is characterized in that: the system comprises a spectrum beam splitter, an ion spectrum reflector I, an ion spectrum reflector II, an ion spectrum collimation parabolic mirror, an ion spectrum grating, an ion spectrum focusing parabolic mirror, an ion spectrum image surface reflector, an ion spectrum imaging ellipsoid mirror, an electron spectrum collimation parabolic mirror, an electron spectrum grating, an electron spectrum focusing parabolic mirror, an electron spectrum image surface reflector and an electron spectrum imaging ellipsoid mirror;
a signal to be measured entering from the input end of the spectrometer is divided into two beams by a spectral beam splitter, wherein one beam is transmitted light, and the other beam is reflected light; in the transmission light path, light beams are reflected by the ion spectrum reflector I and the ion spectrum reflector II, so that the light path is increased, and the aperture of the light beams is enlarged; then the light beam reaches the ion spectrum grating after being collimated by the ion spectrum collimating parabolic mirror, and the effective area of the grating is increased by the light beam with large caliber; the light beam dispersed by the grating is focused on an ion spectrum image surface reflector through an ion spectrum focusing parabolic mirror, the light beam is focused on an ion spectrum imaging ellipsoid mirror after being shielded from stray light interference by the ion spectrum image surface reflector, and the ion spectrum imaging ellipsoid mirror focuses and images the dispersed signal on an image surface; in a reflection light path, a light beam is collimated by an electron spectrum collimating parabolic mirror, then is diffracted and split by an electron spectrum grating, and the light beam dispersed by the grating is focused on an electron spectrum image surface reflector by an electron spectrum focusing parabolic mirror; the electronic spectrum image surface reflector reflects the light beam to the electronic spectrum imaging ellipsoid mirror, and the electronic spectrum imaging ellipsoid mirror focuses and images the dispersed signal on an image surface.
Furthermore, a signal to be measured entering from the input end of the spectrometer is divided into two beams by the spectral beam splitter, the transmission wave band is 200nm-220nm, and the reflection wave band is 150nm-200 nm.
Further, defining the input end of the spectrometer as a coordinate zero point, the horizontal plane as an XZ plane, the horizontal right direction as a Z positive direction, the upward direction perpendicular to the XZ plane as a Y positive direction, and the inclination angle of the spectrum beam splitter and the X axis as 6 degrees; the inclination angle of the first ion spectrum reflector and the X axis is 50 degrees; the inclination angle of the second ion spectrum reflector and the X axis is 34 degrees; the inclination angle of the ion spectrum collimation parabolic mirror and the X axis is 8.949 degrees; the inclination angle of the ion spectrum grating and the X axis is 4.5 degrees; the inclination angle of the ion spectrum focusing parabolic mirror and the X axis is 8.808 degrees; the inclination angle of the ion spectrum image plane reflector to the X axis is-11.679 degrees, and the inclination angle to the Y axis is 2 degrees; the inclination angle of the ion spectrum imaging ellipsoidal mirror to the X axis is 14.498 degrees, and the inclination angle to the Y axis is-0.547 degrees; the inclination angle of the electron spectrum collimation parabolic mirror and the X axis is-9 degrees; the inclination angle of the electron spectrum focusing parabolic mirror and the X axis is-2.869 degrees; the inclination angle of the electronic spectrum image surface reflector to the X axis is 3 degrees, and the inclination angle to the Y axis is 2 degrees; the inclination angle of the electronic spectrum imaging ellipsoidal mirror to the X axis is 2.284 degrees, and the inclination angle to the Y axis is-0.522 degrees.
Further, the translation amount of the ion spectrum collimation parabolic mirror along the Y axis is-157.65 mm; the translation amount of the ion spectrum focusing parabolic mirror along the Y axis is-39.544 mm; the translation amount of the ion spectrum imaging ellipsoidal mirror along the Y axis is-81.923 mm; the translation amount of the electron spectrum collimation parabolic mirror along the Y axis is-14.107 mm; the translation amount of the electron spectrum grating along the Y axis is-48.569 mm; the translation amount of the electron spectrum focusing parabolic mirror along the Y axis is 21.984 mm; the Y off-axis amount of the electronic spectrum imaging ellipsoidal mirror is-34.57 mm.
