CN105181193B - Fiber grating six-dimension force sensor and its agent structure and measuring method - Google Patents
Fiber grating six-dimension force sensor and its agent structure and measuring method Download PDFInfo
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Abstract
A kind of new fiber grating six-dimension force sensor of disclosure and its agent structure and measuring method, agent structure structural symmetry provided herein are good, it is easy to fabricate.Fiber grating six-dimension force sensor provided herein, the quantity of its fiber grating element is only 12, and compared with the sensor of strain ga(u)ge group bridge measuring principle generally requires 24 foil gauges, the quantity of sensing element reduces one times.Meanwhile, light wave long message possesses electromagnetism interference, without advantages such as drifts as the output signal of sensor.The wavelength difference output information for six groups of fiber gratings that the measuring method that the application is provided is constituted using 12 fiber gratings, realizes six-dimensional force and the automatic of torgue measurement information removes coupling output, and realizes temperature self-compensation.Therefore present invention decreases retinoic acid syndrome, realize from decoupling measurement three-dimensional force and three-dimensional moment.
Description
Technical field
The application is related to sensor technical field, and in particular to a kind of fiber grating six-dimension force sensor and its agent structure
And measuring method.
Background technology
With developing rapidly for robot technology, in special, adverse circumstances that fire-fighting robot, rescue robot etc. are worked in
The research and development of specialized robot be increasingly valued by people.Six-dimension force sensor is felt as the mostly important power of robot to be passed
Sensor, its applicability and measurement accuracy in specialized robot harsh environments is just particularly important.
Current existing six-dimension force sensor is designed, resistance-strain based on resistance strain gage group bridge measuring principle more
Piece is influenceed the null offset produced big by temperature, humidity etc., and weak electric signal is difficult to electromagnetic interference present in resistance complex environment
Deng.
In addition, general six-dimension force sensor causes single dimension due to structure design, mismachining tolerance, paster error etc.
Power or torque can equally have an impact to the measurements of other dimensions output, as retinoic acid syndrome, this will reduce the measurement of sensor
Precision.Even if the research at present to the decoupling method of six-dimension force sensor retinoic acid syndrome is very more, but can realize that structure is self solved
Coupling, the sensor of detection information output from decoupling can then reduce the dependence to decoupling algorithm, more can guarantee that the measurement essence of sensor
Degree.
The content of the invention
The application provides a kind of new fiber grating six-dimension force sensor and its agent structure, while also providing a kind of light
The measuring method of fine grating six-dimension force sensor.
The agent structure for the fiber grating six-dimension force sensor that the application is provided, it is characterised in that including：
Upper resilient disc, the upper resilient disc include cylindrical ring body, four beam assemblies and with the body concentric interior annular of outer toroid
Cylinder, the agent structure has orthogonal first axial direction, second axially and the 3rd is axially formed three-dimensional system of coordinate, described outer
The symmetrical center line direction of torus and interior annular cylinder is the 3rd axle, four beam assemblies be connected to the inwall of cylindrical ring body with
Between the outer wall of interior annular cylinder, and 90 ° are respectively separated between four beam assemblies, two of which beam assembly is set along the second direction of principal axis
Put, another two beam assembly is axially arranged along first；The beam assembly include be connected to cylindrical ring body outer rectangular beam, be connected in
The interior rectangular beam of annulus cylinder and it is connected to force-transmitting block between the two；
Lower spring cylinder, the lower spring cylinder is connected to the lower section of interior annular cylinder, and interior annular cylinder has a cavity, it is described under
Spring cylinder has interior circular hole, and the cavity is connected by central through hole with interior circular hole；Offered on the lower spring cylinder along the 3rd
Three layers of cut hole group of axial arranging, every layer of cut hole group includes the cut hole of four radial direction insertions and is uniformly distributed circumferentially, described
Radial depressions form middle thin-walled in the middle part of the outer wall of spring cylinder, and first layer cut hole is located at the top of middle thin-walled, and the inner circle
The top in hole is concordant with the top of first layer cut hole, and the second layer cut hole is located on middle thin-walled, third layer cut hole
Positioned at the lower section of middle thin-walled, the first layer cut hole is corresponded with third layer cut hole position, the second layer cut hole and the
One layer of cut hole circumferentially staggers 45 °；
Base, the base includes being connected to the lower section of lower spring cylinder, and with the small axle center hole connected with interior circular hole and
The big axis core hole concentric with small axle center hole；
And capping, the capping include with small axle center hole coordinate upper round platform and with big axis core hole coordinate lower circle
Platform, the upper round platform and lower round platform have the centre bore and eccentric orfice of insertion.
As the further improvement of the agent structure, along along the first axially arranged outer rectangular beam, it is axial along first
Length be more than its length along the second axle；Along along the second axially arranged outer rectangular beam, its length along the second axial direction side is big
In its length along the first axial direction；Along along the first axially arranged outer rectangular beam, its length along the second axial direction is it along the 3rd
More than 3 times of axial length；Along along the second axially arranged outer rectangular beam, it is axially long along the 3rd along the first axial length
More than 3 times of degree；
Along along the first axially arranged interior rectangular beam, it is more than its length along the 3rd axial direction along the first axial length；
Along along the second axially arranged interior rectangular beam, it is more than its length along the 3rd axial direction along the second axial length；Along first axle
Into the interior rectangular beam of setting, its length along the 3rd axial direction is it along more than 3 times of the second axial length；Axially set along second
In the interior rectangular beam put, its length along the 3rd axial direction is it along more than 3 times of the first axial length.
As the further improvement of the agent structure, length of the outer rectangular beam along the 3rd axial direction, and along first axle
Length into the interior rectangular beam of arrangement along the second axial direction is identical；Or length of the outer rectangular beam along the 3rd axial direction, with edge
Length in second axial arranged interior rectangular beam along the first axial direction is identical；
The interior rectangular beam along the 3rd axial direction length, with along along the first axial arranged outer rectangular beam along second axial direction
Length is identical, or the interior rectangular beam along the 3rd axial direction length with along along the second axial arranged outer rectangular beam along first axle
To length it is identical；
As the further improvement of the agent structure, the force-transmitting block along first it is axially arranged when, its along first axially
Thickness be outer rectangular beam along more than 2 times of the 3rd axial length；Two sides of the force-transmitting block and corresponding outer rectangular beam
Two sides it is concordant, and outer rectangular beam is positioned at center of the force-transmitting block along the 3rd axial length；The upper and lower surface of the force-transmitting block
With two flushes up and down of interior rectangular beam, and it is located at correspondence force-transmitting block along the second axle along the first axial arranged interior rectangular beam
To the center of length, it is located at center of the correspondence force-transmitting block along the first axial length along the second axial arranged interior rectangular beam.
As the further improvement of the agent structure, the part between two cut holes of same layer is supporting table, described
Supporting table be three layers, first layer supporting table is arranged between first layer cut hole, second layer supporting table be arranged at second layer cut hole it
Between, third layer supporting table is arranged between third layer cut hole, and the circumferential lengths of each cut hole are that correspondence supporting table is circumferentially long
More than 2 times of degree, and first layer supporting table and third layer supporting table corresponding with its are respectively along positioned at the first axial direction and second
It is axially arranged.
As the further improvement of the agent structure, the upper resilient disc, lower spring cylinder and base are elastomeric material system
Into integral structure, described capping and base mechanical engagement, and fixed using laser spot welding.
As the further improvement of the agent structure, when described capping loads base, the upper table of the lower round platform
Face is concordant with the upper surface in big axis core hole, and the upper surface of the upper round platform is less than third layer cut hole.
The fiber grating six-dimension force sensor that the application is provided, including the agent structure and sensitivity described in any one as described above
Detecting element, the sensitive detection element is fiber grating, is supported in first layer supporting table and third layer corresponding with above and below it
Between platform and parallel to the 3rd axial direction position be respectively disposed with the first fiber grating (FBG1), the second fiber grating (FBG2),
3rd fiber grating (FBG3) and the 4th fiber grating (FBG4), and the first fiber grating (FBG1) and the 3rd fiber grating
(FBG3) it is located at the first axial direction and the 3rd axial direction institute planar, the second fiber grating (FBG2) and the 4th fiber grating (FBG4)
Positioned at the second axial direction and the 3rd axial direction institute planar；In two outer rectangular beams along the first axial direction close to the upper surface of force-transmitting block
Place is disposed with along the 5th fiber grating (FBG5) being radially arranged of upper resilient disc and the 7th fiber grating (FBG7)；Along second
Two outer rectangular beams of axial direction are disposed with the six fiberses light being radially arranged along upper resilient disc at the upper surface of force-transmitting block
Grid (FBG6) and the 8th fiber grating (FBG8)；It has been arranged symmetrically in any one interior rectangular beam on the two sides of force-transmitting block
9th fiber grating (FBG9) and the tenth fiber grating (FBG10)；
If the 9th fiber grating (FBG9) of arrangement and the tenth fiber grating on the interior rectangular beam along the first axial direction
(FBG10), then the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) are axial arranged parallel to first；
If the 9th fiber grating (FBG9) of arrangement and the tenth fiber grating on the interior rectangular beam along the second axial direction
(FBG10), then the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) are axial arranged parallel to second；
The 11st fiber grating (FBG11) is disposed with cavity；In interior circular hole between central through hole and centre bore
Axial arranged there is the 12nd fiber grating (FBG12) along the 3rd.
It is used as the further improvement of the fiber grating six-dimension force sensor, the first fiber grating (FBG1), the second optical fiber
When grating (FBG2), the 3rd fiber grating (FBG3) and the 4th fiber grating (FBG4) are in pre-stretching tensioned state, its two ends
Optical fiber fix and be pasted on the outer surface of supporting table；5th fiber grating (FBG5), six fiberses grating (FBG6), the 7th optical fiber
Light is carved with grating (FBG7), the 8th fiber grating (FBG8), the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10)
Paste List at grid；11st fiber grating (FBG11) is in free state；12nd fiber grating (FBG12) is pre-stretching
During tensioned state, fixation is pasted in central through hole and centre bore the optical fiber at its two ends respectively；5th fiber grating
(FBG5), six fiberses grating (FBG6), the 7th fiber grating (FBG7), the axial axis of the 8th fiber grating (FBG8) distance the 3rd
The distance of line is equal；9th fiber grating (FBG9) and the axial axis of the tenth fiber grating (FBG10) distance the 3rd away from
From equal.
The measuring method for fiber grating six-dimension force sensor that the application is provided, the fiber grating six-dimensional force sensing
Device uses above-mentioned fiber grating six-dimension force sensor, wherein first fiber grating (FBG1) and the 3rd fiber grating
(FBG3) the difference signal Δ λ of wavelength shift13=Δ λ1-Δλ3, for measuring Fx signals；Second fiber grating (FBG2)
With the difference signal Δ λ of the wavelength shift of the 4th fiber grating (FBG4)24=Δ λ2-Δλ4, for measuring Fy signals；5th
The difference signal Δ λ of the wavelength shift of fiber grating (FBG5) and the 7th fiber grating (FBG7)57=Δ λ5-Δλ7, it is used for
Measure My signals；The difference signal Δ λ of the wavelength shift of six fiberses grating (FBG6) and the 8th fiber grating (FBG8)68=
Δλ6-Δλ8, for measuring Mx signals；The wavelength shift of 9th fiber grating (FBG9) and the tenth fiber grating (FBG10)
Difference signal Δ λ910=Δ λ9-Δλ10, for measuring Mz；Show that two ends fix paste the after pre-stretching by temperature test
The ratio of 12 fiber gratings (FBG12) and the temperature control coefficient of the 11st fiber grating (FBG11) in free state
After value k, the wave length shift of the wavelength shift of the 12nd fiber grating (FBG12) and k times of the 11st fiber grating (FBG11)
The difference signal Δ λ of amount1112=Δ λ11-k*Δλ12, for measuring Fz.
The beneficial effect of the application is：
The agent structure of fiber grating six-dimension force sensor provided herein, with the existing complexity by parts
Assembling realizes that the six-dimension force sensor without retinoic acid syndrome is compared, and agent structure symmetry of the invention is good, it is easy to fabricate.
Fiber grating six-dimension force sensor provided herein, the quantity of its fiber grating element is only 12, with electricity
The sensor of resistance Strain Meter Set bridge measuring principle generally requires 24 foil gauges and compared, and the quantity of sensing element reduces one times.
Meanwhile, light wave long message possesses electromagnetism interference, without advantages such as drifts as the output signal of sensor.
The wavelength difference for six groups of fiber gratings that the measuring method that the application is provided is constituted using 12 fiber gratings is exported
Information, the coupling that removes automatically for realizing six-dimensional force and torgue measurement information is exported, and realizes temperature self-compensation.Therefore it is of the invention
Retinoic acid syndrome is reduced, is realized from decoupling measurement three-dimensional force and three-dimensional moment.
Brief description of the drawings
Fig. 1 is sensor of the invention overall structure diagram；
Fig. 2 is that sensor of the invention bottom regards overall composition schematic diagram；
Fig. 3 is the schematic diagram after sensor of the invention is assembled；
Fig. 4 is sensor of the invention top view；
Fig. 5 is sensor of the invention front view；
Fig. 6 is sensor of the invention elevational cross-sectional view；
The fiber grating schematic elevation view that Fig. 7 arranges for the lower spring cylinder of sensor；
The fiber grating schematic rear view that Fig. 8 arranges for the lower spring cylinder of sensor；
The fiber grating schematic top plan view that Fig. 9 arranges for the upper resilient disc of sensor；
Figure 10 faces schematic cross-sectional view for what sensor fiber grating was arranged
Have in figure：Upper resilient disc 1, lower spring cylinder 2, base 3, capping 4, cylindrical ring body 11, outer rectangular beam 12, power transmission
Block 13, interior rectangular beam 14, interior annular cylinder 15, cavity 16, central through hole 17, cut hole 21, supporting table 22, middle thin-walled 23, inner circle
Hole 24, small axle center hole 31, big axis core hole 32, centre bore 41, eccentric orfice 42, upper round platform 43, lower round platform 44.
Embodiment
The present invention is described in further detail below by embodiment combination accompanying drawing.The application can be with a variety of
Different forms is realized, however it is not limited to embodiment described by the present embodiment.The purpose of detailed description below is provided
It is easy for becoming apparent from present disclosure thorough explanation, the words of the wherein indicating position such as upper and lower, left and right is only pin
To shown structure in respective figure for position.
However, those skilled in the art may be aware that one or more detail description can be by
Omit, or can also be using other methods, component or material.In some instances, some embodiments are not described
Or be not described later in detail.
In addition, technical characteristic described herein, technical scheme can also be closed arbitrarily in one or more embodiments
Suitable mode is combined.
Embodiment：
As shown in figure 1, sensor includes agent structure and sensitive detection element.
The agent structure includes upper resilient disc 1, lower spring cylinder 2, base 3 and capping 4.
Wherein upper resilient disc 1, lower spring cylinder 2 and base 3 are that integral type processes monolithic devices elastic construction, capping 4
For individual part, fixed after coordinating with the hole of the lower section of base 3 using laser spot welding, capping 4 only serves fixed optical fiber and extraction
The effect of tail optical fiber, and no elastic deformation's function.Fig. 3 is assembling, the sensor schematic fixed after finishing.
Such as the sign in Fig. 1, agent structure has orthogonal first axial direction, second axially and the 3rd is axially formed three
Dimension coordinate system (defines an XYZ three-dimensional system of coordinate i.e. by origin 0 of the center of circle of the bottom surface of base 3, X-axis is first axle, and Y-axis is
Second axle, Z axis is the 3rd axle), the symmetrical center line direction of cylindrical ring body 11 and interior annular cylinder 15 is the 3rd axle.
Fig. 4 is sensor top view, and the detailed structure and position relationship that illustrate resilient disc 1, upper resilient disc 1 include
There are cylindrical ring body 11, outer rectangular beam 12, force-transmitting block 13, interior rectangular beam 14, interior annular cylinder 15, cavity 16 and central through hole 17.
Wherein, outer rectangular beam 12, interior rectangular beam 14 and the composition beam assembly of force-transmitting block 13, the present embodiment have four beam groups
Part, four beam assemblies are connected between the outer wall of the inwall of cylindrical ring body 11 and interior annular cylinder 15, and divided between four beam assemblies
Jian Ge not be 90 °.
Cylindrical ring body 11 is provided with the corresponding screwed hole of outer rectangular beam 12 as loaded ring, cylindrical ring body 11, outer rectangle
Beam 12, force-transmitting block 13, interior rectangular beam 14, interior annular cylinder 15 are sequentially connected.Four completely the same outer rectangular beams 12 are respectively along X-axis
Or Y-axis is set, four completely the same interior rectangular beams 14 are set along X-axis or Y-axis respectively.Upper resilient disc 1 on XOZ planes and
YOZ planes are symmetrical.
Outer rectangular beam 12, interior rectangular beam 14 are thin-wall construction, in the outer rectangular beam 12 set along X-direction, and it is along X-axis
The length in direction is more than the length along Y-direction.In the outer rectangular beam 12 set along Y direction, it is more than along the length of Y direction
Length in X direction.In the outer rectangular beam 12 set along X-direction, its length along Y direction is along the 3 of Z-direction length
More than times.In the outer rectangular beam 12 set along Y direction, its length along X-direction for its along 3 times of Z-direction thickness with
On.
In the interior rectangular beam 14 set along X-direction, its length along X-direction is more than the length along Z-direction.Along Y-axis
In the interior rectangular beam 14 that direction is set, its length along Y direction is more than the length along Z-direction.The internal moment set along X-direction
In ellbeam 14, its length along Z-direction is more than 3 times along Y direction length.The interior rectangular beam 14 set along Y direction
In, its length along Z-direction is more than 3 times along X-direction thickness.
Length along Y direction of length of the outer rectangular beam 12 along Z-direction and the interior rectangular beam 14 arranged along X-direction or
The interior rectangular beam 14 that person arranges along Y direction is identical along the length of X-direction.
Length along Y direction of length of the interior rectangular beam 14 along Z-direction and the outer rectangular beam 12 arranged along X-direction or
The outer rectangular beam 12 that person arranges along Y direction is identical along the length of X-direction.
The length of length of the force-transmitting block 13 set along X-direction along X-axis and the force-transmitting block 13 that is set along Y direction along Y-axis
Degree is consistent, and is outer rectangular beam 12 along more than 2 times of the length of Z-direction.Two sides of force-transmitting block 13 and outer rectangular beam 12
Two sides it is concordant, and outer rectangular beam 12 is positioned at center of the force-transmitting block 13 along Z-direction height；The upper and lower surface of force-transmitting block 13
With two flushes up and down of interior rectangular beam 14, and the interior rectangular beam 14 arranged along X-direction is located at force-transmitting block 13 along Y-axis side
To the center of length, it is located at center of the force-transmitting block 13 along X-direction length along the interior rectangular beam 14 that Y direction is arranged.
The wall thickness of interior annular cylinder 15 is outer rectangular beam 12 along more than 3 times of the length of Z-direction；The upper table of interior annular cylinder 15
Face is concordant with the upper surface of interior rectangular beam 14；Outer annular round wall 11, force-transmitting block 13, interior rectangular beam 14, the bottom surface of interior annular cylinder 15 are put down
Together.
As shown in figure 5, lower spring cylinder 2 includes cut hole 21, supporting table 22, middle thin-walled 23, interior circular hole 24.The edge of cut hole 21
Axially have three layers at equal intervals from top to bottom, and each layer of cut hole 21 has four, and be circumferentially distributed；First layer cut hole
21 with third layer cut hole about 21 it is corresponding, second layer cut hole 21 and first layer cut hole 21 are circumferential to be staggered 45 °.Supporting table 22 is every layer
Four cut holes 21 between part, and the circumferential lengths of cut hole 21 are more than 2 times of the circumferential lengths of supporting table 22；First layer branch
Platform 22 and corresponding third layer supporting table 22 is supportted to set along X-axis and Y-axis respectively.First layer cut hole 21 and third layer cut hole 21
Between part outer wall radial depressions, its external diameter is wanted smaller, formed thin-wall construction.Interior circular hole 24 is through entirely lower spring cylinder
2, interior the top of circular hole 24 is concordant with first layer cut hole 21.
As shown in fig. 6, base 3 is provided centrally with small axle center hole 31, big axis core hole 32, small axle center hole 31 and interior circular hole 24
It is coaxial and diameter is identical, as same circular hole.
As shown in fig. 6, centre bore 41, eccentric orfice 42, upper round platform 43, lower round platform 44 are left on capping 4, upper round platform 43
External diameter is identical with the internal diameter of the small axle center hole 31 of base 3 to realize mechanical engagement；The external diameter of lower round platform 44 and big axis core hole 32
Internal diameter is identical to realize mechanical engagement, and the thickness of lower round platform 44 is less than the depth in big axis core hole 32；Capping 4 and base 3
After cooperation, the upper surface of lower round platform 44 is concordant with the upper surface in big axis core hole 32, and the upper surface of upper round platform 43 is less than third layer
The lower surface of cut hole 21.
The sensitive detection element of inventive sensor is fiber grating, is arranged on the ad-hoc location of sensor elastic construction
After fiber grating, export to measure three-dimensional force and three-dimensional moment using the wavelength of fiber grating.
As shown in Figure 7,8, between first layer supporting table 22 and third layer supporting table 22 corresponding with above and below it parallel to Z
Direction of principal axis is respectively disposed with the fiber grating of fiber grating first (FBG1), the second fiber grating (FBG2), the 3rd fiber grating
(FBG3) and the 4th fiber grating (FBG4), the first fiber grating (FBG1) and the 3rd fiber grating (FBG3) are located at XOZ planes
Interior, the second fiber grating (FBG2) and the 4th fiber grating (FBG4) are located in YOZ planes, the first fiber grating (FBG1), the
Two fiber gratings (FBG2), the 3rd fiber grating (FBG3) and the 4th fiber grating (FBG4) are to tighten shape in pre-stretching
During state, the optical fiber at fiber grating two ends is fixed on the outer surface of supporting table 22 by glass solder or adhesive.
Two outer rectangular beams 12 along X-direction at the upper surface of force-transmitting block 13 along the upper radial arrangement of resilient disc 1
5th fiber grating (FBG5) and the 7th fiber grating (FBG7), use paste List at grating；Similarly, along Y-axis
Two outer rectangular beams 12 in direction have the light of fiber grating the 6th at the upper surface of force-transmitting block 13 along the upper radial arrangement of resilient disc 1
Fine grating (FBG6) and the 8th fiber grating (FBG8)；
The optical fiber light of fiber grating the 9th is arranged symmetrically on the two sides of force-transmitting block 13 in any one interior rectangular beam 14
Grid (FBG9) and the tenth fiber grating (FBG10), and the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) are along upper
The radial arrangement of resilient disc 1；
FBG11 is arranged in cavity 16 in free state, the interior circular hole 24 between central through hole 17 and centre bore 41
Interior to be disposed with the 12nd fiber grating (FBG12) along Z axis axis, the 12nd fiber grating (FBG12) is taut in pre-stretching
During tight state, the optical fiber at fiber grating two ends is fixed on central through hole 17 and centre bore 41 by glass solder or adhesive
It is interior.
5th fiber grating (FBG5), six fiberses grating (FBG6), the 7th fiber grating (FBG7), the 8th fiber grating
(FBG8) distance apart from Z axis axis is equal, and the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) are apart from Z axis axle
The distance of line is equal.
As shown in Fig. 7,8,9,10, the tail end optical fiber of the first fiber grating (FBG1), upper end tail optical fiber passes through certain of first layer
Enter inner circle hole 24 after one cut hole 21, be then passed through drawing after the eccentric orfice 42 on capping 4, light is drawn as one of sensor
Optical fiber signaling termination；The lower end tail optical fiber of first fiber grating (FBG1) is connected with the lower end tail optical fiber of the second fiber grating (FBG2), the
The upper end tail optical fiber of two fiber gratings (FBG2) is connected with the upper end tail optical fiber of the 3rd fiber grating (FBG3), the 3rd fiber grating
(FBG3) lower end tail optical fiber is connected with the lower end tail optical fiber of the 4th fiber grating (FBG4), the upper end tail of the 4th fiber grating (FBG4)
Fibre is connected after passing through upper resilient disc 1 with the left end tail optical fiber of the 5th fiber grating (FBG5), the right-hand member of the 5th fiber grating (FBG5)
Tail optical fiber is connected with the upper end tail optical fiber of six fiberses grating (FBG6), the lower end tail optical fiber and the 7th optical fiber of six fiberses grating (FBG6)
Under the left end tail optical fiber connection of grating (FBG7), the right-hand member tail optical fiber and the 8th fiber grating (FBG8) of the 7th fiber grating (FBG7)
Tail optical fiber connection is held, the upper end tail optical fiber of the 8th fiber grating (FBG8) is connected with the upper end tail optical fiber of the 9th fiber grating (FBG9), the
The lower end tail optical fiber of nine fiber gratings (FBG9) is connected with the lower end tail optical fiber of the tenth fiber grating (FBG10), the tenth fiber grating
(FBG10) upper end tail optical fiber is connected with the upper end tail optical fiber of the 11st fiber grating (FBG11), the tenth fiber grating (FBG10)
Lower end tail optical fiber is connected with the upper end tail optical fiber of the 12nd fiber grating (FBG12)；The lower end tail optical fiber of 12nd fiber grating (FBG12)
Drawn after through centre bore 41, fiber-optic signal termination is drawn as another of sensor.
The difference signal Δ λ of the wavelength shift of first fiber grating (FBG1) and the 3rd fiber grating (FBG3)13=Δ
λ1-Δλ3, for measuring Fx；
The difference signal Δ λ of the wavelength shift of second fiber grating (FBG2) and the 4th fiber grating (FBG4)24=Δ
λ2-Δλ4, for measuring Fy；
The difference signal Δ λ of the wavelength shift of 5th fiber grating (FBG5) and the 7th fiber grating (FBG7)57=Δ
λ5-Δλ7, for measuring My；
The difference signal Δ λ of the wavelength shift of six fiberses grating (FBG6) and the 8th fiber grating (FBG8)68=Δ
λ6-Δλ8, for measuring Mx；
The difference signal Δ λ of the wavelength shift of 9th fiber grating (FBG9) and the tenth fiber grating (FBG10)910=
Δλ9-Δλ10, for measuring Mz
Show that the 12nd fiber grating (FBG12) pasted is fixed with being in freely in two ends after pre-stretching by temperature test
After the ratio k of the temperature control coefficient of 11st fiber grating (FBG11) of state, the 12nd fiber grating (FBG12)
The difference signal Δ λ of wavelength shift and the wavelength shift of k times of the 11st fiber grating (FBG11)1112=Δ λ11-k*Δ
λ12, for measuring Fz.
The principle of the present invention from decoupling measurement three-dimensional force and moment information is as follows：
FBG1 and FBG3 are combined as a pair of measuring units, and the difference of the respective wavelength shift of FBG1, FBG3 is exported for surveying
Measure the power Fx in x directions.The difference output of FBG1, FBG3 wavelength shift is only sensitive to Fx, and this is due to：
1. when the power Fx for having x directions is acted on the external annulus as loaded ring, FBG1 and FBG3 is respectively at lower bullet
Property cylinder deformation both sides, FBG1 and FBG3 wave length shift is equal in magnitude but in opposite direction.Using the difference of wavelength shift as
The output signal of measuring unit, not only increases measurement sensitivity, moreover, the wavelength brought by variation of ambient temperature in the same direction, etc.
Value drift is eliminated after difference；
2. and when have y directions power Fy effect when, FBG1, FBG3 be in lower spring cylinder neutral line, wavelength without drift,
The difference of FBG1 and FBG3 wavelength shifts is without output；When the power Fz effects for having z directions, FBG1 and FBG3 wave length shifts are in the same direction
And it is equivalent, the difference of FBG1 and FBG3 wavelength shifts is without output；
3. when having around the torque Mx effects of X-direction, deformation is concentrated mainly on the outer square arranged in resilient disc along Y-axis
On ellbeam, lower spring cylinder deformation is not obvious, and FBG1, FBG3 wave length shift are insensitive to Mx, FBG1 and FBG3 wavelength shifts
Difference without output；
4. when having around the torque My effects of Y direction, deformation is concentrated mainly on the outer square arranged in resilient disc along X-axis
On ellbeam, lower spring cylinder deformation is not obvious, and FBG1, FBG3 wave length shift are insensitive to My, FBG1 and FBG3 wavelength shifts
Difference without output；
5. when the torque Mz effects for having direction about the z axis, deformation is concentrated mainly on the interior rectangular beam in resilient disc, under
Spring cylinder deformation is not obvious, and FBG1, FBG3 wave length shift are insensitive to Mz, even and if the deformation of lower spring cylinder has micro- reverse to become
Shape, FBG1 is also consistent with the deformation state residing for FBG3, and wave length shift is consistent, and the difference of FBG1 and FBG3 wavelength shifts is without defeated
Go out；
It can be seen that, the difference output of the wavelength shift of the measuring unit of FBG1 and FBG3 compositions is realized only to Fx sensitivities
From decoupling measurement.Identical analysis method, sensor is rotated by 90 ° along Z axis, it is known that the measuring unit of FBG2 and FBG4 compositions
The difference output of wavelength shift can be achieved decoupling certainly only sensitive to Fy and measure.
FBG5 and FBG7 are combined as a pair of measuring units, and the difference of the respective wavelength shift of FBG5, FBG7 is exported for surveying
Measure the torque My around Y direction：
1. it is outer along two of X-direction when there is the torque My around Y direction to act on the external annulus as loaded ring
Rectangular beam deformation is obvious, and FBG5 is identical with producing size at FBG7 arrangements, the strain of symbol conversely, and FBG5 and FBG7 wavelength float
Move equal in magnitude but in opposite direction, the difference of wavelength shift not only increases measurement spirit as the output signal of measuring unit
Sensitivity, and the wavelength brought by variation of ambient temperature in the same direction, etc. value drift eliminated after difference；
2. and when power Fx or the Fy effect for having x or y directions, deformation takes place mostly in lower spring cylinder, upper resilient disc only rises
Deformed to the effect of transmission power without obvious, FBG5, FBG7 wave length shift are insensitive to Fx and Fy, and FBG5 floats with FBG7 wavelength
The difference of shifting amount is without output；
3. when the power Fz effects for having z directions, four outer rectangular beam deformation tendencies are consistent, produced at FBG5, FBG7 arrangement
Size is identical, the strain of symbol identical, and FBG5 and FBG7 wavelength shift is after difference is handled without output；
4. when having around the torque Mx effects of X-direction, FBG5 and two outer rectangular beams along X-direction where FBG7
Residing deformation state is consistent, FBG5, FBG7 generation identical wave length shift, and FBG5 and FBG7 wavelength shift pass through difference
Without output after processing；
5. when the torque Mz effects for having direction about the z axis, FBG5 and two outer rectangular beams along X-direction where FBG7
Without substantially deformation, even and if the deformation state that produces at faint deformation, FBG5, FBG7 arrangement is also consistent, FBG5, FBG7 generation
Identical wave length shift, FBG5 and FBG7 wavelength shift are after difference is handled without output；
It can be seen that, the difference output of the wavelength shift of the measuring unit of FBG5 and FBG7 compositions is realized only to My sensitivities
From decoupling measurement.Identical analysis method, sensor is rotated by 90 ° along Z axis, it is known that the measuring unit of FBG6 and FBG8 compositions
The difference output of wavelength shift can be achieved decoupling certainly only sensitive to Mx and measure.
FBG9 and FBG10 are combined as a pair of measuring units, and each the difference of wavelength shift is exported and is used for by FBG9, FBG10
Measure the torque Mz in direction about the z axis：
1. when the torque Mz for having direction about the z axis acts on the external annulus as loaded ring, it is disposed with FBG9's and FBG10
Main deformation occurs for interior rectangular beam, and FBG9 is identical with producing size at FBG10 arrangements, the strain of symbol conversely, FBG9 and FBG10
Wave length shift it is equal in magnitude but in opposite direction, the difference of wavelength shift improves survey as the output signal of measuring unit
Measure sensitivity, the wavelength brought by variation of ambient temperature in the same direction, etc. value drift be also eliminated after difference；
2. and when power Fx or Fy or the Fz effect for having x or y or z directions, deformation takes place mostly in lower spring cylinder, upper elasticity
Disk only plays a part of transmission power and without obvious deformation, FBG9, FBG10 wave length shift are insensitive to Fx, Fy and Fz, FBG9 with
The difference of FBG10 wavelength shifts is without output；
3. and when having around torque Mx or the My effect of X-axis or Y direction, the change shape occurred at FBG9, FBG10 arrangement
State is consistent, and FBG9, FBG10 produce identical wave length shift, and FBG5 and FBG7 wavelength shift is after difference is handled without defeated
Go out；
It can be seen that, the difference output of the wavelength shift of the measuring unit of FBG9 and FBG10 compositions is realized only to Mz sensitivities
From decoupling measurement.
FBG11 and FBG12 are combined as a pair of measuring units, the power Fz for measuring z directions：
1. when the power Fz for having z directions acts on the external annulus as loaded ring, lower spring cylinder is deformed along Z-direction, cloth
The FBG12 for being placed in lower spring cylinder axial centre produces wave length shift, and the FBG11 in free state provides temperature for FBG12 and mended
Repay, the temperature of FBG12 and the FBG11 in free state that two ends fixation is pasted after pre-stretching are drawn by temperature test
After the ratio k of sensitivity coefficient, by the difference of FBG12 wavelength shift and k times of FBG11 wavelength shift as measurement
The output signal of unit, measures Fz, and difference output signal eliminates the FBG12 brought by variation of ambient temperature wave length shift；
2. and when having power Fx or Fy along x or y directions, and during around torque Mx or the My effect of X-axis or Y direction,
FBG12 is in the axle center of lower spring cylinder, on neuter curved surface, does not deform, FBG12 wavelength is without drift；
3. when having around the torque Mz effects of Z-direction, lower spring cylinder deformation is not obvious, even if lower spring cylinder has micro- reverse to become
Shape, does not also produce stretching or compression, FBG12 wavelength is without drift value to FBG12；
It can be seen that, the output of the measuring unit of FBG11 and FBG12 compositions realizes decoupling certainly only sensitive to Fz and measured.
Above content is to combine specific embodiment further description made for the present invention, it is impossible to assert this hair
Bright specific implementation is confined to these explanations.For general technical staff of the technical field of the invention, do not taking off
On the premise of from present inventive concept, some simple deduction or replace can also be made.
Claims (10)
1. a kind of agent structure of fiber grating six-dimension force sensor, it is characterised in that including：
Upper resilient disc, the upper resilient disc include cylindrical ring body, four beam assemblies and with outer toroid body concentric interior annular cylinder, institute
Stating agent structure, there is orthogonal first axial direction, the second axial direction and the 3rd to be axially formed three-dimensional system of coordinate, the outer toroid
The symmetrical center line direction of body and interior annular cylinder is the 3rd axle, and four beam assemblies are connected to the inwall and inner circle of cylindrical ring body
Between the outer wall of ring cylinder, and 90 ° are respectively separated between four beam assemblies, two of which beam assembly is set along the second direction of principal axis,
Another two beam assembly is axially arranged along first；The beam assembly includes being connected to the outer rectangular beam of cylindrical ring body, is connected to inner circle
The interior rectangular beam of ring cylinder and it is connected to force-transmitting block between the two；
Lower spring cylinder, the lower spring cylinder is connected to the lower section of interior annular cylinder, and the interior annular cylinder has cavity, the lower elasticity
Cylinder has interior circular hole, and the cavity is connected by central through hole with interior circular hole；Offered on the lower spring cylinder along the 3rd axially
Three layers of cut hole group of arrangement, every layer of cut hole group includes the cut hole of four radial direction insertions and is uniformly distributed circumferentially, the elasticity
Radial depressions form middle thin-walled in the middle part of the outer wall of cylinder, and first layer cut hole is located at the top of middle thin-walled, and the interior circular hole
Concordant with the top of first layer cut hole topmost, second layer cut hole is located on middle thin-walled, and third layer cut hole is located at centre
The lower section of thin-walled, the first layer cut hole is corresponded with third layer cut hole position, the second layer cut hole and first layer cut hole
Circumferentially stagger 45 °；
Base, the base includes being connected to the lower section of lower spring cylinder, and with the small axle center hole connected with interior circular hole and with it is small
The concentric big axis core hole of axle center hole；
And capping, the capping include with small axle center hole coordinate upper round platform and with big axis core hole coordinate lower round platform,
The upper round platform and lower round platform have the centre bore and eccentric orfice of insertion.
2. agent structure according to claim 1, it is characterised in that：Along along the first axially arranged outer rectangular beam, its edge
The length of first axial direction is more than its length along the second axle；Along along the second axially arranged outer rectangular beam, its along second axial direction
Length is more than its length along the first axial direction；Along along the first axially arranged outer rectangular beam, it is it along the second axial length
Along more than 3 times of the 3rd axial length；Along along the second axially arranged outer rectangular beam, it is along the 3rd along the first axial length
More than 3 times of axial length；
Along along the first axially arranged interior rectangular beam, it is more than its length along the 3rd axial direction along the first axial length；Along
In two axially arranged interior rectangular beams, it is more than its length along the 3rd axial direction along the second axial length；Axially set along first
In the interior rectangular beam put, its length along the 3rd axial direction is it along more than 3 times of the second axial length；It is axially arranged along second
In interior rectangular beam, its length along the 3rd axial direction is it along more than 3 times of the first axial length.
3. agent structure according to claim 2, it is characterised in that：Length of the outer rectangular beam along the 3rd axial direction, with
Length along along the first axial arranged interior rectangular beam along the second axial direction is identical；Or length of the outer rectangular beam along the 3rd axial direction
Degree is identical with the length along along the second axial arranged interior rectangular beam along the first axial direction；
Length of the interior rectangular beam along the 3rd axial direction, with the length along along the first axial arranged outer rectangular beam along the second axial direction
It is identical, or the interior rectangular beam along the 3rd axial direction length with along along the second axial arranged outer rectangular beam along first axial direction
Length is identical.
4. agent structure according to claim 3, it is characterised in that：The force-transmitting block along first it is axially arranged when, its edge
The thickness of first axial direction is outer rectangular beam along more than 2 times of the 3rd axial length；Two sides of the force-transmitting block with it is corresponding
Two sides of outer rectangular beam are concordant, and outer rectangular beam is located at center of the force-transmitting block along the 3rd axial length；The force-transmitting block
Upper and lower surface and two flushes up and down of interior rectangular beam, and it is located at correspondence force-transmitting block along the first axial arranged interior rectangular beam
Along the center of the second axial length, it is located at correspondence force-transmitting block along along the first axial length along the second axial arranged interior rectangular beam
Centre.
5. agent structure according to claim 4, it is characterised in that：Part between two cut holes of same layer is support
Platform, the supporting table is three layers, and first layer supporting table is arranged between first layer cut hole, and second layer supporting table is arranged at the second layer
Between cut hole, third layer supporting table is arranged between third layer cut hole, and the circumferential lengths of each cut hole are correspondence supporting table
More than 2 times of circumferential lengths, and first layer supporting table and third layer supporting table corresponding with its respectively along first axially and the
Two is axially arranged.
6. agent structure according to claim 5, it is characterised in that：The upper resilient disc, lower spring cylinder and base are bullet
Property the integral structure that is made of material, described capping and base mechanical engagement, and fixed using laser spot welding.
7. agent structure according to claim 6, it is characterised in that：When described capping loads base, the lower circle
The upper surface of platform is concordant with the upper surface in big axis core hole, and the upper surface of the upper round platform is less than third layer cut hole.
8. a kind of fiber grating six-dimension force sensor, it is characterised in that including the main body as described in claim any one of 1-7
Structure and sensitive detection element, the sensitive detection element are fiber grating, in first layer supporting table and corresponding with above and below it
The first fiber grating (FBG1), the second optical fiber light are respectively disposed between third layer supporting table and parallel to the position of the 3rd axial direction
Grid (FBG2), the 3rd fiber grating (FBG3) and the 4th fiber grating (FBG4), and the first fiber grating (FBG1) and the 3rd light
Fine grating (FBG3) is located at the first axial direction and the 3rd axial direction institute planar, the second fiber grating (FBG2) and the 4th fiber grating
(FBG4) it is located at the second axial direction and the 3rd axial direction institute planar；In two outer rectangular beams along the first axial direction close to force-transmitting block
It is disposed with upper surface along the 5th fiber grating (FBG5) being radially arranged of upper resilient disc and the 7th fiber grating (FBG7)；
The be radially arranged the 6th along upper resilient disc is disposed with the upper surface of force-transmitting block along two outer rectangular beams of the second axial direction
Fiber grating (FBG6) and the 8th fiber grating (FBG8)；Any one interior rectangular beam on the two sides of force-transmitting block it is symmetrical
It is disposed with the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10)；
If the 9th fiber grating (FBG9) of arrangement and the tenth fiber grating (FBG10) on the interior rectangular beam along the first axial direction,
9th fiber grating (FBG9) and the tenth fiber grating (FBG10) are axial arranged parallel to first；
If the 9th fiber grating (FBG9) of arrangement and the tenth fiber grating (FBG10) on the interior rectangular beam along the second axial direction,
9th fiber grating (FBG9) and the tenth fiber grating (FBG10) are axial arranged parallel to second；
The 11st fiber grating (FBG11) is disposed with cavity；Along in interior circular hole between central through hole and centre bore
Three axial arranged have the 12nd fiber grating (FBG12).
9. fiber grating six-dimension force sensor according to claim 8, it is characterised in that：First fiber grating (FBG1),
Second fiber grating (FBG2), the 3rd fiber grating (FBG3) and the 4th fiber grating (FBG4) are in pre-stretching tensioned state,
The optical fiber at its two ends fixes the outer surface for being pasted on supporting table；5th fiber grating (FBG5), six fiberses grating (FBG6),
On seven fiber gratings (FBG7), the 8th fiber grating (FBG8), the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10)
It is carved with paste List at grating；11st fiber grating (FBG11) is in free state；12nd fiber grating (FBG12) is
Tensioned state is pre-stretched, fixation is pasted in central through hole and centre bore the optical fiber at its two ends respectively；5th fiber grating
(FBG5), six fiberses grating (FBG6), the 7th fiber grating (FBG7), the axial axis of the 8th fiber grating (FBG8) distance the 3rd
The distance of line is equal；9th fiber grating (FBG9) and the axial axis of the tenth fiber grating (FBG10) distance the 3rd away from
From equal.
10. a kind of measuring method for fiber grating six-dimension force sensor, it is characterised in that the fiber grating six-dimensional force is passed
Sensor is using the fiber grating six-dimension force sensor described in claim 8 or 9, wherein first fiber grating (FBG1) and the
The difference signal Δ λ of the wavelength shift of three fiber gratings (FBG3)13=Δ λ1-Δλ3, for measuring Fx signals；Second optical fiber
The difference signal Δ λ of the wavelength shift of grating (FBG2) and the 4th fiber grating (FBG4)24=Δ λ2-Δλ4, for measuring
Fy signals；The difference signal Δ λ of the wavelength shift of 5th fiber grating (FBG5) and the 7th fiber grating (FBG7)57=Δ
λ5-Δλ7, for measuring My signals；The difference of the wavelength shift of six fiberses grating (FBG6) and the 8th fiber grating (FBG8)
Value signal Δ λ68=Δ λ6-Δλ8, for measuring Mx signals；9th fiber grating (FBG9) and the tenth fiber grating (FBG10)
Wavelength shift difference signal Δ λ910=Δ λ9-Δλ10, for measuring Mz；Drawn by temperature test two after pre-stretching
The temperature of fixed the 12nd fiber grating (FBG12) pasted in end and the 11st fiber grating (FBG11) in free state
After the ratio k of sensitivity coefficient, the wavelength shift of the 12nd fiber grating (FBG12) and k times of the 11st fiber grating
(FBG11) the difference signal Δ λ of wavelength shift1112=Δ λ11-k*Δλ12, for measuring Fz.
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