CN104060230A - TiZrAlSiON nano composite superhard coating cutter and preparation method thereof - Google Patents
TiZrAlSiON nano composite superhard coating cutter and preparation method thereof Download PDFInfo
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Abstract
The invention relates to a TiZrAlSiON nano composite superhard coating cutter and a preparation method thereof, belonging to the technical field of thin-film materials. The coating cutter comprises a hard alloy cutter body, wherein a TiZrAlSiON nano composite coating is plated on the cutter body; the TiZrAlSiON coating comprises a 50-100nm-thick metal base layer-Zr metal layer, a 100-200nm-thick nitride transition layer ZrN and a 1000-4000nm-thick functional layer TiZrAlSiON; and the nano composite coating has a nano composite structure in which nanocrystal particles are embedded in the amorphous matrix, the nanoparticles comprise TiN and ZrN, and the amorphous matrix comprises Al2O3 and Si3N4. The preparation method comprises the following steps: carrying out glow cleaning on the hard alloy cutter, carrying out arc ion bombardment, and sequentially depositing the base metal layer, transition metal nitride layer and TiZrAlSiON coating. The TiZrAlSiON composite coating has the advantages of high hardness, low friction factor, high toughness, high binding force and excellent high-temperature oxidation resistance, has better comprehensive properties than the TiN, CrN and Ti-Al-N coatings which are industrially produced at present, and can effectively enhance the toughness and cutting characteristic of the cutting tool and prolong the service life of the hard alloy cutter body.
Description
Technical field
The present invention relates to a kind of coated cutting tool, be specifically related to a kind of TiZrAlSiON nano composite super-hard coated cutting tool and preparation method thereof, belong to thin-film material field.
Background technology
Modern metal cutting processing, requires the performances such as cutter has high cutting speed, high speed of feed, high reliability, long lifetime, high precision and good cutting is controlled.The appearance of coated cutting tool, make Tool in Cutting performance have important breakthrough, it combines tool matrix with ganoine thin film top layer, because matrix has kept good toughness and higher intensity, and ganoine thin film top layer has the feature of high-wearing feature and low-friction coefficient, the performance of cutter is greatly enhanced.Modern High-Speed highly-efficient processing and difficult-to-machine material are used the increasing harsh requirement to cutter material, and cutting tool coating material is also in constantly upgrading renewal.Nano composite structure coating is that isolated nanocrystal (as nc-TiN) is embedded in very thin noncrystal substrate (as a-Si
3n
4) in a kind of composite structure coating, nanocrystalline have higher hardness, amorphous phase has high structural elasticity, two-phase interface has high internal cohesive energy, crystal phase and amorphous phase are separation trend on thermodynamics, therefore, this coating has ultrahigh hardness (> 40GPa), high tenacity, excellent high-temperature stability and thermohardening (1000 ℃ of >), high oxidation-resistance etc., is adapted to the requirement of High-speed machining difficult-to-machine material to the high rigidity of cutter coat, high tenacity, high-wearing feature and high-temperature behavior.
CN201310489244.6 discloses a kind of coated cemented carbide endmill and preparation method thereof, this coated cemented carbide endmill comprises the single or multiple lift coating applying on matrix and matrix, described coating is (Ti1-aMea) X coating, wherein, Me be chemical element Al, Cr, Zr, Si, Hf, Nb, W and Ta wherein one or more, X be chemical element N, C, O and B wherein one or more, a is between 0.2 to 0.6; (32-42) CN201310476304.0 discloses the preparation method of a kind of high rigidity, high elastic coefficient TiSiN supercoat, comprises that matrix cleans,, the step such as TiSiN layer preparation.But the coating patent that these two patents provide exists the large not problem of mechanical property hardness of coating, can not adapt to the demand of some working conditions.And CN201320550155.3 discloses a kind of diamond-like ground mass nano-composite coating cutter and preparation method thereof, on described tool matrix, be attached with successively from the inside to the outside articulamentum, gradient layer and main wearing layer, articulamentum is attached on tool matrix, articulamentum is Mo, gradient layer is attached on articulamentum, gradient layer is Mo-C layer, in gradient layer, carbon content increases from the inside to the outside gradually, main wearing layer is attached on gradient layer, main wearing layer is the diamond-like coating doped with molybdenum carbide, i.e. M ℃-DLC layer; Although the coated cutting tool mechanical property that this patent is prepared is good, the higher and high-temperature resistance of preparation cost a little less than.
TiZrAlSiON nano-composite coating has nanocrystalline (TiN, ZrN) and is embedded in noncrystal substrate (Al
2o
3, Si
3n
4) polynary nanometer composite structure, hardness approaches 40 GPa, oxidation resistance temperature surpasses 1000 ℃, is a kind of superhard, wear-resistant, high-temperaure coating of excellence.In domestic and foreign literature and data there are no the preparation of relevant TiZrAlSiON nano-composite coating, therefore, the invention provides a kind of TiZrAlSiON nano composite super-hard coated cutting tool and preparation method thereof, this nano-composite coating adopts multi-arc ion coating to prepare in conjunction with bipolar pulse magnetron sputtering technique, have the nano composite structure that nano-crystalline granule is embedded in noncrystal substrate, nano particle is that TiN and ZrN are embedded in noncrystal substrate Al
2o
3and Si
3n
4in, will provide valuable help to improving modern metal cutting level of processing.
Summary of the invention
The object of the invention is to provides a kind of TiZrAlSiON super hard nano composite coating layer cutter and preparation method for Modern High-Speed highly-efficient processing industry, this nano-composite coating has that hardness is high, frictional coefficient is low, toughness and bonding force strong, excellent high temperature resistance oxygen, can effectively strengthen toughness and the cutting ability of cutting tool, improve the work-ing life of inserted tool.
For achieving the above object, technical scheme provided by the invention is:
A TiZrAlSiON nano composite super-hard coated cutting tool, coated cutting tool comprises the TiZrAlSiON nano-composite coating of coating on inserted tool body and body.
Described TiZrAlSiON nano-composite coating is multi-layer compound structure: comprise 50-100 nanometer thickness metal prime coat Zr metal level, 100-300 nanometer thickness nitride transition layer ZrN, 1000-4000 nanometer thickness functional layer TiZrAlSiON;
Further, the microstructure of TiZrAlSiON nano-composite coating is: have the nano composite structure that nano-crystalline granule is embedded in noncrystal substrate, nano particle TiN and ZrN are embedded in noncrystal substrate Al
2o
3and Si
3n
4in, wherein nano-crystalline granule TiN and ZrN are of a size of 5-15 nanometer;
Further, TiZrAlSiON nano-composite coating preparation method is: adopt multi-arc ion coating in conjunction with bipolar pulse magnetron sputtering, multipath gas is prepared nanometer composite Ti ZrAlSiON coating, wherein Si element acquisition by bipolar pulse magnetron sputtering Si cylindrical target, obtain, the acquisition of Zr, Ti, Al element realizes by multi sphere ion evaporation;
Further, the concrete preparation technology of TiZrAlSiON nano-composite coating and step are: when vacuum chamber base vacuum reaches 1 * 10
-3to 8 * 10
-3during Pa, by gas, control and pass into Ar gas to 1 to 3 Pa, regulate substrate temperature 300-400 ℃, regulate substrate bias at-700-1000 V, substrate frame rotating speed, at 3-8rpm, carries out aura cleaning to surface treated inserted tool; After aura cleans and finishes, regulate substrate bias at 200-300V, substrate temperature 300-500 ℃, air pressure is in 1-3 * 10
-1pa, opens arc ion plating Zr target, controls Zr target current at 50-70A, bombards the Zr metal prime coat of 5-10 minute 50-100 nanometer thickness; After metal prime coat deposition finishes, by gas, control and pass into N
2and control air pressure at 1-2 Pa, substrate bias, at 100-200 V, Zr target current 50-80A, deposits the thick ZrN nitride of 100-300 nm transition layer; After nitride transition layer deposition finishes, open arc ion plating Zr target and AlTi alloys target, and control target current at 40-60A, open bipolar pulse magnetron sputtering Si target simultaneously, regulate electric current to 5-10A, then by gas control system, control nitrogen and oxygen flow, N
2and O
2pass into respectively 60-100 and 200-400 sccm
,air pressure is controlled at 2-4 Pa, the TiZrAlSiON nano-composite coating of deposition 1000 to 4000 nanometer thickness;
Further, the mechanical property of TiZrAlSiON nano-composite coating: have the ultrahigh hardness that surpasses 35 GPa, the low-friction coefficient of 0.3 left and right, is greater than the sticking power of 50N.
Further, the oxygen element content of TiZrAlSiON coating and control are: oxygen feedback assembly is accurately controlled the oxygen level of coating to 3-10 at.%.
the present invention with respect to the beneficial effect of prior art is:
The present invention is directed to the problem of existing high-speed metal cutting Cutting-Tool Coating Technology existence and the defect of cutting performance, a kind of inserted tool nanometer composite Ti ZrAlSiON coated cutting tool and preparation method are provided, its effective effect is: (1) improves bonding strength and the toughness of coated cutting tool on the one hand by Zr metal prime coat and ZrN transition layer, reduce coating internal stress, the internal stress that overcome single-layer coating is high, the shortcoming of poor adhesive force, and O element mixes the oxidation-resistance property that can further improve coating on the other hand; (2) this nanometer composite Ti ZrAlSiON coating has the features such as hardness is high, frictional coefficient is low, bonding force is strong, high temperature oxidation resistance is good, is showing very large advantage aspect the wear-resisting lubricated high temperature resistance of ultra-fine cemented carbide tool surface; (3) exploitation multilayer TiZrAlSiON nano-composite coating the application in inserted tool, can effectively solve the problem that modernization high-speed metal cutting Cutting-Tool Coating Technology exists, and brings huge economic and social benefit.
accompanying drawing explanation
Fig. 1 is the equipment drawing that the present invention prepares TiZrAlSiON nano-composite coating;
Fig. 2 is at O in the present invention
2flow is the XRD figure spectrum of the TiZrAlSiON coating prepared under 200 sccm;
Fig. 3 is the SEM sectional view of preparing TiZrAlSiON coating in the present invention;
Fig. 4 is Ti 2p and the Si 2p spectrum of the TiZrAlSiON coating that makes under optimal conditions in the present invention;
Fig. 5 is the frictional coefficient curve of the TiZrAlSiON coating that makes of the present invention;
Fig. 6 is the transmission electron microscope full resolution pricture of the TiZrAlSiON coating that makes of the present invention;
Fig. 7 is that the nano hardness of the TiZrAlSiON coating that makes of the present invention is with the variation of compression distance.
Embodiment
Below by embodiment, the present invention is described in further details, these embodiment are only used for illustrating the present invention, do not limit the scope of the invention.
embodiment 1
A kind of TiZrAlSiON nano composite super-hard coated cutting tool, coated cutting tool comprises the TiZrAlSiON nano-composite coating of coating on inserted tool body and body, wherein TiZrAlSiON nano-composite coating, is multi-layer compound structure: comprise 50 nanometer thickness metal prime coat Zr metal levels, 100 nanometer thickness nitride transition layer ZrN, 1000 nanometer thickness functional layer TiZrAlSiON;
Its preparation method is, by electric arc evaporation Zr target and TiAl alloys target, obtains Zr, Ti, Al, and the acquisition of Si is by magnetron sputtering column Si target,, and the acquisition of N and O passes into N by gas control equipment
2and O
2realize, comprise the following steps:
First, when vacuum chamber base vacuum reaches 1 * 10
-3time, by gas, control and pass into Ar gas to 1 Pa, regulate substrate temperature 300 ℃, regulate substrate bias at-70V, substrate frame rotating speed, at 3 rpm, carries out aura cleaning to surface treated inserted tool; After aura cleans and finishes, regulate substrate bias at 200V, 300 ℃ of substrate temperatures, air pressure is 1 * 10
-1pa, opens arc ion plating Zr target, controls Zr target current at 50A, bombards the Zr metal prime coat of 5 minutes 50 nanometer thickness; After metal prime coat deposition finishes, by gas, control and pass into N
2and control air pressure at 1Pa, substrate bias, at 100 V, Zr target current 50A, deposits the thick ZrN nitride of 100 nm transition layer; After nitride transition layer deposition finishes, open arc ion plating Zr target and AlTi alloys target, and control target current at 40A, open bipolar pulse magnetron sputtering Si target simultaneously, regulate electric current to 5A, then by gas control system, control nitrogen and oxygen flow, N
2and O
2pass into respectively 60 and 200 sccm
,air pressure is controlled at 2 Pa, the TiZrAlSiON nano-composite coating of deposition 1000 nanometer thickness, and after preparation technology finishes, naturally cooling, when temperature drops to below 40 ℃, takes out inserted tool.
embodiment 2
A kind of TiZrAlSiON nano composite super-hard coated cutting tool, coated cutting tool comprises the TiZrAlSiON nano-composite coating of coating on inserted tool body and body, wherein TiZrAlSiON nano-composite coating, is multi-layer compound structure: comprise 100 nanometer thickness metal prime coat Zr metal levels, 300 nanometer thickness nitride transition layer ZrN, 4000 nanometer thickness functional layer TiZrAlSiON;
Its preparation method is, by electric arc evaporation Zr target and TiAl alloys target, obtains Zr, Ti, Al, and the acquisition of Si is by magnetron sputtering column Si target,, and the acquisition of N and O passes into N by gas control equipment
2and O
2realize, comprise the following steps:
First, when vacuum chamber base vacuum reaches 8 * 10
-3during Pa, by gas, control and pass into Ar gas to 3 Pa, regulate substrate temperature 400 ℃, regulate substrate bias at-1000 V, substrate frame rotating speed, at 8rpm, carries out aura cleaning to surface treated inserted tool; After aura cleans and finishes, regulate substrate bias at 300V, 500 ℃ of substrate temperatures, air pressure is 3 * 10
-1pa, opens arc ion plating Zr target, controls Zr target current at 70A, bombards the Zr metal prime coat of 10 minutes 100 nanometer thickness; After metal prime coat deposition finishes, by gas, control and pass into N
2and control air pressure at 2 Pa, substrate bias, at 200 V, Zr target current 80A, deposits the thick ZrN nitride of 300 nm transition layer; After nitride transition layer deposition finishes, open arc ion plating Zr target and AlTi alloys target, and control target current at 60A, open bipolar pulse magnetron sputtering Si target simultaneously, regulate electric current to 5-10A, then by gas control system, control nitrogen and oxygen flow, N
2and O
2pass into respectively 100 and 400 sccm
,air pressure is controlled at 4 Pa, the TiZrAlSiON nano-composite coating of deposition 4000 nanometer thickness, and after preparation technology finishes, naturally cooling, when temperature drops to below 40 ℃, takes out inserted tool.
embodiment 3
A kind of TiZrAlSiON nano composite super-hard coated cutting tool, coated cutting tool comprises the TiZrAlSiON nano-composite coating of coating on inserted tool body and body, wherein TiZrAlSiON nano-composite coating, is multi-layer compound structure: comprise 80 nanometer thickness metal prime coat Zr metal levels, 200 nanometer thickness nitride transition layer ZrN, 3000 nanometer thickness functional layer TiZrAlSiON;
Its preparation method is, by electric arc evaporation Zr target and TiAl alloys target, obtains Zr, Ti, Al, and the acquisition of Si is by magnetron sputtering column Si target,, and the acquisition of N and O passes into N by gas control equipment
2and O
2realize, comprise the following steps:
First, when vacuum chamber base vacuum reaches 7 * 10
-3during Pa, by gas, control and pass into Ar gas to 2.5 Pa, regulate substrate temperature 350 ℃, regulate substrate bias at-800 V, substrate frame rotating speed, at 7rpm, carries out aura cleaning to surface treated inserted tool; After aura cleans and finishes, regulate substrate bias at 220V, 380 ℃ of substrate temperatures, air pressure is 1.5 * 10
-1pa, opens arc ion plating Zr target, controls Zr target current at 55A, bombards the Zr metal prime coat of 8 minutes 75 nanometer thickness; After metal prime coat deposition finishes, by gas, control and pass into N
2and control air pressure at 1.5 Pa, substrate bias, at 180 V, Zr target current 70A, deposits the thick ZrN nitride of 200nm transition layer; After nitride transition layer deposition finishes, open arc ion plating Zr target and AlTi alloys target, and control target current at 50A, open bipolar pulse magnetron sputtering Si target simultaneously, regulate electric current to 8A, then by gas control system, control nitrogen and oxygen flow, N
2and O
2pass into respectively 700 and 300sccm
,air pressure is controlled at 3 Pa, the TiZrAlSiON nano-composite coating of deposition 1500 nanometer thickness, and after preparation technology finishes, naturally cooling, when temperature drops to below 40 ℃, takes out inserted tool.
embodiment 4
A kind of TiZrAlSiON nano composite super-hard coated cutting tool, coated cutting tool comprises the TiZrAlSiON nano-composite coating of coating on inserted tool body and body, wherein TiZrAlSiON nano-composite coating, is multi-layer compound structure: comprise 75 nanometer thickness metal prime coat Zr metal levels, 120 nanometer thickness nitride transition layer ZrN, 1300 nanometer thickness functional layer TiZrAlSiON;
Its preparation method is, by electric arc evaporation Zr target and TiAl alloys target, obtains Zr, Ti, Al, and the acquisition of Si is by magnetron sputtering column Si target,, and the acquisition of N and O passes into N by gas control equipment
2and O
2realize, comprise the following steps:
First, when vacuum chamber base vacuum reaches 6 * 10
-3during Pa, by gas, control and pass into Ar gas to 3 Pa, regulate substrate temperature 300 ℃, regulate substrate bias at-900 V, substrate frame rotating speed, at 8rpm, carries out aura cleaning to surface treated inserted tool; After aura cleans and finishes, regulate substrate bias at 270V, 330 ℃ of substrate temperatures, air pressure is 2.1 * 10
-1pa, opens arc ion plating Zr target, controls Zr target current at 55A, bombards the Zr metal prime coat of 8 minutes 70 nanometer thickness; After metal prime coat deposition finishes, by gas, control and pass into N
2and control air pressure at 1.8 Pa, substrate bias, at 120 V, Zr target current 70A, deposits the thick ZrN nitride of 120 nm transition layer; After nitride transition layer deposition finishes, open arc ion plating Zr target and AlTi alloys target, and control target current at 45A, open bipolar pulse magnetron sputtering Si target simultaneously, regulate electric current to 5-10A, then by gas control system, control nitrogen and oxygen flow, N
2and O
2pass into respectively 70 and 330sccm
,air pressure is controlled at 3 Pa, the TiZrAlSiON nano-composite coating of deposition 2000 nanometer thickness, and after preparation technology finishes, naturally cooling, when temperature drops to below 40 ℃, takes out inserted tool.
embodiment 5
A kind of TiZrAlSiON nano composite super-hard coated cutting tool, coated cutting tool comprises the TiZrAlSiON nano-composite coating of coating on inserted tool body and body, wherein TiZrAlSiON nano-composite coating, is multi-layer compound structure: comprise 68 nanometer thickness metal prime coat Zr metal levels, 170 nanometer thickness nitride transition layer ZrN, 3000 nanometer thickness functional layer TiZrAlSiON;
Its preparation method is, by electric arc evaporation Zr target and TiAl alloys target, obtains Zr, Ti, Al, and the acquisition of Si is by magnetron sputtering column Si target,, and the acquisition of N and O passes into N by gas control equipment
2and O
2realize, comprise the following steps:
First, when vacuum chamber base vacuum reaches 6 * 10
-3during Pa, by gas, control and pass into Ar gas to 2 Pa, regulate substrate temperature 400 ℃, regulate substrate bias at-1000 V, substrate frame rotating speed, at 7rpm, carries out aura cleaning to surface treated inserted tool; After aura cleans and finishes, regulate substrate bias at 280V, 420 ℃ of substrate temperatures, air pressure is 2 * 10
-1pa, opens arc ion plating Zr target, controls Zr target current at 60A, bombards the Zr metal prime coat of 7 minutes 95 nanometer thickness; After metal prime coat deposition finishes, by gas, control and pass into N
2and control air pressure at 1 Pa, substrate bias, at 140 V, Zr target current 70A, deposits the thick ZrN nitride of 200 nm transition layer; After nitride transition layer deposition finishes, open arc ion plating Zr target and AlTi alloys target, and control target current at 45A, open bipolar pulse magnetron sputtering Si target simultaneously, regulate electric current to 6.5A, then by gas control system, control nitrogen and oxygen flow, N
2and O
2pass into respectively 77 and 300sccm
,air pressure is controlled at 3 Pa, the TiZrAlSiON nano-composite coating of deposition 4000 nanometer thickness, and after preparation technology finishes, naturally cooling, when temperature drops to below 40 ℃, takes out inserted tool.
Below in conjunction with accompanying drawing, TiZrAlSiON nano composite super-hard coated cutting tool performance prepared by the present invention is described further
Fig. 1 is multi sphere overlooking and schematic cross-section in conjunction with bipolar pulse magnetic control sputtering system;
Fig. 2 provides O in figure
2the XRD figure spectrum of the TiZrAlSiON coating of preparing under flow 200 sccm conditions, can find out that its structure contains multiple Emission in Cubic: cube TiAlN(111), and (200), and (220) phase, cube ZrN(200) phase, six side's phase ZrO
2,in coating, there is not obvious aluminum oxide or silicon nitride phase, shown to form the nano-composite coating that cube polycrystalline is inlayed;
Fig. 3 is the Cross Section Morphology figure that provides TiZrAlSiON coating in figure, can find out obvious column crystal growth, and coating and substrate bonding force are good;
Fig. 4 is bias voltage 200V, O
2the XPS spectrum of the TiZrAlSiON sample of preparing under flow 200 sccm conditions.The element of following 5 nm left and right, XPS spectrum energy sampling surface and the discriminating of chemical state.In figure, provided the XPS spectrum of Ti 2p and Si 2p; The 2p that wherein Ti 2p composes
1/2and 2p
2/3peak lays respectively at 458.8 eV and 464.4 eV, corresponding to titanium nitride key, shows to exist in film stoichiometric nitride.In the XPS spectrum of Si 2p, only have 101.4eV place to have peak value, corresponding to Si
3n
4in Si-N key;
Fig. 5 is bias voltage 200V, O
2the high-resolution-ration transmission electric-lens image of the TiZrAlSiON sample of preparing under flow 200 sccm conditions, can see nano-amorphous pattern structure clearly;
In conjunction with XRD and XPS analysis, learn that coating is by polycrystalline ZrN, TiAlN, ZrO
2be embedded in mutually amorphous Si
3n
4and Al
2o
3form;
Fig. 6 is bias voltage 200V, O
2the high temperature friction coefficient curve of the TiZrAlSiON nano-composite coating of preparing under flow 200 sccm conditions in the time of 600 ℃.Frictional coefficient is less than 0.3, and known coating has good resistance to high temperature oxidation characteristic;
Fig. 7 is bias voltage 200V, O
2the hardness of the TiZrAlSiON nano-composite coating of preparing under flow 200 sccm conditions in the time of 800 ℃ is with the change curve of compression distance.The hardness of coating surpasses 35 Gpa.
Claims (6)
1. a TiZrAlSiON nano composite super-hard coated cutting tool, is characterized in that: coated cutting tool comprises the TiZrAlSiON nano-composite coating of coating on inserted tool body and body.
2. according to a kind of TiZrAlSiON nano composite super-hard coated cutting tool described in claims 1, it is characterized in that: described TiZrAlSiON nano-composite coating comprises 50-100 nanometer thickness metal prime coat Zr metal level, 100-300 nanometer thickness nitride transition layer ZrN, 1000-4000 nanometer thickness functional layer TiZrAlSiON.
3. according to a kind of TiZrAlSiON nano composite super-hard coated cutting tool described in claims 1 or 2, it is characterized in that: described functional layer TiZrAlSiON has the nano composite structure that nano-crystalline granule is embedded in noncrystal substrate, nano particle TiN and ZrN are embedded in noncrystal substrate Al
2o
3and Si
3n
4in, wherein nano-crystalline granule TiN and ZrN are of a size of 5-15 nanometer.
4. the preparation method of a TiZrAlSiON nano composite super-hard coated cutting tool, it is characterized in that: its preparation method is for adopting multi-arc ion coating in conjunction with bipolar pulse magnetron sputtering, multipath gas is prepared nanometer composite Ti ZrAlSiON coating, wherein the acquisition of Si element obtains by bipolar pulse magnetron sputtering Si cylindrical target, the acquisition of Zr, Ti, Al element realizes by multi sphere ion evaporation, and concrete steps are:
When vacuum chamber base vacuum reaches 1 * 10
-3to 8 * 10
-3during Pa, by gas, control and pass into Ar gas to 1-3 Pa, regulate substrate temperature 300-400 ℃, regulate substrate bias at-700-1000 V, substrate frame rotating speed, at 3-8rpm, carries out aura cleaning to surface treated inserted tool; After aura cleans and finishes, regulate substrate bias at 200-300V, substrate temperature 300-500 ℃, air pressure is in 1-3 * 10
-1pa, opens arc ion plating Zr target, controls Zr target current at 50-70A, bombards the Zr metal prime coat of 5-10 minute 50-100 nanometer thickness; After metal prime coat deposition finishes, by gas, control and pass into N
2and control air pressure at 1-2 Pa, substrate bias, at 100-200 V, Zr target current 50-80A, deposits the thick ZrN nitride of 100-300 nm transition layer; After nitride transition layer deposition finishes, open arc ion plating Zr target and AlTi alloys target, and control target current at 40-60A, open bipolar pulse magnetron sputtering Si target simultaneously, regulate electric current to 5-10A, then by gas control system, control nitrogen and oxygen flow, N
2and O
2pass into respectively 60-100 and 200-400 sccm
,air pressure is controlled at 2-4 Pa, the TiZrAlSiON nano-composite coating of deposition 1000 to 4000 nanometer thickness.
5. a kind of TiZrAlSiON nano composite super-hard coated cutting tool according to claim 1, is characterized in that: the mechanical property of compound coating is to have the ultrahigh hardness that surpasses 35 GPa, and the low-friction coefficient of 0.3 left and right is greater than the sticking power of 50N.
6. according to the desired a kind of TiZrAlSiON nano composite super-hard coated cutting tool of right 1, it is characterized in that: oxygen feedback assembly is accurately controlled the oxygen level of coating to 3-10 at.%.
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| CN113355630A (en) * | 2021-08-10 | 2021-09-07 | 北京航天天美科技有限公司 | Preparation method of aluminum alloy surface hardness coating |
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| CN114672786B (en) * | 2022-03-17 | 2023-04-28 | 赣州澳克泰工具技术有限公司 | High-temperature oxidation resistant self-lubricating multilayer coating cutter and preparation method thereof |
| CN115044866A (en) * | 2022-05-16 | 2022-09-13 | 烟台大学 | Multilayer gradient structure coating and preparation method thereof |
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