CN105181193A - Optical bragg grating six-dimension-force sensor, as well as main body structure and measurement method thereof - Google Patents

Optical bragg grating six-dimension-force sensor, as well as main body structure and measurement method thereof Download PDF

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CN105181193A
CN105181193A CN201510697769.8A CN201510697769A CN105181193A CN 105181193 A CN105181193 A CN 105181193A CN 201510697769 A CN201510697769 A CN 201510697769A CN 105181193 A CN105181193 A CN 105181193A
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fiber grating
along
axis
rectangular beam
length
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CN105181193B (en
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郭永兴
孔建益
王兴东
熊禾根
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Wuhan University of Science and Engineering WUSE
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Wuhan University of Science and Engineering WUSE
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Abstract

The invention discloses a novel optical bragg grating six-dimension-force sensor, as well as a main body structure and a measurement method thereof. The main body structure has a good symmetry, and is easy to process and manufacture. Compared with a sensor which is provided with 24 strain gauges based on the measurement principle of a resistance strain gauge bridging form, the optical bragg grating six-dimension-force sensor has the advantages that only 12 optical bragg grating elements are needed, and the number of sensitive elements is reduced by 50 percent. Furthermore, optical wavelength information is used as an output signal of the sensor, and the optical bragg grating six-dimension-force sensor has the advantages of electromagnetic interference resistance, no null drift and the like. The measurement method is used for outputting information by using the wavelength difference value of six groups of optical bragg gratings formed by 12 optical bragg gratings, so that automatic coupling-free output of six-dimension-force and moment measurement information is realized, and temperature self-compensation is realized. Therefore, dimension coupling is reduced, and self-decoupling measurement of three-dimension-force and three-dimension-moment is realized.

Description

Fiber grating six-dimension force sensor and agent structure thereof and measuring method
Technical field
The application relates to sensor technical field, is specifically related to a kind of fiber grating six-dimension force sensor and agent structure thereof and measuring method.
Background technology
Along with the develop rapidly of Robotics, that fire-fighting robot, rescue robot etc. work in is special, the research and development of specialized robot in rugged surroundings are more and more subject to people's attention.Six-dimension force sensor is as the of paramount importance force sensor of robot, and its applicability in specialized robot harsh environments and measurement accuracy just seem particularly important.
Mostly current existing six-dimension force sensor is to design based on resistance strain gage group bridge measuring principle, and the zero point drift that resistance strain gage affects generation by temperature, humidity etc. is large, and weak electric signal is difficult to resist the electromagnetic interference (EMI) etc. existed in complex environment.
In addition, general six-dimension force sensor is due to structural design, mismachining tolerance, paster error etc., and causing the power of single dimension or moment can export the measurement of other dimensions equally has impact, and be retinoic acid syndrome, this will reduce the measuring accuracy of sensor.Even if at present very many to the research of the decoupling method of six-dimension force sensor retinoic acid syndrome, but structure can be realized then can reduce dependence to decoupling algorithm from decoupling zero, Detection Information output from the sensor of decoupling zero, more can ensure the measuring accuracy of sensor.
Summary of the invention
The application provides a kind of novel fiber grating six-dimension force sensor and agent structure thereof, also provides a kind of measuring method of fiber grating six-dimension force sensor simultaneously.
The agent structure of the fiber grating six-dimension force sensor that the application provides, is characterized in that, comprising:
Upper resilient disc, described upper resilient disc comprises cylindrical ring body, four beam assemblies and interior annulus cylinder body concentric with outer toroid, described agent structure has orthogonal first axis, the second axis and the 3rd axially forms three-dimensional system of coordinate, the symmetrical center line direction of described cylindrical ring body and interior annulus cylinder is the 3rd axle, described four beam assemblies are connected between the inwall of cylindrical ring body and the outer wall of interior annulus cylinder, and difference 90 °, interval between four beam assemblies, wherein two beam assemblies are arranged along the second direction of principal axis, and another two beam assemblies are axially arranged along first; The force-transmitting block that described beam assembly comprises the outer rectangular beam being connected to cylindrical ring body, the interior rectangular beam being connected to interior annulus cylinder and is connected between the two;
Lower spring cylinder, described lower spring cylinder is connected to the below of interior annulus cylinder, and described interior annulus cylinder has cavity, and described lower spring cylinder has interior circular hole, and described cavity is communicated with interior circular hole by central through hole, described lower spring cylinder offers three layers of cut hole group along the 3rd axial arranging, every layer of cut hole group comprises the through cut hole of four radial directions and is all uniformly distributed circumferentially, in the middle part of the outer wall of described spring cylinder, radial depressions forms middle thin-walled, ground floor cut hole is positioned at the top of middle thin-walled, and the top of described interior circular hole is concordant with the top of ground floor cut hole, described second layer cut hole is positioned on middle thin-walled, third layer cut hole is positioned at the below of middle thin-walled, described ground floor cut hole and third layer cut hole position one_to_one corresponding, described second layer cut hole and ground floor cut hole circumferentially stagger 45 °,
Base, described base comprises the below being connected to lower spring cylinder, and has the little axle center hole and the macro-axis central hole concentric with little axle center hole that are communicated with interior circular hole;
And capping, described capping comprises the upper round platform coordinated with little axle center hole and the lower round platform coordinated with macro-axis central hole, and described upper round platform and lower round platform have through center pit and eccentric orfice.
As the further improvement of described agent structure, along in the first outer rectangular beam axially arranged, its length along the first axis is greater than its length along the second axle; Along in the second outer rectangular beam axially arranged, its length along the second axis side is greater than its length along the first axis; Along in the first outer rectangular beam axially arranged, its length along the second axis is it along more than 3 times of the 3rd axial length; Along in the second outer rectangular beam axially arranged, its length along the first axis is more than 3 times along the 3rd axial length;
In axially arranging along first in rectangular beam, its length along the first axis is greater than its length along the 3rd axis; In axially arranging along second in rectangular beam, its length along the second axis is greater than its length along the 3rd axis; In axially arranging along first in rectangular beam, its length along the 3rd axis is it along more than 3 times of the second axial length; In axially arranging along second in rectangular beam, its length along the 3rd axis is it along more than 3 times of the first axial length.
As the further improvement of described agent structure, described outer rectangular beam along the length of the 3rd axis, with axial arranged along first in length along the second axis in rectangular beam identical; Or described outer rectangular beam is along the length of the 3rd axis, with axial arranged along second in length along the first axis in rectangular beam identical;
Described interior rectangular beam is along the length of the 3rd axis, identical with along the length along the second axis in the first axial arranged outer rectangular beam, or described interior rectangular beam is identical with along the length along the first axis in the second axial arranged outer rectangular beam along the length of the 3rd axis;
As the further improvement of described agent structure, when described force-transmitting block is axially arranged along first, its thickness along the first axis is outer rectangular beam along more than 2 times of the 3rd axial length; Two sides of described force-transmitting block are concordant with two sides of corresponding outer rectangular beam, and outer rectangular beam is positioned at the central authorities of force-transmitting block along the 3rd axial length; The upper and lower surface of described force-transmitting block is concordant with two surfaces up and down of interior rectangular beam, and axial arranged along first in rectangular beam be positioned at the central authorities of corresponding force-transmitting block along the second axial length, in axial arranged along second, rectangular beam is positioned at the central authorities of corresponding force-transmitting block along the first axial length.
As the further improvement of described agent structure, part between two cut holes of same layer is brace table, described brace table is three layers, ground floor brace table is arranged between ground floor cut hole, second layer brace table is arranged between second layer cut hole, third layer brace table is arranged between third layer cut hole, the circumferential lengths of each described cut hole is more than 2 times of corresponding brace table circumferential lengths, and ground floor brace table and and the third layer brace table of its correspondence respectively along being positioned at first axially and the second axially setting.
As the further improvement of described agent structure, described upper resilient disc, lower spring cylinder and base are the integral structure that resilient material is made, and described capping coordinates with base machinery, and adopts laser spot welding to fix.
As the further improvement of described agent structure, when described capping loads base, the upper surface of described lower round platform is concordant with the upper surface of macro-axis central hole, and the upper surface of described upper round platform is lower than third layer cut hole.
The fiber grating six-dimension force sensor that the application provides, comprise the agent structure as described in above-mentioned any one and sensitive detection element, described sensitive detection element is fiber grating, between ground floor brace table and the third layer brace table up and down corresponding with it and the position being parallel to the 3rd axis is furnished with the first fiber grating (FBG1) respectively, second fiber grating (FBG2), 3rd fiber grating (FBG3) and the 4th fiber grating (FBG4), and the first fiber grating (FBG1) and the 3rd fiber grating (FBG3) be positioned at first axially and the 3rd axially planar, second fiber grating (FBG2) and the 4th fiber grating (FBG4) be positioned at second axially and the 3rd axially planar, be furnished with the 5th fiber grating (FBG5) and the 7th fiber grating (FBG7) of the radial direction setting of resilient disc on edge near the upper surface place of force-transmitting block at two outer rectangular beams along the first axis, be furnished with six fibers grating (FBG6) and the 8th fiber grating (FBG8) of the radial direction setting of resilient disc on edge near the upper surface place of force-transmitting block at two outer rectangular beams along the second axis, in any one, rectangular beam has been arranged symmetrically with the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) on the two sides of force-transmitting block,
If arranging the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) along on rectangular beam in the first axis, then the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) axial arranged for being parallel to first;
If arranging the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) along on rectangular beam in the second axis, then the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) axial arranged for being parallel to second;
The 11 fiber grating (FBG11) is furnished with in cavity; Axial arrangedly the 12 fiber grating (FBG12) is had along the 3rd in circular hole between central through hole and center pit.
As the further improvement of described fiber grating six-dimension force sensor, when first fiber grating (FBG1), the second fiber grating (FBG2), the 3rd fiber grating (FBG3) and the 4th fiber grating (FBG4) are in prestretched tensioned state, the optical fiber at its two ends is fixedly pasted on the outside surface of brace table; 5th fiber grating (FBG5), six fibers grating (FBG6), the 7th fiber grating (FBG7), the 8th fiber grating (FBG8), the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) are carved with grating place paste List; 11 fiber grating (FBG11) is in free state; When 12 fiber grating (FBG12) is for prestretched tensioned state, the optical fiber at its two ends is fixedly pasted in central through hole and center pit respectively; The distance of described 5th fiber grating (FBG5), six fibers grating (FBG6), the 7th fiber grating (FBG7), the 8th fiber grating (FBG8) distance the 3rd axial axis is equal; The distance of described 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) distance the 3rd axial axis is equal.
The measuring method for fiber grating six-dimension force sensor that the application provides, described fiber grating six-dimension force sensor adopts above-mentioned fiber grating six-dimension force sensor, the difference signal Δ λ of the wavelength shift of wherein said first fiber grating (FBG1) and the 3rd fiber grating (FBG3) 13=Δ λ 1-Δ λ 3, for measuring Fx signal; The difference signal Δ λ of the wavelength shift of the second fiber grating (FBG2) and the 4th fiber grating (FBG4) 24=Δ λ 2-Δ λ 4, for measuring Fy signal; The difference signal Δ λ of the wavelength shift of the 5th fiber grating (FBG5) and the 7th fiber grating (FBG7) 57=Δ λ 5-Δ λ 7, for measuring My signal; The difference signal Δ λ of the wavelength shift of six fibers grating (FBG6) and the 8th fiber grating (FBG8) 68=Δ λ 6-Δ λ 8, for measuring Mx signal; The difference signal Δ λ of the wavelength shift of the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) 910=Δ λ 9-Δ λ 10, for measuring Mz; The 12 fiber grating (FBG12) that after drawing prestretched by temperature test, stickup is fixed at two ends be in free state the 11 fiber grating (FBG11) temperature control coefficient ratio k after, the difference signal Δ λ of the wavelength shift of the 12 fiber grating (FBG12) and the wavelength shift of the 11 fiber grating (FBG11) of k times 1112=Δ λ 11-k* Δ λ 12, for measuring Fz.
The beneficial effect of the application is:
The agent structure of the fiber grating six-dimension force sensor that the application provides, compared with realizing the six-dimension force sensor without retinoic acid syndrome with the existing Complex Assembly by parts, agent structure symmetry of the present invention is good, is easy to processing and manufacturing.
The fiber grating six-dimension force sensor that the application provides, the quantity of its fiber grating element is only 12, and compared with generally needing 24 foil gauges with the sensor of strain ga(u)ge group bridge measuring principle, the quantity of sensitive element decreases one times.Meanwhile, optical wavelength information, as the output signal of sensor, has possessed electromagnetism interference, without advantages such as drifts.
The wavelength difference output information of six groups of fiber gratings that the measuring method that the application provides uses 12 fiber gratings to form, the coupling that automatically removes achieving six-dimensional force and torgue measurement information exports, and achieves temperature self-compensation.Therefore present invention decreases retinoic acid syndrome, achieve and measure three-dimensional force and three-dimensional moment from decoupling zero.
Accompanying drawing explanation
Fig. 1 is sensor one-piece construction schematic diagram of the present invention;
Fig. 2 looks overall composition schematic diagram at the bottom of sensor of the present invention;
Fig. 3 is the schematic diagram after sensor of the present invention assembling;
Fig. 4 is sensor vertical view of the present invention;
Fig. 5 is sensor front elevation of the present invention;
Fig. 6 is sensor elevational cross-sectional view of the present invention;
Fig. 7 is the fiber grating front elevational schematic that the lower spring cylinder of sensor is arranged;
Fig. 8 is the fiber grating schematic rear view that the lower spring cylinder of sensor is arranged;
Fig. 9 is the fiber grating schematic top plan view that the upper resilient disc of sensor is arranged;
Figure 10 be sensor fiber grating arrange face cross-sectional schematic
Have in the drawings: upper resilient disc 1, lower spring cylinder 2, base 3, capping 4, cylindrical ring body 11, outer rectangular beam 12, force-transmitting block 13, interior rectangular beam 14, interior annulus cylinder 15, cavity 16, central through hole 17, cut hole 21, brace table 22, middle thin-walled 23, interior circular hole 24, little axle center hole 31, macro-axis central hole 32, center pit 41, eccentric orfice 42, upper round platform 43, lower round platform 44.
Embodiment
By reference to the accompanying drawings the present invention is described in further detail below by embodiment.The application can realize with multiple different form, is not limited to the embodiment described by the present embodiment.There is provided the object of following embodiment to be convenient to the clearer understanding thoroughly of the application's disclosure, wherein the words of the indicating position such as upper and lower, left and right is only for shown structure position in respective figure.
But those skilled in the art may recognize that one or more detail describes and can be omitted, or can also adopt other method, assembly or material.In some instances, some embodiments do not describe or are not described later in detail.
In addition, technical characteristic described herein, technical scheme can also combine in one or more embodiments in any suitable manner.
Embodiment:
As shown in Figure 1, sensor comprises agent structure and sensitive detection element.
This agent structure comprises resilient disc 1, lower spring cylinder 2, base 3 and capping 4.
Wherein going up resilient disc 1, lower spring cylinder 2 and base 3 for integral type processes monolithic devices elastic construction, capping 4 is individual part, adopt laser spot welding to fix after coordinating with the hole below base 3, capping 4 only plays fixed fiber and draws the effect of tail optical fiber, and no elastic deformation's function.Fig. 3 be assembling, fixing after sensor schematic diagram.
As the sign in Fig. 1, agent structure has orthogonal first axially, second axially and the 3rd axially formed three-dimensional system of coordinate (namely with the center of circle of the bottom surface of base 3 for initial point 0 defines an XYZ three-dimensional system of coordinate, X-axis is the first axle, Y-axis is the second axle, Z axis is the 3rd axle), the symmetrical center line direction of cylindrical ring body 11 and interior annulus cylinder 15 is the 3rd axle.
Fig. 4 is sensor vertical view, the detailed structure illustrating resilient disc 1 and position relationship, and upper resilient disc 1 includes cylindrical ring body 11, outer rectangular beam 12, force-transmitting block 13, interior rectangular beam 14, interior annulus cylinder 15, cavity 16 and central through hole 17.
Wherein, outer rectangular beam 12, interior rectangular beam 14 and force-transmitting block 13 form beam assembly, and the present embodiment has four beam assemblies, and four beam assemblies are connected between the inwall of cylindrical ring body 11 and the outer wall of interior annulus cylinder 15, and difference 90 °, interval between four beam assemblies.
Cylindrical ring body 11 is provided with the threaded hole corresponding with outer rectangular beam 12 as loaded ring, and cylindrical ring body 11, outer rectangular beam 12, force-transmitting block 13, interior rectangular beam 14, interior annulus cylinder 15 connect successively.Four on all four outer rectangular beams 12 are arranged along X-axis or Y-axis respectively, and four completely the same interior rectangular beams 14 are arranged along X-axis or Y-axis respectively.Upper resilient disc 1 is about XOZ plane and YOZ plane symmetry.
Outer rectangular beam 12, interior rectangular beam 14 are thin-wall construction, and in the outer rectangular beam 12 that X-direction is arranged, its length along X-direction is greater than the length along Y-direction.In the outer rectangular beam 12 that Y direction is arranged, its length along Y direction is greater than length in X direction.In the outer rectangular beam 12 that X-direction is arranged, its length along Y direction is more than 3 times along Z-direction length.In the outer rectangular beam 12 that Y direction is arranged, its length along X-direction is it along more than 3 times of Z-direction thickness.
In arranging along X-direction in rectangular beam 14, its length along X-direction is greater than the length along Z-direction.In arranging along Y direction in rectangular beam 14, its length along Y direction is greater than the length along Z-direction.In arranging along X-direction in rectangular beam 14, its length along Z-direction is more than 3 times along Y direction length.In arranging along Y direction in rectangular beam 14, its length along Z-direction is more than 3 times along X-direction thickness.
Outer rectangular beam 12 to arrange along the length of Z-direction with along X-direction in rectangular beam 14 along the length of Y direction or in arranging along Y direction rectangular beam 14 identical along the length of X-direction.
Interior rectangular beam 14 along length and the outer rectangular beam 12 arranged along X-direction of Z-direction along the length of Y direction or the outer rectangular beam 12 arranged along Y direction identical along the length of X-direction.
The force-transmitting block 13 arranged along X-direction is consistent along the length of Y-axis with the force-transmitting block 13 arranged along Y direction along the length of X-axis, and is outer rectangular beam 12 along more than 2 times of length of Z-direction.Two sides of force-transmitting block 13 are concordant with two sides of outer rectangular beam 12, and outer rectangular beam 12 is positioned at the central authorities of force-transmitting block 13 along Z-direction height; The upper and lower surface of force-transmitting block 13 is concordant with two surfaces up and down of interior rectangular beam 14, and rectangular beam 14 is positioned at the central authorities of force-transmitting block 13 along Y direction length in arranging along X-direction, in arranging along Y direction, rectangular beam 14 is positioned at the central authorities of force-transmitting block 13 along X-direction length.
The wall thickness of interior annulus cylinder 15 is outer rectangular beam 12 along more than 3 times of the length of Z-direction; The upper surface of interior annulus cylinder 15 is concordant with the upper surface of interior rectangular beam 14; The bottom surface of outer annular round wall 11, force-transmitting block 13, interior rectangular beam 14, interior annulus cylinder 15 is concordant.
As shown in Figure 5, lower spring cylinder 2 includes cut hole 21, brace table 22, middle thin-walled 23, interior circular hole 24.Cut hole 21 has three layers from top to bottom vertically at equal intervals, and the cut hole 21 of every one deck has four, and circumferentially all has distribution; Ground floor cut hole 21 is corresponding with third layer cut hole about 21, and second layer cut hole 21 and ground floor cut hole 21 circumference stagger 45 °.Brace table 22 is the part between four cut holes 21 of every layer, and the circumferential lengths of cut hole 21 is more than 2 times of brace table 22 circumferential lengths; Ground floor brace table 22 and the third layer brace table 22 corresponding with it are arranged along X-axis and Y-axis respectively.The outer wall radial depressions of the part between ground floor cut hole 21 and third layer cut hole 21, makes its external diameter want less, forms thin-wall construction.Interior circular hole 24 runs through whole lower spring cylinder 2, and interior circular hole 24 is concordant with ground floor cut hole 21 topmost.
As shown in Figure 6, the center of base 3 is provided with little axle center hole 31, macro-axis central hole 32, and little axle center hole 31, with interior circular hole 24 is coaxial and diameter is identical, is same circular hole.
As shown in Figure 6, capping 4 leaves center pit 41, eccentric orfice 42, upper round platform 43, lower round platform 44, the external diameter of upper round platform 43 is identical with the internal diameter of the little axle center hole 31 of base 3 to be coordinated to realize machinery; The external diameter of lower round platform 44 is identical with the internal diameter of macro-axis central hole 32 to be coordinated to realize machinery, and the thickness of lower round platform 44 is less than the degree of depth of macro-axis central hole 32; After capping 4 coordinates with base 3, the upper surface of lower round platform 44 is concordant with the upper surface of macro-axis central hole 32, and the upper surface of upper round platform 43 is lower than the lower surface of third layer cut hole 21.
The sensitive detection element of sensor of the present invention is fiber grating, after the ad-hoc location of sensor elastic construction arranges fiber grating, utilizes the wavelength of fiber grating to export and measures three-dimensional force and three-dimensional moment.
As Fig. 7, shown in 8, between ground floor brace table 22 and the third layer brace table 22 corresponding up and down with it, be parallel to Z-direction be furnished with fiber grating first fiber grating (FBG1) respectively, second fiber grating (FBG2), 3rd fiber grating (FBG3) and the 4th fiber grating (FBG4), first fiber grating (FBG1) and the 3rd fiber grating (FBG3) are positioned at XOZ plane, second fiber grating (FBG2) and the 4th fiber grating (FBG4) are positioned at YOZ plane, first fiber grating (FBG1), second fiber grating (FBG2), 3rd fiber grating (FBG3) and the 4th fiber grating (FBG4) are all when being in prestretched tensioned state, the optical fiber at fiber grating two ends is fixed on the outside surface of brace table 22 by glass solder or adhesive.
Along X-direction two outer rectangular beams 12 near the upper surface place of force-transmitting block 13 along on resilient disc 1 radial arrangement the 5th fiber grating (FBG5) and the 7th fiber grating (FBG7), employing be grating place paste List; Similarly, fiber grating six fibers grating (FBG6) and the 8th fiber grating (FBG8) is had in resilient disc 1 radial arrangement on edge, the upper surface place of force-transmitting block 13 of two outer rectangular beams 12 along Y direction;
In any one, rectangular beam 14 is arranged symmetrically with fiber grating the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) on the two sides of force-transmitting block 13, and the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) are along the radial arrangement of upper resilient disc 1;
FBG11 is in free state and is arranged in cavity 16, the 12 fiber grating (FBG12) is had along Z axis axis arranged in circular hole 24 between central through hole 17 and center pit 41,12 fiber grating (FBG12) is when being in prestretched tensioned state, and the optical fiber at fiber grating two ends is fixed in central through hole 17 and center pit 41 by glass solder or adhesive.
The distance of the 5th fiber grating (FBG5), six fibers grating (FBG6), the 7th fiber grating (FBG7), the 8th fiber grating (FBG8) distance Z axis axis is equal, and the distance of the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) distance Z axis axis is equal.
As shown in Fig. 7,8,9,10, the tail end optical fiber of the first fiber grating (FBG1), upper end tail optical fiber enters inner circle hole 24 through after a certain cut hole 21 of ground floor, then draws through after the eccentric orfice 42 on capping 4, draws fiber-optic signal termination for one as sensor; the lower end tail optical fiber of the first fiber grating (FBG1) is connected with the lower end tail optical fiber of the second fiber grating (FBG2), the upper end tail optical fiber of the second fiber grating (FBG2) is connected with the upper end tail optical fiber of the 3rd fiber grating (FBG3), the lower end tail optical fiber of the 3rd fiber grating (FBG3) is connected with the lower end tail optical fiber of the 4th fiber grating (FBG4), the upper end tail optical fiber of the 4th fiber grating (FBG4) is connected with the left end tail optical fiber of the 5th fiber grating (FBG5) through after upper resilient disc 1, the right-hand member tail optical fiber of the 5th fiber grating (FBG5) is connected with the upper end tail optical fiber of six fibers grating (FBG6), the lower end tail optical fiber of six fibers grating (FBG6) is connected with the left end tail optical fiber of the 7th fiber grating (FBG7), the right-hand member tail optical fiber of the 7th fiber grating (FBG7) is connected with the lower end tail optical fiber of the 8th fiber grating (FBG8), the upper end tail optical fiber of the 8th fiber grating (FBG8) is connected with the upper end tail optical fiber of the 9th fiber grating (FBG9), the lower end tail optical fiber of the 9th fiber grating (FBG9) is connected with the lower end tail optical fiber of the tenth fiber grating (FBG10), the upper end tail optical fiber of the tenth fiber grating (FBG10) is connected with the upper end tail optical fiber of the 11 fiber grating (FBG11), the lower end tail optical fiber of the tenth fiber grating (FBG10) is connected with the upper end tail optical fiber of the 12 fiber grating (FBG12), the lower end tail optical fiber of the 12 fiber grating (FBG12) is drawn through after center pit 41, as another extraction fiber-optic signal termination of sensor.
The difference signal Δ λ of the wavelength shift of the first fiber grating (FBG1) and the 3rd fiber grating (FBG3) 13=Δ λ 1-Δ λ 3, for measuring Fx;
The difference signal Δ λ of the wavelength shift of the second fiber grating (FBG2) and the 4th fiber grating (FBG4) 24=Δ λ 2-Δ λ 4, for measuring Fy;
The difference signal Δ λ of the wavelength shift of the 5th fiber grating (FBG5) and the 7th fiber grating (FBG7) 57=Δ λ 5-Δ λ 7, for measuring My;
The difference signal Δ λ of the wavelength shift of six fibers grating (FBG6) and the 8th fiber grating (FBG8) 68=Δ λ 6-Δ λ 8, for measuring Mx;
The difference signal Δ λ of the wavelength shift of the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) 910=Δ λ 9-Δ λ 10, for measuring Mz
The 12 fiber grating (FBG12) that after drawing prestretched by temperature test, stickup is fixed at two ends be in free state the 11 fiber grating (FBG11) temperature control coefficient ratio k after, the difference signal Δ λ of the wavelength shift of the 12 fiber grating (FBG12) and the wavelength shift of the 11 fiber grating (FBG11) of k times 1112=Δ λ 11-k* Δ λ 12, for measuring Fz.
The principle that the present invention measures three-dimensional force and moment information from decoupling zero is as follows:
FBG1 and FBG3 is combined as a pair measuring unit, and the difference of FBG1, FBG3 wavelength shift separately exports power Fx for measuring x direction.The difference of FBG1, FBG3 wavelength shift exports only responsive to Fx, this be due to:
1. when there being the power Fx in x direction to act on the external annulus as loaded ring, FBG1 and FBG3 is in the distortion both sides of lower spring cylinder respectively, the wave length shift equal and opposite in direction of FBG1 and FBG3 but direction is contrary.Using the output signal of the difference of wavelength shift as measuring unit, not only increase measurement sensistivity, and, the wavelength brought by variation of ambient temperature in the same way, etc. value drift eliminate after difference;
2. and when there being the power Fy effect in y direction, FBG1, FBG3 are in the neutral line of lower spring cylinder, wavelength without drift, the difference no-output of FBG1 and FBG3 wavelength shift; When there being the power Fz effect in z direction, FBG1 and FBG3 wave length shift in the same way and equivalent, the difference no-output of FBG1 and FBG3 wavelength shift;
3. when there being the moment Mx effect around X-direction, distortion mainly concentrates in resilient disc along on the outer rectangular beam of Y-axis layout, lower spring cylinder distortion is not obvious, and the wave length shift of FBG1, FBG3 is insensitive to Mx, the difference no-output of FBG1 and FBG3 wavelength shift;
4. when there being the moment My effect around Y direction, distortion mainly concentrates in resilient disc along on the outer rectangular beam of X-axis layout, lower spring cylinder distortion is not obvious, and the wave length shift of FBG1, FBG3 is insensitive to My, the difference no-output of FBG1 and FBG3 wavelength shift;
5. when there being the moment Mz effect around Z-direction, distortion mainly concentrates on the interior rectangular beam in resilient disc, lower spring cylinder distortion is not obvious, the wave length shift of FBG1, FBG3 is insensitive to Mz, even if lower spring cylinder distortion has micro-torsional deflection, deformation state residing for FBG1 and FBG3 is also consistent, and wave length shift is consistent, the difference no-output of FBG1 and FBG3 wavelength shift;
Visible, the difference of the wavelength shift of the measuring unit of FBG1 and FBG3 composition exports and achieves measuring from decoupling zero only to Fx sensitivity.Identical analytical approach, by sensor along Z axis half-twist, the difference of the wavelength shift of the measuring unit of known FBG2 and FBG4 composition exports and can realize measuring from decoupling zero only to Fy sensitivity.
FBG5 and FBG7 is combined as a pair measuring unit, FBG5, FBG7 separately wavelength shift difference export for measuring the moment My around Y direction:
1. when have act on the external annulus as loaded ring around the moment My of Y direction time, two outer rectangular beam distortion along X-direction are obvious, FBG5 and FBG7 layout place produces the strain that size is identical, symbol is contrary, the wave length shift equal and opposite in direction of FBG5 and FBG7 but direction is contrary, the difference of wavelength shift is as the output signal of measuring unit, not only increase measurement sensistivity, and the wavelength brought by variation of ambient temperature in the same way, etc. value drift eliminate after difference;
2. and when having power Fx or the Fy effect in x or y direction, distortion mainly betides lower spring cylinder, upper resilient disc only plays the effect of transmitting force and without obviously distortion, the wave length shift of FBG5, FBG7 is insensitive to Fx and Fy, the difference no-output of FBG5 and FBG7 wavelength shift;
3., when there being the power Fz effect in z direction, four outer rectangular beam deformation tendency are consistent, and FBG5, FBG7 layout place produces the strain that size is identical, symbol is identical, wavelength shift no-output after difference process of FBG5 and FBG7;
4. when there being the moment Mx effect around X-direction, FBG5 with FBG7 place along X-direction two outer rectangular beams residing for deformation state consistent, FBG5, FBG7 produce identical wave length shift, wavelength shift no-output after difference process of FBG5 and FBG7;
5. when there being the moment Mz effect around Z-direction, two outer rectangular beams along X-direction at FBG5 and FBG7 place are without obvious distortion, even if produce faint distortion, the deformation state at FBG5, FBG7 layout place is also consistent, FBG5, FBG7 produce identical wave length shift, wavelength shift no-output after difference process of FBG5 and FBG7;
Visible, the difference of the wavelength shift of the measuring unit of FBG5 and FBG7 composition exports and achieves measuring from decoupling zero only to My sensitivity.Identical analytical approach, by sensor along Z axis half-twist, the difference of the wavelength shift of the measuring unit of known FBG6 and FBG8 composition exports and can realize measuring from decoupling zero only to Mx sensitivity.
FBG9 and FBG10 is combined as a pair measuring unit, FBG9, FBG10 separately wavelength shift difference export for measuring the moment Mz around Z-direction:
1. when have act on the external annulus as loaded ring around the moment Mz of Z-direction time, be furnished with the interior rectangular beam generation main deformation of FBG9 and FBG10, FBG9 and FBG10 layout place produces the strain that size is identical, symbol is contrary, the wave length shift equal and opposite in direction of FBG9 and FBG10 but direction is contrary, the difference of wavelength shift is as the output signal of measuring unit, improve measurement sensistivity, the wavelength brought by variation of ambient temperature in the same way, etc. value drift be also eliminated after difference;
2. and when having power Fx or Fy or the Fz effect in x or y or z direction, distortion mainly betides lower spring cylinder, upper resilient disc only plays the effect of transmitting force and without obviously distortion, the wave length shift of FBG9, FBG10 is insensitive to Fx, Fy and Fz, the difference no-output of FBG9 and FBG10 wavelength shift;
3. and when having around the moment Mx of X-axis or Y direction or My effect, the deformation state that FBG9, FBG10 layout place occurs is consistent, and FBG9, FBG10 produce identical wave length shift, wavelength shift no-output after difference process of FBG5 and FBG7;
Visible, the difference of the wavelength shift of the measuring unit of FBG9 and FBG10 composition exports and achieves measuring from decoupling zero only to Mz sensitivity.
FBG11 and FBG12 is combined as a pair measuring unit, for measuring the power Fz in z direction:
1. when the external annulus having the power Fz in z direction to act on as loaded ring, lower spring cylinder is out of shape along Z-direction, the FBG12 being arranged in lower spring cylinder axial centre produces wave length shift, the FBG11 being in free state provides temperature compensation for FBG12, by temperature test draw be in prestretched after the two ends FBG12 that fixes stickup be in free state FBG11 temperature control coefficient ratio k after, by the output signal of the difference of the wavelength shift of the wavelength shift of FBG12 and k FBG11 doubly as measuring unit, measure Fz, difference output signal eliminates the wave length shift of the FBG12 brought by variation of ambient temperature,
2. and when there be power Fx along x or y direction or Fy, and when the moment Mx of X-axis or Y direction or My effect, FBG12 is in the axle center of lower spring cylinder, on neuter curved surface, does not deform, and FBG12 wavelength is without drift;
3. when there being the moment Mz effect around Z-direction, lower spring cylinder distortion is not obvious, even if lower spring cylinder has micro-torsional deflection, also do not produce FBG12 and stretch or compression, FBG12 wavelength is without drift value;
Visible, the output of the measuring unit of FBG11 and FBG12 composition achieves measuring from decoupling zero only to Fz sensitivity.
Above content is in conjunction with concrete embodiment further description made for the present invention, can not assert that specific embodiment of the invention is confined to these explanations.For general technical staff of the technical field of the invention, without departing from the inventive concept of the premise, some simple deduction or replace can also be made.

Claims (10)

1. an agent structure for fiber grating six-dimension force sensor, is characterized in that, comprising:
Upper resilient disc, described upper resilient disc comprises cylindrical ring body, four beam assemblies and interior annulus cylinder body concentric with outer toroid, described agent structure has orthogonal first axis, the second axis and the 3rd axially forms three-dimensional system of coordinate, the symmetrical center line direction of described cylindrical ring body and interior annulus cylinder is the 3rd axle, described four beam assemblies are connected between the inwall of cylindrical ring body and the outer wall of interior annulus cylinder, and difference 90 °, interval between four beam assemblies, wherein two beam assemblies are arranged along the second direction of principal axis, and another two beam assemblies are axially arranged along first; The force-transmitting block that described beam assembly comprises the outer rectangular beam being connected to cylindrical ring body, the interior rectangular beam being connected to interior annulus cylinder and is connected between the two;
Lower spring cylinder, described lower spring cylinder is connected to the below of interior annulus cylinder, and described interior annulus cylinder has cavity, and described lower spring cylinder has interior circular hole, and described cavity is communicated with interior circular hole by central through hole, described lower spring cylinder offers three layers of cut hole group along the 3rd axial arranging, every layer of cut hole group comprises the through cut hole of four radial directions and is all uniformly distributed circumferentially, in the middle part of the outer wall of described spring cylinder, radial depressions forms middle thin-walled, ground floor cut hole is positioned at the top of middle thin-walled, and the top of described interior circular hole is concordant with the top of ground floor cut hole, described second layer cut hole is positioned on middle thin-walled, third layer cut hole is positioned at the below of middle thin-walled, described ground floor cut hole and third layer cut hole position one_to_one corresponding, described second layer cut hole and ground floor cut hole circumferentially stagger 45 °,
Base, described base comprises the below being connected to lower spring cylinder, and has the little axle center hole and the macro-axis central hole concentric with little axle center hole that are communicated with interior circular hole;
And capping, described capping comprises the upper round platform coordinated with little axle center hole and the lower round platform coordinated with macro-axis central hole, and described upper round platform and lower round platform have through center pit and eccentric orfice.
2. agent structure according to claim 1, is characterized in that: along in the first outer rectangular beam axially arranged, and its length along the first axis is greater than its length along the second axle; Along in the second outer rectangular beam axially arranged, its length along the second axis side is greater than its length along the first axis; Along in the first outer rectangular beam axially arranged, its length along the second axis is it along more than 3 times of the 3rd axial length; Along in the second outer rectangular beam axially arranged, its length along the first axis is more than 3 times along the 3rd axial length;
In axially arranging along first in rectangular beam, its length along the first axis is greater than its length along the 3rd axis; In axially arranging along second in rectangular beam, its length along the second axis is greater than its length along the 3rd axis; In axially arranging along first in rectangular beam, its length along the 3rd axis is it along more than 3 times of the second axial length; In axially arranging along second in rectangular beam, its length along the 3rd axis is it along more than 3 times of the first axial length.
3. agent structure according to claim 2, is characterized in that: described outer rectangular beam along the length of the 3rd axis, with axial arranged along first in length along the second axis in rectangular beam identical; Or described outer rectangular beam is along the length of the 3rd axis, with axial arranged along second in length along the first axis in rectangular beam identical;
Described interior rectangular beam is along the length of the 3rd axis, identical with along the length along the second axis in the first axial arranged outer rectangular beam, or described interior rectangular beam is identical with along the length along the first axis in the second axial arranged outer rectangular beam along the length of the 3rd axis.
4. agent structure according to claim 3, is characterized in that: when described force-transmitting block is axially arranged along first, and its thickness along the first axis is outer rectangular beam along more than 2 times of the 3rd axial length; Two sides of described force-transmitting block are concordant with two sides of corresponding outer rectangular beam, and outer rectangular beam is positioned at the central authorities of force-transmitting block along the 3rd axial length; The upper and lower surface of described force-transmitting block is concordant with two surfaces up and down of interior rectangular beam, and axial arranged along first in rectangular beam be positioned at the central authorities of corresponding force-transmitting block along the second axial length, in axial arranged along second, rectangular beam is positioned at the central authorities of corresponding force-transmitting block along the first axial length.
5. agent structure according to claim 4, it is characterized in that: the part between two cut holes of same layer is brace table, described brace table is three layers, ground floor brace table is arranged between ground floor cut hole, second layer brace table is arranged between second layer cut hole, third layer brace table is arranged between third layer cut hole, the circumferential lengths of each described cut hole is more than 2 times of corresponding brace table circumferential lengths, and ground floor brace table and and the third layer brace table of its correspondence respectively along being positioned at first axially and the second axially setting.
6. agent structure according to claim 5, is characterized in that: described upper resilient disc, lower spring cylinder and base are the integral structure that resilient material is made, and described capping coordinates with base machinery, and adopts laser spot welding to fix.
7. agent structure according to claim 6, is characterized in that: when described capping loads base, the upper surface of described lower round platform is concordant with the upper surface of macro-axis central hole, and the upper surface of described upper round platform is lower than third layer cut hole.
8. a fiber grating six-dimension force sensor, it is characterized in that, comprise the agent structure as described in any one of claim 1-8 and sensitive detection element, described sensitive detection element is fiber grating, between ground floor brace table and the third layer brace table up and down corresponding with it and the position being parallel to the 3rd axis is furnished with the first fiber grating (FBG1) respectively, second fiber grating (FBG2), 3rd fiber grating (FBG3) and the 4th fiber grating (FBG4), and the first fiber grating (FBG1) and the 3rd fiber grating (FBG3) be positioned at first axially and the 3rd axially planar, second fiber grating (FBG2) and the 4th fiber grating (FBG4) be positioned at second axially and the 3rd axially planar, be furnished with the 5th fiber grating (FBG5) and the 7th fiber grating (FBG7) of the radial direction setting of resilient disc on edge near the upper surface place of force-transmitting block at two outer rectangular beams along the first axis, be furnished with six fibers grating (FBG6) and the 8th fiber grating (FBG8) of the radial direction setting of resilient disc on edge near the upper surface place of force-transmitting block at two outer rectangular beams along the second axis, in any one, rectangular beam has been arranged symmetrically with the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) on the two sides of force-transmitting block,
If arranging the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) along on rectangular beam in the first axis, then the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) axial arranged for being parallel to first;
If arranging the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) along on rectangular beam in the second axis, then the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) axial arranged for being parallel to second;
The 11 fiber grating (FBG11) is furnished with in cavity; Axial arrangedly the 12 fiber grating (FBG12) is had along the 3rd in circular hole between central through hole and center pit.
9. fiber grating six-dimension force sensor according to claim 8, it is characterized in that: the first fiber grating (FBG1), the second fiber grating (FBG2), the 3rd fiber grating (FBG3) and the 4th fiber grating (FBG4) are in prestretched tensioned state, and the optical fiber at its two ends is fixedly pasted on the outside surface of brace table; 5th fiber grating (FBG5), six fibers grating (FBG6), the 7th fiber grating (FBG7), the 8th fiber grating (FBG8), the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) are carved with grating place paste List; 11 fiber grating (FBG11) is in free state; 12 fiber grating (FBG12) is prestretched tensioned state, and the optical fiber at its two ends is fixedly pasted in central through hole and center pit respectively; The distance of described 5th fiber grating (FBG5), six fibers grating (FBG6), the 7th fiber grating (FBG7), the 8th fiber grating (FBG8) distance the 3rd axial axis is equal; The distance of described 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) distance the 3rd axial axis is equal.
10. the measuring method for fiber grating six-dimension force sensor, it is characterized in that, described fiber grating six-dimension force sensor adopts the fiber grating six-dimension force sensor described in claim 8 or 9, the difference signal Δ λ of the wavelength shift of wherein said first fiber grating (FBG1) and the 3rd fiber grating (FBG3) 13=Δ λ 1-Δ λ 3, for measuring Fx signal; The difference signal Δ λ of the wavelength shift of the second fiber grating (FBG2) and the 4th fiber grating (FBG4) 24=Δ λ 2-Δ λ 4, for measuring Fy signal; The difference signal Δ λ of the wavelength shift of the 5th fiber grating (FBG5) and the 7th fiber grating (FBG7) 57=Δ λ 5-Δ λ 7, for measuring My signal; The difference signal Δ λ of the wavelength shift of six fibers grating (FBG6) and the 8th fiber grating (FBG8) 68=Δ λ 6-Δ λ 8, for measuring Mx signal; The difference signal Δ λ of the wavelength shift of the 9th fiber grating (FBG9) and the tenth fiber grating (FBG10) 910=Δ λ 9-Δ λ 10, for measuring Mz; The 12 fiber grating (FBG12) that after drawing prestretched by temperature test, stickup is fixed at two ends be in free state the 11 fiber grating (FBG11) temperature control coefficient ratio k after, the difference signal Δ λ of the wavelength shift of the 12 fiber grating (FBG12) and the wavelength shift of the 11 fiber grating (FBG11) of k times 1112=Δ λ 11-k* Δ λ 12, for measuring Fz.
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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101419102A (en) * 2008-11-25 2009-04-29 中国科学院合肥物质科学研究院 Ultrathin six-dimensional force sensor and method thereof for measuring three-dimensional force and three-dimensional moment information
CN101672705A (en) * 2009-09-29 2010-03-17 西北工业大学 Six-dimensional force sensor
CN201561825U (en) * 2009-09-29 2010-08-25 西北工业大学 Elastomer of six-dimensional force sensor
CN102095534A (en) * 2010-12-08 2011-06-15 上海交通大学 Double rood beam high-sensitivity six-dimensional moment sensor
US20120079868A1 (en) * 2010-10-05 2012-04-05 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Calibration method for multi-component force measuring spindle unit used in tire testing machine
CN202720078U (en) * 2012-05-29 2013-02-06 宁波柯力传感科技股份有限公司 Strain type six-dimensional force sensor
US20130247657A1 (en) * 2012-03-22 2013-09-26 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Multi-component force measurement spindle unit of tire testing machine
WO2013169056A1 (en) * 2012-05-10 2013-11-14 전자부품연구원 Force torque sensor, force torque sensor frame, and force torque measurement method
CN103528726A (en) * 2013-11-01 2014-01-22 哈尔滨工业大学 Cross-beam-type six-dimensional force sensor with overload protection function

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101419102A (en) * 2008-11-25 2009-04-29 中国科学院合肥物质科学研究院 Ultrathin six-dimensional force sensor and method thereof for measuring three-dimensional force and three-dimensional moment information
CN101672705A (en) * 2009-09-29 2010-03-17 西北工业大学 Six-dimensional force sensor
CN201561825U (en) * 2009-09-29 2010-08-25 西北工业大学 Elastomer of six-dimensional force sensor
US20120079868A1 (en) * 2010-10-05 2012-04-05 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Calibration method for multi-component force measuring spindle unit used in tire testing machine
CN102095534A (en) * 2010-12-08 2011-06-15 上海交通大学 Double rood beam high-sensitivity six-dimensional moment sensor
US20130247657A1 (en) * 2012-03-22 2013-09-26 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Multi-component force measurement spindle unit of tire testing machine
WO2013169056A1 (en) * 2012-05-10 2013-11-14 전자부품연구원 Force torque sensor, force torque sensor frame, and force torque measurement method
CN202720078U (en) * 2012-05-29 2013-02-06 宁波柯力传感科技股份有限公司 Strain type six-dimensional force sensor
CN103528726A (en) * 2013-11-01 2014-01-22 哈尔滨工业大学 Cross-beam-type six-dimensional force sensor with overload protection function

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