CN105181112A - Diaphragm type low-fineness F-P optical fiber sound pressure transducer based on FBG - Google Patents

Diaphragm type low-fineness F-P optical fiber sound pressure transducer based on FBG Download PDF

Info

Publication number
CN105181112A
CN105181112A CN201510696186.3A CN201510696186A CN105181112A CN 105181112 A CN105181112 A CN 105181112A CN 201510696186 A CN201510696186 A CN 201510696186A CN 105181112 A CN105181112 A CN 105181112A
Authority
CN
China
Prior art keywords
fbg
optical fiber
diaphragm
sound pressure
diaphragm type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510696186.3A
Other languages
Chinese (zh)
Other versions
CN105181112B (en
Inventor
金鹏
刘欢
刘彬
林杰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harbin Institute of Technology
Original Assignee
Harbin Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harbin Institute of Technology filed Critical Harbin Institute of Technology
Priority to CN201510696186.3A priority Critical patent/CN105181112B/en
Publication of CN105181112A publication Critical patent/CN105181112A/en
Application granted granted Critical
Publication of CN105181112B publication Critical patent/CN105181112B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)

Abstract

The invention discloses a diaphragm type low-fineness F-P optical fiber sound pressure based on an FBG transducer, which belongs to the technical field of optical fiber transducers and aims at solving the defects of a conventional F-P optical fiber sound pressure transducer. The transducer comprises a low-reflectivity FBG written in an optical fiber, a sleeve, a sensitive diaphragm arranged at the end surface of the sleeve and an optical fiber, wherein a pair of reflectors of an F-P cavity is formed by the FBG and the sensitive diaphragm, an interference cavity of the F-P transducer is formed by the optical fiber and an air cavity from the end surface of the optical fiber to the sensitive diaphragm, the length of the interference cavity has good processing repeatability, and the two reflectors of the interference cavity are high in depth of parallelism; the effective reflectivity of the diaphragm is approximately same as that of the FBG by controlling the distance between the outgoing end surface of the optical fiber and the sensitive diaphragm; and the transducer adopts a PGC demodulation technology, thus having strong anti-interference capability for slowly-changing factors such as temperature and laser wavelength drift.

Description

The low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG
Technical field
The present invention relates to a kind of F-P pressure transducer, be specifically related to the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG, belong to fiber optic sensor technology field.
Background technology
Fiber optic sensor technology is along with the development of optical fiber and optical fiber communication and the emerging technology slowly formed.It is using light as carrier, and using optical fiber as transmission medium, realizes sensing to measured parameter.
Traditional diaphragm type extrinsic type F-P sensor plates one deck highly reflecting films at fiber end face, as a high reflection mirror, sensitive diaphragm is as another catoptron, two catoptron composition F-P cavity, when extraneous factor acts on sensitive diaphragm, diaphragm vibration can cause change of cavity length, can be realized the interferometry of signal to external world by this change of demodulation.Traditional diaphragm type extrinsic F-P sensor cavity is long shorter, and the small mismachining tolerance of interference cavity is very large on demodulation result impact, and the machining reproducibility difficulty that therefore interference cavity chamber is long is larger; When variation of ambient temperature, the slow change that interference cavity chamber is long can be caused, make demodulation result degree of stability and deterioration in accuracy; The disturbing factors such as wave length shift also can affect demodulation accuracy and the degree of stability of traditional diaphragm type extrinsic type F-P sensor; The extrinsic F-P sensor of traditional diaphragm type requires two mirror parallel when assembling, and therefore assembles difficulty.
Summary of the invention
Give hereinafter about brief overview of the present invention, to provide about the basic comprehension in some of the present invention.Should be appreciated that this general introduction is not summarize about exhaustive of the present invention.It is not that intention determines key of the present invention or pith, and nor is it intended to limit the scope of the present invention.Its object is only provide some concept in simplified form, in this, as the preorder in greater detail discussed after a while.
Given this, according to an aspect of the present invention, the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG is provided, to overcome above-mentioned traditional diaphragm type extrinsic F-P sensor shortcoming.
The low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG that the present invention proposes, comprises the FBG in write optical fiber, sleeve, sensitive diaphragm, optical fiber, and sleeve is used for dead ahead sensitive diaphragm being fixed on fiber end face; FBG and sensitive diaphragm form F-P cavity as two catoptrons, and the interference cavity of F-P cavity comprises FBG to the optical fiber of sensitive diaphragm and air chamber.
Sensor for temperature change of the present invention and laser wavelength slowly drift about insensitive.
The long machining reproducibility in chamber in sensor interferometer chamber of the present invention is good.
The mirror parallel degree in sensor interferometer chamber of the present invention is high.
To the above-mentioned concrete optimal design of a kind of diaphragm type based on FBG low fineness F-P optical fibre sound pressure sensor, described FBG distance fiber end face 6 meters, sensitive diaphragm distance fiber end face is micron dimension.
To the above-mentioned concrete optimal design of a kind of diaphragm type based on FBG low fineness F-P optical fibre sound pressure sensor, described fiber end face has an inclination angle.Setting like this, avoids in air chamber generation self-interference.
To the above-mentioned concrete optimal design of a kind of diaphragm type based on FBG low fineness F-P optical fibre sound pressure sensor, the reflectivity of described FBG is between 2% to 10%.
To the above-mentioned concrete optimal design of a kind of diaphragm type based on FBG low fineness F-P optical fibre sound pressure sensor, the distance adjustable between described fiber end face and sensitive diaphragm.Make the reflectivity of the effective reflectivity of sensitive diaphragm and FBG close by the distance controlled between fiber end face and sensitive diaphragm, now there is best interference effect.
To the above-mentioned concrete optimal design of a kind of diaphragm type based on FBG low fineness F-P optical fibre sound pressure sensor, thickness 100 nanometer to 10 micron of described sensitive diaphragm, diameter is 150 nanometers to 2.5 millimeter.
To the above-mentioned concrete optimal design of a kind of diaphragm type based on FBG low fineness F-P optical fibre sound pressure sensor, the output signal of sensor adopts PGC phase demodulating system to carry out signal receiving.
The effect that the present invention reaches is:
The invention provides the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG, output signal adopts phase method to carry out demodulation.This sensor adopts sensitive diaphragm to measure extraneous acoustic pressure, and chamber is longer, and the long machining reproducibility in chamber of interference cavity is good, insensitive to the slow drift of temperature variation and optical maser wavelength, and its catoptron is easy to assemble, the depth of parallelism is high, and demodulation result has good precision and degree of stability.
Accompanying drawing explanation
Fig. 1 is the schematic cross-section that the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG of the present invention is specifically implemented;
Fig. 2 is the demodulating system schematic diagram that the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG of the present invention adopts phase demodulating method;
In figure: 1FBG, 2 sleeves, 3 sensitive diaphragms, 4 optical fiber, 5 fiber end faces, 6PGC phase demodulation modules, 7 circulators, 8A/D converter, 9 photoelectric commutators.
Embodiment
To be described one exemplary embodiment of the present invention by reference to the accompanying drawings hereinafter.For clarity and conciseness, all features of actual embodiment are not described in the description.But, should understand, must make a lot specific to the decision of embodiment in the process of any this practical embodiments of exploitation, to realize the objectives of developer, such as, meet those restrictive conditions relevant to system and business, and these restrictive conditions may change to some extent along with the difference of embodiment.In addition, although will also be appreciated that development is likely very complicated and time-consuming, concerning the those skilled in the art having benefited from the disclosure of invention, this development is only routine task.
At this, also it should be noted is that, in order to avoid the present invention fuzzy because of unnecessary details, illustrate only in the accompanying drawings with according to the closely-related apparatus structure of the solution of the present invention and/or treatment step, and eliminate other details little with relation of the present invention.
The embodiment provides the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG, adopt PGC phase demodulating system to carry out signal receiving.As shown in Figure 1, PGC phase demodulating system as shown in Figure 2 for sensor construction schematic diagram.This Fibre Optical Sensor comprises the FBG1 of write optical fiber 4 inside, is positioned at sleeve 2 end face and is right against the sensitive diaphragm 3 of fiber end face 5, optical fiber 4, fiber end face 5, sleeve 2.Described FBG1, distance fiber end face 5 is 6 meters, and FBG1 constitutes a catoptron of Fibre Optical Sensor; Described sensitive diaphragm 3, distance fiber end face 5 is millimeter magnitude, constitutes another catoptron of Fibre Optical Sensor, can be changed the reflectivity of sensitive diaphragm 3 by the length controlling air chamber; Described fiber end face 5 has an inclination angle, due to the existence at inclination angle, fiber end face and sensitive diaphragm can be avoided to interfere; Described sleeve 2 is for the position of fixing sensitive diaphragm 3 and optical fiber 4.
The diaphragm-type optical-fiber sensor based on FBG of the present embodiment, described PGC phase demodulating system as shown in Figure 2.Be specially: first the light that light source sends enter Fibre Optical Sensor and interfere after circulator 7, and interference light enters photoelectric commutator 9 through circulator 7 again, electric signal accesses PGC phase demodulation modules 6 after A/D8 gathers.PGC phase demodulating is highly sensitive, and antijamming capability is strong, makes Fibre Optical Sensor insensitive to the gradual factor such as temperature variation and wave length shift simultaneously.
Although disclosed embodiment as above, the embodiment that its content just adopts for the ease of understanding technical scheme of the present invention, is not intended to limit the present invention.Technician in any the technical field of the invention; under the prerequisite not departing from disclosed core technology scheme; any amendment and change can be made in the form implemented and details; but the protection domain that the present invention limits, the scope that still must limit with appending claims is as the criterion.

Claims (7)

1. the low fineness F-P of the diaphragm type based on a FBG optical fibre sound pressure sensor, it is characterized in that: comprise the FBG (1) in write optical fiber (4), sleeve (2), sensitive diaphragm (3), optical fiber (4), sleeve (2) is for being fixed on the dead ahead of fiber end face (5) by sensitive diaphragm (3); FBG (1) and sensitive diaphragm (3) form F-P cavity as two catoptrons, and the interference cavity of F-P cavity comprises FBG (1) to the optical fiber of sensitive diaphragm (3) and air chamber.
2. the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG according to claim 1, it is characterized in that: described FBG (1) distance fiber end face (5) 6 meters, sensitive diaphragm (3) distance fiber end face (5) is micron dimension.
3. the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG according to claim 1, is characterized in that: described fiber end face (5) has an inclination angle.
4. the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG according to claim 1,2 or 3, is characterized in that: the reflectivity of described FBG (1) is between 2% to 10%.
5. the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG according to claim 4, is characterized in that: the distance adjustable between described fiber end face (5) and sensitive diaphragm (3).
6. the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG according to claim 5, is characterized in that: thickness 100 nanometer to 10 micron of described sensitive diaphragm (3), diameter is 150 nanometers to 2.5 millimeter.
7. the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG according to claim 1, is characterized in that: the output signal of sensor adopts PGC phase demodulating system to carry out signal receiving.
CN201510696186.3A 2015-10-22 2015-10-22 A kind of low fineness Fabry Perot optical fibre sound pressure sensor of diaphragm type based on Fiber Bragg Grating FBG Active CN105181112B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510696186.3A CN105181112B (en) 2015-10-22 2015-10-22 A kind of low fineness Fabry Perot optical fibre sound pressure sensor of diaphragm type based on Fiber Bragg Grating FBG

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510696186.3A CN105181112B (en) 2015-10-22 2015-10-22 A kind of low fineness Fabry Perot optical fibre sound pressure sensor of diaphragm type based on Fiber Bragg Grating FBG

Publications (2)

Publication Number Publication Date
CN105181112A true CN105181112A (en) 2015-12-23
CN105181112B CN105181112B (en) 2018-02-13

Family

ID=54903357

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510696186.3A Active CN105181112B (en) 2015-10-22 2015-10-22 A kind of low fineness Fabry Perot optical fibre sound pressure sensor of diaphragm type based on Fiber Bragg Grating FBG

Country Status (1)

Country Link
CN (1) CN105181112B (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106017756A (en) * 2016-07-08 2016-10-12 燕山大学 Submicron ultra-smooth metal film based highly sensitive FP pressure sensor
CN106644039A (en) * 2017-01-20 2017-05-10 哈尔滨工业大学 Optical fiber mini-sized hydrophone
CN110207807A (en) * 2019-07-10 2019-09-06 国网上海市电力公司 A kind of optical fibre vibration sensor and its method of measurement vibration
CN110207806A (en) * 2019-07-10 2019-09-06 国网上海市电力公司 A kind of oblique angle end face optical fibre vibration sensor and its method of measurement vibration
WO2019244013A1 (en) * 2018-06-18 2019-12-26 Inphotech Spolka Z Ograniczona Odpowiedzialnoscia Interferometric fiber optic sensor, fiber optic probe and method of detection of chemical substance
CN111426374A (en) * 2020-05-15 2020-07-17 云南电网有限责任公司电力科学研究院 Optical fiber Fabry-Perot acoustic sensing system and method
CN111854923A (en) * 2020-07-31 2020-10-30 重庆邮电大学 Acoustic wave measurement system, cantilever beam type optical fiber acoustic wave sensor demodulation system and method
CN113567819A (en) * 2021-08-17 2021-10-29 重庆大学 F-P optical fiber sensing discharge detection device and method based on lens optical fiber
CN114543971A (en) * 2022-02-23 2022-05-27 华中科技大学 FP interference type sound wave detector and sound wave detection method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3932711A1 (en) * 1989-09-29 1991-04-11 Siemens Ag Sensitive optical shock wave sensor - has e.g. acrylic] light wave guide whose rounded end is described by specific equation and is immersed in liq. where shock wave spreads out
JPH07243902A (en) * 1994-03-08 1995-09-19 Mitsubishi Heavy Ind Ltd Optical fiber passive acoustic sensor
CN1490598A (en) * 2002-10-14 2004-04-21 上海乐通光通信有限公司 Fibre-optical sensor
CN103528665A (en) * 2013-09-29 2014-01-22 中国电子科技集团公司第二十七研究所 Novel Fabry-Perot interference MEMS (Micro Electro Mechanical System) sound wave sensor
CN103557929A (en) * 2013-11-14 2014-02-05 北京航空航天大学 Optical fiber Fabry-Perot sound pressure sensor manufacturing method based on graphene membrane and measuring method and device thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3932711A1 (en) * 1989-09-29 1991-04-11 Siemens Ag Sensitive optical shock wave sensor - has e.g. acrylic] light wave guide whose rounded end is described by specific equation and is immersed in liq. where shock wave spreads out
JPH07243902A (en) * 1994-03-08 1995-09-19 Mitsubishi Heavy Ind Ltd Optical fiber passive acoustic sensor
CN1490598A (en) * 2002-10-14 2004-04-21 上海乐通光通信有限公司 Fibre-optical sensor
CN103528665A (en) * 2013-09-29 2014-01-22 中国电子科技集团公司第二十七研究所 Novel Fabry-Perot interference MEMS (Micro Electro Mechanical System) sound wave sensor
CN103557929A (en) * 2013-11-14 2014-02-05 北京航空航天大学 Optical fiber Fabry-Perot sound pressure sensor manufacturing method based on graphene membrane and measuring method and device thereof

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106017756A (en) * 2016-07-08 2016-10-12 燕山大学 Submicron ultra-smooth metal film based highly sensitive FP pressure sensor
CN106644039A (en) * 2017-01-20 2017-05-10 哈尔滨工业大学 Optical fiber mini-sized hydrophone
WO2019244013A1 (en) * 2018-06-18 2019-12-26 Inphotech Spolka Z Ograniczona Odpowiedzialnoscia Interferometric fiber optic sensor, fiber optic probe and method of detection of chemical substance
EP3835765A1 (en) * 2018-06-18 2021-06-16 Inphotech Spolka z Ograniczona Odpowiedzialnoscia Interferometric fiber optic sensor, fiber optic probe and method of detection of chemical substance
CN110207807A (en) * 2019-07-10 2019-09-06 国网上海市电力公司 A kind of optical fibre vibration sensor and its method of measurement vibration
CN110207806A (en) * 2019-07-10 2019-09-06 国网上海市电力公司 A kind of oblique angle end face optical fibre vibration sensor and its method of measurement vibration
CN111426374A (en) * 2020-05-15 2020-07-17 云南电网有限责任公司电力科学研究院 Optical fiber Fabry-Perot acoustic sensing system and method
CN111854923A (en) * 2020-07-31 2020-10-30 重庆邮电大学 Acoustic wave measurement system, cantilever beam type optical fiber acoustic wave sensor demodulation system and method
CN111854923B (en) * 2020-07-31 2022-05-24 重庆邮电大学 Acoustic wave measurement system, cantilever beam type optical fiber acoustic wave sensor demodulation system and method
CN113567819A (en) * 2021-08-17 2021-10-29 重庆大学 F-P optical fiber sensing discharge detection device and method based on lens optical fiber
CN114543971A (en) * 2022-02-23 2022-05-27 华中科技大学 FP interference type sound wave detector and sound wave detection method
CN114543971B (en) * 2022-02-23 2022-11-11 华中科技大学 FP interference type sound wave detector and sound wave detection method

Also Published As

Publication number Publication date
CN105181112B (en) 2018-02-13

Similar Documents

Publication Publication Date Title
CN105181112A (en) Diaphragm type low-fineness F-P optical fiber sound pressure transducer based on FBG
CN105241541A (en) FBG-based diaphragm type high-definition F-P optical fiber sound pressure sensor
CN105242067A (en) FBG-based diaphragm type high-definition F-P optical fiber acceleration sensor
Xiao et al. Single-crystal sapphire fiber-based strain sensor for high-temperature applications
CN104703105B (en) Double FP chambers optical fiber sound sensing probes and its sensor-based system
CN103697954B (en) A kind of microcavity interference flow velocity pressure reduction sensitive structure and microcavity interference flow velocity of optical flow transducer
CN105223382A (en) The low fineness F-P optical fiber acceleration transducer of a kind of diaphragm type based on FBG
CN103674117A (en) Raman-scattering-based method and device for simultaneously measuring temperature and strain of identical weak fiber gratings
CN108663113A (en) A kind of optic fibre cantilev vibrating sensor and preparation method thereof
ITMI20130138A1 (en) OPTICAL SENSOR FOR PRESSURE MEASURES WITHOUT CONTACT.
CN110617901A (en) Sapphire optical fiber F-P high-temperature sensor with inclined reflection surface, preparation method and temperature sensing system
CN103234590B (en) Underground optical fiber flow sensor in oil field
CN104634370A (en) Laser-based sensor
CN104807780A (en) Measuring system and measuring method of refractive index of optical material
CN104634369A (en) Ring laser sensor
CN104677596A (en) Optical autocorrelator with unbalanced Mach-Zehnder type optical path scanner embedded in Sagnac annular light path
CN102095434A (en) Reflection type full optical fiber interference system
CN109507132A (en) Spectrographic detection type gas sensor based on double optical fiber FP interferometer parallel-connection structures
CN212721825U (en) Optical fiber temperature sensor based on temperature sensitive material modulation FP cavity
CN201043884Y (en) Full optical fiber Fizeau interfere confocal measuring apparatus
Yuan et al. Range extension of the optical delay line in white light interferometry
CN112179537A (en) Fabry-Perot interferometer optical fiber sensor based on optical fiber surface waveguide
Miao et al. Dynamic temperature compensating interrogation technique for strain sensors with tilted fiber Bragg gratings
US20220268641A1 (en) Michelson interference optical fiber temperature sensor for detecting contrast change of fringes
CN115753682A (en) Seawater salinity measuring device and method with temperature self-decoupling function

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant