CN105181112B - A kind of low fineness Fabry Perot optical fibre sound pressure sensor of diaphragm type based on Fiber Bragg Grating FBG - Google Patents
A kind of low fineness Fabry Perot optical fibre sound pressure sensor of diaphragm type based on Fiber Bragg Grating FBG Download PDFInfo
- Publication number
- CN105181112B CN105181112B CN201510696186.3A CN201510696186A CN105181112B CN 105181112 B CN105181112 B CN 105181112B CN 201510696186 A CN201510696186 A CN 201510696186A CN 105181112 B CN105181112 B CN 105181112B
- Authority
- CN
- China
- Prior art keywords
- fiber
- bragg grating
- diaphragm
- grating fbg
- face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
A kind of low fineness F P optical fibre sound pressure sensors of diaphragm type based on FBG, belong to fiber optic sensor technology field.The present invention is in order to solve the defects of traditional F P optical fibre sound pressure sensors are present.Including the antiradar reflectivity FBG in write-in optical fiber, sleeve, in the sensitive diaphragm of sleeve end face, optical fiber；The air chamber of FBG and sensitive diaphragm composition F P chambers a pair of speculums, optical fiber and fiber end face to sensitive diaphragm has collectively constituted the interference cavity of F P sensors, and the long machining reproducibility of chamber of interference cavity is good, and two mirror parallel degrees of interference cavity are high；By controlling fiber exit end face and the effective reflectivity of distance diaphragm between sensitive diaphragm and FBG reflectivity close to identical；Sensor uses PGC demodulation techniques, has very strong antijamming capability to the gradual factor such as temperature and optical maser wavelength drift.
Description
Technical field
The present invention relates to a kind of Fabry-Perot pressure sensor, and in particular to a kind of based on Fiber Bragg Grating FBG
The low fineness Fabry-Perot fiber optic sound pressure sensor of diaphragm type, belongs to fiber optic sensor technology field.
Background technology
Fiber optic sensor technology is the emerging technology slowly formed with the development and fiber optic communication of optical fiber.It is
Using light as carrier, and using optical fiber as transmission medium, measured parameter is realized and sensed.
Traditional diaphragm type Non-intrinsic Fabry-Perot sensor plates a floor height reflectance coating in fiber end face, as
One high reflection mirror, sensitive diaphragm work as extraneous factor as another speculum, two speculum groups into Fabry-Perot-type cavity
When acting on sensitive diaphragm, diaphragm vibration can cause change of cavity length, can be realized to outer signals by demodulating this change
Interferometry.The extrinsic Fabry-Pérot sensor chamber of traditional diaphragm type grows shorter, the small mismachining tolerance pair of interference cavity
Demodulation result influence is very big, therefore the machining reproducibility difficulty of interference cavity chamber length is larger；When variation of ambient temperature, can cause dry
The slowly varying of chamber chamber length is related to, makes demodulation result stability and deterioration in accuracy；The disturbing factors such as wave length shift can also influence tradition
Diaphragm type Non-intrinsic Fabry-Perot sensor demodulation accuracy and stability；The extrinsic method cloth of traditional diaphragm type
In-Perot sensor two mirror parallels of requirement in assembling, therefore assemble difficult.
The content of the invention
The brief overview on the present invention is given below, to provide on the basic of certain aspects of the invention
Understand.It should be appreciated that this general introduction is not the exhaustive general introduction on the present invention.It is not intended to determine the pass of the present invention
Key or pith, nor is it intended to limit the scope of the present invention.Its purpose only provides some concepts in simplified form,
In this, as the preamble in greater detail discussed later.
A kind of in consideration of it, according to an aspect of the invention, there is provided low essence of diaphragm type based on Fiber Bragg Grating FBG
Fineness Fabry-Perot fiber optic sound pressure sensor, to overcome the above-mentioned extrinsic Fabry-Pérot sensor of traditional diaphragm type
Shortcoming.
A kind of low fineness Fabry-Perot fiber optic acoustic pressure of diaphragm type based on Fiber Bragg Grating FBG proposed by the present invention
Fiber Bragg Grating FBG in sensor, including write-in optical fiber, sleeve, sensitive diaphragm, optical fiber, sleeve are used to consolidate sensitive diaphragm
It is scheduled on the front of fiber end face；Fiber Bragg Grating FBG and sensitive diaphragm form Fabry-Perot-type cavity as two speculums,
The interference cavity of Fabry-Perot-type cavity includes Fiber Bragg Grating FBG to the optical fiber and air chamber of sensitive diaphragm.
Sensor of the invention is insensitive to temperature change and laser wavelength slow drift.
The long machining reproducibility of chamber of sensor of the invention interference cavity is good.
The mirror parallel degree of sensor of the invention interference cavity is high.
To a kind of above-mentioned low fineness Fabry-Perot fiber optic acoustic pressure sensing of diaphragm type based on Fiber Bragg Grating FBG
Implement body optimization design, described Fiber Bragg Grating FBG are micron apart from fiber end face apart from 6 meters of fiber end face, sensitive diaphragm
Magnitude.
To a kind of above-mentioned low fineness Fabry-Perot fiber optic acoustic pressure sensing of diaphragm type based on Fiber Bragg Grating FBG
Implement body optimization design, described fiber end face have an inclination angle.It is arranged such, avoids that self-interference occurs in air chamber.
To a kind of above-mentioned low fineness Fabry-Perot fiber optic acoustic pressure sensing of diaphragm type based on Fiber Bragg Grating FBG
Implement body optimization design, the reflectivity of described Fiber Bragg Grating FBG is between 2% to 10%.
To a kind of above-mentioned low fineness Fabry-Perot fiber optic acoustic pressure sensing of diaphragm type based on Fiber Bragg Grating FBG
Implement body optimization design, the distance between described fiber end face and sensitive diaphragm are adjustable.By control fiber end face with it is quick
The distance between sense diaphragm causes the effective reflectivity of sensitive diaphragm and the reflectivity of Fiber Bragg Grating FBG to approach, and now has
Best interference effect.
To a kind of above-mentioned low fineness Fabry-Perot fiber optic acoustic pressure sensing of diaphragm type based on Fiber Bragg Grating FBG
Implement body optimization design, 100 nanometers to 10 microns of the thickness of described sensitive diaphragm, diameter are 150 nanometers to 2.5 millis
Rice.
To a kind of above-mentioned low fineness Fabry-Perot fiber optic acoustic pressure sensing of diaphragm type based on Fiber Bragg Grating FBG
Implement body optimization design, the output signal of sensor carry out signal demodulation using PGC phase demodulatings system.
The effect that is reached of the present invention is：
The invention provides a kind of low fineness Fabry-Perot fiber optic acoustic pressure of diaphragm type based on Fiber Bragg Grating FBG
Sensor, output signal are demodulated using phase method.The sensor measures extraneous acoustic pressure using sensitive diaphragm, chamber length compared with
Long, the long machining reproducibility of chamber of interference cavity is good, insensitive to the slow drift of temperature change and optical maser wavelength, and its speculum is easy
In being assembled, the depth of parallelism is high, and demodulation result has preferable precision and stability.
Brief description of the drawings
Fig. 1 is a kind of low fineness Fabry-Perot fiber optic acoustic pressure of diaphragm type based on Fiber Bragg Grating FBG of the invention
The schematic cross-section of sensor specific implementation；
Fig. 2 is a kind of low fineness Fabry-Perot fiber optic acoustic pressure of diaphragm type based on Fiber Bragg Grating FBG of the invention
Sensor uses the demodulating system schematic diagram of phase demodulating method；
In figure：1 Fiber Bragg Grating FBG, 2 sleeves, 3 sensitive diaphragms, 4 optical fiber, 5 fiber end faces, 6PGC phase demodulating moulds
Block, 7 circulators, 8A/D converters, 9 optical-electrical converters.
Embodiment
The one exemplary embodiment of the present invention is described hereinafter in connection with accompanying drawing.For clarity and conciseness,
All features of actual embodiment are not described in the description.It should be understood, however, that developing any this actual implementation
It must be made during example much specific to the decision of embodiment, to realize the objectives of developer, for example, symbol
Those restrictive conditions related to system and business are closed, and these restrictive conditions may have with the difference of embodiment
Changed.In addition, it will also be appreciated that although development is likely to be extremely complex and time-consuming, to having benefited from the present invention
For those skilled in the art of disclosure, this development is only routine task.
Herein, it is also necessary to which explanation is a bit, in order to avoid having obscured the present invention because of unnecessary details, in the accompanying drawings
It illustrate only and according to the closely related apparatus structure of the solution of the present invention and/or processing step, and eliminate and the present invention
The little other details of relation.
The embodiment provides a kind of low fineness Fabry-Perot of diaphragm type based on Fiber Bragg Grating FBG
Optical fibre sound pressure sensor, signal demodulation is carried out using PGC phase demodulatings system.Sensor construction schematic diagram is as shown in figure 1, PGC
Phase demodulating system is as shown in Figure 2.The fibre optical sensor includes the Fiber Bragg Grating FBG 1 inside write-in optical fiber 4, positioned at sleeve
2 end faces and the sensitive diaphragm 3 for being right against fiber end face 5, optical fiber 4, fiber end face 5, sleeve 2.Described Fiber Bragg Grating FBG
1, it is 6 meters apart from fiber end face 5, Fiber Bragg Grating FBG 1 constitutes a speculum of fibre optical sensor；Described sensitive membrane
Piece 3, it is millimeter magnitude apart from fiber end face 5, constitutes another speculum of fibre optical sensor, by the length for controlling air chamber
Degree can change the reflectivity of sensitive diaphragm 3；Described fiber end face 5 has an inclination angle, due to the presence at inclination angle, can avoid
Fiber end face interferes with sensitive diaphragm；Described sleeve 2 is used for the position for fixing sensitive diaphragm 3 and optical fiber 4.
The diaphragm-type optical-fiber sensor based on Fiber Bragg Grating FBG of the present embodiment, described PGC phase demodulating systems
As shown in Figure 2.Specially：The light that light source is sent initially enters fibre optical sensor after circulator 7 and interfered, and interference light is again
Enter optical-electrical converter 9 through circulator 7, electric signal accesses PGC phase demodulation modules 6 after the collections of A/D 8.PGC phase demodulatings
High sensitivity, strong antijamming capability, while make fibre optical sensor insensitive to the gradual factor such as temperature change and wave length shift.
Although disclosed embodiment is as above, its content is only to facilitate understand the technical side of the present invention
Case and the embodiment used, are not intended to limit the present invention.Any those skilled in the art to which this invention pertains, not
On the premise of departing from disclosed core technology scheme, any modification can be made in the form and details of implementation and is become
Change, but the protection domain that the present invention is limited, the scope that must be still limited by appended claims are defined.
Claims (1)
- A kind of 1. diaphragm type Fabry-Perot fiber optic sound pressure sensor based on Fiber Bragg Grating FBG, it is characterised in that：Including The Fiber Bragg Grating FBG (1) write in optical fiber (4), sleeve (2), sensitive diaphragm (3), optical fiber (4), sleeve (2) is used for will be quick Sense diaphragm (3) is fixed on the front of fiber end face (5)；Fiber Bragg Grating FBG (1) and sensitive diaphragm (3) are as two reflections Mirror forms Fabry-Perot-type cavity, and the interference cavity of Fabry-Perot-type cavity includes Fiber Bragg Grating FBG (1) to sensitive diaphragm (3) Optical fiber and air chamber；Described Fiber Bragg Grating FBG (1) is apart from (5) 6 meters of fiber end face, and sensitive diaphragm (3) is apart from optical fiber end Face (5) is micron dimension；Described fiber end face (5) has an inclination angle；The reflectivity of described Fiber Bragg Grating FBG (1) exists Between 2% to 10%；The distance between described fiber end face (5) and sensitive diaphragm (3) are adjustable；Described sensitive diaphragm (3) 100 nanometers to 10 microns of thickness, diameter are 150 nanometers to 2.5 millimeters；The output signal of sensor uses PGC phases Position demodulating system carries out signal demodulation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510696186.3A CN105181112B (en) | 2015-10-22 | 2015-10-22 | A kind of low fineness Fabry Perot optical fibre sound pressure sensor of diaphragm type based on Fiber Bragg Grating FBG |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510696186.3A CN105181112B (en) | 2015-10-22 | 2015-10-22 | A kind of low fineness Fabry Perot optical fibre sound pressure sensor of diaphragm type based on Fiber Bragg Grating FBG |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105181112A CN105181112A (en) | 2015-12-23 |
| CN105181112B true CN105181112B (en) | 2018-02-13 |
Family
ID=54903357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510696186.3A Active CN105181112B (en) | 2015-10-22 | 2015-10-22 | A kind of low fineness Fabry Perot optical fibre sound pressure sensor of diaphragm type based on Fiber Bragg Grating FBG |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105181112B (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106017756A (en) * | 2016-07-08 | 2016-10-12 | 燕山大学 | Submicron ultra-smooth metal film based highly sensitive FP pressure sensor |
| CN106644039A (en) * | 2017-01-20 | 2017-05-10 | 哈尔滨工业大学 | Optical fiber mini-sized hydrophone |
| PL236751B1 (en) * | 2018-06-18 | 2021-02-08 | Inphotech Spolka Z Ograniczona Odpowiedzialnoscia | Waveguide sensor |
| CN110207806B (en) * | 2019-07-10 | 2021-10-26 | 国网上海市电力公司 | Oblique end face optical fiber vibration sensor and vibration measuring method thereof |
| CN110207807A (en) * | 2019-07-10 | 2019-09-06 | 国网上海市电力公司 | A kind of optical fibre vibration sensor and its method of measurement vibration |
| CN111426374A (en) * | 2020-05-15 | 2020-07-17 | 云南电网有限责任公司电力科学研究院 | Optical fiber Fabry-Perot acoustic sensing system and method |
| CN111854923B (en) * | 2020-07-31 | 2022-05-24 | 重庆邮电大学 | Acoustic wave measurement system, cantilever beam type optical fiber acoustic wave sensor demodulation system and method |
| CN113567819A (en) * | 2021-08-17 | 2021-10-29 | 重庆大学 | F-P optical fiber sensing discharge detection device and method based on lens optical fiber |
| CN114543971B (en) * | 2022-02-23 | 2022-11-11 | 华中科技大学 | FP interference type sound wave detector and sound wave detection method |
| CN118392363B (en) * | 2024-06-27 | 2024-09-13 | 安徽至博光电科技股份有限公司 | Pressure sensor and measuring method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3932711A1 (en) * | 1989-09-29 | 1991-04-11 | Siemens Ag | Sensitive optical shock wave sensor - has e.g. acrylic] light wave guide whose rounded end is described by specific equation and is immersed in liq. where shock wave spreads out |
| CN1490598A (en) * | 2002-10-14 | 2004-04-21 | 上海乐通光通信有限公司 | Fibre-optical sensor |
| CN103528665A (en) * | 2013-09-29 | 2014-01-22 | 中国电子科技集团公司第二十七研究所 | Novel Fabry-Perot interference MEMS (Micro Electro Mechanical System) sound wave sensor |
| CN103557929A (en) * | 2013-11-14 | 2014-02-05 | 北京航空航天大学 | Optical fiber Fabry-Perot sound pressure sensor manufacturing method based on graphene membrane and measuring method and device thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07243902A (en) * | 1994-03-08 | 1995-09-19 | Mitsubishi Heavy Ind Ltd | Optical fiber passive acoustic sensor |
-
2015
- 2015-10-22 CN CN201510696186.3A patent/CN105181112B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3932711A1 (en) * | 1989-09-29 | 1991-04-11 | Siemens Ag | Sensitive optical shock wave sensor - has e.g. acrylic] light wave guide whose rounded end is described by specific equation and is immersed in liq. where shock wave spreads out |
| CN1490598A (en) * | 2002-10-14 | 2004-04-21 | 上海乐通光通信有限公司 | Fibre-optical sensor |
| CN103528665A (en) * | 2013-09-29 | 2014-01-22 | 中国电子科技集团公司第二十七研究所 | Novel Fabry-Perot interference MEMS (Micro Electro Mechanical System) sound wave sensor |
| CN103557929A (en) * | 2013-11-14 | 2014-02-05 | 北京航空航天大学 | Optical fiber Fabry-Perot sound pressure sensor manufacturing method based on graphene membrane and measuring method and device thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105181112A (en) | 2015-12-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105181112B (en) | A kind of low fineness Fabry Perot optical fibre sound pressure sensor of diaphragm type based on Fiber Bragg Grating FBG | |
| CN105241541B (en) | A kind of diaphragm type high-fineness Fabry Perot optical fibre sound pressure sensor based on Fiber Bragg Grating FBG | |
| CN105242067B (en) | A kind of diaphragm type high-fineness Fabry Perot optical fiber acceleration transducer based on Fiber Bragg Grating FBG | |
| CN100516782C (en) | Hollow photon crystal optical fiber based Fabry-perot interferometer sensor and its production method | |
| CN104703105B (en) | Double FP chambers optical fiber sound sensing probes and its sensor-based system | |
| CN105223382B (en) | A kind of low fineness Fabry Perot optical fiber acceleration transducer of diaphragm type based on Fiber Bragg Grating FBG | |
| WO2007003876A1 (en) | Fiber optic temperature and pressure sensor and system incorporating same | |
| CN107515054B (en) | Optical fiber temperature and refractive index measurement sensing device based on Michelson interferometer | |
| WO2022156298A1 (en) | High-sensitivity air pressure sensor based on suspended-core optical fiber and side-hole optical fiber | |
| Zhu et al. | Ultrasensitive gas pressure sensor based on two parallel Fabry-Perot interferometers and enhanced Vernier effect | |
| ITMI20130138A1 (en) | OPTICAL SENSOR FOR PRESSURE MEASURES WITHOUT CONTACT. | |
| CN109490235A (en) | Spectrographic detection type gas sensor based on optical fiber Sagnac ring and optical fiber FP chamber cascade enhanced sensitivity | |
| CN104634256A (en) | Fiber laser single-wave self-mixing interference displacement measuring system | |
| CN103364014A (en) | High-fineness optical fiber external-cavity-type Fabry-Perot interferometric sensor | |
| CN104634369A (en) | Ring laser sensor | |
| Tian et al. | High-sensitivity gas pressure sensor with low temperature cross-talk based on Vernier effect of cascaded Fabry-Perot interferometers | |
| CN104634370A (en) | Laser-based sensor | |
| CN109507132A (en) | Spectrographic detection type gas sensor based on double optical fiber FP interferometer parallel-connection structures | |
| CN110617901A (en) | Sapphire optical fiber F-P high-temperature sensor with inclined reflection surface, preparation method and temperature sensing system | |
| CN212721825U (en) | Optical fiber temperature sensor based on temperature sensitive material modulation FP cavity | |
| CN109580037A (en) | Temperature sensor and preparation method thereof based on photonic crystal fiber FP structure | |
| CN105806511B (en) | The micro optical fiber microminiature temperature sensor of cascaded structure is bored based on ball | |
| CN104655159A (en) | Sensor of orthogonal polarization laser device | |
| CN112179537A (en) | Fabry-Perot interferometer optical fiber sensor based on optical fiber surface waveguide | |
| CN107490395B (en) | Method for forming optical fiber Fabry-Perot cavity with controllable cavity length |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |