CN113848011A - Structural decoupling type six-dimensional force sensor and measuring method thereof - Google Patents
Structural decoupling type six-dimensional force sensor and measuring method thereof Download PDFInfo
- Publication number
- CN113848011A CN113848011A CN202111117044.9A CN202111117044A CN113848011A CN 113848011 A CN113848011 A CN 113848011A CN 202111117044 A CN202111117044 A CN 202111117044A CN 113848011 A CN113848011 A CN 113848011A
- Authority
- CN
- China
- Prior art keywords
- fiber grating
- rectangular beam
- fiber
- layer
- delta lambda
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 13
- 239000000835 fiber Substances 0.000 claims abstract description 137
- 230000000712 assembly Effects 0.000 claims abstract description 14
- 238000000429 assembly Methods 0.000 claims abstract description 14
- 238000012546 transfer Methods 0.000 claims description 20
- 230000005540 biological transmission Effects 0.000 claims description 15
- 230000008569 process Effects 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000001514 detection method Methods 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 description 19
- 102100022115 F-box only protein 27 Human genes 0.000 description 8
- 101000824171 Homo sapiens F-box only protein 27 Proteins 0.000 description 8
- 102100022116 F-box only protein 2 Human genes 0.000 description 7
- 102100026080 F-box only protein 44 Human genes 0.000 description 7
- 101000824158 Homo sapiens F-box only protein 2 Proteins 0.000 description 7
- 101000913298 Homo sapiens F-box only protein 44 Proteins 0.000 description 7
- 230000006872 improvement Effects 0.000 description 7
- 238000012545 processing Methods 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 230000004323 axial length Effects 0.000 description 5
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 102100038032 F-box only protein 17 Human genes 0.000 description 4
- 102100024513 F-box only protein 6 Human genes 0.000 description 4
- 101000878584 Homo sapiens F-box only protein 17 Proteins 0.000 description 4
- 101001052796 Homo sapiens F-box only protein 6 Proteins 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 238000011896 sensitive detection Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/166—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using photoelectric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
- G01L1/246—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre using integrated gratings, e.g. Bragg gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention provides a structural decoupling type six-dimensional force sensor and a measuring method thereof, wherein the structural decoupling type six-dimensional force sensor comprises a spherical limiting cover, an upper annular body, a lower annular body, eight beam assemblies, a central hemispherical rotating body and a base; the upper and lower tourus is two-layer about being and rotates continuously with central hemisphere through four roof beam subassemblies respectively, is equipped with on the base and rotates assorted recess and link to each other with lower tourus with central hemisphere, and the spacing lid of spheroid rotates the restriction of central hemisphere in its inboard and the recess of base and links to each other with the base, makes power and moment act on elastic beam about respectively through the rotation that the hemisphere rotated, and then has realized the decoupling zero output of six-dimensional power and moment measured information. Compared with the traditional sliding decoupling structure, the main structure has good symmetry, is easy to process and manufacture, has overload protection capability, and effectively solves the problem of improper contact force in the sliding process. The invention adopts the fiber bragg grating as a strain detection element, and has the advantages of electromagnetic interference resistance, small appearance, easy reuse and the like.
Description
Technical Field
The invention relates to a structural decoupling type six-dimensional force sensor and a measuring method thereof, belonging to the field of sensors.
Background
The six-dimensional force/moment sensor is a force sensor capable of simultaneously measuring a three-dimensional orthogonal force and a three-dimensional orthogonal moment in space, and is a new sensor which appears along with the development of the robot technology since the 70 th of the 20 th century. The six-dimensional force/moment sensor was initially studied to enable robots to be applied to more complex tasks, and was later applied to various fields of civil engineering, aerospace, national defense and military, machining, automobile manufacturing, medical instruments, and the like. With the continuous development of industrial informatization, the six-dimensional force/torque sensor needs to meet the requirements of more and more diversified tasks under various scenes, so that the requirements of the multi-dimensional force sensor are higher and higher.
The high cross sensitivity between different axes caused by coupling interference between different dimensions of an early sensor structure can influence the accuracy of the sensor to a great extent, so that a complex calibration test and a decoupling algorithm are required to obtain a decoupling matrix, and the speed of obtaining a result is influenced. Designing a special structure to minimize the inherent coupling of the sensor is therefore an urgent problem to be solved.
The structure design of the prior six-dimensional force sensor for improving the precision and the sensitivity of the sensor and reducing the influence of coupling among dimensions generally has the problems of complex structure, difficult processing and assembly, low structure safety, improper contact force and the like; for example, chinese patent CN208867192U and chinese patent CN 103487194 a adopt a space orthogonal structure to reduce coupling, but have the disadvantages of complex structure and complex processing and assembly; the Chinese patent CN 105181193A and the Chinese patent CN 208595994U are decoupled by adding a flexible thin-wall cylinder and a flexible hinge in the structure, but have the problems of poor safety, no overload protection and easy damage of a sensor; chinese patent CN 104048790 a and chinese patent CN 102095534 a adopt a relative sliding structure to achieve decoupling, but the relative displacement of such rectangular grooves can generate additional force to affect the decoupling effect due to improper contact such as deflection, so further improvement is still needed for the main structure.
The six-dimensional force sensor has a simple and compact structure, realizes the decoupling of force and moment, has overload protection capability and has a very wide application prospect.
Disclosure of Invention
The present invention is directed to a six-dimensional force sensor and a main structure thereof to solve the above problems. Meanwhile, a measuring method of the fiber grating six-dimensional force sensor is also provided.
The purpose of the invention is realized as follows: the spherical structure comprises a central hemispherical swivel, a beam assembly and two ring bodies which are arranged up and down, wherein the beam assembly is divided into an upper layer and a lower layer which are respectively connected between the inner walls of the two ring bodies and the outer wall of the central hemispherical swivel, each layer of beam assembly is arranged at equal intervals, the beam assembly comprises an outer rectangular beam connected with the ring bodies, an inner rectangular beam connected with the central hemispherical swivel and a force transmission block connected with the outer rectangular beam and the inner rectangular beam, the base is arranged below the central hemispherical swivel, and a groove matched with the central hemispherical swivel is formed in the center of the base; the inner side shape of the spherical limiting cover is matched with the central hemispherical rotating body, and the beam assembly is provided with a fiber grating.
The invention also includes such structural features:
1. the beam assemblies are eight and are arranged in two layers, and the included angle between the beam assemblies on each layer is 90 degrees.
2. The inner and outer rectangular beams of each beam assembly are arranged vertically.
3. The arrangement of the fiber grating on the beam assembly means that: the rectangular beam in the upper layer is respectively provided with a first fiber grating, a second fiber grating, a third fiber grating and a fourth fiber grating, the rectangular beam in the lower layer is respectively provided with a fifth fiber grating, a sixth fiber grating, a seventh fiber grating and an eighth fiber grating, the two side surfaces of any one lower layer of outer rectangular beam, which are close to the force transfer block, are symmetrically provided with a ninth fiber grating and a tenth fiber grating, and the rectangular beam in the upper layer is provided with an eleventh fiber grating and a twelfth fiber grating.
4. Firstly, applying force or moment on an upper-layer ring body by taking the center of the upper surface of a central hemispherical rotating body as a reference point, then leading the central reflection wavelengths of first to twelfth fiber gratings to shift due to the stress deformation of a structure, measuring the shift amount of each wavelength, and finally calculating the applied force or moment according to the shift amount of the wavelength, wherein a difference signal delta lambda 13 of the wavelength shift amounts of the first fiber grating and the third fiber grating is delta lambda 1-delta lambda 3 and is used for calculating an Fx signal; a difference signal delta lambda 24 of the wavelength drift amounts of the second fiber grating and the fourth fiber grating is delta lambda 2-delta lambda 4 and is used for calculating an Fy signal; a difference signal delta lambda 57 of the wavelength drift amounts of the fifth fiber bragg grating and the seventh fiber bragg grating is delta lambda 5-delta lambda 7 and is used for calculating a My signal; a difference signal delta lambda 68 of the wavelength drift amounts of the sixth fiber grating and the eighth fiber grating is delta lambda 6-delta lambda 8 and is used for calculating an Mx signal; a difference signal Δ λ 910 of the wavelength drift amounts of the ninth fiber grating and the tenth fiber grating is Δ λ 9- Δ λ 10, which is used for calculating Mz; the sum signal Δ λ 1112 of the wavelength drift amount of the twelfth fiber grating and the wavelength drift amount of the eleventh fiber grating is Δ λ 11+ Δ λ 12, and is used to calculate Fz.
Compared with the prior art, the invention has the beneficial effects that: the invention is different from the existing six-dimensional force sensor adopting decoupling means such as double cross beams, elastic hinges and the like, combines the thought of a sliding structure on the basis of the traditional cross beam structure, does not generate extra errors caused by improper contact by using the three-dimensional rotation of a spherical structure, realizes the decoupling requirement, and has compact integral structure, good symmetry, easy processing and assembly and strong universality.
The main structure of the invention adopts the overload protection device, and a certain distance exists between the upper elastomer and the lower elastomer, between the beam structure and the ball limiting cover, so as to limit the failure of the sensor when the deformation is overlarge.
The fiber grating six-dimensional force sensor provided by the invention has the advantages that the number of the fiber grating elements is only 12, and compared with a sensor of a resistance strain gauge bridge measurement principle which generally needs 24 strain gauges, the number of the sensitive elements is reduced by one time. Meanwhile, the optical wavelength information is used as an output signal of the sensor, and the sensor has the advantages of electromagnetic interference resistance, small appearance, easiness in multiplexing and the like.
The measuring method provided by the application uses the wavelength value output information of six groups of fiber gratings consisting of 12 fiber gratings, and realizes the automatic decoupling output of six-dimensional force and moment measuring information. Therefore, the invention reduces the inter-dimensional coupling and realizes the self-decoupling measurement of the three-dimensional force and the three-dimensional moment.
Drawings
FIG. 1 is a schematic diagram of the overall construction of the sensor of the present invention;
FIG. 2 is a front view of the sensor of the present invention;
FIG. 3 is a spherical structure of the sensor of the present invention;
FIG. 4 is a schematic view of a sensor mount of the present invention;
FIG. 5 is a schematic view of a sensor sphere retaining cap of the present invention;
FIG. 6 is a schematic diagram of a fiber grating arrangement of an upper beam of the sensor;
fig. 7 is a schematic view of a fiber grating arrangement of the lower beam of the sensor.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
The invention comprises the following steps:
the spherical structure comprises a central hemispherical rotating body, an upper beam assembly, a lower beam assembly and two annular bodies, the main structure is provided with a first axial direction, a second axial direction and a third axial direction which are perpendicular to each other to form a three-dimensional coordinate system, the direction of the symmetrical center line of the outer annular body and the central hemispherical rotating body is the third axial direction, the eight beam assemblies are connected between the inner wall of the outer annular body and the outer wall of the central spherical body in an upper layer and a lower layer, the four beam assemblies in each layer are respectively spaced by 90 degrees, two beam assemblies in each layer are arranged along the direction of the second axial direction, and the other two beam assemblies are arranged along the first axial direction; the beam assembly comprises an outer rectangular beam connected with the outer annular body, an inner rectangular beam connected with the inner annular cylinder and a force transmission block connected between the outer rectangular beam and the inner rectangular beam;
the base comprises a groove which is connected below the central sphere and is matched with the central sphere in the center;
and the spherical limiting cover comprises four same parts, and the shapes of the inner sides of the four same parts are matched with the shape of a sphere.
As a further improvement of the main body structure, the length of the outer rectangular beam in the first axial direction of the upper layer is greater than that in the second axial direction, and the length in the second axial direction is more than 3 times of that in the third axial direction; the length of the outer rectangular beam in the second axial direction of the upper layer is greater than that of the outer rectangular beam in the first axial direction; the length of the first axial direction is more than 3 times of the length of the third axial direction; in the internal rectangular beam arranged on the upper layer along the first axial direction, the length of the internal rectangular beam along the first axial direction is greater than that of the internal rectangular beam along the third axial direction, and the length of the internal rectangular beam along the third axial direction is more than 3 times of that of the internal rectangular beam along the second axial direction; the length of the upper layer in the inner rectangular beam arranged along the second axial direction is greater than that of the upper layer in the third axial direction; the length of the bearing in the third axial direction is more than 3 times of the length of the bearing in the first axial direction. In the outer rectangular beam arranged along the first axial direction, the length of the lower layer along the first axial direction is greater than that along the second axial direction, and the length of the lower layer along the third axial direction is more than 3 times of that along the second axial direction; in the outer rectangular beam arranged along the second axial direction of the lower layer, the length of the outer rectangular beam along the second axial direction is greater than that of the outer rectangular beam along the first axial direction, and the length of the outer rectangular beam along the third axial direction is more than 3 times of that along the first axial direction; in the inner rectangular beam arranged along the first axial direction, the length of the lower layer along the first axial direction is greater than that along the third axial direction, and the length of the lower layer along the second axial direction is more than 3 times of that along the third axial direction; in the inner rectangular beam arranged along the second axial direction of the lower layer, the length of the inner rectangular beam along the second axial direction is larger than that along the third axial direction, and the length of the inner rectangular beam along the first axial direction is more than 3 times of that along the third axial direction.
As a further improvement of the main body structure, the whole structure of the upper layer inner and outer rectangular beams is twice of the size of the lower layer inner and outer rectangular beams;
as a further improvement of the main body structure, when the force transfer block is arranged along the first axial direction, the thickness of the force transfer block along the first axial direction is more than 2 times of the length of the upper-layer outer rectangular beam along the third axial direction and more than 2 times of the length of the lower-layer outer rectangular beam along the second axial direction; two side surfaces of the force transfer block are flush with two side surfaces of the corresponding outer rectangular beams, the upper outer rectangular beam is positioned in the center of the force transfer block along the third axial length, and the lower outer rectangular beam is positioned in the center of the force transfer block along the second axial length; two side surfaces of the force transfer block are flush with two side surfaces of the inner rectangular beam, the upper-layer inner rectangular beam is positioned in the center of the force transfer block along the second axial length, and the lower-layer inner rectangular beam is positioned in the center of the force transfer block along the third axial length;
as the further improvement of the main body structure, the central ball body, the beam assembly and the ring body are of an integrated structure made of elastic materials, and the ball body limiting cover is mechanically matched with the base and fixed by laser spot welding.
As a further improvement of the main body structure, when the spherical limiting cover is connected with the base, the distance between the spherical limiting cover and the force transmission block is half of the second axial length of the force transmission block;
the application provides a fiber grating six-dimensional force sensor, include above-mentioned any one major structure and sensitive detection element, sensitive detection element is fiber grating, has arranged first fiber grating FBG1, second fiber grating FBG2, third fiber grating FBG3 and fourth fiber grating FBG4 respectively at the rectangle roof beam in the upper strata, and first fiber grating FBG1 and third fiber grating FBG3 lie in the first axial inboard rectangle roof beam upside place plane, second fiber grating FBG2 and fourth fiber grating FBG4 lie in the second axial inboard rectangle roof beam upside place plane; the fifth fiber bragg grating FBG5, the sixth fiber bragg grating FBG6, the seventh fiber bragg grating FBG7 and the eighth fiber bragg grating FBG8 are respectively arranged on the rectangular beam in the lower layer, the fifth fiber bragg grating FBG5 and the seventh fiber bragg grating FBG7 are located in a plane where the side face of the rectangular beam in the first axial direction is located, and the sixth fiber bragg grating FBG6 and the eighth fiber bragg grating FBG8 are located in a plane where the side face of the rectangular beam in the second axial direction is located;
a ninth fiber bragg grating FBG9 and a tenth fiber bragg grating FBG10 are symmetrically arranged on two side faces, close to the force transmission block, of any one of the lower-layer outer rectangular beams;
if the ninth and tenth FBGs 9, 10 are arranged on the lower inner rectangular beam in the first axial direction, the ninth and tenth FBGs 9, 10 are arranged parallel to the first axial direction;
if the ninth and tenth FBGs 9, 10 are arranged on the lower inner rectangular beam in the second axial direction, the ninth and tenth FBGs 9, 10 are arranged parallel to the second axial direction;
the eleventh fiber bragg grating FBG11 and the twelfth fiber bragg grating FBG12 are arranged on the rectangular beam outside the upper layer and are positioned in the plane of the first axial direction and the third axial direction of the rectangular beam outside the upper layer
As a further improvement of the fiber grating six-dimensional force sensor, the grating positions engraved on the first to twelfth fiber gratings FBG1-FBG12) are all adhered;
as shown in fig. 1, the sensor includes a body structure and a sensitive detection element.
The main body structure comprises a sphere structure 1, a base 2 and a sphere limiting cover 3.
Wherein spheroid structure 1 is the integral type elastic construction that forms as an organic whole processing, and base 2 and the spacing lid 3 of spheroid are independent parts, adopt laser spot welding fixed after the outer ring body 8 cooperation with spheroid structure 1 lower floor, and the spacing lid 3 of spheroid only plays the effect of the central hemisphere of restriction spheroid structure 1 and turns 6, and does not have the elastic deformation function. FIG. 1 is a schematic view of the assembled, secured sensor.
As indicated in fig. 1, the main body structure has a first axial direction, a second axial direction and a third axial direction perpendicular to each other to form a three-dimensional coordinate system (i.e., an XYZ three-dimensional coordinate system is defined by using the center of the bottom surface of the base 2 as an origin 0, the X axis is the first axis, the Y axis is the second axis, and the Z axis is the third axis), and the directions of the symmetry center lines of the upper outer annular body 7 and the central hemispherical rotating body 6 are the third axes.
Fig. 3 is a schematic diagram of a central sphere of the sensor, which shows the structure and position relationship of the upper elastic disk 4 in detail, and the upper elastic disk 4 includes an upper outer annular ring 7, an upper outer rectangular beam 9, a force transfer block 10, and an upper inner rectangular beam 11. The structure and the position relation of the lower elastic disc 5, the lower elastic disc 5 comprises a lower layer outer annular ring body 8, a lower layer outer rectangular beam 12, a force transmission block 10 and a lower layer inner rectangular beam 14.
The upper layer beam assembly is composed of an upper layer outer rectangular beam 9, an upper layer inner rectangular beam 11 and a force transmission block 10, the lower layer outer rectangular beam 9, the lower layer inner rectangular beam 11 and the force transmission block 10 are composed of a lower layer beam assembly, eight beam assemblies are arranged in the embodiment, the upper layer four beam assemblies are connected between the inner wall of the outer annular body 7 and the outer wall of the central hemispherical rotating body 6, the lower layer four beam assemblies are connected between the inner wall of the lower layer outer annular body 8 and the outer wall of the central hemispherical rotating body 6, the four beam assemblies on each layer are respectively spaced by 90 degrees, and a certain distance exists between the upper layer elastic disc and the lower layer elastic disc.
The upper layer outer ring body 7 is provided with a threaded hole corresponding to the upper layer outer rectangular beam 9 as a loading ring, the outer rectangular beams are respectively arranged along the X axis or the Y axis, and the inner rectangular beams are respectively arranged along the X axis or the Y axis. The upper elastic disc 4 is symmetrical to the lower elastic disc 5 about the XOZ plane as well as the YOZ plane.
The upper layer outer rectangular beam 9, the upper layer inner rectangular beam 11, the lower layer outer rectangular beam 12 and the lower layer inner rectangular beam 14 are all thin-walled structures, the length of the upper layer outer rectangular beam 9 in the Y-axis direction is greater than that in the Y-axis direction, and the length of the upper layer outer rectangular beam in the Y-axis direction is more than 3 times of that in the Z-axis direction; in the upper outer rectangular beam 9 arranged along the Y-axis direction, the length of the upper outer rectangular beam along the Y-axis direction is greater than that along the X-axis direction; the length of the X-axis direction is more than 3 times of the length of the Z-axis direction; in the upper-layer inner rectangular beam 11 arranged along the X-axis direction, the length along the X-axis direction is greater than the length along the Z-axis direction, and the length along the Z-axis direction is more than 3 times of the length along the Y-axis direction; in the upper-layer inner rectangular beam 11 arranged along the Y-axis direction, the length of the upper-layer inner rectangular beam along the Y-axis direction is greater than that of the upper-layer inner rectangular beam along the Z-axis direction; the length of the X-axis direction is more than 3 times of the length of the X-axis direction. In the lower-layer outer rectangular beam 12 arranged along the Y-axis direction, the length along the X-axis direction is greater than the length along the Y-axis direction, and the length along the Z-axis direction is more than 3 times of the length along the Y-axis direction; in the lower-layer outer rectangular beam 12 arranged along the Y-axis direction, the length along the Y-axis direction is greater than that along the X-axis direction, and the length along the Z-axis direction is more than 3 times of that along the X-axis direction; in the lower-layer inner rectangular beam 14 arranged along the X-axis direction, the length along the X-axis direction is greater than the length along the Z-axis direction, and the length along the Y-axis direction is more than 3 times of the length along the Z-axis direction; in the lower-layer inner rectangular beam 14 arranged along the Y-axis direction, the length along the Y-axis direction is greater than the length along the Z-axis direction, and the length along the X-axis direction is more than 3 times of the length along the Z-axis direction.
The length of the upper outer rectangular beam 9 in the Z-axis direction is the same as the length of the upper inner rectangular beam 11 arranged in the X-axis direction in the Y-axis direction or the length of the upper inner rectangular beam 11 arranged in the Y-axis direction in the X-axis direction.
The length of the lower outer rectangular beam 12 in the Z-axis direction is the same as the length of the lower inner rectangular beam 14 arranged in the X-axis direction in the Y-axis direction or the length of the lower inner rectangular beam 14 arranged in the Y-axis direction in the X-axis direction.
The length of the rectangular beams 11 in the upper layer arranged along the X-axis direction is twice of the length of the rectangular beams 9 in the lower layer arranged along the X-axis direction; the length of the upper-layer outer rectangular beam 9 arranged along the X-axis direction is twice of the length of the lower-layer inner rectangular beam 14 arranged along the X-axis direction along the Z-axis direction;
two side surfaces of the force transfer block 10 are flush with two side surfaces of the upper layer outer rectangular beam 9, and the upper layer outer rectangular beam 9 is positioned in the center of the force transfer block 10 along the height of the z-axis direction along the X-axis direction; the upper surface and the lower surface of the force transfer block 10 are flush with the upper surface and the lower surface of the rectangular beam 11 in the upper layer, and the rectangular beam 11 in the upper layer arranged along the X-axis direction is positioned in the center of the length of the force transfer block 10 along the Y-axis direction;
two side surfaces of the force transfer block 10 are flush with two side surfaces of the lower-layer inner rectangular beam 14, and the lower-layer inner rectangular beam 14 is positioned in the center of the height of the force transfer block 10 in the z-axis direction; the upper surface and the lower surface of the force transfer block 10 are flush with the upper surface and the lower surface of the lower-layer outer rectangular beam 14, and the lower-layer outer rectangular beam 14 arranged along the X-axis direction is positioned in the center of the length of the force transfer block 10 along the Y-axis direction;
the upper surface of the upper layer outer annular body 7 is flush with the upper surface of the upper layer inner rectangular beam 14 and the upper surface of the central hemispherical rotating body 6;
as shown in fig. 4, a groove 15 matched with the ball limiting cover 3 is arranged at the center of the base 2, and the depth of the groove 15 is one third of the radius of the central hemispherical rotating body 6;
as shown in fig. 5, the sphere limit cover 3 comprises four same structures, and the lower surface of the sphere limit cover 3 is flush with the upper surface of the base 2; the inner surface of the sphere limiting cover 3 is attached to the side surface of the central hemispherical rotating body 6, and the central hemispherical rotating body 6 can freely rotate along the inner surface of the sphere limiting cover 3; the upper surface of the spherical limiting cover 3 is higher than the upper surface of the central hemispherical rotating body 6;
the sensitive detecting element of the sensor is a fiber grating, and after the fiber grating is arranged at a specific position of the elastic structure of the sensor, the wavelength output of the fiber grating is utilized to measure the three-dimensional force and the three-dimensional moment.
As shown in fig. 6 and 7, the first fiber grating FBG1 and the third fiber grating FBG3 are arranged in the radial direction of the upper elastic disc 4 on the side of the rectangular beam 11 close to the force transmission block 10 in the two upper layers along the X-axis direction; likewise, fiber grating second and fourth fiber grating FBGs 2 and 4 are arranged radially along the upper elastic disc 4 at the side faces of the two upper inner rectangular beams 11 close to the force transmission block 10 in the Y-axis direction;
a fifth FBG5 and a seventh FBG7 are radially arranged along the lower elastic disc 5 at the upper surfaces, close to the force transmission block 10, of the two lower-layer inner rectangular beams 14 in the X-axis direction; likewise, fiber bragg gratings sixth fiber bragg grating FBG6 and eighth fiber bragg grating FBG8 are arranged in the radial direction of the lower elastic disc 5 at the positions, close to the upper surface of the force transmission block 10, of the two lower inner rectangular beams 14 in the Y-axis direction;
the fiber bragg gratings ninth fiber bragg grating FBG9 and tenth fiber bragg grating FBG10 are symmetrically arranged on two side faces of any one lower-layer outer rectangular beam 12 close to the force transmission block 10, and the ninth fiber bragg grating FBG9 and the tenth fiber bragg grating FBG10 are arranged along the radial direction of the lower elastic disc 5;
the fiber bragg grating eleventh fiber bragg grating FBG11 and the twelfth fiber bragg grating FBG12 are symmetrically arranged on the upper surface, close to the force transmission block 10, of any two upper layer outer rectangular beams 9 in the same axial direction, and the eleventh fiber bragg grating FBG11 and the twelfth fiber bragg grating FBG12X are arranged in the axial direction;
the application provides a measuring method for a fiber grating six-dimensional force sensor, the fiber grating six-dimensional force sensor adopts the fiber grating six-dimensional force sensor, and the measuring steps of force and moment are as follows: firstly, applying force or moment on an upper-layer ring body by taking the center of the upper surface of a central hemispherical rotator as a reference point, then leading the central reflection wavelengths of first to twelfth fiber gratings to shift due to the stress deformation of a structure, measuring the shift amount of each wavelength, and finally calculating the applied force or moment through the shift amount of the wavelength, wherein a difference signal delta lambda 13 of the wavelength shift amounts of the first fiber grating FBG1 and the third fiber grating FBG3 is delta lambda 1-delta lambda 3 and is used for calculating an Fx signal; the difference signal Δ λ 24 of the wavelength drift amounts of the second fiber grating FBG2 and the fourth fiber grating FBG4 is Δ λ 2- Δ λ 4, which is used for calculating the Fy signal; the difference signal delta lambda 57 of the wavelength drift amounts of the fifth fiber grating FBG5 and the seventh fiber grating FBG7 is delta lambda 5-delta lambda 7, and is used for calculating a My signal; the difference signal Δ λ 68 of the wavelength drift amounts of the sixth fiber grating FBG6 and the eighth fiber grating FBG8 is Δ λ 6- Δ λ 8, which is used for calculating the Mx signal; the difference signal Δ λ 910 of the wavelength drift amounts of the ninth fiber grating FBG9 and the tenth fiber grating FBG10 is Δ λ 9- Δ λ 10, which is used for calculating Mz; the sum signal Δ λ 1112 of the wavelength drift amount of the twelfth FBG12 and the wavelength drift amount of the eleventh FBG11 is Δ λ 11+ Δ λ 12, and is used to calculate Fz.
The principle of the self-decoupling measurement of three-dimensional force and moment information of the invention is as follows:
the FBGs 1 and 3 are combined into a pair of measurement units, and the difference between the respective wavelength drift amounts of the FBGs 1 and 3 is output to measure the force Fx in the x-direction. The difference output of the FBG1, FBG3 wavelength drift amounts is sensitive to Fx only, because:
1. when a force Fx in the x direction acts on the upper outer annular ring body as the loading ring, the FBGs 1 and 3 are respectively positioned at two deformed sides of the upper elastic disc, and the wavelength drifts of the FBGs 1 and 3 are equal but opposite. The difference value of the wavelength drift amount is used as an output signal of the measuring unit, so that the measuring sensitivity is improved, and the wavelength homodromous and equivalent drift caused by the change of the environmental temperature are eliminated through the difference value;
2. when a force Fy in the y direction acts, the wavelengths of the FBGs 1 and 3 are not drifted, and the difference value of the wavelength drift amounts of the FBGs 1 and 3 is not output; when a force Fz in the z direction acts, the wavelength drift of the FBG1 and the FBG3 are in the same direction and equal in value, and the difference value of the wavelength drift of the FBG1 and the FBG3 has no output;
3. when a moment Mx in the X-axis direction acts, the deformation is mainly concentrated on the inner rectangular beam arranged in the lower elastic disc along the Y-axis, the deformation of the upper elastic disc is not obvious, the wavelength drift of the FBGs 1 and 3 is insensitive to the Mx, and the difference value of the wavelength drift amounts of the FBGs 1 and 3 is not output;
4. when a moment My around the Y-axis direction acts, the deformation is mainly concentrated on the inner moment beam arranged in the lower elastic disc along the X-axis, the deformation of the upper elastic disc is not obvious, the wavelength drift of the FBGs 1 and 3 is not sensitive to the My, and the difference value of the wavelength drift amounts of the FBGs 1 and 3 is not output;
5. when a moment Mz around the Z-axis direction acts, the deformation is mainly concentrated on the outer rectangular beam in the lower elastic disc, the upper elastic disc is not obviously deformed, the wavelength drifts of the FBGs 1 and 3 are insensitive to the Mz, even if the upper elastic disc is deformed by micro torsion, the FBGs 1 and 3 are in the same deformation state, the wavelength drifts are consistent, and the difference value of the wavelength drifts of the FBGs 1 and 3 has no output;
it can be seen that the differential output of the wavelength drift amounts of the measurement units consisting of FBGs 1 and 3 enables self-decoupling measurements that are sensitive only to Fx. In the same analysis method, the sensor is rotated by 90 degrees along the Z axis, and the difference output of the wavelength drift amount of the measurement unit consisting of the FBG2 and the FBG4 can realize self-decoupling measurement sensitive to Fy only.
The FBG5 and the FBG7 are combined into a pair of measurement units, and the difference value of the respective wavelength drift amounts of the FBG5 and the FBG7 is output to measure the moment My around the Y-axis direction:
1. when a moment My around the Y-axis direction acts on an upper layer outer ring body serving as a loading ring, the two lower layer inner moment beams along the X-axis direction deform obviously, strain with the same size and opposite sign is generated at the arrangement positions of the FBG5 and the FBG7, the wavelength drift of the FBG5 and the FBG7 is equal in size and opposite in direction, the difference value of the wavelength drift is used as an output signal of a measuring unit, the measuring sensitivity is improved, and the wavelength homodromous and equivalent drift caused by the change of the environmental temperature are eliminated after the difference value;
2. when a force Fx or Fy acts in the x or y direction, the lower elastic disc is limited to move in the groove due to the central hemispherical rotating body and does not deform obviously, the wavelength drift of the FBGs 5 and 7 is insensitive to the Fx and Fy, and the difference value of the wavelength drift of the FBGs 5 and 7 is not output;
3. when a force Fz in the z direction acts, the deformation trends of the rectangular beams in the four lower layers are consistent, strains with the same size and the same sign are generated at the arrangement positions of the FBGs 5 and 7, and the wavelength drift amounts of the FBGs 5 and 7 are subjected to difference processing and then are not output;
4. when the moment Mx around the X-axis direction acts, the deformation states of the two lower-layer inner rectangular beams of the FBGs 5 and 7 along the X-axis direction are consistent, the FBGs 5 and 7 generate the same wavelength drift, and the wavelength drift amounts of the FBGs 5 and 7 are not output after difference processing;
5. when the moment Mz around the Z-axis direction acts, the two lower-layer inner rectangular beams of the FBGs 5 and 7 along the X-axis direction do not deform obviously, and even if weak deformation occurs, the deformation states of the positions where the FBGs 5 and 7 are arranged are consistent, the FBGs 5 and 7 generate the same wavelength drift, and the wavelength drift amounts of the FBGs 5 and 7 are processed by difference values and then have no output;
it can be seen that the differential output of the wavelength drift amounts of the measurement units consisting of the FBGs 5 and 7 realizes the self-decoupling measurement sensitive only to My. In the same analysis method, the sensor is rotated by 90 degrees along the Z axis, and the difference output of the wavelength drift amount of the measurement unit consisting of the FBG6 and the FBG8 can realize the self-decoupling measurement sensitive to Mx only.
The FBGs 9 and 10 are combined into a pair of measurement units, and the difference between the wavelength drift amounts of the FBGs 9 and 10 is output to measure the moment Mz around the Z-axis:
1. when a moment Mz around the Z-axis direction acts on an upper layer outer annular body serving as a loading ring, a lower layer outer rectangular beam with the FBGs 9 and 10 arranged thereon is mainly deformed, the strain with the same size and opposite sign is generated at the arrangement positions of the FBG9 and the FBG10, the wavelength drifts of the FBG9 and the FBG10 are equal in size and opposite in direction, the difference value of the wavelength drift amounts is used as an output signal of a measuring unit, the measuring sensitivity is improved, and the wavelength homodromous and equivalent drifts caused by the change of the environmental temperature are eliminated after the difference value;
2. when a force Fx, Fy or Fz in the x, y or z direction acts, deformation mainly occurs on the upper elastic disc, the lower elastic disc is not obviously deformed due to the limitation of the central sphere by the groove and the sphere limiting cover, the wavelength drift of the FBGs 9 and 10 is not sensitive to the Fx, Fy and Fz, and the difference value of the wavelength drift amounts of the FBGs 9 and 10 is not output;
3. when the moment Mx or My around the X axis or the Y axis acts, the deformation states of the arrangement positions of the FBGs 9 and 10 are consistent, the same wavelength drift of the FBGs 9 and 10 is generated, and the wavelength drift amounts of the FBGs 5 and 7 are processed by difference values and then no output exists;
it can be seen that the differential output of the wavelength drift amounts of the measurement units consisting of FBG9 and FBG10 enables self-decoupling measurements that are sensitive only to Mz.
FBG11 and FBG12 are combined into a pair of measuring units for measuring the force Fz in the z-direction:
1. when a force Fz in the z direction acts on an upper layer outer annular body serving as a loading ring, deformation is mainly concentrated on an upper elastic disc, deformation of two upper layer outer rectangular beams is obvious, strain with the same size and the same sign is generated at the arrangement positions of the FBG11 and the FBG12, the wavelength drift directions of the FBG11 and the FBG12 are the same, and the sum of the wavelength drift amounts serves as an output signal of a measuring unit, so that the measuring sensitivity is improved;
2. when a force Fx or Fy in the x or y direction acts, the FBG11 and the FBG12 are arranged along the Z-axis direction, so that the deformation is not obvious;
3. when moments Mx, My and Mz around the X-axis, Y-axis and Z-axis directions act, the central sphere rotates in the groove and the sphere limiting cover, deformation is mainly concentrated on the lower elastic disc, and the wavelength of the FBG12 has no drift;
it can be seen that the output of the measurement unit consisting of FBG11 and FBG12 enables self-decoupling measurements that are sensitive only to Fz.
In summary, the invention discloses a main body structure of a structural decoupling type six-dimensional force sensor, which comprises a spherical limiting cover, an upper annular body, a lower annular body, eight beam assemblies, a central hemispherical rotating body and a base, wherein the upper annular body and the lower annular body are arranged on the upper surface of the spherical limiting cover; the upper and lower tourus is two-layer about being and rotates continuously with central hemisphere through four roof beam subassemblies respectively, is equipped with on the base and rotates assorted recess and link to each other with lower tourus with central hemisphere, and the spacing lid of spheroid rotates the restriction of central hemisphere in its inboard and the recess of base and links to each other with the base, makes power and moment act on elastic beam about respectively through the rotation that the hemisphere rotated, and then has realized the decoupling zero output of six-dimensional power and moment measured information. Compared with the traditional sliding decoupling structure, the main structure provided by the application has good symmetry, is easy to process and manufacture, has overload protection capability, and effectively solves the problem of improper contact force in the sliding process.
The application also provides an arrangement method of the fiber grating sensor, and the number of the fiber grating elements is twice as small as the number of the force measuring elements compared with the strain gauges required by the sensor based on the bridge measurement principle of the resistance strain gauge. Meanwhile, the fiber bragg grating is used as a strain detection element, and the fiber bragg grating has the advantages of electromagnetic interference resistance, small appearance, easiness in multiplexing and the like.
Claims (6)
1. A structure decoupling type six-dimensional force sensor is characterized in that: the spherical structure comprises a central hemispherical swivel, a beam assembly and two ring bodies which are arranged up and down, wherein the beam assembly is divided into an upper layer and a lower layer which are respectively connected between the inner walls of the two ring bodies and the outer wall of the central hemispherical swivel, each layer of beam assembly is arranged at equal intervals, the beam assembly comprises an outer rectangular beam connected with the ring bodies, an inner rectangular beam connected with the central hemispherical swivel and a force transmission block connected with the outer rectangular beam and the inner rectangular beam, the base is arranged below the central hemispherical swivel, and a groove matched with the central hemispherical swivel is formed in the center of the base; the inner side shape of the spherical limiting cover is matched with the central hemispherical rotating body, and the beam assembly is provided with a fiber grating.
2. The structurally decoupled six-dimensional force sensor of claim 1, wherein: the beam assemblies are eight and are arranged in two layers, and the included angle between the beam assemblies on each layer is 90 degrees.
3. A structurally decoupled six-dimensional force sensor according to claim 1 or 2, characterized in that: the inner and outer rectangular beams of each beam assembly are arranged vertically.
4. A structurally decoupled six-dimensional force sensor according to claim 1 or 2, characterized in that: the arrangement of the fiber grating on the beam assembly means that: the rectangular beam in the upper layer is respectively provided with a first fiber grating, a second fiber grating, a third fiber grating and a fourth fiber grating, the rectangular beam in the lower layer is respectively provided with a fifth fiber grating, a sixth fiber grating, a seventh fiber grating and an eighth fiber grating, the two side surfaces of any one lower layer of outer rectangular beam, which are close to the force transfer block, are symmetrically provided with a ninth fiber grating and a tenth fiber grating, and the rectangular beam in the upper layer is provided with an eleventh fiber grating and a twelfth fiber grating.
5. A structurally decoupled six-dimensional force sensor according to claim 3, wherein: the arrangement of the fiber grating on the beam assembly means that: the rectangular beam in the upper layer is respectively provided with a first fiber grating, a second fiber grating, a third fiber grating and a fourth fiber grating, the rectangular beam in the lower layer is respectively provided with a fifth fiber grating, a sixth fiber grating, a seventh fiber grating and an eighth fiber grating, the two side surfaces of any one lower layer of outer rectangular beam, which are close to the force transfer block, are symmetrically provided with a ninth fiber grating and a tenth fiber grating, and the rectangular beam in the upper layer is provided with an eleventh fiber grating and a twelfth fiber grating.
6. A measuring method using the structural decoupling type six-dimensional force sensor of claim 5, characterized in that: firstly, applying force or moment on an upper-layer ring body by taking the center of the upper surface of a central hemispherical rotating body as a reference point, then leading the central reflection wavelengths of first to twelfth fiber gratings to shift due to the stress deformation of a structure, measuring the shift amount of each wavelength, and finally calculating the applied force or moment according to the shift amount of the wavelength, wherein a difference signal delta lambda 13 of the wavelength shift amounts of the first fiber grating and the third fiber grating is delta lambda 1-delta lambda 3 and is used for calculating an Fx signal; a difference signal delta lambda 24 of the wavelength drift amounts of the second fiber grating and the fourth fiber grating is delta lambda 2-delta lambda 4 and is used for calculating an Fy signal; a difference signal delta lambda 57 of the wavelength drift amounts of the fifth fiber bragg grating and the seventh fiber bragg grating is delta lambda 5-delta lambda 7 and is used for calculating a My signal; a difference signal delta lambda 68 of the wavelength drift amounts of the sixth fiber grating and the eighth fiber grating is delta lambda 6-delta lambda 8 and is used for calculating an Mx signal; a difference signal Δ λ 910 of the wavelength drift amounts of the ninth fiber grating and the tenth fiber grating is Δ λ 9- Δ λ 10, which is used for calculating Mz; the sum signal Δ λ 1112 of the wavelength drift amount of the twelfth fiber grating and the wavelength drift amount of the eleventh fiber grating is Δ λ 11+ Δ λ 12, and is used to calculate Fz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111117044.9A CN113848011B (en) | 2021-09-23 | 2021-09-23 | Structural decoupling type six-dimensional force sensor and measuring method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111117044.9A CN113848011B (en) | 2021-09-23 | 2021-09-23 | Structural decoupling type six-dimensional force sensor and measuring method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113848011A true CN113848011A (en) | 2021-12-28 |
| CN113848011B CN113848011B (en) | 2022-12-13 |
Family
ID=78979044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111117044.9A Active CN113848011B (en) | 2021-09-23 | 2021-09-23 | Structural decoupling type six-dimensional force sensor and measuring method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113848011B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114812888A (en) * | 2022-05-05 | 2022-07-29 | 之江实验室 | Pressure measurement system and method based on optical fiber |
| CN117053976B (en) * | 2023-10-09 | 2024-02-09 | 之江实验室 | Three-dimensional force decoupling measurement device and method based on four-leaf grass type optical fiber junction array |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105181193A (en) * | 2015-10-21 | 2015-12-23 | 武汉科技大学 | Optical bragg grating six-dimension-force sensor, as well as main body structure and measurement method thereof |
| CN205102965U (en) * | 2015-10-21 | 2016-03-23 | 武汉科技大学 | Sextuple force transducer of fiber grating and major structure thereof |
| CN109079826A (en) * | 2018-10-12 | 2018-12-25 | 中国石油大学(华东) | A kind of orthogonal beam type six-dimension force sensor of diameter of Spherical Volume and joint of robot |
| CN208867192U (en) * | 2018-10-12 | 2019-05-17 | 中国石油大学(华东) | A kind of orthogonal beam type six-dimension force sensor of diameter of Spherical Volume and joint of robot |
| CN110779651A (en) * | 2019-11-18 | 2020-02-11 | 重庆交通大学 | Double-cross beam type three-dimensional force sensor based on fiber bragg grating |
| US20200049579A1 (en) * | 2016-10-07 | 2020-02-13 | King's College London | Multi-axis force sensor |
| CN113188703A (en) * | 2021-04-24 | 2021-07-30 | 首都医科大学宣武医院 | Three-dimensional force sensor and measuring method |
-
2021
- 2021-09-23 CN CN202111117044.9A patent/CN113848011B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105181193A (en) * | 2015-10-21 | 2015-12-23 | 武汉科技大学 | Optical bragg grating six-dimension-force sensor, as well as main body structure and measurement method thereof |
| CN205102965U (en) * | 2015-10-21 | 2016-03-23 | 武汉科技大学 | Sextuple force transducer of fiber grating and major structure thereof |
| US20200049579A1 (en) * | 2016-10-07 | 2020-02-13 | King's College London | Multi-axis force sensor |
| CN109079826A (en) * | 2018-10-12 | 2018-12-25 | 中国石油大学(华东) | A kind of orthogonal beam type six-dimension force sensor of diameter of Spherical Volume and joint of robot |
| CN208867192U (en) * | 2018-10-12 | 2019-05-17 | 中国石油大学(华东) | A kind of orthogonal beam type six-dimension force sensor of diameter of Spherical Volume and joint of robot |
| CN110779651A (en) * | 2019-11-18 | 2020-02-11 | 重庆交通大学 | Double-cross beam type three-dimensional force sensor based on fiber bragg grating |
| CN113188703A (en) * | 2021-04-24 | 2021-07-30 | 首都医科大学宣武医院 | Three-dimensional force sensor and measuring method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114812888A (en) * | 2022-05-05 | 2022-07-29 | 之江实验室 | Pressure measurement system and method based on optical fiber |
| CN117053976B (en) * | 2023-10-09 | 2024-02-09 | 之江实验室 | Three-dimensional force decoupling measurement device and method based on four-leaf grass type optical fiber junction array |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113848011B (en) | 2022-12-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113848011B (en) | Structural decoupling type six-dimensional force sensor and measuring method thereof | |
| CN105181193B (en) | Fiber grating six-dimension force sensor and its agent structure and measuring method | |
| Xiong et al. | Six-dimensional force/torque sensor based on fiber Bragg gratings with low coupling | |
| CN102087153B (en) | Wheel spoke type fault-tolerant six-dimension force sensor with parallel structure | |
| Liang et al. | Multi-component FBG-based force sensing systems by comparison with other sensing technologies: A review | |
| US20120266694A1 (en) | Multiaxial force-torque sensors | |
| CN205102965U (en) | Sextuple force transducer of fiber grating and major structure thereof | |
| WO2008021007A2 (en) | Platform balance | |
| CN113375852B (en) | Mechanical decoupling type six-dimensional force and torque sensor | |
| CN104280169A (en) | Ring type fiber bragg grating force measurement device and application thereof | |
| Li et al. | Recent advances and tendencies regarding fiber optic sensors for deformation measurement: A review | |
| CN111198062A (en) | Strain type six-dimensional force sensor | |
| CN113607313A (en) | Laminated fiber grating six-dimensional force-torque sensor based on C-shaped beam | |
| JP2020160059A (en) | Plug gauge and associated system and method for taking multiple simultaneous diametric measurements | |
| Yan et al. | Self-uncoupling wrist six-axis force/torque sensor based on Fiber Bragg grating | |
| Sun et al. | Design and optimization of a novel six-axis force/torque sensor with good isotropy and high sensitivity | |
| CN116698260B (en) | Three-dimensional six-dimensional force sensor | |
| CN114858336B (en) | Low-coupling fiber grating three-dimensional force sensor | |
| KR102015784B1 (en) | Multi-axis load cell | |
| CN113203511B (en) | Six-dimensional force sensor with double cross beam structure | |
| KR20080016995A (en) | Platform balance | |
| CN209802546U (en) | Wide-range three-dimensional force sensor | |
| CN114577434B (en) | High-precision six-component balance and method | |
| JPH0577253B2 (en) | ||
| KR100399679B1 (en) | The method for measuring force and moments using column type sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |