CN105177498A - AlCrSiON nano-composite cutting tool coating and preparation method thereof - Google Patents
AlCrSiON nano-composite cutting tool coating and preparation method thereof Download PDFInfo
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Abstract
Belonging to the technical field of film materials, the invention relates to an AlCrSiON nano-composite cutting tool coating and a preparation method thereof. The AlCrSiON nano-composite cutting tool coating comprises the following components: 10-31 at.% of Al, 20-40 at.% of Cr, 4-15 at.% of Si, 3-25 at.% of O, and 25-47 at.% of N. According to the preparation method, the AlCrSiON nano-composite cutting tool coating is plated on a high speed steel or hard alloy cutting tool surface by a cathodic arc ion plating technology. Through conscious introduction of oxygen element to serve as the coating, the AlCrSiON cutting tool nano-composite coating realizes the purpose of performance improvement, has the advantages of high hardness, low friction coefficient, and superior resistance to high temperature oxidation and tool cutting, and has great application prospects in high-speed cutting and surface protection fields.
Description
Technical field
The present invention relates to a kind of cutter coat and preparation method thereof, be specifically related to nano combined cutter coat of a kind of AlCrSiON and preparation method thereof, belong to thin-film material technical field.
Background technology
Surface-coating technology has become a gordian technique in cutting tool field, serves vital effect to the improvement of cutting performance and the progress of processing technology.TiN is most widely used hard coating material, but TiN coating exists the problem of high temperature oxidation always, and also can not meet the requirement of modern mechanical processing to cutter along with its hardness of development of material industry.Have at present and add the multi-element coating that the elements such as Cr, Al form multicomponent in TiN coating, as TiCrN, TiAlN coating, microhardness reaches HV3000, there is the resistance to mechanical wearing and tearing higher than TiN coating, abrasive wear resistant weld deposit performance, but still the requirement of Modern High-Speed processing to the better performance of cutter can not be met.Recently contain Si nano-composite coating as coatings such as TiSiN, AlTiSiN, AlCrSiN, owing to having the feature such as high rigidity and high-temperature oxidation resistance, and become one of direction of cutter coat development.
Nano composite structure coating is that isolated nanocrystal (as nc-TiN) is embedded in very thin noncrystal substrate (as a-Si
3n
4) in a kind of composite structure coating, nanocrystalline have higher hardness, amorphous phase has high structural elasticity, two-phase interface has high internal cohesive energy, crystal phase and amorphous phase are thermodynamically in separation trend, therefore, this coating has ultrahigh hardness, high tenacity, excellent high-temperature stability and thermohardening, high oxidation-resistance etc., is adapted to the requirement of High-speed machining difficult-to-machine material to cutter coat.
Oxygen element is commonly referred to be harmful in nano combined nitride coatings, is unfavorable for the raising of mechanical property.But because vacuum chamber inevitably exists residual oxygen in vacuum coat process, can introduce oxygen element in the coating, too high gas clean-up can improve coating cost and not easily realize.If introduce oxygen in nano-composite coating, and still can ensure that coating has good performance, in Tool in Cutting and surfacecti proteon field, to low cost preparation, there is high rigidity, low-friction coefficient, superior resistance to high temperature oxidation and the nano-composite coating of high-speed cutting performance have great using value.
Cathodic arc ion plating technology is the technology that industrial production the most extensively adopts, have the advantages that ionization level is high, coating deposition rate is high, film-substrate cohesion is strong, cathodic arc ion plating technology is utilized to prepare a kind of containing oxygen element, the novel C rAlSiON nano-composite coating technology of low cost have not been reported, and has great application prospect in Tool in Cutting and surfacecti proteon field.
Summary of the invention
The object of this invention is to provide a kind of multi sphere ion plating technology that adopts in the formula of rapid steel or the nano combined cutter coat of carbide tool surface plating AlCrSiON and preparation method, the present invention on the basis of existing technology, the technical indicator of further raising cutting tool, to meet the demand of modernization industry to better cutter.
For achieving the above object, the technical solution used in the present invention is as follows:
The nano combined cutter coat of a kind of AlCrSiON, is grouped into by the one-tenth of following weight percentage:
Al10 ~ 31at.%, Cr20 ~ 40at.%, Si4 ~ 15at.%, O3 ~ 25at.%, N25 ~ 47at.%; Each composition summation is 100at.%.
The preparation of described nano combined cutter coat adopts cathodic arc ion plating technology.
Present invention also offers the preparation method of the nano combined cutter coat of a kind of AlCrSiON, comprise the steps:
(1) Wimet cleaned up and speedy steel cutting-tool are evenly fixed on the pivoted frame in coating equipment, regulate work support rotating speed to be 2 ~ 12rpm, open well heater, be warming up to 300 ~ 500 DEG C, be evacuated to base vacuum 1.0 ~ 4.0 × 10
-3pa;
(2) open Ar airshed valve, adjustment vacuum chamber pressure is 0.2 ~ 0.9Pa, and matrix adds negative bias voltage 400 ~ 1300V, carries out glow discharge sputtering cleaning 15 ~ 35min;
(3) then reduce matrix negative bias voltage to 100 ~ 300V, open pure Cr target, adjustments target current is 40 ~ 150A, surperficial and form Cr metal bonding layer with activated matrix with Cr high-energy ionic bombardment matrix 5 ~ 20 minutes;
(4) close Ar airshed valve, open N
2airshed valve, adjustable pressure to 0.5 ~ 2.5Pa, under temperature is adjusted to 300 ~ 500 DEG C of conditions, deposition CrN transition layer 5 ~ 20min;
(5) O is passed into
2gas, and control air pressure at 0.4 ~ 3.0Pa, O
2ratio, 3 ~ 30%, opens AlCrSi(60:30:10) target, regulate arc source electric current 50 ~ 180A depositing Al CrSiON nanometer composite layer, depositing time remains on 60 ~ 150min;
(6), after completing plated film, normal temperature cooling after cutter and coating are cooled to 80 ~ 100 DEG C with stove, is taken out.
Between substrate and coating, have Cr metal bonding layer, thickness is about 80 ~ 450nm;
Between substrate and coating, have CrN transition layer, thickness is about 100 ~ 800nm.
The invention has the beneficial effects as follows: in modern metal cutting process, to cutter high cutting speed, high speed of feed, high reliability, long lifetime, the requirement of high precision and good cutting controlling, the present invention adopts most widely used cathodic arc ion plating technology in industrial production, prepare high performance AlCrSiON nano-composite coating, this nano-composite coating has high rigidity, low-friction coefficient, superior resistance to high temperature oxidation and high-speed cutting performance, greatly can improve the practical life of protected instrument, and can low cost prepare, in Tool in Cutting and surfacecti proteon field, there is great application prospect.
Accompanying drawing explanation
The cross-sectional SEM image of Figure 1A lCrSiON nano-composite coating;
The XRD curve of the AlCrSiON nano-composite coating of Fig. 2 different oxygen;
The hardness of the AlCrSiON nano-composite coating of Fig. 3 different oxygen and friction co-efficient value.
Embodiment
Be described in further details the present invention below by example, these examples are only used for the present invention is described, do not limit the scope of the invention.
Embodiment 1
The nano combined cutter coat of a kind of AlCrSiON, is grouped into by the one-tenth of following weight percentage:
Al10at.%，Cr20at.%，Si15at.%，O25at.%，N30at.%；
A preparation method for the nano combined cutter coat of AlCrSiON, comprises the steps:
The carbide-tipped milling cutter cleaned up evenly is fixed on the pivoted frame in coating equipment, regulates work support rotating speed to be 4rpm, open well heater simultaneously, be warming up to 400 DEG C, be evacuated to base vacuum 4.0 × 10
-3pa; Open Ar airshed valve, regulate vacuum chamber to be about 0.6Pa, matrix adds negative bias voltage 1200V, carries out glow discharge sputtering cleaning 25min; Then reduce matrix negative bias voltage to 200V, open pure Cr target, adjustments target current is 80A, surperficial and form Cr metal bonding layer with activated matrix with Cr high-energy ionic bombardment matrix 10 minutes; Close Ar airshed valve, open N
2airshed valve, adjustable pressure, to 1Pa, under temperature is adjusted to 400 DEG C of conditions, deposits CrN transition layer 10min; Pass into O
2gas, and control air pressure at 1.0Pa, O
2ratio, 10%, opens CrAlSi target, and regulate arc source electric current 120A depositing Al CrSiON nanometer composite layer, depositing time remains on 120min; After completing plated film, after cutter and coating are cooled to 80 DEG C with stove, take out normal temperature cooling.
As shown in Figure 1, CrN transition region thickness is at about 100nm, AlCrSiON nano-composite coating thickness at about 2 μm, and compound coating bonding force is good for the SEM image of the nano combined AlCrSiON of preparation.
Fig. 2 gives the XRD figure picture of AlCrSiON coating, and as can be seen from the figure the diffraction peak of CrN, is indicated as nanocrystalline structure, does not find Al
2o
3or Si
3n
4diffraction peak, be indicated as non-crystal structure, can infer that AlCrSiON coating is that a kind of nanocrystalline CrN is embedded in amorphous Al
2o
3or Si
3n
4the nano composite structure of matrix.
Fig. 3 is the different numerical value of the hardness of coating and the friction coefficient composition, can find out that coating has higher hardness and lower frictional coefficient.
Embodiment 2
The nano combined cutter coat of a kind of AlCrSiON, is grouped into by the one-tenth of following weight percentage:
Al31at.%，Cr20at.%，Si4at.%，O20at.%，N25at.%；
A preparation method for the nano combined cutter coat of AlCrSiON, comprises the steps:
The carbide end mill cleaned up evenly is fixed on the pivoted frame in coating equipment, regulates work support rotating speed to be 4rpm, open well heater simultaneously, be warming up to 300 DEG C, be evacuated to base vacuum 1.2 × 10
-3pa; Open Ar airshed valve, regulate vacuum chamber to be about 0.4Pa, matrix adds negative bias voltage 1100V, carries out glow discharge sputtering cleaning 28min; Then reduce matrix negative bias voltage to 200V, open pure Cr target, adjustments target current is 70A, surperficial and form Cr metal bonding layer with activated matrix with Cr high-energy ionic bombardment matrix 10 minutes; Close Ar airshed valve, open N
2airshed valve, adjustable pressure, to 1.5Pa, under temperature is adjusted to 400 DEG C of conditions, deposits CrN transition layer 13min; Pass into O
2gas, and control air pressure at 1.3Pa, O
2ratio, 25%, opens CrAlSi target, and regulate arc source electric current 120A depositing Al CrSiON nanometer composite layer, depositing time remains on 120min; After completing plated film, after cutter and coating are cooled to 90 DEG C with stove, take out normal temperature cooling.
On carbide end mill surface, prepare AlCrSiON coating slotting cutter, tool surface coat-thickness is 1-4 micron, test the life span comparison of high speed cutting quenched steel with at the aluminium titanium nitrogen coating slotting cutter of identical carbide end mill surface deposition and uncoated carbide end mill, mean lifetime is respectively: cut 9.8m without coated cutting tool, aluminium titanium nitrogen coated cutting tool cuts 43.2, multi-layer nano composite structure coating Tool in Cutting 86.5m, its machining condition is workpiece material: SKD11 (HRC55), cutting speed: 200m/min, feed rate: 0.02mm/tooth, cutting-in: 0.1mm, cut wide: 2mm.
Embodiment 3
The nano combined cutter coat of a kind of AlCrSiON, is grouped into by the one-tenth of following weight percentage:
Al10at.%，Cr20at.%，Si4at.%，O19at.%，N47at.%；
A preparation method for the nano combined cutter coat of AlCrSiON, comprises the steps:
The speedy steel cutting-tool cleaned up evenly is fixed on the pivoted frame in coating equipment, regulates work support rotating speed to be 2rpm, open well heater simultaneously, be warming up to 300 DEG C, be evacuated to base vacuum 1.0 × 10
-3pa; Open Ar airshed valve, adjustment vacuum chamber is 0.2Pa, and matrix adds negative bias voltage 400V, carries out glow discharge sputtering cleaning 15min; Then reduce matrix negative bias voltage to 100V, open pure Cr target, adjustments target current is 40A, surperficial and form Cr metal bonding layer with activated matrix with Cr high-energy ionic bombardment matrix 5 minutes; Close Ar airshed valve, open N
2airshed valve, adjustable pressure, to 0.5Pa, under temperature is adjusted to 300 DEG C of conditions, deposits CrN transition layer 5min; Pass into O
2gas, and control air pressure at 0.4Pa, O
2ratio, 3%, opens AlCrSi target, and regulate arc source electric current 50A depositing Al CrSiON nanometer composite layer, depositing time is 60min; After completing plated film, after cutter and coating are cooled to 80 DEG C with stove, take out normal temperature cooling.
Embodiment 4
The nano combined cutter coat of a kind of AlCrSiON, is grouped into by the one-tenth of following weight percentage:
Al15at.%，Cr20at.%，Si15at.%，O3at.%，N47at.%；
A preparation method for the nano combined cutter coat of AlCrSiON, comprises the steps:
The speedy steel cutting-tool cleaned up evenly is fixed on the pivoted frame in coating equipment, regulates work support rotating speed to be 12rpm, open well heater simultaneously, be warming up to 500 DEG C, be evacuated to base vacuum 1.0 × 10
-2pa; Open Ar airshed valve, adjustment vacuum chamber is 0.9Pa, and matrix adds negative bias voltage 1300V, carries out glow discharge sputtering cleaning 35min; Then reduce matrix negative bias voltage to 300V, open pure Cr target, adjustments target current is 150A, surperficial and form Cr metal bonding layer with activated matrix with Cr high-energy ionic bombardment matrix 20 minutes; Close Ar airshed valve, open N
2airshed valve, adjustable pressure, to 2.5Pa, under temperature is adjusted to 500 DEG C of conditions, deposits CrN transition layer 20min; Pass into O
2gas, and control air pressure at 3.0Pa, O
2ratio, 30%, opens AlCrSi target, and regulate arc source electric current 180A depositing Al CrSiON nanometer composite layer, depositing time remains on 150min; After completing plated film, after cutter and coating are cooled to 100 DEG C with stove, take out normal temperature cooling.
Embodiment 5
The nano combined cutter coat of a kind of AlCrSiON, is grouped into by the one-tenth of following weight percentage:
Al15at.%，Cr40at.%，Si15at.%，O5at.%，N25at.%；
A preparation method for the nano combined cutter coat of AlCrSiON, comprises the steps:
The inserted tool cleaned up evenly is fixed on the pivoted frame in coating equipment, regulates work support rotating speed to be 10rpm, open well heater simultaneously, be warming up to 350 DEG C, be evacuated to base vacuum 7.0 × 10
-3pa; Open Ar airshed valve, regulate vacuum chamber to be about 0.8Pa, matrix adds negative bias voltage 800V, carries out glow discharge sputtering cleaning 20min; Then reduce matrix negative bias voltage to 150V, open pure Cr target, adjustments target current is 120A, surperficial and form Cr metal bonding layer with activated matrix with Cr high-energy ionic bombardment matrix 15 minutes; Close Ar airshed valve, open N
2airshed valve, adjustable pressure, to 2Pa, under temperature is adjusted to 350 DEG C of conditions, deposits CrN transition layer 15min; Pass into O
2gas, and control air pressure at 2.0Pa, O
2ratio, 20%, opens AlCrSi target, and regulate arc source electric current 150A depositing Al CrSiON nanometer composite layer, depositing time remains on 100min; After completing plated film, after cutter and coating are cooled to 85 DEG C with stove, take out normal temperature cooling.
Claims (5)
1. the nano combined cutter coat of AlCrSiON, is characterized in that: be grouped into by the one-tenth of following weight percentage:
Al10~31at.%，Cr20~40at.%，Si4~15at.%，O3~25at.%，N25~47at.%。
2. a preparation method for the nano combined cutter coat of AlCrSiON, is characterized in that: comprise the steps:
(1) Wimet cleaned up and speedy steel cutting-tool are evenly fixed on the pivoted frame in coating equipment, regulate work support rotating speed to be 2 ~ 12rpm, open well heater, be warming up to 300 ~ 500 DEG C, be evacuated to base vacuum 1.0 ~ 4.0 × 10
-3pa;
(2) open Ar airshed valve, adjustment vacuum chamber pressure is 0.2 ~ 0.9Pa, and matrix adds negative bias voltage 400 ~ 1300V, carries out glow discharge sputtering cleaning 15 ~ 35min;
(3) then reduce matrix negative bias voltage to 100 ~ 300V, open pure Cr target, adjustments target current is 40 ~ 150A, surperficial and form Cr metal bonding layer with activated matrix with Cr high-energy ionic bombardment matrix 5 ~ 20 minutes;
(4) close Ar airshed valve, open N
2airshed valve, adjustable pressure to 0.5 ~ 2.5Pa, under temperature is adjusted to 300 ~ 500 DEG C of conditions, deposition CrN transition layer 5 ~ 20min;
(5) O is passed into
2gas, and control air pressure at 0.4 ~ 3.0Pa, open AlCrSi target, regulate arc source electric current 50 ~ 180A depositing Al CrSiON nanometer composite layer, depositing time remains on 60 ~ 150min;
(6), after completing plated film, normal temperature cooling after cutter and coating are cooled to 80 ~ 100 DEG C with stove, is taken out.
3. the preparation method of the nano combined cutter coat of a kind of AlCrSiON according to claim 2, is characterized in that: the preparation of described nano combined cutter coat adopts cathodic arc ion plating technology.
4. the preparation method of the nano combined cutter coat of a kind of AlCrSiON according to claim 2, is characterized in that: the O described in step (5)
2volume ratio be 3 ~ 30%.
5. the preparation method of the nano combined cutter coat of a kind of AlCrSiON according to claim 2, is characterized in that: in the AlCrSi target described in step (5), the ratio of Al, Cr, Si is 60:30:10.
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Cited By (7)
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| CN105925946A (en) * | 2016-05-06 | 2016-09-07 | 辽宁科技大学 | Method for preparing TiN or CrN film on surface of aluminum alloy through magnetron sputtering method |
| CN106191791A (en) * | 2016-07-06 | 2016-12-07 | 广东工业大学 | A kind of high temperature low friction Cr AlSiON nano-composite coating and preparation method thereof |
| CN106702331A (en) * | 2016-12-07 | 2017-05-24 | 广东工业大学 | High-temperature abrasion-resistant CrAlSiON based nano-composite coating and preparation method and application thereof |
| CN107190229A (en) * | 2017-05-15 | 2017-09-22 | 广东工业大学 | A kind of self-assembled nanometer oxynitride high-temperaure coating and preparation method thereof |
| CN109724274A (en) * | 2019-01-31 | 2019-05-07 | 武汉大学苏州研究院 | A kind of novel nano composite solar spectral selective absorbing coating and preparation method thereof |
| CN110945156A (en) * | 2017-07-31 | 2020-03-31 | 瓦尔特公开股份有限公司 | Coated cutting tool and method of making same |
| CN114959575A (en) * | 2022-05-26 | 2022-08-30 | 安徽工业大学 | Insulating wear-resistant protective coating for thin film sensor, preparation method and application thereof |
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| CN105925946A (en) * | 2016-05-06 | 2016-09-07 | 辽宁科技大学 | Method for preparing TiN or CrN film on surface of aluminum alloy through magnetron sputtering method |
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| CN106191791A (en) * | 2016-07-06 | 2016-12-07 | 广东工业大学 | A kind of high temperature low friction Cr AlSiON nano-composite coating and preparation method thereof |
| CN106702331A (en) * | 2016-12-07 | 2017-05-24 | 广东工业大学 | High-temperature abrasion-resistant CrAlSiON based nano-composite coating and preparation method and application thereof |
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| CN107190229A (en) * | 2017-05-15 | 2017-09-22 | 广东工业大学 | A kind of self-assembled nanometer oxynitride high-temperaure coating and preparation method thereof |
| CN110945156A (en) * | 2017-07-31 | 2020-03-31 | 瓦尔特公开股份有限公司 | Coated cutting tool and method of making same |
| CN109724274A (en) * | 2019-01-31 | 2019-05-07 | 武汉大学苏州研究院 | A kind of novel nano composite solar spectral selective absorbing coating and preparation method thereof |
| CN114959575A (en) * | 2022-05-26 | 2022-08-30 | 安徽工业大学 | Insulating wear-resistant protective coating for thin film sensor, preparation method and application thereof |
| CN114959575B (en) * | 2022-05-26 | 2024-01-02 | 安徽工业大学 | Insulating wear-resistant protective coating for film sensor, preparation method and application thereof |
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Application publication date: 20151223 |