CN105181112B - A kind of low fineness Fabry Perot optical fibre sound pressure sensor of diaphragm type based on Fiber Bragg Grating FBG - Google Patents
A kind of low fineness Fabry Perot optical fibre sound pressure sensor of diaphragm type based on Fiber Bragg Grating FBG Download PDFInfo
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Abstract
一种基于FBG的膜片式低精细度F‑P光纤声压传感器,属于光纤传感器技术领域。本发明为了解决传统F‑P光纤声压传感器存在的缺陷。包括写入光纤内的低反射率FBG,套筒,在套筒端面的敏感膜片,光纤;FBG和敏感膜片构成F‑P腔的一对反射镜,光纤和光纤端面至敏感膜片的空气腔共同组成了F‑P传感器的干涉腔,干涉腔的腔长加工重复性好,且干涉腔的两反射镜平行度高;通过控制光纤出射端面与敏感膜片间的距离使得膜片的有效反射率与FBG的反射率接近相同;传感器采用PGC解调技术,对温度和激光波长漂移等缓变因素具有很强的抗干扰能力。
An FBG-based diaphragm type low-precision F-P fiber optic sound pressure sensor belongs to the technical field of fiber optic sensors. The invention aims to solve the defects existing in the traditional F-P optical fiber sound pressure sensor. Including the low reflectivity FBG written in the optical fiber, the sleeve, the sensitive diaphragm on the end face of the sleeve, and the optical fiber; the FBG and the sensitive diaphragm constitute a pair of mirrors in the F-P cavity, and the distance between the optical fiber and the end face of the optical fiber to the sensitive diaphragm The air cavity together constitutes the interference cavity of the F-P sensor. The cavity length of the interference cavity has good repeatability, and the parallelism of the two mirrors of the interference cavity is high; by controlling the distance between the exit end face of the optical fiber and the sensitive diaphragm, the diaphragm The effective reflectivity is close to the same as that of FBG; the sensor adopts PGC demodulation technology, which has strong anti-interference ability to slowly changing factors such as temperature and laser wavelength drift.
Description
技术领域technical field
本发明涉及一种法布里-珀罗压力传感器,具体涉及一种基于光纤布拉格光栅的膜片式低精细度法布里-珀罗光纤声压传感器,属于光纤传感器技术领域。The invention relates to a Fabry-Perot pressure sensor, in particular to a diaphragm-type low-precision Fabry-Perot optical fiber sound pressure sensor based on an optical fiber Bragg grating, belonging to the technical field of optical fiber sensors.
背景技术Background technique
光纤传感器技术是随着光纤的发展和光纤通信而慢慢形成的一门新兴技术。它是以光作为载体,并且以光纤作为传输介质,对被测参数实现传感。Optical fiber sensor technology is an emerging technology slowly formed with the development of optical fiber and optical fiber communication. It uses light as the carrier and optical fiber as the transmission medium to realize the sensing of the measured parameters.
传统的膜片式非本征型法布里-珀罗传感器在光纤端面镀上一层高反射膜,作为一个高反射镜,敏感膜片作为另一个反射镜,两个反射镜组成法布里-珀罗腔,当外界因素作用于敏感膜片时,膜片振动会引起腔长变化,通过解调这种变化可以实现对外界信号的干涉测量。传统的膜片式非本征的法布里-珀罗传感器腔长较短,干涉腔的微小加工误差对解调结果影响很大,因此干涉腔腔长的加工重复性难度较大;当环境温度变化时,会引起干涉腔腔长的缓慢变化,使解调结果稳定度和精度变差;波长漂移等干扰因素也会影响传统的膜片式非本征型法布里-珀罗传感器的解调精度和稳定度;传统的膜片式非本征的法布里-珀罗传感器在组装时要求两个反射镜平行,因此组装困难。The traditional diaphragm-type extrinsic Fabry-Perot sensor is coated with a layer of high-reflection film on the end of the fiber as a high-reflection mirror, and the sensitive diaphragm is used as another reflector. The two reflectors form a Fabry-Perot sensor. -Perot cavity, when external factors act on the sensitive diaphragm, the vibration of the diaphragm will cause the cavity length to change, and the interferometric measurement of the external signal can be realized by demodulating this change. The cavity length of the traditional diaphragm extrinsic Fabry-Perot sensor is short, and the small processing error of the interference cavity has a great influence on the demodulation result, so the processing repeatability of the interference cavity length is relatively difficult; when the environment When the temperature changes, it will cause a slow change in the length of the interference cavity, which will deteriorate the stability and accuracy of the demodulation results; interference factors such as wavelength drift will also affect the performance of the traditional diaphragm extrinsic Fabry-Perot sensor. Demodulation accuracy and stability; the traditional diaphragm type extrinsic Fabry-Perot sensor requires two mirrors to be parallel during assembly, so assembly is difficult.
发明内容Contents of the invention
在下文中给出了关于本发明的简要概述,以便提供关于本发明的某些方面的基本理解。应当理解,这个概述并不是关于本发明的穷举性概述。它并不是意图确定本发明的关键或重要部分,也不是意图限定本发明的范围。其目的仅仅是以简化的形式给出某些概念,以此作为稍后论述的更详细描述的前序。A brief overview of the invention is given below in order to provide a basic understanding of some aspects of the invention. It should be understood that this summary is not an exhaustive overview of the invention. It is not intended to identify key or critical parts of the invention nor to delineate the scope of the invention. Its purpose is merely to present some concepts in a simplified form as a prelude to the more detailed description that is discussed later.
鉴于此,根据本发明的一个方面,提供了一种基于光纤布拉格光栅的膜片式低精细度法布里-珀罗光纤声压传感器,以克服上述传统的膜片式非本征的法布里-珀罗传感器缺点。In view of this, according to one aspect of the present invention, a diaphragm type low-precision Fabry-Perot fiber optic acoustic pressure sensor based on a fiber Bragg grating is provided to overcome the above-mentioned traditional diaphragm type extrinsic Fabry Disadvantages of the R-Perot sensor.
本发明提出的一种基于光纤布拉格光栅的膜片式低精细度法布里-珀罗光纤声压传感器,包括写入光纤内的光纤布拉格光栅,套筒,敏感膜片,光纤,套筒用于将敏感膜片固定在光纤端面的正前方;光纤布拉格光栅和敏感膜片作为两个反射镜构成法布里-珀罗腔,法布里-珀罗腔的干涉腔包括光纤布拉格光栅到敏感膜片的光纤和空气腔。The present invention proposes a diaphragm type low-precision Fabry-Perot fiber optic acoustic pressure sensor based on fiber Bragg gratings, including fiber Bragg gratings written in optical fibers, sleeves, sensitive diaphragms, optical fibers, and sleeves. The sensitive diaphragm is fixed in front of the end face of the fiber; the fiber Bragg grating and the sensitive diaphragm are used as two mirrors to form a Fabry-Perot cavity, and the interference cavity of the Fabry-Perot cavity includes the fiber Bragg grating to the sensitive Optical fiber and air cavity of diaphragm.
本发明的传感器对温度变化和激光器波长缓慢漂移不敏感。The sensor of the present invention is insensitive to temperature changes and slow drifts in the wavelength of the laser.
本发明的传感器干涉腔的腔长加工重复性好。The cavity length processing repeatability of the sensor interference cavity of the invention is good.
本发明的传感器干涉腔的反射镜平行度高。The reflection mirror of the sensor interference cavity of the present invention has high parallelism.
对上述的一种基于光纤布拉格光栅的膜片式低精细度法布里-珀罗光纤声压传感器具体优化设计,所述的光纤布拉格光栅距离光纤端面6米,敏感膜片距离光纤端面为微米量级。For the specific optimization design of the above-mentioned diaphragm type low-precision Fabry-Perot fiber optic sound pressure sensor based on fiber Bragg gratings, the distance between the fiber Bragg grating and the end face of the fiber is 6 meters, and the distance between the sensitive diaphragm and the end face of the fiber is microns order of magnitude.
对上述的一种基于光纤布拉格光栅的膜片式低精细度法布里-珀罗光纤声压传感器具体优化设计,所述的光纤端面有一个倾角。如此设置,避免在空气腔发生自干涉。For the specific optimization design of the above-mentioned diaphragm type low-precision Fabry-Perot fiber optic sound pressure sensor based on fiber Bragg gratings, the end face of the fiber has an inclination angle. Such arrangement avoids self-interference in the air cavity.
对上述的一种基于光纤布拉格光栅的膜片式低精细度法布里-珀罗光纤声压传感器具体优化设计,所述的光纤布拉格光栅的反射率在2%至10%之间。For the specific optimal design of the above-mentioned diaphragm type low-precision Fabry-Perot fiber optic sound pressure sensor based on fiber Bragg gratings, the reflectivity of the fiber Bragg gratings is between 2% and 10%.
对上述的一种基于光纤布拉格光栅的膜片式低精细度法布里-珀罗光纤声压传感器具体优化设计,所述的光纤端面与敏感膜片之间的距离可调整。通过控制光纤端面与敏感膜片之间的距离使得敏感膜片的有效反射率与光纤布拉格光栅的反射率接近,此时具有最好的干涉效果。For the above-mentioned optimized design of a diaphragm-type low-precision Fabry-Perot fiber optic sound pressure sensor based on fiber Bragg gratings, the distance between the end face of the optical fiber and the sensitive diaphragm can be adjusted. By controlling the distance between the end face of the optical fiber and the sensitive diaphragm, the effective reflectivity of the sensitive diaphragm is close to the reflectivity of the fiber Bragg grating, which has the best interference effect.
对上述的一种基于光纤布拉格光栅的膜片式低精细度法布里-珀罗光纤声压传感器具体优化设计,所述的敏感膜片的厚度100纳米至10微米,直径大小为150纳米至2.5毫米。Specifically optimize the design of the above-mentioned diaphragm type low-precision Fabry-Perot fiber optic acoustic pressure sensor based on fiber Bragg gratings, the thickness of the sensitive diaphragm is 100 nanometers to 10 microns, and the diameter is 150 nanometers to 10 microns. 2.5mm.
对上述的一种基于光纤布拉格光栅的膜片式低精细度法布里-珀罗光纤声压传感器具体优化设计,传感器的输出信号采用PGC相位解调系统进行信号解调。The above-mentioned diaphragm type low-precision Fabry-Perot fiber optic acoustic pressure sensor based on fiber Bragg grating is optimized and designed. The output signal of the sensor is demodulated by the PGC phase demodulation system.
本发明所达到的效果为:The effect achieved by the present invention is:
本发明提供了一种基于光纤布拉格光栅的膜片式低精细度法布里-珀罗光纤声压传感器,输出信号采用相位方法进行解调。该传感器采用敏感膜片测量外界声压,腔长较长,干涉腔的腔长加工重复性好,对温度变化和激光波长的缓慢漂移不敏感,且其反射镜易于进行组装,平行度高,解调结果具有较好的精度和稳定度。The invention provides a diaphragm type low-precision Fabry-Perot fiber optic sound pressure sensor based on the fiber Bragg grating, and the output signal is demodulated by a phase method. The sensor uses a sensitive diaphragm to measure the external sound pressure, the cavity length is long, the cavity length of the interference cavity has good repeatability, it is not sensitive to temperature changes and the slow drift of the laser wavelength, and its mirror is easy to assemble and has high parallelism. The demodulation result has better precision and stability.
附图说明Description of drawings
图1是本发明一种基于光纤布拉格光栅的膜片式低精细度法布里-珀罗光纤声压传感器具体实施的截面示意图;Fig. 1 is a kind of sectional schematic diagram of the specific implementation of the membrane type low-fineness Fabry-Perot fiber optic acoustic pressure sensor based on the fiber Bragg grating of the present invention;
图2是本发明一种基于光纤布拉格光栅的膜片式低精细度法布里-珀罗光纤声压传感器采用相位解调方法的解调系统示意图;Fig. 2 is a kind of demodulation system schematic diagram that adopts the phase demodulation method of the diaphragm type low fineness Fabry-Perot fiber optic acoustic pressure sensor based on the fiber Bragg grating of the present invention;
图中:1光纤布拉格光栅、2套筒、3敏感膜片、4光纤、5光纤端面、6PGC相位解调模块、7环形器、8A/D转换器、9光电转换器。In the figure: 1 Fiber Bragg Grating, 2 Sleeve, 3 Sensitive Diaphragm, 4 Optical Fiber, 5 Optical Fiber End Face, 6 PGC Phase Demodulation Module, 7 Circulator, 8 A/D Converter, 9 Photoelectric Converter.
具体实施方式detailed description
在下文中将结合附图对本发明的示范性实施例进行描述。为了清楚和简明起见,在说明书中并未描述实际实施方式的所有特征。然而,应该了解,在开发任何这种实际实施例的过程中必须做出很多特定于实施方式的决定,以便实现开发人员的具体目标,例如,符合与系统及业务相关的那些限制条件,并且这些限制条件可能会随着实施方式的不同而有所改变。此外,还应该了解,虽然开发工作有可能是非常复杂和费时的,但对得益于本发明公开内容的本领域技术人员来说,这种开发工作仅仅是例行的任务。Exemplary embodiments of the present invention will be described below with reference to the accompanying drawings. In the interest of clarity and conciseness, not all features of an actual implementation are described in this specification. It should be understood, however, that in developing any such practical embodiment, many implementation-specific decisions must be made in order to achieve the developer's specific goals, such as meeting those constraints related to the system and business, and those Restrictions may vary from implementation to implementation. Furthermore, it should be understood that development work, while potentially complex and time-consuming, would be a routine undertaking for those skilled in the art having the benefit of this disclosure.
在此,还需要说明的一点是,为了避免因不必要的细节而模糊了本发明,在附图中仅仅示出了与根据本发明的方案密切相关的装置结构和/或处理步骤,而省略了与本发明关系不大的其他细节。Here, it should also be noted that, in order to avoid obscuring the present invention due to unnecessary details, only the device structure and/or processing steps closely related to the solution according to the present invention are shown in the drawings, and the Other details not relevant to the present invention are described.
本发明的实施例提供了一种基于光纤布拉格光栅的膜片式低精细度法布里-珀罗光纤声压传感器,采用PGC相位解调系统进行信号解调。传感器结构示意图如图1所示,PGC相位解调系统如图2所示。该光纤传感器包括写入光纤4内部的光纤布拉格光栅1,位于套筒2端面且正对于光纤端面5的敏感膜片3,光纤4,光纤端面5,套筒2。所述的光纤布拉格光栅1,距离光纤端面5为6米,光纤布拉格光栅1构成了光纤传感器的一个反射镜;所述的敏感膜片3,距离光纤端面5为毫米量级,构成了光纤传感器的另一个反射镜,通过控制空气腔的长度可以改变敏感膜片3的反射率;所述的光纤端面5有一个倾角,由于倾角的存在,可以避免光纤端面与敏感膜片发生干涉;所述的套筒2用于固定敏感膜片3和光纤4的位置。An embodiment of the present invention provides a diaphragm-type low-precision Fabry-Perot fiber optic sound pressure sensor based on a fiber Bragg grating, which uses a PGC phase demodulation system for signal demodulation. The schematic diagram of the sensor structure is shown in Figure 1, and the PGC phase demodulation system is shown in Figure 2. The optical fiber sensor includes a fiber Bragg grating 1 written inside the optical fiber 4 , a sensitive diaphragm 3 located at the end face of the sleeve 2 and facing the end face 5 of the optical fiber, the optical fiber 4 , the end face 5 of the optical fiber, and the sleeve 2 . The fiber Bragg grating 1 is 6 meters away from the fiber end face 5, and the fiber Bragg grating 1 constitutes a reflector of the fiber optic sensor; the sensitive diaphragm 3 is on the order of millimeters away from the fiber end face 5, forming a fiber optic sensor Another reflector, the reflectivity of the sensitive diaphragm 3 can be changed by controlling the length of the air cavity; the optical fiber end face 5 has an inclination angle, and due to the existence of the inclination angle, interference between the optical fiber end face and the sensitive diaphragm can be avoided; The sleeve 2 is used to fix the positions of the sensitive diaphragm 3 and the optical fiber 4 .
本实施例的基于光纤布拉格光栅的膜片式光纤传感器,所述的PGC相位解调系统如图2所示。具体为:光源发出的光线经环形器7后首先进入光纤传感器发生干涉,干涉光再经环形器7进入光电转换器9,电信号经A/D 8采集后接入PGC相位解调模块6。PGC相位解调灵敏度高,抗干扰能力强,同时使光纤传感器对温度变化和波长漂移等缓变因素不敏感。The PGC phase demodulation system of the diaphragm fiber sensor based on fiber Bragg gratings in this embodiment is shown in FIG. 2 . Specifically: the light emitted by the light source first enters the optical fiber sensor for interference after passing through the circulator 7, and then the interfering light enters the photoelectric converter 9 through the circulator 7, and the electrical signal is collected by the A/D 8 and then connected to the PGC phase demodulation module 6. PGC phase demodulation has high sensitivity and strong anti-interference ability, and at the same time makes the optical fiber sensor insensitive to slow-changing factors such as temperature change and wavelength drift.
虽然本发明所揭示的实施方式如上,但其内容只是为了便于理解本发明的技术方案而采用的实施方式,并非用于限定本发明。任何本发明所属技术领域内的技术人员,在不脱离本发明所揭示的核心技术方案的前提下,可以在实施的形式和细节上做任何修改与变化,但本发明所限定的保护范围,仍须以所附的权利要求书限定的范围为准。Although the embodiments disclosed in the present invention are as above, the content thereof is only for the convenience of understanding the technical solutions of the present invention, and is not intended to limit the present invention. Anyone skilled in the technical field to which the present invention belongs can make any modifications and changes in the form and details of implementation without departing from the core technical solution disclosed in the present invention, but the scope of protection defined by the present invention remains The scope defined by the appended claims shall prevail.
Claims (1)
- A kind of 1. diaphragm type Fabry-Perot fiber optic sound pressure sensor based on Fiber Bragg Grating FBG, it is characterised in that:Including The Fiber Bragg Grating FBG (1) write in optical fiber (4), sleeve (2), sensitive diaphragm (3), optical fiber (4), sleeve (2) is used for will be quick Sense diaphragm (3) is fixed on the front of fiber end face (5);Fiber Bragg Grating FBG (1) and sensitive diaphragm (3) are as two reflections Mirror forms Fabry-Perot-type cavity, and the interference cavity of Fabry-Perot-type cavity includes Fiber Bragg Grating FBG (1) to sensitive diaphragm (3) Optical fiber and air chamber;Described Fiber Bragg Grating FBG (1) is apart from (5) 6 meters of fiber end face, and sensitive diaphragm (3) is apart from optical fiber end Face (5) is micron dimension;Described fiber end face (5) has an inclination angle;The reflectivity of described Fiber Bragg Grating FBG (1) exists Between 2% to 10%;The distance between described fiber end face (5) and sensitive diaphragm (3) are adjustable;Described sensitive diaphragm (3) 100 nanometers to 10 microns of thickness, diameter are 150 nanometers to 2.5 millimeters;The output signal of sensor uses PGC phases Position demodulating system carries out signal demodulation.
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CN112763051A (en) * | 2021-01-08 | 2021-05-07 | 国网上海市电力公司 | Acoustic wave sensor packaging structure based on focusing lens technology and manufacturing method |
CN113567819A (en) * | 2021-08-17 | 2021-10-29 | 重庆大学 | A kind of F-P fiber sensor discharge detection device and method based on lens fiber |
CN114543971B (en) * | 2022-02-23 | 2022-11-11 | 华中科技大学 | FP interference type sound wave detector and sound wave detection method |
CN118392363B (en) * | 2024-06-27 | 2024-09-13 | 安徽至博光电科技股份有限公司 | Pressure sensor and measuring method thereof |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3932711A1 (en) * | 1989-09-29 | 1991-04-11 | Siemens Ag | OPTICAL SHOCK WAVE SENSOR |
CN1490598A (en) * | 2002-10-14 | 2004-04-21 | 上海乐通光通信有限公司 | Fibre-optical sensor |
CN103528665A (en) * | 2013-09-29 | 2014-01-22 | 中国电子科技集团公司第二十七研究所 | Novel Fabry-Perot interference MEMS (Micro Electro Mechanical System) sound wave sensor |
CN103557929A (en) * | 2013-11-14 | 2014-02-05 | 北京航空航天大学 | Optical fiber Fabry-Perot sound pressure sensor manufacturing method based on graphene membrane and measuring method and device thereof |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07243902A (en) * | 1994-03-08 | 1995-09-19 | Mitsubishi Heavy Ind Ltd | Optical fiber passive acoustic sensor |
-
2015
- 2015-10-22 CN CN201510696186.3A patent/CN105181112B/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3932711A1 (en) * | 1989-09-29 | 1991-04-11 | Siemens Ag | OPTICAL SHOCK WAVE SENSOR |
CN1490598A (en) * | 2002-10-14 | 2004-04-21 | 上海乐通光通信有限公司 | Fibre-optical sensor |
CN103528665A (en) * | 2013-09-29 | 2014-01-22 | 中国电子科技集团公司第二十七研究所 | Novel Fabry-Perot interference MEMS (Micro Electro Mechanical System) sound wave sensor |
CN103557929A (en) * | 2013-11-14 | 2014-02-05 | 北京航空航天大学 | Optical fiber Fabry-Perot sound pressure sensor manufacturing method based on graphene membrane and measuring method and device thereof |
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