CN105181112A - Diaphragm type low-fineness F-P optical fiber sound pressure transducer based on FBG - Google Patents
Diaphragm type low-fineness F-P optical fiber sound pressure transducer based on FBG Download PDFInfo
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- CN105181112A CN105181112A CN201510696186.3A CN201510696186A CN105181112A CN 105181112 A CN105181112 A CN 105181112A CN 201510696186 A CN201510696186 A CN 201510696186A CN 105181112 A CN105181112 A CN 105181112A
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Abstract
The invention discloses a diaphragm type low-fineness F-P optical fiber sound pressure based on an FBG transducer, which belongs to the technical field of optical fiber transducers and aims at solving the defects of a conventional F-P optical fiber sound pressure transducer. The transducer comprises a low-reflectivity FBG written in an optical fiber, a sleeve, a sensitive diaphragm arranged at the end surface of the sleeve and an optical fiber, wherein a pair of reflectors of an F-P cavity is formed by the FBG and the sensitive diaphragm, an interference cavity of the F-P transducer is formed by the optical fiber and an air cavity from the end surface of the optical fiber to the sensitive diaphragm, the length of the interference cavity has good processing repeatability, and the two reflectors of the interference cavity are high in depth of parallelism; the effective reflectivity of the diaphragm is approximately same as that of the FBG by controlling the distance between the outgoing end surface of the optical fiber and the sensitive diaphragm; and the transducer adopts a PGC demodulation technology, thus having strong anti-interference capability for slowly-changing factors such as temperature and laser wavelength drift.
Description
Technical field
The present invention relates to a kind of F-P pressure transducer, be specifically related to the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG, belong to fiber optic sensor technology field.
Background technology
Fiber optic sensor technology is along with the development of optical fiber and optical fiber communication and the emerging technology slowly formed.It is using light as carrier, and using optical fiber as transmission medium, realizes sensing to measured parameter.
Traditional diaphragm type extrinsic type F-P sensor plates one deck highly reflecting films at fiber end face, as a high reflection mirror, sensitive diaphragm is as another catoptron, two catoptron composition F-P cavity, when extraneous factor acts on sensitive diaphragm, diaphragm vibration can cause change of cavity length, can be realized the interferometry of signal to external world by this change of demodulation.Traditional diaphragm type extrinsic F-P sensor cavity is long shorter, and the small mismachining tolerance of interference cavity is very large on demodulation result impact, and the machining reproducibility difficulty that therefore interference cavity chamber is long is larger; When variation of ambient temperature, the slow change that interference cavity chamber is long can be caused, make demodulation result degree of stability and deterioration in accuracy; The disturbing factors such as wave length shift also can affect demodulation accuracy and the degree of stability of traditional diaphragm type extrinsic type F-P sensor; The extrinsic F-P sensor of traditional diaphragm type requires two mirror parallel when assembling, and therefore assembles difficulty.
Summary of the invention
Give hereinafter about brief overview of the present invention, to provide about the basic comprehension in some of the present invention.Should be appreciated that this general introduction is not summarize about exhaustive of the present invention.It is not that intention determines key of the present invention or pith, and nor is it intended to limit the scope of the present invention.Its object is only provide some concept in simplified form, in this, as the preorder in greater detail discussed after a while.
Given this, according to an aspect of the present invention, the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG is provided, to overcome above-mentioned traditional diaphragm type extrinsic F-P sensor shortcoming.
The low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG that the present invention proposes, comprises the FBG in write optical fiber, sleeve, sensitive diaphragm, optical fiber, and sleeve is used for dead ahead sensitive diaphragm being fixed on fiber end face; FBG and sensitive diaphragm form F-P cavity as two catoptrons, and the interference cavity of F-P cavity comprises FBG to the optical fiber of sensitive diaphragm and air chamber.
Sensor for temperature change of the present invention and laser wavelength slowly drift about insensitive.
The long machining reproducibility in chamber in sensor interferometer chamber of the present invention is good.
The mirror parallel degree in sensor interferometer chamber of the present invention is high.
To the above-mentioned concrete optimal design of a kind of diaphragm type based on FBG low fineness F-P optical fibre sound pressure sensor, described FBG distance fiber end face 6 meters, sensitive diaphragm distance fiber end face is micron dimension.
To the above-mentioned concrete optimal design of a kind of diaphragm type based on FBG low fineness F-P optical fibre sound pressure sensor, described fiber end face has an inclination angle.Setting like this, avoids in air chamber generation self-interference.
To the above-mentioned concrete optimal design of a kind of diaphragm type based on FBG low fineness F-P optical fibre sound pressure sensor, the reflectivity of described FBG is between 2% to 10%.
To the above-mentioned concrete optimal design of a kind of diaphragm type based on FBG low fineness F-P optical fibre sound pressure sensor, the distance adjustable between described fiber end face and sensitive diaphragm.Make the reflectivity of the effective reflectivity of sensitive diaphragm and FBG close by the distance controlled between fiber end face and sensitive diaphragm, now there is best interference effect.
To the above-mentioned concrete optimal design of a kind of diaphragm type based on FBG low fineness F-P optical fibre sound pressure sensor, thickness 100 nanometer to 10 micron of described sensitive diaphragm, diameter is 150 nanometers to 2.5 millimeter.
To the above-mentioned concrete optimal design of a kind of diaphragm type based on FBG low fineness F-P optical fibre sound pressure sensor, the output signal of sensor adopts PGC phase demodulating system to carry out signal receiving.
The effect that the present invention reaches is:
The invention provides the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG, output signal adopts phase method to carry out demodulation.This sensor adopts sensitive diaphragm to measure extraneous acoustic pressure, and chamber is longer, and the long machining reproducibility in chamber of interference cavity is good, insensitive to the slow drift of temperature variation and optical maser wavelength, and its catoptron is easy to assemble, the depth of parallelism is high, and demodulation result has good precision and degree of stability.
Accompanying drawing explanation
Fig. 1 is the schematic cross-section that the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG of the present invention is specifically implemented;
Fig. 2 is the demodulating system schematic diagram that the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG of the present invention adopts phase demodulating method;
In figure: 1FBG, 2 sleeves, 3 sensitive diaphragms, 4 optical fiber, 5 fiber end faces, 6PGC phase demodulation modules, 7 circulators, 8A/D converter, 9 photoelectric commutators.
Embodiment
To be described one exemplary embodiment of the present invention by reference to the accompanying drawings hereinafter.For clarity and conciseness, all features of actual embodiment are not described in the description.But, should understand, must make a lot specific to the decision of embodiment in the process of any this practical embodiments of exploitation, to realize the objectives of developer, such as, meet those restrictive conditions relevant to system and business, and these restrictive conditions may change to some extent along with the difference of embodiment.In addition, although will also be appreciated that development is likely very complicated and time-consuming, concerning the those skilled in the art having benefited from the disclosure of invention, this development is only routine task.
At this, also it should be noted is that, in order to avoid the present invention fuzzy because of unnecessary details, illustrate only in the accompanying drawings with according to the closely-related apparatus structure of the solution of the present invention and/or treatment step, and eliminate other details little with relation of the present invention.
The embodiment provides the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG, adopt PGC phase demodulating system to carry out signal receiving.As shown in Figure 1, PGC phase demodulating system as shown in Figure 2 for sensor construction schematic diagram.This Fibre Optical Sensor comprises the FBG1 of write optical fiber 4 inside, is positioned at sleeve 2 end face and is right against the sensitive diaphragm 3 of fiber end face 5, optical fiber 4, fiber end face 5, sleeve 2.Described FBG1, distance fiber end face 5 is 6 meters, and FBG1 constitutes a catoptron of Fibre Optical Sensor; Described sensitive diaphragm 3, distance fiber end face 5 is millimeter magnitude, constitutes another catoptron of Fibre Optical Sensor, can be changed the reflectivity of sensitive diaphragm 3 by the length controlling air chamber; Described fiber end face 5 has an inclination angle, due to the existence at inclination angle, fiber end face and sensitive diaphragm can be avoided to interfere; Described sleeve 2 is for the position of fixing sensitive diaphragm 3 and optical fiber 4.
The diaphragm-type optical-fiber sensor based on FBG of the present embodiment, described PGC phase demodulating system as shown in Figure 2.Be specially: first the light that light source sends enter Fibre Optical Sensor and interfere after circulator 7, and interference light enters photoelectric commutator 9 through circulator 7 again, electric signal accesses PGC phase demodulation modules 6 after A/D8 gathers.PGC phase demodulating is highly sensitive, and antijamming capability is strong, makes Fibre Optical Sensor insensitive to the gradual factor such as temperature variation and wave length shift simultaneously.
Although disclosed embodiment as above, the embodiment that its content just adopts for the ease of understanding technical scheme of the present invention, is not intended to limit the present invention.Technician in any the technical field of the invention; under the prerequisite not departing from disclosed core technology scheme; any amendment and change can be made in the form implemented and details; but the protection domain that the present invention limits, the scope that still must limit with appending claims is as the criterion.
Claims (7)
1. the low fineness F-P of the diaphragm type based on a FBG optical fibre sound pressure sensor, it is characterized in that: comprise the FBG (1) in write optical fiber (4), sleeve (2), sensitive diaphragm (3), optical fiber (4), sleeve (2) is for being fixed on the dead ahead of fiber end face (5) by sensitive diaphragm (3); FBG (1) and sensitive diaphragm (3) form F-P cavity as two catoptrons, and the interference cavity of F-P cavity comprises FBG (1) to the optical fiber of sensitive diaphragm (3) and air chamber.
2. the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG according to claim 1, it is characterized in that: described FBG (1) distance fiber end face (5) 6 meters, sensitive diaphragm (3) distance fiber end face (5) is micron dimension.
3. the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG according to claim 1, is characterized in that: described fiber end face (5) has an inclination angle.
4. the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG according to claim 1,2 or 3, is characterized in that: the reflectivity of described FBG (1) is between 2% to 10%.
5. the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG according to claim 4, is characterized in that: the distance adjustable between described fiber end face (5) and sensitive diaphragm (3).
6. the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG according to claim 5, is characterized in that: thickness 100 nanometer to 10 micron of described sensitive diaphragm (3), diameter is 150 nanometers to 2.5 millimeter.
7. the low fineness F-P optical fibre sound pressure sensor of a kind of diaphragm type based on FBG according to claim 1, is characterized in that: the output signal of sensor adopts PGC phase demodulating system to carry out signal receiving.
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CN201510696186.3A CN105181112B (en) | 2015-10-22 | 2015-10-22 | A kind of low fineness Fabry Perot optical fibre sound pressure sensor of diaphragm type based on Fiber Bragg Grating FBG |
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106017756A (en) * | 2016-07-08 | 2016-10-12 | 燕山大学 | Submicron ultra-smooth metal film based highly sensitive FP pressure sensor |
CN106644039A (en) * | 2017-01-20 | 2017-05-10 | 哈尔滨工业大学 | Optical fiber mini-sized hydrophone |
CN110207807A (en) * | 2019-07-10 | 2019-09-06 | 国网上海市电力公司 | A kind of optical fibre vibration sensor and its method of measurement vibration |
CN110207806A (en) * | 2019-07-10 | 2019-09-06 | 国网上海市电力公司 | A kind of oblique angle end face optical fibre vibration sensor and its method of measurement vibration |
WO2019244013A1 (en) * | 2018-06-18 | 2019-12-26 | Inphotech Spolka Z Ograniczona Odpowiedzialnoscia | Interferometric fiber optic sensor, fiber optic probe and method of detection of chemical substance |
CN111426374A (en) * | 2020-05-15 | 2020-07-17 | 云南电网有限责任公司电力科学研究院 | Optical fiber Fabry-Perot acoustic sensing system and method |
CN111854923A (en) * | 2020-07-31 | 2020-10-30 | 重庆邮电大学 | Acoustic wave measurement system, cantilever beam type optical fiber acoustic wave sensor demodulation system and method |
CN113567819A (en) * | 2021-08-17 | 2021-10-29 | 重庆大学 | F-P optical fiber sensing discharge detection device and method based on lens optical fiber |
CN114543971A (en) * | 2022-02-23 | 2022-05-27 | 华中科技大学 | FP interference type sound wave detector and sound wave detection method |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3932711A1 (en) * | 1989-09-29 | 1991-04-11 | Siemens Ag | Sensitive optical shock wave sensor - has e.g. acrylic] light wave guide whose rounded end is described by specific equation and is immersed in liq. where shock wave spreads out |
JPH07243902A (en) * | 1994-03-08 | 1995-09-19 | Mitsubishi Heavy Ind Ltd | Optical fiber passive acoustic sensor |
CN1490598A (en) * | 2002-10-14 | 2004-04-21 | 上海乐通光通信有限公司 | Fibre-optical sensor |
CN103528665A (en) * | 2013-09-29 | 2014-01-22 | 中国电子科技集团公司第二十七研究所 | Novel Fabry-Perot interference MEMS (Micro Electro Mechanical System) sound wave sensor |
CN103557929A (en) * | 2013-11-14 | 2014-02-05 | 北京航空航天大学 | Optical fiber Fabry-Perot sound pressure sensor manufacturing method based on graphene membrane and measuring method and device thereof |
-
2015
- 2015-10-22 CN CN201510696186.3A patent/CN105181112B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3932711A1 (en) * | 1989-09-29 | 1991-04-11 | Siemens Ag | Sensitive optical shock wave sensor - has e.g. acrylic] light wave guide whose rounded end is described by specific equation and is immersed in liq. where shock wave spreads out |
JPH07243902A (en) * | 1994-03-08 | 1995-09-19 | Mitsubishi Heavy Ind Ltd | Optical fiber passive acoustic sensor |
CN1490598A (en) * | 2002-10-14 | 2004-04-21 | 上海乐通光通信有限公司 | Fibre-optical sensor |
CN103528665A (en) * | 2013-09-29 | 2014-01-22 | 中国电子科技集团公司第二十七研究所 | Novel Fabry-Perot interference MEMS (Micro Electro Mechanical System) sound wave sensor |
CN103557929A (en) * | 2013-11-14 | 2014-02-05 | 北京航空航天大学 | Optical fiber Fabry-Perot sound pressure sensor manufacturing method based on graphene membrane and measuring method and device thereof |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106017756A (en) * | 2016-07-08 | 2016-10-12 | 燕山大学 | Submicron ultra-smooth metal film based highly sensitive FP pressure sensor |
CN106644039A (en) * | 2017-01-20 | 2017-05-10 | 哈尔滨工业大学 | Optical fiber mini-sized hydrophone |
WO2019244013A1 (en) * | 2018-06-18 | 2019-12-26 | Inphotech Spolka Z Ograniczona Odpowiedzialnoscia | Interferometric fiber optic sensor, fiber optic probe and method of detection of chemical substance |
EP3835765A1 (en) * | 2018-06-18 | 2021-06-16 | Inphotech Spolka z Ograniczona Odpowiedzialnoscia | Interferometric fiber optic sensor, fiber optic probe and method of detection of chemical substance |
CN110207807A (en) * | 2019-07-10 | 2019-09-06 | 国网上海市电力公司 | A kind of optical fibre vibration sensor and its method of measurement vibration |
CN110207806A (en) * | 2019-07-10 | 2019-09-06 | 国网上海市电力公司 | A kind of oblique angle end face optical fibre vibration sensor and its method of measurement vibration |
CN111426374A (en) * | 2020-05-15 | 2020-07-17 | 云南电网有限责任公司电力科学研究院 | Optical fiber Fabry-Perot acoustic sensing system and method |
CN111854923A (en) * | 2020-07-31 | 2020-10-30 | 重庆邮电大学 | Acoustic wave measurement system, cantilever beam type optical fiber acoustic wave sensor demodulation system and method |
CN111854923B (en) * | 2020-07-31 | 2022-05-24 | 重庆邮电大学 | Acoustic wave measurement system, cantilever beam type optical fiber acoustic wave sensor demodulation system and method |
CN113567819A (en) * | 2021-08-17 | 2021-10-29 | 重庆大学 | F-P optical fiber sensing discharge detection device and method based on lens optical fiber |
CN114543971A (en) * | 2022-02-23 | 2022-05-27 | 华中科技大学 | FP interference type sound wave detector and sound wave detection method |
CN114543971B (en) * | 2022-02-23 | 2022-11-11 | 华中科技大学 | FP interference type sound wave detector and sound wave detection method |
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