Further, the distance between the input end of the spectrometer and the spectral beam splitter is 100 mm, the distance between the spectral beam splitter and the first ion spectrum reflector is 359 mm, and the distance between the first ion spectrum reflector and the second ion spectrum reflector is 185 mm; the distance between the ion spectrum reflector II and the ion spectrum collimation parabolic mirror is 365 mm; the distance between the ion spectrum collimation parabolic mirror and the ion spectrum grating is 480 mm; the distance between the ion spectrum grating and the ion spectrum focusing parabolic mirror is 450 mm; the distance between the ion spectrum focusing parabolic mirror and the ion spectrum image surface reflector is 480 mm; the distance between the ion spectrum image surface reflector and the ion spectrum imaging ellipsoidal mirror is 470 mm; the distance between the ion spectrum imaging ellipsoidal mirror and the electronic spectrum collimating parabolic mirror is 60 mm; the distance between the electronic spectrum collimation parabolic mirror and the electronic spectrum grating is 570 mm; the distance between the electronic spectrum grating and the electronic spectrum focusing parabolic mirror is 100 mm; the distance between the electronic spectrum focusing parabolic mirror and the electronic spectrum image surface reflector is 111.5 mm, and the distance between the electronic spectrum image surface reflector and the electronic spectrum imaging ellipsoidal mirror is 520 mm.
Further, the vertex radius R of the ion spectrum collimating parabolic mirror is-2053.77 mm, the vertex radius R of the ion spectrum focusing parabolic mirror is-957.12 mm, the vertex radius R of the ion spectrum imaging ellipsoidal mirror is-561.54 mm, the cone coefficient is-0.04984 mm, the vertex radius R of the electron spectrum collimating parabolic mirror is 322.78 mm, the vertex radius R of the electron spectrum focusing parabolic mirror is 220.0 mm, the vertex radius R of the electron spectrum imaging ellipsoidal mirror is 598.74 mm, and the cone coefficient is-0.02369.
Furthermore, the scribed line of the ion spectrum grating is 2400 lines/mm, the effective grating size is 40mm, and the total number of effective gratings is N196000 lines, grating using diffraction order m12; the scribed line of the electronic spectrum grating is 1200 lines/mm, the effective grating size is 11mm, and the total number of the effective gratings is N213200 lines, the grating applies the diffraction order m2＝1。
Further, the spectrum beam splitter, the first ion spectrum reflector, the second ion spectrum reflector, the ion spectrum collimation parabolic mirror, the ion spectrum focusing parabolic mirror, the ion spectrum image surface reflector, the ion spectrum imaging ellipsoidal mirror, the electron spectrum collimation parabolic mirror, the electron spectrum focusing parabolic mirror, the electron spectrum image surface reflector and the electron spectrum imaging ellipsoidal mirror are 1/10 lambda surface type.
Further, the surface roughness of the spectral beam splitter, the first ion spectrum reflector, the second ion spectrum reflector, the ion spectrum collimation parabolic mirror, the ion spectrum focusing parabolic mirror, the ion spectrum image surface reflector, the ion spectrum imaging ellipsoid mirror, the electron spectrum collimation parabolic mirror, the electron spectrum focusing parabolic mirror, the electron spectrum image surface reflector and the electron spectrum imaging ellipsoid mirror is 0.7 nm.
Compared with the prior art, the utility model discloses following beneficial effect has:
1. the utility model provides a novel spectrum appearance of a recording equipment of reflection formula, double spectrum appearance sharing is through alternating two spectrum appearance light paths each other folding to make the two output overlap with a recording equipment of sharing (stripe camera), realized that double spectrum appearance unites two into one, greatly reduced the volume of device.
2. The utility model discloses the spectrum appearance is through increase ion radiation spectrometer focus for its light path optical distance has lengthened 1.5m than the electron radiation spectrometer of short focal length, thereby makes two spectrum appearance output signal arrive the time difference of stripe camera 5ns, and this time difference makes the stripe camera can timesharing record two transient signal.
3. The utility model discloses miniaturized spectrum appearance integration is installed in the target vacuum chamber, and atmosphere and glass have been avoided to the strong absorption of deep ultraviolet ray to the reflection light path of its inside adoption to the vacuum environment of system, have solved the transmission loss problem of deep ultraviolet ray. Meanwhile, the area of the diffraction grating is increased by increasing the focal length of the ion radiation spectrometer (200nm-220nm), so that the total number of the diffraction grating is increased, and the spectral resolution capability of the spectrometer is improved (delta lambda/lambda is 0.0001).
Drawings
Fig. 1 is the light path schematic diagram of the deep ultraviolet band composite sensitivity spectrometer of the utility model.
Reference numerals: 1-spectrometer input end, 2-spectrum beam splitter, 3-ion spectrum reflector I, 4-ion spectrum reflector II, 5-ion spectrum collimation parabolic mirror, 6-ion spectrum grating, 7-ion spectrum focusing parabolic mirror, 8-ion spectrum image surface reflector, 9-ion spectrum imaging ellipsoid mirror, 10-image surface, 11-electron spectrum collimation parabolic mirror, 12-electron spectrum grating, 13-electron spectrum focusing parabolic mirror, 14-electron spectrum image surface reflector, 15-electron spectrum imaging ellipsoid mirror.
Detailed Description
The present invention will be described in further detail with reference to the following drawings and specific embodiments.
The utility model provides a novel spectrum appearance of a recording device is shared to reflective, two spectrum appearance, and the device is the compound sensitivity spectrum appearance of being applied to deep ultraviolet band (150nm-220 nm). The two spectrometer light paths are mutually inserted and folded, and the two spectrometer light paths are overlapped in output to share one recording device (stripe camera), so that the two spectrometers are combined into one, and the size of the device is greatly reduced. In use, to prevent the image overlap problem of the dual spectrometer, the focal length of the ion spectrometer is designed to be larger; on one hand, the effective grating area is increased, and the spectral resolution capability of the spectrometer is improved; on the other hand, the optical path of the ion spectrometer is increased, so that the output signal of the ion spectrometer lags behind the electron spectrum, and the fringe camera can record the outputs of the two spectrometers in a time-sharing manner.
The utility model provides a light path of two sensitivity deep ultraviolet (150nm-220nm) spectrum appearance light paths with two branches is shown as figure 1, it includes spectrum beam splitter 2, ion spectrum speculum 3, ion spectrum speculum two 4, ion spectrum collimation parabolic mirror 5, ion spectrum grating 6, ion spectrum focus parabolic mirror 7, ion spectrum image plane speculum 8, ion spectrum formation of image ellipsoid mirror 9, electron spectrum collimation parabolic mirror 11, electron spectrum grating 12, electron spectrum focus parabolic mirror 13, electron spectrum image plane speculum 14 and electron spectrum formation of image ellipsoid mirror 15. A signal to be measured entering from an input end 1 of a spectrometer is divided into two beams by a spectral beam splitter 2, the transmission waveband is 200nm-220nm, and the reflection waveband is 150nm-200 nm.
In a transmission light path, firstly, light beams are reflected by a first ion spectrum reflector 3 and a second ion spectrum reflector 4, so that the light path is increased, and the aperture of the light beams is enlarged; then the light beam reaches the ion spectrum grating 6 after being collimated by the ion spectrum collimating parabolic mirror 5, the effective area of the grating is increased by the light beam with large aperture, and the number N of diffraction lines is increased1The spectral resolution capability is improved; the light beam dispersed by the grating is focused on an ion spectrum image surface reflector 8 through an ion spectrum focusing parabolic mirror 7, and the image surface is arranged for conveniently arranging a field diaphragm on the image surface and effectively shielding stray light interference; finally, the ion spectrum imaging ellipsoidal mirror 9 (located in the paper) focuses and images the dispersed signal on an image surface 10.
In a reflection light path, a light beam is firstly collimated by an electron spectrum collimation parabolic mirror 11 with short focus and then is diffracted and split by an electron spectrum grating 12, and the effective grating line number N is caused by small aperture of the light beam2The size is small, and the spectral resolution capability of the spectrometer is low; the light beam dispersed by the grating is focused on an electron spectrum image surface reflector 14 by an electron spectrum focusing parabolic mirror 13; finally, the dispersed signal is focused and imaged on the public image surface 10 by the electronic spectrum imaging ellipsoidal mirror 15 (located in the paper surface).
Because the utility model discloses a miniaturized spectrum appearance has realized uniting two into one, and its volume dwindles greatly, has satisfied the strict volume restriction requirement of carrying to vacuum target chamber inside. An optical system and a fringe camera are integrated into a compact Thomson scattering measurement system which is placed in vacuum to measure 5-frequency-doubling Thomson scattering signals in a near mode. The vacuum environment of the system and the reflective light path adopted in the vacuum environment avoid strong absorption of atmosphere and glass to the deep ultraviolet light, and solve the problem of transmission loss of the deep ultraviolet light; the area of the diffraction grating is increased by increasing the focal length of an ion radiation spectrometer (200nm-220nm), so that the total number of the diffraction grating is increased, and the spectral resolution capability of the spectrometer is improved (delta lambda/lambda is 0.0001); meanwhile, the focal length of the ion radiation spectrometer is increased, so that the optical path optical length of the ion radiation spectrometer is 1.5m longer than that of the electron radiation spectrometer with the short focal length, the time difference between the output signals of the two spectrometers and the time when the output signals of the two spectrometers reach the stripe camera is 5ns, and the stripe camera can record two transient signals in a time-sharing mode through the time difference.
The parameters of each lens are described in detail below. (coordinate definition: the position of the small hole is defined as a coordinate zero point, the coordinate definition follows a right-hand coordinate system, the direction perpendicular to the paper surface is inward + X direction, the direction vertical upwards is + Y direction, and the direction right along the paper surface is + Z direction; when the coordinate is folded by the optical element, the coordinate system is transformed and follows the conventional optical coordinate transformation rule.
An important index of a spectrometer is the spectral resolution power, and the spectral resolution formula is as follows:
in the formula, N is the number of grating lines, d is the grating constant, m is the diffraction order, and theta is the incident angle.
In an ion radiation spectrometer, the working spectrum is 200nm-220nm, and the central wavelength is lambda1210nm, ion spectrum grating lines 2400 lines/mm, effective grating size40mm, total number of effective gratings N12400 lines/mm × 40mm 96000 lines, grating using diffraction order m1The theoretical spectral resolving power of an ion radiation spectrometer is therefore:
in an electron radiation spectrometer, the working spectrum is 150nm-200nm, and the central wavelength is lambda2175nm, 1200 lines/mm of raster lines of the electron spectrum, 11mm of effective raster size, and N total effective raster21200 lines/mm × 11mm 13200 lines, grating application diffraction order m2The theoretical spectral resolving power of an electron radiation spectrometer is therefore:
the optical path difference between the two spectrometers is 1.5m, and the optical path difference is 3.0 × 10 according to the propagation speed of light8m/s, the time interval between two spectrometer outputs can be calculated to be 1.5m/(3.0 × 10)8m/s)＝5ns。
Claims (9)
1. A deep ultraviolet waveband composite sensitivity spectrometer is characterized in that: the system comprises a spectrum beam splitter, an ion spectrum reflector I, an ion spectrum reflector II, an ion spectrum collimation parabolic mirror, an ion spectrum grating, an ion spectrum focusing parabolic mirror, an ion spectrum image surface reflector, an ion spectrum imaging ellipsoid mirror, an electron spectrum collimation parabolic mirror, an electron spectrum grating, an electron spectrum focusing parabolic mirror, an electron spectrum image surface reflector and an electron spectrum imaging ellipsoid mirror;
a signal to be measured entering from the input end of the spectrometer is divided into two beams by a spectral beam splitter, wherein one beam is transmitted light, and the other beam is reflected light;
in a transmission light path, a light beam is reflected by a first ion spectrum reflector and a second ion spectrum reflector, then the light beam is collimated by an ion spectrum collimation parabolic mirror and reaches an ion spectrum grating, the light beam dispersed by the grating is focused on an ion spectrum image surface reflector through an ion spectrum focusing parabolic mirror, the light beam is focused on an ion spectrum imaging ellipsoid mirror after being shielded from stray light interference by the ion spectrum image surface reflector, and the ion spectrum imaging ellipsoid mirror focuses and images dispersed signals on an image surface;
in a reflection light path, a light beam is collimated by an electron spectrum collimating parabolic mirror, then is diffracted and split by an electron spectrum grating, and the light beam dispersed by the grating is focused on an electron spectrum image surface reflector by an electron spectrum focusing parabolic mirror; the electronic spectrum image surface reflector reflects the light beam to the electronic spectrum imaging ellipsoid mirror, and the electronic spectrum imaging ellipsoid mirror focuses and images the dispersed signal on an image surface.
2. The deep ultraviolet band composite sensitivity spectrometer of claim 1, wherein: the signal to be measured entering from the input end of the spectrometer is divided into two beams by the spectral beam splitter, the transmission wave band is 200nm-220nm, and the reflection wave band is 150nm-200 nm.
3. The deep ultraviolet band composite sensitivity spectrometer of claim 2, wherein: defining the input end of the spectrometer as a coordinate zero point, the horizontal plane as an XZ plane, the horizontal right direction as a Z positive direction, and the upward direction vertical to the XZ plane as a Y positive direction;
the inclination angle of the spectrum beam splitter and the X axis is 6 degrees; the inclination angle of the first ion spectrum reflector and the X axis is 50 degrees; the inclination angle of the second ion spectrum reflector and the X axis is 34 degrees; the inclination angle of the ion spectrum collimation parabolic mirror and the X axis is 8.949 degrees; the inclination angle of the ion spectrum grating and the X axis is 4.5 degrees; the inclination angle of the ion spectrum focusing parabolic mirror and the X axis is 8.808 degrees; the inclination angle of the ion spectrum image plane reflector to the X axis is-11.679 degrees, and the inclination angle to the Y axis is 2 degrees; the inclination angle of the ion spectrum imaging ellipsoidal mirror to the X axis is 14.498 degrees, and the inclination angle to the Y axis is-0.547 degrees; the inclination angle of the electron spectrum collimation parabolic mirror and the X axis is-9 degrees; the inclination angle of the electron spectrum focusing parabolic mirror and the X axis is-2.869 degrees; the inclination angle of the electronic spectrum image surface reflector to the X axis is 3 degrees, and the inclination angle to the Y axis is 2 degrees; the inclination angle of the electronic spectrum imaging ellipsoidal mirror to the X axis is 2.284 degrees, and the inclination angle to the Y axis is-0.522 degrees.
4. The deep ultraviolet band composite sensitivity spectrometer of claim 3, wherein: the translation amount of the ion spectrum collimation parabolic mirror along the Y axis is-157.65 mm; the translation amount of the ion spectrum focusing parabolic mirror along the Y axis is 39.544 mm; the translation amount of the ion spectrum imaging ellipsoidal mirror along the Y axis is-81.923 mm; the translation amount of the electron spectrum collimation parabolic mirror along the Y axis is-14.107 mm; the translation amount of the electron spectrum grating along the Y axis is-48.569 mm; the translation amount of the electron spectrum focusing parabolic mirror along the Y axis is 21.984 mm; the Y off-axis amount of the electronic spectrum imaging ellipsoidal mirror is-34.57 mm.
5. The deep ultraviolet band composite sensitivity spectrometer according to any one of claims 1 to 4, characterized in that: the distance between the input end of the spectrograph and the spectral beam splitter is 100 mm, the distance between the spectral beam splitter and the first ion spectrum reflector is 359 mm, and the distance between the first ion spectrum reflector and the second ion spectrum reflector is 185 mm; the distance between the ion spectrum reflector II and the ion spectrum collimation parabolic mirror is 365 mm; the distance between the ion spectrum collimation parabolic mirror and the ion spectrum grating is 480 mm; the distance between the ion spectrum grating and the ion spectrum focusing parabolic mirror is 450 mm; the distance between the ion spectrum focusing parabolic mirror and the ion spectrum image surface reflector is 480 mm; the distance between the ion spectrum image surface reflector and the ion spectrum imaging ellipsoidal mirror is 470 mm; the distance between the ion spectrum imaging ellipsoidal mirror and the electronic spectrum collimating parabolic mirror is 60 mm; the distance between the electronic spectrum collimation parabolic mirror and the electronic spectrum grating is 570 mm; the distance between the electronic spectrum grating and the electronic spectrum focusing parabolic mirror is 100 mm; the distance between the electronic spectrum focusing parabolic mirror and the electronic spectrum image surface reflector is 111.5 mm, and the distance between the electronic spectrum image surface reflector and the electronic spectrum imaging ellipsoidal mirror is 520 mm.
6. The deep ultraviolet band composite sensitivity spectrometer of claim 5, wherein: the vertex radius R of the ion spectrum collimating parabolic mirror is-2053.77 mm, the vertex radius R of the ion spectrum focusing parabolic mirror is-957.12 mm, the vertex radius R of the ion spectrum imaging ellipsoidal mirror is-561.54 mm, the cone coefficient is-0.04984 mm, the vertex radius R of the electron spectrum collimating parabolic mirror is 322.78 mm, the vertex radius R of the electron spectrum focusing parabolic mirror is 220.0 mm, the vertex radius R of the electron spectrum imaging ellipsoidal mirror is 598.74 mm, and the cone coefficient is-0.02369.
7. The deep ultraviolet band composite sensitivity spectrometer of claim 6, wherein: the reticle of the ion spectrum grating is 2400 lines/mm, the effective grating size is 40mm, and the total number of the effective gratings is N196000 lines, grating using diffraction order m12; the scribed line of the electronic spectrum grating is 1200 lines/mm, the effective grating size is 11mm, and the total number of the effective gratings is N213200 lines, the grating applies the diffraction order m2＝1。
8. The deep ultraviolet band composite sensitivity spectrometer of claim 7, wherein: the spectrum beam splitter, the first ion spectrum reflector, the second ion spectrum reflector, the ion spectrum collimation parabolic mirror, the ion spectrum focusing parabolic mirror, the ion spectrum image surface reflector, the ion spectrum imaging ellipsoidal mirror, the electron spectrum collimation parabolic mirror, the electron spectrum focusing parabolic mirror, the electron spectrum image surface reflector and the electron spectrum imaging ellipsoidal mirror are 1/10 lambda surface types.
9. The deep ultraviolet band composite sensitivity spectrometer of claim 8, wherein: the surface roughness of the spectrum beam splitter, the first ion spectrum reflector, the second ion spectrum reflector, the ion spectrum collimation parabolic mirror, the ion spectrum focusing parabolic mirror, the ion spectrum image surface reflector, the ion spectrum imaging ellipsoidal mirror, the electron spectrum collimation parabolic mirror, the electron spectrum focusing parabolic mirror, the electron spectrum image surface reflector and the electron spectrum imaging ellipsoidal mirror is 0.7 nm.
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